TW202141046A - Probe pin and probe fixture - Google Patents
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
- G01R1/02—General constructional details
- G01R1/06—Measuring leads; Measuring probes
- G01R1/067—Measuring probes
- G01R1/06711—Probe needles; Cantilever beams; "Bump" contacts; Replaceable probe pins
- G01R1/06716—Elastic
- G01R1/06722—Spring-loaded
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
- G01R1/02—General constructional details
- G01R1/06—Measuring leads; Measuring probes
- G01R1/067—Measuring probes
- G01R1/06711—Probe needles; Cantilever beams; "Bump" contacts; Replaceable probe pins
- G01R1/06733—Geometry aspects
- G01R1/06738—Geometry aspects related to tip portion
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
- G01R1/02—General constructional details
- G01R1/06—Measuring leads; Measuring probes
- G01R1/067—Measuring probes
- G01R1/073—Multiple probes
- G01R1/07307—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card
- G01R1/07357—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card with flexible bodies, e.g. buckling beams
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Abstract
Description
本發明係有關一種探針結構,特別是指一種用於感測積體電路的探針結構。The present invention relates to a probe structure, in particular to a probe structure used for sensing integrated circuits.
先前技術中,探針為尖頭之設計(圖1),此設計造成測試中許多困擾,例如易造成積體電路接腳的破壞、在接腳上形成壓迫痕跡、探針測試中也容易滑針而造成瞬間電阻、電感或電容的阻抗值放大數倍,造成感測失誤、甚至造成積體電路的破壞。因此測試可能為出貨前最後的檢驗步驟,若在出貨測試時造成破壞,可能隨出貨而到客人處,而難以事前發現,其造成的商譽損失,更難以估計。In the prior art, the probe has a pointed design (Figure 1). This design causes many problems in testing, such as damage to the pins of the integrated circuit, formation of compression marks on the pins, and easy slippage in the probe test. Needle causes the instantaneous resistance, inductance, or capacitance impedance value to be amplified several times, resulting in sensing errors and even damage to the integrated circuit. Therefore, the test may be the final inspection step before shipment. If damage is caused during the shipment test, it may come to the customer with the shipment, and it is difficult to find out in advance. The loss of goodwill caused by it is even more difficult to estimate.
前述之探針設計為直徑較大之探針,例如直徑1mm或其他直徑的探針。當積體電路上感測點間的節距(Pitch)越來越小時,探針尺寸也須隨之縮小,先前技術中可採用一高細長比(High slender ratio)材料的探針。高細長比材料在承受軸向受力時更易造成滑針,使得測試結果更可能不穩定。The aforementioned probe is designed as a probe with a larger diameter, such as a probe with a diameter of 1 mm or other diameters. When the pitch between the sensing points on the integrated circuit becomes smaller and smaller, the size of the probe must be reduced accordingly. In the prior art, a probe with a high slender ratio material can be used. The high slenderness ratio material is more likely to cause slippage when subjected to axial force, making the test result more likely to be unstable.
為解決此困擾,本發明提供一探針技術,其不易在積體電路的接腳上形成壓迫痕跡、也不易在探針測試中滑針,可大幅度提升測試的品質與可靠度。To solve this problem, the present invention provides a probe technology, which is not easy to form compression marks on the pins of the integrated circuit, and it is not easy to slip the needle in the probe test, which can greatly improve the quality and reliability of the test.
就其中一個觀點言,本發明提供了一種探針結構,以解決前述之困擾。此探針結構包含:一中心參考線,位於此探針結構之中央部分;一頭部件,在中心參考線的方向上,依序包含一感測端、至少一定位凹部、以及一第一彈簧卡接部;一底部件,包含一連接端;以及一彈簧,設置於頭部件與底部件之間,彈簧外繞並卡入第一彈簧卡接部、以及抵接於底部件。From one point of view, the present invention provides a probe structure to solve the aforementioned problems. The probe structure includes: a center reference line located in the central part of the probe structure; a head part, in the direction of the center reference line, sequentially includes a sensing end, at least one positioning recess, and a first spring clip Connecting part; a bottom part, including a connecting end; and a spring, arranged between the head part and the bottom part, the spring is wound around and clamped into the first spring clamping part, and abutted against the bottom part.
