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TWI880565B - Test probe - Google Patents

Test probe Download PDF

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Publication number
TWI880565B
TWI880565B TW112151722A TW112151722A TWI880565B TW I880565 B TWI880565 B TW I880565B TW 112151722 A TW112151722 A TW 112151722A TW 112151722 A TW112151722 A TW 112151722A TW I880565 B TWI880565 B TW I880565B
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TW
Taiwan
Prior art keywords
barrel
diameter
test probe
test
plunger
Prior art date
Application number
TW112151722A
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Chinese (zh)
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TW202429084A (en
Inventor
金熙哲
Original Assignee
南韓商李諾工業股份有限公司
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Publication of TW202429084A publication Critical patent/TW202429084A/en
Application granted granted Critical
Publication of TWI880565B publication Critical patent/TWI880565B/en

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    • GPHYSICS
    • G01MEASURING; TESTING
    • G01RMEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02General constructional details
    • G01R1/06Measuring leads; Measuring probes
    • G01R1/067Measuring probes
    • G01R1/06711Probe needles; Cantilever beams; "Bump" contacts; Replaceable probe pins
    • G01R1/06733Geometry aspects
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01RMEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02General constructional details
    • G01R1/06Measuring leads; Measuring probes
    • G01R1/067Measuring probes
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01RMEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02General constructional details
    • G01R1/06Measuring leads; Measuring probes
    • G01R1/067Measuring probes
    • G01R1/06711Probe needles; Cantilever beams; "Bump" contacts; Replaceable probe pins
    • G01R1/06716Elastic
    • G01R1/06722Spring-loaded
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01RMEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02General constructional details
    • G01R1/06Measuring leads; Measuring probes
    • G01R1/067Measuring probes
    • G01R1/06711Probe needles; Cantilever beams; "Bump" contacts; Replaceable probe pins
    • G01R1/06733Geometry aspects
    • G01R1/06738Geometry aspects related to tip portion
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01RMEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02General constructional details
    • G01R1/06Measuring leads; Measuring probes
    • G01R1/067Measuring probes
    • G01R1/06711Probe needles; Cantilever beams; "Bump" contacts; Replaceable probe pins
    • G01R1/06733Geometry aspects
    • G01R1/0675Needle-like

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Geometry (AREA)
  • Measuring Leads Or Probes (AREA)

Abstract

Disclosed is a test probe for testing the electrical characteristics of a subject-to-be-tested. The test probe includes a barrel shaped like a cylinder; and a plunger having an inner end portion and a side portion provided inside the barrel. The side portion extends toward the inner end portion with a predetermined curvature in a direction perpendicular to a longitudinal central axis of the barrel.

Description

測試探針Test probe

本揭露是有關於一種用於測試半導體或類似的待測試對象的電性特性的測試探針。The present disclosure relates to a test probe for testing the electrical characteristics of a semiconductor or a similar object to be tested.

圖1示出傳統測試探針1。傳統測試探針1包括圓筒形筒10、柱塞20及彈簧30,柱塞20部分地插入於筒10的第一端部部分中,彈簧30插入於筒10中。1 shows a conventional test probe 1. The conventional test probe 1 includes a cylindrical barrel 10, a plunger 20 partially inserted into a first end portion of the barrel 10, and a spring 30 inserted in the barrel 10.

柱塞20包括筒插入部分21及端子接觸部分22,筒插入部分21容置於筒10中,端子接觸部分22暴露至外部以與端子接觸。端視待測試對象的條件,端子接觸部分22需要具有非常短的形狀。The plunger 20 includes a barrel inserting portion 21 and a terminal contacting portion 22, the barrel inserting portion 21 being accommodated in the barrel 10, and the terminal contacting portion 22 being exposed to the outside to contact with the terminal. Depending on the condition of the object to be tested, the terminal contacting portion 22 needs to have a very short shape.

圖2示出傳統測試探針1在測試期間的狀態。FIG. 2 shows the state of the conventional test probe 1 during testing.

