TW550151B - Substrate transport apparatus with multiple independent end effectors - Google Patents

Abstract

A substrate processing apparatus comprising a frame, a drive section, an articulated arm, and at least one pair of end effectors. The drive section is connected to the frame. The articulated arm is connected to the drive section. The articulated arm has a shoulder and a wrist. The arm is pivotally mounted to the drive section at the shoulder. The drive section is adapted to rotate the articulated arm relative to the frame about an axis of rotation at the shoulder, and to displace the wrist relative the shoulder. The pair of end effectors is connected to the articulated arm. The pair of end effectors is pivotally jointed to the wrist of the articulated arm to rotate relative to the articulated arm about a common axis of rotation at the wrist. Each end effector is independently pivotable relative to each other about the common axis of rotation at the wrist. At least one end effector is independently pivotable about the common axis of rotation of the wrist relative to the articulated arm.

Description

550151 Printed by the Consumers ’Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs A7 B7 V. Description of the Invention (1) The present invention relates to a substrate processing device, and more specifically, to a substrate for a transfer device with multiple independent end effectors Processing device. For manufacturers of semiconductor substrates (such as semiconductor wafers or flat-panel displays), the throughput of substrate processing equipment is a subject of great concern. The production volume of a predetermined substrate processing device has a direct impact on the price of the substrate being processed, and therefore also the final price of any electronic device that uses the substrate as a component. The higher the production volume, the lower the manufacturing cost of the substrate, and the lower the cost of the final product. The throughput of the substrate processing device depends at least in part on the transfer efficiency and speed of the substrates from the storage box such as the open universal box (F0 UP) before use to the processing device and then back to F0UP. Conventional substrate processing apparatuses include a substrate transfer apparatus having one or more end effectors M for loading one or more substrates, which can provide faster substrate transfer operations. Some of the terminal actuators of the conventional substrate transfer device operate independently. The driver for driving the end effector with M is provided at the end of the lotus arm, near the position of the end effector. This will move the mass inertia into the lotus arm, which will have a relative impact on the speed and handling of the substrate. A substrate transfer device having a terminal actuator installed at the end of the lotus arm also has a large space enclosure. The cover box of the substrate transfer arm should be as small as possible to minimize the volume of the substrate processing device, so that the largest number of processing devices can be accommodated in the predetermined production facility. The present invention provides a solution to the problems faced by the conventional substrate processing apparatus, which will be described in detail below. A first embodiment of the present invention provides a substrate processing apparatus. The device consists of a frame, a drive unit, a joint arm, and at least a pair of end actions. -4- This paper size applies to China National Standard (CNS) A4 specifications (210 X 297 €) (Please read the note on the back first) (Fill in this page again)

Revision: Printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs 550151 A7 B7 V. Composition of Invention (2). The drive unit is connected to the frame. The joint arm is connected to the driving part. The joint arm has a shoulder and a pivot. The arm portion is hingedly mounted on a shoulder portion of the driving portion. The driving unit uses K to rotate the joint arm relative to the frame along the rotation axis of the shoulder, and move the pivot axis relative to the shoulder. The opposite end action system is connected to the joint arm. The pair of end action systems are hinged to the pivot M of the joint arm for relative rotation along the pivot common axis. Each end action system is hinged relatively independently of each other and pivots along a common rotation axis on the pivot. At least one end action system is independently hinged along a universal axis of rotation on a pivot axis relative to the joint arm. The substrate transfer device provided by another embodiment of the present invention is composed of a driving unit, an upper arm, a forearm, and at least a pair of end effectors. The upper arm is connected to the driving section. The forearm is movably connected to the upper arm. The pair of end action systems are mobilely connected to the forearm so that the pair of end action bodies can move relative to the forearm. The pair of end-action systems is arranged on the forearm and can be operatively connected to the driving part K to move the pair of end-action bodies corresponding to the forearm. Each terminal action system of the opposite terminal action body operates independently of each other. The substrate transfer device provided by still another embodiment of the present invention is composed of a driving part, a joint arm, at least a pair of terminal action bodies, and another driving part. The driving part has a coaxial transmission equipment. The articulated arm controls the shoulder connected to the arm portion of the coaxial transmission device to rotate the arm portion relative to the shoulder portion and extend and retract the arm portion relative to the shoulder portion. The end-to-end action system is movably connected to the joint arm so that each end-action body can independently hinge on a common swivel sleeve with respect to the joint arm. The other driving part is controlled to be connected to the pair of terminal action bodies M to move the terminal action bodies relative to the arms. The other drive unit has at least one -5 paper size applicable to China National Standard (CNS) A4 specification (210 X 297 mm) ---- I --------- · II (Please read first Note on the back, please fill out this page)

