[go: up one dir, main page]

WO2003060610A1 - Procedes et dispositifs pour former des images microscopiques - Google Patents

Procedes et dispositifs pour former des images microscopiques Download PDF

Info

Publication number
WO2003060610A1
WO2003060610A1 PCT/EP2003/000335 EP0300335W WO03060610A1 WO 2003060610 A1 WO2003060610 A1 WO 2003060610A1 EP 0300335 W EP0300335 W EP 0300335W WO 03060610 A1 WO03060610 A1 WO 03060610A1
Authority
WO
WIPO (PCT)
Prior art keywords
photons
arrangements according
absorption
light
light source
Prior art date
Application number
PCT/EP2003/000335
Other languages
German (de)
English (en)
Inventor
Ralf Wolleschensky
Michael Kempe
Magued B. Nasr
Ayman F. Abouraddy
Mark C. Booth
Bahaa E. A. Saleh
Malvin C. Teich
Alexander V. Sergienko
Original Assignee
Carl Zeiss Jena Gmbh
Trustees Of Boston University A Massachusetts Corporation
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from DE10201388A external-priority patent/DE10201388A1/de
Application filed by Carl Zeiss Jena Gmbh, Trustees Of Boston University A Massachusetts Corporation filed Critical Carl Zeiss Jena Gmbh
Publication of WO2003060610A1 publication Critical patent/WO2003060610A1/fr

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/62—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light
    • G01N21/63—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light optically excited
    • G01N21/64—Fluorescence; Phosphorescence
    • G01N21/645—Specially adapted constructive features of fluorimeters
    • G01N21/6456—Spatial resolved fluorescence measurements; Imaging
    • G01N21/6458—Fluorescence microscopy
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/62—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light
    • G01N21/63—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light optically excited
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/62—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light
    • G01N21/63—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light optically excited
    • G01N21/636—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light optically excited using an arrangement of pump beam and probe beam; using the measurement of optical non-linear properties
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B21/00—Microscopes
    • G02B21/0004—Microscopes specially adapted for specific applications
    • G02B21/002—Scanning microscopes
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70375—Multiphoton lithography or multiphoton photopolymerization; Imaging systems comprising means for converting one type of radiation into another type of radiation