在一實施例中,感測端包含一多點接觸端、一線接觸端、或一面接觸端。感測端用於抵接一積體電路上的感測點或接腳,以對積體電路進行感測。In one embodiment, the sensing terminal includes a multi-point contact terminal, a line contact terminal, or a surface contact terminal. The sensing terminal is used for contacting a sensing point or pin on an integrated circuit to sense the integrated circuit.
就另一個觀點言,本發明所提供的技術特徵也可不限於探針結構,例如根據本發明的探針以及設置探針的感測治具。From another point of view, the technical features provided by the present invention may not be limited to the probe structure, such as the probe according to the present invention and the sensing fixture provided with the probe.
在一實施例中,本發明所提供的感測治具,包含:複數個探針,各探針包含一感測端、一第一彈簧卡接部、一彈簧、一第二彈簧卡接部、以及一連接端,其中彈簧外繞並卡入第一、二彈簧卡接部;一定位板,具有複數個探針引導孔,分別對應於一積體電路的複數個感側位置,使探針的感測端從定位板凸出,定位板上方又具有一推拔結構,協助積體電路對位進入一預定位置;以及一底板,包含複數個探針孔,對應探針引導孔的位置,探針孔用以容置探針,使連接端從底板凸出;其中,感測端包含一多點接觸端、一線接觸端、或一面接觸端。In one embodiment, the sensing fixture provided by the present invention includes: a plurality of probes, each probe includes a sensing end, a first spring clamping portion, a spring, and a second spring clamping portion , And a connecting end, in which the spring is wound around and clamped into the first and second spring clamping parts; a positioning plate has a plurality of probe guide holes, respectively corresponding to the plurality of sensing side positions of an integrated circuit, so that the probe The sensing end of the needle protrudes from the positioning plate, and there is a push-pull structure above the positioning plate to assist the alignment of the integrated circuit into a predetermined position; and a bottom plate containing a plurality of probe holes corresponding to the positions of the probe guide holes , The probe hole is used for accommodating the probe so that the connecting end protrudes from the bottom plate; wherein, the sensing end includes a multi-point contact end, a line contact end, or a surface contact end.
連接端用於接觸或耦接於一測試電路上的訊號接點。The connection terminal is used to contact or be coupled to a signal contact on a test circuit.
底下藉由具體實施例詳加說明,當更容易瞭解本發明之目的、技術內容、特點及其所達成之功效。The following detailed descriptions are given through specific embodiments, so that it will be easier to understand the purpose, technical content, features, and effects of the present invention.
本發明中的圖式均屬示意,主要意在表示各電路組成部分間之相互關係,至於形狀與尺寸則並未依照比例繪製。The drawings in the present invention are all schematic and are mainly intended to show the relationship between the various circuit components. As for the shapes and sizes, they are not drawn to scale.
圖2顯示本發明的一個實施例。其中,本發明之探針結構10包括:一中心參考線110,位於此探針結構10之中央部分;一頭部件120,在中心參考線100的方向上,依序包含一感測端121、至少一定位凹部122、鄰接定位凹部122的一頂止位部123、以及一第一彈簧卡接部124;一底部件130,在中心參考線110的方向上,依序包含一底止位部131、以及一連接端132;以及一彈簧140,設置於頭部件120與底部件130之間,彈簧140外繞並卡入第一彈簧卡接部124、以及抵接於底部件130。Figure 2 shows an embodiment of the present invention. Wherein, the
