KR20250130883A - Substrate introduction unit, substrate processing apparatus, and substrate processing method using the same - Google Patents

Abstract

The present invention relates to a substrate introduction unit, a substrate processing device, and a substrate processing method using the same, and more particularly, to a substrate introduction unit that introduces a substrate through an open cassette, a substrate processing device, and a substrate processing method using the same.
The present invention discloses a substrate introduction unit including a base plate (100) in which a return port (101) is formed; a stage portion (200) provided on a side of the cassette return space (S1) of the base plate (100) and supporting the cassette (10) such that the opening portion (11) faces the return port (101); an opening/closing door portion (300) installed on the base plate (100) to open/close the return port (101); and an alignment portion (400) provided on a side of the opening/closing door portion (300) facing the opening portion (11) to contact and align the substrates (1) loaded on the cassette (10).

Description

Substrate introduction unit, substrate processing apparatus, and substrate processing method using the same

The present invention relates to a substrate introduction unit, a substrate processing device, and a substrate processing method using the same, and more particularly, to a substrate introduction unit that introduces a substrate through an open cassette, a substrate processing device, and a substrate processing method using the same.

In general, substrate processing equipment is divided into a vertical batch substrate processing equipment that loads multiple substrates and performs substrate processing in batches, and a single wafer substrate processing equipment that introduces a single substrate and performs substrate processing.

In the case of a vertical batch substrate processing device, a front-opening unified pod (FOUP) or cassette is used to transport a certain number of substrates while loading them inside in order to quickly and efficiently transport a large number of substrates.

In addition, in order to introduce and remove a number of substrates loaded in such a cassette into and from a substrate processing module where substrate processing is performed, a substrate introduction unit such as a FIMS (Front-opening Interface Mechanical Standard) interface is provided between the return module and the substrate processing module.

Meanwhile, the conventional substrate introduction unit has a problem in that, in the process of transporting substrates through a cassette in which one side is open and a number of substrates are loaded and moved, the loaded substrates are not positioned in the correct position but are dislodged as the cassette moves, and thus the substrate transport through the subsequent transport robot is not performed precisely or the substrates are not stably supported on the transport robot.

In particular, the conventional substrate introduction unit has a problem in that the cassette is placed on the stage for substrate introduction and then accessed toward the opening/closing door, and the alignment of a large number of substrates loaded inside becomes misaligned due to inertia caused by the cassette moving and then stopping.

In addition, the conventional substrate introduction unit has a problem in that a large number of substrates are not aligned and misaligned during the process of loading the substrates into the cassette after substrate processing is completed.

The purpose of the present invention is to provide a substrate introduction unit capable of aligning substrates loaded and transported in a cassette, a substrate processing device, and a substrate processing method using the same, in order to solve the above-mentioned problems.

The present invention has been created to achieve the above-described object of the present invention, and the present invention is a substrate introduction unit of a substrate processing device including a cassette transfer unit (20) having an opening (11) formed on a side and a cassette transfer space (S1) formed for transferring a cassette (10) in which a plurality of substrates (1) are loaded in a vertical direction, a substrate transfer unit (30) adjacent to the cassette transfer unit (20) and having a substrate transfer space (S2) formed therein for transferring the substrates (1), and a substrate introduction unit (40) installed on an adjacent surface between the cassette transfer unit (20) and the substrate transfer unit (30) for introducing the substrates (1) from the cassette (10) in the cassette transfer space (S1) to the substrate transfer space (S2), the substrate introduction unit comprising: a base plate (100) having a transfer port (101) formed therein; A substrate introduction unit is disclosed, which includes a stage portion (200) provided on the side of the cassette return space (S1) of the base plate (100) and supporting the cassette (10) so that the opening portion (11) faces the return port (101); an opening/closing door portion (300) installed on the base plate (100) to open/close the return port (101); and an alignment portion (400) provided on the side of the opening/closing door portion (300) facing the opening portion (11) to contact and align the substrates (1) loaded on the cassette (10).

The above alignment part (400) can align the substrates (1) by contacting them according to the movement of the cassette (10) mounted on the stage part (200) while the opening/closing door part (300) is closed.

The stage section (200) may include a support plate (210) that extends from the base plate (100) toward the cassette return space (S1), a stage (220) that is provided to be able to move relative to the support plate (210) and on which the cassette (10) is mounted, and a stage drive section (230) that is installed on the support plate (210) and moves the stage (220).

The above alignment part (400) can align the substrates (1) by contacting them as the opening/closing door part (300) moves toward the cassette (10) while the cassette (10) is seated on the stage part (200).

The above opening/closing door part (300) may include a door plate (310) that comes into contact with and separates from the base plate (100) to open and close the return port (101), and a first driving part (340) that is provided on the substrate return space (S2) side of the door plate (310) and moves the door plate (310) forward and backward with respect to the base plate (100).

The above opening/closing door part (300) may include a door plate (310) that comes into contact with and separates from the base plate (100) to open and close the return port (101), and an alignment plate (320) that is provided on a surface of the door plate (310) facing the cassette return space (S1) and has the alignment part (400) protruding.

The above alignment plate (320) can have an exposed surface exposed to the cassette return space (S1) when the return port (101) is closed, so that the exposed surface forms a plane with the base plate (100).

The above alignment plate (320) may be formed with a groove (321) into which the alignment part (400) is inserted and installed.

