KR20080044461A - Apparatus and method for loading a substrate - Google Patents

Abstract

The present invention relates to an apparatus for loading a substrate and a method thereof, and an object of the present invention is to provide a substrate loading apparatus which allows a robot arm to be relocated to a position of a cassette when the cassette is seated in the loader, thereby transferring the substrate. To provide a way. In order to achieve the above object, the substrate loading apparatus according to an embodiment of the present invention, the second sensor for detecting the position of the first sensor formed on both front edges of the cassette seated on the loader is formed at the end of the robot arm Robot; And a controller for driving the robot arm to transfer the substrate from the cassette after correcting the position of the robot arm according to the detection signal transmitted from the second sensor.

Description

Substrate loading device and method therefor {APPARATUS AND METHOD FOR LOADING A SUBSTRATE}

1 is an exemplary view showing a liquid crystal display process line in a typical clean room.

2 is an exemplary view showing a plan view of a general process equipment.

3 is an exemplary view of a general substrate loading apparatus.

Figure 4 is a configuration diagram of an embodiment of a substrate loading apparatus according to the present invention.

Figure 5 is an embodiment of a state of use of the substrate loading apparatus according to the present invention.

Figure 6 is a cross-sectional view of an embodiment of a robot and cassette applied to the present invention.

7 is a flowchart of one embodiment of a substrate loading method according to the present invention;

<Explanation of symbols for main parts of the drawings>

40: cassette 50: loader

60: robot 70: control unit

The present invention relates to an apparatus for loading a substrate and a method thereof, and more particularly, to a substrate loading apparatus and method for loading a substrate into the process equipment.

Liquid crystal displays are typical flat panel displays that display an image by adjusting the amount of light beams transmitted to correspond to an image signal. In particular, LCDs are becoming more and more widespread due to light weight, thinness, and low power consumption. As such, LCDs are used as display devices for office automation devices and notebook computers. have.

The liquid crystal display is divided into a liquid crystal panel and a backlight unit for irradiating light onto the liquid crystal panel. The liquid crystal panel and the backlight unit are fastened in an integrated form and are protected by a case so as not to be damaged by an external impact.

The liquid crystal panel is a thin film transistor substrate (TFT substrate) (hereinafter, simply referred to as a 'TFT substrate') that receives driving signals, and a color filter substrate (C / F substrate) including a color filter layer (hereinafter, simply referred to as a 'C / F substrate'). And a liquid crystal layer interposed between the TFT substrate and the C / F substrate.

The manufacturing process of the liquid crystal display device having the above structure is largely divided into three processes, a substrate manufacturing process, a liquid crystal panel manufacturing process, and a module process.

First, the substrate manufacturing process is divided into a process of manufacturing a TFT substrate using a cleaned glass substrate and a process of manufacturing a C / F substrate, each of which comprises a signal line and a plurality of thin films on the lower glass substrate. The process of manufacturing a transistor and a pixel electrode, and the C / F substrate manufacturing process refers to a process of sequentially manufacturing a black matrix (Blackmatirx), a color filter layer, and a common electrode (ITO) on the upper glass substrate.

Next, the liquid crystal panel process is a process of manufacturing a liquid crystal panel by bonding a TFT substrate and a C / F substrate and injecting a liquid crystal therebetween, wherein the liquid crystal panel process is again an alignment film forming process, a rubbing process, and a cell gap. It consists of many unit processes such as a cell gap forming process, an assembly process, a cell cutting process, a liquid crystal injection process, and a polarizing film attachment process.

Finally, the module process is a process of connecting the liquid crystal panel and the signal processing circuit part, and the module process is also made of a number of unit processes.

The manufacturing process of the liquid crystal display device consisting of a number of unit processes as described above is generally performed in a clean room, and a plurality of substrates, which have been completed in any one process equipment, are unattended after being loaded in a cassette. It is conveyed to another process equipment in a clean room by a conveying device such as an automatic guided vehicle (AGV).

That is, when the cassette on which the substrate is mounted is loaded (loaded) into one process equipment by an unmanned transport vehicle, the substrates in the cassette are introduced into the process equipment by a robot in the process equipment and go through the above process. The cassette into which the substrate is introduced into the process equipment is transferred to the last stage of the process equipment by an unmanned transport vehicle, and then unloaded from the process equipment by the unmanned transport vehicle when the substrates subjected to the process are reloaded. Transferred to other process equipment.

1 is an exemplary view showing a liquid crystal display process line in a typical clean room.

