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WO2018105712A1 - Convertisseur de taille de point et son procédé de fabrication - Google Patents

Convertisseur de taille de point et son procédé de fabrication Download PDF

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Publication number
WO2018105712A1
WO2018105712A1 PCT/JP2017/044102 JP2017044102W WO2018105712A1 WO 2018105712 A1 WO2018105712 A1 WO 2018105712A1 JP 2017044102 W JP2017044102 W JP 2017044102W WO 2018105712 A1 WO2018105712 A1 WO 2018105712A1
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Prior art keywords
ssc
diameter
spot size
size converter
mfd
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Ceased
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PCT/JP2017/044102
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English (en)
Japanese (ja)
Inventor
石榑　崇明
和貴 安原
帆志彦 戸田
豊 於
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Keio University
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Keio University
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    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B6/122—Basic optical elements, e.g. light-guiding paths
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B6/13—Integrated optical circuits characterised by the manufacturing method
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/26—Optical coupling means
    • G02B6/30—Optical coupling means for use between fibre and thin-film device

Definitions

  • the present invention relates to a spot size converter and a manufacturing method thereof, and more particularly to a polymer optical waveguide type spot size converter and a manufacturing method thereof.
  • optical interconnect technology particularly silicon photonics technology to which a CMOS process is applied, is expected to further increase the bandwidth, density, and power consumption of the entire system.
  • a nanoscale optical waveguide can be fabricated by using silicon (Si) with a high refractive index for the core.
  • Si silicon
  • SMF Single Mode Fiber
  • the Si optical waveguide has a core size of 300 to 500 nm
  • the core size of general-purpose SMF is generally 8 to 10 ⁇ m.
  • MFD Mode Field Diameter
  • SSC spot size converter
  • the SSC is suitable for space saving because in-plane connection is possible, and has an advantage of low wavelength dependency.
  • Non-Patent Document 1 A configuration using a polymer waveguide has been proposed as a low-cost interface between an optical fiber and a Si wire waveguide (see Non-Patent Document 1, for example).
  • the polymer waveguide is planar processed into a shape in which the waveguide width gradually decreases from the Si waveguide toward the SMF by photolithography.
  • Photonic wire bonding is manufactured using a laser direct drawing method, and has a tapered structure with a diameter that expands toward the core of the MCF at the tip.
  • the present invention realizes a polymer optical waveguide type SSC having a truncated cone shape or a three-dimensional taper shape in which the radial size changes symmetrically with respect to the optical axis.
  • a spot size converter for converting a beam diameter between optical wires having different core sizes is provided.
  • a first surface optically connected to a first optical wiring of a first size
  • a second surface optically connected to a second optical wiring of a second size larger than the first size
  • a tapered polymer waveguide whose diameter decreases conically from the first surface toward the second surface;
  • a method for manufacturing a spot size converter is provided.
  • This manufacturing method is Forming an uncured cladding layer on the substrate on which the first optical wiring is formed; While injecting an injection needle into the cladding layer and injecting an uncured core material from the injection needle into the cladding layer, the injection needle is changed in at least one of a moving speed and a discharge amount in a predetermined direction.
  • a moving step Curing the core material after extracting the injection needle from the cladding layer at a predetermined position to form a tapered polymer waveguide having one end connected to the first optical wiring; Optically connecting an end of the polymer waveguide opposite to the first optical wiring to a second optical wiring having a larger core size than the first optical wiring; including.
  • the above configuration and method realizes a spot size converter that can couple optical waveguides of different sizes with high efficiency and low loss, and has high tolerance for axis deviation and design freedom.
