US7076860B2 - Optical system manufacturing and alignment system - Google Patents
Optical system manufacturing and alignment system Download PDFInfo
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- US7076860B2 US7076860B2 US10/909,010 US90901004A US7076860B2 US 7076860 B2 US7076860 B2 US 7076860B2 US 90901004 A US90901004 A US 90901004A US 7076860 B2 US7076860 B2 US 7076860B2
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- optical component
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/42—Coupling light guides with opto-electronic elements
- G02B6/4201—Packages, e.g. shape, construction, internal or external details
- G02B6/4219—Mechanical fixtures for holding or positioning the elements relative to each other in the couplings; Alignment methods for the elements, e.g. measuring or observing methods especially used therefor
- G02B6/422—Active alignment, i.e. moving the elements in response to the detected degree of coupling or position of the elements
- G02B6/4226—Positioning means for moving the elements into alignment, e.g. alignment screws, deformation of the mount
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/42—Coupling light guides with opto-electronic elements
- G02B6/4201—Packages, e.g. shape, construction, internal or external details
- G02B6/4219—Mechanical fixtures for holding or positioning the elements relative to each other in the couplings; Alignment methods for the elements, e.g. measuring or observing methods especially used therefor
- G02B6/422—Active alignment, i.e. moving the elements in response to the detected degree of coupling or position of the elements
- G02B6/4225—Active alignment, i.e. moving the elements in response to the detected degree of coupling or position of the elements by a direct measurement of the degree of coupling, e.g. the amount of light power coupled to the fibre or the opto-electronic element
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/42—Coupling light guides with opto-electronic elements
- G02B6/4201—Packages, e.g. shape, construction, internal or external details
- G02B6/4219—Mechanical fixtures for holding or positioning the elements relative to each other in the couplings; Alignment methods for the elements, e.g. measuring or observing methods especially used therefor
- G02B6/422—Active alignment, i.e. moving the elements in response to the detected degree of coupling or position of the elements
- G02B6/4227—Active alignment methods, e.g. procedures and algorithms
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/42—Coupling light guides with opto-electronic elements
- G02B6/4201—Packages, e.g. shape, construction, internal or external details
- G02B6/4219—Mechanical fixtures for holding or positioning the elements relative to each other in the couplings; Alignment methods for the elements, e.g. measuring or observing methods especially used therefor
- G02B6/4236—Fixing or mounting methods of the aligned elements
- G02B6/4237—Welding
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/42—Coupling light guides with opto-electronic elements
- G02B6/4201—Packages, e.g. shape, construction, internal or external details
- G02B6/4219—Mechanical fixtures for holding or positioning the elements relative to each other in the couplings; Alignment methods for the elements, e.g. measuring or observing methods especially used therefor
- G02B6/4236—Fixing or mounting methods of the aligned elements
- G02B6/4238—Soldering
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T29/00—Metal working
- Y10T29/49—Method of mechanical manufacture
- Y10T29/49764—Method of mechanical manufacture with testing or indicating
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
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- Y10T29/00—Metal working
- Y10T29/49—Method of mechanical manufacture
- Y10T29/49764—Method of mechanical manufacture with testing or indicating
- Y10T29/49769—Using optical instrument [excludes mere human eyeballing]
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
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- Y10T29/49—Method of mechanical manufacture
- Y10T29/49764—Method of mechanical manufacture with testing or indicating
- Y10T29/49771—Quantitative measuring or gauging
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T29/00—Metal working
- Y10T29/49—Method of mechanical manufacture
- Y10T29/49764—Method of mechanical manufacture with testing or indicating
- Y10T29/49778—Method of mechanical manufacture with testing or indicating with aligning, guiding, or instruction
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
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- Y10T29/00—Metal working
- Y10T29/49—Method of mechanical manufacture
- Y10T29/49764—Method of mechanical manufacture with testing or indicating
- Y10T29/49778—Method of mechanical manufacture with testing or indicating with aligning, guiding, or instruction
- Y10T29/4978—Assisting assembly or disassembly
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T29/00—Metal working
