KR102778682B1 - Optical scanning device - Google Patents

Abstract

An optical scanning device according to one embodiment is disclosed. The optical scanning device may include a substrate, a gimbal including at least one coil, a reflector, a plurality of first elastomers connecting the substrate and the gimbal, a plurality of second elastomers connecting the gimbal and the reflector, and a plurality of magnetic assemblies, each of which includes an outer back iron disposed between the substrate and the gimbal, an inner back iron disposed between the gimbal and the reflector, and a magnet disposed between the outer back iron and the inner back iron.

Description

OPTICAL SCANNING DEVICE

The present disclosure relates to an optical scanning device.

An optical scanning device configured to reflect light incident from a light source and modulate the direction of the reflected light through rotational motion is being developed. For example, the optical scanning device can be manufactured using semiconductor technology and/or micro electro-mechanical system (MEMS) technology. For example, Patent Publication No. 10-2254538 discloses an optical scanning device. The background technology described above is possessed or acquired in the course of deriving the present disclosure and cannot necessarily be considered as a publicly known technology disclosed to the general public prior to the filing of the present disclosure.

One aspect of the present disclosure can provide an optical scanning device having improved productivity.

In one embodiment, an optical scanning device may include a substrate, a gimbal including at least one coil, a reflector, a plurality of first elastomers connecting the substrate and the gimbal, a plurality of second elastomers connecting the gimbal and the reflector, and a plurality of magnetic assemblies, each magnetic assemblies including an outer back iron disposed between the substrate and the gimbal, an inner back iron disposed between the gimbal and the reflector, and a magnet disposed between the outer iron and the inner back iron.

In one embodiment, the first back iron and the second back iron can be positioned to at least partially overlap the at least one coil.

In one embodiment, the substrate and the gimble can be manufactured by three-dimensional printing.

In one embodiment, the optical scanning device may further include a holder configured to support the reflector.

In one embodiment, the holder may include a first support disposed inside the gimble, a second support extending from the first support, and a third support connected to the second support and configured to support the reflector.

In one embodiment, the thickness of the first elastic body and the thickness of the second elastic body may be equal to or less than the thickness of the substrate and the thickness of the gimble, respectively.

In one embodiment, the at least one coil may include a first coil disposed on a first side of the gimble, and a second coil disposed on a second side of the gimble opposite the first side.

In one embodiment, an optical scanning device may include a substrate, a gimbal including at least one coil, a reflector, a plurality of first elastomers connecting the substrate and the gimbal, a plurality of second elastomers connecting the gimbal and the reflector, and a plurality of magnetic assemblies, each of which includes an external magnet disposed between the substrate and the gimbal, an internal magnet disposed between the gimbal and the reflector, and an intermediate magnet disposed between the external magnet and the internal magnet.

In one embodiment, the outer magnet and the inner magnet can be arranged to at least partially overlap the at least one coil.

In one embodiment, the outer magnet may have a first magnetization direction, the inner magnet may have a second magnetization direction opposite to the first magnetization direction, and the middle magnet may have a third magnetization direction intersecting the first and second magnetization directions, respectively.

According to one embodiment, an optical scanning device having a complex three-dimensional shape can be manufactured in a single printing process by three-dimensional printing.

The effects of the optical scanning device according to one embodiment are not limited to those mentioned above, and other effects not mentioned will be clearly understood by those skilled in the art from the description below.

The above and other aspects, features and advantages of specific embodiments of the present disclosure will become apparent from the following detailed description taken in conjunction with the accompanying drawings.
FIG. 1 is a perspective view of an optical scanning device according to one embodiment.
FIG. 2 is a plan view of an optical scanning device according to one embodiment.
FIG. 3 is a cross-sectional view along line 3-3 of the optical scanning device of FIG. 2 according to one embodiment.
FIG. 4 is a cross-sectional view of a gimble of an optical scanning device according to one embodiment.
FIG. 5 is a cross-sectional view of an optical scanning device according to one embodiment.
FIG. 6 is a plan view of an optical scanning device according to one embodiment.
FIG. 7 is a cross-sectional view along line 7-7 of the optical scanning device of FIG. 6 according to one embodiment.

Hereinafter, embodiments will be described in detail with reference to the attached drawings. However, since various modifications may be made to the embodiments, the scope of the patent application is not limited or restricted by these embodiments. It should be understood that all modifications, equivalents, or substitutes to the embodiments are included in the scope of the rights.

The terms used in the examples are for the purpose of description only and should not be construed as limiting. The singular expression includes the plural expression unless the context clearly indicates otherwise. In this specification, the terms "comprises" or "has" and the like are intended to specify the presence of a feature, number, step, operation, component, part or combination thereof described in the specification, but should be understood to not exclude in advance the possibility of the presence or addition of one or more other features, numbers, steps, operations, components, parts or combinations thereof.

