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WO2018120335A1 - Capteur capacitif pour mesure de déplacement angulaire absolu - Google Patents

Capteur capacitif pour mesure de déplacement angulaire absolu Download PDF

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Publication number
WO2018120335A1
WO2018120335A1 PCT/CN2017/071350 CN2017071350W WO2018120335A1 WO 2018120335 A1 WO2018120335 A1 WO 2018120335A1 CN 2017071350 W CN2017071350 W CN 2017071350W WO 2018120335 A1 WO2018120335 A1 WO 2018120335A1
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WO
WIPO (PCT)
Prior art keywords
measurement
fine
coarse
electrode
angular displacement
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PCT/CN2017/071350
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English (en)
Chinese (zh)
Inventor
张嵘
周斌
侯波
宋明亮
林志辉
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清华大学
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Publication of WO2018120335A1 publication Critical patent/WO2018120335A1/fr

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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B7/00—Measuring arrangements characterised by the use of electric or magnetic techniques
    • G01B7/30—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring angles or tapers; for testing the alignment of axes
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/12—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means
    • G01D5/14—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage
    • G01D5/24—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying capacitance
    • G01D5/241—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying capacitance by relative movement of capacitor electrodes
    • G01D5/2412—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying capacitance by relative movement of capacitor electrodes by varying overlap

Definitions

  • the invention relates to an angular displacement sensor, in particular to an absolute capacitance angular displacement measuring sensor, belonging to the field of angular displacement sensors.
  • the angular displacement sensor is a displacement sensor that converts physical quantities such as rotational angular position and angular displacement into electrical signals. It is a sensor used to detect angle, velocity, length, displacement and acceleration in the field of automation. Its application is large to CNC machine tools and robots.
  • the position detection and transmission speed control of packaging machinery, printing machinery, elevators, factory automation related equipment, and the measurement and control of the amount of rotation of office automation equipment such as disks and printers have become an indispensable part of various fields.
  • optical encoders and magnetic encoders can be classified. Among them, optical rotary encoders are used more, magnetic encoders are second, and existing angular displacement measurements are available.
  • the sensor has high precision, but it has the disadvantages of large volume, complicated processing, high cost, harsh environment requirements and poor dynamic characteristics.
  • the magnetic encoder is complicated to process, high in cost, heavy in weight and sensitive to electromagnetic environment.
  • the lower capacitive angular displacement sensor has high stability and can be used for non-contact measurement, dynamic response and adapt to harsh environments. It has been recognized by more and more people as the most promising sensor.
  • an object of the present invention is to provide an absolute capacitance angular displacement measuring sensor with high precision, high sensitivity, high adaptability and low cost.
  • an absolute capacitance angular displacement measuring sensor wherein the angular displacement measuring sensor comprises a sensitive structure, a signal modulation and demodulation circuit, an error compensation and fusion module, and a power module;
  • the sensitive structure includes a stator and a rotor, the stator includes a first stator and a second stator, the first stator, the rotor and the second stator are sequentially disposed in parallel in a longitudinal direction;
  • the first stator includes a precision measuring electrode Qualifying the excitation electrode and the first charge amplifier, the first stator is fixedly disposed on the bottom of the first stator, and the fine measurement acquisition electrode is disposed outside the first stator top, the first stator top
  • the fine excitation electrode is disposed on the inner side;
  • the rotor includes a precision sensing electrode, a precision coupling electrode, and a coarse electrode Detecting a sensitive electrode and a coarse measuring coupling electrode, the rotor is fixedly connected to the moving member through
  • the capacitance signal, the fine measurement/and the coarse capacitance measurement signal are obtained through the corresponding charge amplifier and the fine measurement/and coarse measurement angle modulation module to obtain the fine measurement/and coarse measurement orthogonal rotation signal, and then the fine measurement/and coarse measurement rotation
  • the demodulation module solves the refined/and coarse angular displacement; the error compensation and fusion module is used for error compensation of the fine angular displacement and the coarse angular displacement, and the compensated fine angular displacement and coarse angle
  • the displacement is calculated by the absolute displacement; the power module is used for each part Power supply.