The above alignment part (400) may be provided so as to protrude from the opening/closing door part (300) toward the cassette return space (S1).

The above alignment part (400) may include at least a portion of a resin material, including a contact portion that comes into contact with the substrate (1).

The above alignment part (400) may have at least a portion including a contact portion that comes into contact with the substrate (1) having a hardness lower than that of the substrate (1).

The above alignment unit (400) may include an alignment block (410) whose alignment surface facing the substrate (1) is formed as a plane.

The alignment part (400) may have an alignment groove (401) formed on a curved surface corresponding to the substrate (1) on the alignment surface facing the substrate (1).

The above alignment unit (400) may include a pair of alignment rods (420) that are installed parallel to each other and spaced apart from each other on a plane.

The above alignment part (400) is provided with a length in the vertical direction at the center of the opening/closing door part (300), and the thicknesses on both sides of the opening/closing door part (300) may be different from each other.

The above opening/closing door part (300) opens the return port (101) by linearly moving the door plate (310) for opening/closing the return port (101) in a first horizontal direction toward one side of the return port (101), and closes the return port (101) by linearly moving the door plate (310) in a second horizontal direction toward the other side of the return port (101), and the alignment part (400) may be formed such that the thickness in the first direction is thicker than the thickness in the second direction based on the center of the opening/closing door part (300).

The above alignment part (400) can be located on one side of the center of the opening/closing door part (300).

A substrate processing device is disclosed, which includes a cassette transport unit (20) having an opening (11) formed on the side and a cassette transport space (S1) formed for transporting a cassette (10) in which a plurality of substrates (1) are loaded in a vertical direction; a substrate transport unit (30) adjacent to the cassette transport unit (20) and having a substrate transport space (S2) formed inside for transporting the substrates (1); and a substrate introduction unit (40) installed on an adjacent surface between the cassette transport unit (20) and the substrate transport unit (30) to support the cassette (10) and to open and close a space between the cassette transport space (S1) and the substrate transport space (S2).

The above alignment unit (400) can align the substrates (1) that have been processed through the substrate return unit (30) and are stored in the cassette (10) by moving the return port (101) of the opening/closing door unit (300) to close.

The above alignment unit (400) can align the substrates (1) to be processed according to the movement of the cassette (10) while the cassette (10) containing the substrates (1) to be processed is placed on the stage unit (200).

In addition, the present invention discloses a substrate processing method including a cassette mounting step (S100) in which a cassette (10) containing a plurality of substrates (1) to be processed is mounted on the stage unit (200); a first substrate alignment step (S200) in which the substrates (1) are aligned by bringing them into contact with the alignment unit (400) according to the movement of the cassette (10) after the cassette mounting step (S100); a first substrate return step (S300) in which the return port (101) is opened through the opening/closing door unit (300) after the first substrate alignment step (S200) and the substrates (1) are returned to the substrate return space (S2); and a process step (S400) in which the substrates (1) introduced into the substrate return unit (30) through the first substrate return step (S300) are processed.

The above first substrate alignment step (S200) can maintain the closed state of the return port (101) through the opening/closing door part (300).

In addition, the present invention discloses a substrate processing method including a process step (S400) of processing the substrates (1); a second substrate return step (S500) of opening the return port (101) through the opening/closing door unit (300) after the process step (S400) and returning the processed substrates (1) to a cassette (10) mounted on the stage unit (200); and a second substrate alignment step (S600) of closing the return port (101) through the opening/closing door unit (300) after the second substrate return step (S500) and bringing the alignment unit (400) into contact with the substrates (1) to align the substrates (1).

The substrate introduction unit, substrate processing device and substrate processing method using the same according to the present invention have the advantage of improving the precision of substrate transport by performing alignment of a plurality of substrates loaded in an open cassette to position the substrates in the correct positions.

In particular, the substrate introduction unit, substrate processing device and substrate processing method using the same according to the present invention have the advantage of improving the precision of returning to the substrate return unit and the substrate processing unit by aligning the substrates that are twisted due to inertia while the cassette loaded with a plurality of substrates for substrate processing is moved toward the opening/closing door unit while seated on the stage unit and then stopped.

In addition, the substrate introduction unit, substrate processing device and substrate processing method using the same according to the present invention have the advantage of improving the subsequent return precision for substrates that have been processed by closing the return port and aligning a plurality of substrates loaded in a cassette after substrate processing is performed.

Figure 1 is a cross-sectional view schematically showing a substrate processing device according to the present invention.
Figure 2 is a perspective view showing the return space side of the substrate introduction unit according to the present invention.
Figure 3 is a plan view showing the appearance of the substrate introduction unit according to Figure 2.
Fig. 4 is a perspective view showing the substrate return space side of the substrate introduction unit according to Fig. 2.
Fig. 5 is an exploded perspective view showing the configuration of the door plate, alignment plate, and alignment section among the substrate introduction units according to Fig. 2.
FIG. 6A and FIG. 6B are drawings showing the before and after appearances of the substrates being aligned through the substrate introduction unit according to FIG. 2. FIG. 6A is a drawing showing the cassette being seated on the stage section, and FIG. 6B is a drawing showing the substrates being aligned when the cassette is moved and comes into contact with the alignment section.
FIG. 7a and FIG. 7b are drawings showing the before and after appearances of a substrate being aligned through a substrate introduction unit according to FIG. 2. FIG. 7a is a drawing showing a cassette being seated on a stage, and FIG. 7b is a drawing showing an appearance of an alignment portion being moved and substrates that come into contact with the alignment portion being aligned.
Figure 8 is a plan view showing another embodiment of an alignment section of a substrate introduction unit according to the present invention.
Fig. 9 is a plan view showing another embodiment of an alignment section of a substrate introduction unit according to the present invention.
Figure 10 is a flowchart showing a substrate processing method according to the present invention.

