WO2003036737A8 - Stiffened surface micromachined structures and process for fabricating the same - Google Patents
Stiffened surface micromachined structures and process for fabricating the same Download PDFInfo
- Publication number
- WO2003036737A8 WO2003036737A8 PCT/US2002/033351 US0233351W WO03036737A8 WO 2003036737 A8 WO2003036737 A8 WO 2003036737A8 US 0233351 W US0233351 W US 0233351W WO 03036737 A8 WO03036737 A8 WO 03036737A8
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- silicon nitride
- silicon
- devices
- substrate
- same
- Prior art date
Links
- 238000000034 method Methods 0.000 title abstract 2
- 229910052581 Si3N4 Inorganic materials 0.000 abstract 5
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 abstract 5
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 abstract 3
- 229910052710 silicon Inorganic materials 0.000 abstract 3
- 239000010703 silicon Substances 0.000 abstract 3
- 239000000758 substrate Substances 0.000 abstract 3
- 238000005452 bending Methods 0.000 abstract 1
- 239000003990 capacitor Substances 0.000 abstract 1
- 238000005530 etching Methods 0.000 abstract 1
- 239000002184 metal Substances 0.000 abstract 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
- B81B3/00—Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes
- B81B3/0064—Constitution or structural means for improving or controlling the physical properties of a device
- B81B3/0067—Mechanical properties
- B81B3/007—For controlling stiffness, e.g. ribs
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Micromachines (AREA)
- Mechanical Light Control Or Optical Switches (AREA)
Abstract
Stiffened surface micromachined structures and a method to fabricate the same. A silicon substrate (10) is first etched to produce a mold containing a plurality of trenches or grooves (14) in a lattice configuration. Sacrificial oxide (15) is then grown on the silicon substrate (10) and then a stiffening member (16) (silicon nitride) is deposited over the surface of the substrate, thereby backfilling the grooves with silicon nitride. The silicon nitride is patterned to form mechanical members and metal (40) is then deposited and patterned to form the leads and capacitors for electrostatic actuation of mechanical members. The underlying silicon and sacrificial oxides are removed by etching the mold from underneath the fabricated micromachined devices, leaving free-standing silicon nitride devices with vertical ribs. The devices exhibit increased out-of-plan bending stiffness because of the presence of stiffening ribs. Silicon nitride biaxial pointing mirrors with stiffening ribs are also described.
Priority Applications (4)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| EP02780484A EP1438256A2 (en) | 2001-10-22 | 2002-10-21 | Stiffened surface micromachined structures and process for fabricating the same |
| AU2002343537A AU2002343537A1 (en) | 2001-10-22 | 2002-10-21 | Stiffened surface micromachined structures and process for fabricating the same |
| US10/493,140 US20090065429A9 (en) | 2001-10-22 | 2002-10-21 | Stiffened surface micromachined structures and process for fabricating the same |
| JP2003539116A JP2005506909A (en) | 2001-10-22 | 2002-10-21 | Reinforced surface micromachined structure and manufacturing method thereof |
Applications Claiming Priority (4)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US33043301P | 2001-10-22 | 2001-10-22 | |
| US33043501P | 2001-10-22 | 2001-10-22 | |
| US60/330,433 | 2001-10-22 | ||
| US60/330,435 | 2001-10-22 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| WO2003036737A2 WO2003036737A2 (en) | 2003-05-01 |
| WO2003036737A3 WO2003036737A3 (en) | 2003-11-20 |
| WO2003036737A8 true WO2003036737A8 (en) | 2008-12-31 |
Family
ID=23289754
