CN106352814A - Array zero setting high-dynamic-accuracy long-working-distance auto-collimation device and method - Google Patents

Abstract

The invention belongs to the field of precision measurement technology and optical engineering, and specifically relates to an array zeroing high dynamic precision large working distance self-collimation device and method; the device is composed of a light source, a collimating mirror, a reflecting mirror, and a feedback imaging system; the method By adjusting the reflector, the reflected light beam returns to the center of the image plane of the feedback imaging system, and then the angular deflection measurement device on the reflector is used to obtain the angle change of the surface of the measured object; since the present invention adds to the traditional self-collimation angle measurement system Therefore, it can avoid the problem that the reflected light of the measured object deviates from the measurement system and cause the problem that it cannot be measured, and then has the advantage of increasing the working range of self-collimation under the same working distance, or increasing the working distance under the same working range of self-collimation ; In addition, the specific design of collimating mirror, feedback imaging system, mirror, etc., makes the present invention also have simple structure, low manufacturing cost; meanwhile, it can monitor the whole assembly process of the measured object; and the technical advantages of rapid measurement.

Description

Array zeroing high dynamic precision large working distance autocollimation device and method

technical field

The invention belongs to the field of precision measurement technology and the field of optical engineering, in particular to an array zeroing high dynamic precision large working distance self-collimation device and method.

Background technique

In the fields of precision measurement technology, optical engineering, cutting-edge scientific experiments and high-end precision equipment manufacturing, there is an urgent need for large working range and high-precision laser self-collimation technology at a large working distance. It supports the development of technology and equipment in the above fields.

In the field of precision measurement technology and instruments, the combination of laser autocollimator and circular grating can measure any line angle; the combination of laser autocollimation technology and polyhedral prism can measure surface angle and circular indexing; the maximum working distance From a few meters to hundreds of meters; resolution from 0.1 arcsecond to 0.001 arcsecond.

In the field of optical engineering and cutting-edge scientific experiments, the combination of laser autocollimator and two-dimensional circular gratings that are perpendicular to each other can measure the spatial angle; the position reference composed of two laser autocollimators can be used for two Measurement of the angle or parallelism between two optical axes. The angular working range is tens of arc seconds to tens of arc minutes.

In the field of cutting-edge scientific experimental devices and high-end precision equipment manufacturing, laser autocollimators can be used to measure the angular rotation accuracy of cutting-edge scientific experimental devices and high-end precision equipment rotary motion benchmarks, measure the space linear accuracy of linear motion benchmarks and pairwise motion benchmarks parallelism and perpendicularity.

Laser self-collimation technology has the advantages of non-contact, high measurement accuracy, and convenient use, and has been widely used in the above fields.

A traditional autocollimator is shown in Figure 1. The system includes a light source 1, a transmissive collimator 21, and a feedback imaging system 6; the light beam emitted by the light source 1 is collimated into a parallel beam by the transmissive collimator 21. Incident to the reflective surface of the measured object 5 ; the light beam reflected from the reflected surface of the measured object 5 is collected and imaged by the feedback imaging system 6 . Under this structure, only the light beam reflected from the surface of the measured object 5 returns to the original path, and can be collected and imaged by the feedback imaging system 6, thereby realizing effective measurement. The conditional limitation of returning to the original path makes the system have the following two disadvantages:

First, the range of the angle between the normal of the mirror surface of the measured object 5 and the optical axis of the laser autocollimator should not be too large, otherwise the reflected beam will deviate from the entrance pupil of the laser autocollimator optical system, which will lead to failure to achieve self-collimation Straight and micro angle measurement;

Second, the distance from the mirror surface of the measured object 5 to measure the entrance pupil of the laser autocollimator should not be too far away, otherwise as long as the reflected optical axis deviates from the optical axis of the autocollimator by a small angle, the reflected beam will deviate from the optical system of the laser autocollimator The entrance pupil, which leads to the inability to achieve self-collimation and micro-angle measurement.

The above two problems limit the use of traditional autocollimation instruments to small angles and small working distances.

Contents of the invention

Aiming at the two problems existing in the traditional autocollimator, the present invention discloses an autocollimation device and method for array zeroing with high dynamic precision and large working distance. Compared with the traditional autocollimator, it has the advantages of The technical advantage of significantly increasing the autocollimation working range, or significantly increasing the working distance under the same autocollimation working range.

The purpose of the present invention is achieved like this:

Array zeroing, high dynamic precision and large working distance self-collimation device, including light source, transmissive collimation mirror, reflector, and feedback imaging system, the reflector is equipped with an angle adjustment measurement device; the light beam emitted by the light source, through the transmission After being collimated into a parallel beam by the type collimating mirror, it is reflected by the mirror and incident on the surface of the measured object; the beam reflected from the surface of the measured object is reflected by the mirror and then collected and imaged by the feedback imaging system;

The feedback imaging system is in the following two forms:

First, it is arranged between the light source and the transmissive collimator, including a first feedback beam splitter, a four-quadrant detector and a plurality of single-pixel photoelectric converters arranged on the focal plane of the transmissive collimator, the single-pixel The photoelectric converters are distributed in an array, and the four-quadrant detector is located in the center of the array and on the optical axis of the feedback imaging system; the light beam reflected from the surface of the measured object is reflected by the mirror, transmitted through the transmission collimator, Reflected by the first feedback spectroscope, collected and imaged by a four-quadrant detector or a single-pixel photoelectric converter;

Second, it is arranged between the transmissive collimator and the reflector, including the first feedback beam splitter, the first feedback objective lens, a four-quadrant detector and multiple single-pixel photoelectric converters arranged on the focal plane of the transmissive collimator , the single-pixel photoelectric converters are distributed in an array, and the four-quadrant detector is located at the center of the array and on the optical axis of the feedback imaging system; Feedback spectroscopic reflection, first feedback objective lens transmission, imaging by four-quadrant detector or single-pixel photoelectric converter;

The angle adjustment measurement device includes an angle adjustment device arranged on the mirror, an angle deflection measurement device, and a universal shaft, the angle adjustment device includes a first driver and a second driver; the angle deflection measurement device includes a first metal sheet, a second Two metal sheets, a first reflector, a second reflector, a first capacitive sensor corresponding to the position of the first metal sheet, a second capacitive sensor corresponding to the position of the second metal sheet, and a first laser interference sensor corresponding to the position of the first reflector instrument, and the second laser interferometer corresponding to the position of the second mirror; the first driver, the first metal sheet, the first mirror, and the cardan shaft are on a straight line, the second driver, the second metal sheet, the second The reflecting mirror and the cardan shaft are on a straight line, and the connection line between the first driver and the cardan shaft is perpendicular to the connection line between the second driver and the cardan shaft.

