WO2020132802A1 - Electronic component and manufacturing method thereof - Google Patents
Electronic component and manufacturing method thereof Download PDFInfo
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- WO2020132802A1 WO2020132802A1 PCT/CN2018/123098 CN2018123098W WO2020132802A1 WO 2020132802 A1 WO2020132802 A1 WO 2020132802A1 CN 2018123098 W CN2018123098 W CN 2018123098W WO 2020132802 A1 WO2020132802 A1 WO 2020132802A1
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- deformation layer
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/48—Manufacture or treatment of parts, e.g. containers, prior to assembly of the devices, using processes not provided for in a single one of the groups H01L21/18 - H01L21/326 or H10D48/04 - H10D48/07
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- the invention relates to the technical field of electronic devices, in particular to an electronic device and a manufacturing method thereof.
- the manufacturing method of the existing electronic device is to form a patterned wire on an elastic substrate, and then fix the chip on the substrate by transferring a stamp to connect with the wire.
- this manufacturing method is incompatible with existing manufacturing technologies such as semiconductors and display panels, resulting in low production efficiency.
- the present invention provides an electronic device with high production efficiency and a manufacturing method thereof.
- the present invention provides a method for manufacturing an electronic device, which includes the following steps:
- the electronic device is separated from the rigid substrate.
- the present invention provides an electronic device including a deformation layer and a functional layer provided on the deformation layer, and after the deformation layer is pre-extended, the functional layer is laminated on the deformation layer .
- a pre-stretched deformation layer is provided on the rigid substrate to fix the shape of the pre-stretched deformation layer, thereby reducing the complexity of manufacturing a functional layer on the pre-stretched deformation layer , And no additional fixtures are needed. Since the electronic device of the present invention is compatible with existing semiconductor, display panel and other manufacturing technologies, the production efficiency is improved.
- FIG. 1 is a flowchart of a method for manufacturing an electronic device provided by the first embodiment of the present invention.
- FIG. 2 is a schematic diagram of the manufacturing process of the electronic device provided by the first embodiment of the present invention.
- FIG. 3 is a schematic diagram of the structure in which the deformation layer of the electronic device and the rigid substrate are bonded according to the first embodiment of the present invention.
- FIG. 4 is a flowchart of a method for manufacturing an electronic device provided by a second embodiment of the present invention.
- FIG. 5 is a schematic diagram of a manufacturing process of an electronic device provided by a second embodiment of the present invention.
- FIG. 6 is a flowchart of a method for manufacturing an electronic device provided by a third embodiment of the present invention.
- FIG. 7 is a flowchart of a method for manufacturing an electronic device provided by a fourth embodiment of the present invention.
- FIG. 1 shows a flowchart of a method for manufacturing an electronic device according to a first embodiment of the present invention
- FIG. 2 shows a method for manufacturing an electronic device according to a first embodiment of the present invention.
- Schematic diagram of the manufacturing process of the device 50 The electronic device 50 includes a deformation layer 20 and a functional layer 40 disposed on the deformation layer. After the deformation layer 20 is pre-expanded, the functional layer 40 is laminated on the deformation layer 20.
- the manufacturing method of the electronic device includes the following steps.
- Step 101 Provide a rigid substrate.
- the rigid substrate 10 may be, but not limited to, a glass substrate, a metal substrate, or a ceramic substrate.
- the rigid substrate 10 is a glass substrate.
- the glass substrate is, for example, but not limited to soda lime glass, alkali-free glass, phosphate-based glass, or quartz.
- the rigid substrate 10 is used to support the electronic device 50 during the manufacturing process.
- the rigid substrate 10 is made of a transparent material so that the laser can irradiate the electronic device 50 through the rigid substrate 10 so that the electronic device 50 is peeled off the rigid substrate 10.
- Step 103 Set a pre-extended deformation layer on the rigid substrate.
- the deformation layer 20 contains an elastomer.
- the elastomer is preferably a material whose internal polymer chain or lattice structure can be stretched under the action of external force.
- the elastomer is, for example, but not limited to one of natural rubber, synthetic rubber, thermoplastic elastomer, or a combination thereof.
- the natural rubber is, for example, polyisoprene.
- Synthetic rubbers include, but are not limited to polyisoprene, styrene-butadiene rubber, cis-butadiene rubber, neoprene rubber, nitrile rubber, butyl rubber, or silicone rubber.
- Thermoplastic elastomers include, but are not limited to styrene block copolymers, thermoplastic olefins, thermoplastic vulcanizates, thermoplastic polyurethanes, thermoplastic copolyesters, or thermoplastic polyamides.
- the pre-stretched deformation layer 20 is provided on the rigid substrate 10, which specifically includes: fixing the deformation layer 20 on the rigid substrate 10 through the bonding layer 30.
- the rigid substrate 10 has a flat upper surface.