The substrate introduction unit, substrate processing device and substrate processing method using the same according to the present invention are described in detail with reference to the attached drawings.

The substrate processing device according to the present invention, as illustrated in FIG. 1, includes a cassette transport unit (20) having an opening (11) formed on a side thereof and a cassette transport space (S1) formed therein for transporting a cassette (10) in which a plurality of substrates (1) are loaded in a vertical direction; a substrate transport unit (30) having a substrate transport space (S2) formed therein for transporting the substrates (1) and an opening formed on an adjacent surface of the cassette transport unit (20); and a substrate introduction unit (40) installed in the opening, supporting the cassette (10), and opening and closing between the cassette transport space (S1) and the substrate transport space (S2).

In addition, the substrate processing device according to the present invention may additionally include a utility unit (70) installed at the rear end of the substrate transport unit (30) to provide various utilities to the substrate transport unit (30).

Here, the substrate (1) to be processed can be understood to mean all substrates, such as substrates used in display devices such as LEDs, LCDs, and OLEDs, semiconductor substrates, solar cell substrates, and glass substrates.

The substrates (1) can be loaded onto a cassette (10) so that a plurality of them can be transported at once, and the cassette (10) can be an open pod capable of loading the substrates (1) in a certain quantity.

In particular, the substrate (1) that is the target of substrate treatment according to the present invention can be processed simultaneously by vertically stacking a plurality of substrates (1) of 50 or more, and for this purpose, the substrates (1) can be stored and moved through a cassette (10) in which the plurality of substrates (1) are stacked.

The above cassette (10) is a transport means for vertically loading a plurality of substrates (1), and can transport the substrates (1) from the cassette transport space (S1) and deliver them to the substrate transport space (S2).

For example, the cassette (10) is configured to load substrates (1) and form an opening (11) that is open on one side, and a support rod for supporting the substrates (1) is formed so that the substrates (1) are supported in a plurality of positions spaced apart from each other in the vertical direction, and the opening (11) can be formed on at least one side.

At this time, the cassette (10) is placed on the stage (200) so that the opening (11) faces the return port (101), so that the substrate (1) can be introduced and removed through the opening (11).

The above cassette transport section (20) is configured to have a cassette transport space (S1) formed to transport a cassette (10) in which a plurality of substrates (1) are loaded in a vertical direction, and various configurations are possible.

The above cassette return unit (20) may be arranged in front of the substrate return unit (30) to receive a cassette (10) from the outside and temporarily store it, or may be configured to transfer the substrate to the substrate return unit (30).

To this end, the cassette return unit (20) may have a cassette return space (S1) formed therein for returning a cassette (10), and may return the cassette (10) through a cassette transfer robot (not shown), and a substrate introduction unit (40) described later may be installed in the opening to place the cassette (10) and transfer the substrates (1) located inside to the substrate return unit (30).

Meanwhile, the cassette return unit (20) may have an opening formed in order to install a substrate introduction unit (40) including a return port (101) described later at a position adjacent to the substrate return unit (30), and the return port (101) may be opened and closed through an opening/closing door unit (300) described later to transfer the substrates (1) inside the cassette (10) to the substrate return unit (30).

The above substrate return unit (30) is configured such that a substrate return space (S2) for returning the substrate (1) is formed inside and an opening is formed on the adjacent surface with the cassette return unit (20), and various configurations are possible.

The above substrate return unit (30) is formed with a substrate return space (S2) adjacent to the cassette return space (S1) through a return port (101), and can be positioned adjacent to the rear of the substrate cassette return unit (20).

At this time, the substrate return unit (30) has a substrate return space (S2) formed therein, and can be connected to the cassette return space (S1), i.e., the cassette (10), by opening or closing the return port (101) through the opening/closing door unit (300).

That is, the substrate return unit (30) has a substrate return space (S2) formed inside, and a transfer robot (50) that approaches the substrate introduction unit (40) and transfers the substrate (1) is installed, so that the substrate (1) can be returned from the cassette (10) of the return space (S1) to the substrate return space (S2), and further, the substrate (1) can be charged or discharged to a boat (60) installed in the same space.

The above substrate return unit (30) may be configured such that a boat (60) is installed in the substrate return space (S2) as described above and the substrate is charged and discharged on the boat (60). However, as another example, it may be applied as an independent space and configuration separate from the substrate loading unit where the substrate (1) is loaded and unloaded onto the boat (60). In this case, the substrate loading unit and the substrate return unit (30) may be partitioned through a separate gate.

The above substrate transport unit (30) can be equipped with a boat (60) that vertically loads substrates (1) delivered from the substrate cassette transport unit (20).

The above boat (60) may be configured to move up and down between the substrate transport space (S2) and the processing area inside the substrate processing unit (80) through an elevator drive unit provided in the substrate transport unit (30) on which a plurality of substrates (1) are loaded.