The portable array zeroing high dynamic precision large working distance self-collimation method realized on the above-mentioned portable array zeroing high dynamic precision large working distance self-collimation device comprises the following steps:

Step a, turn on the light source, feed back the imaging system to form an image, if:

First, the obtained point image is located in the area where the single-pixel photoelectric converter is located. According to the coordinates of the single-pixel photoelectric converter, the obtained point image deviates from the center of the image plane, and the first driver and the second driver are used to adjust the angle of the mirror to make the point image return to Go to the area where the four-quadrant detector is located, and go to step b;

Second, the obtained point image is located in the area where the four-quadrant detector is located, and directly enters step b;

Step b, four-quadrant detector imaging, after the end of step a, the point image deviates from the center position Δx and Δy of the image surface of the four-quadrant detector, and the first driver and the second driver are used to adjust the angle of the mirror, so that the point image returns to the four-quadrant detection The center position of the image surface of the device;

Step c, read the capacitance change ΔC1 of the first capacitive sensor, and the capacitance change ΔC2 of the second capacitive sensor, and then convert them into the angle changes Δθ1 and At the same time read the displacement change Δx1 obtained by the first laser interferometer, and the displacement change Δx2 obtained by the second laser interferometer, and then convert it into the angle change Δθ2 and Then get the angular changes Δα and Δβ on the surface of the measured object; where, Δθ1=f1(ΔC1, ΔC2), Δθ2=f3(Δx1,Δx2), and f1, f2, f3, and f4 represent four functions.

The above-mentioned self-collimation device with high dynamic precision and large working distance for array zeroing also includes a wavefront detection system and a wavefront compensation system;

The wavefront detection system includes a wavefront detection beamsplitter, and at least one of an air disturbance wavefront detector and a mirror deformation wavefront detector; the wavefront detection beamsplitter is arranged between the mirror and the measured object , the air disturbance wavefront detector is set on the reflection light path of the wavefront detection spectroscope, and the mirror deformation wavefront detector is set on the secondary reflection light path of the reflection mirror;

The wavefront compensation system includes a compensating light source, a compensating collimating mirror, and a transmissive liquid crystal spatial light modulator; the beam emitted by the compensating light source is collimated into a parallel beam by the compensating collimating mirror, and then modulated by the transmissive liquid crystal spatial light modulated and incident on the wavefront detection beamsplitter.

The portable array zeroing high dynamic precision large working distance self-collimation method implemented on the above-mentioned portable array zeroing high dynamic precision large working distance self-collimation method requires that the wavefront detection system only includes the wavefront detection spectroscope and the air disturbance wave front detector;

Include the following steps:

Step a, selecting a reference object whose surface is perpendicular to the direction of the optical axis;

Step b. Turn on the light source, place the reference objects selected in step a at the working position A and the near working position B respectively, and obtain two sets of data of GA and GB respectively by the air disturbance wavefront detector;

Step c, G1=GA-GB, obtain the wavefront change caused by air disturbance;

Step d, adjusting the parameters of the transmissive liquid crystal spatial light modulator according to f5 (G1), lighting up the compensation light source, and compensating for air disturbance;

Step e, turn on the light source, feed back the imaging system to form an image, if:

First, the obtained point image is located in the area where the single-pixel photoelectric converter is located. According to the coordinates of the single-pixel photoelectric converter, the obtained point image deviates from the center of the image plane, and the first driver and the second driver are used to adjust the angle of the mirror to make the point image return to Go to the area where the four-quadrant detector is located, and enter step f;

Second, the point image obtained is located in the area where the four-quadrant detector is located, and directly enters step f;

Step f, four-quadrant detector imaging, after step a is completed, the point image deviates from the center position Δx and Δy of the image surface of the four-quadrant detector, and the first driver and the second driver are used to adjust the angle of the mirror, so that the point image returns to the four-quadrant detection The center position of the image surface of the device;

Step g, read the capacitance change ΔC1 of the first capacitive sensor, and the capacitance change ΔC2 of the second capacitive sensor, and then convert them into the angle changes Δθ1 and At the same time read the displacement change Δx1 obtained by the first laser interferometer, and the displacement change Δx2 obtained by the second laser interferometer, and then convert it into the angle change Δθ2 and Then get the angular changes Δα and Δβ on the surface of the measured object; where, Δθ1=f1(ΔC1, ΔC2), Δθ2=f3(Δx1,Δx2), and f1, f2, f3, and f4 represent four functions.

The portable array zeroing high dynamic precision large working distance self-collimation method implemented on the above-mentioned portable array zeroing high dynamic precision large working distance self-collimation method requires the wavefront detection system to only include the wavefront detection beam splitter and mirror deformation wavefront detector;

Include the following steps:

Step a, selecting a reference object whose surface is perpendicular to the direction of the optical axis;

Step b. Turn on the light source, place the reference objects selected in step a at the working position A and the near working position B respectively, and obtain two sets of data of GC and GD respectively by the mirror deformable wavefront detector;

Step c, G2=GC-GD, obtain the wavefront change caused by air disturbance and mirror deformation;

Step d. Adjust the parameters of the transmissive liquid crystal spatial light modulator according to f5 (G2), turn on the compensation light source, and compensate for air disturbance and mirror deformation;

Step e, feedback imaging system imaging, if:

First, the obtained point image is located in the area where the single-pixel photoelectric converter is located. According to the coordinates of the single-pixel photoelectric converter, the obtained point image deviates from the center of the image plane, and the first driver and the second driver are used to adjust the angle of the mirror to make the point image return to Go to the area where the four-quadrant detector is located, and enter step f;

Second, the point image obtained is located in the area where the four-quadrant detector is located, and directly enters step f;

Step f, four-quadrant detector imaging, after step a is completed, the point image deviates from the center position Δx and Δy of the image surface of the four-quadrant detector, and the first driver and the second driver are used to adjust the angle of the mirror, so that the point image returns to the four-quadrant detection The center position of the image surface of the device;

Step g, read the capacitance change ΔC1 of the first capacitive sensor, and the capacitance change ΔC2 of the second capacitive sensor, and then convert them into the angle changes Δθ1 and At the same time read the displacement change Δx1 obtained by the first laser interferometer, and the displacement change Δx2 obtained by the second laser interferometer, and then convert it into the angle change Δθ2 and Then get the angular changes Δα and Δβ on the surface of the measured object; where, Δθ1=f1(ΔC1, ΔC2), Δθ2=f3(Δx1,Δx2), and f1, f2, f3, and f4 represent four functions.