As shown in FIG. 1, a liquid crystal display processing line in a general clean room is an unmanned transport vehicle that is a means for moving a cassette containing a substrate to various process equipments 20 and each process equipment required for each process ( 9), a plurality of stockers for managing a plurality of cassettes and a rail 40 composed of a spot mark 41 installed at the bottom of a clean room for use as a recognition means for moving an unmanned carrier. It is configured to include (10).

Each of the process equipments 20 are installed in front of the rail 40 formed of a spot mark, and the driverless transport vehicle 9 moves each process equipment 20 along the rail 40. It serves to transport the cassette required for each process equipment (20).

That is, the unmanned transport vehicle 9 stops by moving to the position of each process equipment 20 on the rail 40 and then loads the cassette on which the substrate is loaded into each process equipment, or each Unloading from the process equipment.

Figure 2 is an exemplary view showing a plan view of a general process equipment, showing in more detail the process equipment 20 shown in FIG.

As shown in FIG. 2, the general process equipment 20 includes a loader 22a on which a substrate mounting cassette 30a loaded with dozens of substrates to be processed is placed, and a variety of substrates. An unloader on which a process execution line (EQ) 23 performing a process, a robot 21a for moving a substrate placed on a substrate mounting cassette to a process execution line, and an empty cassette 30b on which a substrate is not mounted are placed. And a robot 21b for transferring the substrate passed through the process 22b and the process execution line to the empty cassette 30b.

That is, the board | substrate mounting cassette 30a put into the loader 22a of the process equipment 20 by the unmanned carrier 9 is unloaded by the said unmanned carrier 9 by the empty cassette 30b again. 22b), the substrate having been processed is transferred to another process equipment by the unmanned transport vehicle 9 in the state of being reloaded.

3 is a view illustrating an example of a general substrate loading apparatus in which a substrate mounting cassette 30a is placed in the loader 22a illustrated in FIG. 2.

As shown in FIG. 3, a general substrate loading apparatus includes a loader 22a on which a substrate mounting cassette 30a is placed, and a robot 21a for transferring a substrate mounted on the substrate mounting cassette to a process performing line 23. Although not shown in the figure, and further includes a control unit for driving the clamp (22a-1) and the robot (21a) of the loader (23a).

The clamp 22a-1 and the clamp hole 22a-2 through which the clamp is moved are formed in the upper surface of the loader 22a on which the substrate mounting cassette 30a is placed.

The robot arm of the robot 21a substantially transfers the substrate 1 from the substrate mounting cassette 30a to the process execution line 23.

The controller performs a function of controlling the driving of the clamp 22a and the robot 21a. However, the clamp 22a and the robot 21a may be individually driven by separate controllers.

A process of transferring the substrate 1 from the cassette furnace 30a to the process execution line 23 by the general substrate loading apparatus having the above configuration is as follows.

First, when the board mounting cassette 30a is transferred by the unmanned transport vehicle 9 or the like and placed on the top of the loader 22a, the clamp 22a-1 is driven by the control unit, and the clamp 22a-1 is driven. The substrate mounting cassette 30a is aligned in position.

The controller drives the robot 21a, and the robot 21a transfers the substrate to the process execution line 23 by transferring the substrate 1 placed on the substrate mounting cassette 30a.

However, in the conventional substrate loading apparatus as described above, when the robot 21a is carried over the substrate 1, a case where the positions of the robot arm and the cassette of the robot 21a are not aligned may occur, This causes a problem that the substrate can be broken.

That is, when the substrate mounting cassette 22a is not aligned in the correct position due to a failure of the cylinder or the like that is responsible for the operation of the clamp 22a-1, the robot arm cannot transfer the substrate accurately. This may cause the robot arm to collide with the substrate. Moreover, since the use of the loader 22a having a problem in the operation of the clamp 22a-1 should be stopped, the problem of delaying the manufacturing process of the substrate may occur.

In addition, even when the clamp 22a-1 is normally operated by maintenance, the position of the robot arm must be readjusted so that the position of the substrate mounting cassette 30a and the position of the robot arm can be rearranged, so that the process accordingly Delay problems can occur.

Accordingly, an object of the present invention for solving the above problems is to provide a substrate loading apparatus and a method for transferring the substrate by correcting the position of the robot arm according to the position of the cassette when the cassette is seated in the loader will be.

In order to achieve the above object, the substrate loading apparatus according to an embodiment of the present invention, the second sensor for detecting the position of the first sensor formed on both front edges of the cassette seated on the loader is formed at the end of the robot arm Robot; And a controller for driving the robot arm to transfer the substrate from the cassette after correcting the position of the robot arm according to the detection signal transmitted from the second sensor.

