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KR980005314A - Spacing control between spin screwer and brush - Google Patents

Spacing control between spin screwer and brush Download PDF

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Publication number
KR980005314A
KR980005314A KR1019960023912A KR19960023912A KR980005314A KR 980005314 A KR980005314 A KR 980005314A KR 1019960023912 A KR1019960023912 A KR 1019960023912A KR 19960023912 A KR19960023912 A KR 19960023912A KR 980005314 A KR980005314 A KR 980005314A
Authority
KR
South Korea
Prior art keywords
brush
screwer
spin
oil
gap
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
KR1019960023912A
Other languages
Korean (ko)
Inventor
조용준
장규환
정승필
Original Assignee
김광호
삼성전자 주식회사
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 김광호, 삼성전자 주식회사 filed Critical 김광호
Priority to KR1019960023912A priority Critical patent/KR980005314A/en
Publication of KR980005314A publication Critical patent/KR980005314A/en
Withdrawn legal-status Critical Current

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Abstract

최적의 제거 효과 및 공정 안정성을 확보할 수 있는 오일 피스톤 댐퍼(damper)를 이용한 스핀 스크루버와 브러쉬와의 간격(gap)제어 장치를 개시한다. 브러쉬 및 웨이퍼 홀더를 포함하는 스핀 스크루버와, 상기 웨이퍼 홀더에 부착된 피스톤이 인입되는 오일 댐퍼 및 상기 오일 댐퍼에 주입되는 오일량을 피드백 제어로 조절하는 컴퓨터 시스템으로 이루어진 것을 특징으로 하는 스핀 스크루버와 브러쉬와의 간격(gap)제어 장치를 제공하는 것이다. 따라서, 본 발명에 의하면 오일 피스톤 댐퍼(damper)를 이용하여 설비 자체의 전체 흔들림에 대한 공정에 미치는 영향을 최소화 시키고 웨이퍼와 브러쉬간의 간격을 항상 일정하게 유지시켜 주는 메카니즘을 구성할 수 있다.An apparatus for controlling a gap between a spin screwer and a brush using an oil piston damper capable of securing an optimum removal effect and process stability is disclosed. A spin screwer including a brush and a wafer holder, an oil damper into which the piston attached to the wafer holder is introduced, and a computer system for controlling the amount of oil injected into the oil damper by feedback control. To provide a gap control device with a brush. Therefore, according to the present invention, it is possible to configure a mechanism that minimizes the influence on the process of the entire shaking of the equipment itself by using an oil piston damper and keeps the gap between the wafer and the brush at all times.

Description

스핀 스크루버와 브러쉬와의 간격 제어 장치Spacing control between spin screwer and brush

본 내용은 요부공개 건이므로 전문내용을 수록하지 않았음As this is a public information case, the full text was not included.

제1도는 본 발명에 의한 오일 피스톤 댐퍼(damper)를 이용한 스핀스크루버와 브러쉬와의 간격(gap)제어 장치를 나타낸 개략도이다.1 is a schematic view showing a gap control device between a spin screwer and a brush using an oil piston damper according to the present invention.

Claims (3)

브러쉬 및 웨이퍼 홀더를 포함하는 스핀 스크루버와, 상기 웨이퍼 홀더에 부착된 피스톤이 인입되는 오일 댐퍼 및 상기 오일 댐퍼에 주입 되는 오일량을 피드백 제어로 조절하는 컴퓨터 시스템으로 이루어진 것을 특징으로 하는 스핀 스크루버와 브러쉬와의 간격(gap)제어 장치.A spin screwer including a brush and a wafer holder, an oil damper into which the piston attached to the wafer holder is introduced, and a computer system for controlling the amount of oil injected into the oil damper by feedback control. Gaps control device with brush. 제1항에 있어서, 상기 컴퓨터 시스템은 스핀 스크루버와 브러쉬와의 간격(gap)을 모니터하기 위한 카메라 장치를 포함하는 것을 특징으로하는 스핀 스크루보와 브러쉬와의 간격(gap)제어 장치.2. The apparatus of claim 1, wherein the computer system includes a camera device for monitoring a gap between the spin screwer and the brush. 제2항에 있어서, 상기 컴퓨터 시스템은 상기 카메라 장치에 의한 화상을 수치화시킬 수 있는 프로그램을 이용하는 것을 특징으로하는 스핀 스크루버와 브러쉬와의 간격(gap)제어 장치.3. The apparatus of claim 2, wherein the computer system uses a program capable of digitizing an image by the camera apparatus. ※ 참고사항 : 최초출원 내용에 의하여 공개하는 것임.※ Note: The disclosure is based on the initial application.
KR1019960023912A 1996-06-26 1996-06-26 Spacing control between spin screwer and brush Withdrawn KR980005314A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR1019960023912A KR980005314A (en) 1996-06-26 1996-06-26 Spacing control between spin screwer and brush

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR1019960023912A KR980005314A (en) 1996-06-26 1996-06-26 Spacing control between spin screwer and brush

Publications (1)

Publication Number Publication Date
KR980005314A true KR980005314A (en) 1998-03-30

Family

ID=66288391

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1019960023912A Withdrawn KR980005314A (en) 1996-06-26 1996-06-26 Spacing control between spin screwer and brush

Country Status (1)

Country Link
KR (1) KR980005314A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7135729B2 (en) 2001-11-16 2006-11-14 Kabushiki Kaisha Toshiba Semiconductor memory device including multi-layer gate structure

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7135729B2 (en) 2001-11-16 2006-11-14 Kabushiki Kaisha Toshiba Semiconductor memory device including multi-layer gate structure

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Legal Events

Date Code Title Description
PA0109 Patent application

Patent event code: PA01091R01D

Comment text: Patent Application

Patent event date: 19960626

PG1501 Laying open of application
PC1203 Withdrawal of no request for examination
WITN Application deemed withdrawn, e.g. because no request for examination was filed or no examination fee was paid