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WO1993010359A1 - Air pressure operated apparatus and control apparatus for the same - Google Patents

Air pressure operated apparatus and control apparatus for the same Download PDF

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Publication number
WO1993010359A1
WO1993010359A1 PCT/JP1992/001505 JP9201505W WO9310359A1 WO 1993010359 A1 WO1993010359 A1 WO 1993010359A1 JP 9201505 W JP9201505 W JP 9201505W WO 9310359 A1 WO9310359 A1 WO 9310359A1
Authority
WO
WIPO (PCT)
Prior art keywords
valve device
pneumatic operating
driven
driven valve
operating device
Prior art date
Application number
PCT/JP1992/001505
Other languages
French (fr)
Japanese (ja)
Inventor
Shigeo Kanaya
Original Assignee
Myotoku Ltd.
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Myotoku Ltd. filed Critical Myotoku Ltd.
Publication of WO1993010359A1 publication Critical patent/WO1993010359A1/en

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Classifications

    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F15FLUID-PRESSURE ACTUATORS; HYDRAULICS OR PNEUMATICS IN GENERAL
    • F15BSYSTEMS ACTING BY MEANS OF FLUIDS IN GENERAL; FLUID-PRESSURE ACTUATORS, e.g. SERVOMOTORS; DETAILS OF FLUID-PRESSURE SYSTEMS, NOT OTHERWISE PROVIDED FOR
    • F15B9/00Servomotors with follow-up action, e.g. obtained by feed-back control, i.e. in which the position of the actuated member conforms with that of the controlling member
    • F15B9/02Servomotors with follow-up action, e.g. obtained by feed-back control, i.e. in which the position of the actuated member conforms with that of the controlling member with servomotors of the reciprocatable or oscillatable type
    • F15B9/08Servomotors with follow-up action, e.g. obtained by feed-back control, i.e. in which the position of the actuated member conforms with that of the controlling member with servomotors of the reciprocatable or oscillatable type controlled by valves affecting the fluid feed or the fluid outlet of the servomotor
    • F15B9/12Servomotors with follow-up action, e.g. obtained by feed-back control, i.e. in which the position of the actuated member conforms with that of the controlling member with servomotors of the reciprocatable or oscillatable type controlled by valves affecting the fluid feed or the fluid outlet of the servomotor in which both the controlling element and the servomotor control the same member influencing a fluid passage and are connected to that member by means of a differential gearing

