Wang et al., 2024 - Google Patents
Capillary effect-based selective sealing strategy for increasing piezoelectric MEMS speaker performanceWang et al., 2024
View HTML- Document ID
- 2946627150480336436
- Author
- Wang Y
- Lv T
- Zhang J
- Yu H
- Publication year
- Publication venue
- Microsystems & Nanoengineering
External Links
Snippet
To address the serious acoustic performance deterioration induced by air leakage in the low- frequency range and the asynchronous vibration in electroacoustic transduction structures near the resonant frequency, a novel sealing strategy is proposed that targets one of the …
- 238000007789 sealing 0 title abstract description 58
Classifications
-
- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
- H04R7/00—Diaphragms for electromechanical transducers; Cones
- H04R7/02—Diaphragms for electromechanical transducers; Cones characterised by the construction
- H04R7/04—Plane diaphragms
- H04R7/06—Plane diaphragms comprising a plurality of sections or layers
- H04R7/10—Plane diaphragms comprising a plurality of sections or layers comprising superposed layers in contact
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