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WO2003036368A1 - Phase modulation apparatus and phase modulation method - Google Patents

Phase modulation apparatus and phase modulation method Download PDF

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Publication number
WO2003036368A1
WO2003036368A1 PCT/JP2002/011115 JP0211115W WO03036368A1 WO 2003036368 A1 WO2003036368 A1 WO 2003036368A1 JP 0211115 W JP0211115 W JP 0211115W WO 03036368 A1 WO03036368 A1 WO 03036368A1
Authority
WO
WIPO (PCT)
Prior art keywords
phase modulation
pattern
phase
memory unit
distortion correction
Prior art date
Application number
PCT/JP2002/011115
Other languages
English (en)
French (fr)
Inventor
Yasunori Igasaki
Norihiro Fukuchi
Original Assignee
Hamamatsu Photonics K.K.
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hamamatsu Photonics K.K. filed Critical Hamamatsu Photonics K.K.
Priority to DE10297383.0T priority Critical patent/DE10297383B4/de
Priority to JP2003538805A priority patent/JP4420672B2/ja
Priority to KR1020047002390A priority patent/KR100910016B1/ko
Priority to US10/493,464 priority patent/US7209279B2/en
Publication of WO2003036368A1 publication Critical patent/WO2003036368A1/ja
Priority to US11/717,110 priority patent/US20070162266A1/en

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03H—HOLOGRAPHIC PROCESSES OR APPARATUS
    • G03H1/00—Holographic processes or apparatus using light, infrared or ultraviolet waves for obtaining holograms or for obtaining an image from them; Details peculiar thereto
    • G03H1/22—Processes or apparatus for obtaining an optical image from holograms
    • G03H1/2202—Reconstruction geometries or arrangements
    • G03H1/2205—Reconstruction geometries or arrangements using downstream optical component
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03H—HOLOGRAPHIC PROCESSES OR APPARATUS
    • G03H1/00—Holographic processes or apparatus using light, infrared or ultraviolet waves for obtaining holograms or for obtaining an image from them; Details peculiar thereto
    • G03H1/04—Processes or apparatus for producing holograms
    • G03H1/08—Synthesising holograms, i.e. holograms synthesized from objects or objects from holograms
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03H—HOLOGRAPHIC PROCESSES OR APPARATUS
    • G03H1/00—Holographic processes or apparatus using light, infrared or ultraviolet waves for obtaining holograms or for obtaining an image from them; Details peculiar thereto
    • G03H1/22—Processes or apparatus for obtaining an optical image from holograms
    • G03H1/2249—Holobject properties
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03H—HOLOGRAPHIC PROCESSES OR APPARATUS
    • G03H1/00—Holographic processes or apparatus using light, infrared or ultraviolet waves for obtaining holograms or for obtaining an image from them; Details peculiar thereto
    • G03H1/22—Processes or apparatus for obtaining an optical image from holograms
    • G03H1/2294—Addressing the hologram to an active spatial light modulator
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03H—HOLOGRAPHIC PROCESSES OR APPARATUS
    • G03H1/00—Holographic processes or apparatus using light, infrared or ultraviolet waves for obtaining holograms or for obtaining an image from them; Details peculiar thereto
    • G03H1/0005—Adaptation of holography to specific applications
    • G03H2001/0072—Adaptation of holography to specific applications for wavefront conjugation wherein the hologram generates a wavefront conjugating a predetermined object, e.g. null testing, positioning, comparative holography
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03H—HOLOGRAPHIC PROCESSES OR APPARATUS
    • G03H1/00—Holographic processes or apparatus using light, infrared or ultraviolet waves for obtaining holograms or for obtaining an image from them; Details peculiar thereto
    • G03H1/0005—Adaptation of holography to specific applications
    • G03H2001/0094—Adaptation of holography to specific applications for patterning or machining using the holobject as input light distribution
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03H—HOLOGRAPHIC PROCESSES OR APPARATUS
    • G03H1/00—Holographic processes or apparatus using light, infrared or ultraviolet waves for obtaining holograms or for obtaining an image from them; Details peculiar thereto
    • G03H1/02—Details of features involved during the holographic process; Replication of holograms without interference recording
    • G03H2001/0208—Individual components other than the hologram
    • G03H2001/0216—Optical components
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03H—HOLOGRAPHIC PROCESSES OR APPARATUS
    • G03H1/00—Holographic processes or apparatus using light, infrared or ultraviolet waves for obtaining holograms or for obtaining an image from them; Details peculiar thereto
    • G03H1/04—Processes or apparatus for producing holograms
    • G03H1/08—Synthesising holograms, i.e. holograms synthesized from objects or objects from holograms
    • G03H1/0841—Encoding method mapping the synthesized field into a restricted set of values representative of the modulator parameters, e.g. detour phase coding
    • G03H2001/085—Kinoform, i.e. phase only encoding wherein the computed field is processed into a distribution of phase differences
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03H—HOLOGRAPHIC PROCESSES OR APPARATUS
    • G03H2210/00—Object characteristics
    • G03H2210/20—2D object
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03H—HOLOGRAPHIC PROCESSES OR APPARATUS
    • G03H2225/00—Active addressable light modulator
    • G03H2225/30—Modulation
    • G03H2225/32—Phase only