在測試期間,端子接觸部分22與待測試對象的端子接觸並壓靠所述端子。在此種情形中,如圖2中所示,柱塞20可能在筒插入部分21的內端部側上的第一點CP1、在對角線上面對第一點CP1的第二點CP2以及端子接觸部分22上的第三點CP3處卡於筒10中。在測試期間,需要柱塞20進行操作來壓縮彈簧30及使彈簧30復原。然而,若柱塞20卡於筒10中而未復原,則存在無法實行下一測試的問題。During the test, the terminal contact portion 22 contacts and presses against the terminal of the object to be tested. In this case, as shown in FIG. 2 , the plunger 20 may be stuck in the barrel 10 at a first point CP1 on the inner end side of the barrel insertion portion 21, a second point CP2 diagonally opposite to the first point CP1, and a third point CP3 on the terminal contact portion 22. During the test, the plunger 20 is required to operate to compress the spring 30 and restore the spring 30. However, if the plunger 20 is stuck in the barrel 10 and is not restored, there is a problem that the next test cannot be performed.

本揭露的一態樣旨在提供一種具有高測試可靠性的測試探針。One aspect of the present disclosure is to provide a test probe with high test reliability.

根據本揭露的實施例,提供一種測試探針。所述測試探針測試待測試對象的電性特性。所述測試探針包括:筒,被造型成類似於圓筒;以及柱塞,設置於筒內部,所述柱塞具有內端部部分及側面部分。側面部分在垂直於筒的縱向中心軸線的方向上以預定曲率朝向內端部部分延伸。According to an embodiment of the present disclosure, a test probe is provided. The test probe tests the electrical properties of an object to be tested. The test probe comprises: a barrel shaped like a cylinder; and a plunger disposed inside the barrel, the plunger having an inner end portion and a side portion. The side portion extends toward the inner end portion with a predetermined curvature in a direction perpendicular to the longitudinal center axis of the barrel.

柱塞可包括筒插入部分及測試接觸部分,筒插入部分包括內端部部分及側面部分,測試接觸部分與筒插入部分一體地形成且至少部分地朝向筒的外部突出。The plunger may include a barrel insertion portion and a test contact portion, the barrel insertion portion including an inner end portion and a side portion, the test contact portion being integrally formed with the barrel insertion portion and at least partially protruding toward the exterior of the barrel.

筒插入部分可包括具有第一直徑的截頭球體(truncated sphere)。The cartridge insert portion may include a truncated sphere having a first diameter.

測試接觸部分可包括具有第二直徑的截頭球體。The test contact portion may include a truncated sphere having a second diameter.

筒插入部分可包括具有第一直徑的截頭球體,且測試接觸部分可包括具有小於第一直徑的第二直徑的截頭球體。The barrel insertion portion may include a truncated sphere having a first diameter, and the test contact portion may include a truncated sphere having a second diameter smaller than the first diameter.

第一直徑小於或等於筒的內徑。The first diameter is less than or equal to the inner diameter of the barrel.

筒可包括開口部分,所述開口部分具有沿筒的縱向中心軸線減小的直徑,且第二直徑小於或等於開口部分的直徑。The barrel may include an opening portion having a diameter that decreases along a longitudinal center axis of the barrel, and the second diameter is less than or equal to the diameter of the opening portion.

下面,將參照圖式闡述本揭露的各種實施例。圖3示出根據本揭露實施例的測試探針100,且圖4示出圖3中所示出的測試探針100的操作狀態。參照圖3,測試探針100包括圓筒形筒110、柱塞120及彈簧130,柱塞120部分地插入於筒110的第一端部部分中,彈簧130插入於筒110中。Hereinafter, various embodiments of the present disclosure will be described with reference to the drawings. FIG3 shows a test probe 100 according to an embodiment of the present disclosure, and FIG4 shows an operating state of the test probe 100 shown in FIG3 . Referring to FIG3 , the test probe 100 includes a cylindrical barrel 110, a plunger 120 partially inserted into a first end portion of the barrel 110, and a spring 130 inserted into the barrel 110.

