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CN102426061B - Adjusting method of Hartmann wavefront sensor with adjustable dynamic range - Google Patents

Adjusting method of Hartmann wavefront sensor with adjustable dynamic range Download PDF

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CN102426061B
CN102426061B CN 201110242368 CN201110242368A CN102426061B CN 102426061 B CN102426061 B CN 102426061B CN 201110242368 CN201110242368 CN 201110242368 CN 201110242368 A CN201110242368 A CN 201110242368A CN 102426061 B CN102426061 B CN 102426061B
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王帅
杨平
许冰
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Institute of Optics and Electronics of CAS
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Abstract

本发明提出了一种动态范围可调的哈特曼波前传感器,由光学匹配系统、波前分割取样阵列、相位调制器和光电传感器组成,光学匹配系统用于将入射光波缩束,使入射光波束尺寸小于波前分割取样阵列的尺寸及相位调制器的尺寸,相位调制器置于光学匹配系统与波前分割取样阵列之间,其口径大于光学匹配系统通光口径,相位调制器对经缩束的入射波附加像差,在其通光口径内形成诸多子区域,该子区域与波前分割取样阵列的子孔径口径及排布一一对应,并将所产生的像差附加给通过对应子孔径的光波,波前分割取样阵列将经过相位调制器的光波分割成多束子光束,并分别聚焦到位于其焦面的光电传感器靶面上。本发明可广泛应用于各类波前大像差情况下的波前探测。

Figure 201110242368

The invention proposes a Hartmann wavefront sensor with adjustable dynamic range, which is composed of an optical matching system, a wavefront split sampling array, a phase modulator and a photoelectric sensor. The size of the optical beam is smaller than the size of the wavefront split sampling array and the size of the phase modulator, and the phase modulator is placed between the optical matching system and the wavefront split sampling array, and its aperture is larger than the optical aperture of the optical matching system. The constricted incident wave adds aberration, forming many sub-regions in its aperture, which correspond to the sub-aperture aperture and arrangement of the wavefront segmentation sampling array, and add the generated aberration to the passing through Corresponding to the light waves of the sub-apertures, the wavefront division sampling array divides the light waves passing through the phase modulator into multiple sub-beams, and focus them on the target surface of the photoelectric sensor located on the focal plane respectively. The invention can be widely used in wavefront detection under various conditions of large wavefront aberration.

Figure 201110242368

Description

一种动态范围可调的哈特曼波前传感器的调节方法An Adjustment Method of Hartmann Wavefront Sensor with Adjustable Dynamic Range

技术领域 technical field

本发明涉及一种新型光学动态波前传感器,尤其涉及一种基于相位补偿原理的动态范围可调的哈特曼波前传感器。  The invention relates to a novel optical dynamic wavefront sensor, in particular to a Hartmann wavefront sensor with adjustable dynamic range based on the principle of phase compensation. the