- the pre-extended deformation layer 20 has flat upper and lower surfaces.
- the lower surface of the pre-extended deformation layer 20 is bonded to the upper surface of the rigid substrate 10 through the bonding layer 30. Since the deformable layer 20 is fixed to the rigid substrate 10 through the bonding layer 30, the shape of the deformable layer 20 is fixed without using an additional traditional fixture, effectively using the existing display panel manufacturing technology, thereby reducing the subsequent The complexity of making a functional layer on the deformation layer 20.
- the bonding layer 30 is a pressure sensitive adhesive (PSA) layer, a viscosity reducing adhesive layer, or a sacrificial layer.
- PSA pressure sensitive adhesive
- the bonding layer 30 is a pressure-sensitive adhesive layer
- the contact pressure of the pressure-sensitive adhesive layer formed on the rigid substrate 10 is adjusted to reduce the viscosity between the pressure-sensitive adhesive and the rigid substrate 10 to
- the deformation layer 20 and the rigid substrate 10 are separated, and the deformation layer 20 can be quickly peeled from the rigid substrate 10.
- the pressure-sensitive adhesive contains one or a combination of natural rubber, synthetic rubber, acrylic compound, silicone compound, and polyurethane compound.
- the bonding layer 30 is a viscosity-reducing adhesive layer
- the viscosity-reducing adhesive layer is reduced in viscosity under preset processing conditions to achieve separation of the deformation layer 20 from the rigid substrate 10.
- the bonding layer 30 is exposed to heat, ultraviolet light irradiation, microwave irradiation, or the like, the adhesion of the adhesion-reducing adhesive layer decreases, so that the deformation layer 20 can be quickly peeled from the rigid substrate 10.
- the tackifier layer includes one of ultraviolet tackifier, heated tackifier or microwave tackifier or a combination thereof.
- the sacrificial layer may be dissolved by liquid or gas to peel the deformation layer 20 from the rigid substrate 10.
- the sacrificial layer contains one or a combination of water-soluble materials, metal materials, or soluble gum materials.
- Water-soluble materials are, for example, but not limited to sugars or inorganic salts.
- the metal material is selected from metals soluble in acid, alkali, or salt solution.
- the soluble glue-like material is, for example, optically clear (OCA).
- the manufacturing method further includes: deforming the deformation layer 20 in a preset direction to obtain a pre-extended deformation layer 20.
- deforming the deformation layer 20 along a preset direction to obtain the pre-extended deformation layer 20 includes: mechanically stretching the deformation layer 20 along the preset direction to obtain the pre-extended deformation layer 20.
- the preset direction is a direction in which the straight line passing through the geometric center of the deformation layer 20 stretches the deformation layer 20 in the opposite direction.
- the preset direction is parallel to the plane where the deformation layer 20 is located. That is, the deformation layer 20 is stretched symmetrically in different directions from its geometric center, so that the elastic body in the deformation layer 20 is balanced in force.
- the deformation layer 20 is substantially rectangular.
- the deformation layer 20 includes a first straight line L1 passing through the geometric center of the deformation layer 20, a second straight line L2 passing through the geometric center of the deformation layer 20 and perpendicular to the first straight line L1, and passing through the geometric center of the deformation layer 20 and passing The two third straight lines L3 of the two diagonals of the deformation layer 20.
- the deformation layer 20 is stretched on two opposite sides of the first straight line L1, the second straight line L2, and the two third straight lines L3.
- first straight line L1 is the axis of symmetry of the deformation layer 20 in the horizontal direction
- second straight line L2 is the axis of symmetry of the deformation layer 20 in the vertical direction
- third straight line L3 is the diagonal of the deformation layer 20.
- the deformation layer 20 may also be stretched on opposite sides of the first straight line L1, the second straight line L2, the third straight line L3, and/or other straight lines passing through the geometric center of the deformable layer 20.
- the deformation layer 20 may be stretched by a stretching device. After the deformation layer 20 is mechanically stretched in a predetermined direction, the elastic body in the pre-stretched deformation layer 20 generates tensile stress.
- the deformation layer 20 and the rigid substrate 10 are stacked, and the direction of the tensile stress of the elastic body is opposite to the direction of the adhesion force of the elastic body to the bonding layer 30.
- the area and shape of the deformed layer 20 after deformation are substantially the same as the area and shape of the rigid substrate 10, so that the deformation layer 20 is attached to the rigid substrate 10.
- the deformation of the deformation layer 20 is reversible, that is, the deformation of the deformation layer 20 can be restored under preset conditions.
- Step 105 forming a functional layer on the deformation layer to obtain an electronic device.
- the electronic device 50 includes a deformation layer 20 and a functional layer 40.
- the functional layer 40 is made of an elastic material or a flexible material to avoid the subsequent pre-expanded deformation layer 20 from breaking during relaxation.
- the functional layer 40 includes, but is not limited to a microchip and a communication bus.
