KR940017014A

KR940017014A - Method and apparatus for homogenizing laser beam

Info

Publication number: KR940017014A
Application number: KR1019920026010A
Authority: KR
Inventors: 맹성렬
Original assignee: 이헌조; 주식회사 금성사
Priority date: 1992-12-29
Filing date: 1992-12-29
Publication date: 1994-07-25

Abstract

본 발명은 레이저 빔의 균일화에 관한 것으로 특히 레이저 빔을 선형으로 만드는데 있어서 길이 방향의 에너지 밀도 분포 균일도를 향상시킬 수 있도록 한 것으로서, 오리지날 빔이 입사된 것을 멀티 원통형 렌즈에 의하여 분할되고 좌우방향으로 수렴되어 초점거리에서 발산되도록 하고, 상기 멀티 원통형 렌즈에 의하여 발산된 빔이 원통형 렌즈에 입사되어 상하방향으로 수렴되게 하며, 상기 원통형 렌즈에서 상하방향으로 수렴되어 입사된 빔을 용융석영 슬라브에서 전반사되어 균일한 에너지 밀도의 빔이 되도록 하고, 상기 용융석영 슬라브를 거친 빔이 미러에 의하여 시편방향으로 진행하되 콘덴서 렌즈에 의하여 시편에 균일하고 가공에 적합한 에너지 밀도가 되도록 하는 것이다.The present invention relates to the uniformity of the laser beam, in particular to improve the uniformity of the energy density distribution in the longitudinal direction in making the laser beam linear, where the original beam is divided by a multi-cylindrical lens and converged in the horizontal direction To diverge at the focal length, and the beam emitted by the multi-cylindrical lens is incident on the cylindrical lens to converge in the vertical direction, and the beam incident by convergence in the vertical direction from the cylindrical lens is totally reflected in the molten quartz slab to be uniform. The beam of one energy density, and the beam passed through the molten quartz slab proceeds in the specimen direction by the mirror, but the energy density is uniform to the specimen by the condenser lens and is suitable for processing.

Description

Method and apparatus for homogenizing laser beam

본 내용은 요부공개 건이므로 전문내용을 수록하지 않았음Since this is an open matter, no full text was included.

제 2 도는 본 발명 레이저 빔의 균일화 시스템, 제 3 도는 본 발명의 멀티 원통형 렌즈로서, (가)는 평면도 (나)는 정면도, 제 4 도는 본 발명의 멀티 원통형 렌즈와 원통형 렌즈를 지나는 상태도로서, (가)는 평면도 (나)는 정면도, 제 5 도는 본 발명의 원통형 렌즈와 용융석영 슬라브를 지나는 상태도로서, (가)는 평면도 (나)는 정면도.2 is a system for equalizing a laser beam of the present invention, and FIG. 3 is a multicylindrical lens of the present invention, (a) a plan view (b) is a front view, and FIG. 4 is a state diagram passing through a multicylindrical lens and a cylindrical lens of the present invention. (A) is a plan view (b) is a front view, and FIG. 5 is a state diagram passing through the cylindrical lens and the molten quartz slab of the present invention, (a) is a plan view (b) is a front view.

Claims

Dividing the original beam by the multi-cylindrical lens and converging in the left-right direction to diverge at the focal length; and causing the beam emitted in the process to enter the cylindrical lens and converge in the vertical direction; And the beams converged in the vertical direction at the total reflection from the molten quartz slab to be beams of uniform energy density, and the beams subjected to the above processes are carried out in the specimen direction by the mirror and are uniform on the specimen by the condenser lens. A method of homogenizing a laser beam, the method comprising the step of achieving an energy density suitable for processing.

A multi-cylindrical lens in which the incident original beam is divided and converged in the left-right direction to diverge at the focal length, a cylindrical lens for converging the beam emitted by the multi-cylindrical lens in the vertical direction, and a vertical lens in the vertical direction A molten quartz slab that makes the converged beam a beam of uniform energy density, a mirror that causes the beam passed through the molten quartz slab to proceed in the specimen direction, and a beam that proceeds in the specimen direction by the mirror is uniformly processed in the specimen. And a condenser lens configured to achieve an energy density suitable for the laser beam homogenizing apparatus.

※ Note: The disclosure is based on the initial application.