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WO2018191753A1 - Microscope à rayons x talbot - Google Patents

Microscope à rayons x talbot Download PDF

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Publication number
WO2018191753A1
WO2018191753A1 PCT/US2018/027821 US2018027821W WO2018191753A1 WO 2018191753 A1 WO2018191753 A1 WO 2018191753A1 US 2018027821 W US2018027821 W US 2018027821W WO 2018191753 A1 WO2018191753 A1 WO 2018191753A1
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WO
WIPO (PCT)
Prior art keywords
ray
micro
detector
beams
microscope system
Prior art date
Application number
PCT/US2018/027821
Other languages
English (en)
Inventor
Wenbing Yun
Sylvia Jia Yun LEWIS
Janos KIRZ
David Vine
Srivatsan Seshadri
Original Assignee
Sigray, Inc.
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sigray, Inc. filed Critical Sigray, Inc.
Priority to JP2019555869A priority Critical patent/JP7066739B2/ja
Priority to EP18784205.9A priority patent/EP3610247B1/fr
Priority to CN201880025128.XA priority patent/CN110520716B/zh
Priority claimed from US15/954,380 external-priority patent/US10304580B2/en
Publication of WO2018191753A1 publication Critical patent/WO2018191753A1/fr

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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J35/00—X-ray tubes
    • H01J35/02—Details
    • H01J35/04—Electrodes ; Mutual position thereof; Constructional adaptations therefor
    • H01J35/08—Anodes; Anti cathodes
    • H01J35/112—Non-rotating anodes
    • H01J35/116—Transmissive anodes
    • G—PHYSICS
    • G21—NUCLEAR PHYSICS; NUCLEAR ENGINEERING
    • G21K—TECHNIQUES FOR HANDLING PARTICLES OR IONISING RADIATION NOT OTHERWISE PROVIDED FOR; IRRADIATION DEVICES; GAMMA RAY OR X-RAY MICROSCOPES
    • G21K7/00—Gamma- or X-ray microscopes
    • G—PHYSICS
    • G21—NUCLEAR PHYSICS; NUCLEAR ENGINEERING
    • G21K—TECHNIQUES FOR HANDLING PARTICLES OR IONISING RADIATION NOT OTHERWISE PROVIDED FOR; IRRADIATION DEVICES; GAMMA RAY OR X-RAY MICROSCOPES
    • G21K2207/00—Particular details of imaging devices or methods using ionizing electromagnetic radiation such as X-rays or gamma rays
    • G21K2207/005—Methods and devices obtaining contrast from non-absorbing interaction of the radiation with matter, e.g. phase contrast

Definitions

  • the present technology relates to interferometric systems using x-rays, and in particular, interferometric measurement, characterization and analysis systems using a system of periodic micro-beams to illuminate an object to determine various structural and chemical properties of the object.
  • Prior art x-ray microscopes are generally limited by the resolution of the x-ray optics (e.g. zone plates) and/or the resolution of the pixel size of the detector. Although some commercial x-ray microscope systems have a resolution of less than 100 nm, such systems have an extremely limited field of view, and high resolution x-ray microscopy with a large field of view has difficulty producing images with a resolution smaller than 1 micron.
  • Talbot systems of the prior art have traditionally been used for low resolution imaging. What is needed is a microscopy system that utilizes Talbot interference fringes for high resolution imaging at improved throughput.
  • This present technology includes systems for x-ray microscopy using an array of micro-beams having a micro- or nano-scale beam intensity profile to provide selective illumination of micro- or nano-scale regions of an object.
  • An array detector is positioned such that each pixel of the detector only detects x-rays corresponding to a single micro-beam, allowing the signal arising from the x-ray detector to be identified with the specific, limited micro- or nano-scale regions illuminated. This enables microscopy while using a higher efficiency, larger pixel detector without compromising spatial resolution.
  • the micro- or nano-scale beams may be provided by producing a set of Talbot interference fringes, which creates a set of fine x-ray micro-beams corresponding to beam comprising the anti-nodes of the interference pattern.
  • the array of micro- or nano-beams may be provided by a conventional x- ray source and an array of x-ray imaging elements (e.g. x-ray lenses).
  • both the detector and the object are placed within the same waist or "depth-of-focus" range of a set of Talbot constructive fringes (anti-nodes).
  • the detector is placed downstream at any subsequent set of anti-nodes (an integer number of Talbot distances away).