Accordingly, the above boat (60) can be formed with multiple loading sections so that multiple substrates (1) can be loaded in a vertical direction, and the substrates (1) can be charged and discharged through the transfer robot (50).

Meanwhile, it is also obvious that the aforementioned boat (60) can be installed in a substrate loading section (not shown) that is separate from the substrate return section (30).

Meanwhile, the substrate processing device according to the present invention may include a substrate processing unit (80) in which a boat (60) is inserted to carry out substrate processing by being placed above a substrate transport unit (30) and carrying a plurality of substrates (1).

At this time, the substrate processing unit (80) is equipped with a heater as a separate heating means and various process gases are injected inside, so that substrate processing can be performed in a state where a boat (60) loaded with a plurality of substrates (1) is introduced.

In this case, the substrate processing unit (80) may be installed so as to be connected to the substrate transport space (S2) above the substrate transport unit (30), and as another example, when the substrate transport unit (30) and the substrate loading unit are provided as separate compartments, the substrate processing unit (80) may be placed above the substrate loading unit.

The above utility unit (70) is installed at the rear end of the substrate return unit (30) and provides various utilities to the substrate return unit (30) and the substrate processing unit (80), and various configurations are possible.

That is, the utility unit (70) may be installed on the back surface of the substrate return unit (30) and configured to provide utility to the substrate return unit (30) and the substrate processing unit (80).

At this time, the utility unit (70) may be equipped with various components that supply process gas to the corresponding substrate processing unit (80), exhaust the substrate processing unit (80), and control the substrate return unit (30) and the substrate processing unit (80).

The above substrate introduction unit (40) is installed in an opening, supports a cassette (10), and may be configured to open and close a space between a cassette return space (S1) and a substrate return space (S2).

Hereinafter, the substrate introduction unit according to the present invention will be described in detail with reference to the attached drawings.

The substrate introduction unit according to the present invention, as illustrated in FIGS. 2 to 5, includes a base plate (100) installed in the opening and having a return port (101) formed therein; a stage portion (200) provided on a side of the cassette return space (S1) of the base plate (100) and supporting the cassette (10) such that the opening portion (11) faces the return port (101); an opening/closing door portion (300) installed on the base plate (100) to open and close the return port (101); and an alignment portion (400) provided on the opening/closing door portion (300) so as to protrude toward the opening portion (11) and to contact and align the substrates (1) loaded on the cassette (10).

The above base plate (100) is installed in an opening and has a return port (101) formed therein, and various configurations are possible.

That is, the base plate (100) is installed in an opening formed in a wall surface that divides the substrate return section (30) and the cassette return section (20), and a return section (101) is formed so that the cassette return space (S1) and the substrate return space (S2) can be connected or blocked by opening and closing through an opening/closing door section (300).

Accordingly, the base plate (100) can be installed in a shape corresponding to an opening in the wall surface between the substrate transport unit (30) and the cassette transport unit (20).

Meanwhile, unlike the above, the base plate (100) may be integrally formed on a wall surface that divides the substrate transport section (30) and the cassette transport section (20), and more specifically, may constitute at least a portion of the adjacent surface between the substrate transport section (30) and the cassette transport section (20).

The above stage section (200) is provided on the side of the cassette return space (S1) of the base plate (100) and is configured to support the cassette (10) so that the open section (11) faces the return port (101), and various configurations are possible.

That is, the stage section (200) is installed so as to protrude from the base plate (100) toward the cassette return space (S1) to support the cassette (10) and can induce movement forward and backward with respect to the return port (101) of the cassette (10).

For example, the stage unit (200) may include a support plate (210) that extends from the base plate (100) toward the cassette return space (S1), a stage (220) that is provided to be able to move relative to the support plate (210) and on which a cassette (10) is mounted, and a stage drive unit (230) that is installed on the support plate (210) and moves the stage (220).

In addition, the stage portion (200) may additionally include a guide portion that is provided on the support plate (210) and forms a movement path of the stage (220) and guides the movement of the stage (220).

The above support plate (210) is configured to extend from the base plate (100) toward the cassette return space (S1), and various configurations are possible.

That is, the support plate (210) can support a stage (220) and a stage driving unit (230) that are movably installed on the upper side, and can indirectly support a cassette (10) that is seated on the stage (220).

To this end, the support plate (210) may be provided to extend horizontally from the base plate (100) toward the cassette return space (S1) with a certain flat surface area.

At this time, the support plate (210) may be equipped with a stage driving unit (230) and a guide unit for driving the stage (220), thereby forming a movement path of the stage (220) and inducing the stage (220) to be driven.

The above stage (220) may be configured to be able to move relative to the support plate (210) and to have a cassette (10) mounted thereon.

That is, the stage (220) may be configured to move and be supported simultaneously through the stage driving unit (230) and guide unit (not shown) described later on the support plate (210).

To this end, the stage (220) is formed with a mounting surface for the cassette (10) to be positioned in the correct position, and is supported by a guide portion while being connected to the stage drive portion (230) on one side through a connection block (250) and can be guided for linear movement.

Accordingly, the stage (220) can be linearly driven forward and backward to move closer to or further away from the return port (101) through the stage driving unit (230) described later, and when the cassette (10) on which the substrate (1) to be initially processed is loaded is placed, the stage moves toward the return port (101) to induce the cassette (10) to move closer to the alignment unit (400), and further facilitates removal of the substrate (1) from the cassette (10).