Definitions

  • the present invention relates to a pneumatic operating device such as a cylinder-type air cylinder or a swing type having a vane and a control device therefor.
  • a pneumatic operating device such as a cylinder-type air cylinder or a swing type having a vane and a control device therefor.
  • pneumatic actuators such as air cylinders are different from hydraulic cylinders in that air has compressibility. Therefore, operating members such as pistons do not need to be stopped at any position to be used. It was common to use it in a position or end position. Disclosure of the invention
  • the present invention relates to a pneumatic operating device capable of operating and stopping an operating member of a pneumatic operating device to an arbitrary operating position, operating the operating member in a reverse direction from that state, and arbitrarily adjusting an operating speed, and a control device thereof. To provide.
  • the present invention relates to a main body having an air supply port for supplying air, an exhaust port for discharging exhaust gas, and two connection ports respectively connected to two connection ports of a pneumatic operation device, And a driven valve device mounted on the main body and rotated in proportion to the operation amount of an operation member of a pneumatic operation device.
  • the driven valve device When the driven valve device is rotated in any one of the directions at a rotational speed that can be followed by the driven valve device, the driven valve device also rotates at substantially the same rotational speed in the same direction as the driven valve device, and the air is supplied from the air supply port.
  • the air of the pneumatic operating device flows into one connecting port and flows into the other connecting port, flows out through the exhaust port, and when the driven valve device is rotated in the opposite direction, the driven valve device also becomes the driven valve device.
  • the gas supplied from the air supply port is rotated at substantially the same rotational speed in the same direction to flow out to the other connection port, and the exhaust of the pneumatic operating device flows into the one connection port to form the exhaust port.
  • FIG. 1 to 10 show an embodiment of a control device for a pneumatic operating device according to the present invention
  • FIG. 1 is a longitudinal sectional view schematically showing the control device.
  • FIG. 2 is a longitudinal sectional view of the driven valve device.
  • Figure 3 is a side view.
  • FIG. 4 is a sectional view taken along line AA in FIG.
  • FIG. 6 is a front view of the driving valve device.
  • FIG. 7 is a cross-sectional view taken along the line C-C in FIG.
  • FIG. 8 is a sectional view taken along the line DD in FIG.
  • FIG. 9 is an explanatory diagram showing a state where the control device is connected to the air cylinder.
  • FIG. 10 is an operation explanatory diagram of the control device of the pneumatic operating device.
  • FIG. 11 is a partially omitted longitudinal sectional view showing an embodiment of an air cylinder according to the present invention.
  • HI2-1-5 shows an example of a control device for a pneumatic operating device of the present invention in FIGS. 1 to;
  • L2 shows an example of an H2S in which the driven pulp device and the driven pulp device of the above embodiment are changed, and
  • FIG. 12 shows a driven valve. It is a longitudinal section of a device.
  • FIG. 13 is a sectional view taken along line EE in FIG.
  • FIG. 14 is a sectional view taken along line FF in FIG.
  • FIG. 15 is a longitudinal sectional view of the driven valve device.
  • FIGS. 16 to 22 show other different embodiments of the control device of the pneumatic operating device according to the present invention, and FIG. 16 is a longitudinal sectional view thereof.
  • FIG. 17 is a front view of the driving valve device.
  • FIG. 18 is a plan view thereof.
  • FIG. 19 is a sectional view taken along line GG of FIG.
  • FIG. 20 is a front view of the driven valve device.
  • FIG. 21 is a plan view thereof.
  • FIG. 22 is a longitudinal sectional view thereof.
  • FIG. 23 is a front view showing, in partial cross section, an embodiment in which a control device is connected to a vane swing type pneumatic operating device.
  • FIG. 24 is an explanatory view showing another embodiment of the present invention.
  • reference numeral 10 denotes a control device of a pneumatic operating device according to the present invention, which has a main body 12 constituting an outer shell. This body has a hole 13 through the center that is formed through the center.
  • the air supply port 14 supplies the pressurized air reaching the specified position of the bracket, the exhaust port 15, and the air pressure.
  • a first connection port 16 and a second connection port 17 for communicating with both ends of the operating device are formed.
  • Reference numeral 18 denotes a driving member which is rotatably mounted in an airtight manner by using a packing 19 at one end of a hole 13 of the main body 12, for example, a stepping motor or another forward / reverse rotatable motor. It is designed to be rotated by the drive device 20 in the evening or by hand or the like.
  • 21 indicates a bearing.
  • Reference numeral 22 denotes a driven member consisting of a shaft that rotates in proportion to the amount of operation of the pneumatic actuator so that when the operating member such as the piston of the air cylinder operates, the direction is reversed when the member is reversed. , 25 rotatably supported.
  • reference numeral 26 denotes a substantially cylindrical driven valve device, which is formed from the end of the main driving member 18 and closed from the other end, and formed from the supply passage 27 and the driven member 22.
  • An exhaust passage 28 closed on the driving member 18 side is provided.
  • Reference numeral 30 denotes a first arc-shaped opening
  • 31 denotes a second arc-shaped opening. In these arc-shaped openings, arc-shaped openings 32a and 32b communicating with the air supply passage 27 and arc-shaped openings 33a and 33b communicating with the exhaust passage 28 are formed as shown.
  • the arc-shaped openings 32a, 33a in the first arc-shaped opening 30 and the arc-shaped openings 32b, 33b in the second arc-shaped opening 31 are respectively provided between the both ends through a closed portion 34 having a slight angle range.
  • the arcs CI32a and 32b and the arcs 33a and 33b are formed at positions 180 degrees out of phase with each other.
  • the driven valve device 26 is provided at the end thereof on the driven member 22 side with a lock 7 for engaging a pin 36 penetrating the driven member 22 so that the driven member 22 rotates simultaneously with rotation. It is supposed to.
  • the air supply passage 27 communicates with the air supply port 14, and the exhaust passage 28 communicates with the exhaust port 15.
  • reference numeral 40 denotes a cylindrical main valve device rotatably and closely fitted to the outside of the driven knob device 26, and the first and second arc-shaped openings are respectively provided.
  • a first hole portion 41 and a second hole portion 42 surrounding the outside of the portions 30 and 31 are provided.
  • the holes 43a and 43b are formed at the same angular position around the axis as shown in the figures, and the annular spaces 45a and 45b are formed outside the holes 43a and 43b. As shown in FIG. 1, these annular spaces 45a, 45b allow the holes 43a, 43b to communicate with the first and second connection ports 16, 17, respectively. It is also possible to form the main body 12 without providing these annular spaces.
  • Each of the holes 43 a and 43 b is formed to be shorter than the length of the closing portion 34 of the driven valve device 26.
  • 46 is a small diameter portion formed at the end of the driving member 18 side, and 47 is four holes formed in the small diameter portion.
  • Reference numeral 4 8 denotes a pin which penetrates and couples a pair of these holes facing each other and a hole 50 formed in the driving member 18, and includes a driving member 18 and a driving valve member.
  • the driven valve device 26 and the driven valve device 40 constitute means for switching the flow path as described later.
  • reference numeral 51 denotes a pinion that penetrates the driven member 22 and is fixed thereto.
  • Numeral 52 denotes a rack that meshes with the pinion, and has mounting members 53 at both ends for connecting to a piston of the air cylinder.
  • a commercially available rodless air cylinder 54 controlled by the controller 10 is shown.
  • 55 is a cylinder and 56 is a piston.
  • Reference numeral 57 denotes a connecting member connected to the biston 56 outside the cylinder 55, and is connected to the mounting member 53 at one end of the rack 52.
  • Reference numeral 58 denotes a starting end connected to the first connection port 16 of the cylinder 55 via the hose 59, and reference numeral 60 denotes an end connected to the second connection 17 via the hose 61. . Therefore, when the piston 56 moves from the start end 58 side to the end end 60 side, the movement of the rack 52 causes the pinion 51 to rotate counterclockwise when viewed from the main drive member 18 side of the control device 10. When the piston 56 moves in the opposite direction, the pinion 51 rotates in the opposite direction clockwise, and the pinion 51 always rotates in proportion to the movement length of the piston 56. . If the piston 56 is fixed and the cylinder 55 moves as an operating member, the rack
  • the driven member 22 rotates in proportion to the operation amount of the air cylinder 54. What should be done is.
  • FIG. 10 is a schematic cross-sectional view of the driven valve device 26 and the driven valve device 40 in the same positions as FIGS. 4, 5, 7, and 8 when viewed from the driving member 18 in various states. is there.
  • the main valve unit 40 is moved counterclockwise in the same direction as the rotation direction of the driven member 22 when the piston 56 is moved from the starting end 58 to the end 60 by the driving member 18.
  • O The hole 43 of the drive valve device 40 is open toward the exhaust arc opening 33a, and the hole 43b is facing the supply arc opening 32b. Open.
