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WO1997033140A1 - Dispositif et procede pour explorer optiquement des surfaces - Google Patents

Dispositif et procede pour explorer optiquement des surfaces Download PDF

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Publication number
WO1997033140A1
WO1997033140A1 PCT/EP1997/000898 EP9700898W WO9733140A1 WO 1997033140 A1 WO1997033140 A1 WO 1997033140A1 EP 9700898 W EP9700898 W EP 9700898W WO 9733140 A1 WO9733140 A1 WO 9733140A1
Authority
WO
WIPO (PCT)
Prior art keywords
light beam
mirror chip
scanning area
scanning
projection
Prior art date
Application number
PCT/EP1997/000898
Other languages
German (de)
English (en)
Inventor
Johannes Reichle
Andreas RÖNNER
Original Assignee
Eos Gmbh Electro Optical Systems
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Eos Gmbh Electro Optical Systems filed Critical Eos Gmbh Electro Optical Systems
Priority to AU20933/97A priority Critical patent/AU2093397A/en
Publication of WO1997033140A1 publication Critical patent/WO1997033140A1/fr

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
    • G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
    • G01B11/25—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures by projecting a pattern, e.g. one or more lines, moiré fringes on the object
    • G01B11/2536—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures by projecting a pattern, e.g. one or more lines, moiré fringes on the object using several gratings with variable grating pitch, projected on the object with the same angle of incidence

Definitions

  • the invention relates to a device and a method for the optical scanning of surfaces according to the preamble of claim 1 and claim 9.
  • Such a method is generally known under the terms triangulation, strip light projection, binary code method or Moir ⁇ method.
  • a stripe pattern is projected onto the surface to be scanned or measured and viewed by a CCD camera.
  • Information about the spatial position of each individual point on the surface can be obtained by projecting different phase positions (phase shift) or different lattice constants.
  • Either one or more line gratings with corresponding shifting or rotating mechanisms or an LCD projector are usually used to generate the fringe projection.
  • these known devices are not optimal with regard to strip contrast, reaction time when shifting or rotating, flexibility with regard to different measuring methods, size and price.
  • An important aspect of the invention is that the known devices for strip projection mentioned above are replaced by a mirror chip, for example of the DMD type.
  • a mirror chip was developed, for example, by Texas Instruments for use in projectors, printers and television sets and is described, for example, in the article by Larry J. Hornbeck, "Current Status of the Digital Micromirror Device (DMD) for Projection Television Applications ", International Electron Devices Meeting, December 5-8, 1993, Washington, US, or in Larry J.
  • the figure shows a measuring head 1 which is positioned to scan a scanning area 2 of the surface 3 opposite it.
  • the measuring head 1 has a projection device 4 and a viewing device 5.
  • the projection device 4 comprises a light source 6, for example a laser or a white light source in the form of a halogen lamp or a flash light, which emits a light beam 9, which is bundled via optics 7 and reflected on a mirror 8, at a predetermined angle, for example 20 °, aimed at a mirror chip 10 of the DMD type.
  • the known mirror chip has a multiplicity of micromirrors arranged in the form of a matrix, each individually by the deflection angle of one first stable position can be deflected into a second stable position.
  • Typical technical data are:
  • micromirrors that can be deflected jointly in columns or with micromirrors shaped like columns. Individual micromirrors can also be used in certain scanning methods such as triangulation.
  • the projection device 4 also has a projection lens 11 which projects a beam 16 reflected by the mirror chip 10 onto the scanning area 2 in accordance with the individual deflection of the micromirrors as a stripe pattern 12.
  • the viewing device 5 has a camera 13 with a CCD chip 14 and a viewing lens 15;
  • the lens 15 is set with its axis angularly with respect to the axis of the projection lens 11 so that the camera 13, 14 views the scanning area 2 via the viewing lens 15.
  • control unit for coupling and controlling the projection device 4, in particular for the selective control of the individual micromirrors of the mirror chip 10, and the viewing device 5 for carrying out the scanning and evaluation described below.
  • the measuring head 1 is positioned opposite a surface 3 to be scanned and the objectives 11 and 15 are each aligned with the scanning area 2.
  • Individual selected micromirrors in the mirror chip 10 are then controlled in such a way that they reflect the incident light beam 9 to the lens 11; For example, individual columns of the mirror field in the mirror chip 10 can be controlled so that the light beam 9 is reflected as a reflected beam 16 in the form of a strip pattern to the lens.
  • the part of the light beam 9 falling on the non-controlled micromirrors is deflected further by an angle corresponding to the deflection angle, so that the corresponding reflected beam 17 does not strike the objective 11.
  • the stripe pattern 12 is thus projected onto the scanning area 2 by the objective 11.
  • the stripe pattern projected onto the scanning area 2 is viewed by the camera 13 via the viewing lens 15. This is done in a manner known per se by evaluating the strip pattern on the surface 3, e.g. by comparison with a stored reference pattern, obtain geometric information about the surface that can be evaluated in the control unit or in a separate connected computer.
  • the control of the individual micromirrors and thus the projected stripe pattern can be selected according to the surface to be scanned; an adaptation to the surface, for example the gradients of the surface, and in accordance with the required accuracy and resolution is thus possible. Since the masses moved during the deflection of the micromirrors are very small, an extremely short deflection time (almost "real time") and thus a quick sequence of individual measurements or shifted strips is possible.
  • By deflecting either individual micromirrors or mirror groups, for example columns or rows a plurality of different measurement methods such as point triangulation, line triangulation, Moir ⁇ projection, strip light projection or absolute measurement by binary code method can be controlled by appropriate control be carried out in a single device. Further modifications of the described device are possible.
  • the projection device 4 can thus contain any other suitable light source, for example a sodium lamp, instead of the laser or the white light source.