550151 Printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs Α7 Β7 V. Description of the Invention (3) An engine mounted on the arm near the shoulder. The substrate transfer device provided by another embodiment of the present invention is composed of a driving unit, an upper arm, a forearm, and at least a pair of end effectors. The upper arm is connected to the driving section. The forearm is mobile connected to the upper arm. The pair of end action systems is mobilely connected to the forearm. A support body is mounted on the forearm. The pair of end action systems are mounted on the support body so that each end action body can rotate independently with respect to the forearm. The driving part is operatively connected to each terminal action body so that each terminal action body can be driven by the driving part to move independently. The above and other features of the present invention will be described with reference to the drawings. FIG. 1 shows an exploded perspective view of the substrate processing apparatus 10 of the present invention. Although the present invention is illustrated by a single example shown in the drawings, it should be understood that the present invention can also be modified in many ways. In addition, any suitable size, shape, or type of component or material can be used. The substrate processing apparatus 10 has a front side or normal pressure portion 12 and a rear side or vacuum portion 14 connected thereto. The design of the substrate processing apparatus shown in FIG. 1 is merely an illustration of the embodiment. In a modified embodiment, the substrate processing apparatus may have any appropriate design or structure. In the embodiment shown in Fig. 1, the front side portion 12 generally has a frame 16, a substrate support case 22, and a substrate transfer device 24. The rear side portion 14 generally has a main body portion 18, a processing module 36, and a vacuum substrate transfer device 34. The frame 16 of the front side portion 12 is adjacent to the rear side portion 14 of the substrate processing apparatus 10. The front frame 16 usually supports several substrates (only two are illustrated in the first figure). The substrate support cassette 2 2M accommodates several substrates. The substrate may include, for example, a semiconductor wafer, a flat display substrate, or any other type of suitable substrate. The frame 16 of the front side 12 is open to atmospheric atmospheric pressure. -6 This paper size applies to China National Standard (CNS) A4 (210 X 297 mm) (Please read the precautions on the back before filling this page) Order:

550151 A7 B7 V. The description of the invention (4). The atmospheric pressure substrate transfer device 24 is mounted on the frame 16 and transfers the substrate between the support box 22 and the vacuum back side portion 14 of the device 10. The main body portion 18 of the rear side portion 14 has a central chamber 26 and intermediate chambers 28,30. The processing module 36 is provided around the main body portion 18 and communicates with the central chamber 26 through an opening outside the main body. The intermediate chamber 28 communicates with the central chamber 26 through the opening inside the main body. The main body portion 18 also has an outer opening for the intermediate chambers 28, 30 to communicate with the normal-pressure front side portion 12. The vacuum substrate transfer device 34 is mounted on the main body K, and the substrate is interposed between the intermediate chamber 28 and the process chamber 36 through the central chamber 26. The processing module 36 has one or more chambers provided with a suitable system for performing substrates in any other form such as spray coating, coating, etching, wet dipping, etc., in the chamber. The central chamber 26 of the rear side portion 14 is maintained substantially under vacuum to prevent contamination of the substrate transferred between the intermediate chambers 28, 30 and the processing module 36. The rear-side outer opening 32 can be closed to isolate the central chamber 26 from the processing module 36. The inner opening 38 can be closed to isolate the central chamber 26 from the intermediate chambers 28, 30, and the outer opening 4Q of the main body portion 18 can also be closed to isolate the intermediate chamber from outside atmospheric pressure. The substrate processing apparatus 10 further includes a controller 400, and the operation of the control apparatus 10. According to the instructions of the controller 400, the atmospheric pressure transfer device 24 can transfer the new substrate from the cassette chamber 22 to the intermediate chambers 28, 30, and then transfer the processed substrate from the intermediate chamber back to the cassette chamber 22. The atmospheric pressure transfer device 24 may have a plurality of independent end effectors M to quickly move the substrate into and out of the cassette chamber 22, which will be described in detail below. One or both of the intermediate chambers 28, 30 will be designed as loading brakes. The controller 4G0 will cyclically load the braking unit and operate the vacuum substrate transfer device 34M to transfer the substrates from the intermediate chambers 28, 30 to the processing module 36 through the central chamber. The vacuum transfer device 34 may have multiple independent end-of-end movements. The paper size is applicable to the Chinese National Standard (CNS) A4 specification (210 X 297 mm) --------------- 4 packs-( Please read the phonetic on the back? Matters and then fill out this page) ·,% Printed by the Intellectual Property Bureau of the Ministry of Economic Affairs, printed by the Consumer Cooperatives 550151 Α7 Β7 V. Description of the invention (5) The working body can quickly move the substrate in and out to load the brake or processing module Detailed description will be given below. The substrate will be processed and returned to the cassette chamber 22 through the intermediate chamber. In the embodiment shown in FIG. 1, the front end 20 of the frame 16 of the front side portion 12 supports two cassette chambers 22 The box chamber 2 2 is arranged side by side. This box chamber can be a front-open uniform advancement chamber (F0UP), which can accommodate about 26,200 / 300 HiBi semiconductor substrates in a more preferred embodiment. In the changed aspect, The front side frame can support any desired number of substrate support cassettes. The cassette chamber can be of any suitable type and can accommodate any desired number of substrates. The cassette chamber can accommodate any type of substrate, including substrates used in the manufacture of flat display screens In other changes, this The substrate support box can also be provided on the side or front side of the front side frame. Each box 22 has a front side 22F facing the frame 16 of the front side portion 12. The front side 22F has an opening (not shown) for the substrate S to be removed And embedded in the individual cassette chamber 22. As shown in the first circle, the atmospheric pressure substrate transfer device 24 is mounted on the frame 16 between the cassette chamber 22 and the rear side 14 of the apparatus 10. In a more preferred embodiment In this, the substrate transfer device 24 has a driving portion 42 that can drive a joint arm 44. The vacuum portion 14 shown in FIG. 1 is only an exemplary structure, and the vacuum portion in the modified form may be provided with any appropriate form. Configuration. The main body portion 18 in the embodiment shown in Fig. 1 is rectangular. The processing module 36 is provided on three sides of the main body portion 18, and may be provided on one or two sides in a modified form. In addition, The two processing modules 36 in this embodiment are provided on both sides of the main body portion 18. As shown in FIG. 1, the processing modules 36 provided on each side of the main body portion are radially deviated from the vacuum substrate transfer device. 34. The intermediate chambers 28, 30 provided on the side of the main body portion 18 and adjacent to the atmospheric pressure module 12 can be connected with The board transfer device 34 is made of radioactive paper. The paper size is applicable to China National Standard (CNS) A4 (210 X 297 mm) (Please read the precautions on the back before filling this page). Printed by the Consumer Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs 550151 A7 B7___ V. Description of Invention (6). The substrate transfer device 34 can be located approximately in the center of the central chamber 26 of the main body 18. The vacuum substrate transfer device 34 can be similar And the atmospheric pressure transfer device 24, has a driving portion 42A and a joint arm 44A. As previously mentioned, the joint arm of the vacuum transfer device 34 is provided with a plurality of independent terminal action bodies. The atmospheric pressure transfer device 24 in this embodiment is substantially similar to the vacuum transfer device 34. Therefore, the atmospheric pressure transfer device 24 and the vacuum transfer device 34 will be described in detail with reference to the normal pressure transfer device 24 to K. As shown in Fig. 2, the articulated arm 44 has four sections, that is, an upper arm portion 60, a forearm portion 62, and two terminal action bodies 64, 66. The upper arm portion 60 and the forearm portion 62 are connected side by side. One end of the forearm portion 66 supports two end action bodies 6 4, 6 6 which are superposed on each other. The upper arm portion is connected to the driving portion 42, which will be described separately below K. In this embodiment, the driving portion 42 of the transfer device 24 can be fixedly mounted on the frame 16, and the center of the transfer device is located between the parallel box chambers 22 (see FIG. 1). In a modified aspect, the drive unit can also be mounted on a frame that can move on a plane relative to the frame. The driving portion 42 is a three-axis driving portion, and the joint arm 44 can be moved in three axial directions. The driving section 42 includes a suitable driver (not shown) that can vertically lift (ie, move along the axis direction) the joint arm 44. For example, the driving section may include a box to support the joint arm 44 Hood 46 (see Figure 2). The vertical drive unit may include an engine and a ball bolt (supported as shown) connected to the box cover, and can be moved along the ball bolt in the Z direction shown in Figure 2 during operation. On the box cover. In another modification, the vertical drive unit is any applicable type of linear drive. The vacuum transfer device (see Figure 1) may not include a vertical drive unit. 爰 Refer to Figures 2 and 3, The box cover preferably includes a coaxial driving portion 48 for moving the joint arm 44 along the direction of the rotation axis 0 (ie, S-S-9). This paper size is applicable to China National Standard (CNS) A4 (210 X 297 mm). ) (Please read the notes on the back before filling this page) Order-·

Printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs 550151 ΚΙ ___ Β7 V. Description of the invention (7) movement) and the telescopic arm is extended and contracted along the radial axis T (that is, T lotus movement). In this embodiment, it is shown that the coaxial driving section 48 of the driving section 42 is a coaxial driver such as that disclosed in U.S. Patent No. 5,83 9, 6 58, which will be cited below as a reference. In the changed aspect, the coaxial drive unit is any drive that is suitable for K to move the joint arm K to generate 0 and T lotus movements. As shown in Fig. 3, the case cover 46 is a flange having a central opening for extending two coaxial output shaft shanks. The outer shaft system M is designated by 4 and the inner shaft system M is designated by 5. A guide bearing 6K is provided at the end of the outer shaft to isolate the inner shaft from the outer shaft and to support it. The two-axis shank is independently rotated along the rotation axis 0. The rotation of the arbor includes rotation together or M opposite rotation. K can be used to rotate the joint arm 44 in the same direction, and M telescopic joint arm 44 can be rotated in the opposite direction. The inner shaft is slightly longer than the outer shaft, and the end of the inner shaft protrudes beyond the box cover 46 and beyond the end of the outer shaft. Is the end of the inner shaft 5 connected to the drive pulley of the transmission system 7G? 1. The outer shaft end is directly fixed to the upper arm portion 60. Therefore, when the outer shaft 4 rotates, the upper arm portion will rotate along the 0-axis direction. A rotor 7 is supported outside the outer shaft 4, and a corresponding stator 8 is supported outside the rotor 7. Similarly, a rotor 9 is supported on the outer side of the inner shaft 5, and a corresponding stator 11 is supported on the outer side of the rotor 9. Each of the stator drive parts can rotate along the opposite shaft. Each pair of rotor-stator combinations 7, 8 and 9, 10 can form components of a conventional brushless DC motor, such as the M & K series produced by Technology Inc., 2 0 Thirteenth Avenue, Ronkonkoia, NY 1 1 7 7 9 . In the modified form, the driving part may include any other type of engine, such as a brushless AC motor, a step motor, a conventional (brushed) AC or DC motor, etc., and the inner shaft and the outer shaft are rotated by K. Each paper size is in accordance with Chinese National Standard (CNS) A4 (210 X 297 mm) (Please read the notes on the back before filling out this page) Binding-· 550151 Printed by the Intellectual Property Bureau of the Ministry of Economic Affairs and Consumer Cooperatives Α7 Β7 5. Description of the invention (8) The shaft shanks 4, 5 may have corresponding coding mechanisms 13, 15 and the rotation of the shaft shank is measured by M. The encoders 13 and 15 are connected to the controller 40 () (see Fig. 1) and input signals of the shaft rotation and direction to the controller. Figures 4 and 5 show schematic sectional elevations and plan views of the articulated arm 44 (the terminal action bodies 64, 66 are not shown in Figure 5). As described above, the joint arm 44 has an upper arm portion 60, a forearm portion 62, and two terminal action bodies 64, 66fc in this example, and may have a desired number of terminal action bodies in a changed state. . The joint arm 44 also includes a transmission system? 〇 K rotates the forearm 62 and two end action bodies to drive the bar 78, 80M to independently rotate the end action bodies 64, 66. The upper arm portion 60 has a box cover 61 or any suitable structural framework as shown in FIG. As previously described, the case cover 61 (made of any suitable material) of the upper arm portion 60 is directly fixed to the outer shaft 4 of the coaxial drive portion. The connection of the upper arm box cover δΐ to the outer drive shaft 4 will constitute the shoulder 72 of the joint arm 44. As shown in Fig. 4 (a), the outer case cover 61 is also hinged to support the forearm 62 to form the elbow joint 74 of the articulated arm. As can be seen from Figs. 2 and 4, the rotation of the outer shaft 4 will rotate the upper arm box cover 61 and the entire joint arm along the Θ axis extending through the shoulder 72. As shown in Figs. 4 and 5, the outer case cover 61 on the upper arm houses a transmission system 70 and some terminal action body drive systems 78, 80. Transmission system 70-generally has a drive pulley 71, roller? 3 and transmission belt 70. As mentioned above, the driving pulley 71 is mounted on the inner shaft 5 of the coaxial driver of the shoulder 72 of the joint arm. The roller 73 is installed at the elbow joint 74 of the joint arm 44 on the outer shaft of the coaxial shaft 90. The transmission belt 7G is connected to the driving pulley 71 and the roller 73. The rotation of the driving pulley 71 caused by the rotation of the inner shaft 5 will drive the roller The rotation of 73 and shaft shank 92 0 -11- This paper size is applicable to China National Standard (CNS) A4 (210 X 297 mm) ------------ 4 packs-(Please read first (Notes on the back, please fill out this page).