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optical Modulation, Optical Deflection, Nonlinear Optics, Optical Demodulation, Optical Logic Elements (AREA)
PCT/JP2002/011115 2001-10-25 2002-10-25 Phase modulation apparatus and phase modulation method WO2003036368A1 (en)

Priority Applications (5)

Application Number Priority Date Filing Date Title
DE10297383.0T DE10297383B4 (de) 2001-10-25 2002-10-25 Phasenmodulationseinrichtung und Phasenmodulationsverfahren
JP2003538805A JP4420672B2 (ja) 2001-10-25 2002-10-25 位相変調装置及び位相変調方法
KR1020047002390A KR100910016B1 (ko) 2001-10-25 2002-10-25 위상 변조 장치 및 위상 변조 방법
US10/493,464 US7209279B2 (en) 2001-10-25 2002-10-25 Phase modulating apparatus and phase modulating method
US11/717,110 US20070162266A1 (en) 2001-10-25 2007-03-13 Phase modulating apparatus and phase modulating method

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2001-328267 2001-10-25
JP2001328267 2001-10-25

Related Child Applications (1)

Application Number Title Priority Date Filing Date
US11/717,110 Division US20070162266A1 (en) 2001-10-25 2007-03-13 Phase modulating apparatus and phase modulating method

Publications (1)

Publication Number Publication Date
WO2003036368A1 true WO2003036368A1 (en) 2003-05-01

Family

ID=19144359

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/JP2002/011115 WO2003036368A1 (en) 2001-10-25 2002-10-25 Phase modulation apparatus and phase modulation method

Country Status (6)

Country Link
US (2) US7209279B2 (ja)
JP (1) JP4420672B2 (ja)
KR (1) KR100910016B1 (ja)
CN (1) CN100397147C (ja)
DE (1) DE10297383B4 (ja)
WO (1) WO2003036368A1 (ja)