- the microchip is an electronic device with a specific function.
- the microchip is, for example, but not limited to an electronic device having a processing function, a storage function, a calculation function, a display function, a sensing function, or a communication function.
- the communication bus is used to realize the communication connection between these electronic devices.
- the electronic device 50 is, for example, a display panel.
- the display panel is, for example, but not limited to, a liquid crystal display (Liquid Crystal Display, LCD) panel, a quantum dot display (Quantum Dot Light Emitting Diodes, QLED) panel, an electronic paper (E-paper Display, EPD), and a touch screen (Touch panel), flexible solar cell (Page, View, PV) panel, radio frequency tag (Radio Frequency Identification, RFID) and other products or components with specific functions.
- LCD liquid crystal display
- QLED Quantum Dot Light Emitting Diodes
- EPD electronic paper
- Touch panel touch screen
- flexible solar cell (Page, View, PV) panel radio frequency tag (Radio Frequency Identification, RFID) and other products or components with specific functions.
- Step 107 Separate the electronic device from the rigid substrate.
- the method of separating the electronic device 50 from the rigid substrate 10 includes mechanical peeling, viscosity reduction treatment of the bonding layer, or etching the bonding layer.
- an external force is applied to the periphery of the rigid substrate 10 away from the deformation layer 20, so that the rigid substrate 10 is separated from the electronic device 50.
- adjusting the contact pressure, heating, or irradiating the bonding layer 30 causes the viscosity of the bonding layer 30 to decrease, thereby separating the electronic device 50 and the rigid substrate 10.
- an etching solution is applied to cause the bonding layer 30 to be dissolved, thereby separating the electronic device 50 and the rigid substrate 10.
- the polymer chain or lattice structure inside the elastic body of the deformation layer 20 has a higher energy when it is in a stretched state and a lower energy when it is in a relaxed state. Therefore, in a natural state, the elastomer has a transition from a stretched state It is the trend of relaxation state.
- the adhesive force of the elastic body of the deformation layer 20 disappears, so under the action of the tensile force of the elastic body, the deformation layer 20 drives the electronic device 50 to shrink naturally until the electronic device 50 is in a relaxed state Yu.
- the bonding layer 30 further contains a laser absorber, and the laser absorber is selected from the group consisting of salicylates, benzophenones, benzotriazoles, substituted acrylonitriles, and triazines. Or a combination of them.
- the laser absorber in the bonding layer 30 can absorb laser light and reduce the viscosity of the bonding layer 30, the deformation layer 20 can be quickly peeled off from the rigid substrate 10.
- FIG. 4 is a schematic flowchart of manufacturing an electronic device according to a second embodiment of the present invention.
- the manufacturing method of the electronic device includes the following steps:
- Step 401 providing a rigid substrate.
- Step 402 a deformation layer containing an elastomer is deposited on the rigid substrate.
- the deformation layer 20 containing an elastomer is deposited on the rigid substrate 10, which specifically includes: configuring a deposition solution containing the elastomer; applying on the entire deposition surface of the rigid substrate 10
- the deposition liquid is cured under preset conditions.
- the deposition liquid may be deposited by inkjet deposition or other deposition methods.
- Step 403 pretreating the deformation layer to form a pre-extended deformation layer on the rigid substrate.
- the elastic body in the pre-stretched deformation layer 20 generates tensile stress F, and the direction of the tensile stress F of the elastic body is opposite to the direction of the adhesive force of the elastic body, and the magnitude of the tensile stress F of the elastic body is equal to
- the adhesion of the elastic body is balanced, so that the deformation layer 20 is attached to the rigid substrate 10. In this way, the shape of the deformation layer 20 is fixed, which facilitates the subsequent provision of the functional layer 40 on the deformation layer 20.
- the pretreating the deformation layer to form a pre-extended deformation layer on the rigid substrate specifically includes:
- the deformation layer 20 is baked and cured to form a pre-extended deformation layer 20 on the rigid substrate 10.
- the baking and curing the deformation layer 20 to form a pre-extended deformation layer 20 on the rigid substrate 10 include:
- the pretreatment of the deformation layer 20 to form a pre-extended deformation layer 20 on the rigid substrate 10 specifically includes:
- the light curing the deformation layer 20 to form a pre-extended deformation layer 20 on the rigid substrate 10 includes:
- Step 405 forming a functional layer on the pre-extended deformation layer to obtain an electronic device.
- Step 407 separating the electronic device from the rigid substrate.
- FIG. 6 is a schematic flowchart of manufacturing an electronic device according to a third embodiment of the present invention.
- the manufacturing method of the electronic device includes the following steps:
- Step 601 providing a rigid substrate.
- Step 602 Configure a liquid glue containing the elastomer.
- Step 603 Apply the liquid glue on the rigid substrate in a preset direction and cure to form a pre-extended deformation layer on the rigid substrate.