Unless otherwise defined, all terms used herein, including technical or scientific terms, have the same meaning as commonly understood by a person of ordinary skill in the art to which the embodiments belong. Terms defined in commonly used dictionaries, such as those defined in common dictionaries, should be interpreted as having a meaning consistent with the meaning they have in the context of the relevant art, and will not be interpreted in an idealized or overly formal sense unless expressly defined in this application.

In addition, when describing with reference to the attached drawings, the same components will be given the same reference numerals regardless of the drawing numbers, and redundant descriptions thereof will be omitted. When describing an embodiment, if it is determined that a specific description of a related known technology may unnecessarily obscure the gist of the embodiment, the detailed description thereof will be omitted.

Also, in describing components of an embodiment, terms such as first, second, A, B, (a), (b), etc. may be used. These terms are only intended to distinguish the components from other components, and the nature, order, or sequence of the components are not limited by the terms. When it is described that a component is "connected," "coupled," or "connected" to another component, it should be understood that the component may be directly connected or connected to the other component, but another component may also be "connected," "coupled," or "connected" between each component.

Components included in one embodiment and components that have common functions will be described using the same names in other embodiments. Unless otherwise stated, descriptions made in one embodiment may be applied to other embodiments, and specific descriptions will be omitted to the extent of overlap.

FIG. 1 is a perspective view of an optical scanning device according to one embodiment. FIG. 2 is a plan view of an optical scanning device according to one embodiment. FIG. 3 is a cross-sectional view along line 3-3 of the optical scanning device of FIG. 2 according to one embodiment.

Referring to FIGS. 1 to 3, the optical scanning device (100) may be configured to reflect light (e.g., laser) incident from a light source (e.g., laser light source). The optical scanning device (100) may be configured to modulate the direction of the reflected light.

In one embodiment, the optical scanning device (100) may include a substrate (110). The substrate (110) may include a first substrate surface (110A) (e.g., a front surface of the substrate), a second surface (110B) opposite the first substrate surface (110A) (e.g., a back surface of the substrate), and a plurality of external side substrate surfaces (110C) between the first substrate surface (110A) and the second substrate surface (110B). The substrate (110) may substantially comprise a polyhedron.

In one embodiment, the substrate (110) can include a recess (112). The recess (112) can be formed in the first substrate surface (110A) toward the second substrate surface (110B). The recess (112) can include a plurality of side recess surfaces (112A). The plurality of side recess surfaces (112A) can intersect (e.g., are orthogonal) to the first substrate surface (110A). The recess (112) can include a bottom recess surface (112B). The bottom recess surface (112B) can be substantially parallel to the first substrate surface (110A) and/or the second substrate surface (110B).

In one embodiment, the substrate (110) can include at least one fixed member (114). The at least one fixed member (114) can at least partially protrude from the side recessed surface (112A).

In one embodiment, the substrate (110) can include a first material. For example, the first material can include at least one or a combination of a polymer, a metal, a ceramic, a glass, or a semiconductor, such as silicon.

In one embodiment, the substrate (110) can be made by three-dimensional printing.

In one embodiment, the substrate (110) can have a dimension (e.g., an X-direction dimension, a Y-direction dimension, and/or a Z-direction dimension) of about 1 mm to about 5 mm. In one embodiment, the substrate (110) can have a dimension (e.g., an X-direction dimension, a Y-direction dimension, and/or a Z-direction dimension) of about 1 cm or greater.

In one embodiment, the optical scanning device (100) can include a gimbal (120). The gimbal (120) can include a first gimbal surface (120A) (e.g., a gimbal front surface), a second gimbal surface (120B) opposite the first gimbal surface (120A), an outer side gimbal surface (120C) between the first gimbal surface (120A) and the second gimbal surface (120B), and an inner side gimbal surface (120D) opposite the outer side gimbal surface (120C) and between the first gimbal surface (120A) and the second gimbal surface (120B).

In one embodiment, the gimble (120) can include a second material. For example, the second material can include at least one or a combination of a polymer, a metal, a ceramic, a glass, or a semiconductor such as silicon.

In one embodiment, the second material can be identical to the first material. In one embodiment, the second material can be different from the first material.

In one embodiment, the gimble (120) can be made by three-dimensional printing. The gimble (120) can be made by a single printing together with the substrate (110).

In one embodiment, the gimble (120) can have a dimension (e.g., an X-direction dimension, a Y-direction dimension, and/or a Z-direction dimension) of about 1 mm to about 5 mm. In one embodiment, the gimble (120) can have a dimension (e.g., an X-direction dimension, a Y-direction dimension, and/or a Z-direction dimension) of about 1 cm or greater. The dimensions of the gimble (120) can be smaller than the dimensions of the substrate (110).