The portable array zeroing high dynamic precision large working distance self-collimation method realized on the above-mentioned portable array zeroing high dynamic precision large working distance self-collimation method requires the wavefront detection system to include wavefront detection spectroscope, air disturbance wave Front detectors and mirror deformable wavefront detectors;

Include the following steps:

Step a, selecting a reference object whose surface is perpendicular to the direction of the optical axis;

Step b. Turn on the light source, and place the reference objects selected in step a at the working position A and the near working position B respectively. The air disturbance wavefront detector obtains two sets of data of GA and GB respectively. Get GC and GD two sets of data;

Step c, G1=GA-GB, get the wavefront change caused by air disturbance; G2=GC-GD, get the wavefront change caused by air disturbance and mirror deformation; G=G2-G1, get the wavefront change caused by mirror deformation wavefront variation;

step d.

Adjust the parameters of the transmissive liquid crystal spatial light modulator according to f5 (G1), light up the compensation light source, and compensate for air disturbance;

or

Adjust the parameters of the transmissive liquid crystal spatial light modulator according to f5 (G2), turn on the compensation light source, and compensate for air disturbance and mirror deformation;

or

Adjust the parameters of the transmissive liquid crystal spatial light modulator according to f5(G), turn on the compensation light source, and compensate the deformation of the mirror;

Step e, feedback imaging system imaging, if:

First, the obtained point image is located in the area where the single-pixel photoelectric converter is located. According to the coordinates of the single-pixel photoelectric converter, the obtained point image deviates from the center of the image plane, and the first driver and the second driver are used to adjust the angle of the mirror to make the point image return to Go to the area where the four-quadrant detector is located, and enter step f;

Second, the point image obtained is located in the area where the four-quadrant detector is located, and directly enters step f;

Step f, four-quadrant detector imaging, after step a is completed, the point image deviates from the center position Δx and Δy of the image surface of the four-quadrant detector, and the first driver and the second driver are used to adjust the angle of the mirror, so that the point image returns to the four-quadrant detection The center position of the image surface of the device;

Step g, read the capacitance change ΔC1 of the first capacitive sensor, and the capacitance change ΔC2 of the second capacitive sensor, and then convert them into the angle changes Δθ1 and At the same time read the displacement change Δx1 obtained by the first laser interferometer, and the displacement change Δx2 obtained by the second laser interferometer, and then convert it into the angle change Δθ2 and Then get the angular changes Δα and Δβ on the surface of the measured object; where, Δθ1=f1(ΔC1, ΔC2), Δθ2=f3(Δx1,Δx2), and f1, f2, f3, and f4 represent four functions.

Beneficial effect:

Compared with the traditional autocollimator, the present invention adds a reflector and an angle adjustment measuring device arranged on the reflector. This structural arrangement can have a larger deflection angle or In the case of a large lateral displacement, adjust the attitude of the mirror by adjusting the angle of the measuring device to ensure that the reflected light returns to the original path and is received by the feedback imaging system, thereby effectively avoiding the problem that the reflected light of the measured object deviates from the measurement system and cannot be measured. Furthermore, the present invention has the technical advantage of significantly increasing the working range of self-collimation under the same working distance, or significantly increasing the working distance under the same working distance of self-collimation.

In addition, the present invention also has the following technical advantages:

First, select the transmissive collimating mirror to make the device of the present invention simple in structure, low in manufacturing cost and easy to use;

Second, multiple single-pixel photoelectric converters and four-quadrant detectors are selected as the imaging device in the feedback imaging system, which combines the advantages of large area of multiple single-pixel photoelectric converters and high position resolution of four-quadrant detectors; , the combination of multiple single-pixel photoelectric converters can ensure that the reflected light can still enter the entrance pupil of the optical system when the deflection angle between the reflected light of the object and the incident light is large, and will not exceed the receiving range; on this basis On the other hand, the reflector is used to realize the rapid real-time return compensation of the reflected light, adjust the reflected light to the position of the four-quadrant detector, and obtain higher angle measurement accuracy based on the high position resolution advantage of the four-quadrant detector; therefore Combining a plurality of single-pixel photoelectric converters with four-quadrant detectors not only greatly extends the self-collimation working range or working distance of the present invention, but also helps to improve the accuracy of angle measurement;

The 3rd, select capacitive sensor and laser interferometer to be used as angular deflection measuring device together, make the present invention not only can utilize the ultra-high displacement sensitivity characteristic of capacitive sensor and the excellent characteristic that linear displacement is easy to convert into angular displacement in the small angle range, make the present invention It can have very high measurement accuracy under the condition of low sampling frequency (20Hz and below), and the highest measurement resolution of the angle can be increased from 0.005 arc seconds of the traditional autocollimator to 0.0005 arc seconds, which is an order of magnitude higher; and the laser interferometer can also Can make the present invention can finish angle measurement under high sampling frequency (up to 2000Hz), namely have very high measuring speed; If the first reflector and the second reflector adopt corner cube, also can utilize corner cube The optical characteristics of the incident light deflecting 180 degrees and returning greatly enhance the angle measurement range of the present invention, that is, the present invention has the technical advantage of a large angle range while having a high measurement speed; the combination of the two can also play a role It has the function of monitoring the whole process of the measured object with high precision assembly requirements;

Fourth, the present invention also adopts the following technology: the first driver, the first metal sheet, the first reflector, and the cardan shaft are on a straight line, and the second driver, the second metal sheet, the second reflector, and the cardan The axis is on a straight line, and the connection line between the first driver and the cardan shaft is perpendicular to the connection line between the second driver and the cardan shaft; this two-dimensional arrangement of two lines perpendicular to each other makes data in different connection directions Non-interference with each other, no need for decoupling calculations, which can facilitate calibration, simplify the calculation process, and improve measurement speed.

Description of drawings

Fig. 1 is a schematic structural diagram of a traditional self-collimation angle measurement system.

Fig. 2 is a schematic diagram of the first structure of Embodiment 1 of the self-collimation device with high dynamic precision and large working distance for array zeroing of the present invention.

Fig. 3 is a structural schematic diagram of the angle adjustment measuring device.

Fig. 4 is a schematic diagram of the second structure of Embodiment 1 of the self-collimation device with high dynamic precision and large working distance for array zeroing of the present invention.

Fig. 5 is a schematic structural diagram of Embodiment 2 of an array zeroing high dynamic precision large working distance self-collimation device of the present invention.

Fig. 6 is a schematic structural diagram of Embodiment 3 of an autocollimation device with high dynamic precision and large working distance for array zeroing of the present invention.

Fig. 7 is a schematic structural diagram of Embodiment 4 of an autocollimation device with high dynamic precision and large working distance for array zeroing according to the present invention.