  • the pressurized air supplied from the air supply port 14 passes through the air supply flow path 27, the air supply arc opening 32 b, the hole 43 b, the second connection ⁇ 17, and the hose 61. It will be supplied from the terminal 60 into the cylinder 55. Also, the exhaust pushed by the piston 56 in the cylinder 55 is the hose 59, the first connecting cylinder 16,? L43a, exhaust arc-shaped opening 33a, g Air flow path 28, exhausted through exhaust port 15. If the piston 56 is at the starting end 58, this piston does not move, but if it is at any other position, it moves toward the starting end 58, and the driven valve device 26 moves clockwise as shown. Will rotate. In both cases of stop and rotation of the driven valve device 26, the driven valve device 40 is rotated, and the holes 43a and 43b are closed by the closing portion 34 in a short period of time, and the piston 56 is closed. If moving, stop momentarily.
  • the pressurized air is supplied or discharged until it stops first, and is kept at a fixed position.
  • the load fluctuation must be at a speed within a range in which the supply and discharge of air by the control device 10 can follow.
  • the rotational speed of the drive valve device 40 be substantially within the rotational speed at which the driven member 22 can rotate based on the movement of the piston 56.
  • the driven member 22 always rotates by substantially the same angle as the rotation angle of the main 11 valve device 40. Therefore, it is extremely easy to stop the piston 56 at an arbitrary position.
  • the operating speed of the biston 56 can be adjusted to a desired speed by appropriately setting the rotation speed of the driving valve device 40. Therefore, it is possible to arbitrarily control the arrangement state and speed of the piston 56 by simply rotating the driving member 18 appropriately.
  • 70 is an air cylinder
  • 71 is an outer cylinder
  • 72 is an end face member on the starting end side fixed to the main body 12 of the control device
  • 73 is an end closing the end of the outer cylinder 71.
  • the end member 75 on the side is a cylinder disposed inside the outer cylinder 71 via a cylindrical flow path 76.
  • the first connection port 16 coming from the control device 10 penetrates the end face member 72 and opens to the start end side, and the second connection port 17 is connected to the cylindrical flow path 76 at the start end side. It is open.
  • 7 7 is an appropriate number that opens from the cylindrical flow path 76 to the cylinder 75 at the end side Hole.
  • Reference numeral 80 denotes a rod-shaped screw that extends through the center of the cylinder 75, and the inclination angle of the spiral of the screw is, for example, about 45 degrees, and is inclined very steeply.
  • the driven member 22 for rotating the driven valve device 26 is integrally connected to the driven member 22 by means not shown.
  • Reference numeral 81 denotes a bearing, and reference numeral 82 denotes a nut for retaining the screw 80 and the driven member 22.
  • Reference numeral 83 denotes a cylindrical screw made reciprocable in the cylinder 75.
  • a female screw member 85 screwed to the screw 80 is fixed to the starting end side by an appropriate number of screws 86.
  • Reference numeral 88 denotes a cylindrical piston rod, which is screwed to one end of a screw part 89 of the biston, and surrounds the outside of the screw 80 and extends outward through the end face member 73.
  • Reference numeral 90 denotes a piston for sealing the gap with the piston rod 88 provided at the outer end of the screw 80.
  • 9 1 is a piston port
  • y is a hole that discharges leaked air from a sealing piston opened in the part that extends out of 8 8 8 9 is screwed into the tip of a biston rod 8 8
  • Reference numeral 95 denotes a detent rod serving as a detent means, which is guided by a guide part 96 fixed to the outer cylinder 71, and is fixed to the coupling screw member 92 by a force coupling member 97. It is. Therefore, when air is supplied from the first connection port 16 to the starting end of the cylinder 75 by rotating the driving member 18 in a counterclockwise direction, for example, and the piston 83 moves to the end, the piston moves. The screw 80 rotates without moving, and the driven member 22 rotates. When the driving member 18 is stopped in any state, the piston 83 stops at that position. When the driving member 18 is rotated clockwise, the piston 88 returns to the start end side.
  • the detent rod 95 may be provided in the cylinder 75 such that the piston 83 is airtightly aired.
  • a part of the control device of the pneumatic operating device shown in FIGS. 6 is formed in a cylindrical shape and rotated by the driving member 18
  • a drive valve device 40 is provided, which is formed with a supply arc-shaped opening 32a, 32b and an exhaust arc-shaped opening 33a, 33b on the inner side as shown.
  • the driven valve device 40 in the above embodiment has a driven valve device 26 similar to that formed in a shaft shape, and the holes 43 a and 43 are formed so as to have an angle difference of 180 degrees. b to open and reach the annular spaces 45a, 45b via the flow paths 98a, 98b, respectively, so as to be connected to the driven member 22 to rotate. Has become.
  • Other parts corresponding to those of the embodiment shown in FIGS. 1 to 10 are denoted by the same reference numerals.
  • each of the supply arc opening and the exhaust arc opening is on the same side only, for example, only the supply arc opening 32a and the exhaust arc opening 33a are formed, and the hole 43b is also symmetric with the hole 43a. It may be configured to be formed at an appropriate position.
  • a space 101 communicating with the air supply port 14 is formed above the hole 13 in the main body 12.
  • the driving valve device 40 is closely rotatably mounted in the hole 13 of the main body 12 and has a cylindrical peripheral surface and a bottom surface composed of a horizontal circular flat surface. It has a shaft portion 1 and 2 extending through the upper end surface.
  • Main driving valve system 4 0 This vertically supply arcuate opening 3 2 force 5 is formed on the lower end surface by the flow channel 1 0 3 arcuate cross section which penetrates and ⁇ space portion formed on a part of circumferential surface
  • a flow path 105 having an arc-shaped cross section extending downwardly in communication with the exhaust port 15 by 104, and an exhaust arc opening 33 is formed at the lower end surface.
  • the supply arc opening 32 and the exhaust arc opening 33 are located at the same radius around the central axis, and are arranged so as to extend only in the same angle range through a closed portion 34 at a slight interval therebetween. is there.
  • the driven valve device 26 is formed in a columnar shape, and is disposed below the main driving valve device 40 so as to be rotatable by being in planar contact with each other.
  • the arc-shaped opening 33 should have an angle difference of 180 degrees with the same radius as 3 Holes 43a, 43b, and reach the annular spaces 45a, 45b via the flow paths 98a, 98b, respectively. It is connected to 22 and rotated.
  • the holes 43a and 43b overlap with the closing part 34 at the same time and are closed in this case.
  • Reference numeral 106 denotes a helical spring that exerts elastic force so as to bring the main valve device 40 into close contact with the driven valve device 26, and 108 denotes a thrust bearing.
  • the annular spaces 45a and 45b communicate with the first and second connection ports 16 and 17, respectively.
  • Other parts are configured in the same manner as in the embodiment shown in FIGS. 1 to 10, and corresponding parts are denoted by the same reference numerals.
  • This embodiment can also operate in the same manner as the above embodiments. That is, when the air cylinder is operated in a predetermined direction, the shaft portion 102 is operated by a stepping motor or other means in the direction in which the vinyl 51 rotates, and the main valve device 40 is driven by the driven pulp device 26. It is sufficient to rotate at a rotational speed that can follow.
  • the driven valve device is configured to have two holes in the contact surface, and two arc-shaped openings similar to the driven valve device 40.
  • the driven pulp apparatus may be configured to have the following.
  • the control device 10 can be applied as a pneumatic operating device, for example, to a vane swing type pneumatic operating device 110 that swings a vane by air pressure.
  • the vane (not shown) and the output shaft 112 rotate reciprocally within 360 degrees, but the driven member 2 is configured to rotate this movement via a speed increasing device (not shown). 2, the driven valve device 26 is rotated.
  • the first and second connection ports 16 and 17 are connected to connection ports 113 and 115 of the pneumatic actuator 110 by hoses (not shown), respectively.
  • the control device 10 those of the various embodiments described above can be used.
  • a magnetic member arranged in parallel with the piston rod 57 A graduation member 1 16 and a detection member 1 17 fixed to a piston rod for reading the same are provided, and the detection signal is sent to a control circuit 118, and the signal is used as a control signal, or the motor 1 20 May be driven to rotate the driven valve device 26 (not shown).
  • Reference numeral 20 denotes a driving device such as a steering motor for driving the driving valve device 40 (not shown).
  • a known method such as disposing a magnetostrictive wire or a magnetostrictive tube in a hollow piston rod and fixing it to a cylinder, and determining the movement amount of the piston by a detection device provided in the piston is used.
  • Technology can be used to rotate the driven valve device as well.
  • a signal obtained by reading a scale of an optical scale formed directly or indirectly on a piston rod can be used.
  • the amount of movement of the operating member of the pneumatic operating device is transmitted to rotate the driven valve device 26 of the control device 10 using a flexible wire or the like. Further, such a change can be applied to a vane swing type pneumatic operating device via an appropriate device for converting a rotary motion into a linear motion as required.
  • the control device of the pneumatic operating device can make various changes.
  • any transmission may be used as long as the driven member 22 of the control device 10 rotates in proportion to the operation length of the operation member of the pneumatic operation device.
  • a chain and a sprocket can be used instead of the rack 52 and the pinion 51, or a stepped belt or the like can be used.
  • the supply air 14, the exhaust air 15, and the connection ports 16, 17 may be cut with a female thread if necessary.
  • the present invention can stop the operating member such as the piston or vane at an arbitrary position or operate the operating member in the opposite direction and adjust the operating speed arbitrarily. 2 It provides a pneumatic operation device having a function that has not been provided at all, and a control device thereof, and can be widely used in fields requiring such a function.