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JP2005292662A (ja) * 2004-04-02 2005-10-20 Hamamatsu Photonics Kk 波面補償装置、波面補償方法、プログラム、及び、記録媒体
EP1630588A1 (en) 2004-08-31 2006-03-01 Hamamatsu Photonics K.K. Method of forming an optical pattern, optical pattern formation system, and optical tweezer
JP2006072280A (ja) * 2004-08-31 2006-03-16 Hamamatsu Photonics Kk 光パターン形成方法および装置、ならびに光ピンセット装置
WO2006035775A1 (ja) * 2004-09-27 2006-04-06 Hamamatsu Photonics K.K. 空間光変調装置、光学処理装置、カップリングプリズム、及び、カップリングプリズムの使用方法
US7367672B2 (en) 2005-07-08 2008-05-06 Nidek Co., Ltd. Ophthalmic observation apparatus
JP2008176150A (ja) * 2007-01-19 2008-07-31 Hamamatsu Photonics Kk 反射型位相変装置及び反射型位相変調装置の設定方法
DE102007042945A1 (de) 2007-01-19 2008-09-11 Hamamatsu Photonics K.K., Hamamatsu Phasenmodulationsvorrichtung
US7459674B2 (en) 2005-10-19 2008-12-02 Hamamatsu Photonics K.K. Optical tweezers
WO2010024320A1 (ja) * 2008-09-01 2010-03-04 浜松ホトニクス株式会社 収差補正方法、この収差補正方法を用いたレーザ加工方法、この収差補正方法を用いたレーザ照射方法、収差補正装置、及び、収差補正プログラム
DE112008003278T5 (de) 2007-12-05 2011-04-07 Hamamatsu Photonics K.K., Hamamatsu Phasenmodulationsvorrichtung und Phasenmodulationsverfahren
JP2011128572A (ja) * 2009-12-21 2011-06-30 Olympus Corp ホログラム像投影方法およびホログラム像投影装置
JP2011128573A (ja) * 2009-12-21 2011-06-30 Olympus Corp ホログラム像投影装置
JP2011133580A (ja) * 2009-12-22 2011-07-07 Olympus Corp ホログラム像投影方法およびホログラム像投影装置
WO2014017289A1 (ja) * 2012-07-26 2014-01-30 浜松ホトニクス株式会社 光変調方法、光変調プログラム、光変調装置、及び光照射装置
WO2014077092A1 (ja) * 2012-11-13 2014-05-22 浜松ホトニクス株式会社 光変調装置
JP2016051018A (ja) * 2014-08-29 2016-04-11 浜松ホトニクス株式会社 パルス光整形装置
JP2017520022A (ja) * 2014-06-03 2017-07-20 エムティティ イノベーション インコーポレイテッドＭｔｔ Ｉｎｎｏｖａｔｉｏｎ Ｉｎｃｏｒｐｏｒａｔｅｄ 結像、照明、および投影を用途とする効率的、動的、高コントラストなレンジング
WO2019116526A1 (ja) * 2017-12-15 2019-06-20 日本電気株式会社 投射装置、インターフェース装置および投射方法
USRE48338E1 (en) 2010-12-21 2020-12-01 Cailabs Method and system for configuring a device for correcting the effect of a medium on a light signal, method, device and system for correcting said effect

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JP4057937B2 (ja) * 2003-03-25 2008-03-05 富士フイルム株式会社 露光装置
DE102007005823A1 (de) 2007-01-31 2008-08-07 Seereal Technologies S.A. Optische Wellenfrontkorrektur für ein holographisches Projektionssystem
JP4402708B2 (ja) 2007-08-03 2010-01-20 浜松ホトニクス株式会社 レーザ加工方法、レーザ加工装置及びその製造方法
JP2010151948A (ja) * 2008-12-24 2010-07-08 Hamamatsu Photonics Kk 光制御装置および光制御方法
JP5479925B2 (ja) * 2010-01-27 2014-04-23 浜松ホトニクス株式会社 レーザ加工システム
US8207009B2 (en) 2011-04-19 2012-06-26 Primestar Solar, Inc. Methods of temporally varying the laser intensity during scribing a photovoltaic device
US8461481B2 (en) 2011-04-19 2013-06-11 Primestar Solar, Inc. Methods and apparatus for reducing variations in the laser intensity during scribing a photovoltaic device
JP6290697B2 (ja) * 2014-04-22 2018-03-07 浜松ホトニクス株式会社 波形計測装置およびパルス光生成装置
JP6516554B2 (ja) * 2015-05-15 2019-05-22 浜松ホトニクス株式会社 変調パターン算出装置、光制御装置、変調パターン算出方法および変調パターン算出プログラム
JP6689646B2 (ja) * 2016-04-01 2020-04-28 浜松ホトニクス株式会社 レーザ加工装置
CN106059677A (zh) * 2016-05-27 2016-10-26 上海菜牛光电科技有限公司 空间光调制器
ES3035241T3 (en) 2017-12-22 2025-09-01 Dolby Laboratories Licensing Corp Temporal modeling of phase modulators in multi-modulation projection
CN110596720A (zh) * 2019-08-19 2019-12-20 深圳奥锐达科技有限公司 距离测量系统

