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WO2018143300A1 - Lampe à décharge haute pression - Google Patents

Lampe à décharge haute pression Download PDF

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Publication number
WO2018143300A1
WO2018143300A1 PCT/JP2018/003293 JP2018003293W WO2018143300A1 WO 2018143300 A1 WO2018143300 A1 WO 2018143300A1 JP 2018003293 W JP2018003293 W JP 2018003293W WO 2018143300 A1 WO2018143300 A1 WO 2018143300A1
Authority
WO
WIPO (PCT)
Prior art keywords
tube portion
reflector
side tube
lamp
arc tube
Prior art date
Application number
PCT/JP2018/003293
Other languages
English (en)
Japanese (ja)
Inventor
智紀 原田
洋徳 川島
榎本　芳幸
芳幸 吉本
工 富樫
Original Assignee
株式会社ブイ・テクノロジー
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 株式会社ブイ・テクノロジー filed Critical 株式会社ブイ・テクノロジー
Priority to KR1020197022306A priority Critical patent/KR102483865B1/ko
Priority to JP2018552268A priority patent/JP6457162B2/ja
Priority to CN201880009946.0A priority patent/CN110249267B/zh
Publication of WO2018143300A1 publication Critical patent/WO2018143300A1/fr

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Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/20—Exposure; Apparatus therefor
    • G03F7/2002—Exposure; Apparatus therefor with visible light or UV light, through an original having an opaque pattern on a transparent support, e.g. film printing, projection printing; by reflection of visible or UV light from an original such as a printed image
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/20—Exposure; Apparatus therefor
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J61/00—Gas-discharge or vapour-discharge lamps
    • H01J61/02—Details
    • H01J61/36—Seals between parts of vessels; Seals for leading-in conductors; Leading-in conductors
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J61/00—Gas-discharge or vapour-discharge lamps
    • H01J61/02—Details
    • H01J61/52—Cooling arrangements; Heating arrangements; Means for circulating gas or vapour within the discharge space
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J61/00—Gas-discharge or vapour-discharge lamps
    • H01J61/84—Lamps with discharge constricted by high pressure
    • H01J61/86—Lamps with discharge constricted by high pressure with discharge additionally constricted by close spacing of electrodes, e.g. for optical projection