  • SSC of embodiment It is a diagram showing a core diameter different cladding materials and (SSC diameter) LP 01 mode of the MFD relationship. It is a figure which shows the simulation result of the optical coupling using the polymer optical waveguide type SSC of embodiment. It is a schematic diagram which shows the preparation methods of polymer optical waveguide type SSC of embodiment. It is a figure which shows the relationship between a needle scanning speed and a core diameter. It is a cross-sectional microscope picture of the side (a) and side (b) of the SSC sample of Example 1. It is a figure which shows the intensity
  • FIG. It is a schematic diagram which shows the difference in a structure of solid-state taper-shaped SSC of embodiment, and the planar taper-shaped SSC by the photolithographic method as a comparative example. It is a figure which shows the simulation result of the intensity
  • FIG. 1 is a schematic diagram of a spot size converter (SSC) 10 according to an embodiment.
  • the SSC 10 is a polymer optical waveguide type SSC that optically connects optical waveguides having different sizes.
  • the SSC 10 couples between a silicon (Si) optical waveguide 101 and a general-purpose SMF 102.
  • the SSC 10 has a truncated cone shape or a tapered shape whose diameter decreases from the output end of the Si optical waveguide 101 toward the core of the SMF 102.
  • the core size of the Si optical waveguide 101 is generally 300 to 500 nm, and the core diameter of the general-purpose SMF 102 is 8 to 10 ⁇ m.
  • the diameter D1 of the cross section 11 at the emission position of the Si optical waveguide 101 is larger than the diameter of the cross section 12 on the connection side with the SMF 102.
  • the shape of the SSC 10 may be referred to as “reverse taper” in the sense that the diameter of the SSC 10 increases on the Si optical waveguide 102 side having the smaller diameter.
  • the diameter of the SSC 10 at the output end of the Si optical waveguide 101 is 4 to 5 ⁇ m, and the diameter at the connection surface with the SMF 102 is 1.5 to 2.5 ⁇ m.
  • the length L of the SSC 10 from the cross section 11 to the cross section 12 is 4.0 cm or less, preferably 1.0 to 3.5 cm.
  • the SSC 10 may cover the end of the Si optical waveguide 101, but the MFD conversion function is performed between the cross section 11 and the cross section 12. In FIG. 1, only the lower clad 105 is shown for convenience of illustration, but the entire periphery of the Si optical waveguide 101 and the SSC 10 may be covered with the clad.
  • the mode field diameter (MFD) of the propagation light greatly expands toward the connection surface 12 with the SMF 102.
  • the MFD of the SSC 10 at the exit position of the Si waveguide 101 is 3.8 to 3.9 ⁇ m, whereas the MFD at the connection surface with the SMF 102
  • the MFD extends to 5.6 to 8.0 ⁇ m. As will be described later, this is considered to be due to the effect of leakage of evanescent light. Since the MFD is widened on the connection surface with the SMF 102 by the truncated cone-shaped SSC 10 whose diameter changes symmetrically with respect to the optical axis, it has a high resistance to misalignment.
  • SSC10 has a conical taper shape, and its cross section is substantially circular.
  • the change in diameter in the optical axis direction is symmetric with respect to the optical axis.
  • an organic-inorganic hybrid resin SUNCONNECT (registered trademark) series manufactured by Nissan Chemical Industries, Ltd. is used as a polymer waveguide material constituting the SSC 10.
  • SUNCONNECT registered trademark
  • FIG. 2 shows the relationship between the core diameter and the MFD of the LP 01 waveguide mode at a wavelength of 1550 nm.
  • a material having a refractive index of 1.59 (plotted by a square) and a material having a refractive index of 1.52 (plotted by a circle) are compared.
  • the cladding material with a refractive index of 1.59 is NP-211 manufactured by Nissan Chemical Industries, Ltd.
  • the cladding material with a relative refractive index of 1.52 is ORMOCLAD (registered trademark) manufactured by Micro Resist Technology GmbH.
  • a material having a refractive index of 1.59 has a small difference in refractive index from the core, so that the MFD cannot be reduced to 7 ⁇ m or less regardless of how much the core diameter (SSC diameter) is reduced.
  • a material having a refractive index of 1.52 can secure a difference in refractive index from the core, when the core diameter (SSC diameter) is reduced to 3 ⁇ m, the MFD is reduced to 3.9 ⁇ m.
  • the core diameter (SSC diameter) is further reduced to about 2 ⁇ m, the MFD expands to 7 ⁇ m, which is equivalent to the general-purpose SMF. This is presumably because light is not sufficiently confined in the core (SSC) due to a significant reduction in the core diameter (SSC diameter) and leaks to the cladding as evanescent light.
  • the diameter of the SSC 10 at the output end (side (a)) of the Si optical waveguide 101 is 4 to 5 ⁇ m
  • the diameter of the SSC 10 at the connection end (side (b)) with the SMF 102 is 1.75 ⁇ m.
