WO2006116890A1

WO2006116890A1 - Vacuum maintaining device

Info

Publication number: WO2006116890A1
Application number: PCT/CH2006/000239
Authority: WO
Inventors: Daniel Suhm
Original assignee: Suhm Mechanik
Priority date: 2005-05-02
Filing date: 2006-04-28
Publication date: 2006-11-09

Abstract

The invention relates to a vacuum maintaining device (1) which comprises a raster surface (2) which is used to tense an object (8) by means of low pressure. The maintaining device (1) is used as an adapter which enables the tensed object (8) to interact with various counter-means.

Description

Vacuum holding device

The invention is in the field of holding devices for holding objects, in particular in the field of vacuum clamping plates for clamping workpieces by means of negative pressure.

Vacuum clamping plates (grid plates) are known from the prior art, which have a flat surface into which, for example, a belt-shaped grid of grooves is embedded. The individual grooves have a regular distance from each other and are designed so that soft endless cord seals of different lengths can be inserted into them. Due to the grid-like arrangement of the grooves, the seal, depending on the grooves in which it is inserted, be adapted in scope and shape to the respective requirements. In order to close the cord seal at their ends, they are simply stacked at right angles. To fix an object on the grid plate, this is placed with a surface on the sealed area. Subsequently, a negative pressure is continuously generated by means of a suction pump between the object to be clamped and the grid plate in the region of the seal, which causes the object to be pressed against the surface of the grid plate.

A problem that adheres to the conventional grid plates known from the prior art is that the seals have a continuous leakage and are therefore insufficient. Therefore, in these systems, it is necessary that the fluid entering due to the leak be continuously drained to ensure sufficient retention. The pumping is usually carried out by means of suitable pumps, which are continuously in use due to the insufficient seal. When machining workpieces on a processing machine, the problem often arises that the workpiece must be temporarily removed from the processing machine, for example, for intermediate processing or for measuring. In this case, the problem arises that the re-positionally precise clamping and adjusting made very difficult even with the modern means known today, is time-consuming and also represents a significant source of error.

An object of the invention is to show a method and a device which allow a simple and quick clamping and unclamping of objects, in particular workpieces to be machined. A further object of the invention is to show a method and a device which make it possible to position objects, in particular workpieces, precisely and with high repeat accuracy at different locations.

The object is achieved by the invention defined in the independent claims.

In the prior art soft sealing cords with a round solid cross section are used today in connection with grid plates. These sealing cords are usually made of a foamed material (sponge rubber) that can be easily compressed and deformed. For soft sealing cords usually applies that they produce no, or only a very small force acting against the contact pressure (back pressure, installation forces). To close the seal, the ends of the sealing cord are placed one above the other. A disadvantage of these conventional seals is, inter alia, that they can deform relatively easily, which causes them to contract depending on pressure. In particular, in the region of the intersections of the channel grooves, this leads to leakage due to undesired lateral deformation. Another disadvantage is that with decreasing length of the sealing cord increases the leakage air. This requires that, depending on the size of the object to be clamped, with increasing sealing surface, a pump with a greater power for generating the negative pressure is required.

In a preferred embodiment of the invention disclosed herein, a seal is used which combines the advantages of a soft sealing cord with those of a hard seal. The seal used is designed so that it has different properties depending on the direction. In the vertical direction, ie in the clamping direction (perpendicular to the plate surface), it is relatively easily deformable, whereas in the lateral direction (transverse to the longitudinal and Aufspannrichtung), it has, inter alia due to the shape of the cross section and the boundary conditions, a higher rigidity, which successfully counteracts a deformation that could lead to leakage. If necessary, the seal has a cross-section, which adjusts the sealing effect depending on the prevailing pressure difference - with increasing pressure difference, the sealing effect increases. This is achieved by asymmetrically designed with respect to the clamping direction cross-sections. Good results have been achieved by tubular seals with a substantially 0- or Q-shaped cross-section. Depending on the field of application, seals with one or more sealing lips are suitable, which are inserted into the groove in such a way that the cross-section additionally fulfills the function of a sealing lip. So that the seal in the vertical direction (perpendicular to the plate surface, respectively parallel to the clamping direction) has a low resistance, it may have a cavity or a laterally arranged, for example circumferential recess. A sealing system of the type described makes it possible to realize seals in a grid plate having a pressure drop of less than 0.1 bar / hour. The seal is preferably made of an elastic, rubber-like material, for example elastomer, silicone, nitrile-butadiene, EPDM, FPM or PVC with a Shore hardness of about 50 to 80 Shore A.

