KR20170087428A - apparatus for treating substrate equipped air kinfe - Google Patents

Abstract

The present invention relates to a substrate processing apparatus provided with an air knife, in particular, by disposing an air knife in the drying chamber adjacent to a partition separating a cleaning chamber and a drying chamber, a cleaning liquid present in the drying chamber is minimized, And an air knife capable of minimizing the deflection and the occurrence of deformation by arranging the air knife in parallel adjacent to the partition and vertically arranging the air knife.
The constituent unit constituting the substrate processing apparatus having the air knife according to the present invention comprises a cleaning chamber, a drying chamber connected to the cleaning chamber, a cleaning chamber disposed inside the cleaning chamber and the drying chamber for moving the substrate from the cleaning chamber toward the drying chamber And a through hole for allowing the substrate to be transported in the direction of the drying chamber from the cleaning chamber by the transporting means is formed in the drying chamber And a partition disposed adjacent to the partition and disposed in the drying chamber, one above and below the substrate to be transported by the transporting means, for spraying air so that air flows in the direction of the cleaning chamber through the through hole And an air knife.

Description

[0001] The present invention relates to a substrate processing apparatus having an air knife,

The present invention relates to a substrate processing apparatus provided with an air knife, in particular, by disposing an air knife in the drying chamber adjacent to a partition separating a cleaning chamber and a drying chamber, a cleaning liquid present in the drying chamber is minimized, And an air knife capable of minimizing the deflection and the occurrence of deformation by arranging the air knife in parallel adjacent to the partition and vertically arranging the air knife.

The operation of cleaning the substrate proceeds in such a manner as to inject (supply) a cleaning liquid (e.g., deionized water) toward the substrate surface in a chamber-type cleaning apparatus having a cleaning unit such as a fluid jet nozzle.

As described above, when the substrate is cleaned by the cleaning device, it is very important to dry the substrate while removing the remaining cleaning liquid on the substrate. For example, when the remaining cleaning liquid is present on the substrate side after the cleaning operation, water spots may be formed on the surface of the substrate, thereby deteriorating the cleaning quality.

Therefore, the drying operation is carried out in conjunction with the cleaning operation of the substrate. In such a drying operation, a method of removing and drying the remaining cleaning liquid by blowing out the remaining cleaning liquid with the drying air by using an air knife is widely known.

Korean Patent Registration No. 10-1020779 proposes an air knife device. The air knife in this prior art is installed inside the drying chamber of the substrate drying apparatus, and is installed in the center portion. The air knife performs an operation of spraying air to the substrate conveyed by the conveying means to remove the cleaning liquid.

However, since the air knife in the above-described prior art is disposed in the middle portion of the drying chamber, the cleaning liquid remaining on the substrate can be removed only after the substrate is transferred to the middle portion of the drying chamber.

As a result, since the substrate is transferred into the drying chamber in a state where the cleaning liquid remains, the cleaning liquid present in the drying chamber increases, thereby reducing the drying efficiency in the drying chamber have.

형상을 가지고, 에어 나이프의 팁(최 하단 끝부분)을 통하여 공기를 분사하여 상기 기판 상의 세정액을 한 쪽 방향으로 제거하기 위하여 상기 건조용 챔버 내에서 사선 방향으로 기울어진 상태로 배치된다.In addition, as shown in the prior art, a conventional general air knife has a cross-

And is arranged in an oblique direction in the drying chamber in order to eject the air through the tip (bottom end portion) of the air knife to remove the cleaning liquid on the substrate in one direction.

As a result, the conventional air knife has a disadvantage that the air knife is deflected in the oblique direction, and the deformation is caused thereby, and the tip of the air knife is deformed. Particularly, as the substrate becomes larger in size, the length of the air knife becomes longer and, as a result, the deformation of the air knife disposed in the oblique direction increases.

Korean Registered Patent No. 10-1020779 (published on March 03, 2011, entitled Air Knife Apparatus)

Disclosure of Invention Technical Problem [8] Accordingly, the present invention has been made keeping in mind the above problems occurring in the prior art, and it is an object of the present invention to minimize the amount of cleaning liquid present in the drying chamber by disposing an air knife in the drying chamber adjacent to a partition separating the cleaning chamber and the drying chamber It is an object of the present invention to provide a substrate processing apparatus having an air knife capable of improving the drying effect and minimizing the amount of deflection and the occurrence of deformation by arranging the air knife in parallel adjacent to the partition, .

