[go: up one dir, main page]

WO2006029999A3 - Flight time mass spectrometer - Google Patents

Flight time mass spectrometer Download PDF

Info

Publication number
WO2006029999A3
WO2006029999A3 PCT/EP2005/054525 EP2005054525W WO2006029999A3 WO 2006029999 A3 WO2006029999 A3 WO 2006029999A3 EP 2005054525 W EP2005054525 W EP 2005054525W WO 2006029999 A3 WO2006029999 A3 WO 2006029999A3
Authority
WO
WIPO (PCT)
Prior art keywords
ion
mass spectrometer
extraction device
source
flight time
Prior art date
Application number
PCT/EP2005/054525
Other languages
German (de)
French (fr)
Other versions
WO2006029999A2 (en
Inventor
Erwin Hoffmann
Uwe Dahlke
Christian Luedke
Carsten Roland
Jochen Skole
Rainer Sorge
Joerg Wollbrandt
Original Assignee
Ges Zur Foerderung Angewandter Optik Optoelektronik Quantenelektronik & Spektroskopie Ev
Ges Zur Foerderung Der Analytischen Wissenschaften Ev
Erwin Hoffmann
Uwe Dahlke
Christian Luedke
Carsten Roland
Jochen Skole
Rainer Sorge
Joerg Wollbrandt
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ges Zur Foerderung Angewandter Optik Optoelektronik Quantenelektronik & Spektroskopie Ev, Ges Zur Foerderung Der Analytischen Wissenschaften Ev, Erwin Hoffmann, Uwe Dahlke, Christian Luedke, Carsten Roland, Jochen Skole, Rainer Sorge, Joerg Wollbrandt filed Critical Ges Zur Foerderung Angewandter Optik Optoelektronik Quantenelektronik & Spektroskopie Ev
Priority to AU2005284150A priority Critical patent/AU2005284150B2/en
Priority to EP05792139A priority patent/EP1817788B1/en
Priority to AT05792139T priority patent/ATE517428T1/en
Publication of WO2006029999A2 publication Critical patent/WO2006029999A2/en
Publication of WO2006029999A3 publication Critical patent/WO2006029999A3/en

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H01J49/02—Details
    • H01J49/04—Arrangements for introducing or extracting samples to be analysed, e.g. vacuum locks; Arrangements for external adjustment of electron- or ion-optical components
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H01J49/02—Details
    • H01J49/06—Electron- or ion-optical arrangements
    • H01J49/061—Ion deflecting means, e.g. ion gates
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H01J49/02—Details
    • H01J49/06—Electron- or ion-optical arrangements
    • H01J49/062—Ion guides
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H01J49/02—Details
    • H01J49/10—Ion sources; Ion guns
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H01J49/26—Mass spectrometers or separator tubes
    • H01J49/34—Dynamic spectrometers
    • H01J49/40—Time-of-flight spectrometers

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Other Investigation Or Analysis Of Materials By Electrical Means (AREA)
  • Electron Sources, Ion Sources (AREA)

Abstract

A device for producing an ion beam (120) from positively charged ions in an evacuated flight time mass spectrometer (10) containing an ion source (12), an interface (14) for transferring the ion beam of atmospheric pressure into the mass spectrometer (10), and an ion extraction device (64) with a voltage source (74) for the production of a negative potential difference between the ion extraction device (64) and the ion source (12), characterized in that the negative potential difference amounts to at least one - 1 kV and the ion extraction device (64) is connected to the voltage source (74) via a high ohm resistor (72), the value of which is selected in such a way that no spontaneous discharge occurs between the ion source (12) and ion extraction device (64) when voltage is applied.
PCT/EP2005/054525 2004-09-17 2005-09-12 Flight time mass spectrometer WO2006029999A2 (en)

Priority Applications (3)

Application Number Priority Date Filing Date Title
AU2005284150A AU2005284150B2 (en) 2004-09-17 2005-09-12 Flight time mass spectrometer
EP05792139A EP1817788B1 (en) 2004-09-17 2005-09-12 Flight time mass spectrometer
AT05792139T ATE517428T1 (en) 2004-09-17 2005-09-12 TIME OF FLIGHT MASS SPECTROMETER

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE102004045315A DE102004045315A1 (en) 2004-09-17 2004-09-17 Time of Flight Mass Spectrometer
DE102004045315.2 2004-09-17

Publications (2)

Publication Number Publication Date
WO2006029999A2 WO2006029999A2 (en) 2006-03-23
WO2006029999A3 true WO2006029999A3 (en) 2007-08-02

Family

ID=35809639

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/EP2005/054525 WO2006029999A2 (en) 2004-09-17 2005-09-12 Flight time mass spectrometer

