TW573128B - Voltage measuring method, electrical test method and apparatus, semiconductor device manufacturing method and device substrate manufacturing method - Google Patents

Description

573128 A7

V. Description of the invention (1) Background of the invention 1. Field of invention (please read the precautions on the back before filling out this page) The present invention relates to a voltage measurement method for reading out by operating a semiconductor device. The voltage applied to a pixel electrode for each pixel. The present invention also relates to a method for testing whether a pixel region works normally by using this voltage measurement method. The invention particularly relates to a non-contact voltage measurement method and electrical test method, and a non-contact electrical test device using the method. The present invention also relates to a method for manufacturing a semiconductor device, including a test process using a sigma-g method, and also relates to a semiconductor device manufactured by such a semiconductor device manufacturing method. The invention also relates to a method for manufacturing a device substrate, including a test process using the test method. Employees of the Intellectual Property Bureau of the Ministry of Economic Affairs printed the invention and also related to a method for measuring voltage in an LED panel 'the panel has an organic light emitting device (OLED) sealed between a substrate and a cover member' 〇The pixel is operated before the LED and can be used to read the voltage applied to the pixel electrode. The present invention also relates to a method for testing whether the pixel area works normally by using the voltage measurement method. The invention particularly relates to a non-contact electrical test method and a non-contact electrical test device using the method. The OLED panel installed with 1C and so on and including a controller is referred to as an LED module in the description. At the same time, the combination of the LED panel and the OLED module is called a light-emitting device. 2. Relevant technical description In recent years, the technology of forming TFTs on a substrate has come a long way. -4- The paper size is applicable to the Chinese National Standard (CNS) A4 specification (210 X 297 mm) 573128 A7 _____B7_ V. Description of the invention ( 2) (Please read the notes on the back before filling in this page). Its development has progressed to be applicable to active matrix electronic displays. In particular, a TFT using a polycrystalline silicon film has more localized field effect mobility (also called mobility) than a TFT using an amorphous silicon film, and thus can operate at high speed. Therefore, the control of pixels which is usually performed by a driving circuit provided outside the substrate can be performed by a control circuit formed on the same substrate as the pixels. This active matrix electronic display has many advantages and prices, including the fabrication of various circuits and components on the same substrate in order to reduce manufacturing costs, reduce the size of electronic displays, increase yield and save production capacity. Among electronic displays, research on active matrix light-emitting devices with OLED light-emitting elements has made positive progress. Naturally-emitting OLEDs have a high degree of clarity, ideally reduced in thickness because they do not require the background light required in a liquid crystal display (LCD), and the viewing angle is not limited. Therefore, the use of OLED light-emitting devices as a display device replacing CRT and LCD has attracted attention. The OLED printed by the Consumer Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs has a layer containing organic compounds (organic light-emitting materials) (hereinafter referred to as an organic light-emitting layer). Electroluminescence can be obtained by applying an electric field, an anode layer, and a cathode Floor. In the specification, each layer provided between the anode and the cathode of an OLED is defined as an organic light emitting layer. The organic light emitting layer specifically includes a light emitting layer, a hole injection layer, an electron injection layer, a hole transport layer, and an electron transport layer. Electroluminescence of organic compounds includes luminescence (fluorescence) when returning from a single-stage excitation state to a grounded state, and luminescence when returning from a three-stage excitation state to a grounded state (this paper size applies Chinese National Standard (CNS) A4 specifications (210X297 Mm> -5-573128 A7 B7 V. Description of the invention (3) Phosphorescence) (Please read the precautions on the back before filling out this page) The organic light-emitting layer will deteriorate rapidly due to heat, light, humidity and oxygen. According to In the manufacturing method, when manufacturing an active matrix light-emitting device, an LED is often formed at a relatively high temperature in a pixel area. The OLED is formed after the interconnection temperature and the TFT are formed at the processing temperature. After the OLED is formed, the OLED will not be exposed to The outside air will bond the substrate with the OLED (OLED panel) and a cover member together, and then it can be sealed (encapsulated) with a seal. After encapsulation is strengthened from the outside by means of packaging, etc., the connection The previous connector (FPC, TAB, etc.) is connected between the terminal protruding from the component or circuit formed on the substrate and an external signal terminal. This An active-matrix light-emitting device was made. Printed in this active-matrix light-emitting device by the Consumer Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs, the voltage applied to the organic light-emitting layer from a pair of OLED electrodes is set in each figure The TFT on the element is used to control it. Therefore, if a problem (point of failure) occurs at one point, the TFT in the pixel area will not function as a switching element to cut off or short-circuit the mutual connection. Voltage cannot be applied to the organic light-emitting layer possessed by the OLED. In this case, the pixels cannot be displayed according to the required tone level. Before this active-matrix light-emitting device, active-matrix liquid crystals that have been put into mass production In a display, interconnections and TFTs are formed in a pixel region before a liquid crystal display is completed, and liquid crystal is filled between a panel having a pixel region (a liquid crystal panel) and a substrate having an opposite electrode. Then, Store the charges on the capacitors owned by each pixel. Measured on a pixel-by-pixel basis-6-This paper size applies to China National Standard (CNS) A4 specifications 210X297 mm) Printed by the Consumer Cooperatives of the Intellectual Property Office of the Ministry of Economic Affairs 573128 A7 ___B7_ V. Description of Invention (4) A test is performed to determine whether there is a defect in the pixel area. However, in many cases, this Each pixel of this light-emitting device has more than two TFTs. Sometimes an electrode (pixel electrode) of an OLED and a capacitor are connected together by a TFT. In this case, even if the measurement is stored on the capacitor The amount of charge is also difficult to test the interconnection between the capacitor and the pixel electrode and whether all TFTs are defective. At the same time, if the electrical operation is tested before the OLED panel is connected to the connector, the terminals or interconnection points of the OLED panel need to be tested A precision plug (probe) is used to allow current to flow or apply voltage. However, the direct use of probes on interconnection points or terminals may cause cracks on the interconnection points or terminals and generate fine dust. Dust created during the test steps can adversely reduce yields for subsequent processing. It is possible that the actual display manufactured from the completed light emitting device is determined to be defective. However, even for an OLED panel where no product is actually formed, in order to be different from ordinary products, it is necessary to complete a light-emitting device by forming an OLED, packaging, and connecting the connector. In the case of a defective OLED panel, it is impossible to save time and cost, because waste has been caused in the OLED formation step, the packaging step and the connector connection step. At the same time, if an OLED panel is formed using a substrate that can be divided multiple times, the step of packaging and connecting the connectors is a waste, and it is also impossible to save time and costs. In view of the above problems, an object of the present invention is to provide an electrical test method (hereinafter referred to as a test method), which can confirm whether there is a defect in an interconnection point of a pixel area or a TFT before completing a light emitting device, which is advantageous China National Standard (CNS) A4 specification (210X297 mm) is applied to the main paper size-(Please read the precautions on the back before filling this page)

573128 A 7 B7 V. Description of the invention (5) (Please read the precautions on the back before filling out this page) Mass production of dynamic matrix light-emitting devices, and provide an electrical test device using this test method (hereinafter referred to as the test only) Device). A further object of the present invention is to provide a simple test method in a method for manufacturing a light-emitting device, without using a probe at an interconnection point or a terminal, and to provide a test device using the test method. A further object is to provide a method of manufacturing a semiconductor device using this electrical test method, and a semiconductor device manufactured using this manufacturing method. · The inventors have considered that electromagnetic induction is used to apply a voltage to an interconnection point held by a pixel region of a substrate (hereinafter referred to as a device substrate) forming a TFT and a pixel electrode without contact, without using a probe thereon. Each pixel is operated by applying a voltage to the interconnection point to apply a voltage to the pixel electrode. In this specification, operating a pixel means applying a voltage to the element or interconnection point owned by the pixel, that is, controlling the voltage on the pixel electrode. Printed by the Intellectual Property Office of the Ministry of Economic Affairs and the Industrial Cooperative Cooperative, using static induction to read out the voltage applied to the pixel electrode 値. According to the readout, the operation status and normal / abnormality of each pixel can be determined, in other words, whether each pixel operates normally. In this specification, a pixel whose voltage can be normally supplied to its pixel electrode is determined to be normal. In contrast, a pixel whose voltage cannot be normally supplied to its pixel electrode is determined to be abnormal. Specifically includes the following two architectures, one of which can be adopted. According to the first architecture, a test substrate is prepared separately for testing the device substrate. The test substrate has a primary coil, and the device substrate as a test object has a secondary coil. -8-This paper size applies Chinese National Standard (CNS) A4 specification (210X297 mm) 573128 A7 ______B7 V. Description of the invention (6) (Please read the precautions on the back before filling this page) It can be formed on the substrate by The conductive thin film is patterned to form a primary and a primary coil. According to the present invention, a magnetic circuit is provided at the center of the primary and secondary coils by using a coil without a magnetic member instead of a coil having a magnetic member at the center. The primary line held by the test substrate and the secondary line held by the device substrate are weighted together by a fixed interval. Applying an AC voltage to the two terminals of the primary coil generates an electromagnetic force between the two terminals of the secondary coil. The ideal interval should be small. As long as this interval can be controlled, the primary and secondary coils should be as close as possible. In this specification, a voltage is applied to a coil, that is, a voltage is applied between two terminals of the coil. In this specification, a signal is applied to a coil, meaning that the signal is applied between two terminals owned by the coil. Printed by the Consumer Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs The AC voltage caused by the electromagnetic force on the secondary coil is rectified on the device substrate and then smoothed. It is used as a DC voltage to operate the driving circuit or pixels (hereinafter referred to as the power supply voltage) of the device. At the same time, the waveform of the AC voltage generated by the electromotive force on the secondary coil is shaped into a desired waveform by a waveform shaping circuit. This signal voltage is used to operate a driving circuit or a pixel (hereinafter referred to as a driving signal) owned by the device base. The AC voltage generated on the secondary coil can be used as a driving signal, and its waveform is not shaped in the waveform shaping circuit. The voltage of the generated driving signal or the power supply voltage is supplied to a driving circuit or a pixel formed on the device substrate. Provided driving signal voltage or electricity -9- This paper size applies Chinese National Standard (CNS) A4 specification (21 × 297 mm) 573128 A7 B7 V. Description of the invention (7) The source voltage enables the driving circuit or pixels to execute Certain actions. (Please read the precautions on the back before filling this page) The driving signal voltage or power supply voltage is not determined. When the driving circuit or pixel is normal, the voltage applied to the pixel electrode owned by the pixel is given. AC voltage. As long as a driving signal voltage or power supply voltage is provided, the voltage 値 applied to the pixel electrodes will be affected, depending on the operating state of the driving circuit or pixel. The driving signal voltage or the power supply voltage may be supplied only to the pixels formed on the device substrate. In this case, as long as a driving signal voltage or a power supply voltage is provided, the voltage 値 applied to the pixel electrode will be affected, which depends on the working state of the pixel. An electrode (test electrode) for non-contactly reading the voltage generated on the pixel electrode is superimposed on the pixel electrode at a fixed interval. This interval should be small. As long as the interval can be controlled, the pixel electrode and the test electrode should be as close as possible. The test substrate may have a test electrode. Printed by the Consumer Cooperative of the Intellectual Property Office of the Ministry of Economic Affairs The voltage generated by the static induction on the test electrode will be affected by the voltage 値 applied to the pixel electrode. In this way, the voltage applied to the pixel electrode can be calculated from the voltage generated on the test electrode. Therefore, the voltage 値 applied to the pixel electrode can be read without touching. In addition, the working status of a pixel can be grasped by using the voltage generated on the test electrode. This makes it possible to confirm its operating status and determine normal / abnormal. According to the second architecture, a test substrate (first test substrate) is separately prepared, a voltage is applied to the interconnection points owned by the pixel area of the device substrate without contact, and a test substrate (second test substrate) is also provided. It uses static electricity. The paper size applies the Chinese National Standard (CNS) A4 specification (210X297 mm) ^ 10-573128 A7 B7. 5. Description of the invention (8) The voltage applied to the pixel electrode should be read out without contact. (Please read the notes on the back before filling this page} The first test substrate has a primary coil, and the device substrate as a test object has a secondary coil. By patterning the conductive film formed on an insulating film The respective primary and secondary coils are formed. According to the present invention, a magnetic circuit is provided in the center of the primary and secondary coils without a magnetic coil to provide a magnetic circuit. The primary coil owned by the first test substrate It overlaps with the secondary wire 拥有 owned by the device base at a fixed interval. Applying an AC voltage to the two terminals owned by the primary coil will generate one between the two terminals owned by the secondary coil. Electromotive force. The interval should be small. As long as the interval can be controlled, the primary coil and the secondary coil should be as close as possible. In this specification, voltage is applied to one coil, meaning that the voltage is applied to the two terminals of the coil. In this manual, a signal is applied to one coil, which means that the signal is applied to two coils owned by the coil. The Consumer Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs printed the AC voltage caused by the electromagnetic force on the secondary coil to rectify on the device substrate and then smooth it. It is used as a DC voltage to operate the driving circuit owned by the device substrate or Pixels. At the same time, the waveform of the AC voltage generated by the electromotive force on the secondary coil is shaped into a desired waveform by a waveform shaping circuit. It is used as a driving signal with a certain voltage to operate the driving circuit or diagram owned by the device substrate. The AC voltage generated on the secondary coil can be used as a driving signal, and its waveform does not pass through the waveform shaping circuit. -11-This paper size applies the Chinese National Standard (CNS) A4 specification (210X 297 mm). 573128 Economy A7 _ B7_ printed by the Consumer Cooperatives of the Ministry of Intellectual Property Bureau V. Invention description (9) Shaping. The voltage or power supply voltage of the generated driving signal is provided to the driving circuit or pixels formed on the device substrate. The provided driver The signal voltage or power supply voltage causes the drive circuit or pixel to perform a certain action. The voltage 値 is determined. When the driving circuit or pixel is normal, the voltage applied to the pixel electrode owned by the pixel is a given AC voltage. As long as a driving signal voltage or a power supply voltage is provided, it is applied to the pixel. The voltage 値 on the electrodes will be affected, which depends on the operating state of the driving circuit or pixel. The driving signal voltage or power supply voltage can only be provided to the pixels owned by the device substrate. In this case, only one driver needs to be provided The signal voltage or power supply voltage, the voltage applied to the pixel electrode will be affected, which depends on the working state of the pixel. On the other hand, the second test substrate has an electrode (test electrode), which is used without touching the ground. Read out the voltage generated on the pixel electrode. The test electrode is superimposed on the pixel electrode by a fixed interval. This interval should be small. As long as the interval can be controlled, the pixel electrode and the test electrode should be as close as possible . This active matrix semiconductor device has a plurality of pixel electrodes arranged in a matrix in a pixel region. According to the present invention, by changing the position of the second test substrate relative to the device substrate, the position of one or more pixel electrodes overlapping with one test electrode can be changed multiple times. Specifically, if the test electrode is rotated on a plane parallel to the base of the device, the size of the test electrode can be changed and the paper size can be adjusted to CNS A4 (210X297 mm) -12-(Please read first Note on the back page, please fill out this page) 573128 A7 B7__ V. Description of the invention (Position of the stacked pixel electrodes. Each time a voltage is generated on the test electrode 値. (Please read the note on the back page before filling out this page ) The voltage generated by the electrostatic induction on the test electrode can be used as the information of the respective states of the pixels, and will be affected by the voltage 値 applied to the pixel electrode overlapping the test electrode. Store the on-test obtained by multiple monitoring The voltage 値 generated on the electrode and the position data of one or more pixel electrodes that overlap with the test electrode during monitoring. If CT (Computed Tomography) is used to recover the algorithm (such as the Fourier transform method), A two-dimensional distribution is restored from the one-dimensional data, and the relative chirp of the voltage applied to the pixel can be obtained from the stored data. It is natural to consider that it is possible to read out the voltage 被 applied to the pixel electrode without touching it. It is possible to determine the working state of each pixel based on the relative voltage applied to the pixel. 