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WO1997047998A1 - Guide d'ondes optique et dispositif optique - Google Patents

Guide d'ondes optique et dispositif optique Download PDF

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Publication number
WO1997047998A1
WO1997047998A1 PCT/JP1997/002047 JP9702047W WO9747998A1 WO 1997047998 A1 WO1997047998 A1 WO 1997047998A1 JP 9702047 W JP9702047 W JP 9702047W WO 9747998 A1 WO9747998 A1 WO 9747998A1
Authority
WO
WIPO (PCT)
Prior art keywords
optical
optical waveguide
waveguide
core
propagation direction
Prior art date
Application number
PCT/JP1997/002047
Other languages
English (en)
Japanese (ja)
Inventor
Ryoji Inaba
Miwa Kato
Masakazu Sagawa
Haruo Akahoshi
Masaya Horino
Kazutaka Sato
Masato Isogai
Original Assignee
Hitachi, Ltd.
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi, Ltd. filed Critical Hitachi, Ltd.
Publication of WO1997047998A1 publication Critical patent/WO1997047998A1/fr

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Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B6/122—Basic optical elements, e.g. light-guiding paths
    • G02B6/1228—Tapered waveguides, e.g. integrated spot-size transformers
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B2006/12166—Manufacturing methods
    • G02B2006/12195—Tapering
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/26—Optical coupling means
    • G02B6/30—Optical coupling means for use between fibre and thin-film device
    • G02B6/305—Optical coupling means for use between fibre and thin-film device and having an integrated mode-size expanding section, e.g. tapered waveguide
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/42—Coupling light guides with opto-electronic elements
    • G02B6/4201—Packages, e.g. shape, construction, internal or external details
    • G02B6/4246—Bidirectionally operating package structures

Definitions

  • the present invention relates to a mode field diameter conversion optical waveguide, an optical fiber, an optical switch, an optical input / output device, and a method of manufacturing an optical waveguide.
  • the first effect is to reduce the positioning accuracy in connecting optical waveguides and optical fibers.
  • it is necessary to adjust the optical axis in the micron order.
  • the mode field diameter conversion technology can increase the mode field diameter at the connection part, the tolerance of the connection can be reduced.
  • the second effect is higher connection efficiency of optical elements having different mode field diameters.
  • the connection between the high ⁇ optical waveguide and the normal ⁇ optical waveguide, or the connection between the waveguide and the laser diode, is due to the difference in the mode fields at the respective input / output end faces. The problem is that the resulting coupling loss at the connection is large. By matching the mode field diameter at the connection part by the mode field diameter conversion, the connection can be made more efficient.
  • the third effect is that the connection between optical waveguides and optical fibers is This is an increase in the gap between the end faces. If the mode field diameter at the end face can be increased, the diffraction loss can be reduced and the gap between the end faces can be increased, and as a result, the thickness of the optical element that enters between the gaps can be reduced. Restrictions can be relaxed.
  • Japanese Patent Application Laid-Open No. 6-174980 discloses that a core size at an input / output end is expanded by a double core structure in which two types of tapered cores are superimposed at a waveguide input / output end. I do.
  • Japanese Patent Application Laid-Open No. 6-43330 discloses a mode filter by heating an input / output end face of a quartz waveguide and locally diffusing a dopant in a core at the input / output end face.
  • a mode conversion circuit for increasing the diameter of a node.
  • JP-A-1 96 604 the I'm particular irradiation with C 0 2 laser quartz waveguides, allowed change the refractive index of the core in the optical wave propagation direction, earthenware pots by the waveguide itself has the function of a lens
  • the disclosed optical device is disclosed.
  • Japanese Patent Application Laid-Open No. 6-43330 discloses a method of enlarging the mode diameter by locally diffusing the dopant in the core of the quartz waveguide at the input and output ends. It is necessary to heat the end face of the waveguide to 100 ° C. or higher. There is a limit in controlling the temperature of the waveguide locally at such a high temperature, and therefore, the refractive index distribution is produced as designed. It is very difficult to do. In addition, in this method, the same heat distribution must be applied to two adjacent waveguides in the waveguide array, and the mode diameter of only one of the waveguides needs to be converted. In such cases, application of this method is difficult.
  • one 96604 discloses a quartz waveguide obtained I'm particular irradiation with C 0 2 laser, the optical Device Lee scan the waveguide itself has the function of a lens, the Hare yo follows Problem. Said expression be one C 0 2 laser refractive index of silica I by the irradiation of utilizing the property of increasing, take the following Yo I Do fabrication process. On the lower quartz cladding formed by the flame deposition method, a quartz core containing a dopant and having a higher refractive index than the cladding is formed by the flame deposition method.
  • the lower cladding is also irradiated with light, so the refractive index distribution on the lower cladding along the light wave propagation direction Is formed. Since the refractive index of the upper clad formed after laser beam irradiation is constant in the light wave propagation direction, the difference in the refractive index between the lower clad and the upper clad is different in the light wave propagation direction. As a result, the symmetry of the waveguide is lost and the polarization dependence of the propagating light occurs. There were issues such as living. There are also the following problems.
  • the upper cladding sintering temperature has to be set lower at present, but the sintering of the upper cladding will be insufficient.
  • the present invention is achieved by the following description.
  • the gist is 1.
  • the optical waveguide whose mode field diameter increases or decreases at the input / output end, the optical waveguide is made of a polymer, and the core of the core in the optical waveguide cross-section perpendicular to the light wave propagation direction.
  • the optical waveguide is made of a polymer
  • the size of the core in the cross section of the optical waveguide perpendicular to the light wave propagation direction is constant irrespective of the position of the optical waveguide
  • the refractive index of the cladding is constant
  • the refractive index of the core changes along the light wave propagation direction
  • the core is composed of a polymer in which a pigment that increases the refractive index of the core when mixed with the polymer is dispersed or bonded,
  • a method for manufacturing an optical waveguide comprising:
  • the optical waveguide is made of a fluorinated polymer,
  • the fluorine content of the light wave propagation portion of the optical waveguide changes along the light wave propagation direction
  • the fluorinated polymer is a polymer represented by the above chemical formula, and a polymer obtained by introducing 1 C
  • 2in + 1 (m l to 5) into the polymer as an anonymous group.
  • An optical waveguide comprising:
  • the electron irradiation increases the refractive index of the fluorinated polymer
  • the refractive index of the electron beam irradiated part changes in the light wave propagation direction
  • a method for manufacturing an optical waveguide comprising:
  • the method for manufacturing an optical waveguide according to item 8 comprising: A method for manufacturing an optical waveguide, characterized in that the laser beam and the electron beam irradiation width are constant in the light wave propagation direction of the optical waveguide.