In addition, the stage (220) can be moved linearly to the opposite side of the return port (101), i.e., to the rear, to transport a cassette (10) loaded with a processed substrate (1) to the outside, or to prepare a cassette (10) loaded with a substrate to be processed (1) to be settled.

The above stage driving unit (230) is installed on the support plate (210) and is configured to move the stage (220), and various configurations are possible.

At this time, the stage driving unit (230) may be configured in any manner that allows the stage (220) and the cassette (10) mounted on the stage (220) to move forward and backward. For example, as shown in FIGS. 2 and 3, a cylinder may be applied, or a separate motor may be applied.

Meanwhile, the stage driving unit (230) can be fixedly installed to the support plate (210) through a fixing jig (240) to generate power, and can be connected to the stage (220) through a connecting block (250) connected to the end of the cylinder to transmit power.

The above guide portion is provided on the support plate (210) and forms a movement path of the stage (220) and guides the movement of the stage (220). A linear guide that supports the stage (220) and guides the linear movement of the stage (220) can be applied.

The above opening/closing door part (300) is installed on the base plate (100) and is configured to open and close the return port (101), and various configurations are possible.

For example, the above-described opening/closing door part (300) may include a door plate (310) that contacts and separates from the base plate (100) to open and close the return port (101), as shown in FIGS. 3 and 4, and a first driving part (340) that is provided on the substrate return space (S2) side of the door plate (310) and moves the door plate (310) forward and backward with respect to the base plate (100).

In addition, the above-mentioned opening/closing door part (300) may additionally include an alignment plate (320) provided on the surface of the door plate (310) facing the cassette return space (S1) and having an alignment part (400) protruding therefrom.

In addition, the above-mentioned opening/closing door part (300) may include a second driving part (330) that linearly moves the door plate (310) that has been retracted from the return port (101) laterally through the first driving part (340) to completely open the return port (101).

The above door plate (310) is configured to open and close the return port (101) by contacting and separating from the base plate (100), and various configurations are possible.

For example, the door plate (310) may be arranged on the substrate return space (S2) side with respect to the base plate (100), and may be configured to move forward and backward toward the base plate (100) through the first driving unit (340), and move laterally toward the base plate (100) through the second driving unit (330) to open and close the return port (101).

To this end, the door plate (310) may be provided with a shape corresponding to the return port (101) and having a larger area than the return port (101), and may be closed by approaching the return port (101) through the first driving unit (340) and contacting the base plate (100) at the edge of the return port (101).

At this time, the door plate (310) may include a separate sealing member, such as an O-ring, on the contact surface to ensure complete sealing of the return port (101).

The above alignment plate (320) is provided on the surface of the door plate (310) facing the cassette return space (S1) and has an alignment portion (400) protruding, and various configurations are possible.

That is, the alignment plate (320) is configured such that the alignment part (400) described below is installed on one side and the other side is installed in a joint manner to the door plate (310), and the installation surface for installing the alignment part (400) can be configured to protrude from the door plate (310).

In particular, the alignment plate (320) can be installed on the door plate (310) that opens and closes the return port (101) to guide the alignment part (400) to be positioned at an appropriate position for contacting and aligning the substrate (1), and for this purpose, the alignment part (400) can be designed so that the exposed surface exposed to the cassette return space (S1) when the return port (101) is closed so that it protrudes toward the substrate (1) and forms a plane with the base plate (100).

In addition, the alignment plate (320) may be formed with a groove (321) into which the alignment part (400) is inserted and installed, and at least a portion of the alignment part (400) may be inserted and installed into the groove (321), thereby enabling stable installation of the alignment part (400) in the correct position.

Meanwhile, the alignment plate (320) may be formed of a metal material having a certain rigidity, like the door plate (310) described above, and as another example, may be manufactured of a material corresponding to the alignment part (400) described below, and may be manufactured of a material having a lower hardness than the substrate (1) so as to minimize damage to the substrate (1) when it comes into contact with the resin-based substrate (1).

The above first driving unit (340) is provided on the substrate return space (S2) side of the door plate (310) and is configured to move the door plate (310) forward and backward with respect to the base plate (100), and various configurations are possible.

For example, the first driving unit (340), as illustrated in FIG. 4, may include a driving cylinder (341) coupled to the rear of the door plate (310) to move the door plate (310) forward and backward, a first moving block (343) that supports and is installed to move together with the movement of the door plate (310) to the side through the second driving unit (330), and a first driving guide (342) that guides the movement of the door plate by guiding the movement of the first moving block (343).

The above second driving unit (330) is configured to completely open the return port (101) by linearly moving the door plate (310) that has been retracted from the return port (101) laterally through the first driving unit (340), and various configurations are possible.

For example, the second driving unit (330) may include, as illustrated in FIG. 4, a motor unit (332) that is installed and coupled to the base plate (100) to generate power, a second moving block (331) that is connected to a driving rod that is connected at one end to the motor unit (332) and has the other end connected to the door plate (310) to linearly move the door plate (310) according to the rotation of the driving rod through the motor unit (332), and a second driving guide (333) that is connected to the second moving block (331) to guide the linear movement of the second moving block (331) and thereby guide the linear movement of the door plate (310).