  • the MFD can be converted from 3.8 ⁇ m to 8 ⁇ m.
  • FIG. 3 shows a result of a propagation simulation assuming that light is actually coupled from the Si optical waveguide 101 to the SSC 10 and further connected to a general-purpose SMF 102.
  • the upper part is a top view
  • the middle part is NFP (Near Field Field Pattern)
  • the lower part is a side view.
  • the tapered shape of the SSC is indicated by a white broken line.
  • the Si optical waveguide (WG) extends in parallel from the positions P1 to P2, and only the light confined in the Si optical waveguide is observed. From the positions P2 to P3, the Si optical waveguide is tapered, and light oozes out.
  • the position P3 is a cross-sectional position of the SSC at the output end of the Si optical waveguide. This position is defined as side (a).
  • the MFD on side (a) is 3.9 ⁇ m.
  • Position 4 is the cross-sectional position of the SSC on the connection surface with the SMF. This position is defined as side (b).
  • the MFD at side (b) is 6.2 ⁇ m. It can be seen that the LP 01 mode MFD changes adiabatically on side (a) and side (b). As will be described later, the MFD can be further expanded by adjusting the manufacturing conditions of the SSC 10.
  • FIG. 4 is a schematic diagram for explaining a production process of a sample for evaluation of a polymer optical waveguide type SSC 10.
  • a support body 41 having a removable frame 43 on a base 42 is prepared, and a clad material 44 is arranged in the frame 43.
  • a clad material 44 a material having a paste-like resin precursor having viscosity as a main component and having a large refractive index difference from the core material can be appropriately selected.
  • ORMOCLAD registered trademark
  • Micro Resist Technology GmbH is applied in the frame 43 using a dispenser or the like.
  • the core material (precursor or monomer before polymerization) is inserted from the tip of the needle 31 while the main body 32 is moved by inserting the needle 31 of the discharge device 30 into the clad material 44.
  • the core layer 45 is formed in the cladding material 44 by implantation.
  • the diameter of the core layer 45 formed by accelerating the moving speed of the main body 32 can be continuously reduced.
  • the degree of change in the diameter of the core layer 45 can be controlled by adjusting the acceleration.
  • the needle 31 is extracted from the cladding material 44.
  • the direction of the needle speed change and the direction of movement are arbitrary, and the taper shape can be produced by accelerating or decelerating the needle movement speed.
  • the scanning direction of the needle is not limited to a plane parallel to the substrate, and scanning may be performed in the vertical direction.
  • the taper shape may be realized by changing the discharge amount (or discharge pressure) of the core while keeping the scanning speed constant, or by combining the change of the moving speed and the discharge amount.
  • the core layer 45 and the clad material 44 are cured.
  • an ultraviolet curable resin is used for the cladding material 44 and the core material and is cured by irradiation with ultraviolet rays, but a thermosetting resin can also be used.
  • the frame 43 is removed, and the cured layer is peeled off from the base 42 to obtain a sample of the truncated cone in the clad 105 or the three-dimensional tapered SSC 10. It is done.
  • the support 41 For example, a slit or a recess is formed in an optical wiring substrate on which an Si optical waveguide is formed, and a clad material is applied in the slit (or recess).
  • the needle is inserted into the clad material before polymerization in the vicinity of the end of the Si optical waveguide, and the needle is moved while being accelerated in a predetermined direction while injecting the core material. Thereafter, the SSC can be formed by removing the needle, curing the core material and the clad material, and polishing the end face.
  • the core material when the core material is injected into the uncured clad material 44, the core material isotropically diffuses into the clad material, and a GI (Graded Index) type refractive index distribution having a Gaussian distribution shape is obtained.
  • the core layer 45 can be formed.
  • a general GI-type refractive index profile is connected to a clad having a low refractive index and a uniform refractive index while the refractive index decreases from the core center and the profile remains convex upward.
  • the refractive index profile of the waveguide according to the mosquito method of the present invention changes from convex upward to convex (having an inflection point), and has a Gaussian distribution connected to the clad by pulling the tail.
  • FIG. 5 is a graph showing the relationship between the scanning speed of the needle 31 and the core diameter.