根據本發明,底部件130可選擇性包含第二彈簧卡接部133(圖2、3、4、5)。然而,本發明的部分實施例中(圖6、7、8),不包含此第二彈簧卡接部。第二彈簧卡接部的設置,可取決於探針結構的設計、或探針結構與感測治具的搭配方式。According to the present invention, the
在一實施例中,感測端121可依需要而有多種不同的設計,例如一面接觸端(圖2)、一線接觸端(圖3)、或一多點接觸端(圖4)。感測端121用於抵接一積體電路上的感測點或接腳,以對積體電路進行感測。感測端121的設計,與先前技術不同處為大幅增加接觸(或抵接)範圍,一方面避免過度施力於接腳的一點,造成接腳的破壞;另一方面增加與接腳接觸的摩擦力,降低滑針的可能性。其中,例如相較於面接觸端,線接觸端可用於接腳範圍較小,可較準確地按壓在接腳上。In one embodiment, the
特別說明,圖4所提供的感測端121,可依照需要而改變其接觸的方式。例如,當感測端121接觸一平面時,其可為多點接觸。或者,當感測端121接觸一球體或一弧面體時(例如球柵陣列封裝,BGA接腳),可能接觸部分為線接觸。如此,使用者可依需要而決定所接觸的方式。In particular, the
在本發明中,彈簧140為一螺旋式彈簧(圖2、3、4)、或一渦型彈簧(圖5、6、7)。彈簧可卡接於頭部件120的第一彈簧卡接部124,例如為齒紋型的卡接部(圖2、3、4)、或一梭型的卡接部(圖5、6、7)。一實施例中,螺旋式彈簧可不限於卡接齒紋型的卡接部,也可卡接於梭型的卡接部。當頭部件120與底部件130皆有卡接部時(皆有第一、二彈簧卡接部124、133),第一、二彈簧卡接部124、133的形狀,可包含梭型與齒紋型的任一組合,以卡入彈簧140。例如,第一、二彈簧卡接部124、133分別為梭型與齒紋型的卡接部;或者,第一、二彈簧卡接部124、133分別為齒紋型與梭型的卡接部;或者,第一、二彈簧卡接部124、133皆為梭型的卡接部。此外,不論螺旋式彈簧或渦型彈簧,皆可選用適當的材質,以調整感測端得機械特性,於感測時提供適當的推力(例如:30gf)。材質可依需要而調整,例如不鏽鋼、銅合金等。In the present invention, the
根據本發明的探針,彈簧主要為選擇性外露的設計,此優點為當探針尺寸可小至0.3mm(相當於探針外圍直徑尺寸小於0.3mm)、或更小(例如0.2mm)時,依然可具有中心參考線方向上相當的伸縮裕度,而不會因稍微受壓就朝側向(垂直於中心參考線方向)滑針,因此本發明的設計可大幅度增加探針的穩定度。According to the probe of the present invention, the spring is mainly designed to be selectively exposed. This advantage is that when the size of the probe can be as small as 0.3mm (equivalent to the diameter of the probe's outer diameter less than 0.3mm), or smaller (for example, 0.2mm) , It can still have considerable expansion margin in the direction of the center reference line, without sliding the needle to the side (perpendicular to the direction of the center reference line) due to a slight pressure, so the design of the present invention can greatly increase the stability of the probe Spend.
根據本發明的技術特徵,探針尺寸可大幅度地降低,同時仍能具有穩定的電阻、電感或電容的阻抗值,不易造成感測失誤。參照圖9,其中顯示同一類型積體電路中不同批量的感測中,先採用先前技術的探針而後採用本發明的探針進行感測。使用本發明探針所造成的不良率,低於先前技術至少4%以上。圖9所顯示的範例,為初次使用本發明的技術,多次使用後不良率又逐漸降低,低於先前技術5%以上。因此,本發明確實改善先前技術中高不良率的缺點,並且稍微調整後,其改良效果可更加提升。According to the technical features of the present invention, the size of the probe can be greatly reduced, while still having a stable resistance, inductance or capacitance impedance value, and it is not easy to cause sensing errors. Referring to FIG. 9, it shows that in the sensing of different batches in the same type of integrated circuit, the probe of the prior art is used first and then the probe of the present invention is used for sensing. The defect rate caused by using the probe of the present invention is at least 4% lower than the prior art. The example shown in FIG. 9 is the first use of the technology of the present invention, and the defective rate gradually decreases after multiple uses, which is more than 5% lower than the prior art. Therefore, the present invention does improve the shortcomings of the high defect rate in the prior art, and after a little adjustment, the improvement effect can be further improved.