Accordingly, the opening/closing door part (300) can open the return port (101) by linearly moving the door plate (310) in a first horizontal direction toward one side of the return port (101) through the second drive unit (330) while the door plate (310) is retracted from the return port (101) through the first drive unit (340), and can close the return port (101) by moving the door plate (310) forward toward the return port (101) through the first drive unit (340) while the door plate (310) is linearly moved in a second horizontal direction toward the other side of the return port (101) through the second drive unit (330).

The above alignment part (400) is configured to protrude toward the opening part (11) of the opening/closing door part (300) and contact the substrates (1) loaded in the cassette (10) to align the substrates (1), and various configurations are possible.

For example, the alignment unit (400) can align the substrates (1) by contacting them according to the movement of the cassette (10) mounted on the stage unit (200) while the opening/closing door unit (300) is closed.

That is, as shown in FIGS. 6a and 6b, the alignment unit (400) can align the substrates (1) by contacting the side surfaces of a plurality of substrates (1) exposed through the opening (11) of the cassette (10) as the stage (220) moves forward while the opening/closing door unit (300) is closed and in a stationary state and the cassette (10) loaded with the substrates (1) to be processed is seated on the stage unit (200).

Meanwhile, as another example, the alignment unit (400) may align the substrates (1) by contacting them as the opening/closing door unit (300) moves toward the cassette (10) while the cassette (10) is seated on the stage unit (200), as shown in FIGS. 7a and 7b.

More specifically, the alignment unit (400) moves toward the cassette (10) by moving the door plate (310) forward as the return port (101) is closed through the opening/closing door unit (300) in a state where substrates (1) for which substrate processing has been completed are loaded on a cassette (10) placed on the stage unit (200), and the alignment unit (400) can align the substrates (1) by contacting the sides of a plurality of substrates (1) exposed through the opening unit (11).

The above alignment part (400) is configured to align a plurality of substrates (1) by contacting them, and at least a portion thereof, including the contact portion that contacts the substrate (1), may include a resin material to prevent damage to the substrate (1).

That is, at least a portion of the alignment portion (400), including the contact portion that comes into contact with the substrate (1), can be formed to have a lower hardness than the substrate (1).

The above alignment unit (400) may be an alignment block (410) having an alignment surface facing the substrate (1) formed as a plane, as illustrated in FIG. 3, and having lengths corresponding to the vertical direction to simultaneously align a plurality of substrates (1).

In addition, as another example, the alignment part (400) may have an alignment groove (401) formed on a curved surface corresponding to the substrate (1) on the alignment surface facing the substrate (1), as shown in FIG. 8, and at this time, the alignment groove (401) may have a curvature corresponding to the circular substrate (1).

In addition, as another example, the alignment unit (400) may include a pair of alignment rods (420) that are spaced apart from each other on a plane and installed in parallel, as illustrated in FIG. 9, and at least a portion of the substrate (1) may be inserted between the pair of alignment rods (420) that are spaced apart from each other, thereby inducing the substrate (1) to be aligned in the correct position.

At this time, the alignment rod (420) can be applied in any shape such as a circle, polygon, or ellipse on a plane.

In addition, the alignment part (400) is provided with a length in the vertical direction at the center of the opening/closing door part (300), and the thicknesses on both sides can be formed differently based on the center of the opening/closing door part (300).

More specifically, the alignment part (400) may be formed so that the thickness in the first direction, which is the opening direction of the aforementioned opening/closing door part (300), is thicker than the thickness in the second direction, based on the center of the opening/closing door part (300).

Furthermore, the alignment part (400) may be located on one side with respect to the center of the opening/closing door part (300), and may be installed at a position that is biased to one side with respect to the center of the opening/closing door part (300).

Hereinafter, a substrate processing method using a substrate processing device according to the present invention will be described in detail with reference to the attached drawings.

The substrate processing method according to the present invention, as illustrated in FIG. 10, includes a cassette mounting step (S100) in which a cassette (10) containing a plurality of substrates (1) to be processed is mounted on the stage unit (200); a first substrate alignment step (S200) in which the substrates (1) are aligned by bringing them into contact with the alignment unit (400) as the cassette (10) moves after the cassette mounting step (S100); a first substrate transport step (S300) in which the transport port (101) is opened through the opening/closing door unit (300) after the first substrate alignment step (S200) and the substrates (1) are transported to a substrate transport space (S2); and a process step (S400) in which the substrates (1) introduced into the substrate transport unit (30) after the first substrate transport step (S300) are processed.

In addition, the substrate processing method according to the present invention includes, as illustrated in FIG. 10, a process step (S400) of processing the substrates (1) introduced into the substrate return unit (30); a second substrate return step (S500) of opening the return port (101) through the opening/closing door unit (300) after the process step (S400) and returning the processed substrates (1) to a cassette (10) mounted on the stage unit (200); and a second substrate alignment step (S600) of closing the return port (101) through the opening/closing door unit (300) after the second substrate return step (S500) and bringing the alignment unit (400) into contact with the substrates (1) to align the substrates (1).

In the above cassette mounting step (S100), a cassette (10) containing a plurality of substrates to be processed (1) can be mounted on the stage section (200).

That is, the cassette mounting step (S100) may be a step in which a cassette (10) containing substrates (1) requiring processing is mounted and positioned on a stage (220).

The above first substrate alignment step (S200) may be a step of aligning the substrates (1) by bringing them into contact with the alignment unit (400) according to the movement of the cassette (10) after the cassette mounting step (S100).