Definitions

  • the present invention relates to a high-pressure discharge lamp, and more particularly to a high-pressure discharge lamp constituting a light source section of a multi-lamp of an exposure apparatus.
  • a conventional high-pressure discharge lamp 100 includes an arc tube 110 that discharges and emits light, a reflector 120 that emits light from the arc tube 110 with directivity, and an arc tube 110.
  • An insulator 130 for fixing the reflector 120 and a wire 140 electrically connected to the arc tube 110 are mainly provided.
  • a light emitting unit 111 having an internal space filled with halogen gas, mercury, starting argon, and the like, a pair of sealing units 112 and 113 for sealing the internal space of the light emitting unit 111, and light emission
  • a pair of electrodes 114 and 115 are provided in the portion 111 so as to face each other.
  • an incandescent lamp 131 is provided inside the insulator 130 so that whether or not the discharge lamp 100 is a genuine product can be inspected with high accuracy, in a short time, and at low cost.
  • the present invention has been made in view of the above-described problems, and an object of the present invention is to provide a high-pressure discharge lamp capable of improving cooling efficiency and increasing illuminance.
  • An ellipsoidal or spherical arc tube portion in which a pair of electrodes are arranged to face each other, and a pair of sides connected to both ends of the arc tube portion and extending along the longitudinal axis of the pair of electrodes
  • a glass arc tube having a tube portion Provided on one side in the longitudinal axis direction, an opening from which one side tube portion projects, a parabolic reflecting surface formed around the longitudinal axis, and formed on the other side in the longitudinal axis direction
  • a reflector having an insertion hole into which the other side tube portion can be inserted with a gap, and
  • An insulator to which the arc tube and the reflector are respectively fixed; With The insulator has an open portion that communicates the space formed between the other side tube portion and the insertion hole of the reflector and the outside, The length of the one side tube portion is longer than the length of the other side tube portion.
  • the high-pressure discharge lamp according to (1) wherein the one side tube portion is disposed in a dead area of the lamp.
  • the reflector is provided with a flat surface adjacent to the opening and perpendicular to the longitudinal axis direction, In the longitudinal axis direction, the distance L3 from the flat surface of the reflector to the one side tube portion is 0.2 ⁇ L4, where L4 is the distance from the center of the arc tube portion to the flat surface of the reflector. ⁇ L3 ⁇ 1.0 ⁇ L4, The high-pressure discharge lamp according to (1) or (2).
  • the insulator has an open portion that communicates the space formed between the other side tube portion of the arc tube and the insertion hole of the reflector and the outside.
  • the length of the side tube portion is longer than the length of the other side tube portion.
  • FIG. 1 It is a perspective view of the high-pressure discharge lamp concerning one embodiment of the present invention. It is a side view of the high pressure discharge lamp shown in FIG. It is sectional drawing of the high pressure discharge lamp shown in FIG. It is sectional drawing which cut
  • A) is a figure which shows the orientation distribution of the light emitted from the luminescent spot
  • (b) is a figure which shows the orientation distribution of the light reflected by the reflective surface of the reflector, and a dead area.
  • FIG. A
  • FIG. 1 is a figure which shows the orientation distribution of the light emitted from the luminescent spot
  • (b) is a figure which shows the orientation distribution of the light reflected by the reflective surface of the reflector, and a dead area.
  • A is a figure which shows the orientation distribution of the light emitted from the luminescent spot
  • (b) is a figure which shows the orientation distribution of the light reflected by the reflective surface
  • the high-pressure discharge lamp 1 of the present embodiment includes a glass arc tube 10 that discharges and emits light, a reflector 20 that emits light from the arc tube 10 with directivity, and Mainly provided is an insulator 30 for fixing the arc tube 10 and the reflector 20 respectively, and wires 16 and 17 (see FIG. 4) electrically connected to the arc tube 10.
  • the arc tube 10 includes an ellipsoidal arc tube portion 13 in which a pair of electrodes 11 and 12 are arranged to face each other, and both ends of the arc tube portion 13 connected to each other. 11 and 12 and a pair of side tube portions 14 and 15 extending along the longitudinal axis X. Further, halogen gas, mercury, starting argon and the like are sealed in the inner space of the arc tube portion 13, and the pair of side tube portions 14 and 15 seal the internal space of the arc tube portion 13.
  • the arc tube portion 13 may have a spherical shape.
  • the reflector 20 is provided on one side in the longitudinal axis X direction, the opening 21 from which one side tube portion 14 projects, a parabolic reflecting surface 22 formed around the longitudinal axis X, and the longitudinal axis X.
  • the other side tube portion 15 is formed on the other side of the direction, and has an insertion hole 23 into which the gap can be inserted.
  • the arc tube 10 has one electrode 11 extending into one side tube portion 14 as an anode (anode) and the other electrode 12 extending into the other side tube portion 15 as a cathode (cathode).
  • anode anode
  • cathode cathode
  • the angle at which the light emitted by the discharge is blocked at the anode side is larger than the angle at which the cathode side is blocked. large.