Definitions

  • the invention presented here relates to methods and arrangements which are based on multiphoton absorption with improved spatial resolution and with which the lateral and also the axial resolution of known optical arrangements is exceeded.
  • the invention can be used, inter alia, in lithography and for writing and reading optical memories.
  • light is used to locally change the properties of a material that is used to store information in an optical memory
  • an optical memory publication: Y. Kawata, H. Ishitobi, and S. Kawata, "Use of two-photon absorption in a photorefractive crystal for three-dimensional optical memory, "Opt. Lett., volume. 23, No. 10, pages 756-758, 1998].
  • the excitation of the endogenous or exogenous fluorophores within the object or the modification of the object by light usually takes place through the absorption of photons in a single step (one photon is required per excited molecule) - the linear sorption; or in a multi-stage process (the quasi-simultaneous absorption of at least two photons per excited molecule is required) - the non-linear absorption.
  • a peak intensity of the excitation light is required at the site of the interaction in order to achieve a sufficient degree of absorption.
  • Such high peak intensities can often only be achieved by using short-pulse laser radiation for excitation, combined with a strong focus of the light. Due to the high peak values, fading and damage to sensitive objects (e.g. due to photoelectric dissociation or plasma generation) are a common problem in multi-photon fluorescence microscopy. This disadvantage is ultimately due to the random nature of the impingement of photons from classic light sources (e.g. incandescent lamps or lasers), so that two or more photons are less likely to arrive simultaneously within the absorption cross-section of the medium that is to be excited.
  • classic light sources e.g. incandescent lamps or lasers
  • the object of the invention is to further develop methods of the type described in the introduction, in particular methods in connection with laser scan microscopy and spectroscopy, in such a way that an improved spatial resolution compared to the prior art is achieved. Furthermore, it is an object of the invention to provide suitable arrangements for carrying out these methods.
  • N 2.3-n, such as pairs, groups of three, groups of four, etc., focused on a point on the sample become.
  • the N-fold photons can be correlated in time and space.
  • Light sources which generate entangled photons or squeezed photons are advantageously used.
  • the arrangement according to the invention can preferably be a microscopic arrangement consisting of a laser scanning microscope with object or beam scanning.
  • the invention further includes methods and arrangements in which a source of non-classically generated, collinearly emitted photons is located in or near a telecentric plane of the illumination beam path of the microscope.
  • the absorption can be a multiphoton absorption which comprises the absorption of at least two photons per molecule of the fluorophore to be excited.
  • the invention also includes the use of the proposed new methods and arrangements in lithography, in which the multiphoton absorption takes place in a photoresist and changes the structure of the material.
  • this includes the use of multi-photon absorption for writing to an optical memory.
  • the invention also includes those methods and arrangements in which the light source consists of at least one nonlinear crystal in which a frequency conversion of pumped photons into entangled photons takes place.
  • the subject matter of the invention further includes configurations in which multiple passes through the crystal (s) are used, - an amplification of the pairs generated by the crystal is used, the amplification of the pairs generated by the first pass through the crystal by focusing the beam onto the second pass through the crystal, there is a source of non-classically generated, collinearly emitted photons in or near the pupil plane of the objective lens that images the sample, this plane coincides with the primary telecentric plane of the illuminating beam path, the light source is inside the housing of the Objective lenses, - the light source is in a different telecentric plane than the primary telecentric plane, the light source is in a telecentric plane in front of the optical elements that are responsible for scanning the sample by the beam, a spectroscopic Un tersuchung of samples with high spatial resolution on the basis of the fluorescence excitation is carried out by non-classical light and a source, not classically generated collinearly emitted photons is in or close to a telecentric plane of the
  • the resolution in a confocal arrangement corresponds to a CLSM with linear absorption of light of the wavelength ⁇ divided by N.
  • the wavelength ⁇ is decisive for the resolution.
  • the advantages of the non-linear absorption of light of the wavelength ⁇ compared to the linear absorption of light with a wavelength of ⁇ / N when using the CLSM lie in a greater depth of penetration, less scattering and simplified optics.
  • the degree of absorption depends linearly on the light intensity, so a continuous light source of medium power (radiation power) is sufficient for an effective multiphoton absorption. This fact reduces the complexity and cost of the light source required. In addition, the disadvantages associated with high peak intensities for the sample can be avoided. This extends the application of the MPFM to samples that are sensitive to damage and fading. Furthermore, the use of non-classical light, such as entangled photons, enables novel spectroscopic methods which, in conjunction with the optical arrangement described in this invention, allow detailed information about the sample to be obtained with high spatial resolution.
  • non-classical light means light with special photon statistics. Such a non-classical light source generates N photons that are correlated in time and space.
  • One of the objects of this invention is to demonstrate methods and arrangements by which the path from N photons to the sample is designed to unite at one point in the sample and to act simultaneously through an N photon absorption process.