就能 It can be determined based on the working state. Normal / Abnormal. Representative recovery algorithms include the Fourier transform method using continuous approximation and projection segmentation rules, and an overlapping integration method. The present invention can also use recovery algorithms other than the above. Employees of the Intellectual Property Office of the Ministry of Economic Affairs It should be noted that the consumer cooperative prints that in the first or second architecture, the pixel work status can be filtered into multiple levels according to the work status, instead of always selecting according to normal and abnormal. At the same time, according to the first One or the second structure, if the driving circuit is defective and the pixel is not defective, the voltage applied to the pixel electrode is changed. This can also determine the normality / abnormality of the driving circuit. In a semiconductor device using the test method of the present invention Medium and pixel sizes used in this paper are applicable to China National Standard (CNS) A4 specification (210X297 mm) ^ 13- 5731 28 A7 _B7 V. Description of the invention (1) (Please read the precautions on the back before filling out this page} The transistor can be a transistor made of single crystal sand, or a thin film transistor made of polycrystalline or amorphous silicon. Or it can also be a transistor using organic semiconductors. It is possible for the fabricator to correctly determine the criterion that a pixel is considered to be abnormal according to the degree to which the working status column of the pixel is different from the working status of the normal pixel. With the above structure, it is possible to determine the defect point and determine the normality / abnormality of a pixel, and it is not necessary to use a probe directly on the interconnection point. This can avoid reducing the yield due to the fine dust caused by using the probe in subsequent processing. In addition, since normality / abnormality can be determined with one test step in each composition formation step, the test step can be simplified. The present invention can be applied not only to light emitting devices, but also to liquid crystal displays or other semiconductor devices. The structure of the present invention will be described below. The invention relates to a method for voltage measurement, which comprises: printing a contactless circuit or circuit element owned by a pixel by a consumer cooperative of an employee of the Intellectual Property Bureau of the Ministry of Economic Affairs, thereby applying a voltage to the pixel Own pixel electrodes; and read out the voltage applied to the pixel electrodes contactlessly. The present invention relates to a method for voltage measurement, comprising: applying a voltage to an interconnection point or a circuit element owned by a plurality of pixels without contact, thereby applying a voltage to a pixel electrode owned by each pixel; and Non-contact readout is applied to the paper size applied to the pixel electrode owned by each pixel. National Standard (CNS) A4 specification (210X297 mm) -14-573128 A7 B7 V. Description of the invention (Voltage The present invention relates to a method for voltage measurement, including: (Please read the precautions on the back before filling this page) Apply a first AC voltage between two terminals owned by the first line through a fixed interval Overlap the first coil and the second coil together. Use a second AC voltage generated between the two terminals owned by the second coil to apply a third AC voltage to the pixel electrode owned by one pixel; The pixel electrode and the test electrode are overlapped at regular intervals; and the voltage applied to the pixel electrode is calculated based on the fourth parent current voltage generated on the test electrode. The Ming Department is about a method of voltage measurement, including: applying a first AC voltage y between two terminals owned by the first coil, and superimposing the first line 圏 and the second line 在一起 together at a fixed interval. The property bureau employee consumer cooperative prints the rectification or waveform shaping of the second AC voltage generated between the two terminals owned by the second coil, and applies it to the interconnection point or circuit element owned by a pixel, Thus, a third AC voltage is applied to the pixel electrode owned by the pixel; the pixel electrode and the test electrode are overlapped by a fixed interval; and the fourth AC voltage generated on the test electrode is calculated to be applied to- 15- The size of this paper is applicable. National National Standard (CNS) A4 specification (210X297 mm) 573128 A7 ___B7_ V. Description of the invention (0 Voltage on the pixel electrode. The present invention relates to a method for voltage measurement, including: ( Please read the notes on the back before filling this page} Apply a first AC voltage between the two terminals of the first coil A coil and a second coil are overlapped with each other. A second AC voltage generated between two terminals owned by the second coil is used to apply a third AC voltage to each pixel electrode owned by a plurality of pixels at a fixed interval. The pixel electrodes and test electrodes owned by these pixels are overlapped; and the sum of the voltages applied to the pixel electrodes owned by each pixel is calculated based on the fourth AC voltage generated on the test electrode. It relates to a method for voltage measurement, including: applying a first AC voltage between two terminals owned by the first coil, and superimposing the first coil and the second coil at a fixed interval. Consumer cooperative prints 7 Performs rectification or waveform shaping on the second AC voltage generated between the two terminals owned by the second coil, and applies it to the interconnection points or circuit elements each owned by multiple pixels, thereby Apply a third AC voltage to the pixel electrode owned by each pixel; the 'pixel electrode and test of each pixel' are held by a fixed interval Are superimposed together; and this paper size applies the Chinese National Standard (CNS) A4 specification (210X297 mm) -16-a " " 573128 printed by the Consumers ’Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs A7 _B7 V. Invention Description (according to The fourth AC voltage generated on the test electrode calculates the sum of the voltages applied to the respective pixel electrodes of each pixel. According to the present invention, the first coil and the second coil may have interconnection points formed on the same plane, and each of the interconnection points takes a vortex shape. According to the present invention, a first coil and a test electrode may be formed on a first insulating surface, and a second coil and a pixel electrode may be formed on a second insulating surface. According to the present invention, the interval between the first insulating surface and the second insulating surface can be controlled by a fluid flowing between the first insulating surface and the second insulating surface. According to the present invention, it is possible to determine whether a pixel is normal or abnormal by using a voltage applied to a pixel electrode or a sum of voltages obtained according to this voltage measurement method. The present invention relates to an electrical test device for testing The owned pixels perform an electrical test, and the electrical test device includes: a primary coil; a mechanism that overlaps a primary coil with a secondary coil owned by a semiconductor device at a fixed interval; and a pixel that has a fixed interval A mechanism in which the pixel electrode and a test electrode overlap; a mechanism that applies an AC voltage between the two terminals of the primary coil; and confirms the working state of the pixel based on the AC voltage generated on the test electrode Institution. The present invention relates to an electrical test device for performing electrical tests on pixels in a semiconductor device. The electrical test device includes: This paper size is applicable to the Chinese National Standard (CNS) A4 specification (2IO × 297 mm) ( Please read the notes on the back before filling out this page) 573128 Printed by A7 B7, Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs V. Invention Description (for a primary coil; at a fixed interval, the primary coil and the semiconductor A mechanism in which the secondary wires overlap each other; a mechanism in which the pixel electrode and a test electrode owned by the pixel are overlapped by a fixed interval; a mechanism in which an AC voltage is applied between the two terminals owned by the primary coil And a mechanism for confirming the working state of the pixel according to a parent current voltage generated on the test electrode, wherein the AC voltage generated on the test electrode has information as the working state of the pixel. According to the present invention, the first The fluid flowing between the coil and the second coil controls the interval between the first coil and the second coil. According to the present invention, the first coil may have interconnection points formed on the same plane, and the interconnection points adopt a vortex shape. The present invention relates to a method for manufacturing a semiconductor device, the method including: forming a pixel electrode and An interconnection point or circuit element; applying a voltage to the interconnection point or circuit element without contact, thereby applying a voltage to the pixel electrode; and reading the voltage applied to the pixel electrode without contact. With regard to a method for manufacturing a semiconductor device, the method includes: forming a pixel electrode, an interconnection point or a circuit element, and the first-line paper size applies the Chinese National Standard (CNS) A4 specification (210X297 mm) ^ 8: ~ '---------- Φ ------ 1T ------ (Please read the notes on the back before filling this page) 573128 A7 B7 V. Description of the invention (to be confirmed, and The second coil; the first AC voltage j is applied between the two terminals of the first coil (please read the precautions on the back before filling this page). The first coil and the second coil are overlapped at a fixed interval. From _ > Utilize in the second第二 A second AC voltage generated between the two terminals possesses a third AC voltage applied to the pixel electrode; the pixel electrode and a test electrode are overlapped by a fixed interval; and according to the voltage generated on the test electrode The fourth AC voltage is used to calculate the voltage applied to the pixel electrode. The present invention relates to a method for manufacturing a semiconductor device, the method comprising: forming a pixel electrode, an interconnection point or a circuit element, a first coil, and Second line: Apply the first AC voltage between the two terminals owned by the first coil > Printed by the Consumer Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs The first coil and the second coil are overlapped at a fixed interval Rectify or shape the second AC voltage generated between the two terminals owned by the second coil together and apply it to the interconnection point or circuit element to apply a third AC voltage to the pixel electrode; The pixel electrode and a test electrode are overlapped by a fixed interval; and -19- This paper is applicable in the national standard (CNS ) A4 size (210X297 mm) 573128 Printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs A7 __B7 V. Description of the invention (Medium The voltage applied to the pixel electrode is calculated based on the fourth AC voltage generated on the test electrode. The present invention relates to a method for voltage measurement, which method comprises: applying ~ voltages to an interconnection point or a circuit element to control the voltages applied to a plurality of pixel electrodes; Move one test electrode in a state where the pixel electrodes overlap; and calculate the voltage applied to each pixel electrode based on the voltage on the test electrode and the position of the test electrode relative to the pixel electrode. The invention relates to a method for voltage measurement, which comprises: applying a voltage to an interconnection point or a circuit element without contact to control the voltage applied to a plurality of pixel electrodes; at a fixed interval with any part or Move one test electrode in a state where all the pixel electrodes overlap; and calculate the voltage applied to each pixel electrode based on the voltage on the test electrode and the position of the test electrode relative to the pixel electrode. The present invention relates to a method for voltage measurement, the method comprising: applying a first AC voltage y between two terminals owned by a first wire coil, and superimposing a first coil and a second coil together at a fixed interval to A second AC voltage generated by an interconnection point or a circuit element between two terminals owned by the second wire is used to control the voltage applied to multiple pixel electrodes; this paper size applies to the Chinese National Standard (CNS ) A4 specification (210X297mm) -20-(Please read the notes on the back before filling this page) 573128 Printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs A7 ___B7 _V. Description of the invention (for use at a fixed interval Move a test electrode in a state overlapping with any or all of the pixel electrodes; and calculate the voltage applied to each pixel electrode based on the third AC voltage generated on the test electrode and the position of the test electrode relative to the pixel electrode The present invention relates to a method for measuring voltage, the method comprising: applying a first AC voltage between two terminals owned by a first coil The first wire 圏 and the second coil are overlapped by a space; the AC voltage generated between the two terminals owned by the second wire 整流 is rectified or wave-shaped, and applied to an interconnection point or circuit On the element for controlling the voltage applied to multiple pixel electrodes; moving a test electrode in a state where it overlaps any or all of the pixel electrodes by a space; and according to the third alternating current generated on the test electrode The voltage and the position of the test electrode relative to the pixel electrode calculate the voltage applied to each pixel electrode. According to the present invention, the first coil and the second coil may have interconnection points formed on the same plane, and the interconnection points It takes the shape of a vortex. According to the present invention, a fluid flowing between the first coil and the second coil can be used to control the interval between the first coil and the second coil. According to the present invention, a Fourier transform method can be used, using continuous The approximation and projection segmentation rules or an overlapping integration method are used to calculate the voltage on each pixel electrode. The present invention relates to an electrical test method The method includes: Applying a voltage to an interconnection point or a circuit element to control the size of the paper. Applicable to China National Standard (CNS) A4 specification (210X297 mm) -21-(Please read the precautions on the back before (Fill this page) 573128 A7 B7 V. Description of the invention (1 order voltage applied to multiple pixel electrodes; (Please read the precautions on the back before filling this page) In part or all of the graphs with a gap and any anthracene Move a test electrode in a state where the element electrodes are overlapped; and confirm the working state of the interconnection point or the circuit element according to the voltage on the electrode and the position of the test electrode relative to the pixel electrode. The present invention relates to an electrical test method, The method includes: applying a voltage to an interconnection point or a circuit element without contact for controlling a voltage applied to a plurality of pixel electrodes; in a state of overlapping with any or all of the pixel electrodes through a space Move a test electrode; and confirm the operation of the interconnection point or circuit element based on the voltage on the test electrode and the position of the test electrode relative to the pixel electrode State. The invention relates to an electrical testing method, which comprises: applying a voltage to an interconnection point or a circuit element for controlling the voltage applied to a plurality of pixel electrodes; Move a test electrode in a state where the pixel electrodes are overlapped; printed with the Consumer Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs to determine the voltage applied to the pixel electrode according to the voltage on the test electrode and the position of the test electrode relative to the pixel electrode. The invention relates to an electrical test method, which comprises: applying a voltage to an interconnection point or a circuit element without contact for controlling the voltage applied to a plurality of pixel electrodes; Or move one test electrode in the state where all the pixel electrodes are overlapped; and -22-This paper size applies the Chinese National Standard (CNS) A4 specification (21〇 ×: 297 mm) 573128 A7 _______B7_ V. Description of the invention (2¾) According to The voltage on the test electrode and the k-position of the test electrode relative to the pixel electrode determine the distribution of the voltage applied to the pixel electrode. (Please read the precautions on the back before filling this page) The present invention relates to an electrical test method, which includes: applying a voltage to an interconnection point or a circuit element to control the voltage applied to multiple pixel electrodes Voltage; moving a test electrode in a state overlapping with any or all of the pixel electrodes by an interval; determining the voltage applied to the pixel electrode based on the voltage on the test electrode and the position of the test electrode relative to the pixel electrode Distribution; and determining the operating status of the interconnection points or circuit elements based on the voltage distribution. The invention relates to an electrical test method, which comprises: applying a voltage to an interconnection point or a circuit element without contact for controlling the voltage applied to a plurality of pixel electrodes; Or move one test electrode when all the pixel electrodes overlap; determine the distribution of the voltage applied to the pixel electrode according to the voltage on the test electrode and the position of the test electrode relative to the pixel electrode; and consume by employees of the Intellectual Property Bureau of the Ministry of Economic Affairs The cooperative print determines the operating status of the interconnection points or circuit components based on the voltage distribution. The invention relates to an electrical test method, which comprises: applying a first AC voltage between two terminals owned by a first coil, and overlapping the first coil and the second coil with a gap; The second AC voltage generated between the two terminals owned by the coil is applied to an interconnection point or circuit element to control the application to multiple paper sizes. This standard applies to China National Standard (CNS) A4 (2 丨 0X297). (Centi) -23-573128 A7 B7 V. Description of the invention (2) Voltage on the pixel electrode; Move a test electrode in the dog state with a stomach and any part or all of the pixel electrode at a distance from the dog; and according to The third AC voltage and test electricity generated on the test electrode; the year is to confirm the working state of the interconnection point or the circuit element for the position of the pixel electrode. The present invention relates to an electrical test method, the method includes ： Apply the first AC voltage between the two terminals owned by the first coil and overlap the first wire and the second coil with one intermediary; The second AC voltage generated between the sons is applied to an interconnection point or a circuit element to control the voltage applied to a plurality of pixel electrodes; in a state of overlapping with any part or all of the pixel electrodes through a gap Move a test electrode down; determine the distribution of the voltage applied to the pixel electrode based on the third AC voltage generated on the test electrode and the position of the test electrode relative to the pixel electrode; and confirm the interconnection points or circuit elements based on the voltage distribution Working status. The invention relates to an electrical test method, which comprises: applying a first AC voltage between two terminals owned by the first coil »j overlapping the first coil and the second coil with an interval; The second alternating current generated between the two terminals owned by the second coil ------------ (Please read the precautions on the back before filling this page)