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  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Fluid Mechanics (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Fluid-Pressure Circuits (AREA)
  • Mechanically-Actuated Valves (AREA)
  • Actuator (AREA)

Abstract

An air pressure operated apparatus, such as an oscillating air pressure operated apparatus having a cylinder piston type air cylinder and vanes, which apparatus can be moved to an arbitrary position and stopped, moved in the reverse direction, and has the moving speed thereof regulated arbitrarily, and a control apparatus therefor. The control apparatus (10) for the air pressure operated apparatus according to the present invention is constructed as follows: when a drive valve (unit 40) is rotated by a suitable means, an operating member of the air pressure operated apparatus is moved, and a driven valve (unit 26) adapted to be rotated in pro portion to an amount of movement of this operating member is rotated the same number of revolutions as the drive valve unit, whereby a desired position of operation can be controlled by only regulating the operation of the drive valve (unit 40).

Description

明 細 書 空気圧動作装置とその制御装置 技術分野  Description Pneumatic actuator and its controller Technical field
この発明はシリンダビス卜ン型のエアシリンダやべーンを有する揺動型等の空 気圧動作装置とその制御装置に関するものである。 背景技術  The present invention relates to a pneumatic operating device such as a cylinder-type air cylinder or a swing type having a vane and a control device therefor. Background art
一般にエアシリンダ等の空気圧動作装置は油圧シリンダとは異なって空気に圧 縮性があるため、 ビス卜ン等の動作部材を任意の位置で停止させて使用すること がなく、 ビストンは完全に始端位置又は終端位置に保持されるようにして使用す ることが普通であった。 発明の開示  In general, pneumatic actuators such as air cylinders are different from hydraulic cylinders in that air has compressibility. Therefore, operating members such as pistons do not need to be stopped at any position to be used. It was common to use it in a position or end position. Disclosure of the invention
この発明は空気圧動作装置の動作部材を任意の動作位置まで動作させて停止さ せたりその状態から逆方向に動作させたり動作速度を任意に調節することが出来 る空気圧動作装置及びその制御装置を提供するものである。  The present invention relates to a pneumatic operating device capable of operating and stopping an operating member of a pneumatic operating device to an arbitrary operating position, operating the operating member in a reverse direction from that state, and arbitrarily adjusting an operating speed, and a control device thereof. To provide.
この発明は空気を供給する給気口, 排気を排出させる排気口, 及び空気圧動作 装置の二つの連結口にそれぞれ連結させる二つの連結口を有する本体と、 この本 体に装着してあつて外部から操作して正逆両方向に回転可能にした主動バルブ装 置と、 前記本体に装着してあつて空気圧動作装置の動作部材の動作量に比例して 回転する従動バルブ装置とを包含し、 前記主動バルブ装置を従動バルブ装置の追 従可能な回転速度で何れか一^ 5の方向に回転すると従動バルブ装置も主動バルブ 装置と同一方向に実質的に同一回転速度で回転して給気口から供給される空気を 一方の連結口へ流出させかつ他方の連結口へは空気圧動作装置の 気が流入して 排気口を通って流出し、 前記主動バルブ装置を逆方向に回転させると従動バルブ 装置も主動バルブ装置と同一方向に実質的に同一回転速度で回転して給気口から 供給される気体を前記他方の連結口へ流出させかつ前記一方の連結口へは空気圧 動作装置の排気が流入して排気口を通つて流出することを特徴とする空 動作 装置の制御装置と、 このような制御装置を備えた空気圧動作装置を提供するもの である。 図面の簡単な説明 . The present invention relates to a main body having an air supply port for supplying air, an exhaust port for discharging exhaust gas, and two connection ports respectively connected to two connection ports of a pneumatic operation device, And a driven valve device mounted on the main body and rotated in proportion to the operation amount of an operation member of a pneumatic operation device. When the driven valve device is rotated in any one of the directions at a rotational speed that can be followed by the driven valve device, the driven valve device also rotates at substantially the same rotational speed in the same direction as the driven valve device, and the air is supplied from the air supply port. Supply air The air of the pneumatic operating device flows into one connecting port and flows into the other connecting port, flows out through the exhaust port, and when the driven valve device is rotated in the opposite direction, the driven valve device also becomes the driven valve device. The gas supplied from the air supply port is rotated at substantially the same rotational speed in the same direction to flow out to the other connection port, and the exhaust of the pneumatic operating device flows into the one connection port to form the exhaust port. It is intended to provide a control device for a pneumatic device characterized by flowing out through the air, and a pneumatic device provided with such a control device. Brief description of the drawings.
図 1〜1 0はこの発明による空気圧動作装置の制御装置の一実施例を示し、 図 1はその概略を示す縦断面図である。  1 to 10 show an embodiment of a control device for a pneumatic operating device according to the present invention, and FIG. 1 is a longitudinal sectional view schematically showing the control device.
図 2はその従動バルブ装置の縦断面図である。  FIG. 2 is a longitudinal sectional view of the driven valve device.
図 3はその側面図である。  Figure 3 is a side view.
図 4は図 2における A— A断面図である。  FIG. 4 is a sectional view taken along line AA in FIG.
図 5は図 2における B— B断面図である。  FIG. 5 is a sectional view taken along line BB in FIG.
図 6は主動バルブ装置の正面図である。  FIG. 6 is a front view of the driving valve device.
図 7は図 6における C一 C断面図である。  FIG. 7 is a cross-sectional view taken along the line C-C in FIG.
図 8は図 6における D— D断面図である。  FIG. 8 is a sectional view taken along the line DD in FIG.
図 9はエアシリンダに制御装置を連結した状態を示す説明図である。  FIG. 9 is an explanatory diagram showing a state where the control device is connected to the air cylinder.
図 1 0は空気圧動作装置の制御装置の動作説明図である。  FIG. 10 is an operation explanatory diagram of the control device of the pneumatic operating device.
図 1 1はこの発明によるエアシリンダの一実施例を示す一部を省略した縦断面 図である。  FIG. 11 is a partially omitted longitudinal sectional view showing an embodiment of an air cylinder according to the present invention.
H I 2- 1 5はこの発明の空気圧動作装置の制御装置の図 1〜; L 0に示す前記 実施例の主動パルプ装置と従動パルプ装置を変更した H2S例を示し、 図 1 2は主 動バルブ装置の縦断面図である。 図 1 3は図 1 2における E— E断面図である。 HI2-1-5 shows an example of a control device for a pneumatic operating device of the present invention in FIGS. 1 to; L2 shows an example of an H2S in which the driven pulp device and the driven pulp device of the above embodiment are changed, and FIG. 12 shows a driven valve. It is a longitudinal section of a device. FIG. 13 is a sectional view taken along line EE in FIG.
図 1 4は図 1 2における F— F断面図である。  FIG. 14 is a sectional view taken along line FF in FIG.
図 1 5は従動バルブ装置の縦断面図である。  FIG. 15 is a longitudinal sectional view of the driven valve device.
図 1 6〜 2 2はこの発明の空気圧動作装置の制御装置の他の異なった実施例を 示し、 図 1 6はその縦断面図である。  FIGS. 16 to 22 show other different embodiments of the control device of the pneumatic operating device according to the present invention, and FIG. 16 is a longitudinal sectional view thereof.
図 1 7は主動バルブ装置の正面図である。  FIG. 17 is a front view of the driving valve device.
図 1 8はその平面図である。  FIG. 18 is a plan view thereof.
図 1 9は図 1 7における G— G断面図である。  FIG. 19 is a sectional view taken along line GG of FIG.
図 2 0は従動バルブ装置の正面図である。  FIG. 20 is a front view of the driven valve device.
図 2 1はその平面図である。  FIG. 21 is a plan view thereof.
図 2 2はその縦断面図である。  FIG. 22 is a longitudinal sectional view thereof.
図 2 3はべ一ン揺動型空気圧動作装置に制御装置を結合した実施例を一部断面 として示す正面図である。  FIG. 23 is a front view showing, in partial cross section, an embodiment in which a control device is connected to a vane swing type pneumatic operating device.
図 2 4はこの発明の他の実施例を示す説明図である。  FIG. 24 is an explanatory view showing another embodiment of the present invention.
発明を実施するための最良の形態 BEST MODE FOR CARRYING OUT THE INVENTION
以下図面を参照しながらこの発明の実施例について説明する。  Hereinafter, embodiments of the present invention will be described with reference to the drawings.
図 1〜1 0に示すこの発明の一実施例において特に図 1を参照すると、 1 0は この発明による空気圧動作装置の制御装置を示し、 外殻を構成する本体 1 2を有 している。 この本体には中央を貫通する孔 1 3力 s形成してあり、 かっこの孔の所 定位置に達する加圧空気を供給するようにした給気口 1 4, 排気ロ1 5, 及び空 気圧動作装置の両端にそれぞれ連通するための第 1の連結口 1 6と第 2の連結口 1 7力 s形成してある。  Referring particularly to FIG. 1 in an embodiment of the present invention shown in FIGS. 1 to 10, reference numeral 10 denotes a control device of a pneumatic operating device according to the present invention, which has a main body 12 constituting an outer shell. This body has a hole 13 through the center that is formed through the center. The air supply port 14 supplies the pressurized air reaching the specified position of the bracket, the exhaust port 15, and the air pressure. A first connection port 16 and a second connection port 17 for communicating with both ends of the operating device are formed.
1 8は本体 1 2の孔 1 3の一端にパッキング 1 9を用いて気密にして回転可能 に装着した主動部材で、 例えばステツビングモータやその他の正逆転可能なモー 夕等の駆動装置 20あるいは手等で回転させるようになつている。 21は軸受を 示す。 22はエアシリンダのビス卜ン等の動作部材が動作する場合その向きが反 転すると逆方向になるようにして空気圧動作装置の動作量に比例して回転させる 軸より成る従動部材で、 軸受 23, 25に回転可能に支持されている。 Reference numeral 18 denotes a driving member which is rotatably mounted in an airtight manner by using a packing 19 at one end of a hole 13 of the main body 12, for example, a stepping motor or another forward / reverse rotatable motor. It is designed to be rotated by the drive device 20 in the evening or by hand or the like. 21 indicates a bearing. Reference numeral 22 denotes a driven member consisting of a shaft that rotates in proportion to the amount of operation of the pneumatic actuator so that when the operating member such as the piston of the air cylinder operates, the direction is reversed when the member is reversed. , 25 rotatably supported.