背景技术 Background technique

自适应光学系统主要由波前传感器、波前控制器和波前校正器构成,其中波前传感器可以说是自适应光学系统的“眼睛”,波前传感器的探测能力直接影响自适应光学系统的校正性能。哈特曼波前传感器是目前最流行、应用最为广泛的波前传感器。中国专利申请公开说明书(申请号98112210.8,公开号CN1245904A)公开的一种哈特曼波前传感器,其实现方式主要采用波前分割取样阵列元件如微透镜阵列,将波前分割成许多子孔径波前,并将入射的光分别汇聚到阵列光电传感器上形成光斑阵列。当无像差平面波入射时,每个子孔径波前的光斑位于光电传感器靶面上相应子区域的中心,当带有像差波前入射时,每个子孔径对应光斑会发生一定的偏移,测量各光斑相对于无像差平面波入射情况的偏移量,通过计算机处理计算,就能获得各子孔径内波前和整个的波前像差信息。但是,哈特曼波前传感器的动态范围一般在设计时已经确定,当需要测量大像差时,往往会出现光斑偏移超出设计动态范围,导致探测不准甚至无法探测的情况。如果设计时就采用大动态范围,哈特曼波前传感器整体探测精度又会随之下降。因此,如何用哈特曼波前传感器探测大像差,并且保证探测精度,是需要开展的研究工作。  The adaptive optics system is mainly composed of a wavefront sensor, a wavefront controller, and a wavefront corrector. The wavefront sensor can be said to be the "eye" of the adaptive optics system. The detection ability of the wavefront sensor directly affects the performance of the adaptive optics system. Calibration performance. The Hartmann wavefront sensor is currently the most popular and widely used wavefront sensor. A Hartmann wavefront sensor disclosed in Chinese Patent Application Publication (Application No. 98112210.8, Publication No. CN1245904A) mainly uses wavefront split sampling array elements such as microlens arrays to divide the wavefront into many sub-aperture before, and the incident light is respectively collected on the array photoelectric sensor to form a light spot array. When a plane wave without aberration is incident, the light spot of each sub-aperture wavefront is located in the center of the corresponding sub-area on the target surface of the photoelectric sensor. When a wavefront with aberration is incident, the corresponding light spot of each sub-aperture will have a certain offset. The offset of each light spot relative to the incidence of the non-aberration plane wave can be processed and calculated by a computer to obtain the wavefront and the entire wavefront aberration information in each sub-aperture. However, the dynamic range of the Hartmann wavefront sensor is generally determined at the time of design. When large aberrations need to be measured, the spot shift often exceeds the design dynamic range, resulting in inaccurate or even impossible detection. If a large dynamic range is used in the design, the overall detection accuracy of the Hartmann wavefront sensor will decrease accordingly. Therefore, how to use the Hartmann wavefront sensor to detect large aberrations and ensure the detection accuracy is a research work that needs to be carried out. the

目前,已经提出了许多大动态范围或是动态范围可调的哈特曼波前传感器,如中国专利申请公开说明书(申请号02123756.5,公开号CN1212508C)提出的一种动态范围和测量精度可调的哈特曼波前传感器,它通过在哈特曼波前传感器结构中加入测量子孔径选通控制元件,控制子孔径的选通来控制波面分割取样阵列的采样周期,以达到调整波前传感器测量精度和动态范围的目的。这些发明能够实现增大哈特曼波前传感器的动态范围的目的,但是波面分割取样阵列元件总会带有一定的离轴像差,该发明与其他大动态范围或动态范围可调的哈特曼波前传感器均不可避免地会遇到光斑偏移较大、离轴较远时光斑质心难以探测准确的问题。如果忽视这个问题,即使增大了哈特曼波前传感器的动态范围,波前探测精度也会因光斑质心探测误差变大而下降。因此发明一种即可实现动态范围可调,又能保证探测精度的哈特曼波前传感器是十分有必要的。  At present, many Hartmann wavefront sensors with large dynamic range or adjustable dynamic range have been proposed, such as the Chinese patent application publication (application number 02123756.5, publication number CN1212508C) which proposes a sensor with adjustable dynamic range and measurement accuracy. Hartmann wavefront sensor, it adds measurement sub-aperture gating control elements in the Hartmann wavefront sensor structure, controls the gating of sub-apertures to control the sampling period of the wavefront split sampling array, in order to adjust the wavefront sensor measurement for precision and dynamic range purposes. These inventions can achieve the purpose of increasing the dynamic range of the Hartmann wavefront sensor, but the wavefront split sampling array element will always have a certain off-axis aberration. This invention is different from other Hartmann sensors with large dynamic range or adjustable dynamic range. All Mann wavefront sensors inevitably encounter the problem of large spot offset and difficulty in accurate detection of the spot centroid when it is far away from the axis. If this problem is ignored, even if the dynamic range of the Hartmann wavefront sensor is increased, the wavefront detection accuracy will decrease due to the larger detection error of the spot centroid. Therefore, it is very necessary to invent a Hartmann wavefront sensor that can realize adjustable dynamic range and ensure detection accuracy. the

发明内容 Contents of the invention

本发明的技术解决问题是:克服哈特曼波前传感器动态范围大和测量精度高难以兼顾的问题,提出一种动态范围可调,测量精度可保证,且容易满足质心算法精度和波前分割取样阵列元件离轴像差控制要求的哈特曼波前传感器。  The technical problem of the present invention is: to overcome the problem that the Hartmann wavefront sensor has a large dynamic range and high measurement accuracy and it is difficult to balance it, and proposes an adjustable dynamic range, which can guarantee the measurement accuracy, and is easy to meet the centroid algorithm accuracy and wavefront segmentation sampling Off-axis aberration control of array elements requires a Hartmann wavefront sensor. the