* 1T Printed by the Intellectual Property Bureau of the Ministry of Economic Affairs, Consumer Cooperatives. This paper is applicable in China. National Standard (CNS) A4 (210X297 mm) -24-573128 A 7 B7 Printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs Description of the invention (The voltage is rectified or wave-shaped and applied to an interconnection point or circuit element to control the voltage applied to multiple pixel electrodes; at any interval or with any or all pixels through a gap Moving a test electrode in a state where the electrodes overlap; and confirming the working state of the interconnection point or the circuit element according to the third AC voltage generated on the test electrode and the position of the test electrode relative to the pixel electrode. The present invention relates to an electrical The test method includes: applying a first AC voltage between two terminals owned by the first coil to overlap the first wire coil and the second coil with an interval; The second AC voltage generated between the terminals is rectified or waveform-shaped and applied to an interconnection point or circuit element for control A voltage applied to a plurality of pixel electrodes; moving a test electrode in a state overlapping with any or all of the pixel electrodes by an interval; and according to a third AC voltage generated on the test electrode and the test electrode relative to The position of the pixel electrode determines the distribution of the voltage applied to the pixel electrode; and confirms the operating state of the interconnection point or the circuit element based on the voltage distribution. According to the present invention, the first coil and the second coil may have the same plane. According to the present invention, a fluid flowing between the primary coil and the secondary coil can be used to control the interval between the first coil and the second coil. (Please first Read the notes on the reverse side and fill in this page) This paper size is applicable to Chinese National Standard (CNS) A4 specification (210X297 mm) -25- 573128 A7 __________ B7 ___ 5. Description of the invention (2 $ This invention is about the base of a device An electrical test device with multiple graphics for electrical testing, the electrical test device contains: (Please read the precautions on the back before (Write this page) primary coil; a mechanism that overlaps the primary coil and the secondary coil owned by the device substrate by a gap; enables any or all of the pixel electrodes owned by each pixel and a test by a gap Electrode overlapping mechanism; mechanism for changing the position of the test electrode relative to the pixel electrode owned by each pixel; mechanism for applying an AC voltage between two terminals owned by the primary line; and according to the test electrode A mechanism for confirming the working state of each pixel by an alternating voltage generated on the device. The present invention relates to an electrical test device for performing an electrical test on a plurality of pixels owned by a device substrate. The electrical test device includes: a primary coil; The Ministry of Intellectual Property Bureau employee consumer cooperative printed a mechanism that overlaps the primary coil and the secondary coil owned by the device substrate by a space; at any interval, any or all of the pixel electrodes owned by each pixel and Change the pixel of the test electrode relative to each pixel when a test electrode overlaps The mechanism of the position of the electrode; the mechanism of applying an AC voltage between the two terminals of the primary coil; and the confirmation of each pixel according to the AC voltage generated on the test electrode. National Standard (CNS) A4 specification (210X297 mm) 573128 A7 B7 V. Description of invention (institution of working state. (Please read the notes on the back before filling this page.) According to the present invention, the fluid between the primary coil and the secondary coil can be used to control the interval between the first coil and the second coil. According to the present invention, the first coil may have interconnection points formed on the same plane, and the interconnection points may take a vortex shape. The invention relates to a method for manufacturing a semiconductor device. The method includes: forming an interconnection point or a circuit element, and a pixel electrode capable of providing a voltage through the interconnection point or the circuit element; A voltage; moving a test electrode in a state where it overlaps any or all of the pixel electrodes by an interval; and calculating the voltage applied to each pixel based on the voltage on the test electrode and the position of the test electrode relative to the pixel electrode The voltage applied to the electrodes is applied to the pixel electrodes owned by each pixel. The present invention relates to a method for manufacturing a semiconductor device, the method comprising: printing by an employee consumer cooperative of the Intellectual Property Office of the Ministry of Economic Affairs to form an interconnection point or a circuit element, and a diagram that can provide a voltage through the interconnection point or the circuit element Element electrode; applying a voltage to the interconnection point or circuit element without contact; moving a test electrode in a state where it overlaps any or all of the pixel electrodes by a space; and relative to the test electrode according to the voltage on the test electrode Calculate the voltage applied to each pixel electrode to each pixel at the position of the pixel electrode. Figure 27-This paper size applies the Chinese National Standard (CNS) A4 specification (210X297 mm) 573128 Employees of the Intellectual Property Bureau of the Ministry of Economic Affairs A7 __B7 printed by a consumer cooperative. V. Description of the invention (2 Voltages on pixel electrodes owned by each element. The present invention relates to a method for manufacturing a device substrate. The method includes: forming an interconnection point or a circuit element; and A pixel electrode providing a voltage through an interconnection point or circuit element; for the interconnection point or circuit element Apply a voltage; move a test electrode in a state where it overlaps with any or all of the pixel electrodes at an interval; and calculate the factor applied to each of the electrodes based on the voltage on the test electrode and the position of the test electrode relative to the pixel electrode The voltage on the pixel electrode is applied to the pixel electrode owned by each pixel. The present invention relates to a method for manufacturing a device substrate, the method includes: forming an interconnection point or a circuit element; An interconnecting point or circuit element provides a voltage pixel electrode; a voltage is applied to the interconnecting point or circuit element without contact; a test electrode is moved in a state where it overlaps with any or all of the pixel electrodes through an interval; And calculate the voltage applied to each pixel electrode owned by each pixel due to the voltage applied to each pixel electrode based on the voltage on the test electrode and the position of the test electrode relative to the pixel electrode. 1 is a top view of a test substrate of the present invention; FIG. 2 is a top view of a device substrate of the present invention; FIG. 3 is the present invention The block diagram of the test substrate and the device substrate; the paper size is applicable to the Chinese National Standard (CNS) A4 specification (210X297 mm) -28-(Please read the precautions on the back before filling this page) 573128 A7 — ^ ______ ^ _ V. Description of the invention (2 > Change of DC signal with time; FIGS. 21A and 21B are circuit diagrams of the rectifier circuit of Embodiment 6; FIG. 22 is a block diagram of an OLED panel of the light-emitting device of Embodiment 7; FIG. 23 is an implementation Top view of a large-sized substrate of Example 8; FIG. 24 is a top view of a large-sized substrate of Example 8; FIG. 25 is a flowchart showing the flow of the test steps of Example 9; and FIGS. 26A-26D are examples of the examples A top view and a cross-sectional view of the line 10 of FIG. 10; and FIG. 27 shows a working state based on the pixel of Embodiment 11. Main component comparison 100 ιοί 102 103 104 110 111 112 113 114 115 116 Baseline primary line formation area External input buffer connector connection test electrode Base signal line drive circuit Scan line drive circuit Pixel area Interconnection point Soil connector connection Waveform shaping circuit-30- This paper size applies Chinese National Standard (CNS) A4 specification (210 X 297 mm) 573128 A7 B7 V. Description of the invention (2 Printed by the Consumer Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs 117 Secondary coil formation Zone 201 signal source 202 AC current power source 203 test base 116a waveform shaping circuit 116b rectifier circuit 204 device base 205 connector 206 primary line 207 secondary coil 208 pixel electrode 802 pixel 803 switch TFT 804 drive TFT 805 storage capacitor 806 capacitor 807 Output 6100 Base 6101 Primary coil formation area 6102 External input buffer 6103 Connector connection 6120 Base 6121 Test electrode 6122 Connector connection I -------- φ-I (Please read the precautions on the back first (Fill in this page) • I. This paper size applies Chinese national standard Standard (CNS) A4 specification (210X297 mm) -31-573128 A7 B7 Printed and invented by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs (2 prepared 6203 first test substrate 6205 second test substrate 6209 connector 6210 connector 301 Test substrate 302 Device substrate 303 Test electrode 304 Primary coil formation area 305 Human-machine IF 306 Measurement controller 307 Processor IF 308 Measurement sequencer 309 Panel display sequencer 310 Coil driver 311 RF carrier 3 12 Signal processing circuit 313 Selector circuit 314 Signal analyzer 630 1 First test substrate 6302 Device substrate 6303 Test electrode 6304 Primary coil formation area 6305. Human machine IF 6306 measurement controller 丨 (Please read the precautions on the back before filling this page) 、 11 # 1. This paper size applies the Chinese National Standard (CNS) A4 specification (210X297 mm) -32- 573128 A7 B7 Printed by the Consumers ’Cooperative of Intellectual Property Bureau of the Ministry of Economic Affairs, Invention Description (3 Office 6307 Processor IF 6308 Measurement Sequencer 6309 Panel display sequencer 6310 Coil driver 6311 RF carrier 6315 Second test 6312 Signal processing circuit 6313 Selector circuit 6314 Signal analyzer 350 Differential amplifier 360 Primary induction coil 361 Secondary induction coil 362 Capacitor 501,502 Resistor 503,504 Capacitance 601 Diode 602 Capacitance 603 Resistor 610,611 Terminal 612,613 XOJ 901 Voltage Double Full Wave Rectification Circuits 902,903 Diodes 904,905 Capacitors 911 Bridge rectifier circuit I ------ IT ------ Awl (Please read the precautions on the back before filling this page) This paper size applies to China National Standard (CNS) A4 specification (210X297 mm) -33-573128 Printed by A7 B7, Consumer Cooperative of Intellectual Property Bureau of the Ministry of Economic Affairs, Description of Invention (3) 912-915 Diode 700 Signal line drive circuit 701 Scan line drive circuit 702 Pixel area 703 Switching TFT 704 Driving TFT 705 Storage capacitor 706 〇LED pixel electrode 707 Signal line 708 Power line 709 Scan line 7 10 Shift register 711 First latch 712 Second latch 721 Shift register 722 Buffer 730 test electrode 10 01 Pixel area 1002 Scan line horse circuit 1003 Signal line horse circuit 1004 Π01 Pixel area 1102 Scan line driver circuit 1103 Signal line horse circuit (Please read the precautions on the back before filling this page) This paper The standard is applicable to Chinese National Standard (CNS) A4 specification (210X297 mm) -34- 573128 A7 B7 V. Description of the invention (1104 area 1601 coil 1603 intermediate layer insulation film 1602 line coil interconnection 1612 coil interconnection 1613 intermediate layer insulation film 1611 Description of the preferred embodiment of the wire coil [Implementation Mode 1] (Please read the notes on the back before filling this page) Printed by the Consumer Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs Figure 1 shows a top view of a test substrate according to the present invention Perform the test on it with the first structure. FIG. 2 shows a top view of the substrate of the device under test. As shown in FIG. 1, the test substrate has one * one * secondary coil formation region 1 on one substrate 100 and one external input buffer 102. , A connector connection portion 103, and a test electrode 104. The test substrate described herein includes a substrate 100, a primary coil formation region 101, and other circuits or all circuit elements formed on the substrate 100. The primary coil formation area 1 0 1 of the test substrate is not limited to the number and layout of the structures shown in FIG. 1. The designer can arbitrarily decide the number and layout of the coil forming areas 1 0 丨. Although the test substrate shown in Fig. 1 has a test electrode 104 and a primary coil formation region 101, the present invention is not limited to such a structure. The test electrode may be prepared separately from a test substrate having a primary coil formation region. By separately submitting the paper size, the Chinese National Standard (CNS) A4 specification (210X297 mm) is applicable. 573128 A7 B7 V. Description of the invention ((Please read the precautions on the back before filling this page) Provide a line formation area The test substrate and test electrode can determine the distance between the test substrate and the test electrode independently of the distance between the primary coil and the secondary coil. At the same time, during the test, the layout of the test electrode can be relative to the device substrate The device substrate shown in FIG. 2 has a signal line driving circuit 1 1 1, a scanning line driving circuit 1 1 2, a pixel area 1 1 3, an extended interconnection point 1 1 4, a connector on a substrate 110. The connecting portion 1 1 5, a waveform shaping circuit or a rectifier circuit 1 1 6, and a secondary coil formation region 1 1 7. The device substrate described herein includes a substrate 1 1 0 and a substrate 1 1 0 formed on the substrate. All circuits or circuit elements. The extended interconnection points 1 1 4 are interconnection points that provide driving signals and power voltages for the pixel area and driving circuits of the device substrate. Secondary coil formation area 1 1 7 It is limited to the number and layout of the structure shown in Figure 2. The designer can freely determine the number and layout of the secondary coil formation areas 1 1 7. The employee property cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs prints an FPC in the steps after the test step , TAB, etc. are connected to the connector connecting portion 1 1 5. After completing the test step, the device substrate is cut along the line AA ′, so that the secondary coils formed in the secondary coil formation area 1 1 7 are physically and electrically The upper part is separated from the connector connection part 1 1 5. The operation of the device substrate and the test substrate in the test step is described below. In order to facilitate the understanding of the signal flow in the test step, the block diagram shown in FIG. The structure of the device substrate and the test substrate shown below are also explained with reference to Figs. 1 and 2. On a test substrate 203, a test AC signal is connected from a signal source 201 or an AC power source 202 to a connector connection portion 103上 一个 -36- This paper size is applicable to Chinese National Standard (CNS) A4 specification (210X297 mm) 573128 A7 ________ B7_ 5. Description of invention (connector input to external Into the buffer 丨 〇2. The test AC signal is buffered-amplified in the external input buffer 1 02 and input to the secondary coil formation area 丨 〇i. (Please read the precautions on the back before filling this page) In Figure 1 In 2 and 3, although the input AC signal buffered-amplified in the external input buffer 102 is input to the primary line formation area 101, the present invention is not limited to this structure. The AC signal can be directly Input to the primary coil formation area 101 does not need to provide an external input buffer 102. A plurality of primary coils are formed in the primary coil formation area 101. The AC signal is input to both terminals of the primary coil. At the same time, a plurality of secondary coils are formed in the secondary coil formation region 117 ′ owned by the device base 204 corresponding to the primary coils included in the primary coil formation region 101. When an AC signal is input to the primary coil, an electromagnetic voltage in the form of an electromotive force is generated due to the electromagnetic induction between the two terminals of the secondary line 圏. The AC voltage generated on the secondary line 圏 is supplied to the waveform shaping circuit 1 1 6 a or the rectifying circuit Π 6 b. The waveform shaping circuit 1 1 6 a or the rectifying circuit 1 1 6 b shapes or rectifies the AC voltage to generate a driving signal or a power supply voltage. Driving signals or power voltages produced by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs are provided to the extended interconnection points 1 1 4. The provided driving signal or power voltage is