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WO2006011065A1 - Procede de controle microtopographique de surfaces d'objets transparents par triangulation optique - Google Patents

Procede de controle microtopographique de surfaces d'objets transparents par triangulation optique Download PDF

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Publication number
WO2006011065A1
WO2006011065A1 PCT/IB2005/052164 IB2005052164W WO2006011065A1 WO 2006011065 A1 WO2006011065 A1 WO 2006011065A1 IB 2005052164 W IB2005052164 W IB 2005052164W WO 2006011065 A1 WO2006011065 A1 WO 2006011065A1
Authority
WO
WIPO (PCT)
Prior art keywords
inspection
transparent
layer
transparent materials
optical triangulation
Prior art date
Application number
PCT/IB2005/052164
Other languages
English (en)
Other versions
WO2006011065B1 (fr
Inventor
Manuel Filipe Pereira Da Cunha Martins Costa
Original Assignee
Universidade Do Minho
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Universidade Do Minho filed Critical Universidade Do Minho
Priority to EP05754181A priority Critical patent/EP1769219A1/fr
Publication of WO2006011065A1 publication Critical patent/WO2006011065A1/fr
Publication of WO2006011065B1 publication Critical patent/WO2006011065B1/fr

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/30—Measuring arrangements characterised by the use of optical techniques for measuring roughness or irregularity of surfaces
    • G01B11/303—Measuring arrangements characterised by the use of optical techniques for measuring roughness or irregularity of surfaces using photoelectric detection means
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures

Definitions

  • the rugometric evaluation and the microtopographical inspection of surfaces of transparent materials are basic necessities in a wide variety of situations in the industry and ID: evaluation of the quality of finishing of the surface of glass blades, lenses, optic prisms, wedges and other optical components; topographical inspection and measurement of curvature radius of lenses, including contact lenses; rugometric and microtopographical evaluation of thin films, blades, lamellas and other types of parts of glass or other transparent materials.

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Length Measuring Devices By Optical Means (AREA)

Abstract

Cette invention concerne un procédé permettant d'utiliser des systèmes reposant sur la triangulation optique dans la mesure perfilométrique et microtopographique de surfaces de matériaux transparents grâce à l'application, sur la surface se trouvant à l'opposé de celle à mesurer, d'une couche de gel de couplage dont l'indice de réfraction est proche de celui du matériau à mesurer. Cette invention se caractérise en ce que cette couche peut comporter des faces non parallèles, en particulier lorsque des pièces minces sont contrôlées.
PCT/IB2005/052164 2004-07-20 2005-06-29 Procede de controle microtopographique de surfaces d'objets transparents par triangulation optique WO2006011065A1 (fr)

Priority Applications (1)

Application Number Priority Date Filing Date Title
EP05754181A EP1769219A1 (fr) 2004-07-20 2005-06-29 Procede de controle microtopographique de surfaces d'objets transparents par triangulation optique

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
PT103173 2004-07-20
PT10317304 2004-07-20

Publications (2)

Publication Number Publication Date
WO2006011065A1 true WO2006011065A1 (fr) 2006-02-02
WO2006011065B1 WO2006011065B1 (fr) 2006-04-06

Family

ID=35229758

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/IB2005/052164 WO2006011065A1 (fr) 2004-07-20 2005-06-29 Procede de controle microtopographique de surfaces d'objets transparents par triangulation optique

Country Status (2)

Country Link
EP (1) EP1769219A1 (fr)
WO (1) WO2006011065A1 (fr)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN112840442A (zh) * 2018-10-19 2021-05-25 科磊股份有限公司 用于在透明薄膜的上表面进行准确光学形貌测量的可移除不透明涂层

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE4213601A1 (de) * 1992-04-24 1993-10-28 Guenther Dausmann Verfahren zur Bestimmung der Dicke von Körpern aus transparenten Materialien, vorzugsweise von planparallelen Schichten oder Platten, mit einem Triangulationssensor
US6011624A (en) * 1998-01-06 2000-01-04 Zygo Corporation Geometrically-Desensitized interferometer with adjustable range of measurement depths
DE10003194A1 (de) * 2000-01-25 2001-07-26 Wolfgang Dreybrodt Berührungsloses optisches Triangulationsverfahren zur Ermittlung der Oberflächenrauhigkeit von optisch streuenden Oberflächen

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE4213601A1 (de) * 1992-04-24 1993-10-28 Guenther Dausmann Verfahren zur Bestimmung der Dicke von Körpern aus transparenten Materialien, vorzugsweise von planparallelen Schichten oder Platten, mit einem Triangulationssensor
US6011624A (en) * 1998-01-06 2000-01-04 Zygo Corporation Geometrically-Desensitized interferometer with adjustable range of measurement depths
DE10003194A1 (de) * 2000-01-25 2001-07-26 Wolfgang Dreybrodt Berührungsloses optisches Triangulationsverfahren zur Ermittlung der Oberflächenrauhigkeit von optisch streuenden Oberflächen

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN112840442A (zh) * 2018-10-19 2021-05-25 科磊股份有限公司 用于在透明薄膜的上表面进行准确光学形貌测量的可移除不透明涂层

Also Published As

Publication number Publication date
WO2006011065B1 (fr) 2006-04-06
EP1769219A1 (fr) 2007-04-04

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