  • the angular displacement measuring sensor comprises a sensitive structure, a signal modulation and demodulation circuit, an error compensation and fusion module and a power module;
  • the sensitive structure comprises a stator and a rotor, and the The stator and the rotor are arranged in parallel;
  • the stator comprises a fine measuring collecting electrode, an excitation electrode, a rough measuring collecting electrode and a charge amplifier, wherein the charge amplifier is fixedly arranged on the bottom of the stator, and the top of the stator is arranged in order from the outside to the inside.
  • the rotor comprises a fine sensing sensitive electrode, a coupling electrode and a coarse sensing sensitive electrode; the bottom of the rotor is arranged with the fine sensing sensitive electrode, the coupling electrode and the thick from the outside to the inside Sensing the sensitive electrode, the rotor is fixedly connected to the moving piece through the main shaft; the fine measuring collecting electrode and the fine measuring sensitive electrode are facing each other to form a fine measuring capacitance, and the excitation electrode and the coupling electrode are facing each other to form a coupling capacitance, and the rough measuring The collecting electrode and the rough sensing sensitive electrode are facing each other to form a rough measuring capacitance; the signal modulation and demodulation circuit includes a measurement/and coarse measurement cyclone demodulation module and a fine measurement/and coarse measurement rotation angle signal modulation module, wherein the fine measurement/and coarse measurement cyclone demodulation module processes the output carrier signal to the excitation electrode and Acting on the coupling electrode by a coup
  • the measurement/and coarse measurement and demodulation module are solved to obtain the fine measurement/and coarse measurement angular displacement; the error compensation and fusion module is used for error compensation of the precision angular displacement and the coarse angular displacement, and the compensated fine
  • the angular displacement and the coarse angular displacement are calculated by the absolute displacement; the power module is used to supply power to each component.
  • the signal modulation and demodulation circuit further includes a fine measurement carrier signal conditioning module and a coarse measurement carrier signal conditioning module; the fine measurement carrier signal conditioning module is configured to output a carrier signal to the fine measurement and demodulation module Performing conditioning; the coarse measurement carrier signal conditioning module is configured to perform conditioning on a carrier signal output by the coarse measurement and demodulation module.
  • the fine sensing sensitive electrode is a function And function a ring-shaped petal structure region, wherein R represents a polar circle radius of the petal-like precision sensing electrode, ⁇ represents a half of the width of the fine sensing electrode, and N represents a sine included in the precision sensing electrode
  • R represents a polar circle radius of the petal-like precision sensing electrode
  • ⁇ represents a half of the width of the fine sensing electrode
  • N represents a sine included in the precision sensing electrode
  • the number of cycles Denoting a mechanical rotation angle of the rotor and the stator; dividing the oppositely-shaped fine measuring acquisition electrode into a sector-shaped region at intervals of 90° in a sinusoidal period of the precision sensing electrode, and dividing into a sector within a sinusoidal period
  • the four sectoral regions are denoted as S 0 , S 90 , S 180 and S 270 , respectively, and the four sector regions are divided into eight sector regions by the inner and outer circles of radius R, respectively:
  • ⁇ represents the measured output angle and has a relationship:
  • the outer region connecting the region S 0 S 180, S 90 are connected in the region outside the region S 270, S 180 in the region outside the connection area S 0 and the area S 90 S 270 connected to an outer area of the obtained fine sensing electrodes and sensitive Fine
  • the four facing areas of the facing area of the collecting electrode that vary with the angle of rotation are expressed as:
  • A represents the DC component of the facing area
  • B represents the amplitude determined by the parameters R, ⁇ ; and the four facing regions formed by the fine sensing sensitive electrode and the fine measuring collecting electrode in each sinusoidal period are respectively connected:
  • a multi-stage capacitor formed by four facing regions within one sinusoidal period is denoted as C 1 , C 2 , C 3 and C 4 , respectively, and a multi-stage capacitor C 1 of N sinusoidal periods in the precision sensing electrode C 2 , C 3 and C 4 are connected to obtain four precision measurement capacitor signals C N1 , C N2 , C N3 and C N4 .
  • the four-way precision capacitance signal is obtained by the corresponding charge amplifier and the fine-precision cyclode demodulation module to obtain two-way precision orthogonal transformation signals, and then the calculated angular displacement is calculated.
  • the specific process is: four-way precision measurement.