For example, in the first substrate alignment step (S200), the cassette (10) mounted on the stage (220) is moved to the front side toward the alignment unit (400) through the stage driving unit (230), so that the side surfaces of a plurality of substrates (1) exposed through the opening (11) come into contact with the alignment unit (400), thereby allowing the substrates (1) to be aligned.

Meanwhile, in this process, the first substrate alignment step (S200) can maintain the closed state of the return port (101) through the opening/closing door part (300).

The above first substrate return step (S300) may be a step of opening the return port (101) through the opening/closing door part (300) after the first substrate alignment step (S200) and returning the substrates (1) to the substrate return space (S2).

For example, in the first substrate return step (S300), after alignment of the substrates (1) is performed, the return port (101) is opened by retracting the opening/closing door part (300) and linearly moving sideways, and the substrates (1) placed in the cassette (10) position through the aforementioned transfer robot (50) can be placed in the boat (60) in the substrate return space (S2).

The above process step (S400) is a step for processing substrates (1) introduced into the substrate transport unit (30), and a boat (60) containing a plurality of substrates (1) is raised into the substrate processing unit (80) so that a plurality of substrates (1) can be processed in batches under various temperatures, pressures, and gas atmospheres for the process.

The above second substrate return step (S500) may be a step of opening the return port (101) through the opening/closing door unit (300) after the process step (S400) and returning the processed substrates (1) to the cassette (10) placed on the stage unit (200).

The above second substrate return step (S500) may be a step in which, after the process step (S400), a boat (60) loaded with substrates (1) that have been processed is lowered, a return port (101) is opened through an opening/closing door (300), and the substrates (1) are transferred to an empty cassette (10) through a transfer robot (50).

The above second substrate alignment step (S600) may be a step of aligning the substrates (1) by bringing the alignment unit (400) into contact with the substrates (1) while closing the return port (101) through the opening/closing door unit (300) after the second substrate return step (S500).

In the second substrate alignment step (S600), the substrates (1) for which substrate processing has been completed are loaded into the cassette (10), and the return port (101) is blocked through the opening/closing door (300) while the alignment unit (400) is exposed toward the cassette return space (S1) and comes into contact with the side surfaces of the substrates (1) exposed through the opening (11) to align a plurality of substrates (1).

The above is only a description of some of the preferred embodiments that can be implemented by the present invention, and as is well known, the scope of the present invention should not be construed as being limited to the above embodiments, and the technical ideas of the present invention described above and the technical ideas underlying them are all included in the scope of the present invention.

100: Base plate 200: Stage section
300: Opening/closing door section 400: Alignment section

Claims (23)