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Cited By (41)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2005292662A (ja) * 2004-04-02 2005-10-20 Hamamatsu Photonics Kk 波面補償装置、波面補償方法、プログラム、及び、記録媒体
CN100442106C (zh) * 2004-08-31 2008-12-10 浜松光子学株式会社 形成光图像的方法及装置、以及光镊子装置
EP1630588A1 (en) 2004-08-31 2006-03-01 Hamamatsu Photonics K.K. Method of forming an optical pattern, optical pattern formation system, and optical tweezer
JP2006072280A (ja) * 2004-08-31 2006-03-16 Hamamatsu Photonics Kk 光パターン形成方法および装置、ならびに光ピンセット装置
US7527201B2 (en) 2004-08-31 2009-05-05 Hamamatsu Photonics K.K. Method of forming an optical pattern, optical pattern formation system, and optical tweezer
WO2006035775A1 (ja) * 2004-09-27 2006-04-06 Hamamatsu Photonics K.K. 空間光変調装置、光学処理装置、カップリングプリズム、及び、カップリングプリズムの使用方法
JP4804358B2 (ja) * 2004-09-27 2011-11-02 浜松ホトニクス株式会社 空間光変調装置、光学処理装置、及びカップリングプリズムの使用方法
US7367672B2 (en) 2005-07-08 2008-05-06 Nidek Co., Ltd. Ophthalmic observation apparatus
US7459674B2 (en) 2005-10-19 2008-12-02 Hamamatsu Photonics K.K. Optical tweezers
US10621936B2 (en) 2007-01-19 2020-04-14 Hamamatsu Photonics K.K. Apparatus having spatial light modulator and converting unit converting input value to control value to control spatial light modulator
US8749463B2 (en) 2007-01-19 2014-06-10 Hamamatsu Photonics K.K. Phase-modulating apparatus
DE102007042945A1 (de) 2007-01-19 2008-09-11 Hamamatsu Photonics K.K., Hamamatsu Phasenmodulationsvorrichtung
JP2008176150A (ja) * 2007-01-19 2008-07-31 Hamamatsu Photonics Kk 反射型位相変装置及び反射型位相変調装置の設定方法
US10192502B2 (en) 2007-01-19 2019-01-29 Hamamatsu Photonics K.K. Apparatus having spatial light modulator and converting unit converting input value to control value to control spatial light modulator
DE102007063950B4 (de) 2007-01-19 2024-07-04 Hamamatsu Photonics K.K. Vorrichtung und Verfahren zum Modulieren von Licht
DE102007042945B4 (de) 2007-01-19 2018-10-04 Hamamatsu Photonics K.K. Phasenmodulationsvorrichtung und Verfahren zum Einstellen derselben
DE112008003278T5 (de) 2007-12-05 2011-04-07 Hamamatsu Photonics K.K., Hamamatsu Phasenmodulationsvorrichtung und Phasenmodulationsverfahren
US8576206B2 (en) 2007-12-05 2013-11-05 Hamamatsu Photonics K.K. Phase modulating apparatus and phase modulating method
JP5167274B2 (ja) * 2007-12-05 2013-03-21 浜松ホトニクス株式会社 位相変調装置及び位相変調方法
US9007286B2 (en) 2007-12-05 2015-04-14 Hamamatsu Photonics K.K. Phase modulating apparatus and phase modulating method
US9415461B2 (en) 2008-09-01 2016-08-16 Hamamatsu Photonics K.K. Aberration-correcting method, laser processing method using said aberration-correcting method, laser irradiation method using said aberration-correction method, aberration-correction device and aberration-correcting program