特に図 2〜5を参照すると、 26はほぼ円柱状の従動バルブ装置で、 前記主動 部材 18側の端部から形成し他端付近で閉塞した給気流路 27と前記従動部材 2 2側から形成し主動部材 18側で閉塞した排気流路 28が設けてある。 30は第 1の弧状開口部分、 31は第 2の弧状開口部分である。 これらの弧状開口部分に は図示のように給気流路 27に連通する弧状開口 32 a, 32bと、 排気流路 2 8に連通する弧状開口 33 a, 33 bが形成してある。 第 1の弧状開口部分 30 における弧状開口 32 a, 33 a及び第 2の弧状開口部分 31における弧状開口 32 b, 33 bはそれぞれ両端部間に僅かの同一角度の範囲の閉塞部 34を介し て 180度近くの同一の範囲に延びており、 弧状開 CI32a, 32 b及び弧状開 □ 33a, 33 bは互いに 180度位相が異なった位置に形成されている。 図 1 も参照すると、 従動バルブ装置 26の従動部材 22側の端部には従動部材 22を 貫通するピン 36を係合させる係 7が形成してあって、 従動部材 22が回 転すると同時に回転するようになっている。 また、 給気流路 27は給気口 14に 連通しており、 排気流路 28は排気口 15に連通するようになっている。  Referring particularly to FIGS. 2 to 5, reference numeral 26 denotes a substantially cylindrical driven valve device, which is formed from the end of the main driving member 18 and closed from the other end, and formed from the supply passage 27 and the driven member 22. An exhaust passage 28 closed on the driving member 18 side is provided. Reference numeral 30 denotes a first arc-shaped opening, and 31 denotes a second arc-shaped opening. In these arc-shaped openings, arc-shaped openings 32a and 32b communicating with the air supply passage 27 and arc-shaped openings 33a and 33b communicating with the exhaust passage 28 are formed as shown. The arc-shaped openings 32a, 33a in the first arc-shaped opening 30 and the arc-shaped openings 32b, 33b in the second arc-shaped opening 31 are respectively provided between the both ends through a closed portion 34 having a slight angle range. The arcs CI32a and 32b and the arcs 33a and 33b are formed at positions 180 degrees out of phase with each other. Referring to FIG. 1 as well, the driven valve device 26 is provided at the end thereof on the driven member 22 side with a lock 7 for engaging a pin 36 penetrating the driven member 22 so that the driven member 22 rotates simultaneously with rotation. It is supposed to. Further, the air supply passage 27 communicates with the air supply port 14, and the exhaust passage 28 communicates with the exhaust port 15.
特に図 6〜8を参照すると、 40は前記従動ノ \っレブ装置 26の外側に回転可能 に密接して嵌合した筒状の主動バルブ装置で、 それぞれ前記第 1と第 2の弧状開 口部分 30, 31の外側を囲む第 1の孔部分 41と第 2の孔部分 42が設けてあ る。 この各孔部分には図示のようにそれぞれ軸線回りに同一角度位置で孔 43 a , 43bが開けてあり、 かつその外側に環状空間部 45 a, 45 b力形成してあ る。 これらの環状空間部 45a, 45bは図 1に示されるようにそれぞれ孔 43 a, 43 bを第 1と第 2の連結口 16, 17に連通させるようになっているが、 これらの環状空間部を設けることなく本体 1 2に形成することも出来るものであ る。 孔 4 3 a , 4 3 bはいずれも従動バルブ装置 2 6の閉塞部 3 4の長さより短 く形成してある。 4 6は主動部材 1 8の側の端部に形成した小径部、 4 7はこの 小径部に開けた 4個の孔である。 4 8はこの孔のうちの対向する 1対と主動部材 1 8に開けた孔 5 0を貫通して結合するピンで、 主動部材 1 8と主動バルブ部材With particular reference to FIGS. 6 to 8, reference numeral 40 denotes a cylindrical main valve device rotatably and closely fitted to the outside of the driven knob device 26, and the first and second arc-shaped openings are respectively provided. A first hole portion 41 and a second hole portion 42 surrounding the outside of the portions 30 and 31 are provided. The holes 43a and 43b are formed at the same angular position around the axis as shown in the figures, and the annular spaces 45a and 45b are formed outside the holes 43a and 43b. As shown in FIG. 1, these annular spaces 45a, 45b allow the holes 43a, 43b to communicate with the first and second connection ports 16, 17, respectively. It is also possible to form the main body 12 without providing these annular spaces. Each of the holes 43 a and 43 b is formed to be shorter than the length of the closing portion 34 of the driven valve device 26. 46 is a small diameter portion formed at the end of the driving member 18 side, and 47 is four holes formed in the small diameter portion. Reference numeral 4 8 denotes a pin which penetrates and couples a pair of these holes facing each other and a hole 50 formed in the driving member 18, and includes a driving member 18 and a driving valve member.
4 0が同時に回転するようになっている。 小径部 4 6には給気ロ1 4が開口して おり、 ピン 4 8の貫通しない 2個の孔 5 0を通って従動バルブ装置 2 6の給気流 路 2 7へ供給出来るようになつている。 前記従動バルブ装置 2 6と主動バルブ装 置 4 0は後述するようにして流路を切換える手段を構成するものである。 40 rotate simultaneously. The small-diameter portion 46 has an inlet 14 open so that it can be supplied to the supply passage 27 of the driven valve device 26 through two holes 50 that do not penetrate the pin 48. I have. The driven valve device 26 and the driven valve device 40 constitute means for switching the flow path as described later.
図 1を参照すると、 5 1は従動部材 2 2を貫通させてこれに固定したピニオン である。 5 2はこのピニオンとかみ合うようにしたラックで、 両端にエアシリン ダのピストンに連結させるための取付部材 5 3が取付けてある。  Referring to FIG. 1, reference numeral 51 denotes a pinion that penetrates the driven member 22 and is fixed thereto. Numeral 52 denotes a rack that meshes with the pinion, and has mounting members 53 at both ends for connecting to a piston of the air cylinder.
特に図 9を参照すると、 前記制御装置 1 0により制御する一般に市販されてい るロッドレスのエアシリンダ 5 4が示してある。 5 5はシリンダ、 5 6はピスト ンである。 5 7はこのビストン 5 6にシリンダ 5 5の外で連結した連結部材で、 前記ラック 5 2の一端の取付部材 5 3に結合してある。 5 8はシリンダ 5 5の前 記第 1の連結口 1 6にホース 5 9を介して連結する始端、 6 0は前記第 2の連結 □ 1 7にホース 6 1を介して連結する終端である。 従って、 ピストン 5 6が始端 5 8側から終端 6 0側に向かって移動する場合ラック 5 2の移動によりピニォン 5 1が制御装置 1 0の主動部材 1 8側から見た場合反時計方向へ回転し、 ビスト ン 5 6が逆方向へ移動する場合にはピニオン 5 1力 s逆方向の時計方向に回転し、 常にピストン 5 6の移動長さに比例してピニオン 5 1が回転することになる。 な お、 ピストン 5 6が固定されシリンダ 5 5が動作部材として動く場合にはラック With particular reference to FIG. 9, a commercially available rodless air cylinder 54 controlled by the controller 10 is shown. 55 is a cylinder and 56 is a piston. Reference numeral 57 denotes a connecting member connected to the biston 56 outside the cylinder 55, and is connected to the mounting member 53 at one end of the rack 52. Reference numeral 58 denotes a starting end connected to the first connection port 16 of the cylinder 55 via the hose 59, and reference numeral 60 denotes an end connected to the second connection 17 via the hose 61. . Therefore, when the piston 56 moves from the start end 58 side to the end end 60 side, the movement of the rack 52 causes the pinion 51 to rotate counterclockwise when viewed from the main drive member 18 side of the control device 10. When the piston 56 moves in the opposite direction, the pinion 51 rotates in the opposite direction clockwise, and the pinion 51 always rotates in proportion to the movement length of the piston 56. . If the piston 56 is fixed and the cylinder 55 moves as an operating member, the rack
5 2はピストン 5 6に対して固定することなくシリンダ 5 5に対して固军するこ とになる。 すなわち、 エアシリンダ 5 4の動作量に比例して従動部材 2 2が回転 されるようにすればよい。 52 is fixed to the cylinder 55 without being fixed to the piston 56. That is, the driven member 22 rotates in proportion to the operation amount of the air cylinder 54. What should be done is.
図 1〜: I 0、 特に図 1 0を参照しながらこの発明による空気圧動作装置の制御 装置の動作について説明する。 図 1 0は従動バルブ装置 2 6と主動バルブ装置 4 0が種々の状態の主動部材 1 8側から見た図 4 , 5 , 7 , 8と同様な位置での概 略の断面を示すものである。 この図の (a) において、 主動バルブ装置 4 0が主 動部材 1 8によりピストン 5 6が始端 5 8から終端 6 0に向かって運動する場合 の従動部材 2 2の回転方向と同じく反時計方向に継続して回転する場合を考える o 主動バルブ装置 4 0の孔 4 3 aは排気弧状開口 3 3 aに向かって開口しており 、 かつ孔 4 3 bは給気弧状開口 3 2 bに向かって開口している。 この状態では給 気口 1 4から供給された加圧空気は給気流路 2 7 , 給気弧状開ロ3 2 b, 孔 4 3 b , 第 2の連結□ 1 7, ホース 6 1を絰て終端 6 0からシリンダ 5 5内へ供給さ れることになる。 また、 シリンダ 5 5内のピストン 5 6に押される排気はホース 5 9 , 第 1の連結ロ1 6 , ? L4 3 a , 排気弧状開口 3 3 a, g気流路 2 8, 排気 口 1 5を介して排出される。 もし、 ピストン 5 6が始端 5 8にあればこのピスト ンは動かないが、 他の位置にあれば始端 5 8へ向かって移動することになり従動 バルブ装置 2 6は図示のように時計方向へ回転することになる。 従動バルブ装置 2 6の停止及び回転の何れの場合も主動バルブ装置 4 0の回転があり僅かの時間 の間に孔 4 3 a及び孔 4 3 bが閉塞部 3 4により閉塞されビストン 5 6が移動し ている場合には瞬間的に停止する。  The operation of the control device of the pneumatic operating device according to the present invention will be described with reference to FIGS. FIG. 10 is a schematic cross-sectional view of the driven valve device 26 and the driven valve device 40 in the same positions as FIGS. 4, 5, 7, and 8 when viewed from the driving member 18 in various states. is there. In (a) of this figure, the main valve unit 40 is moved counterclockwise in the same direction as the rotation direction of the driven member 22 when the piston 56 is moved from the starting end 58 to the end 60 by the driving member 18. O The hole 43 of the drive valve device 40 is open toward the exhaust arc opening 33a, and the hole 43b is facing the supply arc opening 32b. Open. In this state, the pressurized air supplied from the air supply port 14 passes through the air supply flow path 27, the air supply arc opening 32 b, the hole 43 b, the second connection □ 17, and the hose 61. It will be supplied from the terminal 60 into the cylinder 55. Also, the exhaust pushed by the piston 56 in the cylinder 55 is the hose 59, the first connecting cylinder 16,? L43a, exhaust arc-shaped opening 33a, g Air flow path 28, exhausted through exhaust port 15. If the piston 56 is at the starting end 58, this piston does not move, but if it is at any other position, it moves toward the starting end 58, and the driven valve device 26 moves clockwise as shown. Will rotate. In both cases of stop and rotation of the driven valve device 26, the driven valve device 40 is rotated, and the holes 43a and 43b are closed by the closing portion 34 in a short period of time, and the piston 56 is closed. If moving, stop momentarily.