Country Status (5)

Country Link
EP (1) EP1817788B1 (en)
AT (1) ATE517428T1 (en)
AU (1) AU2005284150B2 (en)
DE (1) DE102004045315A1 (en)
WO (1) WO2006029999A2 (en)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB201317774D0 (en) * 2013-10-08 2013-11-20 Micromass Ltd An ion inlet assembly
EP3047509B1 (en) 2013-09-20 2023-02-22 Micromass UK Limited Ion inlet assembly

Citations (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE705691C (en) * 1939-03-25 1941-05-07 Ernst Weese Device for tensioning flat membranes
US2925774A (en) * 1955-11-08 1960-02-23 Admiral Corp Frame for a screen
US4150319A (en) * 1977-09-22 1979-04-17 The Bendix Corporation Ion gating grid
GB2080021A (en) * 1980-07-08 1982-01-27 Wollnik Hermann Time-of-flight Mass Spectrometer
JPS647467A (en) * 1987-06-29 1989-01-11 Shimadzu Corp Induction coupling plasma mass spectrometer
US5160840A (en) * 1991-10-25 1992-11-03 Vestal Marvin L Time-of-flight analyzer and method
US5621270A (en) * 1995-03-22 1997-04-15 Litton Systems, Inc. Electron window for toxic remediation device with a support grid having diverging angle holes
US6013913A (en) * 1998-02-06 2000-01-11 The University Of Northern Iowa Multi-pass reflectron time-of-flight mass spectrometer
US6032513A (en) * 1997-06-30 2000-03-07 Texas Instruments Incorporated Apparatus and method for measuring contaminants in semiconductor processing chemicals
US20010032929A1 (en) * 2000-02-29 2001-10-25 Katrin Fuhrer Mobility spectrometer
US6331702B1 (en) * 1999-01-25 2001-12-18 University Of Manitoba Spectrometer provided with pulsed ion source and transmission device to damp ion motion and method of use
US6518569B1 (en) * 1999-06-11 2003-02-11 Science & Technology Corporation @ Unm Ion mirror
DE10162267A1 (en) * 2001-12-18 2003-07-10 Bruker Daltonik Gmbh Time of flight mass spectrometer with orthogonal ion infeed has reflector turned by defined angle about normal to x and y directions, detector turned through twice this angle, shifted into beam
GB2388704A (en) * 2002-05-17 2003-11-19 * Micromass Limited A composite mass spectrum formed from mass spectral data obtained at different sensitivities
US20040144918A1 (en) * 2002-10-11 2004-07-29 Zare Richard N. Gating device and driver for modulation of charged particle beams

Patent Citations (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE705691C (en) * 1939-03-25 1941-05-07 Ernst Weese Device for tensioning flat membranes
US2925774A (en) * 1955-11-08 1960-02-23 Admiral Corp Frame for a screen
US4150319A (en) * 1977-09-22 1979-04-17 The Bendix Corporation Ion gating grid
GB2080021A (en) * 1980-07-08 1982-01-27 Wollnik Hermann Time-of-flight Mass Spectrometer
JPS647467A (en) * 1987-06-29 1989-01-11 Shimadzu Corp Induction coupling plasma mass spectrometer
US5160840A (en) * 1991-10-25 1992-11-03 Vestal Marvin L Time-of-flight analyzer and method
US5621270A (en) * 1995-03-22 1997-04-15 Litton Systems, Inc. Electron window for toxic remediation device with a support grid having diverging angle holes
US6032513A (en) * 1997-06-30 2000-03-07 Texas Instruments Incorporated Apparatus and method for measuring contaminants in semiconductor processing chemicals
US6013913A (en) * 1998-02-06 2000-01-11 The University Of Northern Iowa Multi-pass reflectron time-of-flight mass spectrometer
US6331702B1 (en) * 1999-01-25 2001-12-18 University Of Manitoba Spectrometer provided with pulsed ion source and transmission device to damp ion motion and method of use
US6518569B1 (en) * 1999-06-11 2003-02-11 Science & Technology Corporation @ Unm Ion mirror
US20010032929A1 (en) * 2000-02-29 2001-10-25 Katrin Fuhrer Mobility spectrometer
DE10162267A1 (en) * 2001-12-18 2003-07-10 Bruker Daltonik Gmbh Time of flight mass spectrometer with orthogonal ion infeed has reflector turned by defined angle about normal to x and y directions, detector turned through twice this angle, shifted into beam
GB2388704A (en) * 2002-05-17 2003-11-19 * Micromass Limited A composite mass spectrum formed from mass spectral data obtained at different sensitivities
US20040144918A1 (en) * 2002-10-11 2004-07-29 Zare Richard N. Gating device and driver for modulation of charged particle beams

