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WO2018131149A1 - Récipient de stockage de poudre et procédé d'inspection de matière étrangère - Google Patents

Récipient de stockage de poudre et procédé d'inspection de matière étrangère Download PDF

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Publication number
WO2018131149A1
WO2018131149A1 PCT/JP2017/001124 JP2017001124W WO2018131149A1 WO 2018131149 A1 WO2018131149 A1 WO 2018131149A1 JP 2017001124 W JP2017001124 W JP 2017001124W WO 2018131149 A1 WO2018131149 A1 WO 2018131149A1
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WO
WIPO (PCT)
Prior art keywords
powder
light
container
powder container
recess
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/JP2017/001124
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English (en)
Japanese (ja)
Inventor
智文 碇
梅津　枝里子
深澤　亮一
功将 高橋
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Spectra Design Ltd
Nikon Corp
Original Assignee
Spectra Design Ltd
Nikon Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Spectra Design Ltd, Nikon Corp filed Critical Spectra Design Ltd
Priority to PCT/JP2017/001124 priority Critical patent/WO2018131149A1/fr
Publication of WO2018131149A1 publication Critical patent/WO2018131149A1/fr
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N1/00—Sampling; Preparing specimens for investigation
    • G01N1/28—Preparing specimens for investigation including physical details of (bio-)chemical methods covered elsewhere, e.g. G01N33/50, C12Q
    • G01N1/36—Embedding or analogous mounting of samples
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/01—Arrangements or apparatus for facilitating the optical investigation
    • G01N21/03—Cuvette constructions
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/01—Arrangements or apparatus for facilitating the optical investigation
    • G01N21/11—Filling or emptying of cuvettes
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/25—Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
    • G01N21/31—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry
    • G01N21/35—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using infrared light
    • G01N21/3581—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using infrared light using far infrared light; using Terahertz radiation
    • G01N21/3586—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using infrared light using far infrared light; using Terahertz radiation by Terahertz time domain spectroscopy [THz-TDS]

Definitions

  • the present invention relates to a powder container and a foreign substance inspection method.
  • Patent Document 1 a blister pack that contains a predetermined amount of powdered medicine is known (for example, Patent Document 1).
  • Patent Document 1 a blister pack that contains a predetermined amount of powdered medicine
  • the powder container includes a housing part in which a recess for housing powder is formed, and a lid member that covers the powder housed in the recess, and the powder is placed inside the recess. And store at a uniform density.
  • the lid member is provided so as to press the powder.
  • the powder storage container includes a storage portion in which a recess for storing the powder is formed; A lid member covering the powder accommodated in the concave portion, and the accommodating portion is made of a material that transmits terahertz light.
  • the distance between the lid member and the surface of the recess facing the lid member is constant.
  • the concave portion is along a direction in which inspection light for inspecting the presence or absence of foreign matter in the powder proceeds. It is preferable that the length is constant.
  • the lid member is in close contact with the surface of the powder and covers the powder.
  • the lid member is refracted in a frequency band of inspection light for inspecting the presence or absence of foreign matter in the powder.
  • the difference between the refractive index and the refractive index of the powder is preferably smaller than a predetermined value.
  • the refraction of the storage part in the frequency band of the inspection light for inspecting the presence or absence of foreign matter in the powder, the refraction of the storage part The difference between the refractive index and the refractive index of the powder is preferably smaller than a predetermined value.
  • the powder container of any one of the first to eighth aspects along the direction intersecting the traveling direction of the inspection light for inspecting the presence or absence of foreign matter in the powder, It is preferable to further include a reflection part that reflects the inspection light.
  • the powder container in the powder container of any one of the first to ninth aspects, it is preferable that the powder container further includes a light shielding part that shields the powder contained in the recess.
  • a method for inspecting a foreign substance contained in a powder is provided in a powder container including a container part in which a concave part for accommodating the powder is formed and a lid member covering the powder contained in the concave part.
  • the powder to be irradiated is irradiated with terahertz light, the terahertz light reaching the receiver from the powder container through the powder is received, and the presence of a foreign substance is detected based on the signal obtained from the receiver.
  • the powder contained in the powder container is stored in the powder container in a pressed state.
  • the difference in the density of the powder is set to a difference that allows a change amount smaller than the measurement accuracy to be detected. .
  • the difference in the density of the powder is the terahertz light sampling time interval set by the receiving unit that detects the terahertz pulse light It is preferable to make the difference in density such that the delay amount is smaller than twice the above.
  • the container according to the first embodiment will be described with reference to the drawings.
  • the container of the present embodiment has a structure capable of inspecting the presence or absence of a foreign substance in a medicine or the like with a high inspection accuracy in a state where a powdery or granular medicine or the like is contained.
  • the container is configured to obtain high inspection accuracy when performing inspection using a pulse wave having a frequency in the terahertz band (hereinafter referred to as terahertz pulsed light).