  • the electron beam is irradiated so that the electron beam irradiation density inside the polyimide thin film is higher than the surface of the polyimide thin film. Irradiate,
  • a method for manufacturing an optical waveguide comprising:
  • An optical waveguide characterized in that the contours of the refractive index distribution in the cross section of the optical waveguide consist only of convex curves.
  • ⁇ change region in which the refractive index difference m n between the waveguide core and the clad changes from ⁇ ⁇ to m n2 (m nl> A n 2) along the light wave propagation direction.
  • the purpose of this is to change the mode diameter of the propagating light in the ⁇ change region, and the cross-sectional shape of the core does not change along the light wave propagation direction.
  • An optical waveguide characterized in that an X- ⁇ plot, in which the coordinates of the ⁇ change region along the light wave propagation direction are the X-axis and ⁇ is the ⁇ -axis, is convex downward.
  • the beam diameter in the region where ⁇ ⁇ is ⁇ ⁇ 1 (double the beam radius at which the electric field intensity becomes e when the maximum electric field intensity at the beam center is 1) is d,
  • the beam diameter in the region where ⁇ is m n 2 is defined as d 2
  • the beam expansion ratio dz / d is defined as «.
  • a refractive index difference ⁇ between the waveguide core and the cladding ⁇ changes from ⁇ to ⁇ 2 ( ⁇ 1> 2 ⁇ 2) along the light wave propagation direction. The purpose of this is to change the mode diameter of the propagating light in the ⁇ change region, and the cross-sectional shape of the core does not change along the light wave propagation direction.
  • An optical waveguide characterized by being in a region surrounded by a curved line represented by the curve.
  • optical waveguides cut in any of paragraphs 12, 13, 14, and 15 An optical waveguide, wherein the optical waveguide is made of a polymer.
  • optical waveguide according to item 16 wherein the core of the optical waveguide is composed of a polymer in which a pigment that increases the refractive index of the core when mixed with the polymer is dispersed or bonded, 3.
  • the dye content varies along a light wave propagation direction.
  • a method of manufacturing an optical waveguide comprising: controlling a light irradiation amount on the core to form a refractive index distribution in a light wave propagation direction of the core.
  • optical waveguide according to item 18, wherein the waveguide is made of a fluorinated polymer, and the fluorine content of the light wave propagating portion of the waveguide changes along the light propagation direction.
  • a method of manufacturing an optical waveguide characterized in that the refractive index of an electron beam irradiated portion changes in the light wave propagation direction by changing the refractive index along the light wave propagation direction.
  • An optical waveguide or an optical fiber characterized in that a ⁇ - ⁇ plot with the coordinate of the ⁇ change region along the light wave propagation direction as the X axis and ⁇ as the ⁇ axis is convex downward. .
  • optical fiber array including an optical waveguide whose mode field diameter at the human output end expands or contracts, terms 1 to 3, 5 to 7, 11 to 17, 19, and 20.
  • An optical fiber array comprising the optical waveguide or the optical fiber described in any one of 20 to 22 to 24.
  • optical waveguide whose mode field diameter does not change, and any one of claims 1 to 3, 5 to 7, 11 to 17, 19, 20, 22 to 24.
  • Optical waveguide or optical fiber is placed adjacent to
  • An optical fiber array characterized in that:
  • Mode field diameter at the input / output end described in any one of items 1 to 3, 5 to 7, 11 to 17, 19, 20 and 22 to 24 An optical input / output device that includes an optical waveguide that expands or contracts.
  • the optical waveguide on the side with the smaller core diameter is the ⁇ control waveguide described in any one of Items 1-3, 5-7, 11-17, 19, 20 and 22-24.
  • a connection form characterized by:
  • FIG. 2 9. Includes a ⁇ -shaped polymer waveguide and a heating means for locally heating the waveguide, and an optical path switching switch substrate for switching the optical path of the waveguide by a local temperature change of the polymer.
  • An optical path switching device including an optical fiber or an optical waveguide for introducing input light into the optical path switching switch substrate or deriving output light from the optical path switching switch substrate.
  • a light path switching device comprising the ⁇ control waveguide according to any one of claims 1 to 3, 5 to 7, 11 to 17, 19, 20, 22 to 24. .
  • One or more transmitting optical waveguides or fibers and two or more receiving optical waveguides Select only one receiving optical waveguide or optical fiber to be connected to the emitting end of the transmitting optical waveguide or optical fiber, and to select only one receiving optical waveguide or optical fiber.
  • a specific receiving optical waveguide or an optical fiber to another receiving optical fiber.
  • 3 1 Includes one or more outgoing optical waveguides or optical fibers and two or more receiving optical waveguides or optical fibers, with the outgoing end of the outgoing optical waveguide or optical fiber.
  • An optical path switching switch characterized in that an optical waveguide or an optical fiber is connected by abutting an end face having a diameter n of ⁇ 2.
  • 3 2 including one or more transmitting optical waveguides or fibers and two or more receiving optical waveguides or fibers, the emitting end of the transmitting optical waveguide or fiber.
  • an optical input / output device including a laser diode, an optical waveguide in which the laser oscillation wavelength light is guided in a single mode in a fiber, and an optical fiber,
  • the optical waveguide is the optical waveguide according to any one of Items 12 to 17, 19 and 20, and the optical fiber is the optical waveguide according to any one of Items 22 to 24.
  • the optical fiber described above characterized in that the optical waveguide and the optical fiber are connected by abutting an end face where ⁇ of the optical fiber and ⁇ are ⁇ 2. I / O device to perform.
  • an optical waveguide with an optical element or an optical fiber in which an optical element such as a wavelength selection filter or a polarizing element is pushed between optical fibers or optical fibers, an optical waveguide sandwiching the optical element. Is the region including the end face of the optical fiber on the optical element side, as described in any one of the items 1 to 3, 5 to 7, 11 to 17, 19, 20 and 22 to 24.
  • An optical waveguide with an optical element or an optical fiber which is an optical waveguide or an optical fiber.
  • An optical input / output device including a laser diode, an optical waveguide in which the laser oscillation wavelength light is guided in a single mode in a fiber, and an optical fiber. And the optical waveguide or optical fiber described in the items 1 to 3, 5 to 7, 11 to 17, 19, 20 and 22 to 24. Optical input / output device.
  • the laser diode and the laser oscillation wavelength light are guided in a single mode in the fiber, and the mode diameter of the mode is different from the mode diameter of the laser beam at the emission end of the laser diode.
  • an optical input / output device including an optical fiber and
  • the refractive index difference ⁇ between the waveguide core and the cladding along the light wave propagation direction is ⁇ 1 from ⁇ 1 to ⁇ 2 ( ⁇ 1 > ⁇ ⁇ 2).
  • the purpose is to change the mode diameter of the propagating light in the ⁇ change region by having the An change region that changes in
  • the mode on the optical fiber side end face of the optical waveguide should be such that the diameter matches the mode diameter of the laser diode and the coupling efficiency between the optical waveguide and the optical fiber is 90% or more.