  • a linear core having a constant diameter was fabricated, and core diameter control was examined.
  • the discharge pressure of the core material was fixed at 50 kPa, and the results of measuring the core diameter while changing the scanning speed of the needle 31 each time were plotted. From FIG. 5, the core diameter tends to be inversely proportional to the 1/2 power of the scanning speed of the needle. It can be confirmed that the core diameter can be reduced to about 2 ⁇ m when the scanning speed of the needle 31 is 100 mm / s.
  • the SSC sample having a truncated cone shape or a three-dimensional taper shape was produced by accelerating the needle scanning speed from 8 mm / s to 40 mm / s within 100 milliseconds (ms).
  • the length of the SSC sample in the optical axis direction is 3.5 cm.
  • the needle inner diameter is 80 ⁇ m, and the discharge pressure of the core material is 50 kPa.
  • FIG. 6 is a cross-sectional micrograph of side (a) and side (b) of the produced SSC sample.
  • the scanning speed of the needle 31 is accelerated from the side (a) to the side (b).
  • the core diameter (SSC diameter) at side (a) is 4.6 ⁇ m, whereas the diameter is reduced to 2.8 ⁇ m at side (b).
  • FIG. 7 shows the intensity profile, NFP, and MFD of the SSC sample of Example 1 at a wavelength of 1550 nm.
  • the solid line in FIG. 7A is an intensity profile at side (a) of the SSC sample, and shows the corresponding NFP and MFD.
  • a broken line in FIG. 7A is an intensity profile of SMF (UHNA) having an ultra-high NA as an alternative to the Si optical waveguide, and shows the corresponding NFP and MFD.
  • the solid line in FIG. 7B is an intensity profile on the side (b) of the SSC sample, and shows the corresponding NFP and MFD.
  • the broken line in FIG. 7B is a general-purpose SMF intensity profile, and shows the corresponding NFP and MFD.
  • FIG. 7 shows that the MFD changes greatly from 3.8 ⁇ m to 5.6 ⁇ m at both ends of the SSC without the occurrence of higher-order modes.
  • the SSC side (a) and the intensity profile of UHNA are very close, and the MFD is also close.
  • the intensity profiles of the SSC side (b) and the general-purpose SMF are very similar, and the MFD is also approaching.
  • FIG. 8 is a diagram schematically showing the evaluation result of FIG. It can be seen that the MFD is well matched on both the large-diameter side and the small-diameter side of the solid tapered SSC sample, and insertion loss (including coupling loss and propagation loss) is reduced.
  • FIG. 9 is a diagram showing the evaluation results of the light propagation characteristics with respect to the optical axis direction of the SSC sample of Example 1.
  • NFP Near Field Field Pattern
  • MFD is calculated.
  • the SSC sample is shortened by 1 cm, and the MFD is calculated in each case where the length of the sample is 3.5 cm, 2.5 cm, 1.5 cm, and 0 cm.
  • the core diameter in the cross section becomes 4.7 ⁇ m. It decreases to 3.9 ⁇ m, 3.2 ⁇ m, and 2.9 ⁇ m. In contrast, NFP at 1550 nm gradually increases. Similarly, MFD increases to 3.7 ⁇ m, 4.5 ⁇ m, 5.3 ⁇ m, and 5.7 ⁇ m.
  • the SSC sample of Example 1 manufactured by the method of FIG. 4 can realize the spot size conversion function as designed.
  • FIG. 10 is a diagram showing an intensity profile at each SSC length. The tendency of the intensity profile is the same for each SSC length, and the MFD at the position where the intensity falls from the peak to e ⁇ 2 increases as the SSC length increases.
  • FIG. 11 shows the evaluation results of the loss / loss characteristics using the SSC sample of Example 1.
  • the insertion loss at a wavelength of 1550 nm is measured using the produced 3.5 cm long SSC sample.
  • Two types of arrangements (configuration 1 and configuration 2) of the excitation probe on the LD side and the light receiving probe on the power meter side are prepared. In both arrangements, a butt connection is made between SMF and SSC, and between SSC and UHNA, and no matching oil is used.
  • the UHNA serving as the excitation probe is connected to the side (a) having a small MFD, and the light from the side (b) having a large MFD is received by the general-purpose SMF.
  • Configuration 1 assumes the propagation of signal light from the Si optical waveguide to the SMF in the arrangement configuration of the present invention.
  • the general SMF is connected to the side (a) having a small MFD
  • the UHNA is connected to the side (b) having a large MFD
  • the connection relationship is reversed from that of the configuration 1. Receive light on the side.
  • the configuration 2 is an arrangement generally employed when optically connecting optical wirings having different diameters.
  • the insertion loss of the SSC in configuration 1 is sufficiently low.