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Computer Vision & Pattern Recognition (AREA)
  • Optics & Photonics (AREA)
  • Length Measuring Devices By Optical Means (AREA)

Abstract

Un dispositif permettant d'explorer optiquement une surface comporte de manière classique un dispositif de projection (4) destiné à projeter un faisceau lumineux (9, 12, 16) sur la surface (3) et un dispositif d'observation (5) destiné à observer la lumière (12) projetée sur la surface en biais par rapport au dispositif de projection. Dans le but d'améliorer la vitesse d'exploration ainsi que la précision, et de créer un dispositif d'exploration d'une grande souplesse d'emploi, le dispositif de projection (4) est pourvu d'une puce miroir (10), par exemple du type DMD (micromiroir numérique), permettant la déflexion contrôlée du faisceau lumineux (9).
PCT/EP1997/000898 1996-03-06 1997-02-25 Dispositif et procede pour explorer optiquement des surfaces WO1997033140A1 (fr)

Priority Applications (1)

Application Number Priority Date Filing Date Title
AU20933/97A AU2093397A (en) 1996-03-06 1997-02-25 Device and process for optically scanning surfaces

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE19608632.9 1996-03-06
DE1996108632 DE19608632B4 (de) 1996-03-06 1996-03-06 Vorrichtung zur Bestimmung der Topographie einer Oberfläche und Verfahren zu Bestimmen der Topographie einer Oberfläche

Publications (1)

Publication Number Publication Date
WO1997033140A1 true WO1997033140A1 (fr) 1997-09-12

Family

ID=7787378

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/EP1997/000898 WO1997033140A1 (fr) 1996-03-06 1997-02-25 Dispositif et procede pour explorer optiquement des surfaces

Country Status (3)

Country Link
AU (1) AU2093397A (fr)
DE (1) DE19608632B4 (fr)
WO (1) WO1997033140A1 (fr)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE10323317A1 (de) * 2003-05-23 2004-12-16 Conti Temic Microelectronic Gmbh Vorrichtung zur Ablenkung des Strahlenverlaufs in einem optischen System sowie Verwendung der Vorrichtung
US7317251B2 (en) 2003-04-11 2008-01-08 Infineon Technologies, Ag Multichip module including a plurality of semiconductor chips, and printed circuit board including a plurality of components
US9036159B2 (en) 2013-01-17 2015-05-19 Sypro Optics Gmbh Device for generating an optical dot pattern

Families Citing this family (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE19742264C2 (de) * 1997-09-25 2001-09-20 Vosseler Erste Patentverwertun Endoskop
DE19748967B4 (de) * 1997-11-06 2009-04-02 Bundesdruckerei Gmbh Verfahren und Vorrichtung zur Herstellung eines variablen Sicherheitshologramms
DE19757773A1 (de) * 1997-12-24 1999-07-01 Bernward Maehner Verfahren zur dreidimensionalen, detaillierten Simulation plastischer Veränderungen an menschlichen Körperpartien
DE19824709A1 (de) * 1998-06-03 1999-12-09 Bundesdruckerei Gmbh Erzeugung von Leuchtdichte-Arrays mit digitalem Array-Strahlungsprozessoren
DE10244819B4 (de) * 2002-09-26 2007-05-03 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Vorrichtung und Verfahren zur Detektion einer fluoreszierenden Substanz auf einer technischen Oberfläche
US7064810B2 (en) * 2003-09-15 2006-06-20 Deere & Company Optical range finder with directed attention
EP1706839B1 (fr) * 2004-01-15 2014-11-12 Technion Research & Development Foundation Limited Dispositif de balayage video tridimensionnel
DE102004050355A1 (de) * 2004-10-15 2006-04-27 Steinbichler Optotechnik Gmbh Verfahren und Vorrichtung zum Prüfen der Oberfläche eines Reifens
DE102006048234A1 (de) * 2006-10-11 2008-04-17 Steinbichler Optotechnik Gmbh Verfahren und Vorrichtung zur Bestimmung der 3D-Koordinaten eines Objekts
US8219274B2 (en) * 2009-07-02 2012-07-10 Robert Bosch Gmbh 3-dimensional perception system and method for mobile platform
US8274507B2 (en) 2009-07-02 2012-09-25 Robert Bosch Gmbh Method and apparatus for obtaining 3-dimensional data with a portable device
DE102010022827A1 (de) * 2010-06-05 2011-12-08 TSK Prüfsysteme GmbH Höhenvermessungs-Vorrichtung zur Höhenvermessung einer Kraftfahrzeug-Zentralelektrik
DE102012001307A1 (de) 2012-01-19 2013-07-25 Friedrich-Schiller-Universität Jena Verfahren und Vorrichtung zur 3D-Messung von Objekten, insbesondere unter hinderlichen Lichtverhältnissen
DE102012002161A1 (de) 2012-01-31 2013-08-01 Friedrich-Schiller-Universität Jena Verfahren und Vorrichtung zur 3D-Messung von Objekten
AT520794B1 (de) * 2017-12-20 2019-11-15 Prinoth Ag Schneefahrzeug
EP4431868B1 (fr) 2023-03-12 2025-10-01 CADstar Technology GmbH Scanner 3d pour balayer optiquement un objet à l'aide d'un motif lumineux