  • the refractive index difference ⁇ between the core and the cladding of the waveguide changes from ⁇ to ⁇ 2 ( ⁇ 1> ⁇ 2>) along the lightwave propagation direction.
  • the purpose is to change the mode diameter of propagating light in the ⁇ change region by having the ⁇ change region, and the cross-sectional shape of the core does not change along the light wave propagation direction.
  • the beam diameter in the region where ⁇ ⁇ is ⁇ ⁇ 1 (two times the beam radius at which the electric field intensity becomes e ⁇ 2 when the maximum electric field intensity at the beam center is 1) is
  • ⁇ ⁇ is ⁇ ⁇ 2 is defined as d 2
  • the beam expansion rate is defined as d 2 Z d
  • Beam expansion ratio We propose an optical waveguide characterized by being in the hatched area in the above figure.
  • ⁇ is an amount determined from the single-mode waveguide condition of the waveguide.
  • the refractive index of the clad is 1.5
  • the cross-sectional shape of the waveguide is 8 ⁇ 8.
  • ⁇ ⁇ 1 0.045 from the condition of single mode waveguide.
  • ⁇ from ⁇ 1 to ⁇ 2 ( ⁇ 1) 112 along the light wave propagation direction.
  • Change to 11) change The following results were obtained as a result of fabricating and examining an optical waveguide having a region and the cross-sectional shape of the core not changing along the light wave propagation direction.
  • the deviation tolerance is a quantity representing the degree of tolerance and is defined as follows. The end faces of the two waveguides are attached to each other, light is propagated from one waveguide to the other waveguide, and the intensity of the propagated light is measured.
  • the coupling efficiency is defined as the maximum propagating light intensity when the waveguides are connected to each other with a constant ⁇ n of ⁇ n 1 and an intensity ratio therewith.
  • ⁇ 0.2 to 0.33 is optimal
  • the coupling efficiency and the allowable deviation value in the optimal ⁇ distribution function form ⁇ ( ⁇ ⁇ ) obtained as described above depend on the set value of ⁇ 2.
  • the optical waveguide can be manufactured, for example, by the following method.
  • the same type of polymer or a polymer with almost the same refractive index is used for the core and the cladding of the optical waveguide, and the core is made of a dispersive thread 1 (DR 1).
  • DR 1 dispersive thread 1
  • the refractive index of the polymer is increased, and at the same time, a dye is added that causes bleaching (bleaching) by light irradiation and lowers the refractive index.
  • the incorporation of this dye makes the refractive index of the core higher than that of the clad and forms a waveguide.
  • the dye may be dispersed in the polymer or may be in a state of being bound to the polymer.
  • the core is irradiated with light absorbed by the dye in the core, thereby locally reducing the refractive index of the core.
  • the width of decrease in the refractive index can be controlled by the amount of light irradiation, by changing the irradiation time along the propagation direction of light in the waveguide, The refractive index distribution in the light wave propagation direction can be formed on the core.
  • light irradiation may be performed before patterning the core on a straight line, a curve, or the like, or light irradiation may be performed after patterning.
  • the core is patterned, the upper cladding is formed, and then the light is irradiated to form the core refractive index distribution in the light wave propagation direction. You can do it.
  • the irradiation light is not absorbed by the cladding substrate, light irradiation can be performed from both above and below the core, so that there is no unevenness in the waveguide cross section.
  • the irradiation light is not absorbed by the cladding and the substrate, because it can generate bl each inng.
  • DR 1 was used as a dye for increasing the refractive index.
  • the dye is such that when mixed with a polymer, the refractive index of the molecule increases, and
  • any molecule whose refractive index is reduced by light irradiation, electron beam irradiation, ion beam irradiation, or the like can be used as a dye molecule mixed into a polymer.
  • the optical waveguide of the present invention can be manufactured even with a polymer whose refractive index changes by light irradiation, electron beam irradiation, or ion beam irradiation.
  • a polymer having such properties for example, a fluorinated polyimide is used. Fluorinated polyimides are described in Applied Optics, Volume 34, page 104.
  • the electron beam source may be fixed and the polymer film may be destroyed, or the polymer may be fixed and the electron beam source may be moved.
  • the lower cladding, core, and upper cladding can be used. Can be manufactured. At this time, the refractive index distribution of the core does not change even after the upper clad is imidized.
  • a quartz optical waveguide is irradiated Ri by the C 0 2 laser, in JP-1- 96604 JP method of forming a refractive index distribution, in order to save the refractive index profile of the core, upper click La
  • the sintering of the head may be insufficient, such a problem does not occur in the method of the present invention.
  • the shape of the optical waveguide manufactured in this manner in a cross section perpendicular to the light wave propagation direction depends on the irradiation width of the electron beam and the energy of the electron.
  • the optical waveguide can be controlled. It is symmetrical and has little polarization dependence.
  • the polyimide used in the present invention covers all polyimides whose refractive index can be controlled by electron beam irradiation.
  • Examples include mid copolymers, polyimide mixtures, and those to which additives are added as necessary.
  • Tetracarboxylic acid is composed of pyromellitic acid, methylpyromellitic acid, dimethylpyromellitic acid, dibutyl pyrpyromellitic acid, ethylpyromellitic acid, bis ⁇ 3,5-dimethylphenic acid.
  • Nonoxy ⁇ pyromellitic acid is composed of pyromellitic acid, methylpyromellitic acid, dimethylpyromellitic acid, dibutyl pyrpyromellitic acid, ethylpyromellitic acid, bis ⁇ 3,5-dimethylphenic acid.
  • 2,3,3 ', 4'-biphenyltetracarboxylic acid 5,5'-dimethyl-3,3', 4,4'-tetraphenylpropoxybiphenyl, 2,2 ', 5, 5'-tetramethyl-3-, 3 ', 4,4'-tetracarboxybiphenyl, 1,4-bis (3,4-dicarboxyphenoxy) biphenyl, bis ⁇ (methyl) dicaroxyphenoxy ⁇ Biphenyl, bis ⁇ (methyl) dicarboxyphenyl ⁇ (dimethyl) biphenyl and bis (dicarboxyphenyl) (dimethyl) biphenyl.
  • Jimin examples include the following. 1,3-Diaminobenzene, 1,4-Diaminobenzene, 2,4-Diaminotoluene, 2,5-Diaminotoluene, 2,4-Diaminoxylene, Dimethylphenylenediamine, 2,4 diaminodulene, 2,3,5,6—tetramethyl-1-p—phenylenediamine, diamino-1-tetramethylbenzene, diaminoethylbenzene, 2,5— Diaminohexyl benzene, 2,5 diamino monobutyl benzene, 4 decanoloxy 1,3,3-diamino benzene, 4-butanoloxy 1,3,3-diamino benzene, 4 —Heptanoxyl 1,3—Diaminobenzene, 4-octanoloxy 1,3—Diamino benzene, 4-Phenoxy 1,3,3-Diaminobenzene, 4-Hexane 1,3-d
  • the method of irradiating an electron beam using a fluorinated polyimide is described.