  • the object is positioned on a mount that allows translation in the x- and y- directions perpendicular to the direction of x-ray beam propagation, allowing a "scanned" transmission image on a microscopic scale to be assembled.
  • the object is positioned on a mount that allows rotation about an axis perpendicular to the direction of x-ray beam propagation, allowing the collection of data on a microscopic scale to be used for laminographic or tomographic images reconstruction.
  • Additional masking layers may be inserted in the beam path to block a selected number of the micro-beams, allowing the use of detectors with larger pixel sizes for the remaining micro-beams.
  • the use of a masking layer also allows the use of a detector with enhanced detection efficiency for the remaining micro-beams.
  • Such masking layers may be placed in front of the object to be examined, between the object and the detector, or be designed as part of the detector structure itself.
  • FIGURE 1A illustrates a prior art example of a Talbot interference fringe pattern for a 1: 1 duty cycle absorption grating.
  • FIGURE IB illustrates a detail from the pattern of FIGURE 1A showing an anti- node as a "depth-of-focus" range.
  • FIGURE 2A illustrates a prior art example of a diverging Talbot interference fringe pattern for a 1: 1 duty cycle nil phase shifting grating.
  • FIGURE 2B illustrates a prior art example of a diverging Talbot interference fringe pattern for a 1: 1 duty cycle ⁇ phase shifting grating.
  • FIGURE 2C illustrates a prior art example of a diverging Talbot interference fringe pattern for a 1:3 duty cycle ⁇ phase shifting grating.
  • FIGURE 2D illustrates phase gratings and self images for different phase grating periods.
  • FIGURE 3A illustrates a schematic view of a microscope according to an embodiment of the invention.
  • FIGURE 3B illustrates a substrate with an embedded target mask.
  • FIGURE 3C illustrates an alternate substrate with an embedded target mask.
  • FIGURE 3D illustrates a system having source electron beams bombarding a target at an oblique angle.
  • FIGURE 3E illustrates a target having microstructures.
  • FIGURE 3F illustrates a plot of optimal thickness vs. acceleration voltage for molybdenum.
  • FIGURE 4A illustrates a schematic view of the micro-beams, object, and detector of the embodiment of FIGURE 3A.
  • FIGURE 4B illustrates a schematic cross-section view of the micro-beams, object, and detector of the embodiment of FIGURE 3A.
  • FIGURE 5 illustrates a schematic view of a microscope according to an embodiment of the invention having a mask placed in front of the object under examination.
  • FIGURE 6A illustrates a schematic view of the micro-beams, object, and detector of the embodiment of FIGURE 5.
  • FIGURE 6B illustrates a schematic cross-section view of the micro-beams, object, and detector of the embodiment of FIGURE 5.
  • FIGURE 7 illustrates a schematic cross-section view of the micro-beams, object, and detector of an embodiment comprising a scintillator.
  • FIGURE 8 illustrates a schematic cross-section view of the micro-beams, object, and detector of an embodiment comprising a scintillator and a scintillator imaging system.
  • FIGURE 9 illustrates a schematic view of a microscope according to an embodiment of the invention having a mask placed in front of the object under examination.
  • FIGURE 10A illustrates a schematic view of the micro-beams, object, and detector of the embodiment of FIGURE 5.
  • FIGURE 10B illustrates a schematic cross-section view of the micro-beams, object, and detector of the embodiment of FIGURE 5.
  • FIGURE 11 illustrates a schematic cross-section view of the micro-beams, object, and detector of an embodiment comprising a mask at the detector and a scintillator.
  • FIGURE 12 illustrates a schematic cross-section view of the micro-beams, object, and detector of an embodiment comprising a mask at the detector and a scintillator and a scintillator imaging system.
  • FIGURE 13 illustrates a method for collecting microscopy data.
  • This present technology includes systems for x-ray microscopy using an array of micro-beams having a micro- or nano-scale beam intensity profile to provide selective illumination of micro- or nano-scale regions of an object.
  • Each micro-beam is separated from other micro-beams by regions of lower x-ray intensity, ranging from 0.8X to OX of the intensity of the micro-beam.
  • An array detector is positioned such that each pixel of the detector only detects x-rays corresponding to a single micro-beam, allowing the signal arising from the x-ray detector to be identified with the specific, limited micro- or nano-scale regions illuminated.
  • the object being imaged and the detector are positioned within the same Talbot diffraction order.
  • the spatial resolution is decoupled from the source size and the detector pixel size.