  • terahertz pulsed light a pulse wave having a frequency in the terahertz band
  • FIG. 1 is a block diagram schematically showing the configuration of the main part of the foreign object inspection apparatus 10.
  • the foreign object inspection apparatus 10 includes a transmitter 11, an optical system 12, a receiver 13, a scanning mechanism 14, a control unit 16, an image generation unit 17, a calculation unit 18, a femtosecond laser light source 19, and a light guide. Waveguides 22-1 and 22-2 and a time delay member 21 are provided.
  • the test object S to be inspected by the foreign substance inspection apparatus 10 is stored in the storage container 20. Further, as shown in FIG. 1, an explanation will be made by setting an orthogonal coordinate system composed of an X axis, a Y axis, and a Z axis.
  • the femtosecond laser light source 19 emits ultrashort pulse laser light.
  • the emitted ultrashort pulse laser light is incident on the optical waveguide 22-1.
  • a beam splitter 22 is provided in the middle of the optical waveguide 22-1.
  • a part of the ultrashort pulse laser beam is incident on the optical waveguide 22-2 by the beam splitter 22.
  • the remaining ultrashort pulse laser light passes through the beam splitter 22 and reaches the transmitter 11.
  • the ultrashort pulse laser beam propagating through the optical waveguide 22-2 reaches the time delay member 21.
  • the time delay member 21 can vary the optical path length of the propagation optical path of the ultrashort pulse laser light.
  • the transmitter 11 emits terahertz pulse light almost simultaneously with the incidence of ultrashort pulse laser light.
  • the transmitter 11 generates terahertz pulse light including a frequency of 0.1 to 10 THz, preferably 0.5 to 2 THz, for example.
  • the frequency of the terahertz pulse light is set so that the transmittance of the test object S is high.
  • a hemispherical lens 11 a is provided on the output side of the transmitter 11.
  • the hemispherical lens 11a has a function of refracting terahertz pulse light.
  • the hemispherical lens 11a may be replaced with a super hemispherical lens.
  • the optical system 12 guides the terahertz pulse light generated from the transmitter 11 to the test object S stored in the storage container 20 as irradiation light L1 and reflects the terahertz pulse light from the test object S and the storage container 20.
  • the light L2 is condensed toward the receiver 13.
  • the optical system 12 includes a half mirror 12a and a convex lens 12b.
  • the convex lens 12b is preferably an aspheric lens.
  • the half mirror 12a reflects the terahertz pulse light generated from the transmitter 11 and converged by the hemispherical lens 11a to the Z direction-side.
  • the convex lens 12b condenses the irradiation light L1, which is reflected by the half mirror 12a and refracted terahertz pulse light whose direction is changed to the Z direction-side, on the specimen S accommodated in the accommodation container 20. Further, the convex lens 12b refracts the reflected light L2 reflected by the test object S or the storage container 20.
  • the reflected light L2 transmitted through the convex lens 12b and the half mirror 12a is condensed on the receiver 13 by the hemispherical lens 13a provided in the receiver 13.
  • the receiver 13 generates a current corresponding to the instantaneous amplitude of the received terahertz pulse light only at the moment when the ultrashort pulse laser beam is incident.
  • the receiver 13 outputs the generated current value or a time waveform signal described later to the image generation unit 17.
  • the time delay member 21 changes the time for the ultrashort pulse laser light to reach the receiver 13, multiple times.
  • a time waveform signal can be acquired by receiving the terahertz pulse light with the receiver 13.
  • the scanning mechanism 14 moves the transmitter 11, the optical system 12, and the receiver 13 two-dimensionally at least on the XY plane with the position of the container 20 fixed. Thereby, the scanning mechanism 14 at least two-dimensionally scans the container 20 with the irradiation light L1 of the terahertz pulse light from the optical system 12.
  • the foreign substance inspection apparatus 10 may include a scanning mechanism that can move the transmitter 11, the optical system 12, and the receiver 13 in a three-dimensional manner relative to the container 20 instead of the scanning mechanism 14.
  • the scanning mechanism 14 may move the container 20 two-dimensionally on the XY plane with the positions of the transmitter 11, the optical system 12, and the receiver 13 fixed.
  • the optical system 12 may be configured to perform two-dimensional scanning by providing a driveable optical element that can deflect the light direction in the XY plane, for example, a movable mirror such as a galvano mirror. Depending on the size of the scanning range, the scanning mechanism and the drivable optical element may be used in combination. As the optical system 12, it is preferable to use a telecentric optical system having telecentricity on the measured object side.
  • the scanning mechanism 14 two-dimensionally scans the range in which the test object S exists in the container 20 at intervals of, for example, 1 mm or less, and the receiver 13 changes the current generated based on the amplitude of the reflected light L2. To get.
