WO1998051993A1 - Dispositif servant a mesurer une hauteur - Google Patents
Dispositif servant a mesurer une hauteur Download PDFInfo
- Publication number
- WO1998051993A1 WO1998051993A1 PCT/JP1998/002160 JP9802160W WO9851993A1 WO 1998051993 A1 WO1998051993 A1 WO 1998051993A1 JP 9802160 W JP9802160 W JP 9802160W WO 9851993 A1 WO9851993 A1 WO 9851993A1
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- height
- optical
- sample
- pair
- detecting
- Prior art date
Links
- 230000003287 optical effect Effects 0.000 abstract 9
- 230000004907 flux Effects 0.000 abstract 2
- 238000005286 illumination Methods 0.000 abstract 1
- 238000003384 imaging method Methods 0.000 abstract 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
- G01B11/06—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material
- G01B11/0608—Height gauges
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Length Measuring Devices By Optical Means (AREA)
- Measurement Of Optical Distance (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US09/214,414 US6428171B1 (en) | 1997-05-16 | 1998-05-15 | Height measuring apparatus |
Applications Claiming Priority (8)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9/127189 | 1997-05-16 | ||
| JP12718997 | 1997-05-16 | ||
| JP9/257284 | 1997-09-22 | ||
| JP25728497 | 1997-09-22 | ||
| JP9/258550 | 1997-09-24 | ||
| JP25855097 | 1997-09-24 | ||
| JP6270798 | 1998-03-13 | ||
| JP10/62707 | 1998-03-13 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| WO1998051993A1 true WO1998051993A1 (fr) | 1998-11-19 |
Family
ID=27464208
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| PCT/JP1998/002160 WO1998051993A1 (fr) | 1997-05-16 | 1998-05-15 | Dispositif servant a mesurer une hauteur |
Country Status (2)
| Country | Link |
|---|---|
| US (1) | US6428171B1 (ja) |
| WO (1) | WO1998051993A1 (ja) |
Cited By (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2002311388A (ja) * | 2001-04-19 | 2002-10-23 | Nikon Corp | 光学系 |
| US6572139B2 (en) * | 1998-11-27 | 2003-06-03 | Hamamatsu Photonics K.K. | Occupant sensor and airbag control apparatus |
| US7336833B2 (en) | 2004-06-30 | 2008-02-26 | Given Imaging, Ltd. | Device, system, and method for reducing image data captured in-vivo |
| US7553276B2 (en) | 2001-01-16 | 2009-06-30 | Given Imaging Ltd. | Method and device for imaging body lumens |
| JP2012194085A (ja) * | 2011-03-17 | 2012-10-11 | Mitsubishi Electric Corp | エッジ検出装置 |
| US8639314B2 (en) | 2003-12-24 | 2014-01-28 | Given Imaging Ltd. | Device, system and method for in-vivo imaging of a body lumen |
| KR101830785B1 (ko) * | 2016-09-30 | 2018-02-21 | 기가비스주식회사 | 3차원 형상 측정장치 |
| WO2018096728A1 (ja) * | 2016-11-24 | 2018-05-31 | 株式会社新川 | ボンディング装置および被写体の高さ検出方法 |
| KR102040016B1 (ko) * | 2018-07-19 | 2019-11-05 | 한국과학기술연구원 | 레이저와 거울을 이용한 높이 측정 시스템 및 상기 시스템에 의해 수행되는 높이 측정 방법 |
Families Citing this family (26)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE10029680B4 (de) * | 2000-06-23 | 2016-06-16 | Leica Microsystems Cms Gmbh | Mikroskop-Aufbau |
| DE10328537B4 (de) * | 2003-06-24 | 2015-03-26 | Pixargus Gmbh | Vorrichtung und Verfahren zum Vermessen der Dimension eines Körpers |