- Y10T29/49—Method of mechanical manufacture
- Y10T29/49826—Assembling or joining
- Y10T29/49895—Associating parts by use of aligning means [e.g., use of a drift pin or a "fixture"]
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T29/00—Metal working
- Y10T29/49—Method of mechanical manufacture
- Y10T29/49826—Assembling or joining
- Y10T29/49895—Associating parts by use of aligning means [e.g., use of a drift pin or a "fixture"]
- Y10T29/49902—Associating parts by use of aligning means [e.g., use of a drift pin or a "fixture"] by manipulating aligning means
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
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- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T29/00—Metal working
- Y10T29/53—Means to assemble or disassemble
- Y10T29/53039—Means to assemble or disassemble with control means energized in response to activator stimulated by condition sensor
- Y10T29/53061—Responsive to work or work-related machine element
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
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- Y10T29/53—Means to assemble or disassemble
- Y10T29/53039—Means to assemble or disassemble with control means energized in response to activator stimulated by condition sensor
- Y10T29/53061—Responsive to work or work-related machine element
- Y10T29/53083—Responsive to work or work-related machine element including means to apply magnetic force directly to position or hold work
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
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- Y10T29/00—Metal working
- Y10T29/53—Means to assemble or disassemble
- Y10T29/53087—Means to assemble or disassemble with signal, scale, illuminator, or optical viewer
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
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- Y10T29/00—Metal working
- Y10T29/53—Means to assemble or disassemble
- Y10T29/53087—Means to assemble or disassemble with signal, scale, illuminator, or optical viewer
- Y10T29/53091—Means to assemble or disassemble with signal, scale, illuminator, or optical viewer for work-holder for assembly or disassembly
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T29/00—Metal working
- Y10T29/53—Means to assemble or disassemble
- Y10T29/5313—Means to assemble electrical device
- Y10T29/532—Conductor
- Y10T29/53209—Terminal or connector
- Y10T29/53213—Assembled to wire-type conductor
- Y10T29/53222—Means comprising hand-manipulatable implement
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
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- Y10T29/00—Metal working
- Y10T29/53—Means to assemble or disassemble
- Y10T29/5313—Means to assemble electrical device
- Y10T29/53261—Means to align and advance work part
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T29/00—Metal working
- Y10T29/53—Means to assemble or disassemble
- Y10T29/5313—Means to assemble electrical device
- Y10T29/53265—Means to assemble electrical device with work-holder for assembly
Definitions
- Component alignment is of critical importance in semiconductor and/or MEMS (micro electromechanical systems) based optical system manufacturing.
- MEMS micro electromechanical systems
- the basic nature of light requires that light generating, transmitting, and modifying components must be positioned accurately with respect to one another, especially in the context of free-space-optical systems, in order to function properly and effectively in electro-optical or all optical systems.
- Scales characteristic of semiconductor and MEMS can necessitate micron to sub-micron alignment accuracy.
- optical amplification examples include optical amplification, receiving and/or processing systems.
- Some alignment is typically required between an optical signal source, such as the fiber endface, and a detector.
- alignment is required not only to preserve signal power but also to yield high quality or high finesse systems through the suppression of undesirable optical modes within and without the systems.
- alignment strategies there are two types of alignment strategies: active and passive.
- passive alignment of the optical components registration or alignment features are fabricated directly on the components or component carriers as well as on the platform to which the components are to be mounted. The components are then mounted and bonded directly to the platform using the alignment features.
- active alignment an optical signal is transmitted through the components and detected. The alignment is performed based on the transmission characteristics to enable the highest possible performance level for the system.
- the present invention concerns an optical component manipulation system that has two opposed jaws.
- each of these jaws can be independently positioned relative to each other. Further, each jaw may be moved either vertically and/or horizontally to effect the desired positioning of optical components within the larger system.