  • the reflector 20 needs to be deepened in order to increase the angle of light received on the opening 21 side. Therefore, the reflector 20 can be reduced in size by setting the anode having a large light blocking angle on the opening 21 side of the reflector 20 as compared with setting the cathode on the opening 21 side.
  • the electric wires extending from the distal end portion of one side tube portion 14 and the proximal end portion of the other side tube portion 15 are respectively connected to a pair of wires 16 and 17 used for power feeding. Note that the wire 16 connected to the one side pipe portion 14 is led out to the outside through a cradle 24 attached to the reflector 20.
  • the reflector 20 covers the base 31 of the insulator 30 on the outer side of the bowl-shaped bottom, and the joint is fixed with an adhesive (see FIG. 4).
  • the cylindrical central portion of the base portion 31 of the insulator 30 includes a holding portion 32 that holds the proximal end portion of the other side tube portion 15 that is inserted into the insertion hole 23 of the reflector 20.
  • the other side tube portion 15 is fixed to the insulator 30 and the adhesive by the holding portion 32. Therefore, the reflector 20 and the other side tube portion 15 of the arc tube 10 are respectively fixed to the insulator 30, and the reflector 20 and the arc tube 10 are not bonded, and the insertion hole of the other side tube portion 15 and the reflector 20 is inserted.
  • the gap between 23 forms a space s.
  • the insulator 30 includes the base portion 31 described above and a cover portion 33 that includes the holding portion 32 and covers the back of the base portion 31.
  • the bottom 33a of the cover 33 is formed flat. For this reason, the lamp 1 may be fixed to the lamp holder 40 by bringing a lamp pressing cover (not shown) into contact with the flat bottom portion 33a and connecting the lamp pressing cover and the lamp holder 40 shown in FIG. .
  • the base portion 31 of the insulator 30 communicates the space s between the other side tube portion 15 and the insertion hole 23 of the reflector 20 with the outside, and the other side tube portion 15 to the outside. It has two open parts 34 opened. Then, as shown in FIG. 6, when the lamp 1 is attached to the lamp holder 40, the air taken from the front surface of the lamp 1 is extracted from the space s by pulling and exhausting air behind the lamp holder 40. The arc tube 10 is cooled by passing through the opening 34. Therefore, the space s and the open part 34 form a cooling path.
  • an incandescent lamp 35 as a resistor is disposed in the accommodating space between the base portion 31 and the cover portion 33 of the insulator 30 and is connected to an external power supply wire 36. Yes. Since the filament 35a of the incandescent lamp 35 is a resistor, the resistance value is affected by the ambient temperature.
  • the power supply wire 36 is connected to a power supply of a system different from that of the wires 16 and 17. Further, the incandescent lamp 35 is arranged in the accommodation space so as not to be cooled by the air passing through the cooling path.
  • a current is supplied to the incandescent lamp 35, the voltage at both ends of the filament 35a of the incandescent lamp 35 is measured, and the voltage is compared with a previously measured voltage and temperature database to determine the lamp temperature and cooling state. Can be managed.
  • a sufficiently large current is supplied to the incandescent lamp 35 to melt the filament 35a of the incandescent lamp 35. The presence / absence of fusing may be confirmed by a determination circuit, and usage history management may be performed.
  • the resistor may be used for life management or temperature management using a metal film resistor, carbon resistor, metal wire, thermocouple, bimetal, or the like.
  • the incandescent lamp 35 may be inside the insulator 30 of the lamp 1 or may be disposed outside the insulator 30 and connected to the power supply wire 36.
  • the outer edge of the opening 21 of the reflector 20 is formed in a substantially square shape with chamfered corners.
  • One of the four corners is a notch 26 for alignment. It has a different shape.
  • the lamp 1 is aligned and attached to the lamp holder 40 so that the two open portions 34 formed in the insulator 30 are positioned in the vertical direction.
  • the cooling efficiency may be further increased by making the shape of the insulator 30 asymmetric so that the opening area of the opening part 34 located on the upper side is larger than the opening area of the opening part 34 located on the lower side.
  • the opening gap g of the opening 34 is defined by two planes passing through the longitudinal axis X, and the angle formed by the two planes is changed. The opening gap g and thus the opening area can be changed.
  • the amount of energy in the arc tube portion 13 is increased, and accordingly, the temperature in the arc tube portion 13 is higher than that of the conventional one. It becomes.
  • the length L1 of one side tube portion 14 is designed to be longer than the length L2 of the other side tube portion 15.
  • the other side tube portion 15 is exposed to the air passing through the cooling path, and thus has a higher heat radiation effect than the one side tube portion 14.
  • one side tube portion 14 is longer than the other side tube portion 15, so that the arc tube portion 13 and the connection portion between the electric wire and the wire 16 from the one side tube portion 14 are connected. The distance is further increased to further reduce the temperature at the connecting portion. Therefore, the cooling efficiency can be enhanced by the both side tube portions 14 and 15 of the arc tube 10.