  • Non-classical light can pass through the process of spontaneous parametric frequency conversion (SPDC) in a nonlinear crystal such as /? - barium borate (BBO) or lithium niobate (LN).
  • SPDC spontaneous parametric frequency conversion
  • BBO barium borate
  • LN lithium niobate
  • Non-classical light can also be generated by squeezing in an optical parametric amplifier (OPA) or oscillator (OPO).
  • OPA optical parametric amplifier
  • OPO oscillator
  • microscopy and spectroscopy with entangled photons have been described in US Pat. No. 5,796,477 [MC Teich and BEA Saleh, "Entangled-photon microscopy, spectroscopy, and imaging”].
  • An overview of the generation and behavior of squeezed light can be found in Ml Kolobov, "The spatial behavior of nonclassical light," Reviews of Modern Physics, Volume 71, No. 5, pages 1539-1589 (1999).
  • the key task of the optical arrangement for the excitation of the sample is to ensure that the N correlated photons of the non-classical light source arrive at a diffraction-limited point of the sample with a full numerical aperture of the objective lens. Often some or all of the N photons of the non-classical light source are emitted collinearly. In this case, and in one of the configuration variants for the optical configuration, the source of the non-classical light is close to the rear focal plane of the objective lens, which focuses in the sample. This level coincides with the primary telecentric level of the microscope's illumination beam path. The fluorescence emitted as a result of the absorption of photon pairs is imaged on a detector, the signal of which is processed electronically.
  • the receiver device could be a confocal arrangement using a point detector.
  • non-confocal measurement is possible using a large area detector (ie the receiver area is much larger than the point wash function in the receiver plane).
  • the sample is scanned by the excitation beam, then the processing and display of the receiver signal follows, as is known in laser scan microscopy.
  • the entangled photon source is placed near a plane that is conjugated to the primary telecentric plane of the microscope's illumination beam path. In this case, more complex configurations of the source can be implemented.
  • Such a source of entangled photons can, for example, be in a conjugate telecentric plane of a standard CLSM.
  • Another design variant contains elements for creating an optical delay between the photons that form a pair. Such an optical delay can be between the source and the objective lens and enables the investigation of spectroscopic properties of a sample with high spatial resolution.
  • Fig. Lb the schematic representation of an N-photon absorption process by S real or virtual states from energy level E ⁇ to E 2 ,
  • FIG. 2 shows the schematic representation of the fluorescence excitation, which according to the invention is based on the classic two-photon absorption (left) or on the absorption of entangled photons (right)
  • FIG. 3 shows a diagram of the basic optical focusing configuration according to the invention using the in Description of the notation used
  • Figure 4 is a diagram (not classical) stimulating the axial course of the excitation of the strigränk ⁇ th photon in comparison to the two-photon (TP) (classic) shows 5 shows a diagram which shows the lateral course of the excitation of the entangled photons (non-classical) in comparison to the two-photon (TP) excitation (classical)
  • FIG. 6 shows a diagram showing the depth discrimination of the microscope of entangled photons with confocal reception compared to one
  • FIG. 7 shows a diagram in which a preferred configuration of the microscope of entangled photons is shown
  • FIG. 8 shows a diagram in which a further preferred configuration of the microscope of entangled photons is shown
  • FIG. 9 shows a diagram in which a preferred variant of the microscope of entangled photons with elements for the use of spectroscopic contrast information is shown.
  • the present invention makes use of the difference between the absorption in a classic light source and that in a non-classic light source, such as e.g. entangled photons in a focused beam.
  • 1a shows the temporal statistical properties of a non-classical light source that generates correlated photons compared to a classical light source.
  • a classic light source emits an arbitrary number of photons that follow a statistical distribution dependent on the light source, while a non-classical light source emits an N times the number at arbitrary times.
  • Fig.lb shows an N-photon absorption process between the energy levels E ⁇ and E.
  • the intermediate states S can be virtual energy states or real states.
  • G 2) (x, z ,, t; x, z 2 , t) is the probability of measuring a pair of photons at space-time points (x, z, t and (x 2 , z 2 , t_)
  • E o (xj ⁇ ) and E ⁇ (x;, ⁇ ) are the scaled electrical fields in the object and image plane, respectively, and h (x jt x o ; ⁇ ) is the system's amplitude point blurring function between the image - and Ob / e / febene.
  • the optical system shown in FIG. 3 is used for focusing in both cases - the classic excitation and the excitation with entangled photons.
  • the scheme according to the invention illustrates a simple lighting arrangement with a non-classical light source in a telecentric plane.
  • the amplitude point blurring function is [publication: JW Goodman, Introduction to Fourier Optics, Chapter 6, McGraw-Hill, New York, 1968]
  • ⁇ is the wavelength of the monochromatic, scalar electric field, / is the focal length of the lens and d is the distance between the telecentric (object) plane and the lens.
  • the pupil function of the lens aperture p (x) is assumed to be rectangular and with the width A. It should be noted that this is the amplitude point blurring function for a one-dimensional optical system (in the transverse direction), therefore the proportionality constant of
  • Probe reacts to the arrival of a pair of photons on only one
  • x c and z c are the characteristic lengths in the transverse and axial directions, respectively.
  • the width of the excitation curve in the transverse and axial directions is proportional to these values.
  • Probe reacts to the arrival of a pair of photons on only one