- the elastic body in the pre-stretched deformation layer 20 generates tensile stress. It can be understood that, when the liquid glue is applied on the rigid substrate 10 in a predetermined direction, the polymer chain inside the elastomer is driven to directionally stretch to enhance the tensile stress of the deformation layer 20 in a specific direction.
- Step 605 Form a functional layer on the pre-extended deformation layer to obtain an electronic device.
- Step 607 Separate the electronic device from the rigid substrate.
- FIG. 7 is a schematic flowchart of manufacturing an electronic device according to a fourth embodiment of the present invention.
- the manufacturing method of the electronic device includes the following steps:
- Step 701 providing a rigid substrate.
- Step 702 Prepare the solid deformation layer containing an elastomer in advance.
- step 703 the deformation layer and the rigid substrate are laminated, pressed/heated and bonded to form a pre-extended deformation layer on the rigid substrate.
- the elastic body in the pre-stretched deformation layer 20 generates tensile stress. It is understandable that the elastomer in the deformation layer 20 is stretched under heat or pressure, and the polymer chain or lattice structure inside the elastomer is stretched to increase the energy of the polymer chain or lattice structure, and the deformation layer 20 is in an extended state.
- Step 705 forming a functional layer on the pre-extended deformation layer to obtain an electronic device.
- Step 707 Separate the electronic device from the rigid substrate.
- the manufacturing method of the electronic device of the present invention fixes the deformation layer on the rigid substrate, that is, the deformation layer can be attached to the rigid substrate to fix the shape of the deformation layer, thereby reducing the manufacturing function on the deformation layer
- the complexity of the layer, and no additional fixtures are needed. Because the electronic device of the present invention is compatible with existing semiconductor, display panel and other manufacturing technologies, and the manufacturing method is simple in preparation process, the production efficiency is improved, and it is suitable for large-scale production.
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Abstract
Description
本发明涉及电子器件技术领域,尤其涉及一种电子器件及其制作方法。The invention relates to the technical field of electronic devices, in particular to an electronic device and a manufacturing method thereof.
随着电子技术的发展,消费者对于电子装置的需求越来越多样化、个性化。电子装置的形态也随之发生变化,即由原来的直板化逐渐演变成折叠式、滑盖式等,并有进一步演变成柔性化甚至弹性化的趋势。现有的电子装置的制作方法,是在弹性的衬底上形成图案化的导线,然后再通过转移印章的方式将芯片固定于衬底上而与导线连接。然而,这种制作方法与现有的半导体、显示面板等制造技术不兼容,造成生产效率低下。With the development of electronic technology, consumers' demands for electronic devices are becoming more diversified and personalized. The shape of the electronic device has also changed accordingly, that is, the original straight bar has gradually evolved into a folding type, a sliding cover type, etc., and there is a tendency to further evolve into a flexible or even elastic. The manufacturing method of the existing electronic device is to form a patterned wire on an elastic substrate, and then fix the chip on the substrate by transferring a stamp to connect with the wire. However, this manufacturing method is incompatible with existing manufacturing technologies such as semiconductors and display panels, resulting in low production efficiency.
发明内容Summary of the invention
鉴于现有技术中存在的上述问题,本发明提供一种生产效率较高的电子器件及其制作方法。In view of the above problems in the prior art, the present invention provides an electronic device with high production efficiency and a manufacturing method thereof.
为了实现上述目的,本发明实施例提供如下技术方案:In order to achieve the above objective, the embodiments of the present invention provide the following technical solutions:
第一方面,本发明提供了一种电子器件的制作方法,其包括如下步骤:In a first aspect, the present invention provides a method for manufacturing an electronic device, which includes the following steps:
提供刚性基板;Provide rigid substrate;
在所述刚性基板上设置预延展的形变层;Setting a pre-extended deformation layer on the rigid substrate;
在所述形变层上形成功能层,以获得电子器件;以及Forming a functional layer on the deformation layer to obtain an electronic device; and
将所述电子器件与所述刚性基板分离。The electronic device is separated from the rigid substrate.
第二方面,本发明提供了一种电子器件,包括形变层及设置于所述形变层上的功能层,当所述形变层在预延展后,将所述功能层层叠至所述形变层上。In a second aspect, the present invention provides an electronic device including a deformation layer and a functional layer provided on the deformation layer, and after the deformation layer is pre-extended, the functional layer is laminated on the deformation layer .
本发明的电子器件的制作方法,通过在所述刚性基板上设置预延展的形变层,以使预延展的形变层的形态固定,从而降低了在预延展的形变层上制作功能层的复杂度,且无需额外的固定器固定。由于本发明的电子器件可与现有的 半导体、显示面板等制造技术兼容,提高了生产效率。In the method for manufacturing an electronic device of the present invention, a pre-stretched deformation layer is provided on the rigid substrate to fix the shape of the pre-stretched deformation layer, thereby reducing the complexity of manufacturing a functional layer on the pre-stretched deformation layer , And no additional fixtures are needed. Since the electronic device of the present invention is compatible with existing semiconductor, display panel and other manufacturing technologies, the production efficiency is improved.