- the optical component may be optical elements that are directly attached to the substrate or a composite components in which elements that are installed on mounting structures, which the system then manipulates.
- the invention features an optical component manipulation system.
- This system comprises first and second opposed jaws.
- these jaws are used to engage either side of an optical component to manipulate, such as move, install, place and/or deform, the optical component relative to an optical substrate, bench, and/or module.
- a first x-axis position detection system is used to detect an x-axis position of the first jaw and a first y-axis position detection system is used to detect a y-axis position of the first jaw.
- second x-axis and y-axis position detection systems are used to detect an x-axis and y-axis positions, respectively, of the second jaw.
- first x-axis and y-axis actuator systems are provided for positioning the first jaw.
- second x-axis and y-axis actuators are provided for positioning the second jaw.
- the system further comprises a system frame and first and second air bearings between the jaws and the system frame.
- These air bearings provide a mechanism for z-axis support of the jaws in a low stiction fashion. More specifically, the air bearings are located between first and second stages, to which the jaws are rigidly attached, and the system frame. They prevent interfacial adhesion present between the stages at an interface with the system frame.
- a heating system is provided for preferably both of the first and second jaws. This allows the jaws to be heated, in a controlled fashion, to effect solder bonding, for example.
- the heating system comprises a laser system that generates one or two beams that are focused on the respective jaws to irradiate the jaws and thereby control their temperature.
- the jaws extend downward. This allows the jaws to engage an optical substrate from above and also, in some implementations, reach into a package in which the substrate or bench has been installed.
- Y-axis suspension systems can be used in this configuration to support the stages, and thus the jaws.
- the actuator systems comprise voice coils, although in other implementations, other precision actuator systems are used such as linear motors and/or flexure systems, with or without piezo-electric-based actuators.
- optical encoder/grating systems are used for the position detection systems.
- the gratings are attached to the stages and the encoders are attached to the system frame to provide feedback control to a controller that drives the actuators.
- the stages and jaws have a low mass to provide for high speed positioning. In some cases, however, it may be required to add mass to the stage systems for provide for stability.
- the invention can also be characterized in the context of an optical structure manipulation process.
- This process comprises engaging an optical structure with first and second jaws.
- this engagement occurs serially.
- the first and second jaws are then actuated, possibly independently, to move the optical component along x-and y-axes to provide for its precise manipulation.
- FIGURE a schematic, elevation view of an embodiment of the optical system alignment system of the present invention in which similar reference characters refer to similar parts.
- the drawing is not to scale; emphasis has instead been placed upon illustrating the principles of the invention.
- FIGURE illustrates an optical system alignment system 100 , which has been constructed according to the principles of the present invention.
- the alignment system 100 comprises a system frame 110 .
- the frame provides the structural/mechanical support for the mechanical and electromechanical components of the system.
- a substrate support frame 114 is rigidly connected to the system frame 110 .
- a substrate holder/translator 112 is installed on the substrate frame 114 .
- the substrate holder/translator 112 mechanically engages a substrate 12 .
- the mechanical engagement is currently in the form of jaws or grippers that engage the substrate 112 and pull it into rigid engagement with a platform.
- Other rigid holding techniques such as a vacuum chuck system, however, are used in other embodiments.
- the holder/translator 112 further has the capability to precisely position the substrate 12 along the z-axis.
- the z-axis extends into the page in the FIGURE, the x and y axes are as shown.
- a z-axis actuator such as a voice coil or linear motor
- a position detector such as an optical encoder
- the alignment system 100 positions optical components 10 over and on the substrate 12 .
- the alignment system 100 then attaches the optical components 10 , in one implementation.
- the modes of permanent attachment can be adhesive/epoxy bonding, laser welding, thermocompression, ultrasonic bonding and/or solder bonding.
- solder preforms or layers 14 are formed on the substrate 12 .