Specific, application-specific, seals are preferably assembled in situ. Hollow, tubular seals, i. Seals which have a cavity in the interior are usually connected or sealed at the ends, so that no negative pressure can occur in the interior of the seal, since otherwise the seals contract. The relative overpressure inside the seal stabilizes the seal on the one hand during operation and also has a positive effect on the sealing performance.

Depending on the field of application, it is possible to produce grid plates which are intended for a single or a certain number of specific applications. In this case, the seal may possibly be placed in a single groove or multiple seals in dedicated grooves adapted to the particular case and, if necessary, vented via separate channels. The invention also offers the possibility of manufacturing grid plates so that they are suitable for the clamping of parts with curved surfaces.

Depending on the application, the surface of the grooves and / or the seal on a certain roughness or coating, which has a positive effect on the sealing behavior. Contrary to popular belief that sealing surfaces should be as free of surface roughness as possible, it has been shown that in certain cases, an increased surface roughness may have a positive effect on the tightness, since it counteracts a disadvantageous displacement, or an unwanted deformation of the seal , Good results were achieved by sandblasting the sidewalls and bottom of the grooves of a grid plate. Alternatively or in addition, the surface depending on the field of application, otherwise roughened or machined, for example by etching or by means of tools (eg end mills, side milling cutters). The effect of changing the surface is that the seal between the wall of the groove and the clamped object in a certain way wedged or stabilized. This ensures that the seal is not able to deform disadvantageously. The known from the prior art constrictions by pulling into the transverse grooves and the associated leakage are not observed. Another positive aspect of wedging is that the seal can not twist longitudinally. This ensures that any existing sealing lip, even at high pressure differences, is always optimally positioned.

To achieve the object, a grid plate with at least one grid surface is proposed which is suitable for use with a high-density sealing system of the type described above. The grid surface has grid-shaped recesses (grooves) which are suitable for receiving a sealing system according to the invention. In contrast to the prior art preferably closed, ie annular seals are used The grid plate has at least one valve which is operatively connected to the grid surface and which is suitable for maintaining a negative pressure between the at least one grid surface and an operatively connected to the grid plate object For example, the grid plate has a rear side instead of the second grid surface, which is designed such that it can be operatively connected to an external grid surface or another clamping device. If required, the rear side has standardized centering means which are designed such that they allow accurate centering at least in one spatial direction. Good results were achieved with tongue and groove pairings. So it is possible to position the grid plate in a simple manner with respect to different antidote. The grooves of a preferred embodiment of a Rasteφlatte invention are arranged in a grid shape at a distance of 20 mm and at an angle of 90 ° to each other, wherein the channel width (groove width) and the channel depth (groove depth) are each about 4 mm.

In a first embodiment, the grid plate on a memory in the form of a storage container, which serves to compensate, or to supportive maintenance of the negative pressure in a system. The storage container is operatively connected via at least one connecting channel with the grid surface of the grid plate and the valve. The valve is used to control the negative pressure or the pressure difference.

In a second embodiment, the grid plate, in addition to the first grid surface, at least one valve and the first channel, which serves for the operative connection of the first grid surface with the valve, a second channel, which is suitable for the operative connection of the at least one valve with a second grid surface In addition, the grid plate has a third channel, which connects the at least one valve to the environment outside the plate. The second screen surface is preferably arranged opposite the first screen surface. It is either part of the grid plate or an antidote with which the grid plate is operatively connected. The at least one valve is here a three-way valve by means of which either the first grid area with the surroundings and / or the second grid area with the environment or else the first and the second grid area can be actively connected to each other and sealed off from the environment. Thus, it is possible either to connect an object to the first grid surface in which the air is reduced from the region between the first grid plate and the object to be clamped via the valve and the third channel leading to the outside, so that a sufficient negative pressure results. Another possibility is that the grid plate by a corresponding position of the valve in the region of the second raster area, a further connection is formed substantially simultaneously or with a time offset, in that a negative pressure is generated in the region of the second raster area. Subsequently, the clamping effect can be maintained by the system is disconnected from the environment. Instead of only one valve further valves or system sections may be provided, which allow a completely separate control and control. Storage tanks may be provided between the first grid surface and the valve and / or the valve and the second grid surface, which are connected to the first or the second channel and assist in maintaining the negative pressure in the region of the first and / or the second grid surface , Alternatively, the negative pressure can be generated via one or more further channels, which serve for sucking off the fluid from the region of the grid surfaces, for example via the antidote.