为了更清楚地说明本发明实施例或现有技术中的技术方案,下面将对实施例或现有技术描述中所需要使用的附图作简单地介绍,显而易见地,下面描述中的附图仅仅是本发明的一些实施例,对于本领域普通技术人员来讲,在不付出创造性劳动的前提下,还可以根据这些附图获得其他的附图。In order to more clearly explain the embodiments of the present invention or the technical solutions in the prior art, the following will briefly introduce the drawings required in the embodiments or the description of the prior art. Obviously, the drawings in the following description are only These are some embodiments of the present invention. For those of ordinary skill in the art, without paying any creative labor, other drawings can be obtained based on these drawings.
图1是本发明第一实施例提供的电子器件的制作方法的流程图。FIG. 1 is a flowchart of a method for manufacturing an electronic device provided by the first embodiment of the present invention.
图2是本发明第一实施例提供的电子器件的制作流程示意图。2 is a schematic diagram of the manufacturing process of the electronic device provided by the first embodiment of the present invention.
图3是本发明第一实施例提供的电子器件的形变层与刚性基板键合的结构示意图。FIG. 3 is a schematic diagram of the structure in which the deformation layer of the electronic device and the rigid substrate are bonded according to the first embodiment of the present invention.
图4是本发明第二实施例提供的电子器件的制作方法的流程图。4 is a flowchart of a method for manufacturing an electronic device provided by a second embodiment of the present invention.
图5是本发明第二实施例提供的电子器件的制作流程示意图。5 is a schematic diagram of a manufacturing process of an electronic device provided by a second embodiment of the present invention.
图6是本发明第三实施例提供的电子器件的制作方法的流程图。6 is a flowchart of a method for manufacturing an electronic device provided by a third embodiment of the present invention.
图7是本发明第四实施例提供的电子器件的制作方法的流程图。7 is a flowchart of a method for manufacturing an electronic device provided by a fourth embodiment of the present invention.
下面将结合本发明实施例中的附图,对本发明实施例中的技术方案进行清楚、完整地描述,显然,所描述的实施例仅仅是本发明一部分实施例,而不是全部的实施例。基于本发明中的实施例,本领域普通技术人员在没有做出创造性劳动前提下所获得的所有其他实施例,都属于本发明保护的范围。The technical solutions in the embodiments of the present invention will be described clearly and completely in conjunction with the drawings in the embodiments of the present invention. Obviously, the described embodiments are only a part of the embodiments of the present invention, but not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by a person of ordinary skill in the art without creative work fall within the protection scope of the present invention.
请一并参阅图1和图2,图1所示为本发明第一实施例提供了一种电子器件的制作方法的流程图,图2所示为本发明第一实施例提供了一种电子器件50的制作工艺流程示意图。电子器件50包括形变层20及设置于所述形变层上的功能层40,当所述形变层20在预延展后,将所述功能层40层叠至所述形变层20上。电子器件的制作方法包括如下步骤。Please refer to FIG. 1 and FIG. 2 together. FIG. 1 shows a flowchart of a method for manufacturing an electronic device according to a first embodiment of the present invention, and FIG. 2 shows a method for manufacturing an electronic device according to a first embodiment of the present invention. Schematic diagram of the manufacturing process of the
步骤101,提供刚性基板。Step 101: Provide a rigid substrate.
刚性基板10可以为,但不局限于玻璃基板、金属基板、或陶瓷基板。优选的,刚性基板10为玻璃基板。具体的,玻璃基板例如是,但不局限于钠钙玻璃、无碱玻璃、磷酸系玻璃或石英。刚性基板10用于制程过程中,支撑电子器件50。刚性基板10由透明材料制成,以便激光能够透过刚性基板10而照射电子器件50,从而实现电子器件50从刚性基板10上剥离。The
步骤103,在所述刚性基板上设置预延展的形变层。Step 103: Set a pre-extended deformation layer on the rigid substrate.