  • the image generation unit 17 generates at least one of a terahertz reflection image, a tomographic image, and a frequency image based on a temporal change (time waveform signal) of a current value output from the receiver 13 during two-dimensional scanning by the scanning mechanism 14. Generate. From these images, the presence / absence, shape, material, and the like of foreign matter in the test object S stored in the storage container 20 are detected. The image generation unit 17 generates a terahertz reflection image by generating each pixel value based on the value of the time waveform signal detected by the detection unit 15.
  • a method of obtaining a difference between the peak value and the dip value for one period and using the difference as a pixel value or the time waveform signal output from the receiver 13 is obtained.
  • a method that obtains a peak value of a signal that appears within a predetermined time and sets it to a pixel value according to the peak value a method that uses a value obtained by time-integrating the absolute value of a time waveform signal as a pixel value, etc. It is done.
  • the image generation unit 17 can measure the echo of the terahertz pulsed light and generate a cross-sectional image along a straight line connecting any two points at the end of the terahertz reflection image based on the echo.
  • the calculation unit 18 performs a Fourier transform on an image acquired in time series in a scanning cycle when two-dimensional scanning is performed, that is, a time-resolved mapping image (time waveform: I (X, Y, t)). Power spectrum can be obtained. Then, it is possible to three-dimensionally acquire position information that is a boundary between different substances from a time-resolved mapping image obtained by two-dimensional scanning.
  • the calculation unit 18 can generate an arbitrary frequency image from the intensity mapping image generated when obtaining the power spectrum.
  • the control unit 16 controls the operation of each element such as the transmitter 11, the receiver 13, and the scanning mechanism 14 described above.
  • FIG. 2A is a diagram schematically illustrating the appearance of the storage container 20
  • FIG. 2B is a diagram schematically illustrating a cross section of the storage container 20 in the ZX plane.
  • the container 20 presses the body member 201 having the recess 201c for housing the test object S and the test object S stored in the recess 201c in the Z-axis + direction from above, and the test object from the recess 201c. And a lid member 202 for preventing S from being dissipated.
  • the main body member 201 is formed using a material that transmits the tera health pulse light.
  • the container 20 (the main body member 201 and the lid member 202) is irradiated with the terahertz pulse light used by the foreign substance inspection apparatus 10 in a state where the test object S is stored in the recess 201c
  • the storage container 20 and the test object S It is manufactured using a material that can suppress reflection at the interface as much as possible. That is, the container 20 is made of a material having a refractive index smaller than a predetermined value in a difference from the refractive index of the test object S in a frequency band in which terahertz pulse light is detected.
  • the material of the storage container 20 examples include a polyolefin resin such as polypropylene and polyethylene, a fluororesin such as tetrafluoroethylene, and the like as a material through which terahertz pulse light is transmitted.
  • the container 20 may be made of a material containing, for example, carbon black in order to shield the stored specimen S from ultraviolet light or visible light.
  • a printing layer printed with printing ink may be provided on the upper surface 202 t of the lid member 202 or the lower surface 201 u of the main body member 201.
  • the recess 201c of the container 20 is formed with a depth D in the Z-axis direction, that is, in the propagation direction of the terahertz pulse light.
  • the lower surface 201b and the upper surface 201t of the recess 201c provided in the main body member 201 are formed to be parallel to each other. That is, the shape of the recess 201c is set so that the test object S accommodated in the recess 201c has a uniform thickness in the propagation direction of the terahertz pulse light in the recess 201c.
  • the rectangle is shown as an example as a shape in the surface parallel to XY plane of the recessed part 201c, it is not limited to this, A circle may be sufficient and it may be polygons other than a rectangle. Also good.
  • the lid member 202 is configured so that the test object S accommodated in the recess 201c is in a state in which no air exists between the test object S and the cover member 202 and the density of the test object S is uniform. It fixes to the main body member 201 so that the shape of the thing S may not change. For example, the test object S is pressed and covered with a predetermined force in the Z axis + direction.
  • the lid member 202 has a planar shape, for example, and is fixed to the main body member 201 by being fused with the main body member 201.
  • a material thicker than the depth of the recess 201c is previously deposited so that there is no air layer between the upper surface (Z-axis direction-side surface) of the specimen S accommodated in the recess 201c and the lid member 202, You may make it enclose with the cover member 202.
  • FIG. By pressurizing the test object S toward the bottom of the container by the force generated by the elastic force of the lid member 202, the density of the test object S becomes substantially uniform at least in the direction in which the terahertz pulse light propagates.
  • the inspection method to be applied is to detect the foreign matter based on the amplitude distribution of the terahertz pulse light
  • the terahertz pulse light is made incident on the test object S and the test S is applied to each of the test objects S. It is preferable to determine whether or not the difference in output transmitted at the position is smaller than the resolution at the gradation required for foreign object detection.
  • FIG. 3 schematically shows a cross section of the storage container 20 in the ZX plane, similarly to FIG. 3 shows a state in which the test object S and the foreign material 300 are stored in the recess 201 c of the storage container 20.