  • the refractive index changes due to light irradiation, electron beam irradiation, and ion beam irradiation. It can be carried out using another polymer that satisfies the conditions.
  • the refractive index contour of the cross section of the optical waveguide formed by this method consists of only a convex curve, and the beam pattern has little disturbance.
  • the electron beam is forcibly forced to increase the electron beam irradiation density inside the film compared to the surface of the polyimide film, and the inside of the polyimide film is refracted.
  • the propagating light will be guided through the inside of the polyimide film, and a new upper cladding must be formed. Disappears.
  • the above shows the ⁇ n change region where the refractive index difference ⁇ between the waveguide core and the clad changes from ⁇ 1 to ⁇ 2 ( ⁇ l> ⁇ n2) along the light wave propagation direction.
  • the present invention relates to an optical waveguide having a core whose cross-sectional shape does not change along the light wave propagation direction.
  • the normalized frequency of the waveguide changes along the light wave propagation direction.
  • the refractive index of the core decreases and the core diameter increases as the distance from the end face increases.
  • the normalized frequency of the waveguide or the optical fin is constant.
  • the above description regarding the optimal ⁇ distribution function form when the normalized frequency changes is based on the case where the normalized frequency is constant. I found that it was true. That is, if the length L of the refractive index change region is sufficiently long, for example, 3 mm or more, the coordinate of the ⁇ change region along the light wave propagation direction is defined as the X-axis under a constant condition.
  • the above-described optical waveguide or optical fiber can be manufactured, for example, based on the following description.
  • the core of the quartz fiber is formed by a Ge dopant that increases the refractive index.
  • the dopant Ge is diffused, and the refractive index distribution changes. Since the diffusion coefficient of G e depends on the temperature, a temperature gradient is set so that the temperature of the fiber increases as it approaches the tip of the fiber, so that it approaches the end face of the fiber.
  • An optical waveguide with a larger mode field diameter is fabricated. In order to set a desired refractive index distribution in quartz, it is necessary to appropriately set the temperature distribution of the fiber when heating the fiber.
  • the temperature distribution of the fiber is controlled by a combination of a local cooling device or a heating device of the fiber.
  • a local cooling device for example, in an electric furnace equipped with a cooling gas blowing nozzle, the fiber is locally cooled by the cooling gas from the blowing nozzle while heating the fiber with the electric furnace.
  • the amount of air blown and the angle at which the gas is blown onto the fiber are also parameters for forming the refractive index distribution.
  • the mode-field diameter conversion optical waveguide fabricated as described above By applying the mode-field diameter conversion optical waveguide fabricated as described above to an optical switch that switches the optical path of an input optical signal, it is possible to utilize its effectiveness. it can.
  • the optical path switching switch is, for example, as follows.
  • Light path switching ⁇ The components of the switch are mounted on a plurality of cantilever beams, at least one cantilever beam, which are formed on a silicon substrate and are parallel to each other and connected by connecting members.
  • an actuator using a combination of a permanent magnet, a coil and a magnetic material is generally considered to be a force, which can be used for driving an optical switch.
  • Other suitable actuators include an actuator combining a magnetic material on a cantilever and a movable permanent magnet disposed outside the optical switch, and an actuator utilizing electrostatic force.
  • the optical waveguide or optical fiber of the present invention can be used as follows.
  • the gap between the end faces in the connecting city can be increased.
  • the gap between the end faces can be expanded four times.
  • Optical waveguide circuits often include a polarizing element or a wavelength selection filter in the circuit. In such a case, the thickness of the optical element to be inserted is restricted by the ordinary waveguide, but this restriction can be alleviated by using the mode field diameter conversion waveguide. .
  • Optical elements to be inserted include a polarizing element and a wavelength selection filter, but are not particularly limited thereto.
  • the optical waveguide or optical fiber of the present invention may be used as follows. Since the mode diameter at the emission end of the laser diode, which is a light source for 1.3 m wavelength light, and the mode diameter of the single-mode waveguide optical fiber for 1.3 zm light are different, the laser diode When optical fibers are directly connected, radiation loss occurs due to the difference in their core diameters.
  • the mode diameter conversion optical waveguide of the present invention is inserted between the laser diode and the optical fiber, and the mode diameter of the waveguide at the laser diode side end face of the optical waveguide is the same as that of the laser diode. Radiation loss can be greatly reduced if the mode diameter is the same as the mode diameter and the mode diameter at the optical fiber side end face of the optical waveguide matches the mode diameter of the optical fiber. .
  • the optical waveguide of the present invention can control the divergence angle of the outgoing beam, eliminating the need to mount a lens and simplifying the manufacturing process. It also has the advantage of eliminating reflection losses from the lens surface.
  • FIG. 1 is a distribution function of a refractive index difference m n between a core and a cladding of an optical waveguide according to the present invention.
  • the horizontal axis is the coordinates (unit: mm) of the waveguide along the light wave traveling direction.
  • FIG. 2 is a layout diagram of the deviation tolerance measurement.
  • FIG. 3 is a plot of the coupling efficiency deviation tolerance of the waveguide according to the present invention. It is. ⁇ at the coupling surface of the waveguide is equal to 0.02.
  • FIG. 6 is a plot of the coupling efficiency and the beam diameter expansion rate of the waveguide according to the present invention.
  • FIG. 7 is a schematic diagram of a refractive index distribution forming device.
  • FIG. 8 is a schematic view of an apparatus for forming a refractive index distribution optical fiber.
  • FIG. 9 is a perspective view of one embodiment of a waveguide type two-circuit one-two optical switch according to the present invention.
  • FIG. 10 is a top view of the waveguide-type two-circuit 1 ⁇ 2 optical switch shown in FIG.
  • FIG. 11 is a detailed view of the waveguide-type two-circuit 1 ⁇ 2 optical switch shown in FIG.
  • FIG. 12 is a schematic view of one embodiment of the optical input / output device according to the present invention.
  • FIG. 13 is a schematic view of an embodiment of an optical waveguide with an optical element according to the present invention.
  • FIG. 14 is a schematic view of one embodiment of the optical input / output device according to the present invention.
  • FIG. 15 is a schematic diagram of one embodiment of a waveguide connection mode according to the present invention.
  • FIG. 16 is a schematic diagram of one embodiment of a 1-shaped optical switch according to the present invention. is there.