可以理解的,形变层20中包含有弹性体。弹性体优选在外力作用下其内部的高分子链或晶格结构可被拉伸的材料。弹性体例如是,但不局限于天然橡胶、合成橡胶、热塑性弹性体中的一者或它们之间的组合。天然橡胶例如是聚异戊二烯。合成橡胶包括,但不局限于聚异戊二烯、丁苯橡胶、顺丁橡胶、氯丁橡胶、丁腈橡胶、丁基橡胶或硅胶。热塑性弹性体包括,但不局限于苯乙烯嵌段共聚物、热塑性烯烃、热塑性硫化橡胶、热塑性聚氨酯、热塑性共聚酯或热塑性聚酰胺。Understandably, the
如图2和图3所示,在一具体实施例中,刚性基板10上设置预延展的形变层20,具体包括:将形变层20通过键合层30固定于刚性基板10上。As shown in FIGS. 2 and 3, in a specific embodiment, the
刚性基板10具有平坦的上表面。预延展的形变层20具有平坦的上表面和下表面。预延展的形变层20的下表面通过键合层30贴合于刚性基板10的上表面。由于形变层20通过键合层30固定于刚性基板10上,从而使形变层20的形态固定,无需额外使用传统的固定器,有效的利用了现有的显示面板制作技术,进而降低了后续在形变层20上制作功能层的复杂度。键合层30为压敏胶(pressure sensitive adhesive,PSA)层、减粘胶层或牺牲层。The
可以理解的,当键合层30为压敏胶层时,调节所述压敏胶层形成在刚性基板10上的接触压力,以降低所述压敏胶与刚性基板10之间的粘度,以实现形变层20与刚性基板10分离,且确保将形变层20可快速从刚性基板10上剥离。所述压敏胶中包含有天然橡胶、合成橡胶、丙烯酸类化合物、有机硅类化 合物、聚氨酯类化合物中的一者或它们之间的组合。It can be understood that when the
当键合层30为减粘胶层时,所述减粘胶层在预设的处理条件下粘度降低而实现形变层20与刚性基板10分离。例如,当键合层30在受热、紫外光照射或微波照射等环境下时,减粘胶层的粘附力降低,从而能够快速将形变层20从刚性基板10上剥离。减粘胶层中包含有紫外光减粘胶、加热减粘胶或微波减粘胶中的一者或它们之间的组合。When the
当键合层30为牺牲层时,牺牲层可以通过液体或气体溶解,以将形变层20从刚性基板10上剥离。牺牲层中包含有水溶性材料、金属材料或可溶性胶类材料中的一者或它们之间的组合。水溶性材料例如是,但不局限于糖类或无机盐。金属材料选自可溶解于酸、碱、或盐溶液的金属。可溶性胶类材料例如是光学胶(optically clear adhesive,OCA)。When the
将形变层20通过键合层30固定于刚性基板10上之前,制作方法还包括:将形变层20沿预设方向进行变形,以获得预延展的形变层20。Before the
在一具体实施例中,将形变层20沿预设方向进行变形,以获得预延展的形变层20,具体包括:沿预设方向机械拉伸形变层20,以获得预延展的形变层20。In a specific embodiment, deforming the
具体的,预设方向为经过形变层20的几何中心的直线朝相反方向拉伸形变层20的方向。预设方向平行于形变层20所在平面。即,形变层20自其几何中心对称地沿不同方向拉伸,以使形变层20中的弹性体受力均衡。形变层20大致呈矩形。形变层20包括经过形变层20的几何中心的第一直线L1、经过形变层20的几何中心并与第一直线L1相垂直的第二直线L2、及通过形变层20的几何中心并经过形变层20的两对角的两第三直线L3。在本实施例中,形变层20在第一直线L1、第二直线L2及两第三直线L3的两相反侧进行拉伸。可以理解的,第一直线L1为形变层20在水平方向的对称轴,第二直线L2为形变层20在竖直方向的对称轴,第三直线L3为形变层20的对角线。在其他实施例中,形变层20还可以在第一直线L1、第二直线L2、第三直线L3和/ 或其他过形变层20的几何中心的直线的两相反侧进行拉伸。Specifically, the preset direction is a direction in which the straight line passing through the geometric center of the
形变层20可通过拉伸设备对形变层20进行拉伸。形变层20沿预设方向机械拉伸后,预延展的形变层20中的弹性体产生拉伸应力。在本实施例中,形变层20与刚性基板10层叠设置,且弹性体的拉伸应力的方向与弹性体相对键合层30的粘附力的方向相反。可选的,变形后的形变层20的面积和形状与刚性基板10的面积和形状大致相一致,以实现形变层20贴附于刚性基板10上。形变层20的变形是可逆的,也即形变层20的形变可在预设条件下恢复。The
步骤105,在所述形变层上形成功能层,以获得电子器件。
电子器件50包括形变层20及功能层40。功能层40由弹性材料或柔性材料制成,以避免后续预延展的形变层20在弛豫时断裂。具体的,所述功能层40包括,但不局限于微芯片、通信总线。所述微芯片为具有特定功能的电子器件。所述微芯片例如是,但不局限于具有处理功能、存储功能、计算功能、显示功能、感测功能或通信功能等的电子器件。所述通信总线用于实现这些电子器件之间的通信连接。所述电子器件50例如为显示面板。所述显示面板例如是,但不局限于液晶显示(Liquid Crystal Display,LCD)面板、量子点显示(Quantum Dot Light Emitting Diodes,QLED)面板、电子纸(E-paper Display,EPD)、触摸屏(Touch panel)、柔性太阳能电池(Page View,PV)板、射频标签(Radio Frequency Identification,RFID)等具有特定功能的产品或部件。The
步骤107,将所述电子器件与所述刚性基板分离。Step 107: Separate the electronic device from the rigid substrate.
