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WO1997030527A1 - Source d'impulsions optiques - Google Patents

Source d'impulsions optiques Download PDF

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Publication number
WO1997030527A1
WO1997030527A1 PCT/GB1997/000379 GB9700379W WO9730527A1 WO 1997030527 A1 WO1997030527 A1 WO 1997030527A1 GB 9700379 W GB9700379 W GB 9700379W WO 9730527 A1 WO9730527 A1 WO 9730527A1
Authority
WO
WIPO (PCT)
Prior art keywords
optical
laser diode
semiconductor laser
optical pulse
source
Prior art date
Application number
PCT/GB1997/000379
Other languages
English (en)
Inventor
Paul Gunning
Kevin Smith
Russell Davey
Julian Kazimierz Lucek
David Graham Moodie
Derek Nesset
Original Assignee
British Telecommunications Public Limited Company
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from GBGB9603265.1A external-priority patent/GB9603265D0/en
Priority claimed from US08/648,611 external-priority patent/US5778015A/en
Priority claimed from GBGB9613345.9A external-priority patent/GB9613345D0/en
Priority to US09/043,480 priority Critical patent/US6208672B1/en
Priority to CA002245873A priority patent/CA2245873C/fr
Priority to DE69729548T priority patent/DE69729548T2/de
Application filed by British Telecommunications Public Limited Company filed Critical British Telecommunications Public Limited Company
Priority to EP97904525A priority patent/EP0880832B1/fr
Priority to JP9529083A priority patent/JP2000504883A/ja
Priority to AU17301/97A priority patent/AU717394B2/en
Priority to NZ331103A priority patent/NZ331103A/en
Publication of WO1997030527A1 publication Critical patent/WO1997030527A1/fr
Priority to NO983735A priority patent/NO983735L/no

Links

Classifications

    • HELECTRICITY
    • H04ELECTRIC COMMUNICATION TECHNIQUE
    • H04JMULTIPLEX COMMUNICATION
    • H04J14/00Optical multiplex systems
    • H04J14/08Time-division multiplex systems
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01SDEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S5/00Semiconductor lasers
    • H01S5/40Arrangement of two or more semiconductor lasers, not provided for in groups H01S5/02 - H01S5/30
    • H01S5/4006Injection locking
    • HELECTRICITY
    • H04ELECTRIC COMMUNICATION TECHNIQUE
    • H04BTRANSMISSION
    • H04B10/00Transmission systems employing electromagnetic waves other than radio-waves, e.g. infrared, visible or ultraviolet light, or employing corpuscular radiation, e.g. quantum communication
    • H04B10/50Transmitters
    • H04B10/501Structural aspects
    • H04B10/503Laser transmitters
    • H04B10/505Laser transmitters using external modulation
    • HELECTRICITY
    • H04ELECTRIC COMMUNICATION TECHNIQUE
    • H04BTRANSMISSION
    • H04B10/00Transmission systems employing electromagnetic waves other than radio-waves, e.g. infrared, visible or ultraviolet light, or employing corpuscular radiation, e.g. quantum communication
    • H04B10/50Transmitters
    • H04B10/508Pulse generation, e.g. generation of solitons