  • connecting member 50 ... light input end, 51, 5 ... positioned cantilever, 53 ... end face of movable optical waveguide 42 a, 54 ... end face of fixed optical waveguide 48 a , 55: Mode field for propagating light, 61: Quartz substrate, 62: Laser diode, 63: Hole for installing laser diode, 64: Photo diode, 6 5... Photo diode installation 6 6... Waveguide ⁇ ⁇ -constant area, 6 7... Waveguide ⁇ ⁇ change area, 6 8... Waveguide end face, 6 9... Optical fiber fixing groove, 70... Optical fiber , 71: Optical fiber core, 72, 73: Mode field, 81: Silicon substrate, 82: Polymer layer, 83: Width micro Groove, 84, 85 ...
  • waveguide, 86 ... wavelength selection filter, 87 ... mode field, 91 ... quartz substrate, 92 ... laser diode, 93 ... Hole for installing laser diode, 94: ⁇ -constant region of waveguide, 95: ⁇ change region of waveguide, 96: waveguide end face, 97: mode field, 98 ... Optical fiber fixing groove, 9 9... Optical fiber, 100... Optical fiber core, 101- ⁇ ⁇ control optical waveguide core, 102- ⁇ ⁇ control optical waveguide ⁇ ⁇ -constant region, 103 to ⁇ ⁇ control optical waveguide refractive index change region, 10 4 — Waveguide end face of ⁇ ⁇ control optical waveguide, 105: Mode field of propagating light, waveguide with constant core diameter of 8 m at 106- ⁇ 0.045, A waveguide with a constant core diameter when 1 0 7 ...
  • n 0.09, a waveguide with a constant core diameter when 1 0 8 '' , 1 1 0... waveguide End face, 1x4 optical switch substrate, 1x4 optical switch substrate, 1x2 ... core of optical waveguide, 1x2 ... mode field, 1x2 ... thickness of 0.2 ⁇ Chromium electrode pattern, 125: Waveguide for introducing light to optical switch substrate 121, 126: Output optical fiber for guiding output from optical switch substrate 121 Iba. BEST MODE FOR CARRYING OUT THE INVENTION
  • a 3-inch diameter silicon wafer whose surface is a silicon oxide layer is provided on a silicon wafer, which is a precursor of the polyimide represented by the structural formula (1) ((-0.84).
  • a 1% by weight solution of amic acid in dimethyl acetate amide was applied by spin coating, and then applied at 100 ° C for 1 hour and then at 350 ° C for 30 minutes. Then, a lower cladding (film thickness: 20 / rn) was formed. Subsequently, on the surface of the lower cladding, in order to prevent the electron beam from being shaken by the charge-up during the irradiation of the electron beam, the surface of the fluorine-containing polyimide film is formed. Aluminum was deposited to a thickness of about 10 nm.
  • the fluorinated polyimide film was irradiated with an electron beam, the refractive index of the irradiated portion was increased, and a waveguide was drawn.
  • the acceleration energy of the electron beam is 25 keV, the irradiation width is 8 tm, and the length is
  • a waveguide with a linear pattern of 100 mm was drawn.
  • the refractive index increases according to the amount of electron irradiation. Therefore, by changing the electron irradiation amount along the light wave propagation direction, ⁇ n can be modulated along the light wave propagation direction.
  • the electron irradiation electron quantity was controlled as follows. The sample is set on a stage that can move in two axial directions perpendicular to the electron beam and perpendicular to each other. Electron beam current The irradiation time of the electron beam to the fluorinated polyimide film, that is, the amount of electron irradiation, was controlled by setting the constant and changing the moving speed of the stage.
  • the X-axis in Fig. 1 is the coordinates (unit: thigh) of the waveguide along the light wave traveling direction.
  • the aluminum layer on the drawn fluorinated polyimide film is removed with an etching solution, washed with water, and heated on a hot plate of 100 ° C. for 2 minutes.
  • the polyimide film was dried.
  • the deviation tolerance and the coupling efficiency are defined below. End faces of two waveguides
  • light is propagated from one waveguide to the other waveguide, and the transmitted light intensity is measured.
  • the difference between the position where the maximum output light intensity is given and the position where the lZe output intensity is given is the deviation tolerance. I do.
  • the maximum propagation light intensity when the waveguides are connected to each other with a constant ⁇ of ⁇ 1 is set to 1, and an intensity ratio thereof to the coupling efficiency.
  • the deviation tolerance is three times as large as that of the conventional waveguide, and if these function forms are approximately obtained, the coupling efficiency and the deviation tolerance close to the above characteristics can be obtained.
  • the X- ⁇ plot with the coordinates of the ⁇ change area along the light wave propagation direction as the X-axis and ⁇ as the ⁇ -axis becomes convex downward characteristics close to the optimum conditions can be obtained.
  • the ⁇ ⁇ change along the lightwave propagation direction was obtained.
  • Example 2 In the same manner as in Example 1, an optical waveguide in which ⁇ changes along the light wave propagation direction was manufactured. Table 2 summarizes the refractive index distributions of the fabricated waveguides (Examples 2a to 2y).
  • ⁇ ⁇ 0.004 45, and in the ⁇ ⁇ decreasing region, ⁇ ⁇ decreases.
  • Fig. 4 shows a plot of the allowable coupling efficiency deviation for 2a to 2y.
  • the refractive index distribution function type ⁇ ( ⁇ ) in the refractive index change region is the same, the longer the refractive index change region length L, the higher the coupling efficiency and the allowable deviation. If the length of the refractive index change region is fixed at a sufficiently long value, for example, 3 mm or more, the distribution of ⁇ becomes
  • the ⁇ - ⁇ plot in which the coordinates of the change area are the X axis and is the ⁇ axis, are convex downward, characteristics close to the optimal conditions could be obtained.
  • Example 3 In the same manner as in Example 1, an optical waveguide in which ⁇ changes along the light wave propagation direction was manufactured. Table 3 summarizes the refractive index distributions of the fabricated waveguides (Examples 3a to 3y). Table 3
  • Fig. 5 shows a plot of the allowable coupling efficiency deviation for 3a to 3y.
  • the refractive index distribution function form ⁇ (X) in the refractive index change region is the same, the longer the refractive index change region length L, the higher the coupling efficiency and the allowable deviation.
  • FIG. 6 shows the beam diameter in the region where ⁇ ⁇ is ⁇ ⁇ ((where the maximum electric field intensity at the center of the beam is 1 when the electric field intensity is e 2). twice) radius d, delta n is your Keru beam diameter delta n 2 area are d 2, the beam magnification in the d 2 / d] ⁇ to come to defined and n is delta n 2 Coupling efficiency and beam expansion ratio when connecting certain end faces
  • ⁇ is a plot of
  • the core is formed by resist coating and etching.
  • an optical waveguide having a length of 100 and a core shape of 8 ⁇ 8 m 2 was formed.
  • the DR1 content was adjusted so that the refractive index of the core 1 was higher by 0.045 (about 0.3%) than the refractive index of the clad.