In the figure: 1 light source, 21 transmissive collimating mirror, 3 reflecting mirror, 4 angle adjustment measuring device, 411 first driver, 412 second driver, 421 first metal sheet, 422 second metal sheet, 423 first capacitive sensor , 424 second capacitive sensor, 425 first reflector, 426 second reflector, 427 first laser interferometer, 428 second laser interferometer, 43 cardan shaft, 5 measured object, 6 feedback imaging system, 61 first One feedback spectroscope, 63 first feedback objective lens, 66 four-quadrant detector, 67 single-pixel photoelectric converter, 7 wavefront detection system, 71 wavefront detection beamsplitter, 72 air disturbance wavefront detector, 73 mirror deformation wave Front detector, 8 wavefront compensation systems, 81 compensation light sources, 82 compensation collimation mirrors, 83 transmissive liquid crystal spatial light modulators.

specific embodiment

The specific embodiments of the present invention will be further described in detail below in conjunction with the accompanying drawings.

Specific embodiment one

This embodiment is an embodiment of an autocollimation device with high dynamic precision and large working distance for array zeroing.

The structure schematic diagram of the array zeroing high dynamic precision large working distance autocollimation device of this embodiment is shown in FIG. 2 . The self-collimation device includes a light source 1, a transmissive collimator mirror 21, a reflector 3, and a feedback imaging system 6. The reflector 3 is provided with an angle adjustment measuring device 4; After the straight mirror 21 is collimated into a parallel light beam, it is reflected by the reflector 3 and incident on the surface of the measured object 5; the light beam reflected from the surface of the measured object 5 is then reflected by the reflective mirror 3 and collected by the feedback imaging system 6 imaging;

The feedback imaging system 6 is arranged between the light source 1 and the transmissive collimator 21, including a first feedback beam splitter 61, a four-quadrant detector 66 and a plurality of single pixels arranged on the focal plane of the transmissive collimator 21 Photoelectric converter 67, the single-pixel photoelectric converter 67 is distributed in an array, and the four-quadrant detector 66 is located at the center of the array and on the optical axis of the feedback imaging system 6; the light beam reflected from the surface of the measured object 5 is then reflected After being reflected by the mirror 3, it is transmitted through the transmissive collimating mirror 21, reflected by the first feedback beam splitter 61, and collected and imaged by the four-quadrant detector 66 or the single-pixel photoelectric converter 67;

Described angle adjustment measurement device 4 comprises the angle adjustment device that is arranged on the reflection mirror 3, angle deflection measurement device, and cardan shaft 43, and angle adjustment device comprises first driver 411 and second driver 412; Angle deflection measurement device comprises the first A metal sheet 421, a second metal sheet 422, a first reflector 425, a second reflector 426, a first capacitance sensor 423 corresponding to the position of the first metal sheet 421, and a second capacitance sensor corresponding to the position of the second metal sheet 422 424, the first laser interferometer 427 corresponding to the position of the first reflector 425, and the second laser interferometer 428 corresponding to the position of the second reflector 426; the first driver 411, the first metal sheet 421, the first reflector 425, And the universal joint shaft 43 is on a straight line, the second driver 412, the second metal sheet 422, the second mirror 426, and the universal joint shaft 43 are on a straight line, and the connecting line between the first driver 411 and the universal joint shaft 43 The connection line between the second driver 412 and the cardan shaft 43 is vertical, as shown in FIG. 3 .

It should be noted that, in this embodiment, the feedback imaging system 6 can also choose the following structure: it is arranged between the transmissive collimator mirror 21 and the reflector 3, including a first feedback beam splitter 61, a first feedback objective lens 63 and The four-quadrant detector 66 and a plurality of single-pixel photoelectric converters 67 arranged on the focal plane of the transmissive collimator 21, the single-pixel photoelectric converters 67 are distributed in an array, and the four-quadrant detector 66 is located at both the center of the array and the On the optical axis of the feedback imaging system 6; the beam reflected from the surface of the measured object 5, after being reflected by the mirror 3, is reflected by the first feedback beam splitter 61, transmitted by the first feedback objective lens 63, and then transmitted by the four-quadrant detector 66 or The single-pixel photoelectric converter 67 collects images; as shown in FIG. 4 .

Specific embodiment two

This embodiment is an embodiment of an autocollimation device with high dynamic precision and large working distance for array zeroing.

The structure schematic diagram of the array zeroing high dynamic precision large working distance autocollimation device of this embodiment is shown in FIG. 5 . On the basis of the specific embodiment 1, the array zeroing high dynamic precision large working distance self-collimation device of this embodiment is also provided with a wavefront detection system 7 and a wavefront compensation system 8;

The wavefront detection system 7 includes a wavefront detection spectroscope 71 and an air disturbance wavefront detector 72; the wavefront detection spectroscope 71 is arranged between the reflector 3 and the measured object 5, and the air disturbance wavefront detector 72 is arranged on the reflected optical path of the wavefront detection spectroscope 71, and the mirror deformation wavefront detector 73 is arranged on the secondary reflected optical path of the reflector 3;

The wavefront compensation system 8 includes a compensating light source 81, a compensating collimating mirror 82, and a transmissive liquid crystal spatial light modulator 83; the beam emitted by the compensating light source 81 is collimated into a parallel beam by the compensating collimating mirror 82, and then The transmissive liquid crystal spatial light modulator 83 modulates and incident on the wavefront detection beam splitter 71 .

Specific embodiment three

This embodiment is an embodiment of an autocollimation device with high dynamic precision and large working distance for array zeroing.

The structure schematic diagram of the array zeroing high dynamic precision large working distance autocollimation device of this embodiment is shown in FIG. 6 . On the basis of the specific embodiment 1, the array zeroing high dynamic precision large working distance self-collimation device of this embodiment is also provided with a wavefront detection system 7 and a wavefront compensation system 8;

The wavefront detection system 7 includes a wavefront detection beamsplitter 71 and a mirror deformation wavefront detector 73; the wavefront detection beamsplitter 71 is arranged between the mirror 3 and the measured object 5, and the air disturbance wavefront detection The device 72 is arranged on the reflected optical path of the wavefront detection spectroscope 71, and the mirror deformation wavefront detector 73 is arranged on the secondary reflected optical path of the reflector 3;

The wavefront compensation system 8 includes a compensating light source 81, a compensating collimating mirror 82, and a transmissive liquid crystal spatial light modulator 83; the beam emitted by the compensating light source 81 is collimated into a parallel beam by the compensating collimating mirror 82, and then The transmissive liquid crystal spatial light modulator 83 modulates and incident on the wavefront detection beam splitter 71 .

Specific embodiment four

This embodiment is an embodiment of an autocollimation device with high dynamic precision and large working distance for array zeroing.