US9488831B2 (en) 2008-09-01 2016-11-08 Hamamatsu Photonics K.K. Aberration-correcting method, laser processing method using said aberration-correcting method, laser irradiation method using said aberration-correcting method, aberration-correcting device and aberration-correcting program
WO2010024320A1 (ja) * 2008-09-01 2010-03-04 浜松ホトニクス株式会社 収差補正方法、この収差補正方法を用いたレーザ加工方法、この収差補正方法を用いたレーザ照射方法、収差補正装置、及び、収差補正プログラム
EP3358398A1 (en) 2008-09-01 2018-08-08 Hamamatsu Photonics K.K. Laser processing method, laser irradiation method, aberration-correcting method, aberration-correcting device and aberration-correcting program
KR20160128435A (ko) 2008-09-01 2016-11-07 하마마츠 포토닉스 가부시키가이샤 레이저 조사 장치 및 레이저 가공 장치
US8526091B2 (en) 2008-09-01 2013-09-03 Hamamatsu Photonics K.K. Aberration-correcting method, laser processing method using said aberration-correcting method, laser irradiation method using said aberration-correcting method, aberration-correcting device and aberration-correcting program
US10324285B2 (en) 2008-09-01 2019-06-18 Hamamatsu Photonics K.K. Aberration-correction method, laser processing method using said aberration-correcting method, laser irradiation method using said aberration-correcting method, aberration-correcting device and aberration-correcting program
JP2011128572A (ja) * 2009-12-21 2011-06-30 Olympus Corp ホログラム像投影方法およびホログラム像投影装置
JP2011128573A (ja) * 2009-12-21 2011-06-30 Olympus Corp ホログラム像投影装置
JP2011133580A (ja) * 2009-12-22 2011-07-07 Olympus Corp ホログラム像投影方法およびホログラム像投影装置
USRE48338E1 (en) 2010-12-21 2020-12-01 Cailabs Method and system for configuring a device for correcting the effect of a medium on a light signal, method, device and system for correcting said effect
JP2014026083A (ja) * 2012-07-26 2014-02-06 Hamamatsu Photonics Kk 光変調方法、光変調プログラム、光変調装置、及び光照射装置
WO2014017289A1 (ja) * 2012-07-26 2014-01-30 浜松ホトニクス株式会社 光変調方法、光変調プログラム、光変調装置、及び光照射装置
US9798165B2 (en) 2012-11-13 2017-10-24 Hamamatsu Photonics K.K. Light modulation device
JPWO2014077092A1 (ja) * 2012-11-13 2017-01-05 浜松ホトニクス株式会社 光変調装置
WO2014077092A1 (ja) * 2012-11-13 2014-05-22 浜松ホトニクス株式会社 光変調装置
JP2017520022A (ja) * 2014-06-03 2017-07-20 エムティティ イノベーション インコーポレイテッドＭｔｔ Ｉｎｎｏｖａｔｉｏｎ Ｉｎｃｏｒｐｏｒａｔｅｄ 結像、照明、および投影を用途とする効率的、動的、高コントラストなレンジング
JP2016051018A (ja) * 2014-08-29 2016-04-11 浜松ホトニクス株式会社 パルス光整形装置
WO2019116526A1 (ja) * 2017-12-15 2019-06-20 日本電気株式会社 投射装置、インターフェース装置および投射方法
JPWO2019116526A1 (ja) * 2017-12-15 2020-12-10 日本電気株式会社 投射装置、インターフェース装置および投射方法
US11392014B2 (en) 2017-12-15 2022-07-19 Nec Corporation Projection device, interface device, and projection method

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US20070162266A1 (en) 2007-07-12
US20050063032A1 (en) 2005-03-24
CN100397147C (zh) 2008-06-25
KR20040045423A (ko) 2004-06-01
JP4420672B2 (ja) 2010-02-24
US7209279B2 (en) 2007-04-24
JPWO2003036368A1 (ja) 2005-02-17
DE10297383B4 (de) 2016-07-28
CN1575432A (zh) 2005-02-02
KR100910016B1 (ko) 2009-07-30
DE10297383T5 (de) 2004-08-19

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