Definitions

  • the present invention relates to an optical pulse source.
  • a source might be used, for example, in a transmitter for a broadband optical network or in an optical interconnect.
  • Broadband optical networks are expected to operate at data transmission rates of 100Gb ⁇ t/s and beyond Operation at such rates places heavy demands on the optical sources used.
  • the repetition rate required of the pulse source may be less than the full bit rate, since the datastream at the full bit rate will typically be generated by multiplexing the optical source in the time domain.
  • the pulses output by the source need to be of short duration and desirably should have low temporal jitter
  • an optical pulse source comprising: a) a gain-switched semiconductor laser diode; b) a continuous wave light source which is coupled to the optical cavity of the semiconductor laser diode; c) an electro-optic amplitude modulator which is connected to the optical output of the semiconductor laser diode; and d) control inputs, located respectively on the semiconductor laser diode and on the electro-optic modulator, for applying synchronised modulating signals to the semiconductor laser diode and to the electro-optic modulator.
  • the present invention uses in combination a laser diode, injection of a cw beam into the laser diode cavity, and gating of the laser diode output using a synchronously driven amplitude modulator.
  • the present inventors have found that this combination provides a pulse source markedly superior to sources known hitherto.
  • a source embodying the present invention has produced pulses of 4 ps duration with temporal jitter of only 0.6ps. Such pulses are suitable for use at bit rates as high as 100Gb ⁇ t/s.
  • previously proposed directly modulated sources have not been capable of operation beyond 40Gb ⁇ t/s.
  • cw injection and amplitude gating are used in combination, there is a mutual interaction between their modes of operation, so that the quality of the output pulse is markedly superior to that produced when either of these two techniques is used in isolation.
  • the use of cw injection reduces the jitter in the signal input to the amplitude modulator and this eliminates many of the dispersion-related effects otherwise associated with the use of such a modulator.
  • the modulator largely eliminates the pedestal which would otherwise be present in the output pulse when cw injection is used.
  • Another advantage of the present invention is that the use of cw injection reduces the bias voltage required by the laser.
  • This makes the source particularly suitable for use, for example, in the laser array of an optical interconnect such as that disclosed in US Patent number 5,363,961 (Hamanaka) In such an array it is advantageous to reduce or eliminate the need for bias voltage, so as to reduce the overall power dissipation.
  • the semiconductor laser diode may be a distributed feedback semi- conductor laser diode (DFB-SLD) in which case preferably it has a buried heterojunction structure Alternatively a ridge waveguide DFB-SLD might be used
  • DFB-SLD distributed feedback semi- conductor laser diode
  • a ridge waveguide DFB-SLD might be used
  • the present invention is not however limited to the use of DFB lasers, and may also be implemented using, for example, Fabry-Perot Lasers (FPL), Vertical Cavity Surface Emitting Lasers, or Distributed Bragg Reflector Lasers
  • FPL Fabry-Perot Laser
  • An FPL is capable of emitting at several discrete wavelengths.
  • an external diffraction grating which may be bulk optic or fibre-based, is used to select one of several possible wavelengths corresponding to different longitudinal modes of the laser
  • the cw beam can be used in place of an external filter to select a given mode
  • the system then provides a pulse source tunable to different discrete wavelengths.
  • a source is particularly suitable for systems using WDM (wavelength division multiplexing) .
  • the electro-optic modulator is an electro-absorption modulator
  • Electro-absorption modulators exhibit strongly non-linear variation of device optical absorption characteristics under an applied reversed bias voltage. This makes them particularly suitable for use as the synchronously driven amplitude modulator in a system embodying the present invention.
  • the pulse source further comprises optical pulse shaping means connected on the output side of the modulator.
  • the pulse shaping means may comprise a length of normally dispersive fibre.
  • the shape of the pulses output from the source can be further enhanced using, for example, a length of normally dispersive fibre.
  • Alternatively other pulse shaping means may be used.
  • a suitable grating is disclosed, for example, in the paper by P. Gunning et al. at pp 1066-1067, ELECTRONICS LETTERS, 22 June 95, Vol. 31. No. 1 3 .
  • a method of generating optical pulses comprising: a) applying a first electrical modulating signal to a gate input of a gain- switched semiconductor laser diode; b) coupling continuous wave light into an optical cavity of the semiconductor laser diode; c) applying a second modulating signal, which is synchronised to the first electrical modulating signal, to a control input of an electro-optic amplitude modulator; and d) passing pulses output from the semiconductor laser diode through the electro-optic amplitude modulator.
  • FIG. 1 is a schematic of an optical source embodying the present invention
  • Figures 2a and 2b are oscilloscope traces showing the operation of the source with the cw light ON and OFF respectively;
  • Figure 3 is a plot of RF spectra for the source of Figure 1 ;
  • Figure 4 is an autocorrelation plot for the source of Figure 1 ;
  • Figure 5 is a graph showing the chirped output of the source of Figure 1 ;
  • Figure 6 is a schematic of a second embodiment
