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USD1095471S1 - Susceptor - Google Patents

Susceptor

Info

Publication number
USD1095471S1
USD1095471S1 US29/888,125 US202329888125F USD1095471S US D1095471 S1 USD1095471 S1 US D1095471S1 US 202329888125 F US202329888125 F US 202329888125F US D1095471 S USD1095471 S US D1095471S
Authority
US
United States
Prior art keywords
susceptor
view
elevational view
ornamental design
side elevational
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
US29/888,125
Inventor
Kunihiko Suzuki
Takuto UMETSU
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nuflare Technology Inc
Original Assignee
Nuflare Technology Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nuflare Technology Inc filed Critical Nuflare Technology Inc
Assigned to NUFLARE TECHNOLOGY, INC. reassignment NUFLARE TECHNOLOGY, INC. ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). Assignors: SUZUKI, KUNIHIKO, UMETSU, TAKUTO
Application granted granted Critical
Publication of USD1095471S1 publication Critical patent/USD1095471S1/en
Active legal-status Critical Current
Anticipated expiration legal-status Critical

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Description

FIG. 1 is a perspective view of a susceptor showing our new design;
FIG. 2 is a front elevational view thereof;
FIG. 3 is a rear elevational view thereof;
FIG. 4 is a left side elevational view thereof;
FIG. 5 is a right side elevational view thereof;
FIG. 6 is a top plan view thereof;
FIG. 7 is a bottom plan view thereof; and,
FIG. 8 is a cross sectional view taken along lines 8-8 in FIG. 2 .

Claims (1)

    CLAIM
  1. The ornamental design for a susceptor as shown and described.
US29/888,125 2022-10-20 2023-03-28 Susceptor Active USD1095471S1 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2022022679F JP1745924S (en) 2022-10-20 2022-10-20 Susceptor
JP2022-022679D 2022-10-20

Publications (1)

Publication Number Publication Date
USD1095471S1 true USD1095471S1 (en) 2025-09-30

Family

ID=86610903

Family Applications (1)

Application Number Title Priority Date Filing Date
US29/888,125 Active USD1095471S1 (en) 2022-10-20 2023-03-28 Susceptor

Country Status (2)

Country Link
US (1) USD1095471S1 (en)
JP (1) JP1745924S (en)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP1746403S (en) 2023-01-11 2023-06-15 Susceptor
JP1746407S (en) 2023-01-11 2023-06-15 Susceptor

Citations (24)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5074017A (en) * 1989-01-13 1991-12-24 Toshiba Ceramics Co., Ltd. Susceptor
USD404370S (en) * 1997-08-20 1999-01-19 Tokyo Electron Limited Cap for use in a semiconductor wafer heat processing apparatus
US6160244A (en) * 1998-05-29 2000-12-12 Ngk Insulators, Ltd. Susceptors
US6464790B1 (en) * 1997-07-11 2002-10-15 Applied Materials, Inc. Substrate support member
US20050284372A1 (en) * 2004-06-28 2005-12-29 Applied Materials, Inc. Chamber component having grooved surface with depressions
US20060057826A1 (en) * 2002-12-09 2006-03-16 Koninklijke Philips Electronics N.V. System and method for suppression of wafer temperature drift in cold-wall cvd systems
USD525127S1 (en) * 2004-03-01 2006-07-18 Kraft Foods Holdings, Inc. Susceptor ring
US7393418B2 (en) * 2004-09-29 2008-07-01 Covalent Materials Corporation Susceptor
USD600223S1 (en) * 2008-08-07 2009-09-15 Ravinder Aggarwal Susceptor ring
US7678197B2 (en) * 2002-08-09 2010-03-16 Sumitomo Osaka Cement Co., Ltd. Susceptor device
US20140113458A1 (en) * 2012-10-24 2014-04-24 Applied Materials, Inc. Minimal contact edge ring for rapid thermal processing
USD743357S1 (en) * 2013-03-01 2015-11-17 Asm Ip Holding B.V. Susceptor
US20160133504A1 (en) * 2014-11-12 2016-05-12 Applied Materials, Inc. Susceptor design to reduce edge thermal peak
USD784276S1 (en) * 2013-08-06 2017-04-18 Applied Materials, Inc. Susceptor assembly
USD830981S1 (en) * 2017-04-07 2018-10-16 Asm Ip Holding B.V. Susceptor for semiconductor substrate processing apparatus
USD864134S1 (en) * 2018-10-24 2019-10-22 Asm Ip Holding B.V. Susceptor
US20200109484A1 (en) * 2018-10-03 2020-04-09 Asm Ip Holding B.V. Susceptor and susceptor coating method
US20210125853A1 (en) * 2019-10-24 2021-04-29 Asm Ip Holding B.V. Susceptor for semiconductor substrate processing
JP1711120S (en) 2021-10-22 2022-03-29 Suceptor cover
JP1711119S (en) 2021-10-22 2022-03-29 Susceptoring
USD948463S1 (en) * 2018-10-24 2022-04-12 Asm Ip Holding B.V. Susceptor for semiconductor substrate supporting apparatus
USD1030687S1 (en) * 2022-05-31 2024-06-11 Asm Ip Holding B.V. Susceptor
USD1052547S1 (en) * 2022-10-20 2024-11-26 Nuflare Technology, Inc. Semiconductor wafer and susceptor heating
USD1067204S1 (en) * 2022-05-31 2025-03-18 Asm Ip Holding B.V. Susceptor