筒110由導電材料製成且包括開口部分111,開口部分111藉由減小第一端部部分處的直徑而變窄以防止部分地插入於開口部分111中的柱塞120掉出。The barrel 110 is made of a conductive material and includes an opening portion 111 that is narrowed by reducing the diameter at a first end portion to prevent the plunger 120 partially inserted into the opening portion 111 from falling out.

柱塞120包括筒插入部分121及測試接觸部分122,筒插入部分121插入於筒110中,測試接觸部分122至少部分地暴露於筒110的外部以與第一端子(未示出)接觸。筒插入部分121與測試接觸部分122進行連接以在具有曲率彼此不同的球面表面(spherical surface)的同時具有凹入部分(concave portion)。The plunger 120 includes a barrel inserting portion 121 inserted into the barrel 110 and a test contact portion 122 at least partially exposed to the outside of the barrel 110 to contact with a first terminal (not shown). The barrel inserting portion 121 and the test contact portion 122 are connected to have a concave portion while having spherical surfaces having different curvatures from each other.

筒插入部分121包括內端部部分121b及側面部分121a,內端部部分121b與彈簧130的第一側接觸,側面部分121a與筒110的內表面接觸且在垂直於筒110的縱向中心軸線O的方向上以預定曲率朝向內端部部分延伸。The barrel insertion portion 121 includes an inner end portion 121b that contacts the first side of the spring 130 and a side portion 121a that contacts the inner surface of the barrel 110 and extends toward the inner end portion at a predetermined curvature in a direction perpendicular to the longitudinal center axis O of the barrel 110.

筒插入部分121可包括具有為R1的直徑的球體的一部分。筒插入部分121可包括橢圓球體的一部分。The cartridge insertion portion 121 may include a portion of a sphere having a diameter of R1. The cartridge insertion portion 121 may include a portion of an elliptical sphere.

側面部分121a可具有彎曲表面,所述彎曲表面具有預定曲率且一直延伸至內端部部分121b。The side surface portion 121a may have a curved surface having a predetermined curvature and extending up to the inner end portion 121b.

測試接觸部分122可包括具有直徑R2的球體的一部分。The test contact portion 122 may include a portion of a sphere having a diameter R2.

側面部分121a的直徑R1可等於或小於筒110的內徑R4。因此,如圖4中所示,即使側面部分121a在柱塞120正在進行操作的同時變得歪斜,側面部分121a亦不會卡於筒110中。The diameter R1 of the side portion 121a may be equal to or smaller than the inner diameter R4 of the barrel 110. Therefore, as shown in FIG. 4, even if the side portion 121a becomes skewed while the plunger 120 is operating, the side portion 121a is not caught in the barrel 110.

測試接觸部分122具有直徑R2,直徑R2等於或小於開口部分111的開口的直徑R3。因此,測試接觸部分122不會卡於開口部分111的開口中。The test contact portion 122 has a diameter R2 that is equal to or smaller than a diameter R3 of the opening of the opening portion 111. Therefore, the test contact portion 122 will not be stuck in the opening of the opening portion 111.

儘管在圖3及圖4中未示出,然而欲與第二端子(未示出)接觸的端子(未示出)可部分地插入於筒110的第二端部部分中。Although not shown in FIGS. 3 and 4 , a terminal (not shown) to be in contact with a second terminal (not shown) may be partially inserted into the second end portion of the barrel 110 .

根據本揭露的實施例,測試探針包括柱塞,所述柱塞的欲插入於筒中的筒插入部分121具有球形形狀,藉此防止柱塞卡於筒中。According to an embodiment of the present disclosure, the test probe includes a plunger, and a barrel insertion portion 121 of the plunger to be inserted into the barrel has a spherical shape, thereby preventing the plunger from being stuck in the barrel.

儘管已示出並闡述了本揭露的示例性實施例,然而本揭露並非僅限於前述具體實施例,此項技術中具有通常知識者可在不背離隨附申請專利範圍中所主張保護的本揭露的範圍的條件下實施各種替代性修改,且此類經修改實施例不應與本揭露的技術精神或前景分開理解。Although exemplary embodiments of the present disclosure have been shown and described, the present disclosure is not limited to the aforementioned specific embodiments, and a person having ordinary knowledge in this technology may implement various alternative modifications without departing from the scope of the present disclosure claimed in the scope of the accompanying patent applications, and such modified embodiments should not be understood as being separated from the technical spirit or prospects of the present disclosure.