In a further embodiment, the grid plate next to the first grid area, the valve, the first channel, which connects the first grid area with the valve, a second channel, which is adapted to connect the valve with a second grid surface. A third channel is used to connect the valve to the environment. A storage container is operatively connected to the second channel. In addition, a valve, preferably a check valve, is arranged between the storage container and the second grid surface, wherein the check valve is directed such that it counteracts an increase in pressure in the region of the first grid surface. This configuration makes it possible that, when the third channel is locked, operative connections in the region of the first and second grid surfaces are produced by suction of the fluid over the second grid surface. If now the active compound in the region of the second grid surface is dissolved by supplying fluid, the check valve closes and causes the active compound to be maintained in the region of the first grid surface. Alifällige negative pressure drops are compensated by the storage tank. By means of the storage container is also possible Very fast up and down objects in the area of the first grid area (quick-release fixture).

The sufficient vacuum can be generated both by a suction pump and by an injector pump or other suitable device. Depending on the embodiment, the device for generating the vacuum is integrated in the holding device or can be operatively connected thereto. Corresponding valves, e.g. Check valves, regulate the pressure curve, respectively, the maintenance of the negative pressure (vacuum). In an external arrangement, the feed takes place via suitable connections. If necessary, the negative pressure in the system is secured by one or more check valves.

An injector pump, because of its relatively small size and simple construction, is well integrated into the grid plate and allows the vacuum, e.g. by compressed air can be generated. The advantage is that you can do without expensive pumps. If necessary, the condition of the vacuum is checked by means of a pressure gauge. If required, additional vacuum accumulators can be connected.

The effect of the negative pressure in the reservoir with respect to the at least one clamping region or the grid surface is set via one or more valves. In a preferred embodiment, these valves are designed so that they not only control the connection between the reservoir and the clamping region, but also have a connection to the environment. Both of these connections are connected via a hose to the clamping surface (grid). The valves have two positions, which are achieved by light to the right or to the left.

Due to the high sealing performance of the sealing system, in contrast to the prior art, there is the possibility to dispense with a continuous generation of the negative pressure. Once connected to the object to be clamped, the connection remains upright this is actively redissolved by supplying fluid. It is thus possible to use the grid plate as a holding respectively adapter system with standardized interfaces for different processing devices, After a workpiece to be machined with the holding device (grid plate) has been operatively connected, it usually remains connected to the end of the processing sequence with this. The change from one processing station to the next is particularly simple, since the holding device serves as standardized adapters for the individual processing machines. Due to its simple structure, the relatively low weight and in particular the independence of a vacuum source, the change is very simple. In contrast to the prior art, the invention makes it possible to design a latch plate so that it remains operatively connected to the object to be processed during an entire processing sequence.

Embodiments of the invention will be explained in more detail with reference to the following figures. In the individual figures, like numbers refer to like parts. It shows schematically and greatly simplified

1 shows a first embodiment of a grid plate during vacuuming.

Fig. 2 shows the grid plate of Figure 1 in a vacuumed state;

Fig. 3 shows the grid plate according to Figure 1 when changing to another antidote;

Fig. 4 shows the grid plate according to Figure 1 in operative connection with the other antidote;

Fig. 5 shows a second embodiment of a grid plate in vacuuming; Fig. 6 shows the grid plate according to Figure 5 in a vacuumed state;

Fig. 7 shows the grid plate according to Figure 5 when changing to another antidote;

Fig. 8 shows various cross-sections of seals;

Fig. 9 shows a third embodiment of a grid plate in a perspective view;

Fig. 10 shows a valve in a perspective view;

Fig. 1 1 shows the valve of Figure 10 in a side view;

Fig. 12 shows the valve of Figure 10 in a side sectional view.

