WO2008130537A3 - Dispositif micromécanique doté de contacts en alliage d'or et procédé de fabrication - Google Patents
Dispositif micromécanique doté de contacts en alliage d'or et procédé de fabrication Download PDFInfo
- Publication number
- WO2008130537A3 WO2008130537A3 PCT/US2008/004844 US2008004844W WO2008130537A3 WO 2008130537 A3 WO2008130537 A3 WO 2008130537A3 US 2008004844 W US2008004844 W US 2008004844W WO 2008130537 A3 WO2008130537 A3 WO 2008130537A3
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- gold alloy
- switch
- gold
- manufacture
- contact
- Prior art date
Links
- 229910001020 Au alloy Inorganic materials 0.000 title abstract 3
- 239000003353 gold alloy Substances 0.000 title abstract 3
- 238000004519 manufacturing process Methods 0.000 title 1
- 238000000034 method Methods 0.000 title 1
- 239000000463 material Substances 0.000 abstract 3
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 abstract 2
- 239000010931 gold Substances 0.000 abstract 2
- 229910052737 gold Inorganic materials 0.000 abstract 2
- 239000000956 alloy Substances 0.000 abstract 1
- 229910045601 alloy Inorganic materials 0.000 abstract 1
- 230000000295 complement effect Effects 0.000 abstract 1
- 238000005201 scrubbing Methods 0.000 abstract 1
- 238000003466 welding Methods 0.000 abstract 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
- H01H1/00—Contacts
- H01H1/0036—Switches making use of microelectromechanical systems [MEMS]
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
- H01H1/00—Contacts
- H01H1/02—Contacts characterised by the material thereof
- H01H1/021—Composite material
- H01H1/023—Composite material having a noble metal as the basic material
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
- H01H1/00—Contacts
- H01H1/02—Contacts characterised by the material thereof
- H01H1/04—Co-operating contacts of different material
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
- H01H1/00—Contacts
- H01H1/0036—Switches making use of microelectromechanical systems [MEMS]
- H01H2001/0052—Special contact materials used for MEMS
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
- H01H1/00—Contacts
- H01H1/0036—Switches making use of microelectromechanical systems [MEMS]
- H01H2001/0078—Switches making use of microelectromechanical systems [MEMS] with parallel movement of the movable contact relative to the substrate
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
- H01H61/00—Electrothermal relays
- H01H2061/006—Micromechanical thermal relay
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
- H01H61/00—Electrothermal relays
- H01H2061/006—Micromechanical thermal relay
- H01H2061/008—Micromechanical actuator with a cold and a hot arm, coupled together at one end
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Composite Materials (AREA)
- Materials Engineering (AREA)
- Physics & Mathematics (AREA)
- Electromagnetism (AREA)
- Micromachines (AREA)
- Manufacture Of Switches (AREA)
- Contacts (AREA)
Abstract
Un dispositif de commutateur MEMS est réalisé en utilisant un alliage d'or en tant que matériau de contact de commutateur. L'augmentation de la dureté mécanique de l'alliage comparée à celle à l'or pur évite que les contacts du commutateur ne se soudent les uns aux autres. Une action de nettoyage qui a lieu lorsque le commutateur se ferme peut permettre aux surfaces de contact de venir en appui là où leurs surfaces sont complémentaires, résultant ainsi en une zone de contact plus grande et en une faible résistance de contact, malgré la résistance de feuille de l'alliage d'or plus élevée que celle de l'or pur.
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US11/785,119 | 2007-04-16 | ||
US11/785,119 US20080250785A1 (en) | 2007-04-16 | 2007-04-16 | Micromechanical device with gold alloy contacts and method of manufacture |
Publications (2)
Publication Number | Publication Date |
---|---|
WO2008130537A2 WO2008130537A2 (fr) | 2008-10-30 |
WO2008130537A3 true WO2008130537A3 (fr) | 2009-12-30 |
Family
ID=39852475
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
PCT/US2008/004844 WO2008130537A2 (fr) | 2007-04-16 | 2008-04-15 | Dispositif micromécanique doté de contacts en alliage d'or et procédé de fabrication |
Country Status (2)
Country | Link |
---|---|
US (1) | US20080250785A1 (fr) |
WO (1) | WO2008130537A2 (fr) |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20120174572A1 (en) * | 2011-01-10 | 2012-07-12 | Donato Clausi | Method for mechanical and electrical integration of sma wires to microsystems |
ES2555828B1 (es) | 2014-07-04 | 2016-10-24 | Bsh Electrodomésticos España, S.A. | Disposición de quemadores de gas, punto de cocción, y cocina |
US12055927B2 (en) | 2021-02-26 | 2024-08-06 | Honeywell International Inc. | Thermal metamaterial for low power MEMS thermal control |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20020011758A1 (en) * | 1999-02-26 | 2002-01-31 | Vivek Agrawal | MEMS microactuators located in interior regions of frames having openings therein and methods of operating same |
US20050236935A1 (en) * | 2004-04-22 | 2005-10-27 | Ngk Insulators, Ltd. | Microswitch and method for manufacturing the same |
US7086918B2 (en) * | 2002-12-11 | 2006-08-08 | Applied Materials, Inc. | Low temperature process for passivation applications |
Family Cites Families (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US7235750B1 (en) * | 2005-01-31 | 2007-06-26 | United States Of America As Represented By The Secretary Of The Air Force | Radio frequency MEMS switch contact metal selection |
US20080197964A1 (en) * | 2007-02-21 | 2008-08-21 | Simpler Networks Inc. | Mems actuators and switches |
-
2007
- 2007-04-16 US US11/785,119 patent/US20080250785A1/en not_active Abandoned
-
2008
- 2008-04-15 WO PCT/US2008/004844 patent/WO2008130537A2/fr active Application Filing
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20020011758A1 (en) * | 1999-02-26 | 2002-01-31 | Vivek Agrawal | MEMS microactuators located in interior regions of frames having openings therein and methods of operating same |
US7086918B2 (en) * | 2002-12-11 | 2006-08-08 | Applied Materials, Inc. | Low temperature process for passivation applications |
US20050236935A1 (en) * | 2004-04-22 | 2005-10-27 | Ngk Insulators, Ltd. | Microswitch and method for manufacturing the same |
Also Published As
Publication number | Publication date |
---|---|
WO2008130537A2 (fr) | 2008-10-30 |
US20080250785A1 (en) | 2008-10-16 |
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