  • the irradiation light L1 enters the receiving container 20 from the lower surface 201u of the main body member 201. At this time, a part of the irradiation light L1 is reflected by the lower surface 201u to generate reflected light L1-R1.
  • the transmitted light L1-T1 passes through the main body member 201 and enters the test object S. At this time, a part of the transmitted light L1-T1 is reflected to generate reflected light L1-R2.
  • the difference between the refractive index of the container 20 (main body member 201) and the refractive index of the test object S is smaller than a predetermined value. Therefore, the reflected light L1-R2 is suppressed to a low intensity, and the transmitted light L1-T2 having a sufficient intensity is incident on the test object S.
  • the transmitted light L1-T2 that has entered the test object S passes through the test object S and enters the lid member 202 from the upper surface of the test object S.
  • the difference in refractive index between the lid member 202 and the test object S is smaller than the difference between the test object S and air. Accordingly, the reflected light L1-R3 at the interface between the test object S and the lid member 202 is suppressed to a low intensity, and the sufficiently high intensity transmitted light L1-T3 is transmitted through the lid member 202.
  • 3B and 3C are examples of time waveform signals output from the receiver 13.
  • FIG. 3B In a region where there is no foreign matter, the waveform of the time waveform signal as shown in FIG. 3B is obtained from the receiver 13, and the time waveform signal of the reflected light is obtained at a time corresponding to the position where the refractive index changes. Can do.
  • the position where the refractive index changes occurs only at any of the interfaces of the container 20, the specimen S (powder), the lid member 202, and the external atmosphere. Therefore, if the dimensions of each part of the container 20 are known, the phase information of these time waveform signals can be estimated. Thereby, if the phase information of the time waveform signal is estimated, it can be understood that there is no foreign substance in the test object S.
  • the irradiation light L2 from the transmitter 11 of the foreign matter inspection apparatus 10 is irradiated onto the region where the foreign matter 300 exists.
  • the description is the same as the case where the foreign object 300 does not exist. That is, the irradiation light L2 generates reflected light L2-R1 and L2-R2 at the lower surface 201u of the main body member 201 and the interface between the main body member 201 and the test object S, respectively, and the transmitted light L2-T2 is generated in the foreign material 300.
  • reflected light L2-RO is generated.
  • the transmitted light L2-T3 that has passed through the foreign material 300 reaches the lid member 202, and generates reflected light L2-R3 at the interface between the test object S and the lid member 202. Further, the light passes through the lid member 202 and is emitted from the storage container 20. At this time, reflected light L 2 -R 4 is generated according to the refractive index difference between the lid member 202 and air.
  • the intensity of light transmitted through the foreign object 300 depends on the material and shape of the foreign object 300, and the intensity of light transmitted through the foreign object 300 may be zero or a minute intensity close to zero.
  • the receiver 13 can obtain a time waveform signal as shown in FIG. Compared to FIG. 3B, the number of occurrences of peaks increases in FIG.
  • the timing at which the peak waveform of the receiver 13 appears is estimated in advance according to the shape of the recess 201c and the position of the lid member 202 with respect to the recess 201c, it occurs at a timing different from the estimated peak waveform.
  • the timing at which the peak waveform of the receiver 13 appears is estimated in advance according to the shape of the recess 201c and the position of the lid member 202 with respect to the recess 201c, it occurs at a timing different from the estimated peak waveform.
  • the transmitted light L1-T3 and L2-T4 with and without the foreign material 300 have different intensities, and the transmitted light has different time waveforms depending on whether or not the foreign material 300 is affected.
  • the receiver 13 of the foreign substance inspection apparatus 10 For example, a case where the reflected light from the container 20 is detected by the receiver 13 of the foreign substance inspection apparatus 10 will be described.
  • the receiver 13 sequentially receives the reflected lights L1-R1, L1-R2, L1-R3, and L1-R4.
  • the receiver 13 sequentially receives the reflected lights L2-R1, L2-R2, L2-RO, L2-R3, and L2-R4. That is, since the reflected light received in time series by the receiver 13 differs depending on whether or not the foreign object 300 is present, the time waveforms of both are different. Therefore, by analyzing these time waveforms, the presence / absence, shape, material, etc. of foreign matter can be detected.
  • the receiver 13 of the foreign matter inspection apparatus 10 When the receiver 13 of the foreign matter inspection apparatus 10 is configured to receive transmitted light, the time waveform of the transmitted light L2-T4 that has passed through the region where the foreign matter 300 is present has an effect due to the foreign matter 300. On the other hand, the transmitted light L1-T3 that has passed through the region where the foreign object 300 does not exist is not affected by the foreign object 300. Therefore, the presence / absence of foreign matter, shape, material, etc. can be detected by comparative analysis of the time waveforms of both.