The present invention also provides a substrate processing apparatus having an air knife capable of increasing the cleaning effect by constructing the upper air knife and the lower air knife to be coupled to the bracket so that air can be ejected from above and below the substrate The purpose is to provide.

In addition, the present invention is characterized in that the upper air knife and the lower air knife are coupled to the bracket in a state where the upper air knife and the lower air knife are separated from each other, the air injection angle is fixed and only the mutual interval is adjusted, It is an object of the present invention to provide a substrate processing apparatus having an air knife capable of reducing labor and cost.

Further, the present invention is characterized in that the upper air knife and the lower air knife are coupled to both sides of the upper air knife and the lower side air knife, so that the upper side air knife and the lower side air knife are separated from each other, And it is an object of the present invention to provide a substrate processing apparatus provided with an air knife capable of reducing the time, effort, and cost required for setting the substrate to pass through the center between the substrate and the substrate.

According to an aspect of the present invention, there is provided a substrate processing apparatus having an air knife, the apparatus including a cleaning chamber, a drying chamber connected to the cleaning chamber, and a cleaning chamber disposed inside the cleaning chamber and the drying chamber. Wherein the substrate is conveyed in the direction from the cleaning chamber toward the drying chamber, and the substrate is separated from the drying chamber to separate the cleaning chamber from the drying chamber, A partition plate disposed adjacent to the partition and disposed in the drying chamber so as to be positioned above and below the substrate conveyed by the conveying unit, The air that sprays air so that the air can flow And characterized by comprising comprises a.

형상을 가지고, 상기 일측면이 상기 칸막이에 평행하게 인접 배치되며, 상기 일측면의 하단을 통하여 상기 공기가 분사되는 것을 특징으로 한다.Here, the air knife has a cross section in which one side is formed of a vertical plane and the other side is formed of a vertical plane and an inclined plane

Wherein the one side surface is disposed adjacent to the partition in parallel with the other, and the air is injected through the lower surface of the one side surface.

Here, the air knife is coupled to the bracket at both ends in the longitudinal direction, and one of the upper air knife and the lower air knife is vertically and vertically coupled so that the gap between the upper air knife and the lower air knife .

Here, the bracket is formed with a see-through window for confirming an interval between the upper air knife and the lower air knife.

According to the substrate processing apparatus having the air knife of the present invention having the above-described technical problem and the solution, since the air knife is disposed in the drying chamber adjacent to the partition separating the cleaning chamber and the drying chamber, There is an advantage in that the drying efficiency can be improved by minimizing the cleaning liquid present.

In addition, since the air knife is disposed in parallel to the partition adjacent to the partition, but vertically disposed, the air knife is advantageously minimized in deflection and deformation.

In addition, since the upper air knife and the lower air knife are coupled to the bracket so that air can be sprayed from above and below the substrate, the cleaning effect can be further increased.

In addition, since the upper air knife and the lower air knife are coupled to the bracket in such a manner that the upper air knife and the lower air knife are spaced apart from each other and the air injection angle is fixed and only the mutual interval is adjusted, , The effort and cost can be reduced.

Further, in the present invention, since the upper window and the lower window are formed with a window for confirming the distance between the upper air knife and the lower air knife in the bracket to which both the upper and lower air knives are coupled, It is possible to reduce the time, effort, and cost required for setting the knife to pass through the center between the knives.

1 is a front view of a substrate processing apparatus provided with an air knife according to an embodiment of the present invention.
2 is a plan view of a substrate processing apparatus having an air knife according to an embodiment of the present invention.
FIGS. 3 to 5 are partial perspective views of the square portion shown in FIG. 2, viewed from various angles.
6 is a perspective view cut in the direction AA 'in FIG. 2 and viewed in the direction of the arrow.
FIG. 7 is a perspective view showing the partition of FIG. 6; FIG.
8 is a partial perspective view of one side of a partition in a cleaning chamber of a substrate processing apparatus having an air knife according to an embodiment of the present invention.
9 is a perspective view of an air knife constituting a substrate processing apparatus provided with an air knife according to an embodiment of the present invention.
10 is a schematic cross-sectional view of the air knife shown in Fig.
11 is a transparent perspective view of the air knife shown in Fig.
12 is a front view and a perspective view of an air knife constituting a substrate processing apparatus provided with an air knife according to an embodiment of the present invention, coupled to the bracket.
13 is a perspective view seen from both sides of the air knife coupled to the bracket shown in Fig.
FIG. 14 is a schematic view of a tip of an air knife through a through-window formed in the bracket shown in FIG.