Non-Patent Citations (2)

* Cited by examiner, † Cited by third party
Title
PATENT ABSTRACTS OF JAPAN vol. 013, no. 176 (E - 749) 25 April 1989 (1989-04-25) *
THOMAS, R.: "A beginner's guide to ICP-MS Part IV: The Interface Region", SPECTROSCOPY, vol. 16, no. 7, July 2001 (2001-07-01), pages 26 - 34, XP002409994 *

Also Published As

Publication number Publication date
DE102004045315A1 (en) 2006-03-30
EP1817788A2 (en) 2007-08-15
ATE517428T1 (en) 2011-08-15
AU2005284150B2 (en) 2011-05-12
EP1817788B1 (en) 2011-07-20
AU2005284150A1 (en) 2006-03-23
WO2006029999A2 (en) 2006-03-23
AU2005284150A8 (en) 2010-06-03

Similar Documents

Publication Publication Date Title
WO2005001879A3 (en) Atmospheric pressure charged particle discriminator for mass spectrometry
WO2008120341A1 (en) Electron gun and electron beam exposure system
WO2005083742A3 (en) A tandem ion-trap time-of-flight mass spectrometer
WO2006115686A3 (en) Method for controlling space charge-driven ion instabilities in electron impact ion sources
US8288718B2 (en) Ion mobility spectrometer and detecting method using the same
WO2004098743A3 (en) Atmospheric pressure ion source
US9281165B1 (en) Bias electrodes for tandem accelerator
WO2010012987A3 (en) Glow discharge ion source
EP1291891A3 (en) Electron-emiting device, electron source, image forming apparatus, and method of manufacturing electron-emitting device and electron source
WO2008064024A3 (en) Apparatus and method for a multi-stage ion transfer tube assembly for use with mass spectrometry
WO2001023863A3 (en) Modified ion source targets for use in liquid maldi ms
KR101446187B1 (en) High voltage insulator for preventing instability in an ion implanter due to triple junction breakdown
CN103632911A (en) Ion source devices and methods
WO2008039745A3 (en) Terminal structure of an ion implanter
CN105460238A (en) Spacecraft surface potential active control system
WO2006029999A3 (en) Flight time mass spectrometer
Denbnovetsky et al. Investigation of forming of electron beam in glow discharge electron guns with additional electrode
EP1026723A3 (en) Vacuum coating forming device
BRPI0308818B8 (en) method and device for compression of substance by shock and plasma cathode for such device
WO2005091331A3 (en) An ionization gauge
US3890535A (en) Ion sources
IL283367B1 (en) High voltage vacuum feed
KR102177593B1 (en) Method for implanting ions on a surface of an object to be treated and installation for implementing this method
EP1418796A3 (en) Erosion reduction for EUV laser produced plasma target sources
WO2018187222A3 (en) Systems and methods for ionizing a surface

Legal Events

Date Code Title Description
AK Designated states

Kind code of ref document: A2

Designated state(s): AE AG AL AM AT AU AZ BA BB BG BR BW BY BZ CA CH CN CO CR CU CZ DE DK DM DZ EC EE EG ES FI GB GD GE GH GM HR HU ID IL IN IS JP KE KG KM KP KR KZ LC LK LR LS LT LU LV MA MD MG MK MN MW MX MZ NA NG NI NO NZ OM PG PH PL PT RO RU SC SD SE SG SK SL SM SY TJ TM TN TR TT TZ UA UG US UZ VC VN YU ZA ZM ZW

AL Designated countries for regional patents

Kind code of ref document: A2

Designated state(s): BW GH GM KE LS MW MZ NA SD SL SZ TZ UG ZM ZW AM AZ BY KG KZ MD RU TJ TM AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HU IE IS IT LT LU LV MC NL PL PT RO SE SI SK TR BF BJ CF CG CI CM GA GN GQ GW ML MR NE SN TD TG

121 Ep: the epo has been informed by wipo that ep was designated in this application
NENP Non-entry into the national phase

Ref country code: DE

WWE Wipo information: entry into national phase

Ref document number: 2005284150

Country of ref document: AU

WWE Wipo information: entry into national phase

Ref document number: 2005792139

Country of ref document: EP

ENP Entry into the national phase

Ref document number: 2005284150

Country of ref document: AU

Date of ref document: 20050912

Kind code of ref document: A

WWP Wipo information: published in national office

Ref document number: 2005284150

Country of ref document: AU

WWP Wipo information: published in national office

Ref document number: 2005792139

Country of ref document: EP