続 て、 主動バルブ装置 4 0を回転させると、 (b ) に示すようになり、 給気 口 1 4から供給された加圧空気は給気流路 2 7, 紿気弧状開ロ3 2 a , 孔 4 3 a , 第 1の連結□ 1 6, ホース 5 9を経て始端 5 8からシリンダ 5 5内へ供給され ることになり、 ピストン 5 6は始端 5 8から終端 6 0に向かつて移動することに なりこの状態は終端 6 0に達するか主動バルブ装置 4 0の回転力停止するまで続 くことになる。 主動パルプ装置 4 0の回転が停止すると、 (c ) で示すように孔 4 3 a及び孔 4 3 bが閉塞部 3 4により閉塞され加圧空気の供給が停止し、 ビス トン 5 6もその位置で停止することになる。 この状態で負荷の変動等によりビス トン 5 6が僅かに移動すると最初に停止した状態まで加圧空気: ^供給されたり排 出されて一定の位置に保持されることになる。 このような場合負荷の変動は制御 装置 1 0で空気を供給したり排出したりすることが追従可能な範囲の速度でなけ ればならない。 また、 主動バルブ装置 4 0を時計方向に回転させる場合には前述 したようにして少なくとも僅かの時間後には (d ) に示すようになり、 ピストン 5 6が終端 6 0側から始端 5 8側に向かって移動するようになり、 主動バルブ装 置 4 0と同時に回転している従動バルブ装置 2 6も同一方向に回転することにな る。 Subsequently, when the main valve unit 40 is rotated, the state shown in (b) is obtained, and the pressurized air supplied from the air supply port 14 is supplied to the air supply passage 27, the arc opening 32 2 a, It is supplied from the starting end 58 to the cylinder 55 through the hole 43a, the first connection □ 16, and the hose 59, and the piston 56 moves from the starting end 58 to the end 60. That is, this state continues until the terminal 60 is reached or the rotational force of the driving valve device 40 is stopped. When the rotation of the driving pulp device 40 stops, the hole is formed as shown in (c). The 43a and the hole 43b are closed by the closing portion 34, the supply of pressurized air is stopped, and the biston 56 also stops at that position. In this state, if the biston 56 moves slightly due to a change in load or the like, the pressurized air: is supplied or discharged until it stops first, and is kept at a fixed position. In such a case, the load fluctuation must be at a speed within a range in which the supply and discharge of air by the control device 10 can follow. When the driving valve device 40 is rotated clockwise, as described above, at least after a short time, as shown in (d), the piston 56 moves from the end 60 to the start 58. As a result, the driven valve device 26 rotating simultaneously with the main valve device 40 also rotates in the same direction.
前記主動バルブ装置 4 0の回転速度はほぼビストン 5 6の移動に基づき従動部 材 2 2が回転可能な回転速度以内にすることが必要である。 このような場合には 常に主 11バルブ装置 4 0の回転角度と実質的に同じ角度だけ従動部材 2 2が回転 することになる。 従って、 ピストン 5 6を任意の位置に停止させることが極めて 容易になるものである。 また、 主動バルブ装置 4 0の回転速度を適当にしてビス トン 5 6の動作速度も所望の速度に調節することが出来る。 従って、 主動部材 1 8を適当に回転させるだけでビストン 5 6の配置状態や速度を任意に制御出来る ようになるものである。  It is necessary that the rotational speed of the drive valve device 40 be substantially within the rotational speed at which the driven member 22 can rotate based on the movement of the piston 56. In such a case, the driven member 22 always rotates by substantially the same angle as the rotation angle of the main 11 valve device 40. Therefore, it is extremely easy to stop the piston 56 at an arbitrary position. In addition, the operating speed of the biston 56 can be adjusted to a desired speed by appropriately setting the rotation speed of the driving valve device 40. Therefore, it is possible to arbitrarily control the arrangement state and speed of the piston 56 by simply rotating the driving member 18 appropriately.
次に図 1 1を参照しながら前記制御装置 1 0を一体として組み込んだエアシリ ンダを説明する。 この図において、 7 0はエアシリンダ、 7 1は外筒、 7 2は制 御装置の本体 1 2に固着した始端側の端面部材、 7 3は外筒 7 1の端部を閉塞す る終端側の端面部材、 7 5は外筒 7 1の内側に筒状流路 7 6を介して配置したシ リンダである。 制御装置 1 0から来た第 1の連結口 1 6は端面部材 7 2を貫通し て始端側に開口しており、 かつ第 2の連結口 1 7は始端側で筒状流路 7 6に開口 している。 7 7は終端側で筒状流路 7 6からシリンダ 7 5内に開口する適当個数 の孔である。 8 0はシリンダ 7 5の中央を貫通して配置する棒状のねじで、 ねじ の螺旋の傾斜角は例えば 4 5度程度でかなり急に傾斜させてあり、 かつ始端側で は制御装置 1 0の従動バルブ装置 2 6を回転させる従動部材 2 2と図示してない 手段により一体に結合されている。 8 1は軸受、 8 2はねじ 8 0及び従動部材 2 2の抜け止め用ナツトである。 Next, an air cylinder incorporating the control device 10 integrally will be described with reference to FIG. In this figure, 70 is an air cylinder, 71 is an outer cylinder, 72 is an end face member on the starting end side fixed to the main body 12 of the control device, and 73 is an end closing the end of the outer cylinder 71. The end member 75 on the side is a cylinder disposed inside the outer cylinder 71 via a cylindrical flow path 76. The first connection port 16 coming from the control device 10 penetrates the end face member 72 and opens to the start end side, and the second connection port 17 is connected to the cylindrical flow path 76 at the start end side. It is open. 7 7 is an appropriate number that opens from the cylindrical flow path 76 to the cylinder 75 at the end side Hole. Reference numeral 80 denotes a rod-shaped screw that extends through the center of the cylinder 75, and the inclination angle of the spiral of the screw is, for example, about 45 degrees, and is inclined very steeply. The driven member 22 for rotating the driven valve device 26 is integrally connected to the driven member 22 by means not shown. Reference numeral 81 denotes a bearing, and reference numeral 82 denotes a nut for retaining the screw 80 and the driven member 22.
8 3はシリンダ 7 5内で往復運動可能にした筒状のビス卜ンで、 始端側に前記 ねじ 8 0に螺合するめねじ部材 8 5が適当個数のねじ 8 6により固着してある。  Reference numeral 83 denotes a cylindrical screw made reciprocable in the cylinder 75. A female screw member 85 screwed to the screw 80 is fixed to the starting end side by an appropriate number of screws 86.
8 8はこのビストンに一端のねじ部 8 9を螺合させて取付けた筒状のビストンロ 、ッドで、 ねじ 8 0の外側を囲み端面部材 7 3を貫通して外方へ延びている。 9 0 はねじ 8 0の外端部に設けたピストンロッド 8 8との間隙の密封用ビストンであ る。 9 1はピストン口、: yド 8 8の外方に延びた部分に開けた密封用ピストンを漏 れた空気を排出するエア抜き孔、 9 2はビストンロッド 8 8の先端部に螺合する ねじ 9 3により固定した他の動作させる部材を連結する連結用ねじ部材である。  Reference numeral 88 denotes a cylindrical piston rod, which is screwed to one end of a screw part 89 of the biston, and surrounds the outside of the screw 80 and extends outward through the end face member 73. Reference numeral 90 denotes a piston for sealing the gap with the piston rod 88 provided at the outer end of the screw 80. 9 1 is a piston port, y is a hole that discharges leaked air from a sealing piston opened in the part that extends out of 8 8 8 9 is screwed into the tip of a biston rod 8 8 A connecting screw member for connecting another member to be operated, which is fixed by the screw 93.
9 5は回り止め手段となる回り止め棒で、 外筒 7 1に固着した案内部 9 6に案内 されるようになつており、 力つ連結部材 9 7により連結用ねじ部材 9 2に固着し てある。 従って、 主動部材 1 8を例えば反時計方向に回動することにより空気が 第 1の連結口 1 6からシリンダ 7 5の始端側に供給されてピストン 8 3が終端側 へ移動する場合ビストンは回動することなくねじ 8 0が回転して従動部材 2 2が 回転することになる。 主動部材 1 8を任意の状態で止めるとピストン 8 3がその 位置で停止する。 主動部材 1 8を時計方向に回転するとピストン 8 8は始端側へ 復帰する。 この実施例において、 回り止め棒 9 5はシリンダ 7 5内でピストン 8 3を気密に莨通するように設ける場合もある。  Reference numeral 95 denotes a detent rod serving as a detent means, which is guided by a guide part 96 fixed to the outer cylinder 71, and is fixed to the coupling screw member 92 by a force coupling member 97. It is. Therefore, when air is supplied from the first connection port 16 to the starting end of the cylinder 75 by rotating the driving member 18 in a counterclockwise direction, for example, and the piston 83 moves to the end, the piston moves. The screw 80 rotates without moving, and the driven member 22 rotates. When the driving member 18 is stopped in any state, the piston 83 stops at that position. When the driving member 18 is rotated clockwise, the piston 88 returns to the start end side. In this embodiment, the detent rod 95 may be provided in the cylinder 75 such that the piston 83 is airtightly aired.
図 1 2〜1 5に示すこの発明の他の異なった実施例においては前記図 1〜1 0 に示す空気圧動作装置の制御装置の一部を変更したもので、 前記実施例における 従動パルプ装置 2 6を筒状に形成して主動部材 1 8により回動させるようにした 主動バルブ装置 4 0を有しており、 かっこれは内面側に給気弧状開口 3 2 a , 3 2 b及び排気弧状開口 3 3 a, 3 3 bを図示のように形成したものである。 また 、 前記実施例における主動バルブ装置 4 0を軸状に形成したと同様な従動バルブ 装置 2 6を有しており、 1 8 0度の角度差を有するようにして孔 4 3 a, 4 3 b が開口するようにし、 かつそれぞれ流路 9 8 a , 9 8 bを介して環状空間部 4 5 a , 4 5 bに達するように構成され、 従動部材 2 2に連結して回転させるように なっている。 他の部分は図 1〜1 0に示した実施例と相当する部分が同様な符号 で示してある。 In another different embodiment of the present invention shown in FIGS. 12 to 15, a part of the control device of the pneumatic operating device shown in FIGS. 6 is formed in a cylindrical shape and rotated by the driving member 18 A drive valve device 40 is provided, which is formed with a supply arc-shaped opening 32a, 32b and an exhaust arc-shaped opening 33a, 33b on the inner side as shown. The driven valve device 40 in the above embodiment has a driven valve device 26 similar to that formed in a shaft shape, and the holes 43 a and 43 are formed so as to have an angle difference of 180 degrees. b to open and reach the annular spaces 45a, 45b via the flow paths 98a, 98b, respectively, so as to be connected to the driven member 22 to rotate. Has become. Other parts corresponding to those of the embodiment shown in FIGS. 1 to 10 are denoted by the same reference numerals.