  • the refractive index of the core is reduced. Since the width of decrease in the refractive index depends on the amount of laser beam irradiation, a change in the irradiation time can form a refractive index distribution in the light propagation direction of the waveguide.
  • the waveguide was irradiated with laser light using the laser light irradiation device shown in FIG. 7 to form a refractive index distribution in the light wave propagation direction.
  • the irradiation light is light 12 having a wavelength of 4888 nm of the argon ion laser 11.
  • the laser beam was bisected by the half mirror 13, and the waveguide 22 was irradiated with light from above and below using the mirrors 16 and 17.
  • the waveguide 22 was fixed to a sample holder 19 attached to a sample table 18 driven by a stepping motor.
  • the sample stage moves in one horizontal axis, but the moving direction of the sample stage and the direction of the linear pattern of the core are matched so that the linear pattern of the core does not deviate from within the laser beam when the sample stage moves. It is necessary.
  • the laser beam irradiation amount was controlled so as to obtain the same ⁇ distribution as in Example 1f.
  • X 0mni
  • X 4.6mni
  • ⁇ -constant region ⁇ -0.0045
  • X 4.6 mm
  • X 10 mm
  • a n 0.006.
  • the decrease in the refractive index in the ⁇ decrease region is mu X.
  • Example 4f In the same manner as in Example 1f, the allowable deviation and the coupling efficiency of Example 4f were measured. As a result, the deviation tolerance was 16 m, and the coupling efficiency was 90%, which almost coincides with the result of Example 1f.
  • the results of the waveguides of Examples 4a to 4h also substantially agreed with the results of the waveguides of Examples 1a to 1h, respectively.
  • the refractive index In an optical waveguide in which the color content of the core changes along the light wave propagation direction, the refractive index is the same as in the optical waveguide in which the fluorine content changes along the light wave propagation direction as in Example 1.
  • ⁇ 0.2 ⁇
  • excellent values are obtained for both the coupling efficiency and the allowable deviation.
  • these function forms are approximately obtained, it is possible to obtain a coupling efficiency and an allowable deviation value close to the above characteristics.
  • the X-Y plot with the X-axis as the coordinate of the ⁇ n change area along the light wave propagation direction and the Y-axis as ⁇ is convex downward the characteristics close to the optimal conditions will be obtained. I got it.
  • Quartz core is a silica glass doped with G e 0 2, ⁇ ⁇ 0.0 4 3, the light-off ⁇ core diameter of 8 mu Iotaita 8 It was inserted into an electric furnace 31 shown in the figure, and a temperature gradient was applied to the tip of the fiber 33.
  • the dopant Ge is diffused, and the refractive index distribution changes. Since the diffusion coefficient of Ge depends on the temperature, an appropriate temperature gradient is applied to the fiber to produce an optical waveguide whose mode field diameter increases as it approaches the end face.
  • the electric furnace 31 is provided with a cooling gas blow nozzle 32. The angle of this nozzle is adjustable, and the angle of air blow to the fiber can be adjusted.
  • Example 1 Using the temperature of the electric furnace 31, the angle of the blow nozzle 32, the blow volume, and the insertion length 34 of the fiber as setting parameters, a desired temperature distribution can be formed in the fiber, and the refractive index distribution can be designed. it can. In this way, the optical fiber was heated to produce a number of mode-converted optical fibers. From the optical fibers, optical fibers having the same function form of ⁇ distribution as those in Examples 1a to 1h were selected (Examples 5a to 5h). Example In the same manner as in 1, the deviation tolerance and the coupling efficiency were measured. As a result, the deviation tolerance and the coupling efficiency were almost the same as the result of Example 1.
  • the normalized frequency of the fiber is kept constant along the light wave propagation direction.
  • FIG. 9 is a perspective view of one embodiment of a waveguide type two-circuit 1 ⁇ 2 optical switch according to the present invention.
  • 41 is an optical fiber
  • 42 is a movable optical waveguide
  • 43 is a cantilever
  • 44 is a silicon substrate
  • 45 is a magnetic film
  • 46 is a coil electrode
  • 47 is a thin-film electromagnet.
  • Reference numeral 48 denotes a fixed optical waveguide.
  • FIG. 10 is a top view of one embodiment of a waveguide type two circuit 1 ⁇ 2 optical switch according to the present invention.
  • 42 a and 42 b are destructible optical waveguides
  • 46 a and 47 a are movable optical waveguides
  • 46 b and 47 b are Coil electrodes and thin-film electromagnets on the movable optical waveguide 42b side
  • 48a, 48b, 48c and 49d are fixed optical waveguides
  • 49a and 49b are optical input terminals. is there.
  • the figure shows a state before the power is supplied to the optical switch. Light input from the light input terminals 50 a and 50 b is transmitted to the movable optical waveguide 42 formed on the cantilever 43.
  • the ends of the cantilever beams 43 are connected by connecting members 49, and can be displaced in the plane of the silicon substrate while keeping them parallel to each other.
  • a magnetic film 45 is formed on the connecting member 49.
  • a thin film electromagnet 47 composed of a magnetic film, a permanent magnet and a thin film magnet is formed. Electric power is supplied to the thin electromagnet 47 from a power source (not shown) via the coil electrode 46. Turtle pressure can be set in the range of 3 to 10 volts.
  • the optical waveguide layer was manufactured by electron beam lithography.
  • the cantilever beam 4 3 Is displaced as shown by the broken line 51, and the movable optical waveguide 42a becomes the fixed optical waveguide 48a and the movable optical waveguide 42b becomes the fixed optical waveguide. 4 Connected to 8c.
  • the cantilever beam 43 is displaced as shown by a broken line 52, and the movable optical waveguide 42a becomes the fixed optical waveguide 48b, and the movable optical waveguide 42b becomes the fixed optical waveguide 48 ⁇ . Be closely related. This makes it possible to switch the optical path.
  • the length of the ⁇ ⁇ change region was set to 3.6 mm, and the distribution of ⁇ ⁇ in the ⁇ ⁇ change region
  • the allowable deviation is 17 ⁇
  • the coupling efficiency is 85%. Since the magnitude of the tolerance is about three times as large as that of the optical waveguide of the conventional method, the movable optical waveguide 42 a and the fixed type are used when the optical path is switched by an actuator. The allowable positioning accuracy of the optical waveguide 48a is approximately
  • FIG. 12 is a schematic view of one embodiment of the optical input / output device according to the present invention.
  • An optical waveguide was fabricated on a quartz substrate in the same manner as in Example 1f.
  • the moving speed of the moving stage in the refractive index change region 67 in the waveguide is increased toward the waveguide end face 68, and the moving stage is moved toward the waveguide end face 68.
  • the waveguide was drawn so that the refractive index gradually decreased.
  • the refractive index distribution function was made the same as in Example 1f so that the mode field diameter of the propagating light gradually increased toward the waveguide end face.