  • Imaging using Talbot fringes typically involves a grating (often a phase- shifting grating) to produce the Talbot interference pattern, and then analysis of the resulting pattern with a second grating and/or an array x-ray detector.
  • a grating often a phase- shifting grating
  • FIGURE 1A illustrates a Talbot interference fringe generated by an absorption grating G having a 50/50 duty cycle with a pitch p when illuminated by a plane wave. Interference fringes are generated behind the grating, reconstructing the pitch p with a 50/50 duty cycle at the Talbot distance D T , given by
  • the Talbot interference pattern can, with suitable selection of a beam-splitting grating, produce bright anti-nodes with corresponding micron-scale dimensions.
  • the scales for the x- and y-directions of the fringes in the illustration of FIGURE 1 are quite different, and although the fringes may laterally (i.e. perpendicular to the direction of propagation) have a micron scale and pitch, they can have depth-of-focus on the scale of hundreds of microns to even centimeters.
  • Fringe patterns at various fractional Talbot distances may actually be smaller than the size of the original grating features. These anti-nodes may therefore serve as the multiple micro-beams used for illuminating an object to achieve higher resolution.
  • the range (depth-of-focus) over which the anti-node maintains its finest dimension is related to the pitch p of the Talbot fringes by:
  • the waist, or "depth-of-focus" equivalent for the anti-node for x-rays of, for example, 20 keV and a grating period of 1 micron is on the order of centimeters.
  • FIGURE IB illustrates an enlarged portion of an anti-node of FIGURE 1A, with a portion that may be considered a DOFs of one of the anti-nodes noted.
  • an anti-node is a portion of the beam that differs from a node by greater than 20%.; for example, the contrast ratio between an "anti-node” and “node” can be 1.2: 1.
  • Exact definitions of a beam "waist”, defined by the range over which an anti-node varies by less than a predetermined amount (e.g. a length range over which the anti-node full- width at half-maximum variation is within 5%) may be defined for various Talbot patterns.
  • a given interference pattern may have many fine "waists” that can be used for illumination, and, depending on the grating used, some may be of even finer dimensions than the grating half-pitch. These "waists” may also occur at any number of distances from the grating and need not be at the previously defined fractional Talbot distances.
  • the pattern of Talbot fringes therefore resembles an array of "micro-beams" propagating in space.
  • the fringes may be parallel micro-beams, as was illustrated in
  • FIGURE 1 or may be obtained using converging or diverging x-ray beams. Additional examples of Talbot interference patterns are shown in FIGs. 2A - 2C.
  • FIGURE 2A illustrates the intensity pattern produced by a grating 210-1-90 (shown in cross section) introducing a n /2 radian phase shift from a 1: 1 grating-to- space width ratio.
  • FIGURE 2B illustrates the intensity pattern produced by a grating 210-1-180 introducing a ⁇ radian phase shift in a 1: 1 grating-to-space width ratio.
  • FIGURE 2C illustrates the intensity pattern produced by a grating 210-3-180 introducing a ⁇ radian phase shift in a 1:3 grating-to-space width ratio. Simulations of FIGs. 2A - 2C assume gratings with a Ronchi (e.g. line/space square wave) profile and a point radiation source with sufficient spatial coherence.
  • Ronchi e.g. line/space square wave
  • FIGURE 2D illustrates two-dimensional phase gratings and self images for phase grating periods of ⁇ and ⁇ /2.
  • the ⁇ period grating is in the form of a checkerboard and produces a "mesh" self image.
  • a grating with ⁇ /2 period also has checkerboard form but produces a checkerboard self-image with inverted contrast.
  • the x-ray microscope of the present technology can utilize a grating with a period of ⁇ , ⁇ /2, or other period to produce microbeams.
  • this beam splitting diffraction grating is that of a phase grating of low absorption but producing considerable x-ray phase shift of either ⁇ 12 or ⁇ radians, or some other specified or predetermined value such as a fraction of or multiple of ⁇ or ⁇ 12.
  • These gratings may be one-dimensional or two-dimensional.
  • the object being examined is placed downstream of the diffractive grating at a fractional Talbot distance DN represented by the equation
  • pi is the period of the beam splitting grating
  • Z3 ⁇ 4v is the fractional Talbot distance for a plane wave illumination
  • ⁇ is the mean x-ray wavelength
  • the object is placed downstream of the diffractive grating at a distance that is not a fractional Talbot distance, but instead located at a distance wherein the wavefront is comprised of regions of anti-nodes and nodes that correspond to the periodic regions of interest for analysis.
