TW200638039A - Cellular micro-particle detection chip and manufacturing method thereof - Google Patents
Cellular micro-particle detection chip and manufacturing method thereofInfo
- Publication number
- TW200638039A TW200638039A TW094112559A TW94112559A TW200638039A TW 200638039 A TW200638039 A TW 200638039A TW 094112559 A TW094112559 A TW 094112559A TW 94112559 A TW94112559 A TW 94112559A TW 200638039 A TW200638039 A TW 200638039A
- Authority
- TW
- Taiwan
- Prior art keywords
- micro
- manufacturing
- detection chip
- particle detection
- sample fluid
- Prior art date
Links
- 238000004519 manufacturing process Methods 0.000 title abstract 7
- 230000001413 cellular effect Effects 0.000 title abstract 3
- 238000001514 detection method Methods 0.000 title abstract 3
- 239000011859 microparticle Substances 0.000 title abstract 3
- 239000012530 fluid Substances 0.000 abstract 3
- 238000000034 method Methods 0.000 abstract 3
- 238000005266 casting Methods 0.000 abstract 1
- 230000005684 electric field Effects 0.000 abstract 1
- 238000005530 etching Methods 0.000 abstract 1
- 238000001459 lithography Methods 0.000 abstract 1
- 239000002861 polymer material Substances 0.000 abstract 1
- 238000012827 research and development Methods 0.000 abstract 1
- 239000004065 semiconductor Substances 0.000 abstract 1
Landscapes
- Optical Measuring Cells (AREA)
- Investigating Or Analysing Materials By Optical Means (AREA)
- Investigating Or Analysing Biological Materials (AREA)
- Measuring Volume Flow (AREA)
- Casting Or Compression Moulding Of Plastics Or The Like (AREA)
Abstract
This invention provides a cellular micro-particle detection chip and a manufacturing method thereof, suitable for classifying and counting cells in a sample fluid. The cellular micro-particle detection chip comprises a transparent plate base, a hollow micro-channel unit formed in the base and a sensing unit installed in the micro-channel unit. The height of the micro-channel unit and the sheath flow generated are used to focus cells in the sample fluid to sequentially align and flow and a photo sensing method is used to detect the number of the cells to achieve 3D focus sample fluid cell flow without the use of electric field or magnetic field. The manufacturing method comprises using lithography and etching to fabricate a mold and casting with polymer material. The manufacturing processes is a mature technique in semiconductor industry. Therefore, the manufacturing technique can increase production yield, achieve mass production, save research and development time and reduce cost.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| TW94112559A TWI257480B (en) | 2005-04-20 | 2005-04-20 | Cellular micro-particle detection chip and manufacturing method thereof |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| TW94112559A TWI257480B (en) | 2005-04-20 | 2005-04-20 | Cellular micro-particle detection chip and manufacturing method thereof |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| TWI257480B TWI257480B (en) | 2006-07-01 |
| TW200638039A true TW200638039A (en) | 2006-11-01 |
Family
ID=37764173
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| TW94112559A TWI257480B (en) | 2005-04-20 | 2005-04-20 | Cellular micro-particle detection chip and manufacturing method thereof |
Country Status (1)
| Country | Link |
|---|---|
| TW (1) | TWI257480B (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US8959985B2 (en) | 2012-05-07 | 2015-02-24 | National Applied Research Laboratories | Microparticle detecting apparatus |
| TWI498987B (en) * | 2013-03-14 | 2015-09-01 | King Yuan Electronics Co Ltd | A detecting device |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| TWI391688B (en) * | 2009-04-06 | 2013-04-01 | Himax Tech Ltd | Particle detection method and apparatus thereof |
| CN108298497A (en) * | 2018-01-30 | 2018-07-20 | 中国电子科技集团公司第三十八研究所 | A kind of microfluid packaging method of silicon based photon biologic sensor chip |
-
2005
- 2005-04-20 TW TW94112559A patent/TWI257480B/en not_active IP Right Cessation
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US8959985B2 (en) | 2012-05-07 | 2015-02-24 | National Applied Research Laboratories | Microparticle detecting apparatus |
| TWI498987B (en) * | 2013-03-14 | 2015-09-01 | King Yuan Electronics Co Ltd | A detecting device |
Also Published As
| Publication number | Publication date |
|---|---|
| TWI257480B (en) | 2006-07-01 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| MM4A | Annulment or lapse of patent due to non-payment of fees |