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS A preferred embodiment of a substrate processing apparatus provided with an air knife according to the present invention having the above-described problems, solutions and effects as described above will be described in detail with reference to the accompanying drawings.

The sizes and shapes of the components shown in the drawings may be exaggerated for clarity and convenience. In addition, terms defined in consideration of the configuration and operation of the present invention may be changed according to the intention or custom of the user, the operator.

FIG. 1 is a front view of a substrate processing apparatus provided with an air knife according to an embodiment of the present invention, and FIG. 2 is a plan view.

1 and 2, a substrate processing apparatus 100 having an air knife according to an embodiment of the present invention includes a cleaning chamber 10, a drying chamber 30, a cleaning chamber 10, A transfer unit 50 disposed in the chamber 30, a partition 70 for blocking and separating the cleaning chamber 10 and the drying chamber 30 and a through hole And an air knife 90 for removing and drying the cleaning liquid adhering to the substrate 1 which passes through the nozzle plate (indicated by reference numeral 71 in FIG.

The cleaning chamber 10 corresponds to a space for performing a cleaning process on the substrate 1 to be transferred using deionized water or the like. The cleaning chamber 10 may be one process related to cleaning, but a plurality of processes may be performed. For example, at least one cleaning step is performed in the cleaning chamber 10 during organic cleaning, cleaning using a roll brush, cleaning using a high speed shower, cleaning using an air flow, cleaning using spray.

The substrate 1 subjected to the cleaning process in the cleaning chamber 10 is transferred to the drying chamber 30 by the transfer means 30 and is subjected to a drying process. Accordingly, the drying chamber 30 is connected to the cleaning chamber 10. Specifically, the drying chamber 30 is connected to the cleaning chamber 10 and spatially separated by the partition 70.

The substrate 1 is transferred from the inside 10a of the cleaning chamber 10 to the inside 30a of the drying chamber 30 while being transported in the direction of the arrows in FIGS. The process can be performed. To this end, a conveying means 50 is disposed in the interior 10a of the cleaning chamber and the interior 30a of the process chamber to transfer the substrate 1 in the direction of the arrow.

That is, the conveying means 50 is disposed in the inside of the cleaning chamber 10 and the inside of the drying chamber 30 so as to move the substrate 1 from the cleaning chamber 10 toward the drying chamber 30 . Through the transfer, the substrate 1 can be continuously subjected to a cleaning process and a drying process.

The transfer means 50 may be variously configured as long as it can transfer the substrate 1 in one direction. The conveying means 50 applied in the present invention is exemplified by a roller conveyor capable of conveying the substrate through continuous rotation of the rollers.

The cleaning chamber 10 and the drying chamber 30 are maintained in a spatially separated state. To this end, the partition 70 is disposed between the cleaning chamber 10 and the drying chamber 30 to block and separate the space. The partition 70 is installed to separate and block the cleaning chamber 10 and the drying chamber 30 so that the substrate 1 is transferred from the cleaning chamber 10 to the drying chamber 30 by the transfer means 50. [ (Shown in Figs. 6 and 8) which can be transported in the direction of the substrate 30 to be transported.

That is, the partition 70 is provided to spatially separate the interior 10a of the cleaning chamber 10 and the interior 30a of the drying chamber 30, A through hole 71 is formed so that the substrate 1 can be transferred from the inside 10a of the cleaning chamber 10 to the inside 30a of the drying chamber 30. [

The substrate 1 transferred into the drying chamber 30 is dried by the air knife 90. However, the air knife 90 in the present invention is not disposed at the center of the drying chamber 30, but is arranged close to the partition 70.

More specifically, the air knife 90 is disposed in the drying chamber 30 adjacent to the partition 70, one above and below the substrate 1 conveyed by the conveying means 50, Air is blown through the through holes 71 so that air can flow in the direction of the cleaning chamber 10. [

As described above, since the air knife 90 is disposed in the inside 30a of the drying chamber 30 in the vicinity of the partition 70 to blow air toward the through hole 71, The cleaning liquid remaining on the substrate 1 hardly enters the drying chamber 30 and is mostly flushed into the cleaning chamber. As a result, the drying effect in the drying chamber 30 increases.

The air knife 90 is disposed on the upper side and the lower side of the substrate 1 conveyed by the conveying means 50. 3, 5 and 12) and the lower air knife (indicated by 90 "in Figs. 3, 5 and 12) being).