Printed by the Consumer Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs 550151 A7 B7 V. Description of the invention (9) The coaxial shaft handle 9G of the elbow joint 24 is preferably composed of three coaxial shaft handles 92, 94, 96. The outer shaft 92, the intermediate shaft 94 and the inner shaft 96 are rotatably supported on the outer box cover 61 by an appropriate combination of pressing and rollers or a ball bearing (not shown), so that the shaft handle can be attached to the joint arm. The elbow joint rotates independently along the axis yi. The outer shaft 92 is the shortest, while the intermediate shaft 94 and the inner shaft 96 extend side by side on the outer shaft K and outside K (see FIG. 4 >-. One end of the outer shaft 92 is fixed to the forearm portion 62, and the roller 73 is fixedly installed. On the outer shaft 92. Therefore, when the transmission system 70 rotates the roller 73, the forearm portion 62 will rotate along the axis Y1 of the elbow. The components of the end effector drive system enclosed in the box cover 61 outside the upper arm include Engines 82, 84 and transmission joints 79, 81. The outer casing cover 61 has an extension 63, which is next to the inner portion 611 of the casing cover {see FIG. 4). The medial portion 611 extends between the shoulder portion 72 and the elbow joint 74. As shown in FIG. 4, the extension portion 63 is provided on the opposite side of the shoulder portion (ie, the rotation axis Θ), starting from the inner portion 611 of the outer case cover. The extension portion 63 may be enlarged relative to other portions of the outer case cover 61. The enlarged portion has an inner wall 63W K provided at a sufficient distance from the shoulder for the forearm to rotate 360 degrees freely at the elbow joint along the Y1 axis without affecting the extension 63 of the upper arm portion 60. As shown in Fig. 4A, the extending portion 63 and the inner portion 611 form a height difference or recess 61R at the upper arm portion 62 at the forearm portion 62. Therefore, under this design, the forearm portion 62 can be provided in the concave portion 63R of the upper arm portion 60 to make the overall stacking height of the joint arm (ie, the distance between the top surface 66T and the bottom surface 66B, shown as H in the fourth figure) Smaller than traditional hinged arms. In addition, when the extension 63 of the upper arm portion 60 deviates from the shoulder portion, the height of the extension portion 63 can be designed to cover the engines 82, 84 of the end-action body drive system without increasing the stacking height of the joint arms or affecting the forearm portion. The lotus moves. In this embodiment, the extension 63 seals the cover. -12- This paper size is applicable to China National Standard (CNS) A4 (210 X 297 mm) -------(Please read the precautions on the back first (Fill in this page again) Order _% _ Printed by the Intellectual Property Bureau of the Ministry of Economic Affairs's Consumer Cooperatives 550151 A7 B7___ V. Description of the invention (10) The two engines 82, 84 of the end-actuator drive system. The two engines 82, 8 and 4 in this embodiment are enclosed side by side, and will be described in detail below with reference to FIG. 6. Then, as shown in FIG. 2, the outer case cover 61 has a substantially truncated cone shape, gradually narrows at the elbow joint 74, and gradually widens toward the extension 63. However, in the modified form, the outer cover of the upper arm part can be made into any appropriate shape to accommodate the engine and the transmission of the end-action body driving system and the forearm for the transmission system to move. Fig. 6 is a schematic cross-sectional view of the extended portion 63 of the upper arm case cover 61 taken along line 6-6 in Fig. 2. As shown in Fig. 6, two engines 82, 84 in this embodiment are installed side by side. Any suitable number of engines can be provided in the modified form for independent rotating end effectors, and the engines can be arranged on the upper arm in any desired manner. For example, in a modified aspect, the joint arm has a terminal action body, and only one engine that drives the terminal action body by K is provided on the extension of the upper arm portion. In another variation, the engines of the upper arm may be arranged in any suitable manner, such as symmetrically or aligned with the rotation axis of the shoulder of the joint arm. The engines 82, 84 may be of any suitable type, but M such as a brushless DC motor manufactured by KollMorgan is preferred. This is because the brushless motor can minimize the contact of moving components and prevent the generation of pollutants in the vacuum part of the device, so it is most advantageous for the vacuum transfer device 34 (see Fig. 1). Engines 82, 84 are roughly similar, unless otherwise noted, reference will be made to engine 82 to M. The engine S2 has a case cover 82 'supporting the shaft 82S. The box cover 82 'supports the top 63T of the self-extending portion 63. The shaft 82S is rotatably supported in the casing by an appropriate diameter and an axial bearing. Installed on the shaft 82S -13- This paper size applies to Chinese National Standard (CNS) A4 specifications (210 X 297 mm) — — — — — I 1 (Please read the precautions on the back before filling this page) Order ·· 550151 Α7 Β7 V. Description of the invention (11) (Please read the precautions on the back before filling out this page) The Consumer Cooperative of Intellectual Property Bureau of the Ministry of Economic Affairs printed a rotor 82R of a DC motor. The stator 82T is installed in the box cover 82H. The shaft 82S is also provided with an appropriate encoder (not shown) K connected to the controller 400 (see Fig. 1). The rotation / position signal of the shaft 82S is input to the controller. When the engine 82 is started, the engine will drive the end effector drive system 78K to rotate the end effector 64 (see FIG. 4). Thus, one end of the shaft 82 S is connected to the driving pulley 101 of the transmission joint 79. The engine 84 is used to supply power to the 80M rotating end effector 66 of the system. The shaft 84S is connected to a driving pulley 103 of a transmission joint 81. The end of the shaft 84S is provided so that the pulley 101 is located under the pulley 71 (see FIG. 4). The driving joint 79 (located at the upper arm portion 6G) of the driving system 78 includes a driving pulley 101, a roller 104, and a transmission belt 102. The size of the roller 104 and the drive pulley 101 is designed to provide 4: 1 pulley reduction. In the modified form, the drive section of the upper arm is driven by any other suitable ratio of roller and pulley. The roller 104 is mounted on the coaxial shaft 90 with the intermediate shaft 94 at the elbow joint 74 (see Fig. 4). The transmission belt 102 is connected to the driving pulley 101 and the roller 104. The drive end 81 (located on the upper arm portion 60) of the second end-action body drive system 80 includes a drive pulley 103, a roller 106, and a transmission belt 105. The roller 106 is mounted on the inner shaft 90 of the coaxial shaft shank 90 at the toggle joint 74. The transmission belt 105 is connected to the driving pulley 103 and the roller 106. As shown in Fig. 4, the transmission joints 79, 81 are arranged continuously on the upper arm, and the transmission joints 81 are arranged below the transmission joint 79. The two transmission joints 79 and 81 operate the forearm under the transmission system 70K. FIG. 5 shows the transmission system 70 and the end effector driving system in the joint arm 44? Schematic drawing of the bottom surface at 8,80. As shown in Section 5 (b), can a tension member such as a spring-loaded bearing be provided in the joint arm? 〇Τ, 79Τ, 8GT Μ Avoid transmission belt 70 -14- This paper size applies to China National Standard (CNS) A4 (210 X 297 mm) Printed by the Consumer Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs 550151 A7 B7 V. Description of the invention ( 12), 102,105 slack, and use K to limit the transmission belt to disengage the pulley of the connected drive system. As shown in FIGS. 4, 5, and 6, the end effector drive systems 78, 80 each have a second transmission section 8 3, 85 that is enclosed in the forearm portion 62. The driving section 85 transmits a torque M from the inner shaft 96 (started by the driving section 81) to rotate the terminal end action body 66. The transmission joint 83 transmits the torque K from the intermediate shaft 94 (activated by the transmission joint 79) to rotate the end effector 64. The transmission section 85 includes a pulley 110, a roller 114, and a transmission belt 112. The pulley 110 is mounted on the upper end of the inner shaft 96 so that the pulley and the shaft shank can rotate together along the Υ1 axis at the elbow joint. The roller 114 is fixedly mounted on the shaft 120 of the coaxial arbor 118 at the elbow joint end 62W of the forearm. The coaxial shaft shank 118 includes an outer shaft 120 and an inner shaft 122. The outer and inner shafts 120, 122 are supported by appropriate radial and axial bearings so that the shank can rotate independently at the elbow joint 76 along the rotation axis Υ2. The outer shaft 12 (3 series is fixedly connected to the end effector 64. Therefore, when the torque is transmitted from the transmission belt 112 to the roller 114, the outer shaft 120 will cause the end effector 64 to rotate along the shaft Υ2. The transmission joint 83 includes a pulley 116, Roller 119 and transmission belt 118. The pulley 116 is installed on the upper end of the intermediate shaft 94. The roller 119 is fixedly installed on the inner shaft 122 so that the roller rotates along the shaft 2 along with the shaft handle. The inner shaft 122 is also fixedly installed on the end effector 6 6 Then, when the torque is transmitted from the pulley 116 provided on the shaft handle 94 to the roller 119 through the transmission belt, the inner shaft 122 will cause the end effector 66 to rotate along the axis Υ2 at the elbow joint. Next, the end effector can independently rotate along the axis Υ2 at the elbow joint. When transferring the substrate, this helps to quickly move the substrate into and out of the predetermined compartment. For example, the end effector 6 4 can extend into the compartment from which Grab a substrate, -15- This paper size applies to China National Standard (CNS) A4 (210 X 297 mm) " (Please read the precautions on the back before filling this page)