  • step S1 the transmitter 11 is irradiated with terahertz pulse light toward the storage container 20 in which the test object S is stored in the recess 201c, and the process proceeds to step S2.
  • the test object S present in the storage container 20 is, for example, powder as described above, and is stored in a pressed state.
  • step S2 the receiver 13 receives the terahertz pulse light that has arrived from the storage container 20, outputs a time waveform signal corresponding to the amplitude of the received terahertz pulse light, and proceeds to step S3.
  • step S3 the image generation unit 17 generates an image based on the time waveform signal output from the receiver 13, and proceeds to step S4.
  • step S4 it is determined whether or not the processing at all inspection positions of the object S has been performed. If the process has been performed at all inspection positions, an affirmative determination is made in step S4 and the process ends. If there is an inspection position that has not yet been processed, a negative determination is made in step S4 and the process proceeds to step S5.
  • step S5 the transmitter 11 and the optical system 12 are instructed so that the scanning mechanism 14 is instructed to irradiate the next measurement position of the test object S with the terahertz pulse light and the position of the container 20 is fixed. And the receiver 13 are two-dimensionally moved on the XY plane, and the process returns to step S1.
  • the test object S is stored in the recess 201c with a uniform density and a uniform thickness. Therefore, when there is no foreign substance, the detection position (timing) of the time waveform signal when the reflected light or transmitted light is detected at each inspection position does not change when the object S is two-dimensionally scanned. On the other hand, when a foreign object is present, a time waveform signal is detected at a different position (timing) as compared to the case where no foreign object is present. As a result, the foreign matter inspection apparatus 10 can detect even a minute foreign matter that slightly affects the time waveform of reflected light or transmitted light, and can improve the foreign matter detection accuracy. .
  • the lid member 202 of the container 20 is configured so that the test object S accommodated in the recess 201c of the main body member 201 has no air between the test object S and the cover member 202. It is fixed to the main body member 201 so that the density of S is uniform and the shape of the test object S does not change. Thereby, it is possible to detect even a minute foreign matter, which contributes to the improvement of foreign matter detection accuracy.
  • the main body member 201 of the storage container 20 transmits the terahertz pulse light, the foreign matter inspection in the test object S stored in the recess 201c is possible by the terahertz pulse light.
  • the depth D of the concave portion 201c of the main body member 201 is constant, and the distance between the lower surface of the lid member 202 (the upper surface 201t of the main body member 201) and the lower surface 201b of the concave portion 201c is constant.
  • the difference between the refractive index of the main body member 201 and / or the lid member 202 and the refractive index of the test object S is smaller than a predetermined value.
  • the container 20 can contain a material that shields ultraviolet light and visible light from the specimen S housed in the recess 201c. Thereby, it can suppress that the test object S in the storage container 20 changes in quality by the influence of ultraviolet light or visible light.
  • the “uniform density” in the present invention indicates a state in the terahertz sensing device that satisfies the condition that the presence / absence of foreign matter can be distinguished. For example, when the presence or absence of a foreign object is determined according to the detection timing of the terahertz pulse light by the receiver 13, particularly the timing at which a large signal value is detected in the detected pulse or the timing at which a predetermined pulse waveform is detected When the foreign matter is present, it is preferable that the detection timing of the terahertz pulse light of the receiver 13 with respect to the pulse emission timing of the terahertz pulse light deviates from a predetermined timing. However, if there is a difference in density for each measurement position (position on the XY plane in FIG. 1) of the test object S, the detection timing of the terahertz pulse light is shifted according to the difference in density. Therefore, in the following description, it will be described how much the terahertz pulse light detection timing does not cause a problem to what extent.
  • the ultrashort pulse laser beam is irradiated from the femtosecond laser light source 19 which is a primary light source to the transmitter 11, terahertz pulse light is emitted from the transmitter 11. Since the femtosecond laser light source 19 emits ultrashort pulse laser light at a constant period, the transmitter 11 emits terahertz pulse light at a constant period in synchronization with the period.
  • the receiver 13 is sensitive to the terahertz pulse light only at the timing when the ultrashort pulse laser light from the femtosecond laser light source 19 is irradiated.
  • the current output waveform (that is, the time waveform signal) output from the receiver 13 is also output at a constant cycle.
  • the ultrashort pulse laser light and pump light reaching the transmitter 11 are referred to as pump light
  • the ultrashort pulse laser light reaching the receiver 13 is referred to as probe light.
  • the femtosecond laser as a primary light source is branched by a beam splitter, the pulse waveform of the probe light is irradiated as a current measurement trigger of the receiver 13 in synchronization with the time waveform signal.
  • the optical path length of the pump light and terahertz pulse light which is the optical path length of the optical path length of the pump light plus the optical path length from the transmitter to the receiver of the terahertz pulse light, is the same as the optical path length of the probe light
  • the pulse waveform L110 of the probe light that is a measurement trigger reaches the receiver 13 simultaneously with the generation of the terahertz pulse light. That is, the current value at the point a of the time waveform signal L100 shown in FIG.