  • optimal Talbot distances N a may be chosen for interference patterns of interest or best suited for the application.
  • the microscope system and method of using it disclosed herein may be formed using any number of techniques that create an array of micro- or nano-scale x-ray beams used for illuminating an object.
  • using an optical system to image either multiple arrayed x-ray sources or alternatively, an x-ray source having a transmission target with an array of microstructures may provide "micro-beams" that correspond to the images of the source points within the depth of focus of the x-ray optical system.
  • Talbot fringes are a highly efficient method of directing x-rays into a effective array of micro-beams.
  • the effective lateral dimension of the Talbot anti-nodes can, using the appropriate beam-splitting grating to establish the fringes, be made to be very small (e.g. submicron, such as 20 nm or 300 nm).
  • the Talbot interference pattern when used to illuminate an object under investigation in
  • the x-ray microscope system can achieve submicron (e.g. 0.3 um) spatial resolution at high throughput.
  • the detector is selected to have a pixel size that corresponds to the pitch of the Talbot fringes, and both the object and the detector are placed within the effective "depth-of-focus" of the Talbot fringes, each pixel is detecting transmitted x-rays from a single one of the "micro- beams.”
  • the contrast between the intensity of the plurality micro-beams and the regions between the micro-beams may be further improved by placing an absorbing grating of the same pitch as the micro-beams such that the x-rays between the micro-beams are attenuated.
  • scanning the object in x- and y- dimensions allows the micro- or nano-scale probe to be moved over the object, and if the range of motion is as large as, or larger than, the Talbot fringe pitch, a high resolution "map" of the
  • transmission of the object may be obtained with a relatively lower resolution x-ray pixel array detector.
  • the "resolution" of the system is dictated solely by the size of the micro- beam, and is independent of the detector pixel size.
  • Source 011 provides electrons 111 to target 100 to generate an x-ray beam 888 which creates an array of microbeams after passing through a grating Gl.
  • the source of X-rays satisfies known constraints to realize the arrays of beamlets, preferably down to sub-micron size.
  • the source of X-rays can be a single point or line source, or a periodic structured source such as a conventional source paired with an absorption (one- or two-dimensional) grating.
  • an x-ray source 11 has a target 100 having a substrate 1000 and a region 1001 containing discrete micro structures 700 of element size a arranged in a periodic 2-D pattern with period po. When bombarded with electrons 111, these produce x-rays 888 in a periodic pattern with period po.
  • the target 100 which may include x-ray generating microstructures, x-ray blocking masks, and/or other elements described herein, can implement an x-ray generator.
  • Each microstructure 700 in target 100 of the structured source acts as an independent and mutually incoherent sub- source (or source points) of x-rays.
  • the interference of these source points create a set of fringes in the sample plane that are laterally displaced with respect to the other source points.
  • the pitch of the structured source and source to Gl distance can be selected to ensure that the fringes overlap in the sample plane.
  • the increase in focused flux is proportional to the number of source points used.
  • the source is sufficiently far from the Gl grating 210-2D to have a coherence length larger than the Gl grating period. If an individual sub-source apparent width is S, the distance between the source and Gl is Z and the radiation wavelength is L, then it holds that L*Z/S > pi where pi is the Gl period.
  • the object 240 to be examined is illuminated at an array of discrete interaction locations 282.
  • the sample 248 is placed at a Talbot distance downstream of the beam- splitting grating. The positions can be scanned in x- and y-dimensions
  • an array detector 290 perpendicular to the direction of propagation of the micro-beams using a position controller 245, and the x-ray illumination beams 889-T resulting from the interaction of the micro-beams and the object can be detected by an array detector 290.
  • the array detector 290 will be aligned such that each pixel of the detector will be positioned to collect only x-rays corresponding to a single micro-beam. This is typically within the "depth of focus" of the anti-node.
  • the object can then be scanned in x- and y-coordinates. This produces "maps" in parallel of the properties of the object, but the range of motion can be reduced to only correspond to the pitch of the micro-probes (although some overlap between scanned areas may be appropriate to provide a relative calibration between data collected for neighboring "maps").
  • the data in each point in the map is limited in resolution only by the lateral dimensions of the Talbot fringe, so a less expensive and/or more efficient detector with larger pixels can be used to collect high resolution images.
  • the "maps" generated by each pixel may then be stitched together digitally to produce a large-scale "macro-map" of the object properties, while reducing the corresponding data collection time by a factor related to the number of micro-beams (e.g. up to a factor of 10 4 ).