550151 Printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs Α7 Β7 V. Description of the invention (13) The other end of the moving body 66 (grabbing alternatives) is slightly shifted, such as not exceeding 90 degrees, to avoid disturbing the box. Then the joint arm 44 moves the substrate in the M retreat cassette chamber, and makes the other end action body 66 face the cassette chamber. Then, the first terminal action body 64 will turn, and the joint arm will move K to place the second terminal action body 66 in the box. The present invention provides a fast wafer / substrate transfer operation through a transfer device 24, 34K having two independent joint end effectors 64, 66 and two joint joint arms 44. In the present invention, the articulated arm 44 is combined with two engines 82, 84 provided on the upper arm portion 60 to form a three-axis automatic control device. The two engines 82, 84 located on the upper arm 6G are off-center of the automatic operating device (the rotation axis Θ as shown in Fig. 2) but still within the swing diameter of the joint arm. The truncated cone or wedge shape of the upper arm portion 60 can be used to drive the joint end terminal action / thumb joint module engine system to share the height of the upper arm portion and the forearm portion. In contrast, the conventional triaxial transfer device is an M engine that starts on the coaxial shaft shank provided on the shoulder, above the arm, forearm, and end effector. The engine is vertically stacked on the shaft shank so that each engine can be connected to the corresponding shaft shank. The engine stacking method in the conventional device increases the total height of the driving part of the joint arm shoulder, and increases the enclosure space required by the transfer device. In addition, the articulated arm mounted on the top of the driving portion of the shoulder is raised relative to the bottom of the processing device. This can prevent the top-most end-action body from contacting the substrate at the lowest position of the processing module or storage area. This height needs to be lowered so that the top end action body 66 can reach the lowest base plate. In this embodiment, the driving engine of the mobile terminal end effector is provided on the upper arm portion, and the shape of the driving engine is made into the shape of the height of the upper arm portion and the forearm portion, thereby achieving the object. Shrink with timing belt and 4: 1 pulley -1 6-This paper size is applicable to China National Standard (CNS) A4 (210 X 297 mm) (Please read the precautions on the back before filling this page)