  • a hole 63 for installing a laser diode and a hole 65 for installing a photo diode were provided on the substrate 61, and a laser diode 62 and a photo diode 64 were provided respectively. Further, an optical fiber fixing groove 69 was provided, and an optical fiber 70 having a core diameter of 8 ⁇ was fixed.
  • the fixed optical fiber 70 is the same mode field diameter conversion optical waveguide as that of Example 5f.
  • the coupling efficiency is about 90%, which is almost the same as when using an optical waveguide and an optical fiber with a constant ⁇ , but the allowable deviation is about three times that of the connection.
  • An optical input / output device with a large tolerance was obtained.
  • FIG. 13 is a schematic view of an embodiment of an optical waveguide with an optical element according to the present invention.
  • a mode-field diameter-converting optical waveguide was fabricated on a silicon substrate in the same manner as in Example 1f.
  • the waveguide 8 of Example 1f is sandwiched between the grooves 83 of the radiation 75 formed by the dicing source so that the end face of the waveguide facing the groove has a low ⁇ . 4 and 85 were prepared.
  • a wavelength selection filter 86 having a width of 747 microns and transmitting only light having a wavelength of 1.3 m was inserted into the groove 83.
  • FIG. 14 is a schematic view of one embodiment of the optical input / output device according to the present invention.
  • An optical waveguide was fabricated on a quartz substrate in the same manner as in Example 2d.
  • the moving speed of the destroying stage is increased toward the waveguide end surface 96, and the refractive index gradually increases toward the waveguide end surface 96.
  • the waveguide is drawn so as to be reduced to a lower value, and the mode field diameter 97 of the propagating light is made to gradually expand toward the waveguide end face 96.
  • a waveguide different from waveguide 2 d in the following three points was manufactured. i)
  • the waveguide width is.
  • ⁇ of the waveguide 94 is 0.090, ⁇ decreases in the refractive index change region 95, and ⁇ is 0.0 at the waveguide end surface 96.
  • the refractive index modulation region length 95 is 5.4 mm, and the function form of ⁇ in this region is as follows:
  • a hole 93 for setting a laser diode was provided on the substrate 91, and a laser diode 92 having an oscillation wavelength of 1.3 ⁇ was set.
  • the output beam diameter of the laser diode is 4 ⁇ .
  • an optical fiber fixing groove 98 was provided, and an optical fiber 98 having a core diameter of 8 ⁇ was fixed.
  • the intensity of the light emitted from the optical fiber 98 in this apparatus was 85% of the light emitted from the laser diode 92.
  • FIG. 15 is a schematic view of one embodiment of a waveguide connection mode according to the present invention.
  • the core 101 of the optical waveguide was manufactured by electron beam lithography in the same manner as in Example 1f.
  • the moving speed of the moving stage is increased toward the waveguide end face 104, and the refractive index is gradually decreased toward the waveguide end face 104.
  • the waveguide core was drawn such that the diameter of the propagation light mode field 105 gradually increased toward the waveguide end face 104.
  • a waveguide different from the waveguide 1f was fabricated in the following three points. i)
  • the diameter of the core 101 shall be 46 m.
  • ⁇ of waveguide 101- ⁇ of constant region 102 is 0.0090, and ⁇ approaches waveguide end surface 104 in refractive index change region 103 , At the waveguide end face 104, ⁇ is set to 0.001 12.
  • the length 103 of the refractive index modulation region is 5.4 dragons, and the function type of ⁇ in this nod region is as follows:
  • the ⁇ n control optical waveguide was connected to a ⁇ n-constant waveguide 106 in which the core and the cladding were made of polyimide.
  • ⁇ In the constant waveguide 106, light having a wavelength of 1.3 ⁇ is guided in single mode, the core diameter is 8 / xm, and ⁇ is about 0.0045. is there.
  • a waveguide having a core diameter of 4 ⁇ and a constant ⁇ of 0.1 ⁇ m and a constant waveguide diameter of 107 was produced.
  • ⁇ a constant core diameter of 8 ⁇
  • ⁇ In the constant waveguide 108, light with a wavelength of 1.3 ⁇ Single mode waveguide.
  • the intensity of the light emitted from the waveguide end face 109 was 1.5 times that of the light emitted from the waveguide end face 110.
  • FIG. 16 is a schematic view of one embodiment of the L-shaped 1 ⁇ 4 optical switch according to the present invention.
  • the core 122 of the optical waveguide in the optical switch substrate 121 was produced by electron beam lithography in the same manner as in Example 1f.
  • the input / output part of the switch where the diameter of the mode field 123 changes is the ⁇ n control area, and ⁇ n becomes smaller toward the end face. .
  • the other part is the ⁇ -constant region.
  • the waveguide fabricated here differs from waveguide 1f in the following three points. i)
  • the diameter of the core 122 is 4 ⁇ .
  • ⁇ of the waveguide 122- ⁇ of the constant region is 0.090, and in the refractive index change region, the value of ⁇ decreases as approaching the waveguide end face, and at the waveguide end face, Is to make the value of ⁇ equal to 0.0012.
  • a chrome electrode pattern 124 with a thickness of 0.2 ⁇ was formed on the ephemeral cladding of the optical waveguide by resist processing. An appropriate current is passed through the chrome electrode, and the heat generated at that time causes the refractive index of the waveguide below the chrome electrode to be reduced. Change and perform the switching operation of the optical path. In this way, a Y-shaped IX4 optical switch substrate was obtained.
  • the above-mentioned Y-shaped optical switch substrate 121 is used as the output side light for guiding the output from the waveguide 125 that guides light to the optical switch substrate 121 and the optical switch substrate 121. Connected to fin.
  • the optical fiber used here has a core diameter of 8 ⁇ , in which light with a wavelength of 1.3 ⁇ m is guided in single mode.
  • the radius of curvature of the waveguide can be reduced, and a core diameter of 8 ⁇
  • the switch can be made more compact than when using the above waveguide.
  • radiation loss occurs due to the difference in those core diameters.
  • the radiation loss is maintained by taking advantage of the use of the high ⁇ waveguide by matching the mode diameter at the connection portion with the optical fiber. could be reduced.
  • the positioning accuracy in connection of an optical waveguide, an optical fiber, and the like can be relaxed.
  • the gap between the end faces of the optical fiber and the junction of the optical waveguide could be enlarged.
  • an optical function element such as a wavelength selection filter or a polarization element may be introduced into an optical transmission line such as an optical waveguide or an optical fiber.
  • the restriction on the thickness of the optical element to be introduced was relaxed.
  • the mode field diameter can be converted with low loss
  • optical elements with different mode field diameters such as laser diodes and optical fibers can be converted to low loss. You can now connect with.
  • Polya a precursor of fluorinated polyimide with the structure of the following chemical formula A varnish of midic acid was spin-coated on a quartz substrate 101, baked at about 350 ° C, and imidized.