  • Figure 7 is a diagram showing a ridge-waveguide SLD for use in the source of Figure 1 ;
  • Figure 8 is a perspective view of an optical backplane interconnect
  • Figures 9a and 9b are schematics of further alternative embodiments using 3-port circulators
  • Figure 10 is a schematic of a computer communications network; and Figure 1 1 is a schematic of a further alternative network.
  • An optical pulse source comprises a gain-switched distributed feedback semiconductor laser diode (DFB-SLD) 1 and an electro-absorption modulator (EAM) 2 connected to the optical output of the DFB-SLD.
  • DFB-SLD distributed feedback semiconductor laser diode
  • EAM electro-absorption modulator
  • Light from a cw source 3 is coupled into the optical cavity of the DFB-SLD via a 50:50 coupler 4
  • the DFB- SLD 1 and modulator 2 are driven via their respective gates 1 1 , 21 by electrically phased-locked RF sources 1 2,22.
  • the optical components are connected together by lengths of optical fibre 5, and polarisation controllers PC are associated with the fibre at the output of the cw source 3, and on either side of the EAM 2
  • the frequency of the RF drive for the SLD 1 is 2.5GHz, while the frequency of the drive applied to the EAM is five times that at
  • a single RF source 63 at 2 5GHz is used to drive both the SLD and the EAM.
  • the drive to both devices is shaped using pulse generators 61 ,62 such as the coaxial step recovery diode comb generator available commercially as ELISRA Series MW1 5900
  • This arrangement has the advantage of only requiring a single signal source, and avoids the possibility of the four out of five unused pulses from the high frequency source of the first example giving rise to unwanted sub-pulses in the optical output
  • This example further differs from the first example in that the cw source , SLD and EAM are arranged in line, with light from the cw source coupled directly into the SLD, rather than indirectly via a 4-port coupler as in the first example.
  • This arrangement is particularly suitable for monolithic integrated construction, or for production using hybird integration and micro-optical bench technology.
  • the devices are formed as discrete components and subsequently mounted on a silicon micro-machined optical bench, as described in the paper by Collins J.V. et al., Electron. Lett, 31 , (9) pp730-731 .
  • Figures 9a and 9b show further alternative systems embodying the invention.
  • the topology of Figure 9a corresponds generally to that of Figure 6.
  • the system differs in that it uses a fibre grating 91 coupled to the output of the EAM via an optical circulator 92.
  • the grating functions to compress the pulse in the same manner as the dispersive fibre in the system of Figure 1 .
  • the circulator is a 3-port device which has the advantage of significantly lower coupling losses by comparison with the 4-port coupler of Figure 1 .
  • the system of Figure 9b corresponds generally to that of Figure 1 , but again uses a circulator in place of the 4-port coupler, and a grating in place of normally dispersive fibre.
  • a suitable circulator for use in these systems is that available from E-Tek, model no.PIFC210041000.
  • the 2.5GHz electrical sine wave generated by the first RF source 1 2 is amplified and combined with an adjustable DC bias current via a bias-tee 1 21 This enables gain switching of the DFB-SLD 1
  • the DFB-SLD 1 is contained within a high-speed package.
  • the DFB-SLD is a p side-up ridge-waveguide device with a centre wavelength of 1 546.5mm and threshold current of 39. mA at 1 5°C.
  • the DFB temperature and DC bias current are maintained at 1 5°C and 60mA, respectively.
  • the electrical signal to the DFB package has a peak-to-peak voltage of - 10 volts across a 50 ⁇ load.
  • the gain-switched optical pulse stream that results has a mean optical power of approximately -3dBm and is injected into the top arm of a 50/50 coupler 4 This port is denoted port 1 in Figure 1 .
  • the cw source 3 is a tunable HP 81 68 external cavity optical source This injects light through port 2 of the 50/50 coupler into the gain-switched DFB-SLD cavity.
  • a set of polarisation controllers 5 is used to alter the polarisation state of the injected light before it passes through an optical isolator 6 and enters the cavity of the DFB-SLD.
  • Port 4 of the 50/50 coupler is used to monitor the injected cw light.
  • Gain-switched pulses exit port 3 pass through an optical isolator 7 and are filtered by a 1 .1 nm bandpass filter to remove spectral extremities and to reduce the non- linear chirp.
  • the resulting signal is injected into an Erbium-doped Fibre Amplifier (EDFA).
  • EDFA Erbium-doped Fibre Amplifier
  • the output of the EDFA passes through a further filter 10 and polarisation controller 1 1 .
  • the chirp present in the signal is shown in Figure 5, in which the ringed area corresponds to non-linear chirp.
  • the EDFA boosted the power to the EAM to + 4dBm.
  • the EAM employs an InGaAsP/lnGaAsP multiple quantum well absorber layer in a low capacitance buried ridge structure comprising a O. ⁇ m wide active mesa encased in a 5 ⁇ m thick Fe-doped InP blocking structure.
  • the modulator is 370 ⁇ m long and is fully packaged in a high speed connecto ⁇ sed fibre-pigtailed module. At 1 550nm the fibre-to-fibre insertion loss of the module was 7.3dB, its modulation depth was 30.4dB and it 3dB electrical bandwidth was 14GHz.
  • the EAM is driven by a 1 2.5GHz electrical sine wave generated by a separate frequency synthesiser 220 and amplified by a 26GHz amplifier The drive signal is applied via a contact 21 0.
  • the EAM is further described in Moodie et al , Electron Lett, 94 vol 30(20) pp 1 700-1 701 .