550151 A7 B7 Printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs. 5. Description of the invention (14) Reduce the engine to a three-axis elbow joint system 90. From the elbow joint to the pivot shaft, the engine is once again merged with the timing belt to form a coaxial pivot shaft connection for the installation of the end effector. The center of gravity of the upper arm will move closer to the center of the automatic control system. One of the engines can be removed and the joint arm can be used as a 4-axis design. The existing solution is to place the engine at the pivot joint. In this case, the engine is set on the upper arm, which can greatly reduce the inertia of the forearm and improve the controllability of the automatic control joint arm. It should be noted that the description on K is only for the purpose of illustrating the present invention. A person skilled in the art can make various changes without departing from the spirit of the present invention. Therefore, each of these changes should belong to the scope of patent application of the present invention. Brief description of the drawings Figure 1 is a schematic plan view of a substrate processing apparatus having the features of the present invention; Figure 2 is a perspective view of a substrate transfer device of the substrate processing apparatus shown in Figure 1; Figure 3 is shown in Figure 2 Sectional view of the driving part of the substrate transfer device; Figure 4 is a schematic elevational view of the joint arm shown in Figure 2; Figure 4 A is a schematic elevational view of the joint arm in another orientation; Figure 5 is the second The schematic bottom view of the joint arm of the substrate transfer device shown in the figure; and FIG. 6 is a cross-sectional view of the end-moving body driving part of the joint arm made along the line 6-6 of FIG. 2. -17- < Please read the note 3 on the back before filling in this page) Binding · ·