  • limited angle adjustment of the object may also be added to the motion protocol, as long as the interaction of x-rays with the object as well as the corresponding detector pixel both remain within the depth-of- focus for all of the multiple micro-beams.
  • the x-ray source target may comprise a microstructured mask.
  • FIGURE 3B illustrates a substrate 1000 with an embedded microstructure mask.
  • the substrate 1000 of FIGURE 3B includes a thin film 1002, a first substrate portion 1004, and a second substrate portion 1006.
  • the substrate portions 1004 and 1005 may be formed of low atomic element materials such as diamond, Be, sapphire, etc.
  • An electron beam bombarding the thin film 1002 generates x-rays within the thin film.
  • the generated x-rays are blocked by microstructures 700 to create an effective array of x-ray sub- sources.
  • Microstructures 700 may be placed onto substrate portion 1004 and covered or encapsulated by substrate portion 1006. Alternatively, they may be formed by embedding the microstructures within a single substrate portion, as shown in target 1000 of FIGURE 3C.
  • target 1000 can include multiple target patterns formed by any combination of microstructures and masks, wherein one or more of the multiple target patterns can have multiple depths within a substrate.
  • the electron beam may be incident onto the target at an oblique angle.
  • FIGURE 3D illustrates a system having one or more electron beams 11 bombarding a target 1000 at an oblique angle, such as between 20 degrees and 80 degrees.
  • the incidence angle of the electron beams on the target may be about 60 degrees. Providing the incident electron beam at an oblique angle allows for a higher energy x-ray beam from the target and reduces scattering in substrates such as diamond.
  • FIGURE 3E illustrates a target having a substrate 1004 (typically a low atomic material such as diamond) and microstructures 700.
  • the thickness t of the targets can be optimized for the particular material to improve contrast between x-rays that are emitted the microstructures 700 and x-rays generated in the substrate. In some cases, the thicknesses are on the order of 2-10 um. In some instances, the depth of the target microstructure material within a substrate may be optimized to achieve a particular acceleration voltage.
  • FIGURE 3F illustrates a plot of optimal thickness vs. acceleration voltage for molybdenum (Mo) microstructures.
  • the relationship between the optimal depth in micrometers to the acceleration voltage in kilovolts is approximately linear. For example, for an energy of 60 kV, the optimal depth would be about 10 microns. Though only data for molybdenum is displayed, the optimal depth of a target microstructure for other materials may also be optimized for a particular acceleration energy. [0065] Some micro structured targets may furthermore comprise electrically conductive layers, layers to improve thermal conductivity between the microstructure and the substrate, and/or diffusion barriers.
  • the bandwidth of the x-ray beams at the object to be examined must be within +/-15% of a predetermined x-ray energy of interest. This is typically achieved through the use of filters, such as thin metal foils.
  • the position of the object 240-W to be illuminated by the array of micro-beams is placed at a further distance D from the beam- splitting grating Gi 210- 2D.
  • the geometry of the arrangement should satisfy the condition:
  • the x-rays from the many sub-sources of Ao produce the same (overlapping) Talbot interference pattern, and because the various mutually incoherent sources do not interfere with each other, these Talbot patterns will add as intensities.
  • the effect at the object 240-W is therefore to simply increasing the intensity of the micro-beams (along with it the signal-to-noise ratio) above what a single coherent source can provide. This configuration is called the Talbot-Lau interferometer.
  • the arrayed x-ray source may also be provided in some embodiments using a uniform x-ray material and a masked grating that allows x-rays to emerge only from specific points arranged in an array of dimension a and period po .
  • An arrayed x-ray source may also be provided by selective bombardment of an x-ray generating material using a patterned electron beam.
  • the beam- splitting grating may be an amplitude grating with a 50/50 duty cycle, as illustrated in FIGURE 3A, or may be an amplitude grating with some other duty cycle.
  • a phase-shifting beam- splitting grating may comprise a 1-D or 2-D periodic pattern of ⁇ or nil phase- shifts.
  • the distance D between the grating and the object should correspond to one of the fractional Talbot distances, i.e.
  • n is a non-zero integer.
  • the suitable value of n may be different if the grating is a transmission grating, a ⁇ phase- shifting grating, or a nil phase- shifting grating.
  • the object 240-W to be examined may be mounted on a position controller 245 that may be controlled to translate the object 240-W in x- and y- dimensions.