The air injected from the upper air knife 90 'flows into the cleaning chamber 10 through the through holes 71 along the upper surface of the substrate 1 to remove the cleaning liquid adhering to the upper surface of the substrate And is pushed toward the cleaning chamber. The air injected from the lower air knife 90 "flows into the cleaning chamber 10 through the through hole 71 along the lower surface of the substrate 1, The cleaning liquid is pushed toward the cleaning chamber.

FIG. 9 is a perspective view of an air knife constituting a substrate processing apparatus having an air knife according to an embodiment of the present invention, FIG. 10 is a schematic cross-sectional view of the air knife shown in FIG. 9, Which is a transparent perspective view of the air knife.

형상을 가진다. 즉, 상기 에어 나이프(90)의 일측면(도 13에서 도면부호 90a로 표기됨)은 수직한 면으로만 형성되고, 타측면(90b)은 수직면(90b')과 경사면(90b")으로 형성된다.As shown in Figs. 9 to 11, the air knife 90 has a cross-

Shape. That is, one side of the air knife 90 (denoted by reference numeral 90a in FIG. 13) is formed only on the vertical surface, and the other side 90b is formed by the vertical surface 90b 'and the inclined surface 90b' do.

형상을 가진다. Specifically, the air knife 90 has a cross section in which one side surface 90a is formed as a vertical surface and the other side surface 90b is composed of a vertical surface 90b 'and an inclined surface 90b'

Shape.

The air knife 90 having the above-described cross-sectional shape is disposed such that the one side face 90a is adjacent to the partition 70 in parallel and the air is injected through the lower end of the one side face 90a. That is, the air knife 90 injects air through the lower end of the one side surface 90a or the lower end of the inclined surface 90b "constituting the other side surface 90b.

Since the air knife 90 is disposed in parallel to the partition 70, the load of the air knife 90 is generated in a vertical direction. Therefore, the lower end (tip) of the air knife 90 is not bent or deformed. The lower end portion of the air knife 90 is disposed adjacent to the through hole 71 and the air blown from the air knife 90 is jetted in a diagonal direction from the lower end portion of the air knife 90. [ So that it can flow in the direction of the cleaning chamber 10 through the passage hole 71. [

10, the air knife 90 includes a body 91 having a shape similar to that of the air knife as a whole, and a vertical cover (not shown) covering a vertical surface constituting the other side of the body 91 A first inclined lid 95 covering the inclined surface constituting the other side surface of the body 91 and a second inclined lid 97 covering the other side surface of the first inclined lid 95, do. The vertical lid 93 is attached with an air inlet 98 for introducing air supplied from the outside at a predetermined pressure into the inner space of the body 91.

The air knife 90 constructed as described above is disposed between the inclined surface constituting the other side surface of the body 91 and one side surface of the first inclined lid 95 and between the other surface of the first inclined lid 95 and the side surface of the first inclined lid 95, 2 air is sprayed in an oblique direction through one side of the inclined cover 97 (between the contact surfaces of the first inclined cover and the second inclined cover).

The structure of the air knife 90 will be described in more detail with reference to FIG. The upper air knife 90 'and the lower air knife 90' have the same structure, but different from the arrangement direction.

As shown in FIG. 11, the body 91 is provided with a first air distribution space part (not shown) formed along the longitudinal direction of the air knife 90 and corresponding to a space capable of distributing the inflow air horizontally 91a are formed. A first air distribution slit portion 91b is formed to distribute the air downward through the lower portion of the first air distribution space portion 91a.

A second air distribution space 95a corresponding to a space for distributing the air flowing through the first air distribution slit 91b in the horizontal direction is formed in the lower portion of the body 91 . The second air distribution space 95a is opened through an inclined surface constituting the other side of the body 91 but is closed by one side of the first inclined lid 95.

A first air injection slit part 91c is formed on an inclined surface constituting the other side surface of the body 91 below the second air distribution space part 95a. The first air injection slit portion 91c is closed by one side of the first inclined lid 95. Accordingly, the air distributed in the second air distribution space portion 95a is injected through the tip of the air knife in the oblique direction through the first air injection slit portion 91c.

The first inclined lid 95 is in surface contact with the inclined surface portion constituting the other side surface of the body so that the second air distribution space portion 95a can be closed, And a second air distribution slit portion 95b through which the air existing in the second air distribution slit portion 95a can be introduced into the inner space. A third air distribution space 97a corresponding to a space capable of distributing the air flowing through the second air distribution slit part 95b in the horizontal direction is formed inside the first inclined lid 95 do.