本發明中,無論是螺旋式彈簧、或渦型彈簧,探針結構10,皆可藉由彈簧以形成頭部件120與底部件130間的導電線路,用於耦接積體電路IC上的感測點至測試電路PCB上的訊號接點(參照圖10、11)。其中,渦型彈簧為板狀材質旋轉產生的結構,具有較大於螺旋式彈簧的表面積,故渦型彈簧表面電阻低於螺旋式彈簧。此外,齒紋型的卡接部、或一梭型的卡接部,其組裝彈簧時的過程也有些微差異。例如,齒紋型的卡接部上卡接彈簧,需要多次旋轉彈簧於齒紋型卡接部上,才能固定彈簧;而梭型的卡接部上卡接彈簧,為藉由梭型的小斷面-大斷面-小斷面的幾何特徵,讓彈簧一側推入梭型卡接部後不易鬆脫,達到彈簧與梭型卡接部間的緊配合,維持低接觸電阻。In the present invention, whether it is a helical spring or a vortex spring, the
參照圖2,在一實施例中,頭部件120又包含一中心凸軸125,底部件130包含一中心孔134,探針結構10內中心凸軸125的一部份對準並插入中心孔134,彈簧140外繞中心凸軸125,中心孔134位於第二螺紋部133內。根據本發明,頭部件120可不包含中心凸軸,例如圖5、7所顯示的實施例,其中彈簧140僅外露於探針結構10,而非如其他實施例般具有外繞中心凸軸125得特徵。2, in one embodiment, the
依照本發明,感測端121的面接觸端、線接觸端、或多點接觸端,非限定於螺旋式彈簧、彈簧外露於探針結構或彈簧外繞中心凸軸的設計,可用於渦型彈簧、彈簧內藏於探針結構、或無中心凸軸的設計。例如,參照圖8,彈簧內藏於探針結構內的設計中,感測端121也可為面接觸端的設計。又例如,彈簧內藏於探針結構內的設計中,感測端121也可為線接觸端或多點接觸端的設計。According to the present invention, the surface contact end, line contact end, or multi-point contact end of the
本發明中,頭部件120、彈簧140、底部件130為不同元件的設計,維護中元件易更換,可降低不必要的廢棄需求,具環保效果。In the present invention, the
就另一個觀點言,本發明所提供的技術特徵也可不限於探針結構,例如根據本發明的探針以及設置探針的感測治具。From another point of view, the technical features provided by the present invention may not be limited to the probe structure, such as the probe according to the present invention and the sensing fixture provided with the probe.
參照圖10、11,在一實施例中,本發明所提供的感測治具20,包含:複數個探針10,各探針10(可對照前述實施例之探針結構10,治具中顯示不同類型的探針10,代表同一治具中可包含相同或不同種類的探針)包含一感測端121以及一連接端132;一定位板210,具有複數個探針引導孔(如圖中所示,提供容置複數個探針10的空間),使感測端121對應於一積體電路IC的複數個感側位置,使感測端121從定位板210凸出,定位板210上方又具有一推拔結構Tap(可以設置在定位板210上、或者推拔結構Tap可設置在定位板210上方另一獨立元件[圖11]),協助積體電路IC對位進入一預定位置,便於感測端121對準積體電路IC上感側位置;以及一底板220,包含複數個探針孔,對應探針引導孔的位置,探針孔用以容置探針10,使連接端132從底板220凸出。如前所述,感測端121可包含一多點接觸端、一線接觸端、或一面接觸端。10, 11, in one embodiment, the
前述的積體電路IC的封裝方式,可包含:BGA、WDFN、LQFP、QFN等規範,使用者可依據規範需要,而決定對應探針的種類與使用方式。The aforementioned integrated circuit IC packaging methods can include specifications such as BGA, WDFN, LQFP, QFN, etc. The user can determine the type and use of the corresponding probe according to the requirements of the specifications.
在一實施例中,從中心參考線110的方向觀察探針結構10 (即從頭部件120的方向往探針結構10觀察),感測端121之外圍幾何可分別包含多樣形狀,例如:至少一切邊的圓形(圖2)、圓形、多邊形、六角形等。容置探針結構10的治具20中,也可具有對應的探針引導孔形狀,例如:至少一切邊的圓形、圓形、多邊形、六角形等。然而,容置感測端121之外圍形狀的探針引導孔形狀可不對應於接觸端的外圍幾何,而為其他形狀。重要地,探針引導孔須提供探針穿過的空間,以進行感測積體電路上的感測點。In one embodiment, the
在一實施例中,定位凹部122與鄰接定位凹部122的一頂止位部123,可用於引導頭部件120插入治具20的探針引導孔,而使感測端121從治具20凸出,用於對一積體電路IC進行感測。頂止位部123可限制感測端121凸出的高度,不致因太高而提高積體電路IC,導致其他感測端121無法耦接積體電路IC上其他訊號接點。或者,頂止位部123可限制所有感測端121凸出的高度,而適當地接觸或耦接積體電路IC上其他訊號接點。治具20另一側,連接端132用於接觸或耦接於測試電路PCB上的訊號接點,以進行判斷或分析積體電路IC的相關資訊。此外,連接端132與測試電路PCB的耦接也可不限於緊接觸,而改用跳線(Wiring)等方式,接觸方式可視需要而定。In one embodiment, the
以上已針對實施例來說明本發明,唯以上所述者,僅係為使熟悉本技術者易於了解本發明的內容而已,並非用來限定本發明之權利範圍。在本發明之相同精神下,熟悉本技術者可以思及各種等效變化。例如,本發明之用語「耦接」包括直接連接與間接連接。本發明的範圍應涵蓋上述及其他所有等效變化。The present invention has been described above with reference to the embodiments, but the above description is only for making it easier for those skilled in the art to understand the content of the present invention, and is not used to limit the scope of rights of the present invention. Under the same spirit of the present invention, those skilled in the art can think of various equivalent changes. For example, the term "coupled" in the present invention includes direct connection and indirect connection. The scope of the present invention should cover the above and all other equivalent changes.