  • the coupling loss between the SM optical waveguide and the SMF is theoretically determined by the overlap integral of both electromagnetic field distributions. As can be seen from the intensity profile in FIG. 7, it is considered that the intensity profiles at both ends of the SSC greatly overlap with the intensity profiles of the excitation probe and the light receiving probe.
  • Propagation loss at a wavelength of 1.55 ⁇ m of the polymer optical waveguide material used in the example (“SUNCONNECT (registered trademark)”) is 0.45 dB / cm, so that the propagation of a 3.5 cm long optical waveguide at 1550 nm is performed. The loss is estimated at 1.58 dB.
  • the coupling loss at both ends of the SSC sample is estimated to be 5.36 dB including Fresnel reflection.
  • FIG. 12 shows the evaluation results of misalignment tolerance using the SSC sample of Example 1.
  • the solid taper-shaped SSC of the embodiment has a high MFD on the connection side with the SMF, and thus is considered to have a high resistance to misalignment when connected to the SMF. Therefore, the produced SSC sample is used to evaluate the resistance to misalignment with SMF.
  • FIG. 12 (A) and 12 (B) show the configuration of the measurement system, and FIG. 12 (C) shows the misalignment measurement result.
  • a laser diode (LD) having a wavelength of 1550 nm is used as the light source, and a general-purpose SMF is used for each of the excitation probe and the light receiving probe.
  • the side (a) having a small MFD is connected to the SMF of the light receiving probe, and the loss change amount when the position of the light receiving side SMF is changed in the radial direction of the SSC is measured as a misalignment tolerance. .
  • the side with the large MFD (b) is connected to the SMF of the light receiving probe, and the amount of loss change when the position of the light receiving side SMF is changed in the radial direction of the SSC is measured as misalignment tolerance. .
  • the -0.5 dB misalignment tolerance on the side (a) was ⁇ 1.3 ⁇ m, whereas the side (b) has a wide tolerance width of ⁇ 2.1 ⁇ m. It is done. This is a value equivalent to the misalignment tolerance between the general-purpose SMF and the SM optical waveguide. The reason why such a wide tolerance width is obtained is considered that the MFD on the side (b) of the three-dimensionally tapered SSC sample can be brought close to the MFD of the SMF. As described above, the solid tapered SSC sample of Example 1 has a high resistance to misalignment.
  • FIG. 13 shows a schematic configuration and a cross-sectional micrograph of the SSC sample of Example 2, and NFP and MFD of propagating light.
  • the MFD is optimized by increasing the rate of change in the scanning speed of the needle 31.
  • the inner diameter of the needle is 80 ⁇ m
  • the discharge pressure of the core material is fixed at 50 kPa
  • the needle scanning speed is accelerated from 8 mm / s to 100 mm / s in 100 milliseconds (ms)
  • the length in the optical axis direction is 1.
  • a SSC sample having a frustoconical shape of 5 cm or a solid taper shape was prepared.
  • the core diameter on the side (a) of the SSC sample of Example 2 is 4.64 ⁇ m, and the core diameter on the side (b) is 2.78 ⁇ m.
  • the MFD on the side (a) is enlarged to 3.8 ⁇ m, and the MFD on the side (b) is enlarged to 7.2 ⁇ m. Since the MFD of the general-purpose SMF is 7.4 ⁇ m, it was confirmed that the desired MFD can be achieved by changing the needle scanning speed.
  • FIG. 14 shows the evaluation results of the loss loss characteristics using the SSC sample of Example 2.
  • the insertion loss at a wavelength of 1550 nm is measured using the produced 1.5 cm long SSC sample.
  • Two types of arrangements of an excitation probe on the LD side and a light receiving probe on the power meter side are prepared.
  • the UHNA of the excitation probe is connected to the side (a) having a small MFD, and light from the side (b) having a large MFD is received by the general-purpose SMF.
  • Configuration 1 assumes the propagation of signal light from the Si optical waveguide to the SMF in the arrangement configuration of the embodiment.
  • the general SMF is connected to the side (a)
  • the UHNA is connected to the side (b)
  • the UHNA side receives light by reversing the connection relationship with the configuration 1.
  • the configuration 2 is a configuration generally employed when connecting optical wirings having different diameters with SSC.
  • the insertion loss of the SSC in the configuration 1 is further reduced as compared with the first embodiment.
  • the insertion loss is large.
  • FIG. 15 shows intensity profiles, NFP and MFD on both sides of the SSC sample of Example 2.
  • the solid line in FIG. 15A is the intensity profile at side (a) of the SSC sample, and shows both the corresponding NFP and MFD.