- the optical components, with potentially their own solder layer or attached preform, are then lowered onto the bench 12 .
- the substrate 12 is delivered to the machine with some or all of the optical components 10 already permanently or temporarily attached to the substrate, and the alignment system 100 otherwise manipulates the components 10 relative to the substrate 12 and/or each other.
- the alignment system 100 moves and/or plastically deforms the optical components 10 to achieve proper alignment in the context of an optical system formed on the top surface of the substrate/bench 12 .
- This alignment is performed actively in one embodiment with an optical link within the optical system being activated by energizing an active element, such as laser diode on the substrate, or alternatively by supplying an optical signal from outside the optical system or module.
- the alignment system 100 has a left and right opposed jaws 120 A, 120 B. These jaws extend towards each other to mechanically engage an optical component 10 therebetween.
- these jaws are constructed from a rigid material that is also thermally stable, such as a metal alloy.
- they are constructed from INVAR® material.
- the jaws are constructed from a ceramic, for example, which is either an electrical insulator, or alternatively has been doped to render the ceramic electrically conductive.
- the left and right jaws 120 A, 120 B are rigidly attached to and supported by respective left and right stages 122 A, 122 B.
- the left and right stages 122 A, 122 B are constructed from a rigid material. In some implementation, it has a low co-efficient of thermal expansion to improve the temperature stability of the alignment system 100 overall.
- the stages 122 A, 122 B are constructed from a machined aluminum alloy.
- the left and right stages 122 A, 122 B are rigidly supported on the system frame 110 in the z-axis direction via a low stiction, low friction, low backlash interface.
- this interface is in the form of left and right air bearings 124 A, 124 B.
- the air bearings are round.
- the air bearings are square and parallel to the x and y axes to decrease the distance between the tips of the jaws 120 A, 120 B, which are under stress, and the support afforded by the air bearings 124 A, 124 B. In either case, this configuration reduces the degrees of freedom available to the stages to three, x-axis and y-axis movement and rotation around the z-axis or in the direction of angle ⁇ .
- the left and right stages 122 A, 122 B are supported vertically, or in the direction of the y-axis by vertical support systems.
- the vertical support is via active (“floater”) systems.
- left and right voice coils systems 162 A, 162 B electromagnetically connect the left and right stages 122 A, 122 B, respectively, to the system frame 110 .
- two voice coil floaters are used for each stage.
- these voice coil systems comprise a stator 152 and a coil 154 .
- the all of the coils 154 are rigidly attached to the stages 122 and the stators 152 are rigidly attached to the system frame 110 .
- This configuration has the advantage of reducing stage weight at the expense of requiring electrical wiring between the frame 110 and the flying stages 122 , which results in a force bias on the stages.
- low mass stators are installed on the stages 122 to avoid the need for direct wiring to the stages 122 .
- voice coil systems rather than voice coil systems, other precision positioning systems are used such as flexure systems with or without piezoelectric actuators and/or linear motor systems.
- a y-axis actuator system comprises a set of two voice coils for each of the left and right stages 122 A, 122 B.
- a left y-axis actuator system comprises a first y-axis voice coil 160 A and a second y-axis voice coil 164 A.
- stator 152 of each of these y-axis voice coils 160 , 164 is connected to the system frame 110 and the coils are connected to the stages 122 .
- the first and second y-axis voice coils 160 , 164 are controlled by a system controller 210 via an amplifier bank 200 to vertically position, or position along one axis, the stages 122 and corresponding jaws 120 .
- two y-axis voice coils 160 , 164 are driven in tandem so that the stages 122 A, 122 B move, but parallel to the x-axis and y-axis.
- the voice coils 164 A and 164 B are driven to position the respective stages and voice coils 160 A, 160 B are driven to prevent stage rotation or suppress stage rotation around the z-axis.