In one embodiment, the gimble (120) may be configured to rotate about one axis (e.g., the Y-axis). In an embodiment not shown, the gimble (120) may be configured to rotate about two axes (e.g., the X-axis and the Y-axis).

In one embodiment, the gimble (120) may include a coil (122) (e.g., a drive coil). Current (123) may flow through the coil (122). For example, when a magnetic field (B) in the +X direction is applied, the current (123) may flow counterclockwise about the Z-axis through the coil (122).

In one embodiment, the coil (122) may be placed on the second gimble surface (120B). In an embodiment not shown, the coil (122) may be placed on the first gimble surface (120A).

In one embodiment, the gimble (120) can include an opening (124). The opening (124) can be defined by an inner side gimble face (120D). The opening (124) can substantially comprise a polygon (e.g., a rectangle).

In one embodiment, the optical scanning device (100) may include a reflector (130). The reflector (130) may be configured to rotate about one axis (e.g., the Y-axis). In an embodiment not shown, the reflector (130) may be configured to rotate about two axes (e.g., the X-axis and the Y-axis).

In one embodiment, the reflector (130) may comprise a mirror. The reflector (130) may comprise a substantially circular or oval shape. In an embodiment not shown, the reflector (130) may comprise a polygon.

In one embodiment, the optical scanning device (100) may include a plurality of first elastic bodies (141, 142). Any one of the plurality of first elastic bodies (141, 142) may be configured to connect a fixed end (114) on the first side (e.g., a fixed end (114) having a +Y normal direction) and an outer side gimble surface (120C) on the first side (e.g., an outer side gimble surface (120C) having a -Y normal direction). Among the plurality of first elastic bodies (141, 142), another first elastic body (142) may be configured to connect a fixed end (114) on a second side opposite to the first side (e.g., a fixed end (114) having a -Y normal direction) and an outer side gimble surface (120C) on the second side (e.g., an outer side gimble surface (120C) having a +Y normal direction).

In one embodiment, the plurality of first elastic bodies (141, 142) can be configured to deform elastically. For example, the plurality of first elastic bodies (141, 142) can be configured to twist in one rotational direction (R) (e.g., the rotational direction about the Y-axis).

In one embodiment, the plurality of first elastic bodies (141, 142) may each include a spring. In an embodiment not shown, the plurality of first elastic bodies (141, 142) may include a beam.

In one embodiment, the plurality of first elastic bodies (141, 142) may be arranged substantially along the same line. For example, the plurality of first elastic bodies (141, 142) may be arranged along the Y-axis.

In one embodiment, the thickness of the plurality of first elastic bodies (141, 142) (e.g., beams) may be substantially equal to or less than the thickness of the substrate (110) and/or the thickness of the gimbal (120).

In one embodiment, the optical scanning device (100) may include a plurality of second elastic bodies (151, 152). One second elastic body (151) of the plurality of second elastic bodies (151, 152) may be configured to connect an inner side gimble surface (120D) of a first side (e.g., a +Y normal direction inner side gimble surface (120D)) and a first side (e.g., a -Y normal direction surface) of a reflector (130) or a first side (e.g., a -Y normal direction surface) of a holder (160). Among the plurality of second elastic bodies (151, 152), another second elastic body (152) may be configured to connect an inner side gimble surface (120D) of a second side opposite to the first side (e.g., an inner side gimble surface (120D) in the -Y normal direction) and a second side of the reflector (130) opposite to the first side of the reflector (130) or a second side of the holder (160) opposite to the first side of the holder (160) (e.g., a +Y normal direction surface).

In one embodiment, the plurality of second elastic bodies (151, 152) can be configured to be elastically deformable. For example, the plurality of second elastic bodies (151, 152) can be configured to twist in one rotational direction (R) (e.g., about the Y-axis). The plurality of second elastic bodies (151, 152) can be configured to twist about the same axis about which the plurality of first elastic bodies (141, 142) twist. In an embodiment not shown, the plurality of second elastic bodies (151, 152) can be configured to twist about a different axis (e.g., the X-axis) than the axis about which the plurality of first elastic bodies (141, 142) twist (e.g., the Y-axis).

In one embodiment, the plurality of second elastic bodies (151, 152) may each include a spring. In an embodiment not shown, the plurality of second elastic bodies (151, 152) may include a beam.

In one embodiment, the plurality of second elastic bodies (151, 152) may be arranged substantially on the same line. For example, the plurality of second elastic bodies (151, 152) may be arranged on the Y-axis. In an embodiment not shown, the plurality of second elastic bodies (151, 152) may be arranged on the X-axis.

