[go: up one dir, main page]

KR910001873A - Light Transmitting Window Modified Optical CVD System - Google Patents

Light Transmitting Window Modified Optical CVD System Download PDF

Info

Publication number
KR910001873A
KR910001873A KR1019890009273A KR890009273A KR910001873A KR 910001873 A KR910001873 A KR 910001873A KR 1019890009273 A KR1019890009273 A KR 1019890009273A KR 890009273 A KR890009273 A KR 890009273A KR 910001873 A KR910001873 A KR 910001873A
Authority
KR
South Korea
Prior art keywords
window
optical cvd
wound
substrate
modified optical
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
KR1019890009273A
Other languages
Korean (ko)
Inventor
김기용
Original Assignee
이헌조
주식회사 금성사
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 이헌조, 주식회사 금성사 filed Critical 이헌조
Priority to KR1019890009273A priority Critical patent/KR910001873A/en
Publication of KR910001873A publication Critical patent/KR910001873A/en
Withdrawn legal-status Critical Current

Links

Abstract

내용 없음No content

Description

광투과창 개조형 광 CVD장치Light Transmitting Window Modified Optical CVD System

본 내용은 요부공개 건이므로 전문내용을 수록하지 않았음Since this is an open matter, no full text was included.

제1도는 본 발명의 구성 개요도,1 is a schematic configuration diagram of the present invention,

제2도는 본 발명 제1도중 A부 상세도.2 is a detailed view of portion A of the first view of the present invention.

Claims (3)

투과창을 사이에 두고 히터와 기판이 배설되고 원료개스 도입부 및 배기계가 연결되어 있는 반응실과 저압수온등이 고정된 광원실로 구분/구성된 광 CVD 장치에 있어서, 하우징의 중심부에 고정된 광원(저압수은등; 4)이 진공용모터(7)에 연결된 밀폐원통형 석영창(2)속에 내장되어 있는 광원실(1) 및 석영창(2)의 외부표면에 감길수 있도록 배설된 투명필름(9), 그리고 궤도 이동식 지지판(16)에 고정된 기판(3)이 석영창(2)의 양측면 같은 거리에 배설된 반응실(18)로 구성된 것을 특징으로 하는 광투과창개조형 광 CVD 장치.An optical CVD apparatus comprising a reaction chamber in which a heater and a substrate are disposed with a transmission window interposed therebetween, and a reaction chamber in which a raw material gas inlet and an exhaust system are connected, and a low pressure water temperature lamp are fixed / constructed. 4) a transparent film 9 disposed so as to be wound on the outer surface of the light source chamber 1 and the quartz window 2 embedded in the hermetic cylindrical quartz window 2 connected to the vacuum motor 7, and A light transmission window modified optical CVD apparatus, characterized in that the substrate (3) fixed to the orbital movable support plate (16) is composed of a reaction chamber (18) disposed at the same distance on both sides of the quartz window (2). 청구범위 제1항에 있어서, 투명필름은 별도의 롤러(7)에 감겨 있다가 회전 되는 밀폐원통형 석영창(2)의 외부표면에 옮겨 감기도록 구성 된 것을 특징으로 하는 광투과창개조형 광 CVD장치.The light transmissive window modified optical CVD apparatus according to claim 1, wherein the transparent film is configured to be wound on an outer surface of the closed cylindrical quartz window 2 wound on a separate roller 7 and then rotated. . 청구범위 제1항에 있어서, 기판(3)을 고정 하는 지지판(16) 밑면에는 가이드레일(19)을 따라 회전 이동되는 카터휠(20)이 장착된 것을 특징으로 하는 광투과창 개조형 광 CVD장치.The light transmission window retrofit light CVD according to claim 1, characterized in that the bottom of the support plate (16) fixing the substrate (3) is equipped with a carter wheel (20) which is rotated along the guide rail (19). Device. ※ 참고사항 : 최초출원 내용에 의하여 공개하는 것임.※ Note: The disclosure is based on the initial application.
KR1019890009273A 1989-06-30 1989-06-30 Light Transmitting Window Modified Optical CVD System Withdrawn KR910001873A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR1019890009273A KR910001873A (en) 1989-06-30 1989-06-30 Light Transmitting Window Modified Optical CVD System

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR1019890009273A KR910001873A (en) 1989-06-30 1989-06-30 Light Transmitting Window Modified Optical CVD System

Publications (1)

Publication Number Publication Date
KR910001873A true KR910001873A (en) 1991-01-31

Family

ID=68084288

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1019890009273A Withdrawn KR910001873A (en) 1989-06-30 1989-06-30 Light Transmitting Window Modified Optical CVD System

Country Status (1)

Country Link
KR (1) KR910001873A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100432513B1 (en) * 2001-09-11 2004-05-22 한국과학기술원 Apparatus and method for photo-induced process

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100432513B1 (en) * 2001-09-11 2004-05-22 한국과학기술원 Apparatus and method for photo-induced process

Similar Documents

Publication Publication Date Title
ATE210616T1 (en) INSULATING DOUBLE GLAZING UNIT AND VACUUM DOUBLE GLAZING UNIT
JPS5466862A (en) Transmission type fluorescence liquid crystal display device
IT1145157B (en) PROCEDURE AND DEVICE FOR THE IN-LINE DEHYDROGENATION OF PREFORMS FOR OPTICAL FIBERS
KR880011604A (en) Cold mirror
CA1070748A (en) Ozone absorbance controller
FR2359958A1 (en) FILTERING GLASS APPLIED ON EXISTING GLASS
KR910001873A (en) Light Transmitting Window Modified Optical CVD System
ATE94947T1 (en) INSULATING GLASS WINDOW WITH LIGHT SCREEN.
KR910018852A (en) Post-processing device for printing plates
KR850005085A (en) Incident reflection spectrometer
SE8004813L (en) LOW PRESSURE MERCURY LAMP
ATE93570T1 (en) MULTIPLE INSULATION GLASS WITH RIM.
KR910002036A (en) Photochemical vapor deposition apparatus
GB1294935A (en)
ATE194695T1 (en) RADIATION DEVICE
JPH01296617A (en) quartz lamp heating device
JPS57159668A (en) Fixing device for heat sensitive recorder
FR2263505A1 (en) Glass UV absorbency testing device - has UV source, filter, thermal screen and screen fluorescent under UV
EP0135362B1 (en) Optical smoke detectors
GB1011107A (en) Improvements relating to the reproduction of images
KR950019836A (en) Backlight for LCD
FR2300351A1 (en) Viewer unit for film slide - is fitted with internal light source illuminating reflective surface directing light onto slide
JPS5658629A (en) Photometrical sensor
SU525044A1 (en) Exhibiting device of the blueprint machine
GB771969A (en) Improvements in or relating to an advertising device

Legal Events

Date Code Title Description
PA0109 Patent application

Patent event code: PA01091R01D

Comment text: Patent Application

Patent event date: 19890630

PG1501 Laying open of application
PC1203 Withdrawal of no request for examination
WITN Application deemed withdrawn, e.g. because no request for examination was filed or no examination fee was paid