This paper size is in accordance with Chinese National Standard (CNS) A4 (210 X 297 mm) 550151 A7 B7 V. Description of Invention (15) Symbol Description Duplicate Printing of Employees' Intellectual Property Bureau of the Ministry of Economic Affairs 4-Outer Axis 5-Inner Axis 6-Guide bearing 7, 9-Rotor 8, 11-Stator 10-Substrate processing device 12-Front side or normal pressure section 13, 15 _ Encoder 14-Rear side or vacuum section 16-Frame 18-Main body section 22-Substrate support Box 22F-Front side 24-Substrate transfer device 26-Central chamber 28, 30-Intermediate chamber 32-Outside opening 34-Vacuum substrate transfer device 36-Processing module 38-Inside opening 40-Outside opening 400-Controller 42- Drive section 44 -Joint arm 46 -Box cover 48 -Coaxial drive section 60 -Upper arm section 61 -Box cover 61E, 63R -Recessed section 62 -Forearm section 63 -Extended section 63W -Inner wall 64, 66 _End end action body 66T- Top surface 66W-bottom surface 70-transmission system 71-drive pulley 72-shoulder 73-ape wheel 74-elbow joint 78, 8 0-drive system 79, 81-drive section 82, 84 _ engine 83, 85-section Two drive joints 90-Coaxial shaft shank 92-Outer shaft -18- (Please read the notes on the back first (Please fill this page again)

This paper size applies to China National Standard (CNS) A4 (210 X 297 mm) 550151 A7 B7 V. Description of the invention (16) 94-Intermediate shaft 96-Inner shaft 101, 1 〇3-Drive pulley 102, 105-Transmission 104, 106-Roller 110-Pulley 112-Transmission Belt 114-Roller 116-Pulley 11 8-Coaxial Shaft 119 Roller 120-Outer Shaft 122 • Inner Shaft Printed by the Consumers' Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs-19 · (Please read first (Notes on the back then fill out this page)

This paper size applies to China National Standard (CNS) A4 (210 X 297 mm)

Claims (1)