In one embodiment, the thickness of the plurality of second elastic bodies (151, 152) (e.g., beams) may be substantially equal to or less than the thickness of the substrate (110) and/or the thickness of the gimbal (120).

In one embodiment, the optical scanning device (100) may include a holder (160). The holder (160) may be configured to support a reflector (130).

In one embodiment, the holder (160) may include a base (160A) supporting one face (e.g., a -Z normal direction face) of the reflector (130). The holder (160) may include a wall (160B) surrounding the other face (e.g., a side face or a radial direction face) of the reflector (130). The base (160A) and the wall (160B) may be seamlessly connected as one unit. The base (160A) and the wall (160B) may be in contact with at least a portion of the reflector (130).

In one embodiment, the holder (160) may include a third material. For example, the third material may include at least one or a combination of a polymer, a metal, a ceramic, a glass, or a semiconductor such as silicon.

In one embodiment, the third material can be identical to the first material and/or the second material. In one embodiment, the third material can be different from the first material and/or the second material.

In one embodiment, the holder (160) can be made by 3D printing. The holder (160) can be made by a single printing together with the substrate (110) and/or the gimbal (120).

In one embodiment, the optical scanning device (100) may include a first magnetic assembly (170A). The first magnetic assembly (170A) may be configured to electromagnetically couple with the coil (122).

In one embodiment, the first magnetic assembly (170A) may be positioned on a first side (e.g., the +X direction side) of the reflector (130).

In one embodiment, the first magnetic assembly (170A) can include a first outer back iron (171A). The first outer back iron (171A) can be positioned between a side recess face (112A) (e.g., a -X-normal direction side recess face (112A)) and an outer side gimble face (120C) (e.g., a +X-normal direction outer side gimble face (120C)).

In one embodiment, a first portion (e.g., an upper portion) of the first outer back iron (171A) can extend beyond the first gimble face (120A). A second portion (e.g., a lower portion) of the first outer back iron (171A), opposite the first portion, can extend beyond the second gimble face (120B). The second portion of the first outer back iron (171A) can extend beyond the coil (122).

In one embodiment, the first magnetic assembly (170A) can include a first inner back iron (172A). The first inner back iron (172A) can be positioned between one face of the reflector (130) (e.g., the +X-normal direction face) or one face of the holder (160) (e.g., the +X-normal direction face of the wall (160B)) and an inner side gimble face (120D) (e.g., the -X-normal direction inner side gimble face (120D)).

In one embodiment, a first portion (e.g., an upper portion) of the first inner back iron (172A) can extend beyond the first gimble face (120A). A second portion (e.g., a lower portion) of the first inner back iron (172A), opposite the first portion, can extend beyond the second gimble face (120B). The second portion of the first inner back iron (172A) can extend beyond the coil (122).

In one embodiment, the first magnetic assembly (170A) can include a first magnet (173A). The first magnet (173A) can have a first magnetized direction (M1). For example, the first magnetized direction (M1) can be in the -X direction.

In one embodiment, the first magnet (173A) can be positioned between the first outer back iron (171A) and the first inner back iron (172A). The first magnet (173A) can contact an inner surface of the first outer back iron (171A) and an inner surface of the first inner back iron (172A). The first magnet (173A) can be positioned adjacent to a second portion (e.g., a lower portion) of the first outer back iron (171A) and a second portion (e.g., a lower portion) of the first inner back iron (172A).

According to one embodiment, the magnetic flux of the first magnet (173A) can be concentrated substantially in the +Z-direction and the -X-direction through the first inner back iron (172A). The concentrated magnetic flux can pass at least partially through the coil (122) from the first inner back iron (172A) and lead to the first outer back iron (171A).

In one embodiment, the optical scanning device (100) may include a second magnetic assembly (170B). The second magnetic assembly (170B) may be configured to electromagnetically couple with the coil (122).

In one embodiment, the second magnetic assembly (170B) can be positioned on a second side (e.g., the -X direction side) opposite the first side (e.g., the +X direction side) of the reflector (130).

In one embodiment, the second magnetic assembly (170B) can include a second outer back iron (171B). The second outer back iron (171B) can be positioned between a side recess face (112A) (e.g., a +X-normal direction side recess face (112A)) and an outer side gimble face (120C) (e.g., a -X-normal direction outer side gimble face (120C)).

In one embodiment, a first portion (e.g., an upper portion) of the second outer back iron (171B) can extend beyond the first gimble face (120A). A second portion (e.g., a lower portion) of the second outer back iron (171B), opposite the first portion, can extend beyond the second gimble face (120B). The second portion of the second outer back iron (171B) can extend beyond the coil (122).