  • a spectral filter of very narrow bandwidth the center frequency of which coincides with the frequency of the degenerate photons, is placed behind the crystal, so that only degenerate photons contribute to the excitation of the sample.
  • G (2 ( ⁇ datez; xi, z), abbreviated as G (2) (x u z) for the sake of simplicity, is calculated with
  • Fig. 4 shows the normalized axial course for the classic two-photon excitation (solid line) and excitation by entangled photons (dotted line). 5 shows the same curves for the transverse course.
  • optical cuts also known as depth discrimination. It can be described as the response of the system to the scanning of a thin, laterally homogeneous, fluorescent layer by the focus. In contrast to classic two-photon excitation, the excitation, which uses non-classic light, does not provide any optical cuts.
  • the depth differentiation can be achieved by adding a confocal receiver unit analogous to single-photon excitation in a CLSM.
  • the behavior is
  • a system that uses non-classical light of wavelength 2 ⁇ as excitation via a focusing arrangement according to the invention described here behaves in terms of resolution like a system with single-photon fluorescence excitation of half the wavelength (i.e. ⁇ ).
  • the former system provides a higher resolution than a non-confocal MPFM system that uses a classic light source with a wavelength of 2 ⁇ .
  • the non-classical light source is part of the objective lens. Due to the condition of phase matching in the nonlinear crystal, a changed angle of incidence of the pump laser on the crystal has an undesirable effect on the properties of the photons generated. Therefore, such an arrangement can only be used in connection with object scanning.
  • the non-linear crystal is outside the objective lens with the possibility of double passage of the pump light through the crystal to increase the performance of the non-classical light source.
  • the nonlinear crystal must be placed near the rear focal plane of the objective lens, which is also the primary telecentric plane.
  • the collimated light of the pump laser L illuminates the sample Sa and thereby passes through a dichroic beam splitter MDB, scanning optics SO, the microscope tube lens TL and a specially developed lens for entangled photons EPO, which is shown in detail on the right-hand side.
  • the EPO consists of a light-linear crystal NLC in or near the pupil plane PP of the microscope objective O, which coincides with the primary telecentric plane PTP of the illumination.
  • a filter HPF is located between the EPO and O, which filters the wavelength hides the pump laser, but allows longer wavelengths to pass through (frequency conversion arrangement, as described in the literature).
  • the EPO elements can advantageously be installed in a lens housing of a conventional standard microscope.
  • the fluorescence excited in the sample passes through EPO, TL and SO, is reflected by the beam splitter MDB and is imaged onto the detector DE through the pinhole optics PO through a pinhole PH.
  • the non-linear optics NLC is attached outside the housing of the objective lens, the incoming light is directed there by a polarization beam splitter PBS or a dichroic beam splitter.
  • the back of the NLC is reflective, so that the pump light and the frequency-converted light are reflected back in the direction of the PBS.
  • the PBS directs the pump light back towards the laser L and directs the frequency-converted light, which is polarized at right angles to the pump light, via the lens O onto the sample Sa.
  • the detector is on the right
  • the optical system can include the scanning optics SO and the tube lens TL in both arrangements, as in FIG.
  • Fig.7a shown, or not, as shown in Fig.7b.
  • the pump light L and the frequency-converted light after having once passed through the nonlinear crystal NLC, are focused back into the nonlinear crystal NLC by a spherical mirror M.
  • the frequency-converted light After passing the PBS, the frequency-converted light is collimated by the lens L and directed to the sample, as described in Fig. 7b.
  • This configuration has the advantage that the light intensity L within the crystal is much higher due to the focusing, so that the frequency-converted photons can be amplified to increase the radiation power of the pairs of entangled photons.
  • FIG. 8 shows a standard confocal scanning arrangement with laser L, XY scanner for two mutually perpendicular scanning directions, optical transmission system RL, overview lens SO, tube lens TL, lens O, probe Sa, dichroic beam splitter MDB, pinhole optics PO, pinhole PH and detector DE , Behind the laser is a non-classical light source EPS (preferably based on frequency conversion in a non-linear crystal) with filter HPF for removing the pump light, as well as the telecentric optics CL1, CL2, in a telecentric plane of the illumination beam path.
  • EPS non-classical light source
  • the light source of a standard LSM is replaced or combined with a non-classical light source in a telecentric plane of the illumination beam path, whereby the method for the multi-photon fluorescence excitation, which is described in this invention, is used.
  • the pair-wise photons can be separated from one another and delayed from one another, as shown in FIG. 9, to enable spectroscopic examinations, as are already known.
  • the separation in the non-degenerate case, at different wavelengths of the photons of the pair can be achieved by using a suitable dichroic beam splitter, the transmission edge being between the wavelengths of the entangled photons.
  • polarization beam splitters can alternatively be used.
  • incomplete separation can be achieved by using a 50:50 beam splitter (half of the pairs per beam splitter are separated). The delay can be achieved by moving a delay unit in one strand of the arrangement.
  • FIG. 9 partially shows the arrangement described in FIG. 8, but between CL1 and CL2 are the lenses CL3 and CL4 and a dichroic mirror DC1 which directs the photons of the pair in the two different directions d1 and d2. The Both beams are then brought together again by the mirror DC2.
  • Ml is a deflecting mirror for the light beam dl. The mirror M2 deflects the light beam d2 onto a reflector RR, which can be shifted in the path length between d1 and d2 to set the delay.