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5726706A (en) * 1980-07-24 1982-02-12 Mitsubishi Electric Corp Detector for shape of body
EP0460889A2 (fr) * 1990-06-06 1991-12-11 Texas Instruments Incorporated Système de suivi de piste optique

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3829925C2 (de) * 1988-09-02 1994-03-03 Kaltenbach & Voigt Vorrichtung zur optischen Vermessung von Zähnen in der Mundhöhle
US5208766A (en) * 1990-11-13 1993-05-04 Hughes Aircraft Company Automated evaluation of painted surface quality

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5726706A (en) * 1980-07-24 1982-02-12 Mitsubishi Electric Corp Detector for shape of body
EP0460889A2 (fr) * 1990-06-06 1991-12-11 Texas Instruments Incorporated Système de suivi de piste optique

Non-Patent Citations (7)

* Cited by examiner, † Cited by third party
Title
ENGELHARDT K: "OPTISCHE 3D-MESSTECHNIK MESSPRINZIPIEN, EIGENSCHAFTEN UND LIMITIERUNGEN", TECHNISCHE RUNDSCHAU, vol. 85, no. 31, 6 August 1993 (1993-08-06), BERN, CH, pages 44 - 51, XP000385451 *
HORNBECK L J: "CURRENT STATUS OF THE DIGITAL MICROMIRROR DEVICE (DMD) FOR PROJECTION TELEVISION APPARATUS", PROCEEDINGS OF THE INTERNATIONAL ELECTRON DEVICES MEETING, WASHINGTON, DEC. 5 - 8, 1993, 5 December 1993 (1993-12-05), INSTITUTE OF ELECTRICAL AND ELECTRONICS ENGINEERS, pages 381 - 384, XP000481639 *
HORNBECK L J: "DEFORMABLE-MIRROR SPATIAL LIGHT MODULATORS", SPATIAL LIGHT MODULATORS AND APPLICATIONS III, 7-8 AUGUST 1989, SAN DIEGO, vol. 1150, 7 August 1989 (1989-08-07), pages 86 - 102, XP000351394 *
KRAMER J ET AL: "AN INEXPENSIVE REAL-TIME 3-D CAMERA WITH A SMART OPTICAL SENSOR", SENSORS AND ACTUATORS A, vol. A31, no. 1 / 03, 1 March 1992 (1992-03-01), pages 241 - 244, XP000276433 *
PATENT ABSTRACTS OF JAPAN vol. 006, no. 088 (P - 118) 26 May 1982 (1982-05-26) *
SANSONI G ET AL: "A NOVEL, ADAPTIVE SYSTEM FOR 3-D OPTICAL PROFILOMETRY USING A LIQUID CRYSTAL LIGHT PROJECTOR", IEEE TRANSACTIONS ON INSTRUMENTATION AND MEASUREMENT, vol. 43, no. 4, August 1994 (1994-08-01), pages 558 - 565, XP000466818 *
WAGNER E P ET AL: "CONSTRUCTION AND EVALUATION OF A VISIBLE SPECTROMETER USING DIGITAL MICROMIRROR SPATIAL LIGHT MODULATION", APPLIED SPECTROSCOPY, vol. 49, no. 11, 1 November 1995 (1995-11-01), pages 1715 - 1719, XP000537252 *

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7317251B2 (en) 2003-04-11 2008-01-08 Infineon Technologies, Ag Multichip module including a plurality of semiconductor chips, and printed circuit board including a plurality of components
DE10323317A1 (de) * 2003-05-23 2004-12-16 Conti Temic Microelectronic Gmbh Vorrichtung zur Ablenkung des Strahlenverlaufs in einem optischen System sowie Verwendung der Vorrichtung
US9036159B2 (en) 2013-01-17 2015-05-19 Sypro Optics Gmbh Device for generating an optical dot pattern
US9441960B2 (en) 2013-01-17 2016-09-13 Sypro Optics Gmbh Device for generating an optical dot pattern

Also Published As

Publication number Publication date
DE19608632A1 (de) 1997-09-11
DE19608632B4 (de) 2005-12-29
AU2093397A (en) 1997-09-22

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