  • the pulse waveform L110 of the probe light is from the moment when the terahertz pulse light is generated. Since the current reaches the receiver 13 with a slight delay, the current value at the point b of the time waveform signal L100 is taken into the image generation unit 17.
  • the time delay member 21 is moved in the direction in which the optical path length difference between the optical path length of the pump light and the terahertz pulse light and the probe light is further increased, whereby c of the time waveform signal L100 shown in FIG.
  • the current values at point to point f are taken into the image generation unit 17.
  • the image generation unit 17 shapes the time waveform L120 from the current values at the points a to f.
  • the detection timing of the terahertz pulse light is obtained using the above-described method, but if it is delayed more than twice as long as the time corresponding to the sampling interval at this time, it can be clearly recognized as an abnormal part with respect to other parts. it can. Therefore, in the present embodiment, a density state that does not differ by more than twice for this reason can be regarded as a uniform density.
  • FIG. 9A schematically shows a time waveform signal when the shape of the test object S is measured by a reflection measurement system. It is assumed that L200 in FIG. 9A is a reflected pulse from the reflector and is a main pulse to be analyzed.
  • L200 in FIG. 9A is a reflected pulse from the reflector and is a main pulse to be analyzed.
  • the range S01 in which the specimen S is accommodated at a low density is indicated by coarse dots
  • the range S02 in which the specimen S is accommodated at a high density is schematically represented by fine dots.
  • 9B and 9C show temporal changes in the amplitude of the terahertz pulse light reflected by the surface and the bottom surface of the test object S in the range S01 and the range S02. As shown in FIGS.
  • the arrival time of the terahertz pulse light reflected from the bottom surface of the test object S is shifted due to the difference in density of the powder test object S stored in the storage container 20. That is, as shown in the figure, the pulse L200 is observed at different places depending on the density change.
  • the shift amount ⁇ t of the observation position (on the time axis) of the pulse L200 as the main pulse is equal to or less than the pulse position measurement accuracy of the inspection apparatus within the inspection region. For example, in the foreign substance inspection apparatus 10, it is assumed that the sampling interval for sampling the temporal amplitude change of the terahertz pulse light is 0.1 picoseconds.
  • the difference in arrival time of the reflected pulse to the detector due to the density distribution is shorter than twice the sampling interval of 0.1 picoseconds. In other words, it is desirable to set so that the inspection accuracy of the terahertz pulse light is below.
  • FIG. 9D schematically shows a change in temporal amplitude of the tera health pulsed light L201 composed of discrete points.
  • the sampling interval of the temporal amplitude change of the terahertz pulse light is set to 0.1 picoseconds.
  • ideal conditions for the deviation (delay amount) of the pulse time accompanying the change in the density of the test object S to remain within the inspection accuracy of the foreign matter inspection apparatus 10 will be described below. That is, the density change rate is calculated so that the deviation of the pulse position is less than the inspection accuracy.
  • the relationship between the speed of electromagnetic waves (terahertz pulse light) and the thickness and refractive index of the catalyst is expressed by the following equation (1).
  • t 2nl / c
  • t time
  • n the refractive index
  • l the physical length (catalyst thickness)
  • c the speed of light.
  • the refractive index n is generally closely related to the density of the medium
  • the refractive index n of the sealed sample (test object S) uses the density d and the coefficient k of the sample (test object S).
  • the coefficient k is a coefficient that relates the density d and the refractive index n, and differs depending on the test object S.
  • the time change ⁇ t that occurs when the density d has a slight change ⁇ d is calculated by differentiating the equation (3) with respect to time. That is, the time change ⁇ t due to the density change ⁇ d is expressed by the following equation (4).
  • the time t ′ t + ⁇ t
  • the same result can be obtained by using equations (3) and (1).
  • Equation (4) in order to set the calculation parameter to the density change ratio ( ⁇ d / d), the denominator and the numerator on the right side of Equation (4) are multiplied by the density to obtain an absolute value.
  • Formula (4) becomes following Formula (5). ... (5)
  • the density change rate ⁇ d / d and the pulse time change ⁇ t are associated with each other.
  • Expression (5) represents the amount of change over time when a distribution occurs for a certain density d and a slight change in density occurs.
  • calculated by the equation (5) may be equal to or less than the time interval corresponding to the measurement accuracy required for the foreign matter inspection apparatus 10.
  • the storage container 20 according to the embodiment of the present invention is configured such that when the powder is pressed by the lid member 202, the amount of the powder stored in the storage container 20 is such that the delay amount is twice or less the sampling interval.
  • the threshold value is not necessarily limited to two times or more, and when the detection accuracy is to be increased, 1.9 times, 1.8 times, 1.7 times, 1.6 times, 1.5 times the sampling interval. Double, 1.4 times, 1.3 times, 1.2 times, and 1,1 times may be set as threshold values.