  • the broken line in FIG. 15A is an intensity profile of UHNA as an alternative to the Si optical waveguide, and shows the corresponding NFP and MFD.
  • the solid line in FIG. 15B is the intensity profile on the side (b) of the SSC sample, and shows the corresponding NFP and MFD.
  • the broken line in FIG. 15B is a general-purpose SMF intensity profile, and shows the corresponding NFP and MFD.
  • FIG. 16 is a diagram illustrating the insertion loss reduction effect of the configuration of the second embodiment.
  • the chart on the left side of the figure shows the insertion loss of the 3.5 cm long SSC sample of Example 1, and the chart on the right side shows the insertion loss of the 1.5 cm long SSC sample of Example 2.
  • the insertion loss is represented by the sum of the propagation loss, the Fresnel reflection loss, and the coupling loss, the Fresnel reflection loss is the same in the first and second embodiments.
  • the propagation loss is reduced to about half by shortening the length of the SSC in the optical axis direction.
  • the SSC sample of Example 2 has a high tolerance against misalignment in the same manner as in Example 1 in which the change in diameter in the optical axis direction is symmetric with respect to the optical axis in a plane perpendicular to the optical axis. Further, due to the coincidence between the intensity profile on the side (b) on the SMF side and the MFD, a wider tolerance width than that of the first embodiment can be obtained on the side (b) side.
  • FIG. 17 is a schematic diagram showing a difference in configuration between the solid tapered SSC of the embodiment and a planar tapered SSC by a photolithography method as a comparative example.
  • an SSC having a Gaussian refractive index distribution is realized by the method of FIG. 4 (mosquito method).
  • FIG. 18 is a diagram showing a comparison result between the solid tapered SSC of the embodiment and the planar tapered SSC according to the conventional method.
  • FIG. 18A shows a simulation result of the intensity profile and coupling loss of the SSC produced by the method of the embodiment.
  • FIG. 18B shows a simulation result of an intensity profile and coupling loss of an SSC manufactured by a general photolithography method.
  • FIG. 18 (A) and FIG. 18 (B) focusing on the MFD, the SFD side (b) and the SMF have the same MFD size. Looking only at this result, the effect of aligning the size of the MFD to the SMF on the side (b) side of the SSC appears to be the same.
  • the tendency of the intensity distribution is almost the same between SSC and SMF, whereas in the conventional method, the tendency of the intensity distribution is reversed at the MFD. This difference appears as a difference in the effect of reducing the coupling loss.
  • a GI type SSC in particular, having a Gaussian type refractive index distribution
  • an SI (Step Index) type distribution having a constant refractive index in the radial direction of the SSC is obtained.
  • the SSC intensity distribution and the SMF intensity distribution characteristic are reversed with the MFD as a boundary, and the area where the light intensity distribution overlaps is reduced, resulting in an increase in coupling loss.
  • the superiority of SSC produced by the mosquito method of FIG. 4 was confirmed.
  • the MFD greatly changes in adiabatic manner between both ends.
  • the MFD is changed from 3.9 ⁇ m to 7. Enlarged to 2 ⁇ m.
  • the needle is accelerated from a speed of 8 mm / s or less to 40 to 100 mm / s within a predetermined time, thereby forming a desired three-dimensional taper-shaped polymer waveguide to leak evanescent light. The effect of taking out can be achieved.
  • the misalignment tolerance between the SSC of the embodiment and the general-purpose SMF is ⁇ 2.1 ⁇ m or more, and a value equivalent to the axis deviation characteristic of the SM optical waveguide and the general-purpose SMF can be obtained.
  • the insertion loss of the SSC of the embodiment is sufficiently low, and particularly in Example 2, it can be suppressed to a low value of 2.34 dB at a wavelength of 1550 nm.
  • the SSC of the embodiment and the manufacturing method thereof can couple optical transmission lines of different sizes with high efficiency and low loss, and have high tolerance for misalignment and high design freedom.
  • Such SSC can also be applied to multi-channel optical communication.
  • the SSC formed of the polymer waveguide of the embodiment is arranged corresponding to each channel on the edge of a silicon chip where Si optical waveguides such as 4 channels and 8 channels are formed at the transmission / reception front end of the optical transceiver. It can be connected to SMF which is an external optical wiring.
  • the SSC of the embodiment can realize optical coupling with very high efficiency and low loss, particularly when applied to an optical transmission front end.