In one embodiment, the second magnetic assembly (170B) can include a second inner back iron (172B). The second inner back iron (172B) can be positioned between the other face of the reflector (130) (e.g., the -X normal direction face) or the other face of the holder (160) (e.g., the -X normal direction face of the wall (160B)) and an inner side gimble face (120D) (e.g., the +X normal direction inner side gimble face (120D)).

In one embodiment, a first portion (e.g., an upper portion) of the second inner back iron (172B) can extend beyond the first gimble face (120A). A second portion (e.g., a lower portion) of the second inner back iron (172B), opposite the first portion, can extend beyond the second gimble face (120B). The second portion of the second inner back iron (172B) can extend beyond the coil (122).

In one embodiment, the second magnetic assembly (170B) can include a second magnet (173B). The second magnet (173B) can have a second magnetization direction (M2). For example, the second magnetization direction (M1) can be in the -X direction. The second magnetization direction (M2) can be substantially the same as the first magnetization direction (M1).

In one embodiment, the second magnet (173B) can be positioned between the second outer back iron (171B) and the second inner back iron (172B). The second magnet (173B) can contact an inner surface of the second outer back iron (171B) and an inner surface of the second inner back iron (172B). The second magnet (173B) can be positioned adjacent to a second portion (e.g., a lower portion) of the second outer back iron (171B) and a second portion (e.g., a lower portion) of the second inner back iron (172B).

According to one embodiment, the magnetic flux of the second magnet (173A) can be concentrated substantially in the +Z-axis direction and the +X-axis direction through the second outer back iron (171B). The concentrated magnetic flux can pass at least partially through the coil (122) from the second outer back iron (171B) and lead to the first inner back iron (172B).

FIG. 4 is a cross-sectional view of a gimble of an optical scanning device according to one embodiment.

Referring to FIG. 4, an optical scanning device (100-1) (e.g., the optical scanning device (100) of FIGS. 1 to 3) may include a gimble (120-1) (e.g., the gimble (120) of FIGS. 1 to 3). The gimble (120-1) may include a first gimble surface (120A), a second gimble surface (120B), an outer side gimble surface (120C), and an inner side gimble surface (120D).

In one embodiment, the optical scanning device (100-1) may include a first coil (122A). The first coil (122A) may be disposed on the first gimble surface (120A).

In one embodiment, the optical scanning device (100-1) may include a second coil (122B). The second coil (122B) may be disposed on the second gimble surface (120B).

In one embodiment, one of the first coil (122A) and the second coil (122B) may be a coil for driving, and the other may be a coil for angular displacement sensing. The coil for angular displacement sensing may be a coil for measuring displacement of a magnet (e.g., the first magnet (173A) and/or the second magnet (173B) of FIGS. 1 to 3).

FIG. 5 is a cross-sectional view of an optical scanning device according to one embodiment.

Referring to FIG. 5, the optical scanning device (100-2) (e.g., the optical scanning device (100) of FIGS. 1 to 3 and/or the optical scanning device (100-1) of FIG. 4) may include a gimbal (120). The gimbal (120) may include a coil (122). The optical scanning device (100-2) may include a reflector (130). The optical scanning device (100-2) may include a holder (160-2) (e.g., the holder (160) of FIGS. 1 to 3).

In one embodiment, the holder (160-2) may include a plurality of supports (e.g., a first support (160-21), a second support (160-22), and a third support (160-23). The first support (160-21) may be disposed inside the gimbal (120). The second support (160-22) may extend in one direction (e.g., in the +Z direction) from the first support (160-21). The third support (160-23) may be disposed above the gimbal (120). The third support (160-23) may include a base (160A) connected to the second support (160-22). The third support (160-23) may include a wall (160B).

In one embodiment, the optical scanning device (100-2) may include a first magnetic assembly (170A-2) (e.g., the first magnetic assembly (170A) of FIGS. 1-3). The first magnetic assembly (170A-2) may include a first outer back iron (171A-2) (e.g., the first outer back iron (171A) of FIGS. 1-3). The first magnetic assembly (170A-2) may include a first inner back iron (172A-2) (e.g., the first inner back iron (172A) of FIGS. 1-3). The first magnetic assembly (170A-2) may include a first magnet (173A).

In one embodiment, a first portion (e.g., an upper portion) of the first outer back iron (171A-2) may not extend beyond a first gimble surface of the gimble (120) (e.g., the first gimble surface (120A) of FIGS. 1-3). The first portion of the first outer back iron (171A-2) may be positioned between the first gimble surface and the second gimble surface (e.g., the second gimble surface (120B) of FIGS. 1-3). The first portion of the first outer back iron (171A-2) may be positioned below the second gimble surface.

In an embodiment not shown, a first portion (e.g., an upper portion) of the first outer back iron (171A-2) may extend beyond a first gimble surface of the gimble (120) (e.g., the first gimble surface (120A) of FIGS. 1-3 ).