supplied to the signal line driving circuit 1 11 through the extended interconnection point 1 1 4, the scanning line driving circuit 1 1 2 and the pixel area 11 3 〇 AC generated on the secondary coil The voltage can be directly input to the pixel region 11 3 ′ as a driving signal without using the waveform shaping circuit 1 1 6 a or the rectification circuit 116 b. There are multiple pixels in the pixel area 113, and each pixel has one pixel. -37- This paper size is applicable to the Chinese National Standard (CNS) A4 specification (210X 297 mm) 573128 A7 _B7_ V. Description of the invention (3 $ pole. The signal line driver circuit and scan line driver circuit are not limited to the number shown in Figures 1 and 2. (Please read the precautions on the back before filling out this page) Signal line driver circuit 1 1 1, scan line driver The operation of the circuit 1 12 and the pixel area 11 3 applies a voltage to the pixel electrode of each pixel. The device substrate as a test object does not need a driving circuit such as the signal line driving circuit 111 and the scanning line driving circuit 112. It is possible to apply the driving signal voltage or the power supply voltage to the pixel area 1 1 3. However, it is necessary to set the driving signal voltage or the power supply voltage so that the voltage applied to the pixel electrode is an AC voltage. The pixel of the pixel The electrode overlaps the test electrode 104 with a fixed interval. When the pixel works normally when an alternating voltage is applied to the pixel electrode, an electromotive force is generated on the test electrode 104. On the test electrode 1 The AC voltage or electromotive force generated on 4 can provide information on the working status of the pixel. According to the AC voltage generated on the test electrode 104, the working status of the pixel owned by the pixel area can be confirmed, thereby determining its normal / abnormal, Or the specific failure point. The consumer cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs prints the specific structure of the primary and secondary coils (hereinafter collectively referred to as coils). Figure 4 shows an enlarged view of the coils. The form of the coil is a spiral curve. The coil shown in FIG. 4B takes the form of a square spiral. Regarding the coil used in the present invention, the entire line owned by the coil is completely formed on the same plane, and the line owned by the coil is taken as Spiral form. Therefore, when viewed from the direction perpendicular to the plane where the coils are formed, the wire owned by the coils is compliant with the Chinese National Standard (CNS) A4 specification (210X297 mm) -38-573128 Print A7 ____B7 V. Description of the invention (3¾ is depicted as a curve or a square. Designer The number of turns, the line width, and the area on the substrate can be determined appropriately. However, the number of turns and structure of the wire coil need to be set correctly in accordance with the semiconductor device standard. It is also necessary to correctly set the input to the primary coil formation in accordance with the semiconductor device standard The waveform, frequency, and amplitude of the AC signal for testing in the zone. Fig. 5 shows a perspective view of the device overlap 204 overlapping the test substrate 203. The situation shown in the figure is that the test substrate 203 shown in Fig. 1 has a primary coil, which is the figure The coil shown in FIG. 4A, and the device substrate shown in FIG. 2 has a secondary coil, that is, the coil shown in FIG. 4A. The connector 205 is connected to the connector connection portion 103. As shown in FIG. 5, the primary coil formation region 101 owned by the test substrate 203 overlaps with the secondary coil formation region 1 1 7 owned by the device substrate 204 through a fixed interval. The ideal interval is small. As long as the interval can be controlled, the closer the primary coil formation area 1 01 and the secondary coil formation area 1 17 owned by the device substrate 204 are, the better. At the same time, the pixel electrodes owned by the test electrode 104 and the pixel region 1 13 are overlapped by a fixed interval. The ideal interval is small. As long as the interval can be controlled, the closer the pixel electrodes owned by the test electrode 104 and the pixel region 113 are, the better. The space between the test substrate 203 and the device substrate 204 can be maintained by fixing the two substrates. Alternatively, this interval may be maintained by fixing one of the device substrate 204 or the test substrate 203, and a fluid having a constant flow rate or pressure may be used between the test substrate 2Ό3 and the device substrate 204. The representative fluid is the paper size standard (CNS) A4 specification (21GX297). ^ 9 · ~ '---------- 0 ^-(Please read the back (Please fill in this page again)

、 1T f 573128 Printed by A7 _______B7_ of the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs. 5. Description of the invention (3 > body or liquid. In addition, viscous fluids can also be used. Figure 6 A shows a line that overlaps together. Partially enlarged view of the formation area 101 and the secondary line 圏 formation area 1 17. 206 represents the primary coil and 207 represents the second A line. Although the spirals of the primary coil 206 and the secondary coil 207 in FIG. 6A are toward The invention rotates in the same direction, and the present invention is not limited to this structure. The spiral directions of the primary coil and the secondary coil can be opposite. At the same time, the designer can also appropriately set the gap (Lgap) between the primary coil and the secondary coil. Figure 6B shows a partially enlarged view of the pixel electrode 208 and the test electrode 104 that the pixel has overlapped. In Figure 6B, one test electrode 104 overlaps multiple pixel electrodes at the same time. A conductive film or A plurality of conductive films connected to the circuit form a test electrode. The test electrode 104 and the pixel electrode 208 that are superimposed together form a capacitor. If the pixel is in the state shown in FIG. 6B When an AC voltage is applied to the electrode 208, an electromotive force is generated on the test electrode 104. Fig. 7 shows a circuit diagram of the pixel electrode 208 of the device substrate and the test electrode 104 of the test substrate 104. Fig. 7 shows The structure of is only an example, and the number and types of interconnection points and components owned by the pixels and their connection points are not limited to the structure shown in Fig. 7. Meanwhile, although Fig. 7 shows the pixel structure of the light-emitting device The present invention can also be applied to other semiconductor devices. Specifically, as long as an AC voltage can be applied to a pixel electrode by controlling an AC voltage applied to an interconnection point or a component, the test method of the present invention can be applied to a Semiconductor device. The light-emitting device shown in Figure 7 has X signal lines S1 to Sx. (Please read the precautions on the back before filling this page.) This paper size applies to China National Standard (CNS) A4 (210X297). %) -40- 573128 A7 B7 Printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs V. Invention description (3 $ Power cords V1 to Vx of quantity X and quantity of y Draw a line. Each pixel 102 has a signal line, a power line, and a scan line. In addition, the pixel 802 has a switching TFT 803, a driving TFT 804, and a storage capacitor 805. 806 is a test electrode 104 and a pixel electrode A capacitor formed by overlapping 208. The gate electrode of the switching TFT 803 is connected to any one of the scanning lines G1 to Gy. One of the source and drain regions of the switching TFT 803 is connected to any one of the signal lines S1 to Sx, and the other is connected to The gate electrode of the driving TFT 804. One of the source and drain regions of the driving TFT 804 is connected to any one of the power lines VI to Vx, and the other is connected to the pixel electrode. Two electrodes of the storage capacitor 805 are connected to a gate electrode and a power line of the driving TFT 804, respectively. In the pixel shown in Fig. 7, an AC drive signal voltage is applied to the power supply lines V1 to VX. Therefore, when the pixels are normal, controlling the voltage applied to the scanning line can turn on the switching TFT 803, and controlling the voltage applied to the signal line can turn on the driving TFT 804. This will apply an AC drive signal voltage to the pixel electrodes. By applying an AC drive signal voltage to the pixel electrode, an AC voltage can be generated on the test electrode 104 overlapping the pixel electrode. The generated AC voltage is provided as an output 807 to the subsequent circuit. In the pixels shown in Fig. 7, the pixel electrodes of those pixels having the same scanning line overlap the same test electrode. However, the test electrodes are not limited to the layout shown in FIG. 7. Figure I with a pixel electrode overlapping the test electrode-(Please read the precautions on the back before filling this page)

、 1T • I. This paper size is applicable. National National Standard (CNS) A4 specification (210 × 29? Mm) -41-573128 A7 _B7_ 5. Description of the invention (The element can be selected at will. The picture element shown in Figure 7 is For example, the pixel electrodes of those pixels with the same signal line can be connected to the same test electrode. (Please read the precautions on the back before filling this page) The circuit of the subsequent stage receiving this output 807 is based on the test electrode. The generated AC voltage determines the normality / abnormality of the pixels. Depending on the driving method of the semiconductor device or the test electrode layout, there may be cases where voltage is applied to multiple pixel electrodes overlapping one test electrode at the same time, or sequentially or Apply at will. If AC voltage is applied to multiple pixel electrodes at the same time, the AC voltage waveform generated on the test electrode will be different between all pixels working normally and at least one pixel not working properly. That is, The AC voltage generated on the test electrode can be used as information on the operating status of all pixels with these pixel electrodes. Intellectual Property of the Ministry of Economic Affairs When printed by the Bureau of Industrial and Consumer Cooperatives, if AC voltage is applied to multiple pixel electrodes in sequence, the test electrode has an AC voltage that increases in sequence, and each level can be used as information on the working status of each pixel. The pixels are normal. Operating these pixels in sequence will provide a monotonically varying AC voltage on the test electrode. Therefore, if any pixel is abnormal, the pixels in sequential operation will be in the AC voltage generated on the test electrode. A non-monotonic change is formed. Therefore, the AC voltage waveform generated on the test electrode is different between normal operation of all pixels and abnormal operation of at least one pixel. Sometimes, if the AC voltage actually generated on the test electrode is changed, Compared with the AC voltage generated on the test electrode that the pixel has been confirmed as normal, the working state of the pixel can be confirmed, and its normal / abnormality can be determined. However, the AC voltage used as a reference does not need to be based on an already confirmed Applicable Chinese National Standard (CNS) A4 (210X297 mm) for this paper size -42- 573128 A7 B7 V. Description of the invention (4) (Please read the notes on the back before filling this page) Normal pixels. If you compare the AC voltages generated on the test electrodes, you can determine a pixel work Normal / abnormal state. In addition, if compared with an AC voltage 値 calculated by analogy, it is also possible to confirm the working state of the pixel and determine its normal / abnormal state. Although the test electrode and the pixel electrode in FIG. 7 are According to each pixel in the pixel area is overlapped, the present invention is not limited to this. The test electrode and the pixel electrode may only overlap with randomly selected pixels, and only perform a working state test on the randomly selected pixels. Although it is described in this example that the device substrate has a driving circuit such as a signal line driving circuit and a scanning line driving circuit, the device under test of the present invention is not limited to this. Even if there is only one pixel area on the device substrate, the test can be performed by the test method of the present invention. At the same time, for a single device called a TEG or evaluation circuit composed of a single device, the test method or device of the present invention can be used to confirm its operating status. Printed by the Consumer Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs The present invention can use the above structure to determine normality / abnormality without the need to directly touch the probes at the interconnection point. Therefore, it is possible to prevent a decrease in yield due to the use of fine dust from the probe in the subsequent steps. In addition, since normality / abnormality in all composition steps can be determined with one test step, the test process can be simplified. [Embodiment Mode 2] Fig. 8 shows a top view of first and second test substrates for performing a test with a second configuration according to the present invention. For the device substrate used in this embodiment, refer to FIG. 2 in the implementation mode 1. This paper size applies the Chinese national standard (CNS) A4 specification (210X297 mm) -43-573128 Printed by the Consumer Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs A7 B7 V. Description of the invention (4) The first shown in Figure 8A The test substrate has a primary line formation area 6 101 on a substrate 6 100, an external input buffer 6101 and a connector connection portion 6 103 for the first test substrate. In this specification, the first test substrate includes a substrate 6 100, a primary coil formation region 6 101, and all other circuits or circuit elements formed on the substrate 6 100. It may not be necessary to provide an external input buffer 6102 among them. The primary coil formation area 6 1 01 possessed by the first test substrate is not limited to the number and layout of the structures shown in FIG. 8A. It is possible for the designer to arbitrarily determine the number and layout of the primary coil forming regions 6101. The second test substrate shown in FIG. 8B has a plurality of test electrodes 6 1 2 1 and a connector connection portion 6 1 22 for the second test substrate on one substrate 61 20. In the specification, the second test substrate includes a substrate 6 1 20, a connector connecting portion 6 1 22 for the second test substrate, and all other circuits or circuit elements formed on the substrate 6 1 00. The test electrodes 6 1 2 1 possessed by the second test substrate are not limited to the number and layout of the structures shown in FIG. 8B. It is possible for the designer to arbitrarily determine the number and layout of the test electrodes 6 1 2 1. The operation of the device substrate and the test substrate in the test steps is described below. In order to facilitate the understanding of the signal flow in the test step, the block diagram shown in FIG. 9 is used to represent the device substrates shown in FIGS. 8 and 2 and the structures of the first and second test substrates' while referring to FIGS. 8 and 2. On the first test substrate 6203, a test AC signal is input from a signal source 201 or an AC power source 202 to an external input buffer 6 102 through a connector connected to a connector connecting portion 61 03. The test communication signal is applicable to the external paper size. National Standard (CNS) A4 Specification (210X297 mm) -44 ^ ---------- Φ ------ 1T ----- -^ 9— (Please read the precautions on the back before filling this page) 573128 A7 B7 Printed by the Consumers' Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs 5. Description of the invention (buffered in the input buffer 61 02-enlarged and input once Coil formation area 6101. In Figs. 2, 8 and 9, sometimes the input AC signal buffered-amplified in the external input buffer 6102 is input to the primary coil formation area 6 1 0 1. However, the present invention is not It is only limited to this structure. The AC signal can be directly input to the primary coil formation area 6 1 0 1 without providing an external input buffer 6 1 02 〇 Multiple primary coils are formed in the primary coil formation area 6101. The AC signal is input to one time Two terminals of the coil. At the same time, in the secondary coil formation area 117 owned by the device base 204, a plurality of secondary coils are formed corresponding to the primary coils owned by the primary coil formation area 6 1 0. When an AC signal is input, By the time of the line, due to two The electromagnetic induction between the two terminals of the secondary coil generates an AC voltage in the form of electromotive force. The AC voltage generated on the secondary coil is supplied to the waveform shaping circuit 116a or the rectifying circuit 116b. The waveform shaping circuit 116a or the rectifying circuit 116b Shaping or rectifying the AC voltage to generate a driving signal or power supply voltage. The generated driving signal or power supply voltage is provided to the extended interconnection point 11 4. The provided driving signal or power supply voltage is provided through the extended interconnection point Π 4 is provided to the signal line driving circuit 111, the scanning line driving circuit 11 2 and the pixel area 11 3 〇 The AC voltage generated on the secondary line 圏 can be directly input to the pixel area 113 as a driving signal without using a waveform Shaping circuit 116a or rectifier circuit 116b. (Please read the precautions on the back before filling this page) This paper is applicable. National Standard (CNS) A4 Specification (210X297mm) -45- 573128 A7 B7 Intellectual Property of the Ministry of Economic Affairs Printed by the Bureau ’s Consumer Cooperatives 5. Description of Invention (4 $ Pixel area 113 is provided with multiple pixels, each pixel is provided with a pixel electrode. The signal line driving circuit and the scanning line driving circuit are not limited to the numbers shown in Figs. 2 and 9. The operation of the signal line driving circuit 1 1 1, the scanning line driving circuit 1 1 2 and the pixel area 11 3 is a graph of each pixel. A voltage is applied to the pixel electrode. The device substrate used as a test object does not require a driving circuit such as the signal line driving circuit 1 1 1 and the scanning line driving circuit 1 12. The driving signal voltage or power can be applied to the pixel area 1 1 3 only. However, it is necessary to set the voltage of the driving signal voltage or the power supply voltage so that the voltage applied to the pixel electrodes is an AC voltage. The pixel electrode of the pixel overlaps the test electrode 6 1 2 1 at a fixed interval. When the pixels work normally when an AC voltage is applied to the pixel electrodes, an electromotive force is generated on the test electrode 6 1 2 1. The AC voltage or electromotive force generated on the test electrode 6 1 2 1 can provide information on the working status of the pixel. According to the AC voltage generated on the test electrode 6 1 2 1, the working state of the pixels owned by the pixel area can be confirmed, so as to determine whether it is normal / abnormal or a specific failure point. Sometimes, the first and second coils used in this embodiment are the same as the wires in Embodiment 1, and the wires shown in FIGS. 4A and 4B can be used. The perspective view shown in FIG. 10 is the device base 204 overlaps the first test substrate 6203 and the second test substrate 6205. The