本发明提出的动态范围可调的哈特曼波前传感器,由光学匹配系统、波前分割取样阵列、相位调制器和光电传感器组成,光学匹配系统用于将入射光波缩束,使入射光波束尺寸不超过波前分割取样阵列的尺寸以及相位调制器的尺寸,相位调制器置于光学匹配系统与波前分割取样阵列之间,其口径大于光学匹配系统的通光口径,相位调制器对经过缩束的入射波附加像差,在其通光口径内形成诸多子区域,该子区域与波前分割取样阵列的子孔径口径及排布一一对应,并将所产生的像差附加给通过对应子孔径的光波,波前分割取样阵列将经过相位调制器的光波分割成多束子光束,并分别聚焦到位于其焦面的光电传感器靶面上。  The Hartmann wavefront sensor with adjustable dynamic range proposed by the present invention is composed of an optical matching system, a wavefront split sampling array, a phase modulator and a photoelectric sensor. The optical matching system is used to shrink the incident light wave to make the incident light beam The size does not exceed the size of the wavefront split sampling array and the size of the phase modulator. The phase modulator is placed between the optical matching system and the wavefront split sampling array, and its aperture is larger than the optical aperture of the optical matching system. The phase modulator passes through The constricted incident wave adds aberration, forming many sub-regions in its aperture, which correspond to the sub-aperture aperture and arrangement of the wavefront segmentation sampling array, and add the generated aberration to the passing through Corresponding to the light waves of the sub-apertures, the wavefront division sampling array divides the light waves passing through the phase modulator into multiple sub-beams, and focus them on the target surface of the photoelectric sensor located on the focal plane respectively. the

所述相位调制器置于光学匹配系统的前端,相位调制器子区域口径与波前分割取样阵列子孔径口径的比例与光学匹配系统缩束比例相同,子区域排布方式与子孔径相同。  The phase modulator is placed at the front end of the optical matching system, the ratio of the sub-area aperture of the phase modulator to the sub-aperture aperture of the wavefront division sampling array is the same as the beam reduction ratio of the optical matching system, and the arrangement of the sub-areas is the same as that of the sub-apertures. the

所述相位调制器也可以置于光学匹配系统与波前分割取样阵列之间,相位调制器子区域口径和排布方式与波前分割取样阵列子孔径均相同。  The phase modulator can also be placed between the optical matching system and the wavefront division sampling array, and the phase modulator sub-areas have the same aperture and arrangement as the wavefront division sampling array sub-apertures. the

所述相位调制器为透射式相位调制器,采用电寻址相位调制的液晶空间光调制器。 The phase modulator is a transmissive phase modulator, a liquid crystal spatial light modulator with electrical addressing phase modulation.

所述波前分割取样阵列采用二元菲涅尔微透镜阵列,或连续表面微透镜阵列,或梯度折射率微透镜阵列。  The wavefront division sampling array adopts a binary Fresnel microlens array, or a continuous surface microlens array, or a gradient refractive index microlens array. the

所述光电传感器采用CCD探测器,或CMOS探测器,或四象限传感器阵列。  The photoelectric sensor adopts a CCD detector, or a CMOS detector, or a four-quadrant sensor array. the

与现有哈特曼波前传感器比较,本发明动态范围可调的哈特曼波前传感器能够使波前分割取样阵列各子孔径快速锁定光电传感器上对应光斑,实现动态范围可调,保证测量精度,在测量大像差时,即使光斑质心偏移较大,波前分割取样阵列的固有离轴像差会对质心探测造成影响,但通过相位补偿,使通过波前分割取样阵列的大像差逐渐变为小像差,光电传感器上光斑回到各自标定位置附近,哈特曼波前传感器在测量小像差时精度是可以信赖的,因此本发明能够降低对波前分割取样阵列离轴像差控制的要求,大大减轻了离轴像差对最终测量结果的影响。  Compared with the existing Hartmann wavefront sensor, the Hartmann wavefront sensor with adjustable dynamic range of the present invention can quickly lock each sub-aperture of the wavefront segmentation sampling array to the corresponding light spot on the photoelectric sensor, realize the adjustable dynamic range, and ensure the measurement Accuracy, when measuring large aberrations, even if the spot centroid shift is large, the inherent off-axis aberration of the wavefront split sampling array will affect the centroid detection, but through phase compensation, the large image through the wavefront split sampling array The difference gradually becomes small aberration, and the light spots on the photoelectric sensor return to the vicinity of their respective calibration positions. The accuracy of the Hartmann wavefront sensor is reliable when measuring small aberrations. Therefore, the present invention can reduce the off-axis The requirement of aberration control greatly reduces the influence of off-axis aberration on the final measurement result. the