In one embodiment, a first portion (e.g., an upper portion) of the first inner back iron (172A-2) may not extend beyond a first gimble surface of the gimble (120) (e.g., the first gimble surface (120A) of FIGS. 1-3). The first portion of the first inner back iron (172A-2) may be positioned between the first gimble surface and the second gimble surface (e.g., the second gimble surface (120B) of FIGS. 1-3). The first portion of the first inner back iron (172A-2) may be positioned beneath the second gimble surface. The first portion of the first inner back iron (172A-2) may be positioned beneath the first support (160-21).

In one embodiment, the optical scanning device (100-2) may include a second magnetic assembly (170B-2) (e.g., the second magnetic assembly (170B) of FIGS. 1 to 3). The second magnetic assembly (170B-2) may include a second outer back iron (171B-2) (e.g., the second outer back iron (171B) of FIGS. 1 to 3). The second magnetic assembly (170B-2) may include a second inner back iron (172B-2) (e.g., the second inner back iron (172B) of FIGS. 1 to 3). The second magnetic assembly (170B-2) may include a second magnet (173B).

In one embodiment, a first portion (e.g., an upper portion) of the second outer back iron (171B-2) may not extend beyond a first gimble surface (e.g., the first gimble surface (120A) of FIGS. 1-3) of the gimble (120). The first portion of the second outer back iron (171B-2) may be positioned between the first gimble surface and the second gimble surface (e.g., the second gimble surface (120B) of FIGS. 1-3). The first portion of the second outer back iron (171A-2) may be positioned below the second gimble surface.

In one embodiment, a first portion (e.g., an upper portion) of the second inner back iron (172B-2) may not extend beyond a first gimble surface (e.g., the first gimble surface (120A) of FIGS. 1-3) of the gimble (120). The first portion of the second inner back iron (172B-2) may be positioned between the first gimble surface and the second gimble surface (e.g., the second gimble surface (120B) of FIGS. 1-3). The first portion of the second inner back iron (172B-2) may be positioned below the second gimble surface. The first portion of the second inner back iron (172B-2) may be positioned below the first support (160-21).

FIG. 6 is a plan view of an optical scanning device according to one embodiment. FIG. 7 is a cross-sectional view taken along line 7-7 of the optical scanning device of FIG. 6 according to one embodiment.

Referring to FIGS. 6 and 7, an optical scanning device (100-3) (e.g., the optical scanning device (100) of FIGS. 1 to 3, the optical scanning device (100-1) of FIG. 4, and/or the optical scanning device (100-2) of FIG. 5) may include a substrate (110). The substrate (110) may include a fixed end (114).

In one embodiment, the optical scanning device (100-3) can include a gimble (120-3) (e.g., gimble (120) of FIGS. 1 to 3 , gimble (120-1) of FIG. 4 , and/or gimble (120-2) of FIG. 5 ). The gimble (120) can include a substantially circular or oval shape. The gimble (120) can include a ring shape. The gimble (120) can include a first gimble surface (120A), a second gimble surface (120B), an outer side gimble surface (120C), and an inner side gimble surface (120D).

In one embodiment, the gimble (120) can be configured to rotate in a first rotational direction (R1) (e.g., about the Y-axis).

In one embodiment, the gimble (120) may include a coil (122). A current (123) may flow through the coil (122). For example, when a magnetic field (B) is applied in an oblique direction (e.g., +45 degree direction) between the +X direction and the +Y direction, the current (123) may flow clockwise about the Z-axis through the coil (122).

In one embodiment, the optical scanning device (100-3) may include a reflector (130). The reflector (130) may be configured to independently rotate in a first rotational direction (R1) (e.g., a rotational direction about the Y-axis) and a second rotational direction (R2) (e.g., a rotational direction about the X-axis).

In one embodiment, the optical scanning device (100-3) may include a plurality of first elastic bodies (141, 142). The plurality of first elastic bodies (141, 142) may be configured to twist in a first rotational direction (R1) (e.g., the rotational direction about the Y-axis).

In one embodiment, the optical scanning device (100-3) may include a plurality of second elastic bodies (151-3, 152-3) (e.g., the second elastic bodies (151, 152) of FIGS. 1 to 3). The plurality of second elastic bodies (151-3, 152-3) may be configured to twist in a second rotational direction (R2). The plurality of second elastic bodies (151-3, 152-3) may be configured to twist about an axis (e.g., an X-axis) that intersects (e.g., is orthogonal to) an axis (e.g., a Y-axis) about which the plurality of first elastic bodies (141, 142) twist. A plurality of second elastic bodies (151-3, 152-3) may be arranged on an axis (e.g., X-axis) that intersects (e.g., is orthogonal to) an axis (e.g., Y-axis) along which a plurality of first elastic bodies (141, 142) are arranged.