Landscapes

  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Nuclear Medicine, Radiotherapy & Molecular Imaging (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Optics & Photonics (AREA)
  • Nonlinear Science (AREA)
  • Microscoopes, Condenser (AREA)
  • Investigating, Analyzing Materials By Fluorescence Or Luminescence (AREA)

Abstract

L'invention concerne des procédés et des dispositifs fondés sur l'absorption de photons multiples à résolution spatiale améliorée et au moyen desquels la résolution latérale et axiale de dispositifs optiques connus peut être dépassée. L'invention est utilisée en lithographie et pour écrire sur des mémoires optiques et les lire. L'objectif de l'invention est l'obtention d'une résolution spatiale améliorée, par rapport à la technique antérieure, en relation avec la microscopie Laser-Scan et la spectroscopie. Selon l'invention, des images microscopiques peuvent être produites sur la base d'une absorption de lumière non linéaire, des groupes corrélés de N photons, N= 2, 3, n, tels que des paires, des groupes de trois, de quatre photons, etc. pouvant être focalisés sur un point de l'échantillon. De ce fait, les N photons peuvent être corrélés dans le temps et dans l'espace.
PCT/EP2003/000335 2002-01-16 2003-01-15 Procedes et dispositifs pour former des images microscopiques WO2003060610A1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE10201388.8 2002-01-16
DE10201388A DE10201388A1 (de) 2001-08-24 2002-01-16 Verfahren und / oder Apparaturen für mikroskopische Abbildung

Publications (1)

Publication Number Publication Date
WO2003060610A1 true WO2003060610A1 (fr) 2003-07-24

Family

ID=7712238

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/EP2003/000335 WO2003060610A1 (fr) 2002-01-16 2003-01-15 Procedes et dispositifs pour former des images microscopiques

Country Status (1)