其中,将所述电子器件50与所述刚性基板10进行分离的方式包括机械剥离、所述键合层的减粘处理或蚀刻所述键合层。具体的,在一实施方式中,在刚性基板10的周边施加远离形变层20的外力,使得刚性基板10与电子器件50分离。在另一实施方式中,调节接触压力、加热或激光照射键合层30,促使键合层30的粘性降低,进而分离电子器件50和刚性基板10。在其他实施例中,施加蚀刻液,促使键合层30被溶解,进而分离电子器件50和刚性基板10。Wherein, the method of separating the
可以理解的,形变层20的弹性体内部的高分子链或晶格结构处于延展状态时能量较高,处于弛豫状态时能量较低,因此,在自然状态下,弹性体具有从延展状态转变为弛豫状态的趋势。当电子器件50与刚性基板10分离后,形变层20的弹性体的粘附力消失,因此形变层20在弹性体的拉伸力的作用下,驱动电子器件50自然收缩直至电子器件50处于弛豫。It is understandable that the polymer chain or lattice structure inside the elastic body of the
可选的,键合层30中还包含有激光吸收剂,激光吸收剂选自水杨酸酯类、二苯甲酮类、苯并三唑类、取代丙烯腈类、三嗪类中的一者或它们之间的组合。如此,当键合层30中的激光吸收剂能够吸收激光而降低键合层30的粘度,从而能够快速将形变层20从刚性基板10上剥离。Optionally, the
请参阅图4,为本发明第二实施例提供了一种电子器件的制作的流程示意图。电子器件的制作方法包括如下步骤:Please refer to FIG. 4, which is a schematic flowchart of manufacturing an electronic device according to a second embodiment of the present invention. The manufacturing method of the electronic device includes the following steps:
步骤401,提供刚性基板。
具体地,可以对应参考图1实施例中的方法步骤101,在此不再赘述。Specifically, reference may be made to
步骤402,在所述刚性基板上沉积包含有弹性体的形变层。
在一具体实施例中,在所述刚性基板10上沉积包含有弹性体的形变层20,具体包括:配置包含有所述弹性体的沉积液;在所述刚性基板10的整个沉积表面上施加所述沉积液,并预设条件下固化。在本实施例中,所述沉积液可以通过喷墨沉积或其他沉积方式进行沉积。In a specific embodiment, the
步骤403,预处理所述形变层,以在所述刚性基板上形成预延展的形变层。
其中,预延展的形变层20中的弹性体产生拉伸应力F,且弹性体的拉伸应力F的方向与弹性体的粘附力的方向相反,以及弹性体的拉伸应力F的大小与弹性体的粘附力的大小相平衡,从而实现形变层20贴附于刚性基板10上,如此,形变层20的形态固定,从而方便后续在形变层20上设置功能层40。Among them, the elastic body in the
在一具体实施例中,所述预处理所述形变层,以在所述刚性基板上形成预延展的形变层,具体包括:In a specific embodiment, the pretreating the deformation layer to form a pre-extended deformation layer on the rigid substrate specifically includes:
烘烤固化所述形变层20,以在所述刚性基板10上形成预延展的形变层20。The
所述烘烤固化所述形变层20,以在所述刚性基板10上形成预延展的形变层20,具体包括:The baking and curing the
升高烘烤温度和/或延长烘烤时间直至所述弹性体的拉伸应力大致等于所述弹性体相对所述刚性基板10的粘附力。如此,所述形变层20固定于所述刚性基板10上,也即所述形变层20不能弛豫。Raise the baking temperature and/or extend the baking time until the tensile stress of the elastomer is approximately equal to the adhesion of the elastomer to the
在另一具体实施例中,所述预处理所述形变层20,以在所述刚性基板10上形成预延展的形变层20,具体包括:In another specific embodiment, the pretreatment of the
光照固化所述形变层,以在所述刚性基板10上形成预延展的形变层20。Light cures the deformation layer to form a
所述光照固化所述形变层20,以在所述刚性基板10上形成预延展的形变层20,具体包括:The light curing the
升高光照能量密度和/或延长光照时间直至所述弹性体的拉伸应力大致等于所述弹性体相对所述刚性基板10的粘附力。Increase the light energy density and/or extend the light time until the tensile stress of the elastic body is approximately equal to the adhesion force of the elastic body to the
步骤405,在预延展的所述形变层上形成功能层,以获得电子器件。
具体地,可以对应参考图1实施例中的方法步骤105,在此不再赘述。Specifically, reference may be made to
步骤407,将所述电子器件与所述刚性基板分离。
具体地,可以对应参考图1实施例中的方法步骤107,在此不再赘述。Specifically, reference may be made to
请参阅图6,为本发明第三实施例提供了一种电子器件的制作的流程示意图。电子器件的制作方法包括如下步骤:Please refer to FIG. 6, which is a schematic flowchart of manufacturing an electronic device according to a third embodiment of the present invention. The manufacturing method of the electronic device includes the following steps:
步骤601,提供刚性基板。
具体地,可以对应参考图1实施例中的方法步骤101,在此不再赘述。Specifically, reference may be made to
步骤602,配置包含所述弹性体的液态胶。Step 602: Configure a liquid glue containing the elastomer.