- first and second voice coils 160 , 164 are driven differentially to rotate the stages 122 A, 122 B around the z-axis or in the direction of angle ⁇ to thereby add a further degree of freedom in the movement in the respective jaws 120 A, 120 B.
- each stage 122 is provided with a y-axis position detection system.
- the y-axis position detection system comprises a position encoder system.
- optical encoder scheme is used, which comprises a grating 126 A, which is attached to the stage 122 A, and an optical detector 128 A that reads the markings on the grating 126 A.
- the optical detectors 128 are connected rigidly either directly or indirectly to the system frame 110 to detect y-axis movement of the respective stage 122 .
- the y-axis position detection system further comprises a second set of y-axis position encoders comprising gratings 136 and encoders 138 for each stage.
- the second set of encoders is used to provide the feedback necessary to prevent or at least control stage rotation.
- Each of the left and right stages 122 A, 122 B is further provided with x-axis actuators for positioning the left and right stages along the x-axis, and thus, position the corresponding left and right jaws 120 A, 120 B.
- these x-axis actuator systems comprise voice coil systems.
- linear motor and/or flexure actuator systems are implemented in place of the voice coils.
- the x-axis actuator comprises a voice coil 150 A.
- the x-axis position detection system of the left stage 122 A comprises a grating 130 A, connected to the stage, and an encoder or grating position detector 132 A, which is connected to the system frame 110 .
- a signal conditioning/sampling circuit 214 receives the position encoder signals from each of the encoders for the x-axis and y-axis position detection systems for each of the stages. The signal conditioning/sampling circuit 214 then provides the responses from each of the position detection systems to the controller 210 , which then drives or controls the movement of the stages via the x-and y-axis actuator systems for each of these stages 122 A, 122 B via the amplifier bank 200 .
- the jaws 120 A, 120 B can be independently positioned to manipulate the optical component 110 in the x-and y-axis.
- Z-axis control of the position of the optical component 10 on the substrate or bench 12 is provided by the positional control of the z-axis stage 112 by the controller.
- an optical encoder/grating system in combination with an actuator system 113 is used to detect the position of the z-axis stage.
- a force feedback scheme is used to drive the stages. This is common in applications in which the optical structures are already attached to the substrate but must be deformed in order to achieve alignment. It is also preferable where “slop” or excessive play is present due to deformation in the mechanical connection between the optical component 10 and the system 100 . The play prevents accurate positioning of the optical component relative to the substrate based on stage positioning alone due to deformation of the jaws, stages, and substrate-to-z-axis stage connection.
- a desired position of the optical component relative to the substrate is determined in an active alignment search process.
- the force exerted on the component to reach this desired position is then recorded along with the position information from the encoders. Detection of this force is possible by monitoring the drive current to the voice coils in combination with the low stiction interface between the stages and the system frame.
- this force is used to control subsequent optical deformation steps in which the stage are driven such that the recorded force is exceeded in order to initiate plastic deformation of the structure such that the structure returns to the desired position when force is removed.
- a laser system 220 is provided under the control of the controller 210 .
- This laser system generates two beams 222 , which are respectively focused on the left and right jaws 120 A, 120 B.
- the radiation from the laser 220 is used to selectively heat the jaws to, for example, heat the optical component 10 to solder bond it to the substrate or bench 12 .
- thermoelectric cooler it is also necessary to heat the bench 12 to effect this solder bonding. This is accomplished by heating the bench by either laser heating, a resistive heating technique, or reverse biasing the module's thermoelectric cooler.
- the bench and/or optical component are inductively heated.
- the temperature of the optical component 10 and/or the jaws 120 A, 120 B is detected. This can be accomplished through a thermocouple system. In some application, the optical system module thermocouple is used. Alternatively, a non-contact temperature detection method is used. Specifically, an optical detector is placed in proximity to the optical component on the system frame 110 to detect black body radiation from the jaws 120 A, 120 B and component 10 to thereby provide temperature feedback to the controller 210 .