A second air injection slit part 95c is formed on the other side of the first inclined cover 95 below the third air distribution space part 97a. The second air injection slit portion 95c is closed by one side of the second inclined lid 97. Accordingly, the air distributed in the third air distribution space portion 97a is injected through the tip portion of the air knife in an oblique direction through the second air injection slit portion 95c.

As a result, the air introduced through the air inlet portion 98 is sprayed in an oblique direction through the tip of the air knife 90 through two paths (indicated by red solid lines) as shown in Fig. 11 . Specifically, the first path is such that the air introduced through the air inlet 98 passes through the first air distribution space 91a, the first air distribution slit 91b, the second air distribution space 95a, And the second path is a path through which the air introduced through the air inflow portion 98 flows into the first air distribution space portion 91a and the first air distribution slit portion 91b Through the second air distribution space portion 95a, the second air distribution slit portion 95b, the third air distribution space portion 97a, and the second air injection slit portion 95c.

The air knife 90 having the above structure is composed of the upper air knife 90 'and the lower air knife 90' 'as described above. And the air knife is disposed one on the upper side and one on the lower side.

The air knife 90 composed of the upper air knife 90 'and the lower air knife 90' is coupled to the bracket 80 at both ends in the longitudinal direction, as shown in FIGS.

When the substrate 1 passes between the upper air knife 90 'and the lower air knife 90' ', the upper air knife ejects air to the upper surface of the substrate, The gap g between the upper air knife 90 'and the lower air knife 90' needs to be adjusted as shown in FIG.

The air knife 90 according to the present invention is configured such that both longitudinal ends thereof are coupled to the bracket 80 so that any one of the upper air knife 90 'and the lower air knife 90' So that the gap g between the upper air knife 90 'and the lower air knife 90' is adjusted.

The bracket 80 is composed of a height adjusting bracket 81 and a fixing bracket 83. Both ends of the air knife 90 are coupled to the height adjusting bracket 81. One of the upper air knife 90 'and the lower air knife 90' is coupled to the height adjusting bracket 81 so as to be adjustable in height.

12 shows a state in which the lower air knife 90 "is fixed to the height adjusting bracket 81 of the upper air knife 90 'and the lower air knife 90", and only the upper air knife 90' And the height adjustment bracket 81 is vertically adjustably coupled to the height adjustment bracket 81. Therefore, the height adjusting bracket 81 has a height adjusting portion 81a at a portion where both side ends of the upper air knife are coupled.

Therefore, when the height g of the upper air knife 90 'is adjusted so that the gap g between the upper air knife 90' and the lower air knife 90 ' And the gap g between the upper air knife 90 'and the lower air knife 90' is set.

The air knife 90 having both ends connected to the height adjusting bracket 81 is disposed in the drying chamber 30 adjacent to the partition 70 by the fixing bracket 83. [ 12, the fixing bracket 83 is fixedly coupled to the height adjusting bracket 81 and is coupled to the structure in the drying chamber 30 by a coupling member.

The upper and lower air knife assembled brackets 80 having the spacing adjusted therein are inserted into a structure in the drying chamber 30 so that the substrate 1 can pass through the center between the upper air knife and the lower air knife Receiving plate 51).

Meanwhile, as described above, the gap g between the upper air knife 90 'and the lower air knife 90' 'needs to be adjusted as necessary, and the substrate is moved between the upper air knife 90 and the lower air knife 90' It is necessary to connect the bracket 80 to the support plate 51 so that the upper air knife 90 'and the lower air knife 90' The substrate 1 is normally moved between the upper air knife 90 'and the lower air knife 90' in the course of transporting the substrate in the direction of the arrow as shown in FIG. 27 It is necessary to confirm whether it passes.

26 to 28, a see-through window 85 is formed in the bracket 80 so that the upper air knife 90 'and the lower air knife 90' can be distinguished from each other. , The viewing window 85 is formed on the fixing bracket 83 so that the upper air knife 90 'and the lower air knife 90' can be seen.