  • the four precision measured charge signals obtained by the capacitor signal passing through the corresponding charge amplifier are respectively expressed as:
  • w represents the frequency at which the fine-tuning resolver demodulation module outputs a sinusoidal excitation signal
  • sin(wt) represents a carrier signal acting on the fine excitation electrode
  • d represents a spacing between the stator and the rotor
  • the road fine charge signal is obtained by the fine angle signal modulation module to obtain two precision orthogonal polarization signals, which are respectively represented as:
  • the obtained two-way fine orthogonal vibration signal is solved by the fine-precision cyclode demodulation module to obtain the refined angular displacement ⁇ fine .
  • the change of the rotation angle of the stator and the rotor is converted into two coarse-orthogonal orthogonal rotation signals by the coarse measurement capacitance, the corresponding charge amplifier, and the coarse-measurement demodulation module, thereby calculating the coarse angular displacement.
  • the specific process is: the rough sensing sensitive electrode is an eccentric ring with an eccentricity d, and the ring-shaped coarse measuring collecting electrode is divided into a sector-shaped area every 90°, and the four sector-shaped areas are further divided by a circle with a radius of R.
  • the four pairs of positive facing areas of the coarse sensing sensitive electrode and the coarse measuring collecting electrode vary with the rotation angle; the multi-level capacitance formed by the four facing regions in one sinusoidal period is denoted as C 5 , C 6 , C 7 respectively and C 8; corresponding to the charge amplifier coarse acquisition collected four electrodes Coarse capacitance signal into four coarse charge signals, and converts the rotational angle detected by the coarse signal conditioning module two orthogonal coarse resolver signal, wherein:
  • the obtained two-way coarse-measurement orthogonal rotatory signal is solved by the coarse-measurement variable-rotation demodulation module to obtain a coarse angular displacement ⁇ coarse .
  • the error compensation and fusion module includes a fine measurement/and coarse measurement error compensation module; the fine measurement/and coarse measurement error compensation module performs error compensation on the fine measurement/and coarse measurement angular displacement, and the compensated precision
  • the measured/and coarse angular displacement is calculated by the absolute displacement.
  • the specific process is: respectively determine the error type of the fine measurement and the coarse measurement, the error type includes the harmonic component error, the signal amplitude error and the noise error; and according to the error type,
  • the acquired data is identified by data, and the error compensation parameters of the fine measurement and the coarse measurement are calculated; the fine measurement/and the coarse angular displacement are obtained; and the compensation function is generated according to the obtained error compensation parameter and the fine measurement/and coarse measurement angular displacement.
  • the invention adopts the above technical solutions, and has the following six advantages: 1.
  • the invention realizes the displacement measurement based on the spin-on demodulation technology, and can be easier under the single excitation effect compared with the existing non-contact capacitive displacement sensor. Achieve high precision and large range measurements.
  • the invention obtains the precision angular displacement and the coarse angular displacement by two-way measurement, and then obtains absolute displacement after error correction by error compensation and fusion module, which has good sensitivity, robustness, dynamic characteristics and fault tolerance.
  • the invention realizes time division multiplexing of the signal modulation and demodulation circuit through the setting of the switch, has the advantages of simple structure, small size and low cost, and can be widely applied to the angular displacement measuring sensor.
  • Figure 1 is a schematic view of the principle of the present invention
  • FIG. 2 is a schematic structural view of Embodiment 1 of the present invention.
  • FIG. 3 is a schematic view showing an electrode distribution of a first stator in Embodiment 1 of the present invention.
  • Figure 4 is a schematic cross-sectional view of Figure 2;
  • Figure 5 is a schematic view showing the distribution of electrodes at the bottom of the rotor in Embodiment 1 of the present invention.
  • Figure 6 is a schematic view showing the distribution of electrodes at the top of the rotor in Embodiment 1 of the present invention.
  • FIG. 7 is a schematic view showing an electrode distribution of a second stator in Embodiment 1 of the present invention.
  • Figure 8 is a waveform diagram of the SIN function of the fine measurement signal or the coarse measurement signal output in the present invention.
  • Figure 9 is a waveform diagram of a COS function of the fine measurement signal or the coarse measurement signal output in the present invention.
  • Figure 10 is a waveform diagram of the fine measurement envelope signal and the coarse measurement envelope signal output by the present invention.
  • FIG. 11 is a schematic flow chart of an error compensation and fusion module in the present invention.
  • Figure 12 is a schematic diagram of an error compensation function in the present invention.
  • FIG. 13 is a schematic diagram of an angle output effect after error compensation in the present invention.