In addition, the substrate loading method according to an embodiment of the present invention, the substrate loading method applied to a substrate loading apparatus including a robot moving a substrate mounted on a cassette and a control unit for controlling the robot, the robot arm of the robot Controlling, by the control unit, the robot to receive sensing information from first sensors formed at both front edges of the cassette seated at the loader; Analyzing, by the controller, a separation distance between the robot arm and the cassette and a degree of twisting using the sensing information; Correcting, by the controller, the position information of the robot arm according to the separation distance and the degree of twisting; And driving, by the control unit, the robot according to the corrected information so that the robot arm transfers the substrate from the cassette.

Hereinafter, exemplary embodiments of the present invention will be described in detail with reference to the accompanying drawings.

4 is a configuration diagram of an embodiment of a substrate loading apparatus according to the present invention. Figure 5 is a state diagram of use of one embodiment of the substrate loading apparatus according to the present invention. 6 is a cross-sectional view of an embodiment of a robot and a cassette to which the present invention is applied.

In the substrate loading apparatus according to the present invention, as shown in Figure 4, the first sensor is formed on both corners of the front and the cassette 40 seated on the loader 50, the agent for detecting the position of the first sensor 2 The sensor is formed at the end of the robot arm, and the robot arm is corrected according to the detection signal transmitted from the second sensor, and then the robot arm is driven to transfer the substrate from the cassette. It is configured to include a control unit 70 for.

The cassette 40 is for mounting and storing a plurality of substrates, and two first sensors 42a and 42b are formed at both sides of an upper side or a lower side of the front surface of the frame 41 constituting the cassette. .

The robot 60 is for carrying a cassette, and includes a robot arm 62 on which a substrate is placed and a main body 61 for supporting the robot arm. Second sensors 63a and 63b are formed at the ends of the robot arm 62. The second sensors 63a and 63b are used to detect distances from the first sensors 42a and 42b through communication with the first sensors 42a and 42b. The first and second sensors may have various shapes. It can be configured as. For example, the second sensors 63a and 63b may be configured as light emitters that emit light such as infrared rays or visible light, and the first sensors 42a and 42b may be configured as reflectors reflecting the light.

The control unit 70 analyzes the distance and twisting information between the robot arm 62 and the cassette 40 by using the sensing information received through the second sensor, and the robot arm transfers the substrate from the cassette. An input unit 73 for receiving an optimal distance and alignment information between the robot arm and the cassette, a storage unit 74 for storing the alignment information input through the input unit, and communication with the second sensor. After analyzing the position information of the robot arm using the interface 71 for receiving the detection information through the transmission information, the detection information transmitted through the interface and the alignment information stored in the storage device, the robot is operated according to the position information. A controller 72 for moving the robot arm from the cassette to an alignment position capable of transferring the substrate from the cassette and various information output by the controller It includes an output unit 75 for outputting so that the user can monitor.

The present invention including the configuration as described above is characterized in that a clamp and a separate configuration are not required for the loader 50 on which the cassette is seated.

Hereinafter, the operation method of the substrate loading apparatus according to the present invention as described above will be described in detail.

7 is a flowchart illustrating one embodiment of a substrate loading method according to the present invention.

First, when the cassette 40 carried by an unmanned carrier etc. is seated in the loader 50 (702), the robot arm 62 is moved to the front direction of a cassette by control of the control part 70. As shown in FIG. The second sensors 63a and 63b formed at the end of the robot arm 62 emit light, and detect the light reflected from the first sensors 42a and 42b and transmit the sensing information to the controller 70. (704).

In operation 704, the second sensor detects the light reflected from the first sensor and transmits the detected light to the controller 70. The second sensor is performed on two first sensors formed on the front left and right sides of the cassette. That is, the second sensors 63a and 63b emit light to each of the two first sensors 42a and 42b formed on the front left and right sides of the cassette as described above, and then detect the reflected light to control the detection information. To 70.

Receiving the two detection information as described above may be made by one second sensor formed on the robot arm 62, but in order to reduce unnecessary movement of the robot arm 62, the two formed on the left and right sides of the robot arm 62 It may be made by a second sensor. That is, the detection information on the light reflected from the sensor 42a formed on the left side of the first sensor is detected by the sensor 62a formed on the left side of the second sensor and transmitted to the controller 70, and the right side of the first sensor. The detection information regarding the light reflected from the sensor 42b formed at the second sensor may be detected by the sensor 62b formed at the right side of the second sensor and transmitted to the controller 70.