  • additional rotation of the object for generating tomographic imaging data may also be controlled by the mounting system.
  • a 5-axis mount, or a goniometer may be used.
  • the detector pitch will be matched to the pitch of the multiple microbeams so that each pixel is positioned to only detect x-rays emerging from the interaction of the object with a single micro-beam, and the cross-talk between pixels due to neighboring micro-beams is minimized. Then, the data collection and final
  • reconstruction of the "map" of the properties of the object may proceed, knowing that the distinct signals from each pixel need not be further deconvolved. If there is cross-talk between micro-beams and pixels (e.g. due to scattering or fluorescence), additional image analysis may be able to remove some of the cross-talk if it can be properly calibrated. Energy resolving array detectors may also be used to separate signals from transmitted x- rays, scattered x-rays, and fluorescence x-rays.
  • detector pitches that are integer fractions of the pitch of the micro-beams (e.g. a 2x reduction in pitch, which would indicate, for example, in a 2-D array, that 4 pixels are positioned to collect the x-rays corresponding to a single micro- beam, or a 3x reduction in pitch, which would indicate 9 pixels are present to detect the x-rays corresponding to each micro-beam) may also be used.
  • This may offer some advantages if the x-rays being detected have some spatial structure, for example if the desired x-ray signal is related to small-angle scattering from the object. Then, certain pixels of the detector can be aligned to detect only the scattered x-rays, while the non- scattered beam may be collected by a different pixel, or simply blocked.
  • a larger detector pixel may be used.
  • a pixel size that is larger than the pitch of the Talbot fringe may be used, as long as the active area of each pixel of the detector (the portion converting x-rays into an electronic signal) is on the order of the same size as the corresponding x-ray micro-beam.
  • the detector may therefore be less expensive, and yet still produce a "high resolution" signal (since the spatial resolution is determined by the interaction volume of the Talbot fringe and the object, not the detector pixel size).
  • FIGs. 5 - 12 illustrate the use of larger pixels in some embodiments of the invention.
  • FIGURE 5 illustrates a schematic of an embodiment of a system similar to that of FIGURE 3A, but in which a mask has been placed in front of the object 240-W to block a certain number of micro-beams. As illustrated, 3 out of every 4 micro-beams are blocked, with only 1 beam out of 4 proceeding to illuminate the object and then be detected by the detector, but any number of beams may be blocked according to predetermined patterns for various applications.
  • FIGURE 6A and 6B illustrate such an embodiment in more detail, presenting illustrations similar to those of FIGs. 4A and 4B. As can be seen by the comparison with FIGs. 4A and 4B, because only a certain number of micro-beams are used, the pitch of beams at the detector is substantially larger, and a less expensive detector with a larger pixel size may be used.
  • the x-ray detector is presented as a direct array detector, generating an electrical signal in response to the absorption of x-rays.
  • Such an electronic sensor may directly create an electrical signal in response to the absorption of x-rays, by, for example, the creation of direct electron-hole pairs in amorphous selenium (a-Se). These are then converted into electronic signals using an array of thin-film transistors (TFTs).
  • TFTs thin-film transistors
  • FPDs direct flat panel detectors
  • FPDs such as the Safire FPD of Shimadzu Corp. of Kyoto, Japan, are commercially available.
  • the detector may use scintillators that emit visible or ultraviolet light when exposed to x-rays.
  • the active x-ray detection region may be defined, for example, by providing a scintillator such as cesium iodide doped with thallium (CsI(Tl)) or by providing a detector with a uniform coating of scintillator with a masking layer of high Z material, for example, gold (Au), on top.
  • FIGURE 7 illustrates a variation of the embodiment of FIGURE 6B, but using a detector 290-S in combination with a fluorescent screen or scintillator 280.
  • the scintillator 280 comprises a material that emits visible and/or UV photons when x-rays are absorbed, and the detector 290-S detects those visible and/or UV photons.
  • Typical scintillator materials comprise a layer of cesium iodide (Csl), thallium doped Csl, yttrium aluminium garnet (YAG) or gadolinium sulfoxylate (GOS).
  • the spatial resolution is defined by the dimensions of the micro-beams 888-M instead of the detector pixel size. This allows a larger pixel and therenby a thicker scintillator material to be used, since every photon generated from the larger pixel will be known to have originated from a predetermined micro-beam. The thicker scintillator increases the probability that a given x-ray photon will be absorbed and converted to visible light, increasing the potential signal.