28, in setting the gap g between the upper air knife 90 'and the lower air knife 90' ', the tip of the upper air knife 90' The space between the tips of the lower air knife 90 "can be confirmed through the transparent window 85 formed in the bracket 80. [

Since the space between the upper air knife 90 'and the lower air knife 90' 'can be checked through the viewing window 85, the substrate can be positioned between the upper air knife and the lower air knife 90' The bracket can be coupled to the support plate 51 so as to pass through the center of the support plate 51. [

The air knife 90 having the above-described arrangement structure and structural features is disposed adjacent to the partition 70. Hereinafter, the arrangement structure of the conveying means 50, the partition 70, and the air knife 90 will be described in detail with reference to FIGS. 1 to 8. FIG.

FIGS. 3 to 5 are partial perspective views of the squares shown in FIG. 2 from various angles, FIG. 6 is a perspective view cut in a direction AA 'in FIG. 2 and viewed in the direction of arrows, FIG. 8 is a partial perspective view of one side of a partition in a cleaning chamber of a substrate processing apparatus having an air knife according to an embodiment of the present invention. FIG.

2, the conveying means 50 includes a pair of support plates 51 disposed to face the both sides of the cleaning chamber 10 and the drying chamber 30, A shaft 53 to which both ends are rotatably mounted, and a roller 55 which is separated from the shaft 53 by a predetermined distance.

The pair of support plates 51 are arranged long in the conveying direction of the substrate 1 and the shaft 53 is rotatably mounted at both ends on the pair of support plates 51, (Not shown). The roller 55 is held in contact with the substrate 1 and feeds the substrate 1 in the direction of the arrow as the shaft 53 rotates.

The substrate 1 is transported in the direction of the arrow while being supported by the roller 55, but must be transported straight in the direction of the arrow. Therefore, guide rollers 57 are provided on both sides of the substrate 1 at predetermined intervals. 2 to 4, the guide roller 57 is mounted on the inner surface of the support plate 51 and is in contact with the side end of the substrate 1, And guided so as to be transported straight in the direction of the arrow.

The guide roller 57 should be able to correspond to the thickness and the size of the substrate 1. The guide roller 57 can move in the vertical direction (the height direction of the support plate 51) and the horizontal direction (the direction perpendicular to the inner side surface of the support plate 51) It is preferable to be bonded to the side surface.

Since the partition 70 and the air knife 90 are arranged in a diagonal direction rather than in a direction orthogonal to the conveying direction of the substrate 1, As shown in Figs. 2 to 4, further comprises auxiliary means, that is, an auxiliary shaft 53a and an auxiliary roller 55a.

1 to 5, since the partition 70 and the air knife 90 are disposed in a diagonal direction other than a direction orthogonal to the conveying direction of the substrate 1, the partition 70 Both ends of the shaft 53 can not be mounted on the pair of support plates 51 in the region where the air knife 90 and the air knife 90 are disposed. That is, both ends of the shaft 53 can not be mounted on the pair of support plates 51 because interference occurs with the partition 70 and the air knife 90 disposed in the oblique direction.

Therefore, in the area where the partition 70 and the air knife 90 are disposed, the auxiliary shaft 53a is installed to allow the substrate 1 to be stably transported. It is a matter of course that the roller 55 is engaged with the auxiliary shaft 53a. One end of the auxiliary shaft 53a is rotatably mounted on the support plate 51 and the other end is rotatably mounted on the auxiliary shaft support 21 (see Figs. 4, 6 and 7) .

The auxiliary shaft support 21 is installed on the seating plate 20 on which the partition 70 is seated. Therefore, the auxiliary shaft 53a on which the other end is mounted on the auxiliary shaft supporter 21 is shorter than the shaft 53.

2 to 4, the conveying unit 50 may further include a conveying unit for conveying the substrate 1 in a region where the partition 70 and the air knife 90 are arranged in the oblique direction, And further comprises an auxiliary roller 55a for stably advancing it.

The auxiliary roller 55a is formed on an auxiliary roller support 23 provided on the seating plate 20 to reinforce the substrate transfer by the roller coupled to the auxiliary shaft support 21. [ As a result, the substrate transfer in the region where the partition 70 and the air knife 90 are arranged in the diagonal direction is formed is formed on the auxiliary roller 53a and on the auxiliary roller support 23 By the auxiliary roller 55a.

As shown in Figs. 1 to 5, the partition 70 is disposed in an oblique direction with respect to the substrate transfer direction, and is seated on the seating plate 20 as shown in Figs. 6 and 7, Respectively.

The partition 70 is configured such that an upper partition 70a and a lower partition 70b are detachably coupled. The partition 70 formed by combining the upper partition 70a and the lower partition 70b includes a through hole 71 through which the substrate 1 can be transferred.