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| PCT/US2002/033351 WO2003036737A2 (en) | 2001-10-22 | 2002-10-21 | Stiffened surface micromachined structures and process for fabricating the same |
Country Status (4)
| Country | Link |
|---|---|
| EP (1) | EP1438256A2 (en) |
| JP (1) | JP2005506909A (en) |
| AU (1) | AU2002343537A1 (en) |
| WO (1) | WO2003036737A2 (en) |
Families Citing this family (14)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6912082B1 (en) * | 2004-03-11 | 2005-06-28 | Palo Alto Research Center Incorporated | Integrated driver electronics for MEMS device using high voltage thin film transistors |
| WO2008089786A1 (en) * | 2007-01-23 | 2008-07-31 | Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. | Micromechanical component having increased stiffness, and method for the production of the same |
| WO2010005434A1 (en) | 2008-07-09 | 2010-01-14 | Hewlett-Packard Development Company, L.P. | Print head slot ribs |
| DE102009026629B4 (en) * | 2009-06-02 | 2017-09-21 | Robert Bosch Gmbh | Micromechanical system with a buried thin structured polysilicon layer and method for its production |
| WO2011080883A1 (en) * | 2009-12-28 | 2011-07-07 | 株式会社ニコン | Electro-mechanical converter, spatial optical modulator, exposure device, and methods for manufacturing them |
| JP5630015B2 (en) * | 2009-12-28 | 2014-11-26 | 株式会社ニコン | Spatial light modulator, exposure apparatus and manufacturing method thereof |
| KR102108022B1 (en) * | 2011-07-29 | 2020-05-28 | 노반타 코포레이션 | Systems and methods for providing mirrors with high stiffness and low inertia involving chemical etching |
| US9409763B2 (en) | 2012-04-04 | 2016-08-09 | Infineon Technologies Ag | MEMS device and method of making a MEMS device |
| JP2013255975A (en) * | 2012-06-14 | 2013-12-26 | Fujitsu Ltd | Electronic device |
| US9212045B1 (en) * | 2014-07-31 | 2015-12-15 | Infineon Technologies Ag | Micro mechanical structure and method for fabricating the same |
| DE102019111634A1 (en) * | 2019-05-06 | 2020-11-12 | Lpkf Laser & Electronics Ag | Process for the production of microstructures in a glass substrate |
| US11460688B2 (en) * | 2019-08-23 | 2022-10-04 | Tohoku University | Mirror device, scanning laser device and scanning laser display including same mirror device, and method for manufacturing mirror device |
| CN115140703B (en) * | 2022-07-08 | 2024-09-17 | 山东大学 | Device and method for manufacturing prestrain-assisted fold-shaped micro-nano structure |
| DE102023132557A1 (en) * | 2023-11-22 | 2025-05-22 | Tdk Electronics Ag | Microelectromechanical mirror, method for operating a microelectromechanical mirror, projection device and method for producing a micromechanical mirror |
Family Cites Families (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5660680A (en) * | 1994-03-07 | 1997-08-26 | The Regents Of The University Of California | Method for fabrication of high vertical aspect ratio thin film structures |
| US5628917A (en) * | 1995-02-03 | 1997-05-13 | Cornell Research Foundation, Inc. | Masking process for fabricating ultra-high aspect ratio, wafer-free micro-opto-electromechanical structures |
| US6411754B1 (en) * | 2000-08-25 | 2002-06-25 | Corning Incorporated | Micromechanical optical switch and method of manufacture |
-
2002
- 2002-10-21 JP JP2003539116A patent/JP2005506909A/en active Pending
- 2002-10-21 EP EP02780484A patent/EP1438256A2/en not_active Withdrawn
- 2002-10-21 WO PCT/US2002/033351 patent/WO2003036737A2/en active Application Filing
- 2002-10-21 AU AU2002343537A patent/AU2002343537A1/en not_active Abandoned
Also Published As
| Publication number | Publication date |
|---|---|
| WO2003036737A2 (en) | 2003-05-01 |
| WO2003036737A3 (en) | 2003-11-20 |
| AU2002343537A8 (en) | 2009-01-29 |
| JP2005506909A (en) | 2005-03-10 |
| AU2002343537A1 (en) | 2003-05-06 |
| EP1438256A2 (en) | 2004-07-21 |
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