附图说明 Description of drawings

图1为本发明动态范围可调的哈特曼波前传感器实施例的结构示意图。  FIG. 1 is a schematic structural diagram of an embodiment of a Hartmann wavefront sensor with an adjustable dynamic range according to the present invention. the

图2为光斑偏移在哈特曼波前传感器设计动态范围之内时,本发明动态范围可调的哈特曼波前传感器靶面上光斑阵列复位过程示意图;  Fig. 2 is a schematic diagram of the resetting process of the spot array on the target surface of the Hartmann wavefront sensor with adjustable dynamic range when the spot offset is within the designed dynamic range of the Hartmann wavefront sensor;

图3为某些光斑偏移超出哈特曼波前传感器设计动态范围时,本发明动态范围可调的哈 特曼波前传感器靶面上光斑阵列复位过程示意图;  Fig. 3 is when some facula offset exceeds the design dynamic range of Hartmann wavefront sensor, the schematic diagram of reset process of spot array on the target surface of Hartmann wavefront sensor with adjustable dynamic range of the present invention;

图4为本发明动态范围可调的哈特曼波前传感器另一实施例的结构示意图。  Fig. 4 is a schematic structural diagram of another embodiment of the Hartmann wavefront sensor with adjustable dynamic range of the present invention. the

具体实施方式 Detailed ways

下面结合附图和实施例对本发明动态范围可调的哈特曼波前传感器作进一步说明。 The Hartmann wavefront sensor with adjustable dynamic range of the present invention will be further described below in conjunction with the drawings and embodiments.