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- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Optical Couplings Of Light Guides (AREA)
- Mounting And Adjusting Of Optical Elements (AREA)
- Length Measuring Devices By Optical Means (AREA)
Abstract
Description
Claims (13)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
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US10/909,010 US7076860B2 (en) | 2000-09-21 | 2004-07-30 | Optical system manufacturing and alignment system |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US09/667,186 US6892444B1 (en) | 2000-09-21 | 2000-09-21 | Optical system manufacturing and alignment system |
US10/909,010 US7076860B2 (en) | 2000-09-21 | 2004-07-30 | Optical system manufacturing and alignment system |
Related Parent Applications (1)
Application Number | Title | Priority Date | Filing Date |
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US09/667,186 Continuation US6892444B1 (en) | 2000-09-21 | 2000-09-21 | Optical system manufacturing and alignment system |
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US20050000087A1 US20050000087A1 (en) | 2005-01-06 |
US7076860B2 true US7076860B2 (en) | 2006-07-18 |
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Family Applications (4)
Application Number | Title | Priority Date | Filing Date |
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US09/667,186 Expired - Lifetime US6892444B1 (en) | 2000-09-21 | 2000-09-21 | Optical system manufacturing and alignment system |
US09/773,944 Expired - Lifetime US6941631B2 (en) | 2000-09-21 | 2001-02-01 | Optical component plastic deformation control process |
US10/909,019 Abandoned US20050002616A1 (en) | 2000-09-21 | 2004-07-30 | Optical system manufacturing and alignment system |
US10/909,010 Expired - Lifetime US7076860B2 (en) | 2000-09-21 | 2004-07-30 | Optical system manufacturing and alignment system |
Family Applications Before (3)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
US09/667,186 Expired - Lifetime US6892444B1 (en) | 2000-09-21 | 2000-09-21 | Optical system manufacturing and alignment system |
US09/773,944 Expired - Lifetime US6941631B2 (en) | 2000-09-21 | 2001-02-01 | Optical component plastic deformation control process |
US10/909,019 Abandoned US20050002616A1 (en) | 2000-09-21 | 2004-07-30 | Optical system manufacturing and alignment system |
Country Status (4)
Country | Link |
---|---|
US (4) | US6892444B1 (en) |
EP (1) | EP1322980A2 (en) |
AU (1) | AU2001292814A1 (en) |
WO (1) | WO2002024295A2 (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US8260097B2 (en) | 2010-06-16 | 2012-09-04 | Avago Technologies Fiber Ip (Singapore) Pte. Ltd | Opto-electronic alignment system and method |
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JP2008158440A (en) * | 2006-12-26 | 2008-07-10 | Toshiba Corp | Photoelectric wiring board and method for manufacturing photoelectric wiring apparatus |
CA2746003C (en) * | 2008-12-04 | 2020-03-31 | Opko Curna, Llc | Treatment of vascular endothelial growth factor (vegf) related diseases by inhibition of natural antisense transcript to vegf |
JP5365545B2 (en) * | 2010-02-25 | 2013-12-11 | 富士通オプティカルコンポーネンツ株式会社 | Optical device and optical device manufacturing method |
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---|---|---|---|---|
US8260097B2 (en) | 2010-06-16 | 2012-09-04 | Avago Technologies Fiber Ip (Singapore) Pte. Ltd | Opto-electronic alignment system and method |
Also Published As
Publication number | Publication date |
---|---|
US20050000087A1 (en) | 2005-01-06 |
US20020033938A1 (en) | 2002-03-21 |
WO2002024295A3 (en) | 2002-08-01 |
AU2001292814A1 (en) | 2002-04-02 |
US6941631B2 (en) | 2005-09-13 |
US6892444B1 (en) | 2005-05-17 |
EP1322980A2 (en) | 2003-07-02 |
US20050002616A1 (en) | 2005-01-06 |
WO2002024295A2 (en) | 2002-03-28 |
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