The structure schematic diagram of the array zeroing high dynamic precision large working distance autocollimation device of this embodiment is shown in FIG. 7 . On the basis of the specific embodiment 1, the array zeroing high dynamic precision large working distance self-collimation device of this embodiment is also provided with a wavefront detection system 7 and a wavefront compensation system 8;

The wavefront detection system 7 includes a wavefront detection beamsplitter 71, an air disturbance wavefront detector 72 and a mirror deformation wavefront detector 73; the wavefront detection beamsplitter 71 is arranged between the mirror 3 and the measured object 5 Between, the air disturbance wavefront detector 72 is arranged on the reflection light path of the wavefront detection spectroscope 71, and the mirror deformation wavefront detector 73 is arranged on the secondary reflection light path of the mirror 3;

The wavefront compensation system 8 includes a compensating light source 81, a compensating collimating mirror 82, and a transmissive liquid crystal spatial light modulator 83; the beam emitted by the compensating light source 81 is collimated into a parallel beam by the compensating collimating mirror 82, and then The transmissive liquid crystal spatial light modulator 83 modulates and incident on the wavefront detection beam splitter 71 .

For the above embodiment of the autocollimation device, there are three points to be explained:

First, the first driver 411 and the second driver 412 in the angle adjustment device can choose a stepper motor or a servo motor driver with a faster driving speed, or a piezoelectric ceramic driver with higher driving precision, or A stepper motor or a servo motor driver can be mixed with a piezoelectric ceramic driver; those skilled in the art can make a reasonable choice according to actual needs.

Second, the transmissive collimator 21 can be a binary optical lens. Compared with ordinary optical lenses, the binary optical lens is thinner, which is beneficial to the miniaturization of the system. At the same time, the binary optical lens has better collimation and has It is beneficial to improve the measurement accuracy of the system.

Third, in all the above self-collimation device embodiments, the angle deflection measurement device only includes the combination of two pairs of metal sheets and capacitance sensors, and the combination of two pairs of plane mirrors and laser interferometers. This design is the default reflection Mirror 3 does not produce translation during work; if it is considered that reflection mirror 3 produces translation during work and affects measurement accuracy, a third pair of metal sheets and a combination of capacitive sensors can be placed at the position of cardan shaft 43, And the combination of the third pair of flat mirrors and laser interferometers to offset the same translation produced by the three capacitive sensors and the three laser interferometers to ensure measurement accuracy.

Specific embodiment five

This embodiment is an embodiment of an array zeroing high dynamic precision large working distance autocollimation method implemented on the array zeroing high dynamic precision large working distance autocollimation device described in the first embodiment.

The self-collimation method for array zeroing with high dynamic precision and large working distance in this embodiment includes the following steps:

Step a, turn on the light source 1, feed back the imaging system 6 to form an image, if:

First, the point image obtained is located in the area where the single-pixel photoelectric converter 67 is located. According to the coordinates of the single-pixel photoelectric converter 67, the obtained point image deviates from the direction of the center of the image plane, and the first driver 411 and the second driver 412 are used to adjust the angle of the mirror 3 , so that the point image returns to the area where the four-quadrant detector 66 is located, and enters step b;

Second, the point image obtained is located in the area where the four-quadrant detector 66 is located, and directly enters step b;

Step b, four-quadrant detector 66 imaging, after step a is completed, the point image deviates from the center position Δx and Δy of the image plane of the four-quadrant detector 66, and the first driver 411 and the second driver 412 are used to adjust the angle of the mirror 3 to make the point image Get back to the central position of the four-quadrant detector 66 image planes;

Step c, read the capacitance change ΔC1 of the first capacitive sensor 423 and the capacitance change ΔC2 of the second capacitive sensor 424, and then convert them into the angle changes Δθ1 and At the same time, the displacement change Δx1 obtained by the first laser interferometer 427 and the displacement change Δx2 obtained by the second laser interferometer 428 are read, and then converted into the angle changes Δθ2 and Then obtain the angular changes Δα and Δβ on the surface of the measured object 5; wherein, Δθ1=f1(ΔC1, ΔC2), Δθ2=f3(Δx1,Δx2), and f1, f2, f3, and f4 represent four functions.

The main innovation point of the present invention is to increase the reflector 3 and the angle adjustment measuring device 4 arranged on the reflector 3. This structure can have a larger deflection angle or a relatively large angle between the incident light and the reflected light of the measured object 5. In the case of large lateral displacement, the attitude of the reflector is adjusted by the angle adjustment measurement device, so that the reflected light returns to the original path and is received by the feedback imaging system 6, effectively avoiding the problem that the reflected light of the measured object deviates from the measurement system and cannot be measured.

However, with the introduction of the reflector 3, the surface error will be transmitted to the final result, reducing the measurement accuracy of the system; at the same time, the increase of the working distance makes the air disturbance between the reflector 3 and the measured object 5 not negligible, and also It will reduce the measurement accuracy of the system. It can be seen that in order to achieve high-precision measurement, it is necessary to take into account the influence of the surface shape error of the mirror 3 and the air disturbance between the mirror 3 and the measured object 5 on the measurement results. For this reason, specific embodiments are designed. Example seven, and specific embodiment eight.

Specific embodiment six

This embodiment is an embodiment of an array zeroing high dynamic precision large working distance autocollimation method implemented on the array zeroing high dynamic precision large working distance autocollimation device described in the second embodiment.

The self-collimation method for array zeroing with high dynamic precision and large working distance in this embodiment includes the following steps:

Step a, selecting a reference object whose surface is perpendicular to the direction of the optical axis;

Step b. Turn on the light source 1, place the reference objects selected in step a at the working position A and the near working position B respectively, and the air disturbance wavefront detector 72 obtains two sets of data of GA and GB respectively;

Step c, G1=GA-GB, obtain the wavefront change caused by air disturbance;

Step d, adjusting the parameters of the transmissive liquid crystal spatial light modulator 83 according to f5 (G1), lighting the compensation light source 81, and compensating for air disturbance;

Step e, turn on the light source 1, feed back the imaging system 6 to form an image, if:

First, the point image obtained is located in the area where the single-pixel photoelectric converter 67 is located. According to the coordinates of the single-pixel photoelectric converter 67, the obtained point image deviates from the direction of the center of the image plane, and the first driver 411 and the second driver 412 are used to adjust the angle of the mirror 3 , so that the point image returns to the area where the four-quadrant detector 66 is located, and enters step f;

Second, the point image obtained is located in the area where the four-quadrant detector 66 is located, and directly enters step f;

Step f, four-quadrant detector 66 imaging, after step a is finished, the point image deviates from the central position Δx and Δy of the image plane of the four-quadrant detector 66, and the first driver 411 and the second driver 412 are used to adjust the angle of the mirror 3 to make the point image Get back to the central position of the four-quadrant detector 66 image planes;

Step g, read the capacitance change ΔC1 of the first capacitive sensor 423 and the capacitance change ΔC2 of the second capacitive sensor 424, and convert them into the angle changes Δθ1 and At the same time, the displacement change Δx1 obtained by the first laser interferometer 427 and the displacement change Δx2 obtained by the second laser interferometer 428 are read, and then converted into the angle changes Δθ2 and Then obtain the angular changes Δα and Δβ on the surface of the measured object 5; wherein, Δθ1=f1(ΔC1, ΔC2), Δθ2=f3(Δx1,Δx2), and f1, f2, f3, and f4 represent four functions.