1:傳統測試探針 10、110:筒/圓筒形筒 20、120:柱塞 21、121:筒插入部分 22:端子接觸部分 30、130:彈簧 100:測試探針 111:開口部分 121a:側面部分 121b:內端部部分 122:測試接觸部分 CP1:第一點 CP2:第二點 CP3:第三點 O:縱向中心軸線 R1、R2、R3:直徑 R4:內徑 1: Traditional test probe 10, 110: Barrel/cylindrical barrel 20, 120: Plunger 21, 121: Barrel insertion part 22: Terminal contact part 30, 130: Spring 100: Test probe 111: Opening part 121a: Side part 121b: Inner end part 122: Test contact part CP1: First point CP2: Second point CP3: Third point O: Longitudinal center axis R1, R2, R3: Diameter R4: Inner diameter

圖1示出傳統測試探針。 圖2示出圖1中所示出的傳統測試探針的操作狀態。 圖3示出根據本揭露的實施例的測試探針。 圖4示出圖3中所示出的測試探針的操作狀態。 FIG. 1 shows a conventional test probe. FIG. 2 shows an operating state of the conventional test probe shown in FIG. 1. FIG. 3 shows a test probe according to an embodiment of the present disclosure. FIG. 4 shows an operating state of the test probe shown in FIG. 3.

100:測試探針 100:Test probe

110:筒/圓筒形筒 110: Cylinder/Cylindrical Cylinder

111:開口部分 111: Opening part

120:柱塞 120: plunger

121:筒插入部分 121: Tube insertion part

121a:側面部分 121a: Side part

121b:內端部部分 121b: Inner end portion

122:測試接觸部分 122: Test contact parts

130:彈簧 130: Spring

O:縱向中心軸線 O: Longitudinal center axis

R1、R2、R3:直徑 R1, R2, R3: Diameter

R4:內徑 R4: Inner diameter

Claims (7)

一種用於測試待測試對象的電性特性的測試探針,所述測試探針包括:筒,被造型成類似於圓筒;以及柱塞,具有設置於所述筒內部的內端部部分及側面部分,其中所述側面部分在垂直於所述筒的縱向中心軸線的方向上以預定曲率朝向所述內端部部分延伸。 A test probe for testing the electrical characteristics of an object to be tested, the test probe comprising: a barrel shaped like a cylinder; and a plunger having an inner end portion and a side portion disposed inside the barrel, wherein the side portion extends toward the inner end portion with a predetermined curvature in a direction perpendicular to the longitudinal center axis of the barrel. 如請求項1所述的測試探針,其中所述柱塞包括筒插入部分及測試接觸部分,所述筒插入部分包括所述內端部部分及所述側面部分,所述測試接觸部分與所述筒插入部分一體地形成且至少部分地朝向所述筒的外部突出。 A test probe as described in claim 1, wherein the plunger includes a barrel insertion portion and a test contact portion, the barrel insertion portion includes the inner end portion and the side portion, and the test contact portion is formed integrally with the barrel insertion portion and at least partially protrudes toward the outside of the barrel. 如請求項2所述的測試探針,其中所述筒插入部分包括具有第一直徑的截頭球體。 A test probe as described in claim 2, wherein the barrel insertion portion includes a truncated sphere having a first diameter. 如請求項2所述的測試探針,其中所述測試接觸部分包括具有第二直徑的截頭球體。 A test probe as described in claim 2, wherein the test contact portion includes a truncated sphere having a second diameter. 如請求項2所述的測試探針,其中所述筒插入部分包括具有第一直徑的截頭球體,且所述測試接觸部分包括具有小於所述第一直徑的第二直徑的截頭球體。 A test probe as described in claim 2, wherein the barrel insertion portion includes a truncated sphere having a first diameter, and the test contact portion includes a truncated sphere having a second diameter smaller than the first diameter. 如請求項3所述的測試探針,其中所述第一直徑小於或等於所述筒的內徑。 A test probe as described in claim 3, wherein the first diameter is less than or equal to the inner diameter of the barrel. 如請求項4所述的測試探針,所述筒包括開口部分,所述開口部分具有沿所述筒的所述縱 向中心軸線減小的直徑,且所述第二直徑小於或等於所述開口部分的所述直徑。 In the test probe as described in claim 4, the barrel includes an opening portion, the opening portion has a diameter that decreases along the longitudinal center axis of the barrel, and the second diameter is less than or equal to the diameter of the opening portion.
TW112151722A 2023-01-06 2023-12-29 Test probe TWI880565B (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
KR1020230002366A KR20240110373A (en) 2023-01-06 2023-01-06 Test probe
KR10-2023-0002366 2023-01-06

