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TWI800932B - Method for Obtaining Equivalent Physical Thickness of Dielectric Sheet - Google Patents

Method for Obtaining Equivalent Physical Thickness of Dielectric Sheet Download PDF

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Publication number
TWI800932B
TWI800932B TW110136408A TW110136408A TWI800932B TW I800932 B TWI800932 B TW I800932B TW 110136408 A TW110136408 A TW 110136408A TW 110136408 A TW110136408 A TW 110136408A TW I800932 B TWI800932 B TW I800932B
Authority
TW
Taiwan
Prior art keywords
dielectric sheet
physical thickness
equivalent physical
obtaining equivalent
obtaining
Prior art date
Application number
TW110136408A
Other languages
Chinese (zh)
Other versions
TW202316075A (en
Inventor
張茂男
高宏易
吳俊廷
周學良
柳紀綸
Original Assignee
汎銓科技股份有限公司
國立中興大學
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 汎銓科技股份有限公司, 國立中興大學 filed Critical 汎銓科技股份有限公司
Priority to TW110136408A priority Critical patent/TWI800932B/en
Publication of TW202316075A publication Critical patent/TW202316075A/en
Application granted granted Critical
Publication of TWI800932B publication Critical patent/TWI800932B/en

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TW110136408A 2021-09-30 2021-09-30 Method for Obtaining Equivalent Physical Thickness of Dielectric Sheet TWI800932B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
TW110136408A TWI800932B (en) 2021-09-30 2021-09-30 Method for Obtaining Equivalent Physical Thickness of Dielectric Sheet

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
TW110136408A TWI800932B (en) 2021-09-30 2021-09-30 Method for Obtaining Equivalent Physical Thickness of Dielectric Sheet

Publications (2)

Publication Number Publication Date
TW202316075A TW202316075A (en) 2023-04-16
TWI800932B true TWI800932B (en) 2023-05-01

Family

ID=86943132

Family Applications (1)

Application Number Title Priority Date Filing Date
TW110136408A TWI800932B (en) 2021-09-30 2021-09-30 Method for Obtaining Equivalent Physical Thickness of Dielectric Sheet

Country Status (1)

Country Link
TW (1) TWI800932B (en)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7001785B1 (en) * 2004-12-06 2006-02-21 Veeco Instruments, Inc. Capacitance probe for thin dielectric film characterization

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7001785B1 (en) * 2004-12-06 2006-02-21 Veeco Instruments, Inc. Capacitance probe for thin dielectric film characterization

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
期刊 Lee, D. T. ; Pelz, J. P. ; Bhushan, Bharat Scanning capacitance microscopy for thin film measurements Nanotechnology 17 IOP Publishing March 2006 1484-1491 *

Also Published As

Publication number Publication date
TW202316075A (en) 2023-04-16

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