  • the present invention is not limited to a method that is obtained by a change in the detection timing of the detected terahertz pulse light. When the presence / absence is detected, it may be determined according to the gradation resolution of the signal value.
  • FIG. 4A is a diagram schematically illustrating the appearance of the storage container 40
  • FIG. 4B is a diagram schematically illustrating a cross section of the storage container 40 in the ZX plane.
  • the container 40 of the present embodiment is different from the first embodiment in that a pressing member 401 for pressing the test object S is provided between the lid member 202 and the test object S.
  • the specimen S accommodated in the recess 201c of the main body member 201 is pressed from the upper side in the Z-axis + direction by the lid member 202, and the object to be tested is removed from the recess 201c. It was the structure which prevents the inspection material S from dissipating.
  • the lid member 202 presses the test object S from above in the Z-axis + direction via the pressing member 401, and the test object S dissipates from the recess 201c. It is the structure which prevents doing.
  • the pressing member 401 is preferably made of a material having high elasticity in order to generate a uniform pressing force against the test object S.
  • a material having high elasticity for example, butadiene rubber, polyolefin resin such as polyethylene and polypropylene, fluorine rubber, butylene rubber, polyethylene, and the like can be used.
  • the side surface of the pressing member 401 has a shape that is in close contact with the side surface of the recess 201 c of the main body member 201 in a state where the test object S is pressed. Thus, the specimen S is prevented from escaping from the recess 201c through the gap between the main body member 201 and the lid member 202.
  • butylene rubber is soft, even if the contact surface between the butylene rubber and the powder test object S is uneven, a gap is hardly generated between the powder test object S and the butylene rubber. For this reason, using butylene rubber is suitable for inspection with terahertz pulse light.
  • the refractive index of the pressing member 401 it is preferable that the transmittance of the terahertz pulse light is high and the difference from the refractive index of the test object S is small.
  • the principle of performing the inspection by irradiating the container 40 with the terahertz pulse light conforms to the description of the inspection using the container 20 described in the first embodiment.
  • reflected light is generated at the interface between the test object S and the lid member 202, whereas in the present embodiment, the test object S and the pressing member 401 The difference is that reflected light is generated at the interface and at the interface between the pressing member 401 and the lid member 202.
  • the lid member 202 presses the test object S via the pressing member 401.
  • the test object S accommodated in the recess 201c of the main body member 201 is arranged so that there is no air between the test object S and the pressing member 401 and between the pressing member 401 and the lid member 202.
  • the density of the test object S is uniform and the shape of the test object S is fixed to the main body member 201 more reliably so that the shape of the test object S does not change.
  • the storage container 40 has been described as a separate member for the pressing member 401 and the lid member 202.
  • the pressing member 401 and the lid member 202 may be integrally formed.
  • a container 50 according to the present embodiment is shown in FIG. 5, the convex portion 205v is formed on the lower surface of the lid member 205, and the side surface of the convex portion 205v is a side surface of the concave portion 201c of the main body member 201 in a state where the test object S is pressed.
  • the shape is in close contact with the
  • the lid member 205 can be integrally formed of, for example, a polyolefin resin. With such a configuration, there is no need to prepare the pressing member 401 as a separate member, so that the storage container can be manufactured at a lower cost compared to the second embodiment.
  • the depth D of the recess 201c of the main body member 201 is constant.
  • the present invention is not limited to this.
  • an example of the container 60 in which the depth D of the recess 201c is not constant is shown in the cross-sectional view of FIG.
  • the lower surface 201b of the recess 201c of the main body member 201 has a predetermined inclination with respect to the XY plane, the depth of the end on the X direction ⁇ side of the recess 201c is D1, and the + The depth of the end on the side is D2 which is shallower than D1.
  • the depth of the recess 201c is not uniform, information on the depth of the recess 201c corresponding to each position in the XY plane is obtained in advance.
  • a case will be described in which terahertz pulse light is irradiated from the lower side (Z-axis-side) of the container 60 toward the upper side to inspect whether or not foreign matter is mixed in the test object S.
  • the timing at which the reflected light is generated at the interface between the main body member 201 and the test object S can be grasped in advance corresponding to each position in the XY plane.
  • the absorption of the terahertz pulse light by the test object S can be grasped in advance corresponding to each position in the XY plane. Thereby, the reflection timing of the terahertz pulse light due to the change in depth and the amplitude of the transmitted terahertz pulse light can be corrected.
  • the specimen S is accommodated in the recess 201c with a uniform density, and between the specimen S and the lid member 202 (205), or between the specimen S and the pressing member 401.
  • the specimen S drug powder
  • the lid member 202 may be fixed to the accommodating portion in a reduced pressure environment.