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TW202429084A TW202429084A (en) 2024-07-16
TWI880565B true TWI880565B (en) 2025-04-11

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WO (1) WO2024147609A1 (en)

Citations (7)

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Publication number Priority date Publication date Assignee Title
US20010050564A1 (en) * 1999-02-19 2001-12-13 Gordon A. Vinther Crown shaped contact barrel configuration for spring probe
TWM435606U (en) * 2012-04-09 2012-08-11 Teng-Sheng Wang Improved probe structure
US20170054240A1 (en) * 2015-08-20 2017-02-23 Samsung Electronics Co., Ltd. Connection structural member and connection structural member module, and probe card assembly and wafer testing apparatus using the same
TW201819925A (en) * 2016-11-25 2018-06-01 陳文彥 Pogo pin connector
CN110927415A (en) * 2019-12-17 2020-03-27 苏州和林微纳科技有限公司 Claw-spring type high-frequency spring probe applied to 5G
US20210181235A1 (en) * 2019-12-17 2021-06-17 Suzhou UIGreen Micro&Nano Technologies Co.,Ltd. High frequency pawl spring probe applied to 5g
CN217954530U (en) * 2022-07-11 2022-12-02 楚能新能源股份有限公司 Lithium battery insulation test probe jig

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Publication number Priority date Publication date Assignee Title
JP2005164537A (en) * 2003-12-05 2005-06-23 Matsushita Electric Ind Co Ltd Inspection equipment for semiconductor devices
JP2011117767A (en) * 2009-12-01 2011-06-16 Unitechno Inc Contact probe and inspection prober equipped with the same
KR20180018874A (en) * 2016-08-09 2018-02-22 리노공업주식회사 A Probe For Testing Device

Patent Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20010050564A1 (en) * 1999-02-19 2001-12-13 Gordon A. Vinther Crown shaped contact barrel configuration for spring probe
TWM435606U (en) * 2012-04-09 2012-08-11 Teng-Sheng Wang Improved probe structure
US20170054240A1 (en) * 2015-08-20 2017-02-23 Samsung Electronics Co., Ltd. Connection structural member and connection structural member module, and probe card assembly and wafer testing apparatus using the same
US9793635B2 (en) * 2015-08-20 2017-10-17 Samsung Electronics Co., Ltd. Connection structural member and connection structural member module, and probe card assembly and wafer testing apparatus using the same
TW201819925A (en) * 2016-11-25 2018-06-01 陳文彥 Pogo pin connector
CN110927415A (en) * 2019-12-17 2020-03-27 苏州和林微纳科技有限公司 Claw-spring type high-frequency spring probe applied to 5G
US20210181235A1 (en) * 2019-12-17 2021-06-17 Suzhou UIGreen Micro&Nano Technologies Co.,Ltd. High frequency pawl spring probe applied to 5g
CN217954530U (en) * 2022-07-11 2022-12-02 楚能新能源股份有限公司 Lithium battery insulation test probe jig

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TW202429084A (en) 2024-07-16
KR20240110373A (en) 2024-07-15
WO2024147609A1 (en) 2024-07-11

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