  • the two RF sources are frequency-locked and an adjustable electrical delay line 14 is used to allow temporal adjustment of the switching window of the EAM with respect to the gain-switched pulses.
  • Figure 2 shows results obtained using the persistence facility of a high ⁇ speed sampling oscilloscope.
  • Figure 2(a) demonstrates the beneficial effect of cw light injection in suppressing the temporal jitter of the gain-switched optical pulses. In contrast.
  • Figure 2(b) was recorded without cw light injection and shows reduced pulse definition: this is indicative of timing jitter.
  • Figure 2 also shows that cw light injection advances the turn-on of the gain-switched pulses by — 1 5-20 ps.
  • Figure 3 reproduces the RF spectra obtained with: (a) cw light injection off, (b) cw light injection on (injected power was -8.4dBm, wavelength 1 547,6nm,) and (c) background noise-floor (no optical power incident to RF spectrum analyser).
  • the results show that, without the EAM, broadened pulses are produced and are accompanied by an increased pulse pedestal.
  • the EAM driven at 1 2 5 GHz acts as a temporal filter and counters this undesirable effect.
  • the autocorrelations displayed in figures 4(a) & 4(b) indicate the pedestal suppression obtained.
  • the pedestal-suppressed pulses have a temporal Full-width Half- maximum (FWHM) of 6.2ps (4. Ops sech 2 ) and a spectral FWHM of 1 .1 nm after passage through the normally dispersive fibre, giving a time-bandwidth product ⁇ T ⁇ v of 0.56.
  • FWHM Temporal Full-width Half- maximum
  • the ridge waveguide DFB-SLD has the structure shown in Figure 7 and is described in Nelson et al., IEE Proc Pt. J, 132 ( 1 ),pp 1 2-1 9 and Westbrook et al. Electron. Lett, 20 (6), pp 225-226.
  • Figure 7 shows the etched trench 71 and the active region 72. The depth d of the trench is 1 .5 microns and the width w is 3 microns.
  • An alternative DFB-SLD structure such as a buried heterostructure might be used.
  • the buried heterostructure has an intrinsically lower DC bias requirement, so that, in combination with the reduced bias required as a result of cw injection, the laser may operate with zero bias
  • the pulse source would then be particularly well suited for use in the laser array of an optical interconnect such as that shown in Figure 8.
  • the interconnect uses an optical backplane 83 of the type disclosed in the above-cited Hamanaka patent. For clarity just two cards are shown mounted to the backplane.
  • One card 81 includes a transmitter including an array of pulse sources each formed as described above. Light from these sources is transmitted via the bus 83 to a receiver on another card. At the receiver, the light from the pulse source array is received at an array of detectors.
  • Such an interconnect might be used, for example, in a network switch of an optical telecommunications system, or in a computer system.
  • the invention may be implemented using a variety of other semiconductor laser diode types.
  • the use of a Fabry Perot Laser potentially offers reduced fabrication costs, together with the possibility of tuning the source over a number of discrete wavelengths.
  • a suitable FPL using a multiple quantum well (MQW) structure is disclosed in Lealman et al. Electron Lett, 27, ( 1 3), pp 1 1 91 -1 1 93.
  • a stand-alone external cavity laser was used as the cw source, desirably an integrated semiconductor source would be used.
  • a further DFB-SLD might be used as the cw source.
  • a source embodying the present invention might be used, for example, in the network interface of a workstation connected to an optical fibre LAN or in a broadband interface for a multiprocessor computer system. Alternatively, it might be used in conjunction with the industry standard HIPPI parallel interface.
  • This interface architecture is based on 32/64 bit paths and is intended for use, for example, in providing a high bit-rate connection between a computer and peripherals such as an RAID mass storage device
  • a source embodying the present invention might be used in converting the parallel data stream from such an interface into a high bit rate serial OTDM data stream for communication via a broadband optical network.
  • Figure 10 shows schematically a computer communications network in which a number of computer systems 20 are interconnected via a fibre optic network 21
  • Each of the computer systems includes a respective network interface card 23.
  • the interface card modulates electrical data from the computer system onto an optical signal which is generated by an optical pulse source 24.
  • the source may for example have the configuration shown in Figure 9a.
  • Figure 1 1 shows another example of a network embodying the present invention. This uses an optical bus 1 1 2 having a re-entrant topology, as described and claimed in our copending European Patent Application no. 96304694.1 , filed 26.6.96, the contents of which are incorporated herein by reference.
  • the pulse source 1 1 1 which may have a configuration, for example, as shown in Figure 1 or in Figures 9a, 9b, is connected to the head of the network. It sends an optical clock signal downstream
  • Each of a series of nodes includes a first coupler 1 1 3 which couples the optical clock signal from one of two co-located optical waveguides in the bus to the node transmitter stage.
  • a single waveguide may be used with the clock and data pulses distinguishable by orthogonal polarisation states.
  • This stage modulates the clock signal and returns the modulated signal onto the other of the two waveguides, in a selected time slot in an OTDMA (optical time division multiple access) frame
  • Each node reads data from a second coupler connected to the said other of the two waveguides in a downstream location.
  • the enlarged detail shows the OTDMA multiplex which is formed in this manner.
  • the multiplex has a pulse separation of 25 picoseconds.