1 shows schematically a first embodiment of a grid plate 1. The grid plate 1 has a grid surface 2, which is operatively connected via a first channel 3 with a valve 4. A storage container 5 is operatively connected to the valve 4 by means of the first channel 3 and serves to support a vacuum in the region of the first grid surface 2. The grid surface 2 has a multiplicity of depressions (grooves) 6 which are arranged in the form of a grid and for receiving a first seal 7 are suitable. Above the first grid surface is an object to be clamped (workpiece) 8 can be seen, which rests on a surface 1 1 of the grid surface 2 (the drawing, the sake of clarity, a distance) and sealed by the peripheral seal 7 against the grid surface 2. The grid plate has a second channel 9, which effectively connects a second grid surface 10 with the valve 4. The second grid surface 10 is arranged opposite the first grid surface 2 and not part of the grid plate 1 but a first counter-agent 12, for example a machine table of a Bearbeitungsma ^¬ machine (not shown). The second grid surface 10 serves to fasten the Ras n / 21

terplatte against the antidote by means of negative pressure. A second seal 16 serves to seal the grid plate 1 with respect to the counter-agent 12. The second grid surface 10 may, depending on the embodiment, also be part of the grid plate 1. Alternatively or in addition, further holding means can be provided, which serves for clamping the grid plate with respect to one or more counter-agents. If necessary, centering means, e.g. in the form of groove and pin, provided, which serves for easy centering of the grid plate against one or more counter-agents. A third channel 13 connects the valve 4 with the environment and is used for pumping, respectively supplying air from the region of the first and / or the second grid surface 2, 10. In the illustration shown, the valve 4 is in a position in it the first and the second screen surface 2, 10 and the storage container 5 via the channels 3, 9, 13 connects to the environment. The arrows 14 represent schematically the suction of air, so that the object 8 is stretched with the first grid surface 2 and the grid plate 1 via the second grid surface 10 with the antidote 12 is operatively connected. In the tensioned state of the object 8 are on the surface 1 1 of the first grid surface 2 and the grid plate 1 on the surface 15 of the antidote 12 in a form-fitting manner. Friction and / or positive locking prevents unwanted lateral displacement.

FIG. 2 shows the holding device according to FIG. 1 in a vacuum-sealed state and with a closed valve 4. The negative pressure prevailing in the region of the first and the second screen surface is schematically represented by a hatching. The object 8 is fixedly connected to the grid plate 1 and the grid plate 1 fixed to the antidote 12, so that e.g. a processing of the article 8 is possible. Unlike the prior art, continuous pumping of fluid due to leakage is not necessary.

FIG. 3 shows the re-clamping (illustrated schematically by arrows 21) of the article 8 together with the grid plate 1 from the first counter-agent 12 to a second counter-agent 20. For this purpose, the valve 4 is switched so that the second grid surface 10 is ventilated and the holder is released in this area. If necessary, centering means (not shown in greater detail) are provided in the region of the first and second counter-means 12, 20, which enable simple centering and alignment of the grid plate 1 with respect to the counter-means 12, 20. Alternatively or in addition to the second grid surface 10 further fastening means can be provided if necessary, which serve for fastening the grid plate 1 against the counter-means 12, 20.

Figure 4 shows the grid plate 1 after re-tightening with the object 8 and with the second antidote 20 operatively connected. The valve 4 is again shown in the closed position and serves to maintain the negative pressure (horizontal hatching) in the region of the grid surfaces 2, 10. The negative pressure in the region of the second grid surface 10 is set via the storage container 5 or by pumping off fluid. If necessary, the grid surfaces 2, 10 can be controlled separately via separate line systems. Instead of the second grid surface other holding means can be provided with which the grid plate can be operatively connected. An advantage of the device described is that the object 8 can be quickly and easily clamped together with the grid plate at different locations.

FIG. 5 shows a further embodiment of a holding device 1 with a first raster surface 2 which serves for clamping an article 8 on the surface 11 of the raster surface 2. The grid surface 2 is operatively connected to a second grid surface 10 via a first line 3, a first valve 4, a second line 9 and a second valve 30, here designed as a check valve. The second grid surface 10 has a separate vent 29 comprising a fourth conduit 31 and a third valve 32. The second grid surface 10 here forms part of an antidote 12. Alternatively, the second grid surface 10 may also be integrated into the grid plate 1. In the illustration shown is about ie Vent 29 air from the area of the first and the second grid surface 2, 10 pumped. The first valve 4 is so switched that no air via the third line 13 can flow into the system. The object 8 is compared with the grid plate 1 and the grid plate 1 relative to the first antidote 12 by means of seals 7, 16 sealed so that no disturbing air from the environment in the grid surfaces 2, 10 can enter the system. A storage tank 5, which is arranged in the embodiment shown between the valve 4 and the check valve 30, serves to compensate, respectively for maintaining the vacuum in the system.