  • the film thickness of the obtained sample 102 was about 2 Om. It is known that the refractive index of sample 102 increases when irradiated with an electron beam. Therefore, when the electron beam irradiated portion is patterned into the core shape of the optical waveguide, the optical waveguide can be drawn.
  • FIG. 17 is a schematic view of a refractive index distribution forming device.
  • the moving stage 107 of the refractive index distribution forming device drives the sample support 106.
  • a sample 102 formed on a quartz substrate 101 is placed on the sample support 106.
  • the moving direction of the sample stage 106 is two axes (X, Y) directions perpendicular to each other, and can move on the XY plane perpendicular to the electron beam 104 from the electron beam source 103.
  • the current of the electron beam 104 was set constant, the moving speed of the stage was changed, and the irradiation amount of the electron beam to the polymer was changed.
  • An optical waveguide was drawn by the following procedure. First, the moving stage is driven only in one axis direction (X axis), the electron beam current is 8 nA, and the electron beam scanning area (the electron beam irradiation area in the XY plane when the moving stage is fixed) is 4 times.
  • the optical waveguide 1 13 was drawn as X 4 ⁇ m 2 .
  • the sample was introduced into the Kameko beam from the end face 108 side, and the stage was driven at a constant speed until the point 110 shown by the broken line in Fig. 4. 0 9 was moved until it passed the electron beam.
  • the electron beam scanning area is set to 8 X 8 ⁇ 2, and this time the moving stage was moved rightward in FIG. 4, an optical waveguide was introduced into the electron beam from the end face 109 side, and an optical waveguide 114 was drawn. In this case, the moving speed was kept constant.
  • optical waveguides 115 and 116 were drawn, and as a result, four optical waveguides were drawn.
  • Polyamide acid a precursor of the same polyimide, was spin-coated on the drawn film, baked at 350 ° C., and imidized.
  • Fig. 18 shows the distribution of the mode field of the optical waveguide observed by cutting out the end faces 108 and 109 and then introducing light into the four optical waveguides from the end face 108.
  • FIG. The optical waveguides 113 and 115 with the mode fields gradually expanded and the optical waveguides I 14 and 116 with a constant mode field could be formed on the same substrate.
  • An accurate optical axis alignment can be achieved without using a lens in the optical coupling system for laser diodes, photo diodes, optical waveguides, optical fibers, etc., so that an optical module can be provided at low cost.

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Abstract

Cette invention concerne un guide d'ondes optique d'un système, dans lequel le diamère du noyau reste constant dans le sens de propagation des ondes optiques. Le diamètre d'un champ de mode au niveau des extrémités d'entrée et de sortie, est augmenté en diminuant la valeur Δn en direction de ces extrémités. La différence Δn représente la différence entre les indices de réfraction du noyau et du plaquage du guide d'onde, dans le sens de propagation des ondes optiques. Ce système permet d'améliorer l'efficacité de couplage ainsi que la tolérance lors d'une opération de connexion. La plage de variation de Δn varie de Δn1 à Δn2, étant entendu que Δn1 > Δn2. La forme de la section transversale de noyau ne varie pas dans le sens de la propagation des ondes optiques. Ce guide d'onde se caractérise par le fait que le point X-Y, où les axes X et Y représentent les coordonnées de la plage de variation Δn dans le sens de propagation des ondes optiques, et que Δn sont projetés respectivement vers le bas. Cette invention concerne également une fibre optique.
PCT/JP1997/002047 1996-06-14 1997-06-13 Guide d'ondes optique et dispositif optique WO1997047998A1 (fr)

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Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2002063362A1 (fr) * 2001-01-13 2002-08-15 Kamelian Limited Extenseur de mode optique
US7221826B2 (en) 2002-10-08 2007-05-22 Tdk Corporation Spot-size transformer, method of producing spot-size transformer and waveguide-embedded optical circuit using spot-size transformer
CN111373270A (zh) * 2017-11-22 2020-07-03 奇跃公司 热致动的悬臂梁光学扫描仪

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JPH01288802A (ja) * 1988-05-17 1989-11-21 Furukawa Electric Co Ltd:The 光導波路及びその製造方法
JPH03288102A (ja) * 1990-04-04 1991-12-18 Fujitsu Ltd 光ビーム形状変換素子
JPH05281443A (ja) * 1992-03-31 1993-10-29 Toshiba Corp 光結合方法
JPH0618739A (ja) * 1992-06-30 1994-01-28 Nitto Denko Corp 導波路の製造方法
JPH0651146A (ja) * 1992-08-04 1994-02-25 Nippon Telegr & Teleph Corp <Ntt> ポリイミドの屈折率変化方法
JPH07209537A (ja) * 1994-01-18 1995-08-11 Nippon Telegr & Teleph Corp <Ntt> ポリイミド光導波路の製造方法
JPH08220361A (ja) * 1995-02-14 1996-08-30 Sumitomo Electric Ind Ltd モードフィールド径変換ファイバ

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JPS61183609A (ja) * 1985-02-09 1986-08-16 Agency Of Ind Science & Technol イオン注入による光半導体装置の製造方法
JPH01288802A (ja) * 1988-05-17 1989-11-21 Furukawa Electric Co Ltd:The 光導波路及びその製造方法
JPH03288102A (ja) * 1990-04-04 1991-12-18 Fujitsu Ltd 光ビーム形状変換素子
JPH05281443A (ja) * 1992-03-31 1993-10-29 Toshiba Corp 光結合方法
JPH0618739A (ja) * 1992-06-30 1994-01-28 Nitto Denko Corp 導波路の製造方法
JPH0651146A (ja) * 1992-08-04 1994-02-25 Nippon Telegr & Teleph Corp <Ntt> ポリイミドの屈折率変化方法
JPH07209537A (ja) * 1994-01-18 1995-08-11 Nippon Telegr & Teleph Corp <Ntt> ポリイミド光導波路の製造方法
JPH08220361A (ja) * 1995-02-14 1996-08-30 Sumitomo Electric Ind Ltd モードフィールド径変換ファイバ

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2002063362A1 (fr) * 2001-01-13 2002-08-15 Kamelian Limited Extenseur de mode optique
US7221826B2 (en) 2002-10-08 2007-05-22 Tdk Corporation Spot-size transformer, method of producing spot-size transformer and waveguide-embedded optical circuit using spot-size transformer
US7236668B2 (en) 2002-10-08 2007-06-26 Tdk Corporation Spot-size transformer, method of producing spot-size transformer and waveguide-embedded optical circuit using spot-size transformer
CN111373270A (zh) * 2017-11-22 2020-07-03 奇跃公司 热致动的悬臂梁光学扫描仪
CN111373270B (zh) * 2017-11-22 2023-09-19 奇跃公司 热致动的悬臂梁光学扫描仪

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