实施例一  Embodiment one

如图1所示,补偿子孔径内波前像差元件采用透射式相位调制器3,位于波面分割取样阵列2之前,补偿各子孔径内子波前倾斜像差,它包括光学匹配系统1、波前分割取样阵列2、透射式相位调制器3和光电传感器4,入射光波经过光学匹配系统1被缩束,在进入波前分割取样阵列2之前通过透射式相位调制器3,透射式相位调制器可以对光波附加特定的像差,波前分割取样阵列2的子孔径将光波分割成许多子光束,其焦面与光电传感器4靶面重合,将各子孔径中的子光束分别聚焦于光电传感器4靶面上,其中透射式相位调制器3采用电寻址相位调制的液晶空间光调制器,波前分割取样阵列2采用二元菲涅尔微透镜阵列,或连续表面微透镜阵列,或梯度折射率微透镜阵列,光电传感器4采用CCD探测器或CMOS探测器;透射式相位调制器3为波前分割取样阵列2每个子孔径内光波附加特定相差,附加方式可以是同步补偿,即同时对每个子孔径内光波附加特定相差,也可以是异步补偿,只对特定一个或几个子孔径内光波附加特定相差,当待测波前像差不大,光电传感器4上光斑质心偏移不大,波前分割取样阵列2子孔径与光斑能够一一对应时,测量时根据光电传感器4光斑质心偏移得到每个子孔径内光波倾斜像差大小,并用透射式相位调制器3同步补偿,最终使光电传感器4上每个光斑均复位至哈特曼波前传感器标定时所确定的初始位置,也即透射式相位调制器3将待测波前像差补偿,待测波前像差量就是补偿所用的像差量的共轭值。待测波面与补偿所用波面每一点像差量均为相反数关系形成共轭。当待测波前像差较大,光电传感器4上光斑质心偏移过大,波前分割取样阵列2子孔径与光斑无法一一对应时,通过控制透射式相位调制器3对不同子孔径内光波像差的异步补偿,观察光斑质心变化,质心发生的光斑与附加像差的子孔径对应,在锁定每个子孔径对应的光斑之后,就可测量光斑质心偏移计算每个子孔径内光波倾斜像差大小,并用透射式相位调制器3同步补偿,最终使光电传感器4上每个光斑均复位至哈特曼波前传感器标定时所确定的初始位置,这样就可不受动态范围限制,实现动态范围可调以及对波前像差的补偿和测量,因为像差补偿之后的光斑均在初始标定位置或者其附近,进入波前分割取样阵列2的光波波前像差非常小,而在小像差情况下哈特曼波前传感器的测量是可靠的,也即相位补偿的残差非常小,所以即使待测波前像差很大,最终的测量精度也能保证与小像差情况一致。  As shown in Figure 1, the wavefront aberration compensation element in the sub-aperture adopts a transmissive phase modulator 3, which is located before the wavefront division sampling array 2, and compensates the oblique aberration of the sub-wavefront in each sub-aperture, which includes an optical matching system 1, a wavefront The front split sampling array 2, the transmissive phase modulator 3 and the photoelectric sensor 4, the incident light wave is narrowed by the optical matching system 1, and passes through the transmissive phase modulator 3 before entering the wavefront split sampling array 2, the transmissive phase modulator Specific aberrations can be added to the light wave. The sub-apertures of the wavefront split sampling array 2 divide the light wave into many sub-beams. The focal plane of which coincides with the target surface of the photoelectric sensor 4, and the sub-beams in each sub-aperture are respectively focused on the photoelectric sensor. 4 on the target surface, where the transmissive phase modulator 3 adopts a liquid crystal spatial light modulator with electrical addressing phase modulation, and the wavefront division sampling array 2 adopts a binary Fresnel microlens array, or a continuous surface microlens array, or a gradient The refractive index microlens array, the photoelectric sensor 4 adopts a CCD detector or a CMOS detector; the transmissive phase modulator 3 adds a specific phase difference to the light wave in each sub-aperture of the wavefront division sampling array 2, and the additional method can be synchronous compensation, that is, simultaneously Adding a specific phase difference to the light waves in each sub-aperture can also be asynchronous compensation. Only add a specific phase difference to the light waves in one or several sub-apertures. When the sub-apertures of the wavefront segmentation sampling array 2 and the light spots can be in one-to-one correspondence, the optical wave tilt aberration in each sub-aperture is obtained according to the offset of the photoelectric sensor 4 light spot centroid during measurement, and the transmission phase modulator 3 is used for synchronous compensation. Finally, the photoelectric Each light spot on the sensor 4 is reset to the initial position determined when the Hartmann wavefront sensor is calibrated, that is, the transmissive phase modulator 3 compensates the wavefront aberration to be measured, and the wavefront aberration to be measured is used for compensation The conjugate value of the aberration amount. The aberrations of each point of the wave surface to be measured and the wave surface used for compensation are inverse numbers to form a conjugate. When the aberration of the wavefront to be measured is large, the centroid of the light spot on the photoelectric sensor 4 is too large, and the sub-apertures of the wavefront segmentation sampling array 2 cannot correspond to the light spots one by one, by controlling the transmissive phase modulator 3 pairs of different sub-apertures Asynchronous compensation of light-wave aberration, observe the change of the centroid of the spot, the spot generated by the centroid corresponds to the sub-aperture with additional aberration, after locking the spot corresponding to each sub-aperture, the centroid offset of the spot can be measured to calculate the oblique image of the light wave in each sub-aperture The size of the difference is compensated synchronously with the transmissive phase modulator 3, and finally each light spot on the photoelectric sensor 4 is reset to the initial position determined when the Hartmann wavefront sensor is calibrated, so that the dynamic range can be realized without being limited by the dynamic range Adjustable and the compensation and measurement of the wavefront aberration, because the spot after the aberration compensation is at or near the initial calibration position, the wavefront aberration of the light entering the wavefront split sampling array 2 is very small, and the small aberration In this case, the measurement of the Hartmann wavefront sensor is reliable, that is, the residual error of phase compensation is very small, so even if the wavefront aberration to be measured is large, the final measurement accuracy can be guaranteed to be consistent with the case of small aberration. the

实施例一通过以下步骤实现波前探测和动态范围可调:  Embodiment 1 realizes wavefront detection and dynamic range adjustment through the following steps:

(1)在相位调制器3上为每个波前分割取样阵列2子孔径划分对应的子区域,相位调制器3子区域的尺寸和排布与波前分割取样阵列2子孔径的尺寸和排布相同,每个相位调制器3子区域给其对应的子孔径内的光波附加一定的倾斜像差;  (1) On the phase modulator 3, divide corresponding sub-regions for each wavefront division sampling array 2 sub-apertures, the size and arrangement of the phase modulator 3 sub-regions and the size and arrangement of the wavefront division sampling array 2 sub-apertures The distribution is the same, and each phase modulator 3 sub-area adds a certain oblique aberration to the light wave in its corresponding sub-aperture;

(2)用无像差平面波入射标定,透射式相位调制器3不附加任何像差,记录探测器上每个波前分割取样阵列2子孔径对应光斑的初始标定位置;  (2) Use aberration-free plane wave incident calibration, the transmission phase modulator 3 does not add any aberration, and record the initial calibration position of the light spot corresponding to the sub-aperture of each wavefront segmentation sampling array 2 on the detector;

(3)测量带像差波前时,各子孔径对应光斑在光电传感器4靶面上会发生偏移,根据当前测得的光斑质心偏移计算各子孔径内光波的倾斜像差量,透射式相位调制器3将每个子孔径内光波算得的倾斜像差补偿,各光斑随之向标定位置移动,因为光斑质心偏移测量值存在误差,所以仅一次相位补偿不能使光斑回到标定位置上或者其附近,需要经过多次测量和补偿,最终使光电传感器4靶面上各光斑均复位至标定位置附近,其中相位补偿可以针对特定的子孔径,通过异步补偿的方式,子孔径能快速地锁定对应的光斑,因此探测波前像差时不受动态范围的限制,能够实现动态范围可调;  (3) When measuring the wavefront with aberration, the light spot corresponding to each sub-aperture will be offset on the target surface of the photoelectric sensor 4, and the oblique aberration of the light wave in each sub-aperture is calculated according to the currently measured light spot centroid offset, and the transmission The phase modulator 3 compensates the oblique aberration calculated by the light waves in each sub-aperture, and each spot moves to the calibration position accordingly. Because there is an error in the measurement value of the centroid offset of the spot, only one phase compensation cannot make the spot return to the calibration position. Or in its vicinity, after multiple measurements and compensations, each light spot on the target surface of the photoelectric sensor 4 is finally reset to the vicinity of the calibration position, wherein the phase compensation can be aimed at a specific sub-aperture, and through asynchronous compensation, the sub-aperture can quickly Lock the corresponding spot, so the detection of wavefront aberration is not limited by the dynamic range, and the dynamic range can be adjusted;

(4)当光电传感器4上各光斑均复位至标定位置附近时,可以认为波前分割取样阵列2的光波波前像差很小,与标定时所用的无像差平行光近似,也即相位调制器基本补偿了待测波前像差,最终待测波前像差就是相位调制器上总补偿像差的共轭值。  (4) When each light spot on the photoelectric sensor 4 is reset to the vicinity of the calibration position, it can be considered that the light wave front aberration of the wavefront division sampling array 2 is very small, which is similar to the aberration-free parallel light used in calibration, that is, the phase The modulator basically compensates the wavefront aberration to be measured, and finally the wavefront aberration to be measured is the conjugate value of the total compensation aberration on the phase modulator. the

下面结合附图进一步说明透射式相位调制器对各子孔径内光波附加倾斜像差,使光电传感器上各光斑复位的过程。  The process of adding oblique aberration to the light waves in each sub-aperture by the transmissive phase modulator to reset each light spot on the photoelectric sensor will be further described below with reference to the accompanying drawings. the