  • FIGURE 8 illustrates an additional variation on a system using a scintillator, in which the visible/UV light 890 from the scintillator 280 is collected by a visible/UV optical system 320 and imaged onto a detector 290-SI.
  • the visible/UV optical system may comprise optics with additionally magnify the image of the scintillator.
  • the electronic detector need not comprise a high resolution sensor itself, and less expensive commercial CCD detectors or complementary metal-oxide-semiconductor (CMOS) sensor arrays with, for example, 1024 x 1024 pixels, each 24 ⁇ x 24 ⁇ square, may be used.
  • CMOS complementary metal-oxide-semiconductor
  • FIGs. 9, 10A and 10B represent an additional embodiment in which a masking structure 297 is placed between the object 240 and the detector.
  • a masking structure 297 made of, for example, gold (Au), prevents 3 out of every 4 beams from entering the detector 290. This also allows detector 290 to have a larger pixel, again reducing cost for direct detectors and, for embodiments using scintillators, increasing potential detector efficiency.
  • FIGURE 11 illustrates an additional variation of the embodiment of FIGs. 9, 10A and 10B, but with the detection of x-rays achieved using a scintillator 280 and a visible/UV detector 290-S.
  • FIGURE 12 illustrates an additional variation on a system using a scintillator, in which the visible/UV light 890 from the scintillator 280 is collected by a visible/UV optical system 320 and imaged onto a detector 290-SI.
  • scintillators as illustrated in FIGs. 7, 8, 11, and 12 are shown as comprising uniform layers of scintillator, embodiments using patterned scintillator material, in which scintillator material is placed only over a portion of the pixel, may also be used.
  • the selective placement of scintillator material over portions of the detector may be used as an alternative to the use of a masking layer to select certain micro-beams for detection.
  • Detectors with additional structure within each pixel may also be employed as well. For example, if the typical detector pixel is 2.5 microns by 2.5 microns (an area of 6.25 micron 2 ), but the micro-beam diameter is only 1 micron, a detector pixel with a central "spot" of scintillator material slightly larger than 1 micron, surrounded by "dead” zones, and positioned to correspond to the position of the micro-beam may be created. With this configuration, all the x-rays from the micro-beam should be detected, while reducing the detection of scattered or diffracted x-rays that would otherwise cause spurious signals if the full area of the detector pixel were to be used.
  • pixels in which detector structures (such as scintillator material) are only positioned on the outer portion of the pixel, for example, to only detect x-rays scattered at small angles while not detecting the directly transmitted beam, may also be used for some embodiments.
  • detector structures such as scintillator material
  • the mask 297 in FIGURE 11 and 12 is shown as displaced from the scintillator layer, some embodiments may have the masking layer directly deposited onto the scintillator layer. Other embodiments for patterned scintillators may be known to those skilled in the art.
  • FIGURE 13 illustrates method for collecting microscopy data.
  • the data collection may be used to form a 2-D "map" or 3-D tomographic image.
  • X-ray microbeams are generated in step 4210 through the use of an x-ray source and a beam- splitting grating, preferably a phase grating.
  • the x-ray source employs an x-ray target comprised of microstructures on or embedded within a substrate of low mass density (e.g. diamond or Be).
  • the x-ray source employs a target comprising a thin film coated on top of a substrate of low mass density and furthermore comprising embedded microstructures that serve as a "mask" to block a portion of the x-ray beams.
  • the x-ray source is an extended x-ray source and is used in combination with an absorbing grating.
  • the x-ray source is a microfocus x-ray source.
  • a filtering method is placed 4220 between the x-ray source and the beam-splitting grating to limit the bandwidth of the x-rays from the x-ray source to a bandwidth.
  • the bandwidth of the illumination beam can be + 15%, depending on which pre-determined Talbot or fractional Talbot distance is used.
  • An object to be examined is aligned 4230 at a Talbot distance such that the region of nodes (darkest intensity) and anti-nodes (highest intensity) of the microbeam has a pitch p in the directions orthogonal to the propagation direction
  • the bandwidth of the illumination beam satisfies the following equation:
  • a detector is aligned 4240 within the "waist" of the microbeams so that each detector pixel generates signals corresponding to a single microbeam.
  • this position may correspond to the depth-of-focus of the imaging system.
  • the detector pixel pitch and microbeam are the same or approximate with some scaling, such that the center of each microbeam is coincident upon the center of the detector pixel.
  • micro-beams formed by a Talbot system this may correspond to the position of the interference pattern at a fractional or integer multiple of the Talbot Distance, where self-replicating images are formed.