この実施例において、 給気弧状開口と排気弧状開口をそれぞれ同じ一方側のみ 例えば給気弧状開□ 3 2 aと排気弧状開口 3 3 aのみを形成し孔 4 3 bも孔 4 3 aと対称な位置に形成するように構成してあっても良い。  In this embodiment, each of the supply arc opening and the exhaust arc opening is on the same side only, for example, only the supply arc opening 32a and the exhaust arc opening 33a are formed, and the hole 43b is also symmetric with the hole 43a. It may be configured to be formed at an appropriate position.
図 1 6〜2 2に示すこの発明の他の実施例においては本体 1 2内の孔 1 3の上 部に給気口 1 4に連通する空間部 1 0 1力 s形成してある。 主動バルブ装置 4 0は 本体 1 2の孔 1 3内に密接して回転可能に装着してあって円柱状の周面と水平な 円形平面より成る底面を有しており、 かつ本体 1 2の上端面を貫通して延びる軸 部 1ひ 2を有している。 主動バルブ装置 4 0はこれを上下方向に貫通する弧状断 面の流路 1 0 3により下端面に給気弧状開口 3 2力5形成され、 かつ周面の一部に 形成した璟状空間部 1 0 4により排気口 1 5に連通して下方に延びる弧状断面の 流路 1 0 5があって下端面に排気弧状開口 3 3が形成されている。 前記給気弧状 開口 3 2と排気弧状開口 3 3は中心軸線回りに同一半径の位置にあって相互間に 僅かの間隔の閉塞部 3 4を介して同一の角度範囲だけ延びるように配置させてあ る。 In another embodiment of the present invention shown in FIGS. 16 to 22, a space 101 communicating with the air supply port 14 is formed above the hole 13 in the main body 12. The driving valve device 40 is closely rotatably mounted in the hole 13 of the main body 12 and has a cylindrical peripheral surface and a bottom surface composed of a horizontal circular flat surface. It has a shaft portion 1 and 2 extending through the upper end surface. Main driving valve system 4 0 This vertically supply arcuate opening 3 2 force 5 is formed on the lower end surface by the flow channel 1 0 3 arcuate cross section which penetrates and璟状space portion formed on a part of circumferential surface There is a flow path 105 having an arc-shaped cross section extending downwardly in communication with the exhaust port 15 by 104, and an exhaust arc opening 33 is formed at the lower end surface. The supply arc opening 32 and the exhaust arc opening 33 are located at the same radius around the central axis, and are arranged so as to extend only in the same angle range through a closed portion 34 at a slight interval therebetween. is there.
従動バルブ装置 2 6は円柱状に形成してあって、 主動バルブ装置 4 0の下方に 互いに平面接触して回転可能に配置させてあり、 主動バルブ装置 4 0の給気弧状 開口 3 2及び排気弧状開口 3 3と同一半径で 1 8 0度の角度差を有するようにし 0 て孔 4 3 a , 4 3 bが開口するようにし、 かつそれぞれ流路 9 8 a , 9 8 bを介 して環状空間部 4 5 a , 4 5 bに達するように構成され、 従動部材 2 2に連結し て回転させるようになつている。 前記孔 4 3 a , 4 3 bは閉塞部 3 4に同時に重 なりこの場合閉塞されるようになっている。 1 0 6は主動バルブ装置 4 0を従動 バルブ装置 2 6に密接させるように弾力を及ぽすつる卷ばね、 1 0 8は推力軸受 である。環状空間部 4 5 a , 4 5 bはそれぞれ第 1と第 2の連結口 1 6, 1 7に 連通している。 他の部分は図 1〜1 0に示す実施例と同様に構成され相当する部 分は同一の符号で表わしてある。 この実施例においても前記各実施例と同様に動 作出来るものである。 すなわち、 エアシリンダを所定方向に動作させる場合ビニ ォ.ン 5 1が回転する方向に軸部 1 0 2をステッピングモータあるいはその他の手 段により操作して主動バルブ装置 4 0を従動パルプ装置 2 6が追従可能な回転速 度で回転させれば十分である。 The driven valve device 26 is formed in a columnar shape, and is disposed below the main driving valve device 40 so as to be rotatable by being in planar contact with each other. The arc-shaped opening 33 should have an angle difference of 180 degrees with the same radius as 3 Holes 43a, 43b, and reach the annular spaces 45a, 45b via the flow paths 98a, 98b, respectively. It is connected to 22 and rotated. The holes 43a and 43b overlap with the closing part 34 at the same time and are closed in this case. Reference numeral 106 denotes a helical spring that exerts elastic force so as to bring the main valve device 40 into close contact with the driven valve device 26, and 108 denotes a thrust bearing. The annular spaces 45a and 45b communicate with the first and second connection ports 16 and 17, respectively. Other parts are configured in the same manner as in the embodiment shown in FIGS. 1 to 10, and corresponding parts are denoted by the same reference numerals. This embodiment can also operate in the same manner as the above embodiments. That is, when the air cylinder is operated in a predetermined direction, the shaft portion 102 is operated by a stepping motor or other means in the direction in which the vinyl 51 rotates, and the main valve device 40 is driven by the driven pulp device 26. It is sufficient to rotate at a rotational speed that can follow.
図 1 6〜2 2に示す実施例における従動パルプ装置 2 6と同様に接触面に二つ の孔を有するように主動バルブ装置を構成し、 かつ主動バルブ装置 4 0と同様に 二つの弧状開口を有するように従動パルプ装置を構成してもよい。  Like the driven pulp device 26 in the embodiment shown in FIGS. 16 to 22, the driven valve device is configured to have two holes in the contact surface, and two arc-shaped openings similar to the driven valve device 40. The driven pulp apparatus may be configured to have the following.
この発明による制御装置 1 0は図 2 3に示すように空気圧動作装置として例え ば空気圧によりべーンを揺動させるベ一ン揺動型空気圧動作装置 1 1 0に適用す ることが出来る。 この場合には 3 6 0度以内で図示してないベーンと出力軸 1 1 2が往復回動運動するが、 この運動を図示してない増速装置を介して回転させる ようにした従動部材 2 2により従動バルブ装置 2 6を回転させるようになつてい る。 第 1と第 2の連結口 1 6 , 1 7は図示してないホースによりそれぞれ空気圧 動作装置 1 1 0の連結ロ1 1 3 , 1 1 5に連結されるようになっている。 制御装 置 1 0としては前述した種々の実施例のものを使用することが出来る。  As shown in FIG. 23, the control device 10 according to the present invention can be applied as a pneumatic operating device, for example, to a vane swing type pneumatic operating device 110 that swings a vane by air pressure. In this case, the vane (not shown) and the output shaft 112 rotate reciprocally within 360 degrees, but the driven member 2 is configured to rotate this movement via a speed increasing device (not shown). 2, the driven valve device 26 is rotated. The first and second connection ports 16 and 17 are connected to connection ports 113 and 115 of the pneumatic actuator 110 by hoses (not shown), respectively. As the control device 10, those of the various embodiments described above can be used.
この発明においては図 2 4に示すようにエアシリンダ 5 4のピストン 5 6等の 動作部材の移動量を求めるために例えばビストンロッド 5 7と平行に配置した磁 気目盛部材 1 1 6とこれを読み取るピストンロッドに固定した検出部材 1 1 7を 設け、 検出信号を制御回路 1 1 8に送りその信号を制御信号としたりあるいは增 幅した出力によりモータ 1 2 0を駆動して図示してない従動バルブ装置 2 6を回 転させるようにしてもよい。 2 0は図示してない主動バルブ装置 4 0を駆動する ステツビングモータ等の駆動装置である。 この発明においては磁気目盛以外にも 例えば磁歪線や磁歪管を中空にしたビストンロッド内に配置してシリンダに固定 し、 かつビストンに設けた検出装置によりビストンの移動量を求めるというよう な公知の技術を利用しこれにより同様に従動バルブ装置を回転させることも出来 る。 また、 例えばピストンロッドに直接又は間接に形成した光学スケールの目盛 を読取った信号を利用することも出来る。 また、 空気圧動作装置の動作部材の移 動量はフレキシブルワイヤ等を用いて制御装置 1 0の従動バルブ装置 2 6を回転 させるように伝達する場合もある。 また、 このような変更は必要に応じ回転運動 を直線運動に変換する適当な装置を介してべーン揺動型空気圧動作装置にも適用 出来るものである。 In the present invention, as shown in FIG. 24, in order to determine the amount of movement of the operating member such as the piston 56 of the air cylinder 54, for example, a magnetic member arranged in parallel with the piston rod 57 A graduation member 1 16 and a detection member 1 17 fixed to a piston rod for reading the same are provided, and the detection signal is sent to a control circuit 118, and the signal is used as a control signal, or the motor 1 20 May be driven to rotate the driven valve device 26 (not shown). Reference numeral 20 denotes a driving device such as a steering motor for driving the driving valve device 40 (not shown). In the present invention, in addition to the magnetic graduation, a known method such as disposing a magnetostrictive wire or a magnetostrictive tube in a hollow piston rod and fixing it to a cylinder, and determining the movement amount of the piston by a detection device provided in the piston is used. Technology can be used to rotate the driven valve device as well. Further, for example, a signal obtained by reading a scale of an optical scale formed directly or indirectly on a piston rod can be used. In some cases, the amount of movement of the operating member of the pneumatic operating device is transmitted to rotate the driven valve device 26 of the control device 10 using a flexible wire or the like. Further, such a change can be applied to a vane swing type pneumatic operating device via an appropriate device for converting a rotary motion into a linear motion as required.
この発明による空気圧動作装置の制御装置は種々の変更を行なうことが出来る 。 例えば制御装置 1 0における従動部材 2 2が空気圧動作装置の動作部材の動作 長さに比例して回転するならばどんな変速装置を用いてもよい。 また、 図 1に示 す実施例において、 ラック 5 2とピニオン 5 1の代わりにチェーンとスプロケッ トを用いたりあるいは段付きベルト等を用いることが出来る。 また、 給気ロ1 4 , 排気ロ1 5, 連結口 1 6, 1 7には必要に応じてめねじ力刻んであっても良い  The control device of the pneumatic operating device according to the present invention can make various changes. For example, any transmission may be used as long as the driven member 22 of the control device 10 rotates in proportion to the operation length of the operation member of the pneumatic operation device. In the embodiment shown in FIG. 1, a chain and a sprocket can be used instead of the rack 52 and the pinion 51, or a stepped belt or the like can be used. In addition, the supply air 14, the exhaust air 15, and the connection ports 16, 17 may be cut with a female thread if necessary.
産業上の利用可能性 Industrial applicability
以上のようにこの発明はピストンあるいはべ一ン等の動作部材を任意の位置で 停止させたり逆方向に動作させたり動作速度を任意に調節することが出来る従来 2 全くなかった機能を有する空気圧動作装置とその制御装置を提供するものであり 、 このような機能を必要とする分野で広く利用出来るものである。 As described above, the present invention can stop the operating member such as the piston or vane at an arbitrary position or operate the operating member in the opposite direction and adjust the operating speed arbitrarily. 2 It provides a pneumatic operation device having a function that has not been provided at all, and a control device thereof, and can be widely used in fields requiring such a function.