如图2所示,各子孔径对应光斑偏移在哈特曼波前传感器设计动态范围之内,波面分割取样阵列2采用8×8子孔径单元在光电传感器4靶面上形成的光斑阵列,符号“×”表示无像差波前标定光斑位置,黑点“·”表示带像差波面形成光斑。此时子孔径内波前像差均未超过动态范围,。将其中单个子孔径对应光电传感器4子区域作为示例,说明相位补偿时子孔径对应光斑复位过程。  As shown in Figure 2, the spot offset corresponding to each sub-aperture is within the design dynamic range of the Hartmann wavefront sensor, and the wavefront segmentation sampling array 2 adopts the spot array formed by 8×8 sub-aperture units on the target surface of the photoelectric sensor 4, The symbol "×" indicates the spot position of the wavefront without aberration, and the black dot "·" indicates the spot formed by the wavefront with aberration. At this time, none of the wavefront aberrations in the sub-aperture exceeds the dynamic range. Taking a single sub-aperture corresponding to the photosensor 4 sub-region as an example, the process of resetting the sub-aperture corresponding to the light spot during phase compensation is described. the

假设子孔径内波前近似只含倾斜像差。通过测得初始状态时子孔径对应光斑的偏移量,得到子孔径波前倾斜斜率σx和σy,子孔径内波前可表示为  It is assumed that the wavefront approximation in the subaperture contains only tilt aberrations. By measuring the offset of the sub-aperture corresponding to the light spot in the initial state, the sub-aperture wavefront slopes σ x and σ y are obtained, and the wavefront in the sub-aperture can be expressed as

W(x,y)=σx·x+σy·y    (1)  W(x, y) = σ x x + σ y y (1)

因为对离轴的光斑质心探测存在误差,测得的斜率相对于真实值也存在误差δσx、δσy,真实子波前可表示为  Because there is an error in the detection of the centroid of the off-axis spot, the measured slope also has an error δσ x , δσ y relative to the real value, and the real sub-wavefront can be expressed as

W(x,y)=(σx+δσx)·x+(σy+δσy)·y    (2)  W(x,y)=(σ x +δσ x )·x+(σ y +δσ y )·y (2)

根据测得值产生补偿相位  Compensation phase is generated according to the measured value

W(x,y)=-σx·x-σy·y    (3)  W(x,y)=-σ x x-σ y y (3)

一次补偿后子孔径内波前为  After one compensation, the wavefront in the sub-aperture is

W(x,y)=δσx·x+δσy·y    (4)  W(x, y) = δσ x x + δσ y y (4)

此时光斑位置往无像差波前标定位置偏移,进入近轴区域。再次测量光斑质心偏移,根据测得量对之前的补偿相位进行补充修正,如此反复测量补偿直至每个子孔径对应光斑复位到无像差波前标定位置或该位置附近,具体复位位置容许范围可以根据可允许误差确定。这样就可以在波面分割取样阵列2带有离轴像差和离轴光斑质心测量有误差时也能保证测量精度。  At this time, the position of the spot shifts to the calibrated position of the aberration-free wavefront and enters the paraxial region. Measure the center of mass offset of the spot again, and make supplementary corrections to the previous compensation phase according to the measured amount, and repeat the measurement and compensation until the corresponding spot of each sub-aperture is reset to the calibrated position of the wavefront without aberration or near this position. The allowable range of the specific reset position can be Determined according to allowable error. In this way, the measurement accuracy can be guaranteed even when the wavefront division sampling array 2 has off-axis aberration and the off-axis spot centroid measurement has errors. the

如图3所示,出现某些子孔径对应光斑偏移超出哈特曼波前传感器设计动态范围,进入临近子孔径对应光电传感器4子区域内的情况。通过控制邻近子孔径之间的相位非同步补偿,在对一个子孔径内进行相位补偿时,为了确定子孔径对应的光斑,首先为该子孔径随机产生一个很小的倾斜补偿像差,并保持邻近子孔径相位不变,探测该子孔径及邻近子孔径对应区域内是否有光斑位置变化,即可锁定该子孔径对应的光斑。光斑锁定后,用图2中情况相同方法对其进行相位补偿,即可让光斑返回子孔径对应光电传感器4子区域内,直至复位至无像差波前标定位置附近。这样就能突破动态范围限制,实现动态范围可调,而且测量大像差时,也避免了光斑偏移增大后带来的质心探测不准的问题,保证了对大像差的探测能力和探测精度。  As shown in FIG. 3 , some sub-apertures correspond to spot offsets that exceed the design dynamic range of the Hartmann wavefront sensor and enter the photoelectric sensor 4 sub-regions corresponding to adjacent sub-apertures. By controlling the phase non-synchronous compensation between adjacent sub-apertures, when performing phase compensation in a sub-aperture, in order to determine the light spot corresponding to the sub-aperture, first randomly generate a small tilt compensation aberration for the sub-aperture, and keep The phase of the adjacent sub-aperture remains unchanged, and the light spot corresponding to the sub-aperture can be locked by detecting whether there is a change in the position of the light spot in the corresponding area of the sub-aperture and the adjacent sub-aperture. After the spot is locked, use the same method as in Figure 2 to perform phase compensation on it, so that the spot can return to the sub-area of the photoelectric sensor 4 corresponding to the sub-aperture until it is reset to the vicinity of the calibrated position of the aberration-free wavefront. In this way, the dynamic range limit can be broken through, and the dynamic range can be adjusted. When measuring large aberrations, it also avoids the problem of inaccurate detection of the center of mass caused by the increase of spot offset, ensuring the detection ability and accuracy of large aberrations. Detection accuracy. the