FIG. 6 shows the system in a vacuum-set state after sufficient air has been pumped out, so that the object 8, the grid plate 1 and the first counter-agent 12 are firmly connected to one another. So that no air flows from the environment, the first and the third valve 4, 32 are sealed. The vacuum prevailing in the system is shown schematically by a horizontal hatching with broken lines. When re-clamping (arrows 21) of the holding device 1 from the first to a second antidote 12, 20, as shown in Figure 7, the third valve 32 is opened so that air can penetrate into the region of the second grid surface 10 and the connection between the grid plate 1 and the antidote 12 in this area is solved. As a result of pressure change occurring closes the second valve 30 (check valve) and prevents a ventilation of the first grid surface 2 takes place. The operative connection between the object 8 and the grid plate 1 thus remains in the region of the first grid surface 2 maintained. An operative connection of the grid plate 1 with a second counter-agent 20 is particularly simple in the embodiment shown, since only one operative connection in the region of the second grid surface 10 has to be produced. If required, the retaining device shown can also be operatively connected to other retaining means. If necessary existing centering serve for easy positioning of the grid plate 1 during re-clamping. 8 shows cross-sections of different embodiments of seals 7, 16 which can be inserted into grooves 6 of a grid surface 2, 10 (cf., FIGS. 1 to 8) between an object 8 and a grid surface 10, respectively the grid plate 1. All of the seals 7, 16 shown here are of tubular design and have a cavity 35 in the interior of their cross-section. In contrast to the essentially round variant of FIG. 3 a), the variant of FIG. 3 b) has a sealing lip 36 which additionally seals against the surface of the article 8. The sealing lip 36 also prevents accidental rotation of the seal in use. The seal according to FIG. 3 c) has a lower and an upper sealing lip 36, 37. The convex, here outwardly disposed surface 38 causes in use an additional support of the sealing effect.

Figure 9 shows an embodiment of a grid plate 1 in a perspective view obliquely from above. The grid plate 1 essentially has the structure of the grid plate 1 according to FIGS. 5 to 7. Both the grid plate 1 and a clamped object 8 are shown partially cut to improve clarity, so that a view into the interior of the grid plate, or the sealing area is possible. A first grid surface 2 has grid-shaped grooves 6, which are suitable for receiving one or more seals 7 of the type described. The seals 7 are arranged here by three openings 40 of three first channels 1 1, which effectively connects the grid area 2 with first valves 4. The valves 4 make it possible, on the one hand, to connect the grid surface 2 in segments to a storage container 5 which occupies the interior of the grid plate 1 between the grid surface 2 and a rear wall 41. On the other hand, the valves 4 make it possible to establish a connection between the environment outside the holding device 1 and the grid surface 2. The rear wall 41 and the grid surface 2 are supported if necessary via supports 42 against each other. The supports 42 counteract undesirable deformations. The storage container 5 has in the Rich back wall 41 check valves 30, which are aligned so that they counteract an increase in pressure inside the storage container 5. The grid plate 1 is formed as a storage disk as a result of the volume of the storage container 5, so that it offers the possibility to safely secure objects 8 for several hours without additional aids.

As a result of its construction with the three separately controllable valves 4, the embodiment shown has the possibility of simultaneously fastening three objects 8 independently of one another. According to the base of the object to be clamped a seal of the type described in accordance with the base of the object to be clamped 8 in grooves 6 is inserted. In contrast to the prior art, the seals 7 are preferably designed annular. If necessary, these are assembled on site by adapting an endless seal to the length and then sealingly connected at their ends. For tubular gaskets, good results are obtained by inserting a transition piece into the ends of the gasket and then gluing the two ends and the transition piece together. Components such as the grid surface 2 are produced, for example, by milling from metal, preferably aluminum, or injection molding from a suitable plastic or metal. The storage container 5 can also be arranged externally if required. With regard to the function and mode of operation of the embodiment shown, reference is made to FIGS. 5 to 7.