In one embodiment, the optical scanning device (100-3) may include a holder (160).

In one embodiment, the optical scanning device (100-3) may include a first magnetic assembly (170A-3) (e.g., the first magnetic assembly (170A) of FIGS. 1 to 3).

In one embodiment, the first magnetic assembly (170A-3) can include a first external magnet (171A-3). The first external magnet (171A-3) can be positioned between the substrate (110) and the external side gimble face (120C). The first external magnet (171A-3) can have a first magnetization direction (M11) (e.g., -Z direction).

In one embodiment, a first portion (e.g., an upper portion) of the first external magnet (171A-3) can extend beyond the first gimble face (120A). A second portion (e.g., a lower portion) of the first external magnet (171A-3), opposite the first portion, can extend beyond the second gimble face (120B). The second portion of the first external magnet (171A-3) can extend beyond the coil (122).

In one embodiment, the first magnetic assembly (170A-3) can include a first inner magnet (172A-3). The first inner magnet (172A-3) can be positioned between one face of the reflector (130) or one face of the holder (160) and the inner side gimble face (120D).

In one embodiment, the first inner magnet (172A-3) can have a second magnetization direction (M12). The second magnetization direction (M12) can be in a direction opposite to the first magnetization direction (M11) (e.g., in the +Z direction).

In one embodiment, a first portion (e.g., an upper portion) of the first inner magnet (172A-3) can extend beyond the first gimble face (120A). A second portion (e.g., a lower portion) of the first inner magnet (172A-3), opposite the first portion, can extend beyond the second gimble face (120B). The second portion of the first inner magnet (172A-3) can extend beyond the coil (122).

In one embodiment, the first magnetic assembly (170A-3) may include a first intermediate magnet (173A-3) (e.g., the first magnet (173A) of FIGS. 1-3 and/or the first magnet (173A) of FIG. 5).

In one embodiment, the first intermediate magnet (173A-3) can have a third magnetization direction (M13). The third magnetization direction (M13) can be a direction (e.g., a direction about 45 degrees between the +X direction and the +Y direction) that intersects (e.g., is orthogonal) to the first magnetization direction (M11) and the second magnetization direction (M12), respectively.

In one embodiment, the first intermediate magnet (173A-3) can be positioned between the first outer magnet (171A-3) and the first inner magnet (172A-3). The first intermediate magnet (173A-3) can contact an inner surface of the first outer magnet (171A-3) and an inner surface of the first inner magnet (172A-3). The first intermediate magnet (173A-3) can be positioned adjacent to a second portion (e.g., a lower portion) of the first outer magnet (171A-3) and a second portion (e.g., a lower portion) of the first inner magnet (172A-3).

In one embodiment, the first outer magnet (171A-3), the first middle magnet (173A-3) and the first inner magnet (172A-3) can be arranged in a Halbach array.

According to one embodiment, a first flux loop can be formed through the first intermediate magnet (173A-3), the first inner magnet (172A-3), the coil (122), and the first outer magnet (171A-3).

In one embodiment, the optical scanning device (100-3) may include a second magnetic assembly (170B-3) (e.g., the second magnetic assembly (170B) of FIGS. 1 to 3).

In one embodiment, the second magnetic assembly (170B-3) can include a second external magnet (171B-3). The second external magnet (171B-3) can be positioned between the substrate (110) and the external side gimble face (120C). The second external magnet (171B-3) can have a fourth magnetization direction (M21) (e.g., +Z direction).

In one embodiment, a first portion (e.g., an upper portion) of the second external magnet (171B-3) can extend beyond the first gimble face (120A). A second portion (e.g., a lower portion) of the second external magnet (171B-3), opposite the first portion, can extend beyond the second gimble face (120B). The second portion of the second external magnet (171B-3) can extend beyond the coil (122).

In one embodiment, the second magnetic assembly (170B-3) can include a second inner magnet (172B-3). The second inner magnet (172B-3) can be positioned between the other face of the reflector (130) or the other face of the holder (160) and the inner side gimble face (120D).

In one embodiment, the second inner magnet (172B-3) can have a fifth magnetization direction (M22). The fifth magnetization direction (M22) can be in a direction opposite to the fourth magnetization direction (M21) (e.g., -Z direction).

In one embodiment, a first portion (e.g., an upper portion) of the second inner magnet (172B-3) can extend beyond the first gimble face (120A). A second portion (e.g., a lower portion) of the second inner magnet (172B-3), opposite the first portion, can extend beyond the second gimble face (120B). The second portion of the second inner magnet (172B-3) can extend beyond the coil (122).