  • a detector will be chosen where every micro-beam has a corresponding pixel or set of pixels; however, in some embodiments, the detector may only detect a subset of the micro-beams.
  • a detector can be chosen to having a pixel pitch pd equal to a non-zero integer multiple of the micro-beam pitch p.
  • X-rays transmitted by each microbeam are recorded 4250 by the detector, and the corresponding electronic signals representing x-ray intensity and energy are recorded.
  • the object to be examined is moved 4260 using a position controller to build up a 1-D or 2-D "map" of the properties of the object. This is typically performed so that the object is moved several times corresponding to to the FWHM of each microbeam region of highest intensity and moved in both x and y dimensions.
  • the present system can take the accumulated data and, in this case, use various image "stitching" techniques that are generally well known in the art, synthesize a 2-D intensity "map" representing the large-area x-ray transmission/absorption of the object.
  • image "stitching" techniques that are generally well known in the art, synthesize a 2-D intensity "map" representing the large-area x-ray transmission/absorption of the object.
  • 3-D information is desired, the object is rotated through an angle relative to the z-axis (this rotation may be a rotation around either the x- or y-dimensions) to collect a set of data from the x-ray detector at this alternative rotation position.
  • the system will loop through these steps to collect x-ray information at a preprogrammed sequence of positions and rotations until a complete set of data is collected. At this point, the system will then proceed to take the accumulated data and, in this case, use various image 3-D analysis techniques that are generally well known in the art, to synthesize a 3-D representation of the large-area x-ray transmission/absorption of the object.

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  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • High Energy & Nuclear Physics (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
  • Measurement Of Radiation (AREA)

Abstract

La présente invention concerne des systèmes de microscopie à rayons X utilisant un réseau de micro-faisceaux ayant un profil d'intensité de faisceau à l'échelle micro- ou nanométrique pour produire un éclairage sélectif de régions à l'échelle micro- ou nanométrique d'un objet. Un détecteur matriciel est positionné de sorte que chaque pixel du détecteur ne détecte que des rayons X correspondant à un seul micro- ou nano-faisceau. Cela permet d'identifier le signal provenant de chaque pixel de détecteur de rayons X avec l'éclairage de la région à l'échelle micro- ou nanométrique limitée spécifique, permettant ainsi la génération d'une image de transmission échantillonnée de l'objet à une échelle micro- ou nanométrique, tout en utilisant un détecteur avec des pixels ayant une taille et une échelle plus élevées. Par conséquent, des détecteurs à rendement quantique supérieur peuvent être utilisés, étant donné que la résolution latérale n'est fournie que par les dimensions des micro- ou nano-faisceaux. Les faisceaux à l'échelle micro- ou nanométrique peuvent être générés au moyen d'une source de rayons X en réseau et d'un ensemble de franges d'interférence de Talbot.
PCT/US2018/027821 2017-04-15 2018-04-16 Microscope à rayons x talbot WO2018191753A1 (fr)

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JP2019555869A JP7066739B2 (ja) 2017-04-15 2018-04-16 タルボｘ線顕微鏡
EP18784205.9A EP3610247B1 (fr) 2017-04-15 2018-04-16 Microscope à rayons x talbot
CN201880025128.XA CN110520716B (zh) 2017-04-15 2018-04-16 Talbot x射线显微镜

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US201762485916P 2017-04-15 2017-04-15
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US15/954,380 US10304580B2 (en) 2013-10-31 2018-04-16 Talbot X-ray microscope
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US12339239B2 (en) 2023-04-27 2025-06-24 Bruker Technologies Ltd. X-ray diffraction imaging detector having multiple angled input faces

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US20150260663A1 (en) * 2013-10-31 2015-09-17 Wenbing Yun X-ray method for the measurement, characterization, and analysis of periodic structures
WO2015168473A1 (fr) * 2014-05-01 2015-11-05 Sigray, Inc. Système d'imagerie interférométrique à rayons x

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EP3825659A1 (fr) * 2019-11-19 2021-05-26 CSEM Centre Suisse D'electronique Et De Microtechnique SA Codeur de position
US11982549B2 (en) 2019-11-19 2024-05-14 Csem Centre Suisse D'electronique Et De Microtechnique Sa—Recherche Et Developpement Position encoder
US12339239B2 (en) 2023-04-27 2025-06-24 Bruker Technologies Ltd. X-ray diffraction imaging detector having multiple angled input faces

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