The method of this embodiment is implemented on the device of the specific embodiment 2, the air disturbance can be separated by the air disturbance wavefront detector 72, and then the air disturbance can be compensated by the wavefront compensation system 8, finally realizing the effect of no air disturbance High precision measurement.

Specific embodiment seven

This embodiment is an embodiment of an array zeroing high dynamic precision large working distance autocollimation method implemented on the array zeroing high dynamic precision large working distance autocollimation device described in the third embodiment.

The self-collimation method for array zeroing with high dynamic precision and large working distance in this embodiment includes the following steps:

Step a, selecting a reference object whose surface is perpendicular to the direction of the optical axis;

Step b. Turn on the light source 1, place the reference objects selected in step a at the working position A and the near working position B respectively, and the mirror deformable wavefront detector 73 obtains two sets of data of GC and GD respectively;

Step c, G2=GC-GD, obtain the wavefront change caused by air disturbance and mirror deformation;

Step d, adjust the parameters of the transmissive liquid crystal spatial light modulator 83 according to f5 (G2), turn on the compensation light source 81, and compensate for air disturbance and mirror deformation;

Step e, feedback imaging system 6 imaging, if:

First, the point image obtained is located in the area where the single-pixel photoelectric converter 67 is located. According to the coordinates of the single-pixel photoelectric converter 67, the obtained point image deviates from the direction of the center of the image plane, and the first driver 411 and the second driver 412 are used to adjust the angle of the mirror 3 , so that the point image returns to the area where the four-quadrant detector 66 is located, and enters step f;

Second, the point image obtained is located in the area where the four-quadrant detector 66 is located, and directly enters step f;

Step f, four-quadrant detector 66 imaging, after obtaining step a, the point image deviates from the center position Δx and Δy of the image plane of the four-quadrant detector 66, and utilizes the first driver 411 and the second driver 412 to adjust the angle of the mirror 3 to make the point image Get back to the central position of the four-quadrant detector 66 image planes;

Step g, read the capacitance change ΔC1 of the first capacitive sensor 423 and the capacitance change ΔC2 of the second capacitive sensor 424, and convert them into the angle changes Δθ1 and At the same time, the displacement change Δx1 obtained by the first laser interferometer 427 and the displacement change Δx2 obtained by the second laser interferometer 428 are read, and then converted into the angle changes Δθ2 and Then obtain the angular changes Δα and Δβ on the surface of the measured object 5; wherein, Δθ1=f1(ΔC1, ΔC2), Δθ2=f3(Δx1,Δx2), and f1, f2, f3, and f4 represent four functions.

The method of this embodiment is implemented on the device of the specific embodiment 3, and the air disturbance and the mirror deformation can be separated as a whole by using the mirror deformation wavefront detector 73, and then the air disturbance and the mirror deformation can be completely separated by using the wavefront compensation system 8. Carry out overall compensation, and finally realize high-precision measurement without the influence of air disturbance and mirror deformation.

Embodiment 8

This embodiment is an embodiment of an array zeroing high dynamic precision large working distance autocollimation method implemented on the array zeroing high dynamic precision large working distance autocollimation device described in Embodiment 4.

The self-collimation method for array zeroing with high dynamic precision and large working distance in this embodiment includes the following steps:

Step a, selecting a reference object whose surface is perpendicular to the direction of the optical axis;

Step b: Turn on the light source 1, place the reference objects selected in step a at the working position A and the near working position B respectively, the air disturbance wavefront detector 72 obtains two sets of data of GA and GB respectively, and the mirror deformation wavefront detection Device 73 respectively obtains GC and GD two groups of data;

Step c, G1=GA-GB, get the wavefront change caused by air disturbance; G2=GC-GD, get the wavefront change caused by air disturbance and mirror deformation; G=G2-G1, get the wavefront change caused by mirror deformation wavefront variation;

step d.

Adjust the parameters of the transmissive liquid crystal spatial light modulator 83 according to f5 (G1), turn on the compensation light source 81, and compensate for the air disturbance;

or

Adjust the parameters of the transmissive liquid crystal spatial light modulator 83 according to f5 (G2), turn on the compensation light source 81, and compensate for air disturbance and mirror deformation;

or

Adjust the parameters of the transmissive liquid crystal spatial light modulator 83 according to f5(G), turn on the compensation light source 81, and compensate the deformation of the mirror;

Step e, feedback imaging system 6 imaging, if:

First, the point image obtained is located in the area where the single-pixel photoelectric converter 67 is located. According to the coordinates of the single-pixel photoelectric converter 67, the obtained point image deviates from the direction of the center of the image plane, and the first driver 411 and the second driver 412 are used to adjust the angle of the mirror 3 , so that the point image returns to the area where the four-quadrant detector 66 is located, and enters step f;

Second, the point image obtained is located in the area where the four-quadrant detector 66 is located, and directly enters step f;

Step f, four-quadrant detector 66 imaging, after obtaining step a, the point image deviates from the center position Δx and Δy of the image plane of the four-quadrant detector 66, and utilizes the first driver 411 and the second driver 412 to adjust the angle of the mirror 3 to make the point image Get back to the central position of the four-quadrant detector 66 image planes;

Step g, read the capacitance change ΔC1 of the first capacitive sensor 423 and the capacitance change ΔC2 of the second capacitive sensor 424, and convert them into the angle changes Δθ1 and At the same time, the displacement change Δx1 obtained by the first laser interferometer 427 and the displacement change Δx2 obtained by the second laser interferometer 428 are read, and then converted into the angle changes Δθ2 and Then obtain the angular changes Δα and Δβ on the surface of the measured object 5; wherein, Δθ1=f1(ΔC1, ΔC2), Δθ2=f3(Δx1,Δx2), and f1, f2, f3, and f4 represent four functions.

The method of this embodiment is implemented on the device of Embodiment 4, and the air disturbance and mirror deformation can be separated separately by using the air disturbance wavefront detector 72 and the mirror deformation wavefront detector 73, and then the air disturbance can be selectively analyzed. Individual compensation for disturbance, independent compensation for mirror deformation, or overall compensation for air disturbance and mirror deformation, and finally achieve high-precision measurement without air disturbance, or without mirror deformation, or without air disturbance and mirror deformation .