| US7102740B2 (en) * | 2003-09-03 | 2006-09-05 | Xyratex Technology Ltd. | Method and system for determining surface feature characteristics using slit detectors |
| RU2253880C1 (ru) * | 2004-03-29 | 2005-06-10 | Военно-космическая академия им. А.Ф. Можайского | Высотомер летательного аппарата |
| US20050285025A1 (en) * | 2004-06-29 | 2005-12-29 | Mikhail Boukhny | Optical noninvasive pressure sensor |
| GB0416583D0 (en) * | 2004-07-23 | 2004-08-25 | Rwl Consultants Ltd | Access monitoring apparatus |
| JP2009058341A (ja) * | 2007-08-31 | 2009-03-19 | Sanyo Electric Co Ltd | ビーム照射装置およびレーザレーダ |
| KR20090062027A (ko) * | 2007-12-12 | 2009-06-17 | 삼성전기주식회사 | 3차원자세측정장치 및 이를 이용한 3차원자세측정방법 |
| EP2344019B1 (en) * | 2008-07-25 | 2013-11-27 | Helmholtz Zentrum München Deutsches Forschungszentrum für Gesundheit und Umwelt (GmbH) | Quantitative multi-spectral opto-acoustic tomography (msot) of tissue biomarkers |
| JP2010091289A (ja) * | 2008-10-03 | 2010-04-22 | Topcon Corp | 光波距離測定装置 |
| EP2449362B1 (en) | 2009-06-29 | 2016-09-28 | Helmholtz Zentrum München Deutsches Forschungszentrum für Gesundheit und Umwelt (GmbH) | Thermoacoustic imaging with quantitative extraction of absorption map |
| EP2459987A1 (en) | 2009-07-27 | 2012-06-06 | Helmholtz Zentrum München Deutsches Forschungszentrum für Gesundheit und Umwelt (GmbH) | Imaging device and method for optoacoustic imaging of small animals |
| ES2596655T3 (es) * | 2010-02-01 | 2017-01-11 | Illumina Inc. | Procedimientos de enfoque y sistemas y conjuntos ópticos que usan los mismos |
| WO2012030595A2 (en) | 2010-08-30 | 2012-03-08 | Alcon Research, Ltd. | Optical sensing system including electronically switched optical magnification |
| US9219885B2 (en) * | 2011-08-24 | 2015-12-22 | Delta Design, Inc. | Imaging system with defocused and aperture-cropped light sources for detecting surface characteristics |
| RU2501036C1 (ru) * | 2012-08-10 | 2013-12-10 | Александр Абрамович Часовской | Высотомер |
| EP2742854B1 (en) | 2012-12-11 | 2021-03-10 | iThera Medical GmbH | Handheld device and method for tomographic optoacoustic imaging of an object |
| EP2754388B1 (en) | 2013-01-15 | 2020-09-09 | Helmholtz Zentrum München Deutsches Forschungszentrum für Gesundheit und Umwelt GmbH | System and method for quality-enhanced high-rate optoacoustic imaging of an object |
| US9720218B2 (en) * | 2013-08-06 | 2017-08-01 | Howard Hughes Medical Institute | Volume imaging |
| US9115980B2 (en) * | 2013-09-25 | 2015-08-25 | Seagate Technology, Llc | Row bar thickness measurement device, system and methods |
| JP6358735B2 (ja) * | 2014-02-26 | 2018-07-18 | オリンパス株式会社 | 光音響顕微鏡装置 |
| JP6324113B2 (ja) | 2014-02-28 | 2018-05-16 | キヤノン株式会社 | 光学系および光沢計 |
| JP6324114B2 (ja) * | 2014-02-28 | 2018-05-16 | キヤノン株式会社 | 光学系および光沢計 |
| FI127908B (en) * | 2015-09-22 | 2019-05-15 | Teknologian Tutkimuskeskus Vtt Oy | Method and apparatus for measuring the height of a surface |
| WO2019229826A1 (ja) * | 2018-05-29 | 2019-12-05 | 株式会社 日立ハイテクノロジーズ | 高さ測定装置 |
| JP7240139B2 (ja) * | 2018-11-09 | 2023-03-15 | 株式会社キーエンス | 変位測定装置 |
Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6361110A (ja) * | 1986-05-27 | 1988-03-17 | シンセテイツク ヴイジヨン システムズ インコ−ポレ−テツド | 高速三次元測定方法及び装置 |