Claims

3 請 求 の 範 囲 「· 3 Scope of request
1 . 空気を供給する給気口, 排気を排出する排気口, 及び空気圧動作装置の 二つの連結口にそれぞれ連結させる二つの連結口を有する本体と、 この本体に装 着してあつて外部から操作して正逆両方向に回転可能にした主動バルブ装置と、 1. A main body having an air supply port for supplying air, an exhaust port for discharging exhaust gas, and two connection ports respectively connected to the two connection ports of the pneumatic operating device, A driven valve device operated to rotate in both forward and reverse directions,
■前記本体に装着してあつて空気圧動作装置の動作部材の動作量に比例して回転す る従動バルブ装置とを包含し、 前記主動バルブ装置を従動バルブ装置の追従可能 な回転速度で何れか一つの方向に回転すると従動バルブ装置も主動バルブ装置と 同一方向に実質的に同一回転速度で回転して給気口から供給される空気を一方の 連結口へ流出させかつ他方の連結口へは空気圧動作装置の排気が流入して排気口 を通って流出し、 前記主動バルブ装置を逆方向に従動バルブ装置の追従可能な回 転速度で回転させると従動バルブ装置も主動バルブ装置と同一方向に実質的に同 一回転速度で回転して給気口から供給される気体を前記他方の連結口へ流出させ かつ前記一方の連結口へは空気圧動作装置の排気力 s流入して排気口を通って流出 することを特徴とする空気圧動作装置の制御装置。 A driven valve device which is mounted on the main body and rotates in proportion to the amount of operation of an operating member of a pneumatic operating device, wherein the driven valve device is driven by any of the driven valve devices at a rotational speed capable of following the driven valve device. When rotated in one direction, the driven valve device also rotates at substantially the same rotational speed in the same direction as the driven valve device to allow air supplied from the air supply port to flow out to one connection port and to the other connection port. When the exhaust of the pneumatic operating device flows in and out through the exhaust port, and when the driven valve device is rotated at a rotational speed capable of following the driven valve device in the reverse direction, the driven valve device also moves in the same direction as the driven valve device. The gas supplied from the air supply port rotates at substantially the same rotational speed to flow out to the other connection port, and the exhaust force s of the pneumatic operating device flows into the one connection port and passes through the exhaust port. Spill Control device for the pneumatic operation device according to claim.
2 . 請求の範囲 1記載の空気圧動作装置の制御装置であって、 前記主動バル ブ装置と従動バルブ装置は互いに重なり合い接触して回転する表面を有しており 、 前記主動バルブ装置と従動バルブ装置の前記各表面は一方が給気口に連通する 開口部分と排気口に連通する開口部分を有しかつ他方が前記空気圧動作装置の二 つの連結口にそれぞれ連結させる連結口に連通しており、 かつ何れか一方が孔状 に開口しており他方が相互間で回転運動する場合この孔状の開口に添って開口す るようにょうに両端に閉塞部を介して形成した二つの少なくとも弧状開口になつ ており、 閉塞部に孔状の開口が重なると閉塞されるようになっていることを特徴 とする装置。  2. The control device for a pneumatic operating device according to claim 1, wherein the driving valve device and the driven valve device have surfaces that rotate in contact with each other, and the driving valve device and the driven valve device. Each of the surfaces has an opening portion communicating with the air supply port and an opening portion communicating with the exhaust port, and the other surface communicates with the connection ports respectively connected to the two connection ports of the pneumatic operating device. In addition, when one of them is open in the shape of a hole and the other is rotating with each other, at least two arc-shaped openings formed at both ends through blocking portions so as to open along this hole-like opening. The device is characterized in that the device is closed when a hole-shaped opening overlaps the closing portion.
3 . 請求の範囲 2記載の空気圧動作装置の制御装置であって、 前記互いに接 触して回転する表面は円柱状表面であることを特徴とする装置。 3. The control device for a pneumatic operating device according to claim 2, wherein An apparatus characterized in that the surface that rotates when touched is a cylindrical surface.
4. 請求の範囲 2記載の空気圧動作装置の制御装置であって、 前記互いに接 触して回転する表面は円形平面であることを特徴とする装置。  4. The control device for a pneumatic operating device according to claim 2, wherein the surfaces that rotate in contact with each other are circular flat surfaces.
5. 請求の範囲 1記載の空気圧動作装置の制御装置であつて、 前記従動バル ブ装置は空気圧動作装置の動作部材の動きを検出した信号に基づき回転させるも のであることを特徵とする装置。  5. The control device for a pneumatic operating device according to claim 1, wherein the driven valve device is rotated based on a signal that has detected a movement of an operating member of the pneumatic operating device.
6 - 請求の範囲 1記載の空気圧動作装置の制御装置であつて、 前記空気圧動 作装置はエアシリンダであることを特徴とする装置。  6-The control device for a pneumatic operating device according to claim 1, wherein the pneumatic operating device is an air cylinder.
7 · 請求の範囲 1記載の空気圧動作装置の制御装置であつて、 前記空気圧動 作装置はべ一ン揺動型空気圧動作装置であることを特徴とする装置。  7. The control device for a pneumatic operating device according to claim 1, wherein the pneumatic operating device is a vane swing type pneumatic operating device.
8. 請求の範囲 1記載の空気圧動作装置の制御装置であつて、 前記主動バル ブ装置を回転させるステッピングモータを設けたことを特徴とする装置。  8. The control device for a pneumatic operating device according to claim 1, further comprising a stepping motor for rotating the driving valve device.
9 . 請求の範囲 1記載の空気圧動作装置の制御装置を設けた空気圧動作装置  9. Pneumatic operating device provided with a control device for the pneumatic operating device according to claim 1.
1 0. 請求の範囲 1記載の空気圧動作装置の制御装置と一体に結合したエア シリンダょり成る空気圧動作装置であって、 前記制御装置の本体と結合した端面 部 と、 この端面部材に結合して外方に延びるシリンダと、 このシリンダの他端 に配置する端面部材と、 前記シリンダの外側に筒状流路を介して囲む外筒と、 前 記シリンダ内で滑動するピストンと、 このピストンの中央部に螺合して貫通し長 く延びてビストンが移動すると前記従動バルブ装置を回転させるようにしたねじ と、 このねじの外側を囲みピストンに固定してあって先端の端面部材を貫通する ビストン棒と、 前記ビス卜ンの回り止め装置とを包含し、 前記本体に設けた一方 の連結口はシリンダ内に開口しかつ他方の連結口は筒状流路に開口しこの筒状流 路の先端側からシリンダ内に連通させてあることを特徴とする装置。 10. A pneumatic operating device comprising an air cylinder integrally connected to the control device for the pneumatic operating device according to claim 1, wherein the end surface portion is connected to a main body of the control device, and the end surface member is connected to the end surface member. A cylinder extending outwardly of the cylinder, an end member disposed at the other end of the cylinder, an outer cylinder surrounding the cylinder via a cylindrical flow path, a piston sliding in the cylinder, A screw that is screwed into the center and extends long to rotate the driven valve device when the piston moves, and the outside of the screw is fixed to the piston and penetrates the end face member at the tip. The piston includes a piston rod and the device for stopping rotation of the piston. One of the connection ports provided in the main body is open in the cylinder, and the other connection port is open in the cylindrical flow path. From the tip side of Apparatus characterized by are communicated in the cylinder.
1 1 . 空気を供給する給気口, 排気を排出する排気口, 及び空気圧動作装置 の二つの連結口にそれぞれ連結させる二つの連結口を有する本体と、 この本体に 装着してあつて外部から操作して正逆両方向に回転可能にした主動部材と、 前記 本体に装着してあつて空気圧動作装置の動作部材の動作量に比例して正逆両方向 に回転する従動部材と、 前記主動部材を従動部材の追従可能な回転速度で何れか —つの方向に回転すると従動部材が主動部材と同一方向に実質的に同一回転速度 で回転して給気口から供給される空気を一方の連結口へ流出させかつ他方の連結 口へは空気圧動作装置の排気が流入して排気口を通って流出し、 前記主動部材を 従動部材の追従可能な回転速度で逆方向に回転させると従動部材も主動部材と同 —方向に実質的に同一回転速度で回転して給気口から供給される気体を前記他方 の連結口へ流出させかつ前記一方の連結口へは空気圧動作装置の排気が流入して 排気口を通って流出するように動作する手段とを包含することを特徴とする空気 圧動作装置の制御装置。 1 1. Air supply port for supplying air, exhaust port for discharging exhaust gas, and pneumatic actuator A main body having two connection ports respectively connected to the two connection ports, a driving member mounted on the main body and rotatable in both forward and reverse directions by operating from outside, and a main body mounted on the main body. A driven member that rotates in both forward and reverse directions in proportion to the amount of operation of the operating member of the pneumatic operating device; and a driven member that rotates the driven member in one of two directions at a rotational speed at which the driven member can follow. And rotates at substantially the same rotational speed in the same direction as the above, so that air supplied from the air supply port flows out to one connection port, and the exhaust of the pneumatic actuator flows into the other connection port and passes through the exhaust port. When the driven member is rotated in the opposite direction at a rotational speed at which the driven member can follow, the driven member also rotates at substantially the same rotational speed in the same direction as the driven member and is supplied from the air supply port. Gas to the other connection port Means for causing the exhaust of the pneumatically operated device to flow into the one connection port and to flow out through the exhaust port.
PCT/JP1992/001505 1991-11-20 1992-11-18 Air pressure operated apparatus and control apparatus for the same WO1993010359A1 (en)

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
JP32976491 1991-11-20
JP3/329764 1991-11-20
JP3693992A JPH05196008A (en) 1991-11-20 1992-01-29 Pneumatic action device and its controller
JP4/36939 1992-01-29

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WO (1) WO1993010359A1 (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5646152A (en) * 1994-06-15 1997-07-08 Pfizer Inc. Methods of administering CRF antagonists
US6248753B1 (en) 1994-06-16 2001-06-19 Pfizer Inc Bicyclic compounds

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5076495A (en) * 1973-11-09 1975-06-23
JPS5298877A (en) * 1976-02-16 1977-08-19 Kondo Jiyuutarou Rotary servo valve
JPH02296001A (en) * 1989-04-19 1990-12-06 Hydraulik Gmbh Device for controlling liquid pressure

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5076495A (en) * 1973-11-09 1975-06-23
JPS5298877A (en) * 1976-02-16 1977-08-19 Kondo Jiyuutarou Rotary servo valve
JPH02296001A (en) * 1989-04-19 1990-12-06 Hydraulik Gmbh Device for controlling liquid pressure

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5646152A (en) * 1994-06-15 1997-07-08 Pfizer Inc. Methods of administering CRF antagonists
US6248753B1 (en) 1994-06-16 2001-06-19 Pfizer Inc Bicyclic compounds

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