Country Link
WO (1) WO2003060610A1 (fr)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2009065590A1 (fr) * 2007-11-21 2009-05-28 Carl Zeiss Ag Usinage par faisceau laser
DE102018215833A1 (de) * 2018-09-18 2020-03-19 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Optische Anordnung für fluoreszenzmikroskopische Anwendungen
DE102018215831A1 (de) * 2018-09-18 2020-03-19 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Optische Anordnung für fluoreszenzmikroskopische Anwendungen

Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE4416558A1 (de) * 1994-02-01 1995-08-03 Hell Stefan Vorrichtung und Verfahren zum optischen Messen eines Probenpunktes einer Probe mit hoher Ortsauflösung
DE4414940A1 (de) * 1994-04-28 1995-11-02 Pekka Haenninen Verfahren zur Lumineszenz-Rastermikroskopie und ein Lumineszenz-Rastermikroskop
DE19908883A1 (de) * 1999-03-02 2000-09-07 Rainer Heintzmann Verfahren zur Erhöhung der Auflösung optischer Abbildung
US6252665B1 (en) * 1999-05-20 2001-06-26 California Institute Of Technology Lithography using quantum entangled particles
US20010021487A1 (en) * 1999-05-20 2001-09-13 California Institute Of Technology Lithography using quantum entangled particles
DE10115486A1 (de) * 2000-06-17 2001-12-20 Leica Microsystems Verschränkte-Photonen-Mikroskop
DE10201388A1 (de) * 2001-08-24 2003-03-13 Zeiss Carl Jena Gmbh Verfahren und / oder Apparaturen für mikroskopische Abbildung

Patent Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE4416558A1 (de) * 1994-02-01 1995-08-03 Hell Stefan Vorrichtung und Verfahren zum optischen Messen eines Probenpunktes einer Probe mit hoher Ortsauflösung
DE4414940A1 (de) * 1994-04-28 1995-11-02 Pekka Haenninen Verfahren zur Lumineszenz-Rastermikroskopie und ein Lumineszenz-Rastermikroskop
DE19908883A1 (de) * 1999-03-02 2000-09-07 Rainer Heintzmann Verfahren zur Erhöhung der Auflösung optischer Abbildung
US6252665B1 (en) * 1999-05-20 2001-06-26 California Institute Of Technology Lithography using quantum entangled particles
US20010021487A1 (en) * 1999-05-20 2001-09-13 California Institute Of Technology Lithography using quantum entangled particles
DE10115486A1 (de) * 2000-06-17 2001-12-20 Leica Microsystems Verschränkte-Photonen-Mikroskop
DE10201388A1 (de) * 2001-08-24 2003-03-13 Zeiss Carl Jena Gmbh Verfahren und / oder Apparaturen für mikroskopische Abbildung

Non-Patent Citations (3)

* Cited by examiner, † Cited by third party
Title
BJORK G ET AL: "Subwavelength lithography over extended areas", PHYSICAL REVIEW A (ATOMIC, MOLECULAR, AND OPTICAL PHYSICS), JULY 2001, APS THROUGH AIP, USA, vol. 64, no. 1, pages 013811/1 - 8, XP002236753, ISSN: 1050-2947 *
BOTO A N ET AL: "QUANTUM INTERFEROMETRIC OPTICAL LITHOGRAPHY: EXPLOITING ENTANGLEMENT TO BEAT THE DIFFRACTION LIMIT", PHYSICAL REVIEW LETTERS, NEW YORK,NY, US, vol. 85, no. 13, 25 September 2000 (2000-09-25), pages 2733 - 2736, XP001029914, ISSN: 0031-9007 *
D'ANGELO M ET AL: "Two-photon diffraction and quantum lithography", PHYSICAL REVIEW LETTERS, 2 JULY 2001, APS, USA, vol. 87, no. 1, pages 013602/1 - 4, XP002236752, ISSN: 0031-9007 *

Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2009065590A1 (fr) * 2007-11-21 2009-05-28 Carl Zeiss Ag Usinage par faisceau laser
CN101868320A (zh) * 2007-11-21 2010-10-20 卡尔蔡司公司 激光束加工
US8389893B2 (en) 2007-11-21 2013-03-05 Nanoscribe Gmbh Laser beam machining
CN101868320B (zh) * 2007-11-21 2014-09-17 纳诺斯凯布有限公司 激光束加工
DE102018215833A1 (de) * 2018-09-18 2020-03-19 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Optische Anordnung für fluoreszenzmikroskopische Anwendungen
DE102018215831A1 (de) * 2018-09-18 2020-03-19 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Optische Anordnung für fluoreszenzmikroskopische Anwendungen
DE102018215833B4 (de) * 2018-09-18 2020-04-02 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Optische Anordnung für fluoreszenzmikroskopische Anwendungen
DE102018215831B4 (de) * 2018-09-18 2020-04-02 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Optische Anordnung für fluoreszenzmikroskopische Anwendungen

Similar Documents

Publication Publication Date Title
EP2097781B1 (fr) Microscope laser a diviseur spatial de faisceau
EP2245494B1 (fr) Dispositif et procédé de représentation tridimensionnelle à haute résolution d'une structure d'un échantillon
EP1248132B1 (fr) Méthode et dispositif de détection optique à résolution de la profondeur d'un échantillon
DE10257120B4 (de) Rastermikroskop zum Abbilden eines Objekts
DE69714021T4 (de) Lichtmikroskop mit akustooptisch abstimmbaren filtern
DE10340964A1 (de) Lichtquelle mit einem mikrostrukturierten optischen Element
DE102018124984A1 (de) Verfahren und Vorrichtung zur hochaufgelösten Fluoreszenzmikroskopie
DE102006009831B4 (de) Verfahren und Mikroskop zur räumlich hochauflösenden Untersuchung von Proben
DE69713286T2 (de) Submikron-auflösendes abbildungssystem mit abstimmbarem akusto-optischem filter
EP2317362A1 (fr) Procédé microscopique et microscope doté d'une dissolution améliorée
WO2009024529A1 (fr) Microscopie de fluorescence sted à excitation biphotonique
EP1157297A1 (fr) Procede et dispositif pour la representation d'objets
EP1668394A1 (fr) Microscope a eclairage evanescent
EP1720052A1 (fr) Dispositif destiné à la commande de la radiation lumineuse
DE102015209758A1 (de) Anordnung und Verfahren zur Strahlformung und zur Lichtblattmikroskopie
DE102013227104A1 (de) Scanmikroskop und akustooptischer Hauptstrahlteiler für ein Scanmikroskop
DE10155002A1 (de) Verfahren und Anordnung zur tiefenaufgelösten optischen Erfassung einer Probe
EP3359997A1 (fr) Procédé et dispositif pour examiner un échantillon par un éclairage structuré à lame lumineuse
DE10139754B4 (de) Beleuchtungsverfahren für ein Scanmikroskop und Scanmikroskop
DE102004032953A1 (de) Phasenfilter
WO2003060610A1 (fr) Procedes et dispositifs pour former des images microscopiques
DE10201388A1 (de) Verfahren und / oder Apparaturen für mikroskopische Abbildung
DE19851240C1 (de) Fluoreszenzmikroskop mit Mehrphotonenanregung
DE102004029733B4 (de) Rastermikroskop und Verfahren zur Rastermikroskopie
WO2005029153A2 (fr) Spectroscopie et microscopie par lentille a immersion solide

Legal Events

Date Code Title Description
AK Designated states

Kind code of ref document: A1

Designated state(s): JP US

AL Designated countries for regional patents

Kind code of ref document: A1

Designated state(s): AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HU IE IT LU MC NL PT SE SI SK TR

121 Ep: the epo has been informed by wipo that ep was designated in this application
122 Ep: pct application non-entry in european phase
NENP Non-entry into the national phase

Ref country code: JP

WWW Wipo information: withdrawn in national office

Country of ref document: JP