550151 Α8 Β8 C8 D8 Printed by the Consumer Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs ☆, patent application scope 1. A substrate processing device including a frame; a driving part connected to the frame, a joint arm connected to one of the driving parts, the The joint arm has a shoulder and a pivot. The arm is hingedly mounted on the shoulder of the driving part. The driving part uses K to rotate the joint arm relative to the frame along the rotation axis of the shoulder and makes the pivot Relative to the shoulder movement; and at least one pair of end action bodies connected to the joint arms, the pair of end action systems are hinged to the pivot M of the joint arms to rotate along the pivot pair of cypress pairs, each of which is end action The systems are hinged relatively independently of each other, and are pivoted along the universal rotation axis on the pivot axis. At least one end action system is independently hinged along the universal rotation axis 圼 on the pivot axis relative to the joint arm. 2. The device according to item 1 of the scope of patent application, wherein the joint arm has an upper arm portion and a front arm portion connected to the upper arm portion, and the at least one pair of terminal action systems are movably mounted on the forearm portion. 3. The device as described in item 1 of the scope of patent application, wherein the driving unit has a driving motor for independently driving each terminal action body of the pair of terminal action bodies. 4. The device described in item 3 of the scope of the patent application, wherein each of the terminal action systems is drivably connected to a driving engine, and the terminal action body is independently driven by the relative transmission M. 1 2 0-J = --.----- (Please read the notes on the back before filling in this page) The paper size applies to the Chinese National Standard (CNS) Α4 specification (210 × 297 mm) 550151 A8 B8 C8 D8 6. Scope of patent application (please read the precautions on the back before filling this page) 5. For the device described in item 1 of the scope of patent application, the drive section has a shoulder provided on the shoulder of the joint arm and the drive section The coaxial shank in the hood, wherein the driving portion has another driving portion that moves at least one of the pair of end-acting bodies by at least one engine K, and the at least one engine is provided on the arm portion above the joint arm. 6. The device according to item 5 of the scope of the patent application, wherein the at least one engine is provided near the coaxial shaft shank of the upper arm. 7. The device according to item 5 of the patent application, wherein the upper arm portion has a structure that surrounds at least one engine with K. 8. The device according to item 5 of the scope of patent application, wherein the upper arm portion supports a forearm portion at the elbow joint, wherein the upper arm portion has an extension portion extending from the shoulder K and the elbow joint end in the opposite direction The at least one engine is mounted on an extension of the upper arm portion. Printed by the Consumer Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs9. The device described in item 5 of the scope of patent application, wherein the upper arm has another engine mounted thereon to independently rotate the other end action of the opposite end action body The body rotates along a common axis of rotation. 10. The device according to item 9 of the scope of the patent application, wherein the at least one engine and the other engine are adjacent to the extension provided on the upper arm portion, and the drive shafts of the at least one engine and the other engine deviate from each other and are substantially -2 1- This paper size applies the Chinese National Standard (CNS) A4 specification (210X297 mm) 550151 Printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs A8 B8 C8 D8 6. The scope of patent application is parallel. 11. The device according to item 9 of the scope of patent application, wherein the at least one engine and the other engine are installed at approximately equal distances from the upper arm and the shoulder. 12. A substrate transfer device, comprising: a driving part; an upper arm connected to one of the driving parts; a forearm movably connected to one of the upper arms; and at least one pair of terminal action bodies, the pair of terminal action systems are mobilely connected to the forearm so that The pair of end-action bodies can move relative to the forearm. The pair of end-action bodies is arranged on the forearm and can be operatively connected to the driving part M to move the pair of end-action bodies corresponding to the forearm. The end-action systems of the pair of end-action bodies are mutually Independent lotus author. 13. The device according to item 12 of the scope of patent application, wherein at least one of the at least one pair of end effectors can be driven by the driving portion to move independently with respect to the forearm. 14. The device as defined in item 12 of the patent application scope, wherein the at least one pair of end action systems rotates relative to the forearm along a common axis of rotation. 15. The device as described in item 12 of the scope of patent application, wherein the driving part has a pair of terminal action body driving engines, each of which is driven by the terminal action body-22-This paper standard applies to China National Standard (CNS) A4 Regulations ( 210 X 297 mm) (Please read the precautions on the back before filling out this page)-Binding -------- 550151 A8 B8 C8 D8 VI. Patent Application Scope The engine independently drives the at least one pair of end effectors One of the terminal action bodies. (Please read the precautions on the back before filling out this page.) 16. The device described in item 15 of the scope of patent application, in which the pair of drive engines is located near the shoulder shaft of the upper arm. 17. The device according to item 5 of the scope of patent application, wherein the pair of terminal action bodies drive the engine system and are arranged side by side on the upper arm. 18. The device according to item 15 of the scope of patent application, wherein the at least one pair of end effector driving engines are provided at positions where the upper arms deviate from the shoulders, and the at least one engine is provided at the opposite side of the shoulders from the upper arm and the forearm. The elbow joint formed between. 19. The device according to item 2 of the patent application scope, wherein the upper arm has an extension, and its size is designed to accommodate a pair of end effector driving engines. Printed by the Consumer Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs 20. The device described in item 19 of the scope of patent application, wherein each of the pair of end-actuator-driven engines has a shaft handle, and a pulley can be connected to the drive Corresponding end-action bodies of at least one pair of end-action bodies, wherein the pulleys on each shaft are arranged between the uppermost pulley of the coaxial shaft and the lower side of the upper arm. -23- 1 This paper size applies to Chinese National Standard (CNS) A4 (210 x 297 males) " Printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs 550151 A8 B8 C8 D8 VI. Application for patent scope 21 · If applying for a patent The device described in item 12 of the scope, wherein the upper arm has a first portion extending between a shoulder of the upper arm and an elbow joint between the upper arm and the forearm, and the second portion extends from the first portion at The opposite side of the shoulder part, wherein the driving part has a pair of engines arranged on the second part to drive the terminal action body. 22. The device as described in item 21 of the scope of patent application, wherein the second part and the first part form a recess for the forearm. 23. The device as claimed in item 12 of the scope of the patent application, wherein the upper arm has a generally wedge-shaped sodium-capacity contraction transmission system, and the connecting terminal action body K drives the engine located at the driving portion of the upper arm. 24. A substrate transfer device, comprising: a driving portion having a coaxial shaft shank transmission device; controlling a joint arm connected to a shoulder portion of the arm portion of the coaxial transmission device, so that the arm portion can be rotated relative to the shoulder portion, and The arms are telescopic relative to the shoulders; at least one pair of end action bodies, the pair of end action systems are mobilely connected to the joint arms so that each end action body can independently articulate a common rotation axis relative to the joint arms; and another drive The part is controlled to be connected to the pair of end effectors to move the end effectors relative to the arm, and the other driving part has at least one engine mounted on the arm near the shoulder. -24- ^ The paper size applies the Chinese National Standard (CNS) A4 specification (210 x 297 public love ^ ----- it ----. # 1 -------- t -------- -Preparation (please read the precautions on the back before filling this page) 550151 A8 B8 C8 D8 VI. Patent application scope 25 · The device described in item 24 of the patent application scope, where the at least one engine is installed on the arm It is located on the opposite side of the shoulder from the elbow joint of the articulated arm. 26. The device according to item 24 of the patent application scope, wherein the other driving part has a pair of engines mounted on one of the arm parts, and is moved by K at least A pair of end effectors. 27. The device according to item 26 of the patent application scope, wherein each engine of the pair of engines has a shaft shank and is provided with a pulley for driving connection to the corresponding of the at least one pair of end effectors. An end effector, in which the pulleys of each shaft shank are arranged between the uppermost pulley of the coaxial shaft shank and the lower side of the upper arm. 28 · A substrate transfer device includes: a driving part; an upper arm connected to one of the driving parts Move freely to one of the forearms; and move freely At least one pair of end action bodies connected to the forearm, wherein a support body is installed on the forearm, and the pair of end action systems are mobilely mounted to the support body so that each of the end action bodies can independently rotate the forearm, and the driving part is operatively connected To each end of the end action body can make each end of the end action body can be driven by the drive unit to move independently. -25- This paper size applies to China National Standard (CNS) A4 specifications (210 X 297 public love ^ .-------- --- I -------- Order --------- line (Please read the precautions on the back before filling this page) Printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs 550151 A8 B8 C8 D8 VI. Application scope 29. The device as described in item 28 of the scope of application for patent, in which the driving extension arm is extended to move and the extension arm is extended. One by one set to the middle of the arm, the upper part of the body should be moved, the actuating body's short-turning action part drives the shoulder alone, and the upper arm body's upper part is at the end of the middle position. To ...! One of the articulated joints is connected to the middle of the elbow and passes through the elbow- ----- ill ------------ Order · 1! 1 丨 — 丨 -Ί (Please read the notes on the back before filling out this page) The paper size of the paper is applicable to China National Standard (CNS) A4 (210 X 297 mm)