Teva Meroño et al., 2007 - Google Patents
Millora de la resposta electro-mecànica per a ressonadors d'alta freqüència basats en MEMSTeva Meroño et al., 2007
- Document ID
- 7677747698334342316
- Author
- Teva Meroño J
- et al.
- Publication year
External Links
- 238000000034 method 0 abstract description 69
Classifications
-
- H—ELECTRICITY
- H03—BASIC ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/02—Details
- H03H9/02244—Details of micro-electro-mechanical resonators
- H03H2009/02488—Vibration modes
- H03H2009/02496—Horizontal, i.e. parallel to the substrate plane
-
- H—ELECTRICITY
- H03—BASIC ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/02—Details
- H03H9/02244—Details of micro-electro-mechanical resonators
- H03H9/02338—Suspension means
-
- H—ELECTRICITY
- H03—BASIC ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/24—Constructional features of resonators of material which is not piezo-electric, electrostrictive, or magnetostrictive
- H03H9/2405—Constructional features of resonators of material which is not piezo-electric, electrostrictive, or magnetostrictive of micro-electro-mechanical resonators
- H03H9/2447—Beam resonators
- H03H9/2457—Clamped-free beam resonators
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