FIG. 10 shows an embodiment of a valve 4 in a perspective view. FIG. 11 shows the valve 4 according to FIG. 10 in a side view and FIG. 12 shows a section through the valve 4 according to FIG. 11 along the section line DD. The valve shown has the advantage that it is very dense and makes it possible to switch without loss. The valve 4 here has a two-part housing 45 in which a pin 46 is arranged, which can be moved in the longitudinal direction. On the inner end of the pin 46 is a here in Essentially spherical ausgestalteter sealing body 47 is mounted, which presses in the middle position against a first and a second here annular elastic seal 48, 49 and thus keeps the valve 4 closed in all directions. The valve 4 has three openings 50, 51, 52. By deflecting the sealing body 47 from the zero position (as shown) in the + z direction, the second seal 49 is compressed by the sealing body 47 at the same time the sealing body 47 lifts from the first seal 48, so that a continuous connection between the first and the second Opening 50, 51 arises. In the grid plate according to FIG. 9, the grid surface 2 would thus be operatively connected to the environment outside the grid plate. By deflecting the sealing body 47 in the -z direction, the first seal is compressed and a continuous opening in the region of the second seal 49 is released. In the grid plate according to FIG. 9, a region of the raster surface 2 would thereby be operatively connected to the storage container 5. In the valve 4 shown, the pin 46 and the housing 45 are operatively connected via a thread 53. A deflection of the sealing body 47 takes place here by screwing or unscrewing the pin 46. Another type of deflection is possible. The valve is in the shown or in a modified embodiment, for example, with a sealing body and only an annular seal suitable for other uses.

The embodiments shown are purely exemplary. It will be understood by those skilled in the art that other embodiments will be apparent from a combination of the features of the illustrated embodiments.

Claims

claims

1 holding device (1) for clamping an object (8) by means of negative pressure, with at least one first grid surface (2) having at least one groove (6) suitable for receiving a seal (7), characterized in that the holding device ( 1) has a valve (4) which is operatively connected to the first grid surface (2) and serves to maintain a negative pressure in the region of the first grid surface (2).

2 holding device (1) according to claim 1, characterized in that the holding device (1) has at least one channel (3, 9, 1 1), which serves for the operative connection of the first grid surface (2) with a second grid surface (10).

3 holding device (1) according to claim 2, characterized in that the second grid surface (10) is a part of the holding device (1).

4 holding device (1) according to claim 3, characterized in that the second grid surface (10) is arranged substantially opposite to the first grid surface (2).

5 holding device (1) according to one of the preceding claims, characterized by at least one memory (5), which serves to maintain the negative pressure in the region of the first and / or the second grid surface (2, 10).

6 holding device (1) according to one of the preceding claims, characterized in that the holding device (1) has centering means which are used for centering tion of the holding device (1) against at least one counter-agent (12, 20) is used.

Holding device (1) according to one of the preceding claims, characterized in that the valve (4) has a in one direction (-z, + z) displaceable sealing body (47) and a first and a second annular seal (48, 49), wherein the valve (4) can be opened by the sealing body (47) in the direction (-z, + z) of the first or the second seal (48, 49) is displaced, so that there is a gap formation between the first or the second seal (48, 49) and the sealing body (47) comes.

Holding device (1) according to claim 1, characterized by a first raster surface (2) which has a first valve (4) which is operatively connected to the first raster surface (2) via a first channel (3), a second channel (9). for operatively connecting the first valve (4) to a second screen surface (10), a third channel operatively connecting the first valve (4) to the atmosphere, and a check valve (30) for controlling the flow of fluid through the second channel (10). 9).

Holding device (1) according to claim 8, characterized in that a storage container (5) between the check valve (30) and the first valve (4) is arranged and serves to maintain the negative pressure in the region of the first grid surface (2).

Holding device (1) according to one of the preceding claims, characterized in that the holding device (1) has a plurality of sealing regions (7) which can be independently operatively connected to a memory (5). Seal (7, 16) for use in a holding device (1) according to one of the preceding claims, characterized in that the seal is designed annular and has a cavity in the interior.

Seal (7, 16) according to claim 7, characterized in that the seal has at least one sealing lip.

Method for clamping an article (8) on a holding device (1) characterized by the following method steps:

a) inserting an annular seal (7) in at least one groove (6) of a grid surface (2) of a holding device (1);

b) positioning the object to be clamped (8) on the grid surface (2), so that the seal (7) is covered by the object to be clamped;

c) sucking off the fluid from the region between the object to be clamped (8) and the grid surface (2) bordered by the seal (7) until the object (8) is sufficiently against the surface (11) of the grid surface (2). is pressed;

d) closing a valve (4), so that the negative pressure in the vacuumed area remains.

A method according to claim 13, characterized in that in addition a memory (5), which is operatively connected to the vacuumed region of the grid surface is vacuumed. A method according to claim 13 or 14, characterized in that a further grid surface (10) is vacuum-sealed, so that the holding device (1) with an antidote (12, 20) is operatively connected.

A method according to claim 15, characterized in that a check valve (30) prevents a backflow of gas from the vacuum-sealed area of the second grid area into the area of the first grid area.