situation shown in the figure is that the first test substrate 6203 in FIG. 8A has a primary coil, that is, the coil shown in FIG. 4A, and the device substrate shown in FIG. 2 has a secondary coil, that is, The paper size of this drawing applies to Chinese National Standard (CNS) A4 specification (210X297 mm) _ 46-(Please read the notes on the back before filling out this page) 573128 Printed by A7 of the Intellectual Property Bureau Employee Consumer Cooperative of the Ministry of Economic Affairs __B7_ DESCRIPTION OF THE INVENTION (4A). The connector 6209 is connected to the connector connection portion 6103 of the first test substrate. At the same time, the connector 6210 is connected to the connector connection portion 6122 of the second test substrate. See FIG. 10 As shown, the primary coil formation area 61 0 1 possessed by the first test substrate 6203 overlaps the secondary coil formation area 1 1 7 possessed by the device substrate 204 by a fixed interval. The ideal interval is small. As long as the interval It can be controlled, the closer the primary coil formation area 6 1 01 and the secondary coil formation area 117 owned by the device substrate 204 are, the better. At the same time, the test electrode 6121 and the pixel area 1 1 owned by the second test substrate 6205 are as close as possible. The pixel electrodes owned by 3 pixels are overlapped by a fixed interval. The ideal interval is very small. As long as the interval can be controlled, the test electrode 6 1 2 1 and the pixel area of the pixel area 11 3 The closer the pixel electrode you have, the better. You can maintain the gap between the test substrate 6203 and the device substrate 204 by fixing two substrates. Or you can maintain this by fixing one of the device substrates 204 or the first test substrate 6203. At an interval, a fluid having a constant flow rate or pressure is used between the first test substrate 6203 and the device substrate 204. A representative fluid is a gas or a liquid. In addition, a viscous fluid can also be used. Similar to implementation mode 1, The spirals of the primary and secondary coils can be in the same or opposite directions. At the same time, the designer can also properly set the interval (LgaP) between the primary and secondary coils. About the primary and secondary coils For the overlapping method, refer to Figure 6A in Implementation Mode 1. Similarly, similar to Implementation Mode 1, one test electrode 6 1 2 1 overlaps multiple pixel electrodes at the same time. You can use A conductive film or multiple conductive films connected to the circuit forms a test electrode. The overlap of the test electrode and the pixel electrode is applicable to this paper. National Standard (CNS) A4 (210X297 mm) _ 47-(Please read first Note on the back page, please fill out this page) 573128 A7 ____B7 _ V. Description of the invention (No (please read the note on the back page, and then fill out this page) For the method, please refer to Figure 6B in Implementation Mode 1. Using overlapping test electrodes 61 21 A capacitor is formed with the pixel electrode 208. If an alternating voltage is applied to the pixel electrode 208, an electromotive force is generated due to the electrostatic induction on the test electrode 6 1 2 1. Sometimes, in this implementation mode, the position of the pixel electrode 208 overlapping the test electrode 6 1 2 1 is arbitrary. In addition, the positional relationship between the test electrode 6 1 2 1 and the pixel electrode 208 varies with different monitors. For circuit diagrams of the pixel electrodes 20 8 and the test electrodes 6 1 21 of the second test substrate, which are superposed on the device substrate, see FIG. 7 of Embodiment Mode 1. It should be noted that, in the pixels shown in FIG. 7, the pixel electrodes of the pixels having the same scanning line are overlapped with the same test electrode. However, the test electrode is not limited to the structure shown in FIG. 7. It is possible to arbitrarily select those pixels whose pixel electrodes overlap the test electrodes. The positional relationship between the test electrode 6 1 2 and the pixel electrode 208 during the monitoring period will be described below. Printed by the Consumer Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs The designer can freely set the number of times to monitor the AC voltage generated on the test electrode 6 1 2 1. The designer can also arbitrarily set the positional relationship between the test electrode 6121 and the pixel electrode 208 during each monitoring process. However, in order to monitor, it is necessary to fix the positional relationship between the test electrode 6 1 21 and the pixel electrode 208, and set the number of monitoring times so that the AC voltage on the test electrode 6 1 2 1 obtained by all the monitoring 値To determine the working state of each pixel. Figures 11 A and 11 B show the pixel electrode 2 0 8 and the test electrode 6 1 2 1 in the center of the pixel area around the center axis of the work in a shape with Plain electrode This paper size is in accordance with Chinese National Standard (CNS) A4 (210X297 mm) · 48-573128 Printed by A7 B7, Consumer Cooperative of Intellectual Property Bureau of the Ministry of Economic Affairs 5. Description of invention (砵 208 plane rotation test on parallel plane The positional relationship of the electrodes 61 to 21. For the sake of explanation, the example described here uses pixel electrodes with a quantity of 5 × 5 in the pixel area. FIG. 11A shows the state before rotation (0 °), where Every five pixel electrodes 208 overlap the test electrode 6 1 2 1. Fig. 1 B shows a state where the test electrode 6 1 2 1 is rotated counterclockwise from the state of Fig. 1 1A by 45 degrees around the center of the pixel region. In this case, test the electricity The electrode 6121 overlaps with a different pixel electrode 208 in FIG. 11A. The amplitude and waveform of the AC voltage generated on each test electrode 6 1 2 1 are different, depending on the graph overlapped with the test electrode 6 1 2 1 The number of pixel electrodes, the area overlapping with the pixel electrode, and the AC voltage applied to the pixel electrode 値. It is possible to calculate in advance the number of pixel electrodes overlapping with the test electrode 6 1 2 1 and the pixel electrodes overlapping The area and the amplitude of the AC voltage to be applied to the pixel electrode can be obtained in advance by calculation or actual measurement under the condition that all pixels are working normally. For example, in the case shown in FIG. 12 The pixel electrode 208 that overlaps the test electrode 6 1 2 1 includes a pixel electrode 208 a of poor quality. The amplitude and waveform of the AC voltage generated on the test electrode 6 1 2 1 and all pixels work normally. The situation is different. Among the pixel electrodes overlapping with the test electrode 6 1 2 1, the amplitude and waveform of the AC voltage generated on the test electrode 6 1 2 1 are increased as the pixel electrode occupancy rate of the inferior pixels increases. It will be far away from the situation that all pixels work normally. Therefore, it can be calculated that the pixels that work normally and a test electrode 6 I 2 1 This paper size is applicable. National National Standard (CNS) A4 specifications (210X297 mm) _ 49----------- Φ ------ 、 Order ------ MW (Please read the notes on the back before filling out this page) 573128 Employees' Consumption of Intellectual Property Bureau, Ministry of Economic Affairs Cooperative printed A7 ____ B7 V. Description of the invention (々 The share of those pixel electrodes that overlap. In addition, 'because the position of the test electrode 6 1 2 1 relative to the pixel electrode 208 has been changed multiple times', it is possible to obtain the normal working pixel share among those pixel electrodes that overlap with a test electrode 6 1 2 1 . According to the occupancy rate of the normal working pixels obtained at each position of the test electrode 6 1 2 1, its working state can be determined on a pixel-by-pixel basis. Normal / abnormal can be determined based on the working status. Sometimes, applying voltage to multiple pixel electrodes overlapping one test electrode at the same time includes sequential and random application, depending on the semiconductor device driving method and test electrode layout. In the case where multiple pixels are selected and operated at the same time, the AC voltage waveform generated on the test electrode is different between two cases in which all pixels work normally and at least one pixel does not work normally. In other words, the AC voltage generated on the test electrode has all the information about the working state of the pixels. At the same time, if multiple pixels are selected and operated in sequence, the test electrode will generate an AC voltage that increases in sequence, and each stage can be used as information for the working status of each pixel. Therefore, with respect to the overlapping area between the pixel electrode and the test electrode of the working pixel, if all of the pixels operated in sequence are normal, the AC voltage generated on the test electrode will be a monotonic rate of change. Otherwise, if multiple pixels operating in sequence include an abnormal pixel, the AC voltage generated on the test electrode will not be monotonic relative to the overlapping area between the pixel electrode and the test electrode of the working pixel. Rate of change. Therefore, all paper pixels work normally and at least one pixel works abnormally. This paper size is applicable to China National Standard (CNS) 8-4 specifications (21 × 297 mm) -50-(Please read the precautions on the back before filling in this Page) 573128 A7 B7 Printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs 5. Description of the invention (4¾ The AC voltage waveforms produced on the test electrodes are different between the two cases. Sometimes, the The pixel has been confirmed to be normal. The AC voltage generated on the test electrode is compared with the AC voltage actually generated on the test electrode to confirm the working state of a pixel and determine its normal / abnormal. However, as a comparison The reference AC voltage must not be on the pixel that has been confirmed to be normal. By comparing the AC voltages generated on multiple test electrodes, you can confirm the working status of a pixel and determine its normal / Abnormal. In this case, the area of the pixel electrode that overlaps the test electrode must be taken into account when making comparisons. At the same time, it is calculated by analogy By comparing an AC voltage of, it is possible to confirm the working state of a pixel and determine its normal / abnormal. Sometimes, although the test electrodes in Figures 7, 11 A and 1 1 B have The pixel electrodes of all the pixels are overlapped, and the present invention is not limited to this case. The test electrode and the pixel electrode can only overlap on randomly selected pixels, and only perform pairing work on randomly selected pixels. Test of the state. Although the example described in this implementation mode is that the device substrate has a signal line driving circuit and a scanning line driving circuit as driving circuits, the device substrate tested in the present invention is not limited to this. If the device substrate has only one Pixels can also be tested by the method of the present invention. At the same time, for a single device called a TEG or evaluation circuit composed of a single device, the test method or device of the present invention can also be used to confirm its operating status. The thing is that I --------- Φ ------ 1T ------ ^ 9— (please read the precautions on the back first) Fill out this ) This paper size is applicable. National National Standard (CNS) A4 specification (210X297 mm) -51-573128 A7 B7 Printed by the Consumers' Cooperative of the Intellectual Property Office of the Ministry of Economic Affairs 5. Description of the invention (connected to control and mobile test electrodes. This The invention can use the above structure to determine the normality / abnormality of the device substrate without directly contacting the probes of the interconnection points. Therefore, it is possible to prevent the production yield from being reduced due to the use of fine dust caused by the probes in the subsequent steps. The test steps can determine normal / abnormal in all the composition steps, and the test process can be simplified. The following describes one embodiment of the present invention. [Embodiment 1] This embodiment illustrates the structure of a test device. Compare the AC voltages generated on multiple test electrodes to confirm the working state of the pixel and determine its normal / abnormal. Fig. 13 is a block diagram showing the construction of the test apparatus of this embodiment. From the man-machine I / F 305, a measurement start instruction is input to the measurement controller 306 as information. To start the measurement, the measurement controller 306 inputs a command to the processor I / F 307 to control the positions of the device substrate 302 and the test substrate 301 as test objects. The processor I / F 307 overlaps a pixel electrode (not shown) owned by the device substrate 302 and a test electrode 303 owned by the test substrate 301 at a fixed interval. The measurement controller 306 inputs a measurement start instruction to the measurement sequencer 308 as information. A panel display sequencer 309 is controlled by the measurement sequencer 308 to select a position of the pixel of the test object, and this position is input from the panel display sequencer 309 to the coil driver 310 as information. An RF carrier with a signal source and an AC power source can provide AC voltage to subsequent circuits. Measurement (Please read the precautions on the back before filling out this page) The paper size is applicable. National Standard (CNS) A4 (210X297 mm) -52- 573128 Printed by the Consumers ’Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs A7 _B7 V. Description of the invention (50 The sequencer 308 controls the RF carrier 311 to input an AC voltage to the coil driver 310. The coil driver 3 1 0 uses the input AC voltage for the external input buffer 3 1 1 to operate the test object Pixel AC voltage. The external input buffer 3 1 1 buffers-amplifies the supplied AC voltage and supplies it to the primary coil forming area 304. Providing an AC voltage to the primary coil forming area 304 enables the device substrate 3 0 The pixel of the test object owned by 2 works. The AC voltage is applied to the pixel electrode of the pixel. In addition, the operation of the device substrate when supplying the AC voltage to the primary coil formation area has been specified in the implementation mode. Therefore, it is unnecessary to say more here. When an AC voltage is applied to the pixel electrode, an AC is generated on the test electrode 303 that overlaps the pixel electrode. Voltage. The AC voltage generated on the test electrode 303 includes the working state information of the same pixel. The AC voltage generated on the test electrode 303 is provided to a signal processing circuit 312. The signal processing circuit 312 processes the signals in each figure. The AC voltage 値 generated on the pixel electrode. Specifically, the difference between the AC voltages on each test electrode is calculated. The AC voltage waveform generated on the test electrode 303 is different, and it depends on the working state of the pixel. Therefore, the calculated AC voltage difference includes information about the working state of the pixel. Therefore, the signal with information, that is, the calculated AC voltage difference (working information signal) includes the information about the working state of the pixel. The work information signal is input to the selector circuit 3 1 3. The AC voltage generated on the test electrode often includes various noises. By borrowing (please read the precautions on the back and fill in this guide) This paper size applies to Chinese national standards (CNS ) A4 size (210X297 mm) -53- 573128 Printed by A7 of the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs ____B7_F Description of the invention (5) By calculating the difference between the AC voltage 値 generated on the test electrodes, this kind of noise with relatively close frequency and voltage generated on the test electrodes can be eliminated to a certain extent. The closer the position is, the closer the noise frequency and voltage are. Therefore, it is best to calculate the difference in AC voltage between those test electrodes that are closer to each other. By measuring the sequencer 308 to the selector The circuit 3 1 3 provides position information of a pixel selected by the panel display sequencer 309. The selector circuit 31 3 inputs a job information signal to a signal analyzer 314, and the signal corresponds to a plurality of input job information signals. The selected pixel. The signal analyzer 314 amplifies the input job information signal, A / D is converted into a digital form, and then processed. A / D conversion is not necessary, and processing operations can be performed by analogy. The processing operation is performed to analyze the working status of the pixel. Therefore, the designer can correctly select the content of the processing operation. The processing information signal is input to the measurement controller 3 06 after the processing operation. The measurement controller 306 further processes the operation work information signal to determine a pixel state, and further determines whether the pixel is normal / abnormal. Incidentally, the light-emitting device of the present invention is not limited to the structure shown in Fig. 13. It is only required that the light-emitting device has a device for generating an AC voltage, a device for supplying a voltage to an interconnection point and a circuit element of the device substrate without contact, a device for reading a voltage applied to a pixel electrode of the device substrate without contact, and To control the position of the device base. It is also necessary to determine a pixel state based on the AC voltage reading without contact, and to determine the normal / abnormality of the pixel. This paper size applies Chinese National Standard (CNS) A4 specification (210X297 mm) -54-'I-II---n I---I _ τ ϋ ---- I.: I _ (Please read the back Please note this page and fill in this page again) 573128 Printed by the Consumer Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs A7 ___B7 V. Invention Description (5) [Embodiment 2] This embodiment illustrates the structure of a test device. AC voltages generated on multiple test electrodes to confirm the working state of the pixel and determine its normal / abnormal. Figure 14 shows a block diagram of the test device structure of this embodiment. From the man-machine I / F6305 to the measurement controller 6306 Enter a measurement start instruction as information. To start the measurement, as the information, the measurement controller 6306 inputs a device substrate 6302, a first test substrate 6301, and a second test to the processor I / F 6307 as a test object. The instruction of the position of the substrate 63 15. The processor I / F6307 eliminates the secondary line erasure area (not shown) owned by the device substrate 6302 and the primary line erasure owned by the first test substrate 6301 by a fixed interval. Area 63 04 overlaps. At the same time, the processor I / F 6307 overlaps a pixel electrode (not shown) owned by the device substrate 6302 and a test electrode 6303 owned by the second test substrate 63 15 at a fixed interval. Together, the measurement controller 6306 inputs a measurement start instruction as information to the measurement sequencer 6308. The measurement sequencer 6308 controls a panel display sequencer 6309 to select the position of the pixel of the test object, and uses the information to display The sequencer 6309 inputs this position to