  • the length L1 of one side tube portion 14 is set to 1.1 to 1.4 times the length L2 of the other side tube portion 15.
  • one side tube portion 14 is disposed in the insensitive area A of the lamp 1 so as not to block light from the lamp 1.
  • the light generated at the bright spot P spreads radially due to the discharge between the pair of electrodes 11, 12, but the presence of the electrodes 11, 12
  • the light orientation distribution is as shown by the shaded portion B, and a shadow is formed in the direction in which the electrodes 11 and 12 extend.
  • the reflector 20 is a paraboloid, and the bright spot P of the arc tube 10 is arranged at the focal point of the paraboloid.
  • the light beam emitted from the bright spot P is reflected by the reflecting surface 22 of the reflector 20 and becomes parallel light, as shown by a one-dot chain line.
  • the bright spot P is deviated from the focal point and the bright spot P has a finite size, in fact, since it includes light rays as indicated by the dotted line, not all of them become parallel light.
  • the light reflected by the reflector 20 further passes through all the shaded portions C shown in FIG.
  • the position where all the reflected light does not pass is defined as the insensitive area A, one side tube portion 14 is disposed in the insensitive area A of the lamp 1 as shown in FIG. Therefore, the light reflected by the reflector 20 is not obstructed.
  • This dead area A is given by designing the shape of the paraboloid of the reflector 20.
  • the reflector 20 is provided with a flat surface 25 adjacent to the opening 21 and defining one axial end of the reflector 20 and perpendicular to the longitudinal axis X direction.
  • the protruding length from the flat surface 25 becomes longer. That is, as shown in FIG. 3, in the longitudinal axis X direction, the distance L3 from the flat surface 25 of the reflector 20 to the tip of the one side tube portion 14 is the flat surface 25 of the reflector 20 from the center of the arc tube portion 13. Is set to 0.2 ⁇ L4 ⁇ L3 ⁇ 1.0 ⁇ L4.
  • the tube diameters of the side tube portions 14 and 15 are large enough to ensure the strength with respect to the lengths L1 and L2 of the side tube portions 14 and 15, and one side tube portion 14 is a dead area of the lamp 1. It is set not to protrude from A.
  • the tube diameter of each of the side tube portions 14 and 15 is D1
  • the length L1 of one side tube portion 14 is set to D1 ⁇ 0.4 ⁇ L1. Yes.
  • each of the one side tube portion 14 and the other side tube portion 15 has a cylindrical shape, and has the same tube diameter as that of D1.
  • the side tube portions 14 and 15 are connected to the arc tube portion 13, and the arc tube portion 13 is connected to the wires 16 and 17 via the side tube portions 14 and 15.
  • the arc tube portion 13 is very high temperature, the wires 16 and 17 need to be lowered in temperature to prevent oxidation, and the temperature of the wires 16 and 17 is created by creating a temperature gradient in each side tube portion 14 and 15. A reduction has been realized.
  • the tube diameters D1 of the side tube portions 14 and 15 it becomes easy to set the temperature gradient in the vicinity connected to the arc tube portion 13 to be the same in both electrodes.
  • strain accumulates inside the glass, which causes a rupture.
  • the high-pressure discharge lamp 1 configured in this manner is applied as a light source unit for an exposure apparatus by mounting a plurality of high-pressure discharge lamps 1 in the vertical and horizontal directions on the lamp holder 40. Further, by exhausting air on the back side of the lamp holder 40 by an exhaust device (not shown), the air from the front side of the lamp holder 40 is taken into the lamp 1 using the space s of each high-pressure discharge lamp 1 as a cooling path. Thus, each lamp 1 can be cooled.
  • the back side of the lamp holder 40 may form a sealed space in cooperation with the lamp pressing cover, and air may be exhausted from the sealed space.
  • the insulator 30 includes the space s formed between the other side tube portion 15 of the arc tube 10 and the insertion hole 23 of the reflector 20 and the outside.
  • the length L1 of one side tube portion 14 is longer than the length L2 of the other side tube portion 15.
  • this invention is not limited to embodiment mentioned above, A deformation
  • the method of connecting the arc tube and the wire and the configuration inside the arc tube are not limited to those of the present embodiment, and any conventional one can be applied.
  • the resistors Ri have different resistance values, and the current values at which the fuse Fi is blown differ.
  • each fuse Fi is cut each time a predetermined time elapses by supplying different currents from the power supply unit 50.
  • r of the power supply unit 50 represents the internal resistance of the power supply.
  • the life time may be managed by controlling the voltage of the power supply unit 50 and sequentially cutting the fuses Fi.
  • a plurality of resistors Ri having different resistance values are arranged in parallel without providing the fuse Fi, and each resistor Ri passes a predetermined time by flowing different currents from the power supply unit 50. You may make it melt
  • the resistor may be inside the insulator of the lamp 1 or may be connected to a connector portion (not shown) that makes electrical contact between the feeding wire 36 and the outside. In this case as well, the resistor needs to be connected to a power source different from the wires 16 and 17 that supply power to the lamp electrode.
  • the present invention is based on a Japanese patent application (Japanese Patent Application No. 2017-017856) filed on February 2, 2017, the contents of which are incorporated herein by reference.