In one embodiment, the second magnetic assembly (170B-3) may include a second intermediate magnet (173B-3) (e.g., the second magnet (173B) of FIGS. 1 to 3 and/or the second magnet (173B) of FIG. 5).

In one embodiment, the second intermediate magnet (173B-3) can have a sixth magnetization direction (M23). The sixth magnetization direction (M23) can be a direction (e.g., a direction about 45 degrees between the +X direction and the +Y direction) that intersects (e.g., is orthogonal) to the fourth magnetization direction (M21) and the fifth magnetization direction (M22), respectively.

In one embodiment, the second intermediate magnet (173B-3) can be positioned between the second outer magnet (171B-3) and the second inner magnet (172B-3). The second intermediate magnet (173B-3) can contact an inner surface of the second outer magnet (171B-3) and an inner surface of the second inner magnet (172B-3). The second intermediate magnet (173B-3) can be positioned adjacent to a second portion (e.g., a lower portion) of the second outer magnet (171B-3) and a second portion (e.g., a lower portion) of the second inner magnet (172B-3).

In one embodiment, the second outer magnet (171B-3), the second middle magnet (173B-3) and the second inner magnet (172B-3) can be arranged in a Halbach array.

According to one embodiment, a second flux loop may be formed through the second intermediate magnet (173B-3), the first outer magnet (171A-3), the coil (122), and the first inner magnet (173A-3).

The embodiments of this document are intended to be illustrative and not restrictive. Various modifications may be made to the details of the present disclosure, including the appended claims and their equivalents. Any of the embodiment(s) described herein may be used in combination with any other embodiment(s) described herein.

Although the embodiments have been described with limited drawings as described above, those skilled in the art can apply various technical modifications and variations based on the above. For example, appropriate results can be achieved even if the described techniques are performed in a different order than the described method, and/or components of the described system, structure, device, circuit, etc. are combined or combined in a different form than the described method, or are replaced or substituted by other components or equivalents.

Therefore, other implementations, other embodiments, and equivalents to the claims are also included within the scope of the claims described below.

Claims (13)

substrate,
A gimble comprising at least one coil,
reflector,
A plurality of first elastic bodies connecting the substrate and the gimble,
A plurality of second elastic bodies connecting the above gimble and the above reflector, and
A plurality of magnetic assemblies each including an outer back iron disposed between the substrate and the outer side surface of the gimbal, an inner back iron disposed between the inner side surface of the gimbal and the reflector, and a magnet disposed between the outer back iron and the inner back iron.
An optical scanning device comprising: In paragraph 1,
An optical scanning device wherein the outer back iron and the inner back iron are arranged to at least partially overlap with the at least one coil. In paragraph 1,
The above substrate and the gimble are an optical scanning device manufactured by three-dimensional printing. In paragraph 1,
An optical scanning device further comprising a holder configured to support the reflector. In paragraph 4,
The above holder,
A first support body arranged inside the above gimble,
a second support extending from the first support, and
A third support connected to the second support and configured to support the reflector
An optical scanning device comprising: In paragraph 1,
An optical scanning device wherein the thickness of the first elastic body and the thickness of the second elastic body are equal to or smaller than the thickness of the substrate and the thickness of the gimbal, respectively. In paragraph 1,
At least one coil of the above,
A first coil arranged on the first side of the above gimble, and
A second coil arranged on the second side of the gimble opposite to the first side
An optical scanning device comprising: substrate,
A gimble comprising at least one coil,
reflector,
A plurality of first elastic bodies connecting the substrate and the gimble,
A plurality of second elastic bodies connecting the above gimble and the above reflector, and
A plurality of magnetic assemblies each including an outer magnet disposed between the substrate and the outer side surface of the gimbal, an inner magnet disposed between the inner side surface of the gimbal and the reflector, and an intermediate magnet disposed between the outer magnet and the inner magnet.
An optical scanning device comprising: In Article 8,
An optical scanning device wherein the outer magnet and the inner magnet are arranged to at least partially overlap with the at least one coil. In Article 8,
An optical scanning device wherein the outer magnet has a first magnetization direction, the inner magnet has a second magnetization direction opposite to the first magnetization direction, and the middle magnet has a third magnetization direction intersecting the first magnetization direction and the second magnetization direction, respectively. In paragraph 1,
An optical scanning device wherein the upper portion of said outer back iron and the upper portion of said inner back iron extend beyond the front surface of said gimble. In Article 8,
An optical scanning device wherein the upper portion of said outer magnet and the upper portion of said inner magnet extend beyond the front surface of said gimble. In clause 1 or clause 8,
Further comprising a first axis on which the plurality of first elastic bodies are arranged,
An optical scanning device wherein the plurality of magnetic assemblies are respectively arranged on both sides of the first axis.

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