| JPH02262004A (ja) * | 1989-03-31 | 1990-10-24 | Toshiba Corp | 位置検出装置 |
| JPH02306108A (ja) * | 1989-05-19 | 1990-12-19 | Hamamatsu Photonics Kk | 3次元位置認識装置 |
| JPH06213658A (ja) * | 1992-09-02 | 1994-08-05 | Betrieps Forsch Vdeh Inst Angew Forsch Gmbh | 距離測定方法及び装置 |
| JPH06221837A (ja) * | 1993-01-26 | 1994-08-12 | Toshiba Corp | 表面検査装置 |
| JPH08193810A (ja) * | 1995-01-13 | 1996-07-30 | Serutetsuku Syst:Kk | 変位測定装置 |
Family Cites Families (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP0071667A1 (en) * | 1981-08-11 | 1983-02-16 | Karl-Erik Morander | Device for determining the real or the virtual distance of a source of light from a measuring plane |
| US4767934A (en) * | 1986-07-02 | 1988-08-30 | Honeywell Inc. | Active ranging system |
| JPH03289293A (ja) * | 1990-04-04 | 1991-12-19 | Mitsubishi Electric Corp | 撮像装置 |
| US5978089A (en) * | 1997-04-15 | 1999-11-02 | Nextel Ltd. | Non-contact method for measuring the shape of an object |
-
1998
- 1998-05-15 US US09/214,414 patent/US6428171B1/en not_active Expired - Fee Related
- 1998-05-15 WO PCT/JP1998/002160 patent/WO1998051993A1/ja active Application Filing
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6361110A (ja) * | 1986-05-27 | 1988-03-17 | シンセテイツク ヴイジヨン システムズ インコ−ポレ−テツド | 高速三次元測定方法及び装置 |
| JPH02262004A (ja) * | 1989-03-31 | 1990-10-24 | Toshiba Corp | 位置検出装置 |
| JPH02306108A (ja) * | 1989-05-19 | 1990-12-19 | Hamamatsu Photonics Kk | 3次元位置認識装置 |
| JPH06213658A (ja) * | 1992-09-02 | 1994-08-05 | Betrieps Forsch Vdeh Inst Angew Forsch Gmbh | 距離測定方法及び装置 |
| JPH06221837A (ja) * | 1993-01-26 | 1994-08-12 | Toshiba Corp | 表面検査装置 |
| JPH08193810A (ja) * | 1995-01-13 | 1996-07-30 | Serutetsuku Syst:Kk | 変位測定装置 |
Cited By (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6572139B2 (en) * | 1998-11-27 | 2003-06-03 | Hamamatsu Photonics K.K. | Occupant sensor and airbag control apparatus |
| US7553276B2 (en) | 2001-01-16 | 2009-06-30 | Given Imaging Ltd. | Method and device for imaging body lumens |
| JP2002311388A (ja) * | 2001-04-19 | 2002-10-23 | Nikon Corp | 光学系 |
| US8639314B2 (en) | 2003-12-24 | 2014-01-28 | Given Imaging Ltd. | Device, system and method for in-vivo imaging of a body lumen |
| US7336833B2 (en) | 2004-06-30 | 2008-02-26 | Given Imaging, Ltd. | Device, system, and method for reducing image data captured in-vivo |
| JP2012194085A (ja) * | 2011-03-17 | 2012-10-11 | Mitsubishi Electric Corp | エッジ検出装置 |
| KR101830785B1 (ko) * | 2016-09-30 | 2018-02-21 | 기가비스주식회사 | 3차원 형상 측정장치 |
| WO2018096728A1 (ja) * | 2016-11-24 | 2018-05-31 | 株式会社新川 | ボンディング装置および被写体の高さ検出方法 |
| JP2018084504A (ja) * | 2016-11-24 | 2018-05-31 | 株式会社新川 | ボンディング装置およびボンディング対象物の高さ検出方法 |
| US10816322B2 (en) | 2016-11-24 | 2020-10-27 | Shinkawa Ltd. | Bonding apparatus and method for detecting height of bonding target |
| KR102040016B1 (ko) * | 2018-07-19 | 2019-11-05 | 한국과학기술연구원 | 레이저와 거울을 이용한 높이 측정 시스템 및 상기 시스템에 의해 수행되는 높이 측정 방법 |
Also Published As
| Publication number | Publication date |
|---|---|
| US6428171B1 (en) | 2002-08-06 |
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