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WO2008046398A3 - Method for producing self-assembled monolayers on solid body surfaces - Google Patents

Method for producing self-assembled monolayers on solid body surfaces Download PDF

Info

Publication number
WO2008046398A3
WO2008046398A3 PCT/DE2007/001833 DE2007001833W WO2008046398A3 WO 2008046398 A3 WO2008046398 A3 WO 2008046398A3 DE 2007001833 W DE2007001833 W DE 2007001833W WO 2008046398 A3 WO2008046398 A3 WO 2008046398A3
Authority
WO
WIPO (PCT)
Prior art keywords
solid body
producing self
body surfaces
assembled monolayers
monolayers
Prior art date
Application number
PCT/DE2007/001833
Other languages
German (de)
French (fr)
Other versions
WO2008046398A2 (en
Inventor
Bernd Holzapfel
Original Assignee
Univ Marburg Philipps
Bernd Holzapfel
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Univ Marburg Philipps, Bernd Holzapfel filed Critical Univ Marburg Philipps
Publication of WO2008046398A2 publication Critical patent/WO2008046398A2/en
Publication of WO2008046398A3 publication Critical patent/WO2008046398A3/en

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D—PROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D3/00—Pretreatment of surfaces to which liquids or other fluent materials are to be applied; After-treatment of applied coatings, e.g. intermediate treating of an applied coating preparatory to subsequent applications of liquids or other fluent materials
    • B05D3/02—Pretreatment of surfaces to which liquids or other fluent materials are to be applied; After-treatment of applied coatings, e.g. intermediate treating of an applied coating preparatory to subsequent applications of liquids or other fluent materials by baking
    • B05D3/0218—Pretreatment, e.g. heating the substrate
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D—PROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D1/00—Processes for applying liquids or other fluent materials
    • B05D1/60—Deposition of organic layers from vapour phase
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D—PROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D1/00—Processes for applying liquids or other fluent materials
    • B05D1/18—Processes for applying liquids or other fluent materials performed by dipping
    • B05D1/185—Processes for applying liquids or other fluent materials performed by dipping applying monomolecular layers

Landscapes

  • Physical Vapour Deposition (AREA)
  • Chemical Vapour Deposition (AREA)

Abstract

The present invention relates to a method for producing self-assembled monolayers (SAMs) on solid body surfaces, wherein impurities of the surfaces are minimized by the use of solvents and/or oxygen. The substances to be assembled are evaporated and vapour deposited in the oxygen-free gas stream onto the solid body surface to be coated at pressures ranging between 10-6 and 10-8 mbar. Conventional methods in which SAMs are deposited from a solution require deposition times ranging from some hours to several days. The inventive method, however, allows the deposition of monolayers within 30 to 60 minutes.
PCT/DE2007/001833 2006-10-16 2007-10-16 Method for producing self-assembled monolayers on solid body surfaces WO2008046398A2 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE200610049432 DE102006049432A1 (en) 2006-10-16 2006-10-16 Process for the preparation of self-aggregating monolayers on solid surfaces
DE102006049432.6 2006-10-16

Publications (2)

Publication Number Publication Date
WO2008046398A2 WO2008046398A2 (en) 2008-04-24
WO2008046398A3 true WO2008046398A3 (en) 2008-09-25

Family

ID=39185042

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/DE2007/001833 WO2008046398A2 (en) 2006-10-16 2007-10-16 Method for producing self-assembled monolayers on solid body surfaces

Country Status (2)

Country Link
DE (1) DE102006049432A1 (en)
WO (1) WO2008046398A2 (en)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102552977A (en) * 2012-01-19 2012-07-11 上海交通大学医学院附属第九人民医院 Preparation method and application of metal surface-etched nanoporous array
DE102017216028A1 (en) * 2017-09-12 2019-03-14 Robert Bosch Gmbh Electrochemical cell with coated surfaces

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0547550A1 (en) * 1991-12-16 1993-06-23 Matsushita Electric Industrial Co., Ltd. Method of manufacturing a chemically adsorbed film
US6365229B1 (en) * 1998-09-30 2002-04-02 Texas Instruments Incorporated Surface treatment material deposition and recapture
US20040071863A1 (en) * 2002-10-11 2004-04-15 Xiaoyang Zhu Methods for forming coatings on MEMS devices
WO2004037446A1 (en) * 2002-10-18 2004-05-06 Ecole Polytechnique Federale De Lausanne Gas phase deposition of perfluorinated alkyl silanes
US20040198898A1 (en) * 2001-08-03 2004-10-07 Arora Pramod K. Method for vapor deposition of hydrophobic films on surfaces

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6576489B2 (en) * 2001-05-07 2003-06-10 Applied Materials, Inc. Methods of forming microstructure devices
US20020182385A1 (en) * 2001-05-29 2002-12-05 Rensselaer Polytechnic Institute Atomic layer passivation
JP4099116B2 (en) * 2002-06-14 2008-06-11 エーエスエムエル ネザーランズ ビー．ブイ． EUV lithographic projection apparatus with optical element with self-assembled monolayer, optical element with self-assembled monolayer, method of applying self-assembled monolayer, device manufacturing method
US7327535B2 (en) * 2003-05-08 2008-02-05 Sae Magnetics (H.K.) Ltd. Hybrid coating for magnetic heads
DE102004009600B4 (en) * 2004-02-27 2008-04-03 Qimonda Ag Self-organizing organic dielectric layers based on phosphonic acid derivatives

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0547550A1 (en) * 1991-12-16 1993-06-23 Matsushita Electric Industrial Co., Ltd. Method of manufacturing a chemically adsorbed film
US6365229B1 (en) * 1998-09-30 2002-04-02 Texas Instruments Incorporated Surface treatment material deposition and recapture
US20040198898A1 (en) * 2001-08-03 2004-10-07 Arora Pramod K. Method for vapor deposition of hydrophobic films on surfaces
US20040071863A1 (en) * 2002-10-11 2004-04-15 Xiaoyang Zhu Methods for forming coatings on MEMS devices
WO2004037446A1 (en) * 2002-10-18 2004-05-06 Ecole Polytechnique Federale De Lausanne Gas phase deposition of perfluorinated alkyl silanes

Also Published As

Publication number Publication date
WO2008046398A2 (en) 2008-04-24
DE102006049432A1 (en) 2008-04-17

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