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Abstract

La présente invention concerne un convertisseur de taille de point couplant des guides d'ondes optiques de différentes tailles avec un rendement élevé et une faible perte, et ayant une résistance au désalignement axial et une flexibilité de conception élevées. Un convertisseur de taille de point couvre un diamètre de faisceau entre des fils optiques de différentes tailles de noyau, et comprend : une première surface connectée optiquement à un premier fil optique d'une première taille ; une seconde surface connectée optiquement à un second fil optique d'une seconde taille plus grande que la première dimension ; et un guide d'onde polymère effilé dont le diamètre diminue de façon conique à partir de la première surface vers la seconde surface.
PCT/JP2017/044102 2016-12-07 2017-12-07 Convertisseur de taille de point et son procédé de fabrication Ceased WO2018105712A1 (fr)

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20250041045A (ko) 2022-07-29 2025-03-25 스미또모 가가꾸 가부시키가이샤 광학 시스템

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN110192133B (zh) * 2017-01-27 2021-07-13 学校法人庆应义塾 Gi型光波导的制造方法
JP7309142B2 (ja) * 2019-02-13 2023-07-18 慶應義塾 光導波路デバイス、光モジュール、レーザ装置、及び光導波路デバイスの作製方法
JP7371556B2 (ja) * 2020-03-31 2023-10-31 住友大阪セメント株式会社 光導波路素子

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5473721A (en) * 1994-04-13 1995-12-05 Photonic Integration Research, Inc. Multi-mode optical circuit to couple light between various optical elements and method of fabricating same
JP2002228863A (ja) * 2001-02-06 2002-08-14 Kddi Submarine Cable Systems Inc 光結合構造
WO2013002013A1 (fr) * 2011-06-27 2013-01-03 学校法人 慶應義塾 Guide d'ondes optiques et son procédé de fabrication
JP2015135409A (ja) * 2014-01-17 2015-07-27 富士通株式会社 偏波分離素子
JP2015206969A (ja) * 2014-04-23 2015-11-19 三菱電機株式会社 スポットサイズ変換素子および半導体装置
US20160299294A1 (en) * 2013-12-20 2016-10-13 Huawei Technologies Co., Ltd. Method and Apparatus for Coupling Optical Waveguide to Single-Mode Fiber

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5473721A (en) * 1994-04-13 1995-12-05 Photonic Integration Research, Inc. Multi-mode optical circuit to couple light between various optical elements and method of fabricating same
JP2002228863A (ja) * 2001-02-06 2002-08-14 Kddi Submarine Cable Systems Inc 光結合構造
WO2013002013A1 (fr) * 2011-06-27 2013-01-03 学校法人 慶應義塾 Guide d'ondes optiques et son procédé de fabrication
US20160299294A1 (en) * 2013-12-20 2016-10-13 Huawei Technologies Co., Ltd. Method and Apparatus for Coupling Optical Waveguide to Single-Mode Fiber
JP2015135409A (ja) * 2014-01-17 2015-07-27 富士通株式会社 偏波分離素子
JP2015206969A (ja) * 2014-04-23 2015-11-19 三菱電機株式会社 スポットサイズ変換素子および半導体装置

Non-Patent Citations (3)

* Cited by examiner, † Cited by third party
Title
BARWICZ ET AL.: "Low-Cost Interfacing of Fibers to Nanophotonic Waveguides: Design for Fabrication and Assembly Tolerances", IEEE PHOTONICS JOURNAL, vol. 6, no. 4, 18 June 2014 (2014-06-18), pages 1 - 18, XP011552582 *
ISHIGURE, TAKAAKI: "Challenges for Innovative Optical Wiring Realized with the Mosquito Method", PROCEEDINGS OF THE 2016 IEICE GENERAL CONFERENCE ELECTRONICS 2, 1 March 2016 (2016-03-01), pages SS-35 - SS-36 *
ISHIGURE, TAKAAKI: "Fabrication of polymer optical waveguide using the Mosquito method and its application to high-bandwidth-density on-board optical interconnects", PROCEEDINGS OF THE 2014 IEICE GENERAL CONFERENCE ELECTRONICS 1, 4 March 2014 (2014-03-04), pages SS-18 - SS-19 *

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20250041045A (ko) 2022-07-29 2025-03-25 스미또모 가가꾸 가부시키가이샤 광학 시스템

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