the coil driver 63 10. An RF carrier with a signal source and an AC power source 63 1 1 can supply an AC voltage to the subsequent circuit. The measurement sequencer 6308 controls the RF carrier 631 1 to the coil driver 63 10 Enter an AC voltage. (Please read the precautions on the back before filling this page.) This paper size applies to Chinese national standards (CNS> A4 specification (210X297 mm) _ 55 · 573128 A7 B7 V. Description of the invention ((please first (Please read the notes on the back and fill in this page again.) The coil driver 63 10 uses the input AC voltage as an external input buffer 6 3 1 1 fee for operation The parent current voltage of the g-type object pixel. The external input buffer 63 11 buffers-amplifies the supplied AC voltage and supplies it to the primary line formation area 6304. It is sufficient to provide the AC voltage to the primary line formation area 6304. The pixel of the test object owned by the device substrate 6 302 is operated. An AC voltage is applied to the pixel electrode of the pixel. When an AC voltage is applied to the pixel electrode, a test that overlaps with the pixel electrode is performed. An AC voltage is generated on the electrode 6303. The AC voltage generated on the test electrode 6 3 03 includes the working state information of the same pixel. The AC voltage printed on the test electrode 6303 printed by the Consumer Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs is provided to a signal processing circuit 63 1 2. The signal processing circuit 63 1 2 processes the AC voltage 値 generated at each test electrode. Specifically, the difference in AC voltage generated between the test electrodes is calculated. The AC voltage generated at the test electrode often includes various noises. By calculating the difference between the AC voltages 値 generated on the test electrodes, this kind of noise with relatively close frequency and voltage generated on the test electrodes can be eliminated to a certain extent. The closer the test electrodes are located to each other, the closer the frequency and voltage of the noise are. Therefore, it is best to calculate the difference in AC voltage between those test electrodes that are relatively close to each other. By the way, the AC voltage waveform generated on the test electrode 6303 is different, and it depends on the working state of the pixel. Therefore, the calculated AC voltage difference includes information on the working state of the pixels. Therefore, the information signal, that is, the calculated AC voltage difference (working information signal) includes Figure-56- This paper size is applicable to the Chinese National Standard (CNS) A4 specification (210X297 mm) 573128 A7 _B7_ V. Invention Description (Information on the working state of the element. This operation information signal is input to the selector circuit 6313. The selector circuit 63 13 is provided with the position information of a pixel selected by the panel display sequencer 6309 via the measurement sequencer 6308. , The position of a pixel electrode that overlaps with each test electrode 6 3 0 3, and the ratio of the overlap area. The selector circuit 63 1 3 inputs a job information signal to a signal analyzer 63 1 4 and the signal corresponds to a plurality of The selected pixel of the input job information signal. The signal analyzer 63 14 enlarges the input job information signal and converts the a / D into a digital form, and then processes it. By the way, A / D conversion is not necessary You can also perform the processing operation by analogy. The processing operation is performed to analyze the process of this pixel that overlaps with the test electrode during monitoring. Status. Therefore, the designer can correctly select the content of the processing operation. The job information signal after the processing operation is input to the measurement controller 6306. Then, the processor I / F 6307 changes the second test electrode 63 15 with respect to the device substrate 6302. Repeat the above operation several times, and input multiple processed operation information signals to the measurement controller 63〇8. The measurement controller 6308 is based on the position and area ratio of a pixel electrode that overlaps with each test electrode during the monitoring period. And the inputted work information signal of processing operation to confirm the state of each pixel and determine the normal / abnormality of the pixel. It should be noted that the test device of the present invention is not limited to the structure shown in FIG. As long as the test device of the present invention has a device for generating an AC voltage, a device that supplies voltage to the interconnection points and circuit components of the device substrate in a non-contact manner. -(Please read the precautions on the back before filling out this page) 、 11 Staff Consumption of Intellectual Property Bureau, Ministry of Economic Affairs Cooperatives printed 573128 A7 B7

V. Description of the invention (5jS (please read the precautions on the back before filling this page), a device that reads out the voltage applied to the pixel electrode of the device substrate without contact, and a device for controlling the position of the device substrate. In addition, a pixel state is determined without contact based on the AC voltage reading, and the normal / abnormality of the pixel is determined. [Embodiment 3] This embodiment describes the specific structure of the signal processing circuit of the test device shown in FIG. It should be noted that the test device shown in Fig. 14 can also adopt the structure of this embodiment. Fig. 15 shows a circuit diagram of the signal processing circuit of this embodiment. The signal processing circuit shown in Fig. 15 has a corresponding number of y Test electrodes 303 (E1 to Ey) of multiple differential amplifiers 3 50_1 to 350_y-1. The AC voltages generated at the test electrodes are input to the non-inverting input (+) of the differential amplifier. For each differential The inverting input of the amplifier ㈠ provides an alternating voltage generated on a test electrode that is different from the test electrode corresponding to the non-inverting input (+). In the embodiment, the voltage of the AC voltage generated on the test electrode Ei (i is any one of 1 to y-1) is supplied to the non-inverting input (+) of the differential amplifier 350J. At the test electrode E i + 1 (i is any one of 1 to y -1) The voltage of the AC voltage generated is supplied to the first —a — — 0 of the differential amplifier 350_i + l 0 The output of each differential amplifier is to the selector circuit of the subsequent stage 3 1 3 Input an X as an information signal. Based on the work information signal output from the differential amplifier, you can confirm the working state of a pixel that overlaps with each test electrode. Specific paper standards are applicable. National standards (CNS> A4) Specifications (210X297 mm) _ 58-573128 A7 _ B7_ V. Description of the invention (5b says' the working state of a pixel can be confirmed based on the chirp or waveform of the voltage held by the work information signal. However, it can be determined based on the difference The working information signal output by the amplifier 3 5 (Ly-I is used to confirm the working state of the pixel overlapping the test electrode Ey. Similarly, a virtual test electrode can be prepared to increase the AC voltage generated on the test electrode Ey. To a non-inverting input (+) of a separately provided differential amplifier, and the voltage of the virtual test electrode is provided to the second terminal. In addition, a pixel area can also be provided that is not actually used for display but is used for The virtual pixels for the test purpose allow the virtual pixels to overlap the virtual test electrodes. The working state information of one pixel overlapping the test electrode E 1 is included in the working information signal output by the differential amplifier 3 50_1. And the test electrode Elj (j = 2 to y-1) overlaps the working status information of one pixel is included in the working information signals output by the differential amplifiers 3 50 ″, 1 and the differential amplifier 350_j. The operating state information of a pixel overlapping the test electrode Ey is included in the operating information signal output from the differential amplifier 3 50j-1. By the way, the designer can also correctly set a standard to determine whether a pixel works normally based on the degree of difference between the working state of the pixel and the normal pixel working state. The signal processing circuit used in the present invention is not limited to the structure shown in Fig. 15. The implementation of this embodiment can be freely combined with Embodiment 1 or 2. [Embodiment 4] This embodiment illustrates the signal processing circuit of the test device shown in Figure Π (please read the precautions on the back before filling out this page), 11 The paper printed by the Consumers ’Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs applies this paper China National Standard (CNS) A4 specification (210X297 mm) -59- 573128 A7 B7 V. Description of the invention (Life structure. It should be noted that the test device shown in Figure 14 can also adopt the structure of this embodiment (Please read the precautions on the back before filling this page) Figure 16 shows the circuit diagram of the signal processing circuit of this embodiment. The signal processing circuit shown in Figure 16 has a corresponding number of test electrodes 3 03 (E1 To Ey), multiple primary induction coils 360_1 to 360_y-l, multiple secondary induction lines 圏 361_1 to 361_y · !, and multiple capacitors 362 J to 362_y-l. Each of the primary and secondary induction lines of this embodiment The center of 圏 (hereinafter collectively referred to as induction wire 圏) may or may not be provided with a magnetic component. At the same time, the interconnection points owned by these induction wires 可以 may or may not be on the same plane. Alternating current The voltage is input to the first terminal of the primary induction coil. The second terminal of each primary induction coil is provided with an AC voltage generated on a test electrode different from the test electrode corresponding to the first terminal. Consumption by employees of the Intellectual Property Bureau of the Ministry of Economic Affairs The cooperative prints the voltage of the AC voltage generated on the test electrode E i (i is any of 1 to y -1) in this embodiment is supplied to the first terminal of the primary induction coil 3 60_i. On the test electrode The voltage of the AC voltage generated on Ei + 1 (i is any one of 1 to y-1) is supplied to the second terminal of the primary induction coil 360_U1. The primary induction coil 360_1 to 360J-1 and the secondary induction coil 361_1 to 361 j-1 are overlapped respectively. Capacitances 362 J to 362__y-1 are formed between the first and second terminals of the secondary induction coils 361 _1 to 361 j-1, respectively. The secondary induction lines 361_1 to 361_y_l All the voltages generated on the first terminal are provided to the selector circuit as working information signal voltages. 3 1 3. It is -60- This paper size applies the Chinese National Standard (CNS) A4 specification (210X 297 mm) Ministry of Economic Affairs Hui Property Office employees consumer cooperatives printed 573128 A7 ____ B7_______

V. Description of the invention (5) B All the second terminals of the secondary induction coils 361_1 to 36 1_y-1 provide a constant voltage (ground voltage in FIG. 16). Based on the work information signal generated on the first terminal of the secondary sensing line, the working status of a pixel overlapping each test electrode can be confirmed. However, the working state of the pixel overlapping the test electrode Ey can be confirmed based on the working information signal generated on the first terminal of the secondary induction coil 360_y-1. It is also possible to prepare a dummy test electrode, supply the AC voltage generated on the test electrode Ey to the first terminal of a primary induction coil provided separately, and provide the voltage of the dummy test electrode to the second terminal of the primary induction coil. The working status can also be confirmed by the working information signal generated on the first terminal of a separately provided secondary induction coil. In addition, it is also possible to provide a virtual pixel in the pixel area which is not actually used for display but for testing purposes, so that the virtual pixel can overlap the virtual test electrode. The working state information of a pixel overlapping the test electrode E 1 is included in the working information signal generated on the first terminal of the secondary induction coil 361-1. The working state information of one pixel overlapping the test electrode Ej (j = 2 to y -1) is included in the first terminal of the secondary induction coil 3 6 1 J -1 and the first terminal of the secondary induction coil 36 1 J The job information signal is generated on the terminal. The working state information of one pixel overlapping with the test electrode Ey is included in the working information signal generated on the first terminal of the secondary induction coil 361 j-1. The designer can also correctly set a standard to determine whether a pixel is working properly based on the degree of difference between the working state of the pixel and the working state of the normal pixel. The size of this paper is applicable. National National Standard (CNS) A4 (210X297 mm): 61- '" ---------- Φ ------ 1T ------ 0 — (Please read the notes on the back before filling this page) 573128 A7 B7

5. Description of the invention (5) B The signal processing circuit used in the present invention is not limited to the structure shown in Figure 16. (Please read the precautions on the back before filling this page) The implementation of this embodiment can be implemented with the embodiment 1 or 2 can be combined freely. [Embodiment 5] In this embodiment, the specific structure of the waveform shaping circuit in Embodiment Mode 1 will be described with reference to FIG. 17. It should be noted that the waveform shaping circuit in Embodiment Mode 2 can also adopt the structure of this embodiment. Fig. 17 shows a connection form between the signal source 20 1 shown in Fig. 3, the primary coil formation area I 0 1, the secondary coil formation area 1 1 7 and the waveform shaping circuit 11 6a. The primary coil formation area A plurality of primary coils 206 are provided in 1 0. A plurality of secondary coils 207 are provided in the secondary coil formation area 1 1 7. A test AC signal is input from the signal source 201 to each primary coil 206. Specifically, A test AC signal voltage is applied from the signal source 201 to the two terminals owned by the primary coil 206. When an AC signal is input to the primary coil 206, an AC voltage or electric The AC voltage is provided to the waveform shaping circuit. The Intellectual Property Bureau of the Ministry of Economic Affairs, Intellectual Property Bureau, employee consumer cooperative printed II 6 a 〇 Wave shaping circuit 1 1 6a is an electronic circuit that is used to shape the voltage or current waveform that has a certain amount of time. Fig. 17 has resistors 501, 502 and capacitors 503, 504, and a combination of circuit elements is used to form an integral waveform shaping circuit 1 1 6a. Of course, the waveform shaping circuit is not limited to the structure shown in Fig. 17. Similarly, similar power supplies Circuits, waveform detection circuits using diodes can also be used for waveform shaping. -62- This paper size applies Chinese National Standard (CNS) A4 specifications (210X 297 mm) 573128 A7 ______B7 _ V. Description of the invention (6b (please Read the precautions on the back before filling this page.) The waveform shaping circuit 11 6a used in the present invention specifically generates and outputs a clock signal (CLK), a start pulse signal (SP) or a video signal according to the input AC electromotive force. Waveform shaping The circuit 1 1 6a generates signals in arbitrary forms, not limited to the above signals. The signals generated by the waveform shaping circuit 1 1 6a can be used Confirm the working state of the pixels. The signal output from the waveform shaping circuit 1 16a is input to the subsequent circuit such as the signal line driving circuit 111, the scanning line driving circuit 1 12 and the pixel area 11 3 0. Implementation can be freely combined with Embodiments 1 to 4. [Embodiment 6] In this embodiment, the specific structure of the rectifier circuit 116b in Embodiment Mode 2 will be described with reference to Fig. 18. The rectifier circuit in Embodiment Mode 2 can use the rectifier circuit shown in this embodiment. Structure. Printed by the Consumer Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs. Figure 18 shows the AC power source 202 shown in Figure 3, between the primary coil formation area 1 0 1, the primary coil formation area 1 1 7 and the rectifier circuit 11 6 b. A form of connection. A plurality of primary coils 206 are provided in the primary coil formation area 101. A plurality of secondary coils 207 are provided in the secondary coil formation area 117. A test AC signal is input from the AC power source 202 to each of the primary coils 206. When an AC signal is input to the primary coil 206, an AC voltage or electromotive force is generated on the corresponding secondary coil 207. This AC voltage is supplied to the rectifier circuit 116b. The rectifier circuit 11 6b of the present invention is used to generate the paper size from the supplied AC voltage. The paper size is applicable to the Chinese National Standard (CNS) A4 specification (210 parent 297 public ^)-^ 3-~ 573128 A 7 B7 5. Description of the invention (6 & gt A DC power supply voltage circuit. DC power supply voltage means that the voltage supplied to the circuit, circuit components or pixels is kept at a constant height. (Please read the precautions on the back before filling out this page) Figure 18 The rectifier circuit 116b shown has a diode 601, a capacitor 602, and a resistor 603. The input AC voltage is rectified by the diode 60 1 and converted into a DC voltage. FIG. 19A shows that the AC voltage passes through the diode 601 Change over time before rectification. Figure 19B shows the change over time of the rectified voltage. Comparing between Figures 19A and 19B, it can be seen that the rectified voltage has zero or unipolar 値 in a half-cycle interval. It is also a kind of pulse voltage. The pulse voltage shown in Figure 19B is difficult to be used as a power supply voltage. Therefore, the storage effect of a capacitor is often used to smooth and convert the pulse into a DC voltage. However, In order to use a thin film semiconductor to form a capacitor having a capacity sufficient to smooth such pulses, it is necessary to unreasonably greatly increase the area of the capacitor. Therefore, the present invention smoothes the voltage by combining (adding) pulse voltages with different phases after rectification Even if the capacitance of the capacitor is small, the above structure is sufficient to smooth the pulse. In addition, it is not necessary to actually set a capacitor to smooth the pulse. The employee's consumer cooperative of the Intellectual Property Bureau of the Ministry of Economics printed in Figure 18, the phase Different AC signals are input to the four primary coils respectively, and four pulse voltages with different phases are output at the four diodes 60 1. These four pulse voltages are added together to form a DC power supply voltage that is approximately constant in height. It can be output to the post-stage circuit. Although FIG. 18 is a combination of four pulse signals with different phases output from four diodes 60 1 to form a power supply voltage, the present invention is not limited to this structure. The number of phase divisions is not only Limited to