Another advantage of this embodiment is that after the air turbulence and mirror deformation are separated separately, the influence of each part on the result can be independently evaluated, not only can it be found out who is affecting the measurement in the air turbulence and mirror deformation The main contradiction of precision, and can independently evaluate the deformation of the mirror, and effectively evaluate the processing quality of the mirror at the same time.

Claims (6)

1. An autocollimation device with high dynamic precision and large working distance for array zeroing, which is characterized in that it includes a light source (1), a transmissive collimator (21), a reflector (3), and a feedback imaging system (6). The reflector (3) is provided with an angle adjustment measuring device (4); the light beam emitted by the light source (1) is collimated into a parallel beam by the transmission collimator (21), and then reflected by the reflector (3), Incident to the surface of the measured object (5); the light beam reflected from the surface of the measured object (5) is then reflected by the mirror (3), and then imaged by the feedback imaging system (6); The feedback imaging system (6) is in the following two forms: First, it is arranged between the light source (1) and the transmissive collimator (21), including a first feedback beam splitter (61) and a four-quadrant detector ( 66) and a plurality of single-pixel photoelectric converters (67), the single-pixel photoelectric converters (67) are distributed in an array, and the four-quadrant detector (66) is located at the center of the array and at the optical axis of the feedback imaging system (6) Above; the light beam reflected from the surface of the measured object (5) is reflected by the mirror (3), transmitted through the transmission collimator (21), reflected by the first feedback beam splitter (61), and detected by the four-quadrant Device (66) or single-pixel photoelectric converter (67) collects imaging; Second, it is arranged between the transmissive collimator (21) and the reflection mirror (3), including the first feedback beam splitter (61), the first feedback objective lens (63) and the transmissive collimator (21) A four-quadrant detector (66) and a plurality of single-pixel photoelectric converters (67) on the focal plane, the single-pixel photoelectric converters (67) are distributed in an array, and the four-quadrant detector (66) is located at both the center of the array and the On the optical axis of the feedback imaging system (6); the light beam reflected from the surface of the measured object (5) is reflected by the mirror (3), then reflected by the first feedback beam splitter (61), and then reflected by the first feedback objective lens (63) ) transmission, collected and imaged by a four-quadrant detector (66) or a single-pixel photoelectric converter (67); The angle adjustment measurement device (4) includes an angle adjustment device, an angle deflection measurement device, and a cardan shaft (43) arranged on the reflector (3), and the angle adjustment device includes a first driver (411) and a second driver (412); Angle deflection measuring device comprises first metal sheet (421), second metal sheet (422), first reflection mirror (425), second reflection mirror (426), corresponding first metal sheet (421) position The first capacitive sensor (423), and the second capacitive sensor (424) corresponding to the position of the second metal sheet (422), the first laser interferometer (427) corresponding to the position of the first mirror (425), and the corresponding The second laser interferometer (428) at the position of the two reflection mirrors (426); the first driver (411), the first metal sheet (421), the first reflection mirror (425), and the cardan shaft (43) are in a straight line , the second driver (412), the second metal sheet (422), the second mirror (426), and the cardan shaft (43) are in a straight line, and the first driver (411) and the cardan shaft (43 ) is perpendicular to the connection between the second driver (412) and the cardan shaft (43). 2. The array zeroing high dynamic precision large working distance autocollimation device according to claim 1, characterized in that it also includes a wavefront detection system (7) and a wavefront compensation system (8); The wavefront detection system (7) includes a wavefront detection spectroscope (71), and at least one of an air disturbance wavefront detector (72) and a mirror deformation wavefront detector (73); the wavefront detection The beam splitter (71) is set between the reflector (3) and the measured object (5), the air disturbance wavefront detector (72) is set on the reflected light path of the wavefront detection beamsplitter (71), and the reflector deforms the wave The front detector (73) is arranged on the secondary reflection optical path of the mirror (3); The wavefront compensation system (8) includes a compensation light source (81), a compensation collimator mirror (82), and a transmissive liquid crystal spatial light modulator (83); the light beam emitted by the compensation light source (81) passes through the compensation collimator mirror (82) After being collimated into a parallel light beam, it is modulated by a transmissive liquid crystal spatial light modulator (83) and incident on the wavefront detection beam splitter (71). 3. The portable array zeroing high dynamic precision large working distance self-collimation method realized on the portable array zeroing high dynamic precision large working distance self-collimation device of claim 1, is characterized in that, comprises the following steps: Step a, turn on the light source (1), feed back the imaging system (6) to image, if: First, the point image obtained is located in the area where the single-pixel photoelectric converter (67) is located, and according to the coordinates of the single-pixel photoelectric converter (67), the obtained point image deviates from the direction of the center of the image plane, using the first driver (411) and the second driver (412) Adjust the angle of the reflector (3), so that the point image returns to the area where the four-quadrant detector (66) is located, and enter step b; Second, the point image obtained is located in the area where the four-quadrant detector (66) is located, and directly enters step b; Step b, four-quadrant detector (66) imaging, after step a is completed, the point image deviates from the center position Δx and Δy of the image plane of the four-quadrant detector (66), and is adjusted by the first driver (411) and the second driver (412) Mirror (3) angle makes the point image get back to the central position of the four-quadrant detector (66) image plane; Step c, read the capacitance change ΔC1 of the first capacitive sensor (423), and the capacitance change ΔC2 of the second capacitive sensor (424), and then convert the angle change Δθ1 and Simultaneously read the displacement change Δx1 that the first laser interferometer (427) obtains, and the displacement change Δx2 that the second laser interferometer (428) obtains, then convert to the angle change Δθ2 and Then obtain the angular changes Δα and Δβ on the surface of the measured object (5); wherein, Δθ1=f1(ΔC1, ΔC2), Δθ2=f3(Δx1,Δx2), and f1, f2, f3, and f4 represent four functions. 