A substrate introduction unit of a substrate processing device, comprising a cassette return unit (20) having an opening (11) formed on the side and a cassette return space (S1) formed for returning a cassette (10) in which a plurality of substrates (1) are loaded in a vertical direction, a substrate return unit (30) adjacent to the cassette return unit (20) and having a substrate return space (S2) formed inside for returning the substrates (1), and a substrate introduction unit (40) installed on an adjacent surface between the cassette return unit (20) and the substrate return unit (30) for introducing the substrates (1) from the cassette (10) in the cassette return space (S1) to the substrate return space (S2),
A base plate (100) on which a return port (101) is formed;
A stage portion (200) provided on the side of the cassette return space (S1) of the base plate (100) and supporting the cassette (10) so that the opening (11) faces the return port (101);
An opening/closing door part (300) installed on the above base plate (100) to open/close the return port (101);
A substrate introduction unit characterized by including an alignment part (400) provided on the surface of the opening/closing door part (300) facing the opening part (11) and contacting the substrates (1) loaded in the cassette (10) to align the substrates (1). In claim 1,
The above alignment part (400) is
A substrate introduction unit characterized in that the substrates (1) are aligned by contacting them according to the movement of the cassette (10) mounted on the stage (200) while the opening/closing door (300) is closed. In claim 2,
The above stage section (200) is
A substrate introduction unit characterized by including a support plate (210) that extends from the base plate (100) toward the cassette return space (S1), a stage (220) that is provided to be able to move relative to the support plate (210) and on which the cassette (10) is mounted, and a stage drive unit (230) that is installed on the support plate (210) and moves the stage (220). In claim 1,
The above alignment part (400) is
A substrate introduction unit characterized in that the substrates (1) are aligned by contacting them as the opening/closing door part (300) moves toward the cassette (10) while the cassette (10) is secured to the stage part (200). In claim 4,
The above opening/closing door part (300) is
A substrate introduction unit characterized by including a door plate (310) that contacts and separates from the base plate (100) to open and close the return port (101), and a first driving unit (340) provided on the substrate return space (S2) side of the door plate (310) to move the door plate (310) forward and backward with respect to the base plate (100). In claim 1,
The above opening/closing door part (300) is
A substrate introduction unit characterized by including a door plate (310) that contacts and separates from the base plate (100) to open and close the return port (101), and an alignment plate (320) provided on a surface of the door plate (310) facing the cassette return space (S1) and having the alignment portion (400) protruding. In claim 6,
The above alignment plate (320) is
A substrate introduction unit characterized in that the exposed surface exposed to the cassette return space (S1) when the return port (101) is closed forms a plane with the base plate (100). In claim 6,
The above alignment plate (320) is
A substrate introduction unit characterized in that a groove (321) is formed for inserting and installing the alignment part (400). In claim 1,
The above alignment part (400) is
A substrate introduction unit characterized in that it is provided so as to protrude from the above opening/closing door part (300) toward the cassette return space (S1). In claim 1,
The above alignment part (400) is
A substrate introduction unit characterized in that at least a portion including a contact portion that comes into contact with the substrate (1) comprises a resin material. In claim 1,
The above alignment part (400) is
A substrate introduction unit characterized in that at least a portion including a contact portion in contact with the substrate (1) has a hardness lower than that of the substrate (1). In claim 1,
The above alignment part (400) is
A substrate introduction unit characterized by including an alignment block (410) in which an alignment surface facing the substrate (1) is formed as a plane. In claim 1,
The above alignment part (400) is
A substrate introduction unit characterized in that an alignment groove (401) having a curved surface corresponding to the substrate (1) is formed on an alignment surface facing the substrate (1). In claim 1,
The above alignment part (400) is
A substrate introduction unit characterized by including a pair of alignment rods (420) installed parallel to each other and spaced apart from each other on a plane. In claim 1,
The above alignment part (400) is
A substrate introduction unit characterized in that it is provided with a length in the vertical direction at the center of the above-mentioned opening/closing door part (300), and the thicknesses on both sides are different from each other based on the center of the above-mentioned opening/closing door part (300). In claim 15,
The above opening/closing door part (300) is
The door plate (310) for opening and closing the return port (101) is linearly moved in a first horizontal direction toward one side of the return port (101) to open the return port (101), and the door plate (310) is linearly moved in a second horizontal direction toward the other side of the return port (101) to close the return port (101).
The above alignment part (400) is
A substrate introduction unit characterized in that the thickness in the first direction is formed thicker than the thickness in the second direction based on the center of the above opening/closing door part (300). In claim 1,
The above alignment part (400) is
A substrate introduction unit characterized in that it is located on one side of the center of the above opening/closing door part (300). A cassette transport section (20) having an opening (11) formed on the side and a cassette transport space (S1) formed for transporting a cassette (10) in which a plurality of substrates (1) are loaded in a vertical direction;
A substrate return unit (30) adjacent to the cassette return unit (20) and having a substrate return space (S2) formed therein for returning the substrate (1);
A substrate processing device characterized by including a substrate introduction unit (40) according to any one of claims 1 to 17, which is installed on an adjacent surface between the cassette transport unit (20) and the substrate transport unit (30) to support the cassette (10) and open and close the cassette transport space (S1) and the substrate transport space (S2). In claim 18,
The above alignment part (400) is
A substrate processing device characterized in that the substrates (1) that have been processed through the substrate return unit (30) are stored in the cassette (10) and the substrates (1) are aligned according to the movement for closing the return port (101) of the opening/closing door unit (300). In claim 18,
The above alignment part (400) is
A substrate processing device characterized in that the substrates (1) to be processed are aligned according to the movement of the cassette (10) while the cassette (10) containing the substrates (1) to be processed is placed on the stage section (200). A substrate processing method using a substrate processing device including a cassette transport unit (20) having an opening (11) formed on the side and a cassette transport space (S1) formed for transporting a cassette (10) in which a plurality of substrates (1) are loaded in a vertical direction; a substrate transport unit (30) adjacent to the cassette transport unit (20) and having a substrate transport space (S2) formed therein for transporting the substrates (1); and a substrate introduction unit (40) according to any one of claims 1 to 17, which is installed on an adjacent surface between the cassette transport unit (20) and the substrate transport unit (30) to support the cassette (10) and open and close the cassette transport space (S1) and the substrate transport space (S2),
A cassette mounting step (S100) in which the cassette (10) containing a plurality of processing target substrates (1) is mounted on the stage section (200);
After the cassette mounting step (S100), a first substrate alignment step (S200) is performed to align the substrates (1) by bringing them into contact with the alignment part (400) according to the movement of the cassette (10);
After the first substrate alignment step (S200), a first substrate return step (S300) of opening the return port (101) through the opening/closing door part (300) and returning the substrates (1) to the substrate return space (S2);
A substrate processing method characterized by including a process step (S400) of processing the substrates (1) introduced into the substrate return unit (30) through the first substrate return step (S300). In claim 21,
The above first substrate alignment step (S200) is
A substrate processing method characterized by maintaining the closed state of the return port (101) through the above opening/closing door part (300). A substrate processing method using a substrate processing device including a cassette transport unit (20) having an opening (11) formed on the side and a cassette transport space (S1) formed for transporting a cassette (10) in which a plurality of substrates (1) are loaded in a vertical direction; a substrate transport unit (30) adjacent to the cassette transport unit (20) and having a substrate transport space (S2) formed therein for transporting the substrates (1); and a substrate introduction unit (40) according to any one of claims 1 to 17, which is installed on an adjacent surface between the cassette transport unit (20) and the substrate transport unit (30) to support the cassette (10) and open and close the cassette transport space (S1) and the substrate transport space (S2),
Process step (S400) for processing the above substrates (1);
After the above process step (S400), a second substrate return step (S500) is performed to open the return port (101) through the opening/closing door part (300) and return the processed substrates (1) to a cassette (10) mounted on the stage part (200);
A substrate processing method characterized in that it includes a second substrate alignment step (S600) of aligning the substrates (1) by bringing the alignment part (400) into contact with the substrates (1) while closing the return port (101) through the opening/closing door part (300) after the second substrate return step (S500).