  • ultrasonic waves are applied to the main body member 201 during and / or after the test object S is stored in the recess 201c. Such vibrations may be applied. Thereby, it can suppress that the irradiation light L1 attenuate
  • the storage container 20 may include a reflecting portion.
  • the reflection portion is provided on the surface opposite to the surface on which the terahertz pulse light is incident.
  • the reflecting portion is provided on the upper surface of the lid member 202.
  • the reflection portion is provided below the lower surface 201u.
  • the foreign substance inspection apparatus 10 reflects the terahertz pulse light transmitted through the test object S, transmits the test object S again, and can inspect the foreign object with higher accuracy.
  • An antireflection film may be provided on the lower surface 201u of the main body member 201 and the lower surface 201b of the recess 201c (that is, the surface in contact with the test object S).
  • the resin material has a high transmittance for the terahertz pulse light as the antireflection film, the effect can be expected.
  • a cycloolefin resin or polyethylene can be used.
  • the thickness d is preferably ⁇ / (4n) (n is the thickness of the material used as the antireflection film).
  • the antireflection film may be provided on the side surface of the recess 201c, thereby suppressing generation of reflected light on the inner side surface and the surface of the recess 201c. Can be improved.
  • the powder storage container includes a storage portion in which a recess for storing powder is formed, and a lid member that covers the powder stored in the recess, and the lid member seals the powder in the storage portion by pressing the powder. Thereby, the difference in the density distribution of the powder is reduced compared to before the powder is covered with the lid member.
  • the present invention is not limited to the above-described embodiments, and other forms conceivable within the scope of the technical idea of the present invention are also included in the scope of the present invention. .

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Abstract

Le récipient de stockage selon la présente invention est pourvu d'une section de stockage, dans laquelle une section évidée servant à stocker une poudre est formée, et d'un élément de couvercle recouvrant la poudre stockée dans la section évidée, lequel contenant de stockage conserve, avec une densité uniforme, la poudre dans la section évidée.
PCT/JP2017/001124 2017-01-13 2017-01-13 Récipient de stockage de poudre et procédé d'inspection de matière étrangère Ceased WO2018131149A1 (fr)

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Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH10260121A (ja) * 1997-03-17 1998-09-29 Horiba Ltd 酸素または窒素の分析に用いる試料体の形成方法および装置
JP2001033365A (ja) * 1999-07-26 2001-02-09 Ricoh Co Ltd 熱分析用試料作製装置及び熱分析用試料作製方法
JP2004101257A (ja) * 2002-09-06 2004-04-02 Communication Research Laboratory テラヘルツ電磁波による物体の画像表示装置および方法
JP3111001U (ja) * 2005-04-01 2005-07-07 国立大学法人 千葉大学 固体試料成型器及び固体試料回収器並びに固体試料成型治具及び固体試料回収治具
JP2010044056A (ja) * 2008-07-16 2010-02-25 Otsuka Denshi Co Ltd テラヘルツ領域における粉体測定方法およびそれに用いられるサンプル容器、ならびにサンプル装填装置
JP2014002024A (ja) * 2012-06-18 2014-01-09 Nipro Corp テラヘルツパルス波を用いた粉末中の異物検出装置および異物検出方法
WO2014132620A1 (fr) * 2013-02-26 2014-09-04 味の素株式会社 Procédé et dispositif permettant de détecter des matériaux fibreux tels qu'un cheveu
WO2015049765A1 (fr) * 2013-10-03 2015-04-09 株式会社システムスクエア Dispositif d'inspection de colis

Patent Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH10260121A (ja) * 1997-03-17 1998-09-29 Horiba Ltd 酸素または窒素の分析に用いる試料体の形成方法および装置
JP2001033365A (ja) * 1999-07-26 2001-02-09 Ricoh Co Ltd 熱分析用試料作製装置及び熱分析用試料作製方法
JP2004101257A (ja) * 2002-09-06 2004-04-02 Communication Research Laboratory テラヘルツ電磁波による物体の画像表示装置および方法
JP3111001U (ja) * 2005-04-01 2005-07-07 国立大学法人 千葉大学 固体試料成型器及び固体試料回収器並びに固体試料成型治具及び固体試料回収治具
JP2010044056A (ja) * 2008-07-16 2010-02-25 Otsuka Denshi Co Ltd テラヘルツ領域における粉体測定方法およびそれに用いられるサンプル容器、ならびにサンプル装填装置
JP2014002024A (ja) * 2012-06-18 2014-01-09 Nipro Corp テラヘルツパルス波を用いた粉末中の異物検出装置および異物検出方法
WO2014132620A1 (fr) * 2013-02-26 2014-09-04 味の素株式会社 Procédé et dispositif permettant de détecter des matériaux fibreux tels qu'un cheveu
WO2015049765A1 (fr) * 2013-10-03 2015-04-09 株式会社システムスクエア Dispositif d'inspection de colis

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