  • Figure 14 is a schematic structural view of Embodiment 2 of the present invention.
  • Figure 15 is a cross-sectional structural view of Figure 14;
  • Figure 16 is a schematic view showing the electrode distribution of the stator in the second embodiment of the present invention.
  • Figure 17 is a schematic view showing the electrode distribution of the rotor in the second embodiment of the present invention.
  • the absolute capacitance angular displacement measuring sensor of the present invention comprises a sensitive structure 1, a signal modulation and demodulation circuit 2, and an error compensation and fusion module 3.
  • the sensitive structure 1 includes a first stator 11, a rotor 12, and a second stator 13, and the annular first stator 11, the annular rotor 12, and the annular second stator 13 are the same in shape and are longitudinally arranged in parallel.
  • the first stator 11 includes a fine measurement collecting electrode 111, a fine excitation electrode 112 and a first charge amplifier (not shown); a first charge amplifier is fixedly disposed at the bottom of the first stator 11
  • An annular fine measurement collecting electrode 111 is disposed on the outer side of the top of the stator 11, and a ring-shaped fine excitation electrode 112 is disposed on the inner side of the top of the first stator 11.
  • the rotor 12 includes a precision sensing electrode 121, a precision coupling electrode 122, a coarse sensing electrode 123, and a coarse coupling electrode 124.
  • the rotor 12 is fixedly coupled to the moving member through the main shaft 125, and the rotor 12 is disposed outside the bottom of the rotor 12.
  • the petal structure fine-measures the sensitive electrode 121, and the ring-shaped precision measuring coupling electrode 122 is disposed on the inner side of the bottom of the rotor 12, and the fine-sensing sensitive electrode 121 and the fine-measuring coupling electrode 122 are equipotential bodies; an eccentric circular-shaped rough sensing sensitive electrode is disposed on the outer side of the rotor 12 123.
  • a ring-shaped coarse-coupling coupling electrode 124 is disposed on the inner side of the top of the rotor 12, and the coarse sensing-sensitive electrode 123 and the coarse-measuring coupling electrode 124 are equipotential bodies.
  • the second stator 13 includes a coarse measurement acquisition electrode 131, a coarse measurement excitation electrode 132, and a second charge amplifier (not shown); a second charge amplifier is fixedly disposed on the top of the second stator 13, and the second stator
  • the annular rough measurement acquisition electrode 131 is disposed on the outer side of the bottom of the bottom portion of the bottom of the second stator 12, and the annular rough measurement excitation electrode 132 is disposed on the inner side of the bottom of the second stator 12; the fine measurement acquisition electrode 111 and the fine measurement sensitive electrode 121 are oppositely formed to form the measurement capacitance, and the excitation electrode 112 is finely measured.
  • the precision measuring coupling electrode 122 forms a precision measuring coupling capacitor
  • the coarse measuring collecting electrode 131 and the coarse sensing sensitive electrode 123 form a rough measuring capacitance
  • the rough measuring excitation electrode 132 and the coarse measuring coupling electrode 124 form a coarse measuring coupling capacitor.
  • the signal modulation and demodulation circuit 2 includes a fine measurement and demodulation module 21, a fine carrier signal conditioning module 22, a fine angle signal modulation module 23, a coarse measurement and demodulation module 24, a coarse measurement carrier signal conditioning module 25, and a coarse
  • the rotation angle signal modulation module 26; the error compensation and fusion module 3 includes a fine measurement error compensation module 31, a coarse measurement error compensation module 32, a main processor module 33, and a power module 34.
  • the precision measurement and demodulation module 21 applies the output carrier signal to the fine measurement excitation electrode 112 via the fine measurement carrier signal conditioning module 22, and then acts on the fine measurement coupling electrode 122 through the fine measurement coupling capacitance, and the precision measurement coupling electrode 122 transmits the carrier signal. It is transmitted to the fine sensing electrode 121, and the four-way precision measuring capacitance signal is obtained by the fine measuring and measuring capacitance applied to the fine measuring collecting electrode 111 (this is not limited thereto, and can be determined according to actual needs), and the four-way fine measuring is performed.
  • the capacitor signal is converted into a four-way fine-charged charge signal by the first charge amplifier, and two precise precision orthogonally-rotated signals are obtained by the fine-angle measurement signal modulation module 23, and then refined by the fine-precision cyclode demodulation module 21 to obtain a fine measurement.