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  • Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Engineering & Computer Science (AREA)
  • Computer Networks & Wireless Communication (AREA)
  • Signal Processing (AREA)
  • Optics & Photonics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Optical Communication System (AREA)
  • Semiconductor Lasers (AREA)

Abstract

Une source d'impulsions optiques comporte une diode laser (1) à semi-conducteurs à commutation de gain. On soumet une lumière provenant d'un source continue d'ondes (3) à un couplage optique dans la cavité du laser et, à sa sortie du laser, cette lumière traverse un modulateur d'amplitude électro-optique (2). On applique des signaux synchronisés de modulation à la diode à semi-conducteurs ainsi qu'au modulateur d'amplitude. La source selon l'invention, qui produit de courtes impulsions optiques à scintillement et décollement faibles, se prête à une utilisation dans un réseau optique à bande large fonctionnant à un débit binaire élevé, de l'ordre de 100 Gbit/s sinon davantage, ou dans une interconnexion optique, par exemple.
PCT/GB1997/000379 1996-02-16 1997-02-07 Source d'impulsions optiques WO1997030527A1 (fr)

Priority Applications (8)

Application Number Priority Date Filing Date Title
NZ331103A NZ331103A (en) 1996-02-16 1997-02-07 Optical pulse source, including gain-switched laser diode
AU17301/97A AU717394B2 (en) 1996-02-16 1997-02-07 Optical pulse source
JP9529083A JP2000504883A (ja) 1996-02-16 1997-02-07 光パルスソース
CA002245873A CA2245873C (fr) 1996-02-16 1997-02-07 Source d'impulsions optiques
DE69729548T DE69729548T2 (de) 1996-02-16 1997-02-07 Quelle für optische pulse
US09/043,480 US6208672B1 (en) 1996-02-16 1997-02-07 Optical pulse source
EP97904525A EP0880832B1 (fr) 1996-02-16 1997-02-07 Source d'impulsions optiques
NO983735A NO983735L (no) 1996-02-16 1998-08-14 Optisk pulskilde

Applications Claiming Priority (9)

Application Number Priority Date Filing Date Title
EP96301079.8 1996-02-16
GBGB9603265.1A GB9603265D0 (en) 1996-02-16 1996-02-16 Optical pulse source
GB9603265.1 1996-02-16
EP96301079 1996-02-16
US08/648,611 US5778015A (en) 1996-05-16 1996-05-16 Optical Pulse source
GB9613345.9 1996-06-26
EP96304694.1 1996-06-26
GBGB9613345.9A GB9613345D0 (en) 1996-06-26 1996-06-26 Optical network
EP96304694 1996-06-26