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Non-Portable Lighting Devices Or Systems Thereof (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Vessels And Coating Films For Discharge Lamps (AREA)

Abstract

Selon la présente invention, un isolant (30) a une section ouverte (34) qui permet une communication entre l'extérieur et un espace (s) formé entre une section de tube latéral (15) d'un tube électroluminescent (10) et un trou d'insertion (23) d'un réflecteur (20), la longueur (L1) de l'autre section de tube latéral (14) étant supérieure à la longueur (L2) de la section de tube latéral (15). On obtient ainsi une lampe à décharge haute pression dans laquelle l'efficacité de refroidissement peut être augmentée et la luminance peut être augmentée.
PCT/JP2018/003293 2017-02-02 2018-01-31 Lampe à décharge haute pression WO2018143300A1 (fr)

Priority Applications (3)

Application Number Priority Date Filing Date Title
KR1020197022306A KR102483865B1 (ko) 2017-02-02 2018-01-31 고압 방전 램프
JP2018552268A JP6457162B2 (ja) 2017-02-02 2018-01-31 高圧放電ランプ及び照明装置
CN201880009946.0A CN110249267B (zh) 2017-02-02 2018-01-31 高压放电灯

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2017017856 2017-02-02
JP2017-017856 2017-02-02

Publications (1)

Publication Number Publication Date
WO2018143300A1 true WO2018143300A1 (fr) 2018-08-09

Family

ID=63040732

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/JP2018/003293 WO2018143300A1 (fr) 2017-02-02 2018-01-31 Lampe à décharge haute pression

Country Status (5)

Country Link
JP (1) JP6457162B2 (fr)
KR (1) KR102483865B1 (fr)
CN (2) CN113791521A (fr)
TW (1) TWI765960B (fr)
WO (1) WO2018143300A1 (fr)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2019039427A1 (fr) * 2017-08-23 2019-02-28 フェニックス電機株式会社 Dispositif de source lumineuse, dispositif d'exposition et procédé de détermination pour dispositif de source lumineuse
WO2020130090A1 (fr) * 2018-12-21 2020-06-25 株式会社ブイ・テクノロジー Dispositif d'irradiation à la lumière et dispositif d'exposition à la lumière

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JP2002075014A (ja) * 2000-06-16 2002-03-15 Matsushita Electric Ind Co Ltd ランプユニットおよび画像投影装置
JP2003036812A (ja) * 1999-12-02 2003-02-07 Matsushita Electric Ind Co Ltd 放電ランプおよびランプ装置
JP2004301945A (ja) * 2003-03-28 2004-10-28 Seiko Epson Corp 光源装置及びプロジェクタ
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JP2013004503A (ja) * 2011-06-22 2013-01-07 Ushio Inc 光源装置
JP2013012389A (ja) * 2011-06-29 2013-01-17 Ushio Inc 光源素子

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JP2003036812A (ja) * 1999-12-02 2003-02-07 Matsushita Electric Ind Co Ltd 放電ランプおよびランプ装置
JP2002075014A (ja) * 2000-06-16 2002-03-15 Matsushita Electric Ind Co Ltd ランプユニットおよび画像投影装置
JP2004301945A (ja) * 2003-03-28 2004-10-28 Seiko Epson Corp 光源装置及びプロジェクタ
JP2012114390A (ja) * 2010-11-29 2012-06-14 Nsk Technology Co Ltd 露光装置用光照射装置
JP2013004503A (ja) * 2011-06-22 2013-01-07 Ushio Inc 光源装置
JP2013012389A (ja) * 2011-06-29 2013-01-17 Ushio Inc 光源素子

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2019039427A1 (fr) * 2017-08-23 2019-02-28 フェニックス電機株式会社 Dispositif de source lumineuse, dispositif d'exposition et procédé de détermination pour dispositif de source lumineuse
JPWO2019039427A1 (ja) * 2017-08-23 2020-10-01 フェニックス電機株式会社 光源装置、露光装置、および光源装置の判定方法
JP7141126B2 (ja) 2017-08-23 2022-09-22 フェニックス電機株式会社 光源装置、露光装置、および光源装置の判定方法
WO2020130090A1 (fr) * 2018-12-21 2020-06-25 株式会社ブイ・テクノロジー Dispositif d'irradiation à la lumière et dispositif d'exposition à la lumière

Also Published As

Publication number Publication date
CN110249267A (zh) 2019-09-17
TW201832268A (zh) 2018-09-01
CN113791521A (zh) 2021-12-14
CN110249267B (zh) 2021-09-03
JP6457162B2 (ja) 2019-01-23
KR102483865B1 (ko) 2023-01-03
JPWO2018143300A1 (ja) 2019-02-07
KR20190111045A (ko) 2019-10-01
TWI765960B (zh) 2022-06-01

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