  • Angular displacement is obtained by the fine-angle measurement signal modulation module 23, and then refined by the fine-precision cyclode demodulation module 21 to obtain a fine measurement.
  • the coarse measurement and demodulation module 24 applies the output carrier signal to the coarse measurement excitation electrode 132 via the coarse measurement carrier signal conditioning module 25, and then acts on the coarse measurement coupling electrode 124 through the coarse measurement coupling capacitance, and the coarse measurement coupling electrode 124 will
  • the carrier signal is transmitted to the coarse sensing sensitive electrode 123, and the four-way coarse measuring capacitance signal is obtained by the coarse measuring capacitance applied to the coarse measuring collecting electrode 131, and the four-way coarse measuring capacitance signal is converted into four rough measured charging signals by the second charging amplifier.
  • the precision angular displacement is compensated by the fine error compensation module 31, and the coarse angular displacement is compensated by the coarse error compensation module 32.
  • the compensated fine angular displacement and the coarse lateral angular displacement are calculated by the existing fusion algorithm.
  • the absolute angular displacement is sent to the main processor module 33, which is used to power the absolute capacitive angular displacement measuring sensor of the present invention.
  • the fine sensing electrode 121 is a function And function a ring-shaped annular petal structure region, wherein R represents a polar circle radius of the petal-like precision measuring electrode 121 (ie, an inner and outer divided circle radius of the fine measuring electrode 111), and ⁇ represents a half of the width of the fine sensing electrode 121, N Representing the number of sinusoidal periods included in the precision sensing electrode 121, Representing the mechanical rotation angle of the rotor and the first stator; in a sinusoidal period of the precision sensing electrode 121, the right fine measurement collecting electrode 111 is divided into a sector area every 90° apart, and four are divided into one sinusoidal period.
  • the fan-shaped areas are denoted as S 0 , S 90 , S 180 and S 270 , respectively, and the four sector-shaped areas are further divided into eight sector-shaped areas by the inside and outside of the circle of radius R, which are respectively expressed as:
  • ⁇ represents the measured output angle and has a relationship:
  • the area S 0 is outside the connection area S 180
  • the area S 90 is outside the connection area S 270
  • the area S 180 is outside the connection area S 0
  • the area S 270 is outside the connection area S 90 (ie, the different color areas in FIG. 3)
  • the four positively-oriented regions obtained by respectively connecting the corresponding areas of the fine sensing sensitive electrode 121 and the fine measuring collecting electrode 111 with the rotation angle are respectively represented as:
  • A represents a direct current component of the facing area
  • B represents an amplitude determined by the parameters R, ⁇ ; and the four positive facing regions formed by the fine sensing sensitive electrode 121 and the fine measuring collecting electrode 111 in each sinusoidal period are respectively connected to each other:
  • the multi-stage capacitors formed by the four facing regions in one sinusoidal period are denoted as C 1 , C 2 , C 3 and C 4 , respectively, and the multi-stage capacitor C 1 of N sinusoidal periods in the sensitive electrode 121 is finely measured, C 2 , C 3 and C 4 are respectively connected to obtain four-way precision capacitance signals C N1 , C N2 , C N3 and C N4 .
  • the rotation angle change of the first stator 11 and the rotor 12 is converted into four-way fine measurement. Capacitance signal.
  • the four precision charge signals obtained after the four precision capacitance signals pass through the first charge amplifier are respectively expressed as:
  • w represents the frequency at which the precision varistor demodulation module 21 outputs the sinusoidal excitation signal
  • sin(wt) represents the carrier signal acting on the fine excitation electrode 112
  • d represents the spacing between the first stator 11 and the rotor 12.
  • the two-way fine-accurate orthogonal variable-rotation signals obtained by the four-way fine-measurement charge signal through the fine-angle measurement signal modulation module 23 are as follows:
  • the obtained two-way fine orthogonal vibration signal is solved by the precision measurement and vibration demodulation module 21 to obtain the refined angular displacement ⁇ fine .