4. The portable array zeroing high dynamic precision large working distance self-collimation method realized on the portable array zeroing high dynamic precision large working distance self-collimation device described in claim 2 requires that the wavefront detection system (7) only includes Wavefront detection spectroscope (71) and air disturbance wavefront detector (72); It is characterized in that, comprising the following steps: Step a, selecting a reference object whose surface is perpendicular to the direction of the optical axis; Step b. Turn on the light source (1), place the reference objects selected in step a at the working position A and the near working position B respectively, and the air disturbance wavefront detector (72) obtains two sets of data of GA and GB respectively; Step c, G1=GA-GB, obtain the wavefront change caused by air disturbance; Step d, adjusting the parameters of the transmissive liquid crystal spatial light modulator (83) according to f5 (G1), lighting the compensation light source (81), and compensating for air disturbance; Step e, turn on the light source (1), feed back the imaging system (6) for imaging, if: First, the point image obtained is located in the area where the single-pixel photoelectric converter (67) is located, and according to the coordinates of the single-pixel photoelectric converter (67), the obtained point image deviates from the direction of the center of the image plane, using the first driver (411) and the second driver (412) adjust the mirror (3) angle, make the point image return to the area where the four-quadrant detector (66) is located, and enter step f; Second, the point image obtained is located in the area where the four-quadrant detector (66) is located, and directly enters step f; Step f, four-quadrant detector (66) imaging, after step a is obtained, the point image deviates from the center position Δx and Δy of the image plane of the four-quadrant detector (66), and is adjusted by the first driver (411) and the second driver (412) Mirror (3) angle makes the point image get back to the central position of the four-quadrant detector (66) image plane; Step g, read the capacitance change ΔC1 of the first capacitive sensor (423), and the capacitance change ΔC2 of the second capacitive sensor (424), then convert the angle change Δθ1 and Simultaneously read the displacement change Δx1 that the first laser interferometer (427) obtains, and the displacement change Δx2 that the second laser interferometer (428) obtains, then convert to the angle change Δθ2 and Then obtain the angular changes Δα and Δβ on the surface of the measured object (5); wherein, Δθ1=f1(ΔC1, ΔC2), Δθ2=f3(Δx1,Δx2), and f1, f2, f3, and f4 represent four functions. 5. the portable array zeroing high dynamic precision large working distance self-collimation method realized on the portable array zeroing high dynamic precision large working distance self-collimation device described in claim 2 requires that the wavefront detection system (7) only includes Wavefront detection spectroscope (71) and mirror deformation wavefront detector (73); It is characterized in that, comprising the following steps: Step a, selecting a reference object whose surface is perpendicular to the direction of the optical axis; Step b. Turn on the light source (1), place the reference objects selected in step a at the working position A and the near working position B respectively, and the mirror deformable wavefront detector (73) obtains two sets of data of GC and GD respectively; Step c, G2=GC-GD, obtain the wavefront change caused by air disturbance and mirror deformation; Step d, adjust the parameters of the transmissive liquid crystal spatial light modulator (83) according to f5 (G2), turn on the compensation light source (81), and compensate for air disturbance and mirror deformation; Step e, feedback imaging system (6) imaging, if: First, the point image obtained is located in the area where the single-pixel photoelectric converter (67) is located, and according to the coordinates of the single-pixel photoelectric converter (67), the obtained point image deviates from the direction of the center of the image plane, using the first driver (411) and the second driver (412) adjust the mirror (3) angle, make the point image return to the area where the four-quadrant detector (66) is located, and enter step f; Second, the point image obtained is located in the area where the four-quadrant detector (66) is located, and directly enters step f; Step f, four-quadrant detector (66) imaging, after step a is obtained, the point image deviates from the center position Δx and Δy of the image plane of the four-quadrant detector (66), and is adjusted by the first driver (411) and the second driver (412) Mirror (3) angle makes the point image get back to the central position of the four-quadrant detector (66) image plane; Step g, read the capacitance change ΔC1 of the first capacitive sensor (423), and the capacitance change ΔC2 of the second capacitive sensor (424), then convert the angle change Δθ1 and Simultaneously read the displacement change Δx1 that the first laser interferometer (427) obtains, and the displacement change Δx2 that the second laser interferometer (428) obtains, then convert to the angle change Δθ2 and Then obtain the angular changes Δα and Δβ on the surface of the measured object (5); wherein, Δθ1=f1(ΔC1, ΔC2), Δθ2=f3(Δx1,Δx2), and f1, f2, f3, and f4 represent four functions. 6. The portable array zeroing high dynamic precision large working distance self-collimation method realized on the portable array zeroing high dynamic precision large working distance self-collimation device described in claim 2 requires the wavefront detection system (7) to include simultaneously Wavefront detection spectroscope (71), air disturbance wavefront detector (72) and mirror deformation wavefront detector (73); It is characterized in that, comprising the following steps: Step a, selecting a reference object whose surface is perpendicular to the direction of the optical axis; Step b. Turn on the light source (1), place the reference objects selected in step a at the working position A and the near working position B respectively, and the air disturbance wavefront detector (72) obtains two sets of data of GA and GB respectively, and the reflector The deformed wavefront detector (73) obtains two groups of data of GC and GD respectively; Step c, G1=GA-GB, get the wavefront change caused by air disturbance; G2=GC-GD, get the wavefront change caused by air disturbance and mirror deformation; G=G2-G1, get the wavefront change caused by mirror deformation wavefront variation; step d. Adjust the parameters of the transmissive liquid crystal spatial light modulator (83) according to f5 (G1), turn on the compensation light source (81), and compensate for air disturbance; or Adjust the parameters of the transmissive liquid crystal spatial light modulator (83) according to f5 (G2), turn on the compensation light source (81), and compensate for air disturbance and mirror deformation; or Adjust the parameters of the transmissive liquid crystal spatial light modulator (83) according to f5(G), turn on the compensation light source (81), and compensate the deformation of the mirror; Step e, feedback imaging system (6) imaging, if: First, the point image obtained is located in the area where the single-pixel photoelectric converter (67) is located, and according to the coordinates of the single-pixel photoelectric converter (67), the obtained point image deviates from the direction of the center of the image plane, using the first driver (411) and the second driver (412) adjust the mirror (3) angle, make the point image return to the area where the four-quadrant detector (66) is located, and enter step f; Second, the point image obtained is located in the area where the four-quadrant detector (66) is located, and directly enters step f; Step f, four-quadrant detector (66) imaging, after step a is obtained, the point image deviates from the center position Δx and Δy of the image plane of the four-quadrant detector (66), and is adjusted by the first driver (411) and the second driver (412) Mirror (3) angle makes the point image get back to the central position of the four-quadrant detector (66) image plane; Step g, read the capacitance change ΔC1 of the first capacitive sensor (423), and the capacitance change ΔC2 of the second capacitive sensor (424), then convert the angle change Δθ1 and Simultaneously read the displacement change Δx1 that the first laser interferometer (427) obtains, and the displacement change Δx2 that the second laser interferometer (428) obtains, then convert to the angle change Δθ2 and Then obtain the angular changes Δα and Δβ on the surface of the measured object (5); wherein, Δθ1=f1(ΔC1, ΔC2), Δθ2=f3(Δx1,Δx2), and f1, f2, f3, and f4 represent four functions.