An upper partition spacer 70a 'is formed at both lower ends of the upper partition 70a and a lower partition spacer 70b' is formed at both upper ends of the lower partition 70b to be coupled to the upper partition spacer 70a ' . The partition 70 may include the through hole 71 by coupling the upper partition spacer 70a 'and the lower partition spacer 70b'.

It is a matter of course that the through hole 71 formed in the partition 70 is formed to have a size allowing the substrate 1 to pass therethrough. The cleaning liquid on the substrate 1 transferred to the drying chamber 30 in the cleaning chamber 10 through the through holes 71 passes through the air holes 90 ).

Therefore, it is preferable to prevent the cleaning liquid flowing along the wall of the partition 70 from falling on the substrate 1 during the passage of the substrate 1 through the through hole 71. Therefore, a cleaning liquid fall preventing prong 73 is formed on the wall surface of the partition 70 forming the inside 10a of the cleaning chamber 10 above the through hole 71. [

The cleaning liquid dropping prevention pin 73 is formed on the upper side of the through hole 71 to prevent the cleaning liquid flowing along the wall surface of the partition 70 from falling on the substrate 1 passing through the through hole 71 . The cleaning liquid flowing along the wall surface of the partition 70 moves leftward and rightward on the cleaning liquid dropping prevention tumbler 73 and drops to both sides of the through hole 71.

On the other hand, both side ends of the partition 70 contact the side wall of the chamber forming the cleaning chamber 10 and the drying chamber 30. Therefore, it is necessary to maintain airtightness between the side end of the partition 70 and the side wall of the chamber. That is, in order to prevent the cleaning liquid in the cleaning chamber 10 or the mist of mist from flowing into the drying chamber 30 through the fine gap between the side of the partition 70 and the side wall of the chamber, It is necessary to maintain airtightness between the side wall of the partition 70 and the side wall of the chamber.

8, a sealing member 75, which is a soft plate, is disposed between the wall side portion of the partition 70 forming the inside 10a of the cleaning chamber 10 and the inside side 10b of the cleaning chamber 10, Lt; / RTI > That is, the sealing material 75 is adhered to the wall side portion of the partition and then folded and attached to the inner surface 10b of the cleaning chamber. It is preferable that an overhang 77 is padded on the sealing material 75 for strong attachment of the sealing material 75.

Meanwhile, as described above, the partition 70 is seated and supported on the seating plate 20. Since the partition 70 is arranged in the diagonal direction, the seating plate 20 is also arranged in the oblique direction. An auxiliary shaft support 21 on which the auxiliary shaft 53a is formed and an auxiliary roller support 23 on which the auxiliary roller 55a is formed are formed on the seating plate 20 as described above do.

The air knife 90 is disposed on the upper side and the lower side of the substrate 1 which is disposed in the drying chamber 30 adjacent to the partition 70 and is transported by the transporting means 50, Air is blown to the cleaning chamber (10) through the opening (71).

1 to 5, the air knife 90 is disposed in a diagonal direction other than a direction orthogonal to the feeding direction of the substrate 1. Therefore, the partition 70 is also disposed in the oblique direction adjacent to the air knife 90.

The air knife 90 is disposed in a diagonal direction other than a direction orthogonal to the feeding direction of the substrate 1 in order to push out the cleaning liquid on the substrate 1 by pushing the cleaning liquid in an oblique direction by air injection. When the air knife 90 pushes the cleaning liquid in an oblique direction, the cleaning liquid on the substrate is removed by being pushed to one side of the substrate, thereby improving the drying efficiency.

3 and 4, the air knife 90 is composed of an upper air knife 90 'and a lower air knife 90 ", and both side ends thereof are coupled to the bracket 80 The air knife 90 is coupled to the height adjusting bracket 81 in such a manner that the opposite ends of the air knife 90 are adjusted in height and fixed to the height adjusting bracket 81, 83 to the support plate 51.

Since the air knife 90 is disposed in an oblique direction, the fixing bracket 83 is coupled to the height adjusting bracket 81 at an angle. The fixing bracket 83 is mounted on the support plate 51 and fixed thereto. As shown in FIG. 5, the fixed bracket 83 is formed with a see-through window 85 so that the upper air knife 90 'and the lower air knife 90' can be identified.

As described above, the air knife 90 is disposed in an oblique direction and ejects air so that the cleaning liquid on the substrate 1 passing through the through hole 71 can be pushed to one side of the substrate 1. [ Accordingly, the amount of the cleaning liquid remaining on the substrate 1 passing through the through hole 71 into the drying chamber 30 is reduced, thereby improving the drying efficiency.