  • the coarse sensing electrode 123 is an eccentric ring with an eccentricity d
  • the annular rough measurement collecting electrode 131 is divided into a sector by 90° intervals, and the four sector regions are further rounded by a radius R. is divided into eight fan-shaped areas inside and outside, are represented by S 'the 0, S' within 90, S 'within 180 [, S' within 270, S 'outside 0, S' 90 outer, S 'and outer 180 [S' 270 outer , the outer region S 'within 0 connection region S' 180, the region S '90 connection region S' 270, the area S '180 connector region S' 0 outside and a region S '270 connector region S' 90 outer obtained
  • the four pairs of positively facing areas of the rough sensing sensitive electrode 123 and the coarse measuring collecting electrode 131 vary with the angle of rotation; the multi-level capacitors formed by the four facing regions in one sinusoidal period are denoted as C 5 , C 6 , respectively C 7 and C 8 , at this time
  • a switch is respectively disposed on the circuit of the four-way precision measurement capacitor signal and the four-way coarse measurement capacitor signal for realizing time division multiplexing of the signal modulation and demodulation circuit 2, when measuring the precision angular displacement Turn on the switch for controlling the precision measurement capacitor signal, turn off the switch for controlling the coarse measurement capacitance signal; when measuring the coarse angle measurement displacement, turn off the switch for controlling the fine measurement capacitance signal, and turn on to control the coarse measurement capacitance Signal switch.
  • the absolute differential rotation signal and the coarse orthogonal rotation signal outputted during operation of the absolute capacitance angular displacement measuring sensor of the present invention are shown.
  • the error compensation and fusion module 3 performs error correction on the fine measurement and the coarse measurement of the angular displacement, and the specific process is as follows:
  • the error types include harmonic component error, signal amplitude error, noise error, etc.; and according to the error type, the acquired data is identified by data, and the precision measurement and coarse are calculated. Measured error compensation parameters;
  • a 0 and B 0 represent the DC component of the orthogonal string-changing signal
  • a m and B m represent the amplitude of the orthogonal string-changing signal, which is the signal amplitude error source; with It represents the sum of higher harmonics and is the source of harmonic component error
  • ⁇ e represents electrical noise and is the source of noise.
  • the angular displacement after demodulation in this embodiment has a regular and stable error.
  • error compensation and fusion module 3 is expressed as:
  • ⁇ R ⁇ c +(Acos(w 1 t)+Bcos(2w 1 )+Ccos(4w 1 ))
  • ⁇ R is the angular displacement after compensation
  • ⁇ c is the angular displacement before compensation
  • A, B, and C are the parameters of the compensation function
  • w 1 is the electrical cycle frequency
  • ⁇ fine and ⁇ are coarsely compensated to obtain ⁇ R fine
  • ⁇ R is thick
  • the number n of the fine angular displacement relative to the coarse angular displacement is calculated by the formula ⁇ R fine * n* ⁇ R coarse
  • the material of the sensitive structure 1 is not limited to the PCB board, but a method of sputtering metal on the glass substrate or directly etching the wire on the silicon substrate may be employed.
  • the sensitive structure 1 can be trimmed by laser to reduce the associated manufacturing accuracy.
  • This embodiment is basically the same as the structure of Embodiment 1, except that the present embodiment replaces the three-piece annular first stator 11, the annular rotor 12, and the annular second stator 13 of the same size in the first embodiment into a two-piece type.
  • the annular stator 14 and the annular rotor 15 of the same size are arranged in parallel with each other as shown in Figs. 14 to 17, and the stator 14 includes the fine measuring collecting electrode 141, the exciting electrode 142, the rough measuring collecting electrode 143 and the charge amplifier (
  • the rotor 15 includes a precision sensing electrode 151, a coupling electrode 152 and a coarse sensing electrode 153.
  • the bottom of the stator 14 is fixedly provided with a charge amplifier, and the top of the stator 14 is provided with an annular precision measuring electrode 141 from the outside to the inside.
  • the fixed connection moving piece; the fine measuring collecting electrode 141 and the fine measuring sensitive electrode 151 are opposite to form a precision measuring capacitance, and the excitation electrode 142 and the coupling electrode 152 are opposite to form a coupling capacitance, and the rough measuring is performed.
  • the collector electrode 143 and the coarse sensing electrode 153 are opposite to each other to form a coarse measurement capacitance.