10:探針結構、探針 110:中心參考線 120:頭部件 121:感測端 122:定位凹部 123:頂止位部 124:第一彈簧卡接部 125:中心凸軸 130:底部件 131:底止位部 132:連接端 133:第二彈簧卡接部 134:中心孔 140:彈簧 20:感測治具 220:底板 210:定位板 IC:積體電路 PCB:測試電路 Tap:推拔結構10: Probe structure, probe 110: Center reference line 120: head part 121: sensing end 122: positioning recess 123: Top stop 124: The first spring clamping part 125: Central convex shaft 130: bottom part 131: bottom stop 132: connection end 133: The second spring clamping part 134: Center hole 140: spring 20: Sensing fixture 220: bottom plate 210: positioning plate IC: Integrated Circuit PCB: test circuit Tap: push and pull structure
圖1顯示先前技術中探針結構示意圖。 圖2至8顯示根據本發明多個實施例的探針結構示意圖。 圖9顯示先前技術與本發明的探針應用於實際操作的效果差異。 圖10、11顯示根據本發明兩實施例的感測治具示意圖。Figure 1 shows a schematic diagram of the probe structure in the prior art. 2 to 8 show schematic diagrams of probe structures according to various embodiments of the present invention. Figure 9 shows the difference between the prior art and the probe of the present invention when applied to actual operations. 10 and 11 show schematic diagrams of sensing fixtures according to two embodiments of the present invention.
10:探針結構、探針10: Probe structure, probe
110:中心參考線110: Center reference line
120:頭部件120: head part
121:感測端121: sensing end
122:定位凹部122: positioning recess
123:頂止位部123: Top stop
124:第一彈簧卡接部124: The first spring clamping part
125:中心凸軸125: Central convex shaft
130:底部件130: bottom part
131:底止位部131: bottom stop
132:連接端132: connection end
133:第二彈簧卡接部133: The second spring clamping part
134:中心孔134: Center hole
140:彈簧140: spring
Claims (11)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US17/210,459 US20210341516A1 (en) | 2020-04-29 | 2021-03-23 | Probe pin and inspection module |
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US202063017008P | 2020-04-29 | 2020-04-29 | |
| US63/017008 | 2020-04-29 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| TW202141046A true TW202141046A (en) | 2021-11-01 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
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| TW109126320A TW202141046A (en) | 2020-04-29 | 2020-08-04 | Probe pin and probe fixture |
Country Status (2)
| Country | Link |
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| CN (1) | CN113567715A (en) |
| TW (1) | TW202141046A (en) |
Family Cites Families (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6844749B2 (en) * | 2002-07-18 | 2005-01-18 | Aries Electronics, Inc. | Integrated circuit test probe |
| CN201075114Y (en) * | 2007-07-13 | 2008-06-18 | 苏州光韵达光电科技有限公司 | IC testing control tool |
| JP5858781B2 (en) * | 2011-12-29 | 2016-02-10 | 株式会社エンプラス | Probe pin and socket for electrical parts |
| JP6243130B2 (en) * | 2013-03-27 | 2017-12-06 | 株式会社エンプラス | Electrical contact and socket for electrical parts |
| TWI582434B (en) * | 2015-12-18 | 2017-05-11 | 吳俊杰 | Probe device |
| TWI808090B (en) * | 2018-08-16 | 2023-07-11 | 日商由利科技股份有限公司 | Probe and detection socket with the probe |
-
2020
- 2020-08-04 TW TW109126320A patent/TW202141046A/en unknown
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| CN113567715A (en) | 2021-10-29 |
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