Patent Citations (26)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5074017A (en) * 1989-01-13 1991-12-24 Toshiba Ceramics Co., Ltd. Susceptor
US6464790B1 (en) * 1997-07-11 2002-10-15 Applied Materials, Inc. Substrate support member
USD404370S (en) * 1997-08-20 1999-01-19 Tokyo Electron Limited Cap for use in a semiconductor wafer heat processing apparatus
US6160244A (en) * 1998-05-29 2000-12-12 Ngk Insulators, Ltd. Susceptors
US7678197B2 (en) * 2002-08-09 2010-03-16 Sumitomo Osaka Cement Co., Ltd. Susceptor device
US20060057826A1 (en) * 2002-12-09 2006-03-16 Koninklijke Philips Electronics N.V. System and method for suppression of wafer temperature drift in cold-wall cvd systems
USD525127S1 (en) * 2004-03-01 2006-07-18 Kraft Foods Holdings, Inc. Susceptor ring
US20050284372A1 (en) * 2004-06-28 2005-12-29 Applied Materials, Inc. Chamber component having grooved surface with depressions
US7393418B2 (en) * 2004-09-29 2008-07-01 Covalent Materials Corporation Susceptor
USD600223S1 (en) * 2008-08-07 2009-09-15 Ravinder Aggarwal Susceptor ring
US20140113458A1 (en) * 2012-10-24 2014-04-24 Applied Materials, Inc. Minimal contact edge ring for rapid thermal processing
USD743357S1 (en) * 2013-03-01 2015-11-17 Asm Ip Holding B.V. Susceptor
USD784276S1 (en) * 2013-08-06 2017-04-18 Applied Materials, Inc. Susceptor assembly
US20160133504A1 (en) * 2014-11-12 2016-05-12 Applied Materials, Inc. Susceptor design to reduce edge thermal peak
USD830981S1 (en) * 2017-04-07 2018-10-16 Asm Ip Holding B.V. Susceptor for semiconductor substrate processing apparatus
US20200109484A1 (en) * 2018-10-03 2020-04-09 Asm Ip Holding B.V. Susceptor and susceptor coating method
USD864134S1 (en) * 2018-10-24 2019-10-22 Asm Ip Holding B.V. Susceptor
USD948463S1 (en) * 2018-10-24 2022-04-12 Asm Ip Holding B.V. Susceptor for semiconductor substrate supporting apparatus
US20210125853A1 (en) * 2019-10-24 2021-04-29 Asm Ip Holding B.V. Susceptor for semiconductor substrate processing
JP1711120S (en) 2021-10-22 2022-03-29 Suceptor cover
JP1711119S (en) 2021-10-22 2022-03-29 Susceptoring
USD1037186S1 (en) * 2021-10-22 2024-07-30 Nuflare Technology, Inc. Susceptor ring
USD1047884S1 (en) * 2021-10-22 2024-10-22 Nuflare Technology, Inc. Susceptor cover
USD1030687S1 (en) * 2022-05-31 2024-06-11 Asm Ip Holding B.V. Susceptor
USD1067204S1 (en) * 2022-05-31 2025-03-18 Asm Ip Holding B.V. Susceptor
USD1052547S1 (en) * 2022-10-20 2024-11-26 Nuflare Technology, Inc. Semiconductor wafer and susceptor heating

Non-Patent Citations (3)

* Cited by examiner, † Cited by third party
Title
Focus Ring, https://astindex.com/ceramic/focus-ring, 2025. (Year: 2025). *
TaC Coated Graphite Susceptor,https://www.semicorex.com/tac-coated-graphite-susceptor.html, 2025. (Year: 2025). *
Wafer Carrier, https://www.semicorex.com/wafer-carrier.html, 2025. (Year: 2025). *

Also Published As

Publication number Publication date
JP1745924S (en) 2023-06-08

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