this. As long as -64- of the rectifier circuit can be used in this paper standard. National National Standard (CNS) A4 Grid (210X297 mm) 573128 A7 _________B7___ 5. Description of the invention (the output is smoothed to the point that it can be used as a power supply, and the number of phase divisions is unlimited. (Please read the precautions on the back before filling this page) Figure 2 0 A-2 0 C shows the change over time of the power supply voltage obtained by adding multiple rectified signals together. Figure 20 A shows an example of a power supply voltage generated by adding four pulse voltages with different phases together. The rectifier circuit is a combination of multiple pulses to generate a voltage. In addition to direct current, there is a ripple component in the voltage. The ripple corresponds to the difference between the highest voltage and the lowest voltage. The smaller the fluctuation, the closer the voltage generated by the DC circuit is to the DC suitable for the power supply voltage. Fig. 20B shows the change over time of the power supply voltage obtained by adding eight pulse voltages of different phases together. It can be seen that the fluctuation is smaller than the time variation of the power supply voltage shown in Fig. 20A. Fig. 20C shows the change over time of the power supply voltage obtained by adding sixteen pulse voltages of different phases together. It can be seen that the fluctuation is smaller than the time variation of the power supply voltage shown in Fig. 20B. Printed by the Consumer Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs In this way, it can be seen that adding many pulses with different phases together can reduce the fluctuation of the power supply voltage and turn it into DC. Therefore, as the number of phase divisions increases, the power supply voltage output from the rectifier circuit becomes smoother and smoother. Similarly, as the capacity of the capacitor 602 increases, the power supply voltage output from the rectifier circuit becomes smoother and smoother. The power supply voltage generated by the rectifier circuit 116b is output through the terminals 610 and 611. Specifically, a voltage close to the ground potential is output through terminal 610, and a power supply voltage having a positive polarity is output through terminal 611. If the anode and cathode of the diode are connected upside down, the polarity of the output power supply voltage can be changed. Connected to the terminal The paper size is applicable. National National Standard (CNS) A4 specification (210X297 mm) -65--573128 Printed by the Consumers ’Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs A7 Fifth, invention description (6) fe 6 1 0 and The anode and cathode of diode 602 on 6 11 are connected upside down to diode 601 connected to terminals 612 and 613. In this way, a voltage close to ground can be output through terminal 612 and terminal 61 3 The output has a negative power supply voltage. By the way, various circuits or circuit elements are provided on the device substrate. The height of the power supply voltage supplied to the circuit or circuit element differs depending on the type or purpose of the circuit or circuit element. In the figure In the rectifier circuit shown in 18, the height of the voltage input to each terminal can be adjusted by adjusting the amplitude of the input AC signal. In addition, the height of the power supply voltage can also be changed by changing the terminal connection. The rectifier circuit used in the present invention It is not limited to the half-wave rectifier circuit shown in Figure 18. The rectifier circuit used in the present invention is a circuit capable of generating a DC power supply voltage from an input AC signal. Fig. 21 A-2 1B shows a circuit diagram of another rectifier circuit having a structure different from that shown in Fig. 18. The rectifier circuit shown in Fig. 21 A is a voltage-doubling full-wave rectifier circuit 901 having two diodes 902 and 903. And the voltage-doubling full-wave rectifier circuit shown in Fig. 21 A has capacitors 904 and 905. The position and number of the capacitors are not limited to those shown in Fig. 21 A. The diode 902 and the cathode and the anode of the diode 903 are connected To one terminal of the secondary coil. If multiple voltage-doubling full-wave rectifier circuits 90 1 are provided and their outputs are added together, the obtained DC voltage can reach twice that of the half-wave rectifier circuit shown in FIG. 18. The rectifier circuit shown in Fig. 21B is a bridge rectifier circuit 911 with four diodes 912, 913, 914, and 915. The four diodes 912, 913914 and this paper standard apply Chinese National Standard (CNS) A4 Specifications (210X297 mm) -66-I --------- Φ ------ 1T ------ ^ _ wi (Please read the precautions on the back before filling this page) 573128 A7 B7 V. Description of the invention (6 > (Please read the notes on the back before filling out this page) 91 5 to form an electric bridge. Figure 21 The bridge rectifier circuit also has a capacitor 916. The position and number of capacitors are not limited to those shown in Figure 21B. The implementation of this embodiment can be freely combined with the embodiments 1 to 5. [Embodiment 7] This embodiment Take the ordinary light-emitting device as an example to describe the test drive signal and the power supply voltage in detail. Figure 22 shows the structure of an OLED panel for a general light-emitting device. Figure 22 is a digital video signal to illustrate an example of a drive circuit for displaying images with the light-emitting device. . The OLED panel shown in FIG. 22 has a signal line driving circuit 700, a scanning line driving circuit 701, and a pixel region 702. The pixel area 702 is provided with many signal lines, many scanning lines, and many power lines. The area surrounded by signal lines, scan lines, and power lines corresponds to a pixel. FIG. 22 shows only one pixel having a signal line 7 07, a scan line 709, and a power line 708 among a plurality of pixels. Each pixel has a switching TFT 703 as a switching element, a driving TFT 704, a storage capacitor 705, and an OLED pixel electrode 706. Printed by the Consumer Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs. The gate electrode of the switch TFT703 is connected to the scanning line 709. One of the source and drain regions of the switching TFT 703 is connected to the signal line 707, and the other is connected to the gate electrode of the driving TFT 704. One of the source and drain regions of the driving TFT 704 is connected to the power supply line 708, and the other is connected to the pixel electrode 706. The gate electrode of the driving TFT 704 and the power supply line 704 form a storage capacitor 705. Sometimes it is not necessary to form a storage capacitor 705 ° -67- This paper size is applicable. National National Standard (CNS) A4 specification (210X297 mm) 573128 A7 __B7 V. Description of the invention (6 ^ (Please read the precautions on the back before Fill out this page} The signal line driver circuit 7 0 0 has a shift register 7 1 〇, a first interlock 711 and a second latch 712. The shift register 71 〇, the first latch 71 丨The second latch 7 and 2 each have a power supply. At the same time, a clock signal (S-CLK) and a start pulse signal (S-SP) for the signal line driving circuit are provided to the shift register 710. A latch 711 provides a latch signal to determine the timing of the latch and video signals. When the clock signal (S-CLK) and the start pulse signal (S-SP) are input to the shift register 7 10, A sampling signal for determining the timing of the sampled video signal will be generated and input to the first latch 7 11. The sampling signal from the shift register 7 1 0 is buffered by a buffer, etc. _ can be input after being amplified To the first interlock 7 1 1. The interconnection point of the input sampling signal is connected to many circuits The circuit element has a large load capacitance (parasitic capacitance). The buffer can effectively prevent the leading edge or the back edge of the timing signal from being "weakened" due to the large load capacitance. The first latch 7 1 1 has a multi-level latch The first latch 7 samples the input video signal in synchronization with the input sampling signal and stores them in the latches at all levels in sequence. The print cycle of the employee consumer cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs is a video signal The time required to write to all levels of the latches of the first latch 7 1 1. In fact, this line cycle in some cases also includes a line cycle plus the time of a horizontal flyback cycle. At the end After one line cycle, a latch signal is input to the second flasher 7 1 2. In this example, the video signal written and held on the first flasher 7 1 1 is immediately transmitted to the second latch. The latches 7 1 2 are written and held on all rear latches of the second latch 7 12. This paper size applies to China National Standard (CNS) A4 specification (210X297 mm) -68-573128 A7 B7 V. Description of Invention (Taste ( Please read the precautions on the back before filling in this page} According to the sampling signal from the shift register 7 1 0, a video signal is written into the first—the video signal has been sent to the second latch 7 丨 2— Interrogator 711. During the second line cycle, the video signal written and held on the second latch 7 1 2 is input to the source signal line. On the other hand, the scanning line driving circuit 7 0 1 has one The shift register 7 2 1 and a buffer 7 2 2. Power is supplied to the shift register 7 2 1 and the buffer 7 2 2. At the same time, the shift register 721 is provided with a clock signal (G-CLK) and a start pulse signal (G-SP) for the scan line driving circuit. An AC voltage is applied to the power supply line 708. When the clock signal (G-CLK) and the start pulse signal (G-SP) are input to the shift register 7 2 1, a selection signal for determining the scan line selection timing is generated and input to the buffer 722 . The selection signal input to the buffer 722 is buffer-amplified and input to the scan line 709. The selected scanning line 709 turns on the switching TFT 703 whose gate electrode is connected to the selected scanning line 709. The video signal input to the signal line is input to the gate electrode of the driving TFT 704 through the turned-on switching TFT 703. Printed by the Consumer Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs Controls the switch driving the TFT704 according to the information 1 or 0 possessed by the video signal input to the gate electrode. When the driving TFT 704 is turned on, the AC voltage on the power supply line is supplied to the pixel electrode. When the driving TFT 704 is turned off, the AC voltage on the power supply line is not supplied to the pixel electrodes. In this way, when the signal line driving circuit 700, the scanning line driving circuit 701, and the pixel area 702 are operated, a parent current voltage is applied to the pixel electrode, so that it will be on the test electrode 730. Generate a copy of the paper with the paper size applicable to the Chinese National Standard (CNS) A4 specification (210X297 mm) · 69-573128 Printed by the Consumers ’Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs A7 ____B7_ V. Invention Description (6 > Job Information AC voltage. According to the AC voltage generated on the test electrode 730, the pixel operation information is confirmed, and the pixel is normal / abnormal. In addition, even if a fault occurs in the driving circuit and the pixel itself is not defective, it is applied to the pixel electrode. The voltage 値 will change. This will determine the normal / abnormality of the drive circuit. For the OLED panel shown in Figure 22, S-CLK, S-SP, G-CLK, G-SP, latch signal and video signal Are input to each circuit as a test drive signal. But the test drive signal is not limited to the above signals. Any drive-related signal can be used as a test drive signal. For example, except In addition to the above signals, the input signal can also be used to determine the switching timing of one direction on the scan line, or a signal used to switch the input direction of the scan line selection signal. However, it is important that the input signal can confirm the measured pixel Working status, or can determine its normal / abnormal. In the case of testing a part of the pixels owned by the OLED instead of testing all the pixels, it is sufficient to input only a driving signal for driving only a part of the pixels. No need Enter all the above-mentioned driving signals. It should be noted that if pulse signals of different phases are added together to generate a power supply voltage, the number of primary coils varies with the number of pulse signals to be added. The present invention The test device and method are not limited to the OLED panel with the structure shown in Fig. 22. The implementation of this embodiment can be freely combined with the embodiments 1 to 6. [Embodiment 8] This paper size applies the Chinese National Standard (CNS) A4 specification (210X297mm) _ 7〇_ (Please read the notes on the back before filling this page) 573128 A7 B7 5 Description of the Invention (6b This example illustrates the use of a large-size substrate to form multiple display substrates by cutting the substrate after testing. (Please read the precautions on the back before filling this page) Figure 23 shows the embodiment before cutting Top view of a large-sized substrate. 1001 is the pixel area, 1 002 is the scan line drive circuit, and 1 003 is the signal line drive circuit. In the area shown in 1 004, there are also only test steps and the test is completed. Circuits or circuit elements that are no longer used later, that is, multiple secondary lines, waveform shaping circuits, rectifier circuits, dedicated test circuits, etc. In Figure 23, the substrate is cut along the line shown by the dotted line, and one substrate Nine display substrates are formed. Incidentally, although the example shown in this embodiment is one in which nine display substrates are formed from one substrate, this embodiment is not limited to this number. Cutting means physically and electrically disconnecting the secondary coils and connectors during the cutting process. In Fig. 23, an area 1004 is provided on the side of the substrate which is not used for the display after cutting. Printed by the Intellectual Property Bureau of the Ministry of Economic Affairs on Consumer Consumption Duprinting An embodiment different from Fig. 23 is used to explain how to cut a large-sized substrate. In FIG. 24, 1101 is a pixel area, 1102 is a scanning line driving circuit, and 11 03 is a signal line driving circuit. In the area shown by 1104, there are also circuits or circuit components that are only used for the test steps and are no longer used after the test is completed, that is, multiple secondary coils, waveform shaping circuits, rectifier circuits, dedicated test circuits, and so on. In FIG. 24, the substrates are cut along lines not shown by the dotted lines, and nine display substrates are formed from one substrate. By the way, although the example shown in this embodiment is to form nine display substrates with one substrate, this embodiment is not limited to -71-This paper size applies the Chinese National Standard (CNS) A4 specification (210X297 mm) 573128 A7 B7____ 5 (6) & this quantity. (Please read the precautions on the back before filling this page) Note that cutting and disconnection are the physical and electrical disconnection of the secondary wires and connectors during the cutting process. In FIG. 24, the region 1 104 is set on a cutting line of the substrate and is cut off after the test. Since the circuit or circuit element formed in the region 1194 is no longer required after the test, the semiconductor is manufactured The device will not malfunction during operation. The waveform shaping circuit or rectifier circuit can be left on the substrate and used as a semiconductor device after cutting, or it can be left on the substrate and not used as a semiconductor device. Otherwise, the cut circuit will break. The implementation of this embodiment can be freely combined with Embodiments 1 to 7. [Embodiment 9] This embodiment uses a flowchart to explain the steps in the test of the present invention. Fig. 25 shows a flowchart of the test steps of the present invention. First, after the manufacturing steps before the test are completed, the test power supply voltage or drive signal voltage is applied to the circuits or circuit elements on the device substrate without contact. Ministry of Economic Affairs Intellectual Property Bureau employee consumer cooperative prints as a result, let the pixel as the test object perform some kind of work, and generate an AC voltage with the working state information of the pixel on the test electrode that overlaps the pixel. Simultaneously monitor this AC voltage multiple times. According to the AC voltage generated on the test electrode to confirm the working state of the pixel and determine the normal / abnormality of the pixel. The working state of the pixel does not have to be divided into normal and abnormal. It can be sieved into multiple grades according to the working condition. The national standard (CNS) A4 specification (210X 297 male thin 1 "72 · 1-573128 printed by the consumer co-operative of the Intellectual Property Bureau of the Ministry of Economic Affairs A7 B7 V. Description of invention (7ib level. At the same time, 'professionals can also correctly set the normal / abnormal determination of pixels .In the case that some pixels are determined to be abnormal, professionals can also correctly set how to determine whether the device base can be used. Even if there is an abnormal pixel, the abnormality can be determined, or when the number of abnormal pixels reaches a certain number. It is determined to be abnormal. In the case of determining that it is normal, consider ending the test and starting the assembly step after the test step. If it is determined that there is an abnormality, choose to remove (abandon) from the product 尙 unfinished step, or determine the cause of the abnormality If you use a large-size substrate to make multiple products, you can give up after cutting the substrate. If it is determined that there is an abnormality and it is likely to be repaired, you can repeat the above operation and perform the test steps of the present invention again after repair. Otherwise, if you do not determine Possible repair, give up at this time. The implementation of this embodiment can be freely combined with Embodiments 1 to 8. [Embodiment 10] In this embodiment, a specific connection method between a coil used in the present invention, a terminal owned by the coil and an interconnection point (a wire interconnection point) will be described. In Fig. 26A, a coil 1601 is formed on an insulating surface, and an intermediate layer insulating film 1 603 is formed to cover the coil 1 60 1 on the insulating surface. A contact hole is formed in the interlayer insulating film, and a coil interconnection point 1 602 connected to the coil 601 is formed on the interlayer insulating film through the contact hole. Fig. 26B shows a cross-sectional view taken along a chain line C-C 'in Fig. 26A. This paper size applies Chinese National Standard (CNS) A4 specification (210X297 mm) _ 73-(Please read the precautions on the back before filling this page) 573128 Printed by the Consumers ’Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs A7 B7 V. Description of the invention (7) 1 In FIG. 26C, a coil interconnection point 1 6 1 2 is formed on one insulating surface. An interlayer insulating film 1613 is formed to cover the coil interconnection point 1612 on the insulating surface. A contact hole is formed in the interlayer insulating film, and a wire 1611 connected to the coil interconnection point 1612 is formed on the interlayer insulating film through the contact hole. Fig. 26D shows a sectional view taken along the dashed-dotted line D-D 'in Fig. 26C. The method of manufacturing the reed used in the present invention is not limited to the above method. A vortex groove can be formed by patterning an insulating film. A conductive film is formed to cover the groove on the insulating film. The conductive film is then honed by etching or CMP until the insulating film is exposed, leaving only the conductive film in the trench. The conductive film remaining in the groove can be used as a wire reed. The implementation of this embodiment can be freely combined with Embodiments 1 to 8. [Embodiment 11] This embodiment describes how to perform a test by using the Walsh function in Implementation Mode 1, so as to determine whether each pixel works normally. The case described in this embodiment is a light emitting device having 4 × 4 pixels. For a light-emitting device having 4 × 4 pixels, sixteen function arrays W0 (4,4) to W33 (4,4) of 16 are determined (hereinafter abbreviated as W ... and W33). FIG. 27 specifically shows the positions of the pixels operated by these function groups W00 and W33. The voltages 値 applied to the test electrodes are different for the pixels indicated by blanks and the pixels indicated by shading. If the function group W0 is used. And W33 operate these pixels in order, the number of 4 × 4 pixels is different from each other in the work. Therefore, even if the test electrode is overlapped with these pixels according to the pixels with the same scanning line (please read the precautions on the back before filling this page) This paper size applies the Chinese National Standard (CNS) A4 specification (210X 297mm) -74- 573128 A7 B7 Printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs. 5. Description of the invention. In pixel (1, 1), suppose that 0 is represented as a blank pixel, and X is represented as a shaded pixel. In all cases, it is 0. Take pixel (2, 1) as an example. , Can be expressed in order as 00XX〇〇XX〇〇XX〇〇XX. The picture element (3, 1) can be expressed in order as 0XX〇〇XX〇〇XX〇〇XX〇. The picture element (4, 1 ) Can be expressed in order as 0x〇x〇x〇x〇x〇x〇x. If all pixels are working normally, the number of 0 in the pixels on the first line can be expressed as 4 according to their respective functions in order. , 2,2,2,4,2,2,2,4,2,2,2,4,2,2,2. If the pixel (2,1 ) Does not work properly, so that the shadow is always displayed, and the number of 0 in the pixels on the first line can be sequentially expressed as 3, 1, 2, 2, 3, 1, 2, 2, 3, according to their respective functions. 