Meanwhile, the substrate 1 is conveyed by the conveying means 50 in an inclined state in order to improve the cleaning efficiency in the cleaning chamber 10 and improve the drying efficiency in the drying chamber 30. Therefore, the conveying means 50 is formed to be inclined to one side as shown in FIG. That is, by configuring one end of the shaft to be mounted higher than the other end, the substrate 1 fed by the feeding means can be fed in a tilted state to one side.

Therefore, the cleaning liquid on the substrate 1 flows down to one side in the cleaning process and is pushed down to one side in the drying process by the air knife 90, so that the cleaning liquid remaining on the substrate 1 is minimized . As a result, cleaning and drying efficiency can be improved.

While the invention has been shown and described with reference to certain preferred embodiments thereof, it will be understood by those skilled in the art that various changes and modifications may be made without departing from the spirit and scope of the invention as defined by the appended claims. Accordingly, the true scope of the present invention should be determined by the following claims.

g: gap between upper air knife and lower air knife
1: substrate 10: cleaning chamber
10a: inside of cleaning chamber 10b: inside surface of cleaning chamber
20: seat plate 21: auxiliary shaft support
23: Auxiliary roller support 30: Drying chamber
30a: inside of the drying chamber 50: conveying means
51: support plate 53: shaft
53a: auxiliary shaft 55: roller
55a: Auxiliary roller 57: Guide roller
70: partition 70a: upper partition
70a ': upper partition spacer 70b: lower partition
70b ': Lower partition spacer 71: Through hole
73: cleaning liquid drop-off preventing surface 75: sealing material
77: Paddle 80: Bracket
81: height adjusting bracket 81a: height adjusting portion
83: Fixing bracket 85:
90: Air knife 90 ': Upper air knife
90 ": lower side air knife 90a: one side of the air knife
90b: other side 90b 'of the air knife: vertical side of the other side
90b ": inclined surface of the other side 91: body
91a: first air distribution space part 91b: first air distribution slit part
91c: first air injection slit part 93: vertical cover
95: first inclined cover 95a: second air distribution space
95b: second air distribution slit part 95c: second air injection slit part
97: second inclined cover 97a: third air distribution space
98: air inlet 100: substrate processing apparatus with air knife

Claims (2)

A cleaning chamber;
A drying chamber connected to the cleaning chamber;
Conveying means disposed inside the cleaning chamber and the drying chamber for conveying the substrate from the cleaning chamber toward the drying chamber;
A partition for separating and blocking the cleaning chamber and the drying chamber, wherein a passage hole is formed through which the substrate can be transferred from the cleaning chamber to the drying chamber in the direction of the drying chamber;
And an air knife disposed in the drying chamber adjacent to the partition and disposed one above and below the substrate to be transported by the transporting means so as to discharge air in the direction of the cleaning chamber through the through hole, , ≪ / RTI >
Wherein the partition is disposed in an oblique direction with respect to the conveyance direction of the substrate, and a seating plate is disposed in an oblique direction to seat the partition in an area where the partition and the air knife are disposed,
A cleaning liquid drop prevention jaw is formed on the wall surface of the partition forming the inside of the cleaning chamber so as to prevent the cleaning liquid flowing along the wall surface of the partition from falling on the substrate,
The conveying means includes a pair of support plates arranged to face opposite sides of the cleaning chamber and the drying chamber, a shaft rotatably mounted at both ends of the support plate, and a roller A guide roller mounted on the inside of the support plate and guiding a side end of the substrate to be guided and conveyed, and a guide shaft rotatably mounted on the support shaft at one end rotatably mounted on the support plate and the other end rotatable And an auxiliary roller formed on an auxiliary roller support provided on the seating plate for reinforcing the substrate conveyance by the roller coupled to the auxiliary shaft support,
The upper and lower air knives are vertically coupled to each other so that the gap between the upper air knife and the lower air knife is adjusted ,
The air knife has a cross section in which one side is composed of a vertical plane and the other side is composed of a vertical plane and an inclined plane

Wherein one side constituted by the vertical plane is disposed adjacent to the partition parallel to the diagonal direction with respect to the transfer direction of the substrate and the air is injected through the lower end of the one side. A substrate processing apparatus having a knife.
The method according to claim 1,
Wherein the bracket is formed with a sight window for confirming an interval between the upper air knife and the lower air knife.

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