When two pieces of sensing information transmitted from the first sensors 42a and 42b of the cassette are transmitted to the control unit 70 by the above process, the control unit 70 uses the two pieces of sensing information on the loader 50. The alignment of the cassette 40 is analyzed (706). That is, the controller 70 analyzes the distance between the first sensor 42a on the left side and the robot arm 62 and the distance between the first sensor 42a on the right side and the robot arm 62 using the sensed information. The analysis information determines whether the cassette is seated on the loader 70 in which direction and how far in the ideal alignment state. In the analysis process, basic information stored in the storage 74 is used. The basic information may include the robot arm 62 and the position information of the cassette in which the robot arm 62 can carry the substrate.

When the current alignment state information of the cassette is extracted by the above analysis process, the controller 70 analyzes the position information of the robot arm 62 that can transfer the substrate in the alignment state of the cassette. In other words, the controller 70 corrects the positional information of the robot arm 62 in order to compensate for the deviation of the cassette from the optimum alignment state (708).

When the position information of the robot arm 62 is corrected, the controller 70 drives the robot 60 according to the correction value (710). By the driving, the robot arm 62 is inserted into the cassette 40 and then transferred to the process performing line 23 by transferring the substrate mounted on the cassette (712).

In the above description, the present invention describes a case where the substrate mounted on the cassette 40 is transferred to the process performing line 23 by way of example, but the present invention is not limited thereto. It can also be applied to a process of mounting a substrate on a cassette.

That is, in order to transfer the substrate which has passed through the process execution line 23 to another place, when the empty cassette is placed in the loader, the control unit 70 drives the robot arm 62 by the above-described process. Analyze the location information of. After the above analysis process is performed, the controller 70 drives the robot arm 62 of the robot 60 to unload the substrate from the process execution line 23. The controller 70 corrects the driving information of the robot arm 62 according to the analyzed position information of the cassette, so that the robot arm 62 on which the substrate is seated is inserted into the cassette so that the substrate can be seated in the cassette. can do.

As described above, the present invention does not need to use a clamp or the like to correct the positional shift of the cassette seated on the loader, and thus has an excellent effect of preventing the loader itself from being used due to a problem in clamp driving. .

Those skilled in the art will appreciate that various changes and modifications can be made without departing from the technical spirit of the present invention. Therefore, the technical scope of the present invention should not be limited to the contents described in the detailed description of the specification but should be defined by the claims.

Claims (7)

A robot having a second sensor formed at an end of the robot arm, the second sensor detecting a position of the first sensor formed at both front edges of the cassette seated on the loader; And And a controller for driving the robot arm to transfer the substrate from the cassette after correcting the position of the robot arm according to the detection signal transmitted from the second sensor. The method of claim 1, The first sensor, Substrate loading apparatus, characterized in that formed on both sides of the upper or lower portion of the front of the frame constituting the cassette. The method of claim 1, The second sensor, Substrate loading apparatus, characterized in that formed on at least one of both ends of the robot arm. The method according to any one of claims 1 to 3, The control unit, An input unit for receiving a distance and alignment information between the robot arm and the cassette from the user, wherein the robot arm can transfer the substrate from the cassette; A storage device for storing the sorting information input through the input device; An interface for receiving sensing information through communication with the second sensor; After analyzing the position information of the robot arm using the sensed information transmitted through the interface and the alignment information stored in the storage device, the robot may be driven according to the position information to transfer the substrate from the cassette. A controller to move the robot arm to an alignment position; And And an output unit configured to output various information output by the controller for the user to monitor. A substrate loading method applied to a substrate loading apparatus including a robot transferring a substrate mounted on a cassette and a control unit controlling the robot, Controlling the robot so that the second sensor formed on the robot arm of the robot receives the sensing information from the first sensors formed on both front edges of the cassette seated on the loader; Analyzing, by the controller, a separation distance between the robot arm and the cassette and a degree of twisting using the sensing information; Correcting, by the controller, the position information of the robot arm according to the separation distance and the degree of twisting; And And the control unit driving the robot according to the corrected information to cause the robot arm to transfer the substrate from the cassette. The method of claim 5, wherein Receiving the detection information of the step of controlling the robot, And two second sensors formed at the ends of the robot arm and two first sensors formed at both front edges of the cassette. The method according to claim 5 or 6, Analyzing the separation distance and the degree of distortion, And the alignment information of the robot arm and the cassette inputted by the user and the sensing information received from the second sensor.

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