1,2,2,3,1,2,2 '2. In this way, by comparing the case where all pixels work normally, it can be determined that pixel (2, 1) cannot work normally. Although this embodiment uses two-dimensional The Walsh function can also use the one-dimensional Walsh function to operate each pixel. In this case, four function groups can be used to test the working state of the above light-emitting device with 4x 4 pixels. Implementation of this embodiment It can be freely combined with Embodiments 1 to 9. The present invention can determine the normality / abnormality of a pixel as a test object by using the above structure, and it is not necessary to directly use a probe at an interconnection point or a probe terminal. This can prevent Yield of subsequent processing is reduced due to the use of fine dust caused by the probe. In addition, since the normal / abnormality in each pattern formation step can be determined in one test step, the test step can be simplified. (Please read the precautions on the back first fill (Write this page) This paper size is applicable to China National Standard (CNS) A4 specification (210X297 mm) -75-

Claims (1)

573128 A8 B8 C8 D8 VI. Application for patent scope 1 1. A voltage measurement method, including: (Please read the precautions on the back before filling this page) Apply contactlessly to an interconnect point or circuit element owned by a pixel A voltage to apply a voltage to the pixel electrode of the pixel; and to read out the voltage applied to the pixel electrode without contact. 2. A voltage measurement method comprising: applying a voltage to the respective interconnection points or circuit elements of a plurality of pixels in a non-contact manner, thereby applying a voltage to a respective pixel electrode of each pixel; and reading without contact The sum of the voltages applied to the respective pixel electrodes of each pixel is calculated. 3. A voltage measurement method comprising: applying a first AC voltage between two terminals of a first coil; overlapping the first coil and the second coil with a fixed interval and using two of the second coil The second AC voltage generated between the terminals applies a third AC voltage to the pixel electrode of a pixel; the pixel electrode and the test electrode are superimposed together at a fixed interval, printed by the Consumer Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs; and The voltage applied to the pixel electrode is calculated based on the fourth AC voltage generated on the test electrode. '4. The voltage measurement method according to item 3 of the scope of patent application, wherein rectification or waveform shaping is performed on the second AC voltage and applied to the interconnection points or circuit elements in the pixel, thereby applying the third AC voltage to On the pixel electrode, the paper size is in accordance with the Chinese National Standard (CNS) A4 specification (210X297 cm) -76- 573128 A8 B8 C8 D8 VI. Patent application scope 2 5 · —A kind of voltage measurement method, including: A first AC voltage is applied between the two terminals of the coil; the first line 圏 and the second line 圏 are overlapped by a fixed interval, and the second AC voltage generated between the two terminals of the second coil is Each pixel pixel pixel is applied with a third AC voltage; the pixel electrode of these pixels and a test electrode are superimposed by a fixed interval; and calculated based on the fourth AC voltage generated on the test electrode The sum of the voltages applied to the respective pixel electrodes of each pixel. 6. The voltage measurement method according to item 5 of the scope of patent application, wherein rectification or waveform shaping is performed on the second AC voltage and applied to the respective interconnection points or circuit elements of the plurality of pixels, thereby applying the third AC voltage On each pixel electrode of a plurality of pixels. 7. The voltage measurement method according to item 3 or 5 of the patent application scope, wherein the first coil and the second coil have interconnection points formed on the same plane, and each of the interconnection points forms a vortex shape. 8. The voltage measurement method according to item 3 or 5 of the patent application scope, wherein the first coil and the g-type electrode are formed on the first insulating surface, and the second coil and the pixel electrode are formed on the second insulating surface. 9. The voltage measuring method according to item 8 of the scope of the patent application, wherein the interval between the first to second insulating surfaces and the second insulating surface is controlled by a fluid flowing between the first insulating surface and the second insulating surface. . 10. If the voltage measurement method of item 3 or 5 of the scope of patent application, the Liben # ^ 张 值 逋 uses the Chinese national standard (CNS> A4 specification (21〇χ297 mm) (please read the note on the back first) Please fill in this page again) Order printed by the Intellectual Property Bureau employee consumer cooperative of the Ministry of Economics-77- 573128 A8 B8 C8 D8 Printed by the employee consumer cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs t, patent application scope 3 Obtained by using this voltage measurement method The voltage or the sum of the voltages applied to the pixel electrodes determines the normality / abnormality of the pixel or each pixel. 1 1 · An electrical test device for performing an electrical test on a pixel of a semiconductor device, the electrical test device Contains: a primary line; a mechanism that overlaps a primary line and a secondary line in a semiconductor device by a fixed interval; a pixel electrode of a pixel and a test electrode overlapped by a fixed interval Together mechanism; mechanism that applies an AC voltage between the two terminals of the primary coil; and confirms the working state of the pixel based on the AC voltage generated on the test electrode I. The electrical test device according to item 11 of the scope of patent application, wherein the AC voltage generated on the test electrode includes information on the working state of the pixel. 1 3. The electrical test device according to item 11 of the scope of patent application In which, the fluid flowing between the primary coil and the secondary coil is used to control the interval between the primary coil and the secondary coil. 14. The electrical test device according to item 11 of the patent application scope, wherein the first coil has The interconnection points on the plane and the interconnection points therein form a vortex shape. 15. A method for manufacturing a semiconductor device, the method includes: forming a pixel electrode and an interconnection point or a circuit element; Apply a voltage to the interconnection point or circuit element. The size of the paper is applicable to the Chinese National Standard (CNS) A4 (210 X 297 mm) 573128 Α8 B8 C8 D8 VI. Patent application scope 4 Voltage is applied to the pixel electrode; and non-contact reading is applied to the pixel electrode On the voltage. 16. A method of manufacturing a semiconductor device, the method comprising: forming a pixel electrode, an interconnection point or a circuit element, a first coil, and a second coil; applying between two terminals of a first coil. A first AC voltage; a first AC and a second coil are superimposed together at a fixed interval, and a third AC voltage is applied to the pixel electrode using a second AC current M generated between two terminals of the second coil; The pixel electrode and a test electrode are overlapped by a fixed interval; and a voltage applied to the pixel electrode is calculated based on a fourth AC voltage generated on the test electrode. Printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs 17 · A method for manufacturing a semiconductor device such as a patent application item No. 16 wherein the second AC voltage is rectified or wave-shaped and applied to an interconnection point or a circuit element , Thereby applying a third AC voltage to the pixel electrode. 18. A voltage measurement method, comprising: applying a voltage to an interconnection point or a circuit element to control a voltage applied to a plurality of pixel electrodes; and in a state of overlapping with at least a part of the pixel electrodes through an interval Move a test electrode; and · According to the voltage on the test electrode and the -79- of the test electrode relative to the pixel electrode, this standard applies to the Chinese National Standard (CNS) A4 specification (210 × 297 mm 573128 A8 B8 C8 D8 Calculate the voltage applied to each pixel electrode at the 5th position of the patent application. (Please read the precautions on the back before filling out this page) 19 · If you are applying for a patent, the voltage measurement method of item 18, in which no contact A voltage is applied to an interconnection point or a circuit element by a method. 20. A voltage measurement method including: applying a first AC voltage between two terminals of a first coil; Overlaps with the second coil; a second AC voltage generated between two terminals of the second coil is applied to an interconnection point or circuit element to control A voltage applied to a plurality of pixel electrodes; moving a test electrode in a state overlapping with at least a portion of the pixel electrodes by an interval; and a third AC voltage generated on the test electrode and the test electrode relative to the pixel electrode The voltage applied to each pixel electrode is calculated at the position of 21. The voltage measurement method according to item 20 of the patent application scope, wherein the second AC voltage is rectified or waveform-shaped and is applied to the interconnection point or circuit element Therefore, the second AC voltage is applied to the interconnection point or the circuit element. Printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs 22 · The voltage measurement method according to item 20 of the patent application, wherein the first coil and the second coil have The interconnection points formed on the same plane and each of the interconnection points form a vortex shape. 23. The voltage measurement method according to item 20 of the patent application scope, wherein the current flowing between the first coil and the second coil is used. Fluid to control the interval between the first coil and the second coil.-24. If the voltage measurement method of item 18 or 20 of the patent application scope, In this standard, the Chinese standard (CNS) A4 specification (210X297 mm) -80- 573128 A8 B8 C8 D8 ^, the scope of patent application 6 is adopted. ΊFourier transform method is used, using continuous approximation and projection segmentation rules or ~ Overlap integration method to calculate the voltage on each pixel electrode. (Please read the precautions on the back before filling this page) 2 5 · —An electrical test method, including: Applying a voltage to an interconnection point or circuit element For controlling the voltage applied to a plurality of pixel electrodes; moving a test electrode in a state where it overlaps at least a part of the pixel electrodes by an interval; and according to the voltage on the test electrode and the test electrode relative to the pixels The position of the electrodes confirms the operating status of the interconnection points or circuit components. 2 6 · The electrical test method according to item 25 of the patent application scope, wherein a voltage is applied to the interconnection points or circuit components in a non-contact manner. 2 7. An electrical test method comprising: applying a voltage to an interconnection point or a circuit element to control the voltage applied to a plurality of pixel electrodes; and overlapping at least a portion of the pixel electrodes through a space Move a test electrode in a state; printed with the Consumer Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs to determine the voltage applied to the pixel electrode according to the voltage on the test electrode and the position of the test electrode relative to the pixel electrode. 2 8. The electrical test method according to item 27 of the scope of patent application, wherein an electrical voltage is applied to the interconnection points or circuit components in a non-contact manner. '29. The electrical test method according to item 27 of the patent application scope further includes confirming the operating status of the interconnection points or circuit elements based on the voltage distribution. 30. An electrical test method, including:. Applying the first alternating current β between the two terminals of the first coil; This paper size applies the Chinese National Standard (CNS) A4 specification (210 × 297 mm) 573128 A8 B8 C8 D8 Six Scope of patent application 7 The first coil and the second coil are overlapped by a space; (Please read the precautions on the back before filling this page) The second AC voltage generated between the two terminals of the second coil Applied to an interconnection point or a circuit element for controlling a voltage applied to a plurality of pixel electrodes; moving a test electrode in a state overlapping with at least a part of the pixel electrodes by an interval; and according to the test electrode The third AC voltage generated on the circuit and the position of the test electrode relative to the pixel electrode are used to confirm the working status of the interconnection point or the circuit element. 0. 1. The electrical test method of item 30 of the scope of patent application, further comprising: AC voltage to determine the distribution of the voltage applied to the pixel electrode, and to confirm the operating status of the interconnection points or circuit elements based on the voltage distribution 〇 Printed by the Consumer Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs 32. The electrical test method of item 30 in the scope of patent application, wherein the second AC voltage is rectified or waveform-shaped and applied to the interconnection point or circuit element, thereby At an interconnection point or circuit element. 33. The electrical test method according to item 30 of the patent application scope, wherein the first coil and the second coil have interconnection points formed on the same plane, and each of the interconnection points adopts a vortex shape. 34. The electrical test method according to claim 30, wherein a fluid flowing between the primary coil and the secondary coil is used to control the interval between the first coil and the second coil. This paper size is applicable to Chinese National Standard (CNS) A4 specification (210X297 mm) -82- 573128 A8 B8 C8 D8 VI. Application for patent scope 8 3 5.-An electrical test device, which is based on multiple drawings in one device base The electrical test device includes: a primary coil; i (Please read the precautions on the back before filling out this page} A mechanism that overlaps the primary coil and the secondary coil in the device base with an interval; A mechanism for overlapping at least a part of the pixel electrodes of a pixel with a test electrode by an interval; a mechanism for changing the position of the test electrode relative to the pixel electrodes of the pixels between two terminals of a primary coil A mechanism for applying an AC voltage; and a mechanism for confirming the working state of each pixel based on the AC voltage generated on the test electrode. 36. The electrical test device according to item 35 of the patent application, wherein a part of each pixel is The element electrode changes the position of the test electrode relative to the pixel electrode in a state where the interval overlaps the test electrode. Printed by the Ministry of Intellectual Property Bureau's Consumer Cooperatives 3 7. The electrical test device such as the scope of patent application No. 35, wherein the fluid flowing between the primary coil and the secondary coil is used to control the primary coil and the secondary coil 38. The electrical test device according to item 35 of the patent application scope, wherein the first coil has interconnection points formed on the same plane, and the interconnection points therein form a vortex shape. 39. A semiconductor The device manufacturing method includes: forming an interconnection point or a circuit element, and applying the China National Standard (CNS) 8-4 specification (210X297 mm) by the interconnection point or the & Zhang dimension -83- 573128 A8 B8 C8 D8 __ VI. Application scope 9 Circuit element provides a voltage pixel electrode; Apply a voltage to the interconnection point or circuit element; Move a test electrode in a state where it overlaps at least a part of the pixel electrode by a space ; And calculated from the voltage applied to each pixel electrode based on the voltage on the test electrode and the position of the test electrode relative to the pixel electrode Voltage to each pixel electrode of each pixel. 40. The method for manufacturing a semiconductor device, such as the 39th item of the patent application, wherein a voltage is applied to the interconnection point or the circuit element in a non-contact manner. 41. If applied The manufacturer of a semiconductor device with the scope of patent No. 39, wherein the semiconductor device includes a device substrate. The paper printed by the Consumers' Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs applies the Chinese national standard (CNS) A4 specification (210X297 mm)