Publications (1)

Publication Number Publication Date
WO1997030527A1 true WO1997030527A1 (fr) 1997-08-21

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Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/GB1997/000379 WO1997030527A1 (fr) 1996-02-16 1997-02-07 Source d'impulsions optiques

Country Status (2)

Country Link
CA (1) CA2245873C (fr)
WO (1) WO1997030527A1 (fr)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2001086768A1 (fr) * 2000-05-12 2001-11-15 Roke Manor Research Limited Dispositif de mise en forme d'impulsions laser
GB2494634A (en) * 2011-09-12 2013-03-20 Univ Dublin City Wavelength tunable gain-switched optical comb source
GB2540589A (en) * 2015-07-22 2017-01-25 Toshiba Res Europe Ltd An interference system and a method of fabricating an interference system
US9696133B2 (en) 2014-08-14 2017-07-04 Kabushiki Kaisha Toshiba Interference system and an interference method
GB2578790A (en) * 2018-11-09 2020-05-27 Toshiba Kk Optical device

Non-Patent Citations (4)

* Cited by examiner, † Cited by third party
Title
DONG-SUN SEO ET AL: "TIMING JITTER REDUCTION OF GAIN-SWITCHED DFB LASER BY EXTERNAL INJECTION-SEEDING", ELECTRONICS LETTERS, vol. 32, no. 1, 4 January 1996 (1996-01-04), pages 44/45, XP000553370 *
GUY M J ET AL: "LOW REPETITION RATE MASTER SOURCE FOR OPTICAL PROCESSING IN ULTRAHIGH-SPEED OTDM NETWORKS", ELECTRONICS LETTERS, vol. 31, no. 20, 28 September 1995 (1995-09-28), pages 1767 - 1769, XP000538098 *
JOICHI WAKITA ET AL: "SHORT OPTICAL PULSE GENERATION AND MODULATION BY A MULTI-SECTION MQW MODULATOR/DFB LASER INTEGRATED LIGHT SOURCE", IEICE TRANSACTIONS ON ELECTRONICS, vol. E78-C, no. 1, 1 January 1995 (1995-01-01), pages 50 - 54, XP000495083 *
RAYBON G ET AL: "DIGITALLY ENCODED OPTICAL PULSE GENERATION FROM AN INTEGRATED DBR LASER-MODULATOR", PROCEEDINGS OF THE INTERNATIONAL SEMICONDUCTOR LASER CONFERENCE, MAUI, HAWAII, SEPT. 19 - 23, 1994, no. CONF. 14, 19 September 1994 (1994-09-19), INSTITUTE OF ELECTRICAL AND ELECTRONICS ENGINEERS, pages 43/44, XP000514828 *

Cited By (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2001086768A1 (fr) * 2000-05-12 2001-11-15 Roke Manor Research Limited Dispositif de mise en forme d'impulsions laser
US6882456B2 (en) 2000-05-12 2005-04-19 Roke Manor Research Limited Laser pulse shaping device
GB2494634A (en) * 2011-09-12 2013-03-20 Univ Dublin City Wavelength tunable gain-switched optical comb source
US9696133B2 (en) 2014-08-14 2017-07-04 Kabushiki Kaisha Toshiba Interference system and an interference method
GB2540589A (en) * 2015-07-22 2017-01-25 Toshiba Res Europe Ltd An interference system and a method of fabricating an interference system
GB2540589B (en) * 2015-07-22 2018-08-08 Toshiba Res Europe Limited An interference system and a method of fabricating an interference system
GB2578790A (en) * 2018-11-09 2020-05-27 Toshiba Kk Optical device
US11422235B2 (en) 2018-11-09 2022-08-23 Kabushiki Kaisha Toshiba Optical device
GB2578790B (en) * 2018-11-09 2023-02-15 Toshiba Kk A reference Laser, plurality of first optical components, and a plurality of second optical components integrated laterally on a semiconductor substrate

Also Published As

Publication number Publication date
CA2245873C (fr) 2002-11-26
CA2245873A1 (fr) 1997-08-21

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