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Power Engineering (AREA)
  • Transmission And Conversion Of Sensor Element Output (AREA)
  • Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)

Abstract

La présente invention concerne un capteur capacitif de mesure de déplacement angulaire absolu, caractérisé en ce que le capteur capacitif de mesure de déplacement angulaire absolu comprend une structure sensible (1), un circuit de modulation-démodulation de signal (2) et un module de compensation et de fusion d'erreur (3) ; la structure sensible (1) comprend un premier stator (11), un rotor (12) et un second stator (13) qui sont prévus longitudinalement en parallèle ; une électrode de collecte de mesure précise (111) est prévue sur le côté extérieur de la partie supérieure du premier stator (11), et une électrode d'excitation de mesure précise (112) est prévue sur le côté intérieur de la partie supérieure du premier stator (11) ; une électrode sensible de mesure précise (121) est prévue sur le côté extérieur de la partie inférieure du rotor (12), une électrode de couplage de mesure précise (122) estprévue sur le côté intérieur de la partie inférieure du rotor (12), une électrode sensible de mesure grossière (123) est prévue sur le côté extérieur de la partie supérieure du rotor (12), une électrode de couplage de mesure grossière (124) est prévue sur le côté intérieur de la partie supérieure du rotor (12), les électrodes sensibles de mesures précise/grossière (121, 123) et les électrodes de couplage de mesures précise/grossière (122, 124) sont des corps équipotentiels ; une électrode de collecte de mesure grossière (131) est prévue sur le côté extérieur de la partie inférieure du second stator (13), et une électrode d'excitation de mesure grossière (132) est prévue sur le côté intérieur de la partie inférieure du second stator (13) ; le circuit de modulation-démodulation de signal (2) est utilisé pour mesurer un déplacement angulaire précis et un déplacement angulaire grossier ; le module de compensation d'erreur et de fusion (3) est utilisé pour calculer un déplacement angulaire absolu après compensation d'erreur. L'invention peut être généralement utilisée dans des capteurs de mesure de déplacement angulaire.
PCT/CN2017/071350 2016-12-26 2017-02-20 Capteur capacitif pour mesure de déplacement angulaire absolu WO2018120335A1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
CN201611215267.8A CN106643470B (zh) 2016-12-26 2016-12-26 一种绝对式电容角位移测量传感器
CN201611215267.8 2016-12-26

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WO2018120335A1 true WO2018120335A1 (fr) 2018-07-05

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WO (1) WO2018120335A1 (fr)

Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN109297517A (zh) * 2018-11-10 2019-02-01 重庆理工大学 一种基于组合调制原理的绝对式时栅角位移传感器
DE102018220366A1 (de) * 2018-11-27 2020-05-28 Te Connectivity Germany Gmbh Winkelmesseinrichtung zur Bestimmung eines Winkels zwischen einem Rotor und einem gegenüberliegenden Stator
DE102018220363A1 (de) * 2018-11-27 2020-05-28 Te Connectivity Germany Gmbh Winkelmesssystem zur Bestimmung eines Winkels zwischen einem Rotor und einem gegenüberliegenden Stator
WO2021171138A1 (fr) * 2020-02-27 2021-09-02 Netzer Precision Motion Sensors Ltd. Capteur de position angulaire à compensation de bruit
CN114061513A (zh) * 2020-08-04 2022-02-18 通用技术集团国测时栅科技有限公司 基于纳米圆时栅的自标定方法
CN114413746A (zh) * 2021-10-26 2022-04-29 长春理工大学 一种多矢量变面积式电容角位移编码器及其测量方法
CN116485881A (zh) * 2023-04-10 2023-07-25 合肥工业大学 用于视觉定位的编码容量可变的编码标志及其编码方法
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CN109297517B (zh) * 2018-11-10 2024-04-30 通用技术集团国测时栅科技有限公司 一种基于组合调制原理的绝对式时栅角位移传感器
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WO2021171138A1 (fr) * 2020-02-27 2021-09-02 Netzer Precision Motion Sensors Ltd. Capteur de position angulaire à compensation de bruit
CN114061513A (zh) * 2020-08-04 2022-02-18 通用技术集团国测时栅科技有限公司 基于纳米圆时栅的自标定方法
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CN114413746A (zh) * 2021-10-26 2022-04-29 长春理工大学 一种多矢量变面积式电容角位移编码器及其测量方法
CN116485881A (zh) * 2023-04-10 2023-07-25 合肥工业大学 用于视觉定位的编码容量可变的编码标志及其编码方法
CN116485881B (zh) * 2023-04-10 2025-08-01 合肥工业大学 用于视觉定位的编码容量可变的编码标志及其编码方法
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