步骤603,在所述刚性基板上沿预设方向涂布所述液态胶,并固化,以在所述刚性基板上形成预延展的形变层。Step 603: Apply the liquid glue on the rigid substrate in a preset direction and cure to form a pre-extended deformation layer on the rigid substrate.
其中,预延展的形变层20中的弹性体产生拉伸应力。可以理解的,当液态胶沿预设方向涂布于刚性基板10上时,驱动弹性体内部高分子链定向拉伸,以增强形变层20在特定方向的拉伸应力。Among them, the elastic body in the
步骤605,在预延展的所述形变层上形成功能层,以获得电子器件。Step 605: Form a functional layer on the pre-extended deformation layer to obtain an electronic device.
具体地,可以对应参考图1实施例中的方法步骤105,在此不再赘述。Specifically, reference may be made to
步骤607,将所述电子器件与所述刚性基板分离。Step 607: Separate the electronic device from the rigid substrate.
具体地,可以对应参考图1实施例中的方法步骤107,在此不再赘述。Specifically, reference may be made to
请参阅图7,为本发明第四实施例提供了一种电子器件的制作的流程示意图。电子器件的制作方法包括如下步骤:Please refer to FIG. 7, which is a schematic flowchart of manufacturing an electronic device according to a fourth embodiment of the present invention. The manufacturing method of the electronic device includes the following steps:
步骤701,提供刚性基板。
具体地,可以对应参考图1实施例中的方法步骤101,在此不再赘述。Specifically, reference may be made to
步骤702,预先制备包含有弹性体的固态的所述形变层。Step 702: Prepare the solid deformation layer containing an elastomer in advance.
步骤703,将所述形变层与所述刚性基板进行层叠、加压/加热来进行贴合,以在所述刚性基板上形成预延展的形变层。In
其中,预延展的形变层20中的弹性体产生拉伸应力。可以理解的,形变层20中的弹性体在受热或受压的条件下,弹性体内部的高分子链或晶格结构被拉伸,使高分子链或晶格结构的能量升高,形变层20处于延展状态。Among them, the elastic body in the
步骤705,在预延展的所述形变层上形成功能层,以获得电子器件。
具体地,可以对应参考图1实施例中的方法步骤105,在此不再赘述。Specifically, reference may be made to
步骤707,将所述电子器件与所述刚性基板分离。Step 707: Separate the electronic device from the rigid substrate.
具体地,可以对应参考图1实施例中的方法步骤107,在此不再赘述。Specifically, reference may be made to
本发明的电子器件的制作方法,通过将形变层固定于刚性基板上,也即形变层可贴合于刚性基板上,以使得形变层的形态固定,从而降低了在所述形变层上制作功能层的复杂度,且无需额外的固定器固定。由于本发明的电子器件可与现有的半导体、显示面板等制造技术兼容,且制作方法制备工艺简单,提高了生产效率,适合大规模生产。The manufacturing method of the electronic device of the present invention fixes the deformation layer on the rigid substrate, that is, the deformation layer can be attached to the rigid substrate to fix the shape of the deformation layer, thereby reducing the manufacturing function on the deformation layer The complexity of the layer, and no additional fixtures are needed. Because the electronic device of the present invention is compatible with existing semiconductor, display panel and other manufacturing technologies, and the manufacturing method is simple in preparation process, the production efficiency is improved, and it is suitable for large-scale production.
以上所述的实施例,并不构成对该技术方案保护范围的限制。任何在上述实施例的精神和原则之内所作的修改、等同替换和改进等,均应包含在该技术方案的保护范围之内。The above-mentioned embodiments do not constitute a limitation on the protection scope of the technical solution. Any modifications, equivalent replacements, and improvements made within the spirit and principles of the foregoing embodiments should be included in the protection scope of the technical solution.
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| CN107993576B (en) * | 2017-11-27 | 2020-03-17 | 深圳市华星光电技术有限公司 | Manufacturing method of flexible display panel and manufacturing method of flexible display device |
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| US20150224324A1 (en) * | 2014-02-12 | 2015-08-13 | Korea Advanced Institute Of Science And Technology | Method for separating nanogenerator and method for manufacturing nanogenerator using the same |
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