实施例二  Example two

如图4所示,补偿子孔径内波前像差元件采用透射式相位调制器3,位于波面分割取样阵列2在光学匹配系统之前,补偿各子孔径内波前像差,它包括光学匹配系统1、波前分割取样阵列2、透射式相位调制器3和光电传感器4,入射光波经过光学匹配系统1缩束后进入波前分割取样阵列2,波前分割取样阵列2的子孔径将光波分割成许多子光束,其焦面与光电传感器4靶面重合,将各子孔径中的子光束分别聚焦于光电传感器4靶面上,透射式相位调制器置于光学匹配系统之前,可以对光波附加特定的像差,其中透射式相位调制器3采用电寻址相位调制的液晶空间光调制器,波前分割取样阵列2采用二元菲涅尔微透镜阵列,或连续表面微透镜阵列,或梯度折射率微透镜阵列,光电传感器采用CCD探测器或CMOS探测器;透射式相位调制器3为波前分割取样阵列2每个子孔径内光波附加特定相差,附加方式可以是同步补偿,即同时对每个子孔径内光波附加特定相差,也可以是异步补偿,只对特定一个或几个子孔径内光波附加特定相差,当待测波前像差不大,光电传感器4上光斑质心偏移不大,波前分割取样阵列2子孔径与光斑能够一一对应时,测量时根据光电传感器4光斑质心偏移得到每个子孔径内光波倾斜像差大小,并用透射式相位调制器3同步补偿,最终使光电传感器4上每个光斑均复位至哈特曼波前传感器标定时所确定的初始位置,也即透 射式相位调制器3将待测波前像差补偿,待测波前像差量就是补偿所用的像差量的共轭值,当待测波前像差较大,光电传感器4上光斑质心偏移过大,波前分割取样阵列2子孔径与光斑无法一一对应时,通过控制透射式相位调制器3对不同子孔径内光波像差的异步补偿,观察光斑质心变化,质心发生的光斑与附加像差的子孔径对应,在锁定每个子孔径对应的光斑之后,就可测量光斑质心偏移计算每个子孔径内光波倾斜像差大小,并用透射式相位调制器3同步补偿,最终使光电传感器4上每个光斑均复位至哈特曼波前传感器标定时所确定的初始位置,这样就可不受动态范围限制,实现动态范围可调以及对波前像差的补偿和测量,因为像差补偿之后的光斑均在初始标定位置或者其附近,进入波前分割取样阵列2的光波波前像差非常小,而在小像差情况下哈特曼波前传感器的测量是可靠的,也即相位补偿的残差非常小,所以即使待测波前像差很大,最终的测量精度也能保证与小像差情况一致。  As shown in Figure 4, the wavefront aberration compensation element in the sub-aperture adopts a transmissive phase modulator 3, which is located in the wavefront division sampling array 2 before the optical matching system, and compensates the wavefront aberration in each sub-aperture, which includes an optical matching system 1. Wavefront split sampling array 2, transmissive phase modulator 3 and photoelectric sensor 4. The incident light wave enters the wavefront split sampling array 2 after being narrowed by the optical matching system 1, and the sub-apertures of the wave front split sampling array 2 split the light wave into many sub-beams, the focal plane of which coincides with the target surface of the photoelectric sensor 4, and the sub-beams in each sub-aperture are respectively focused on the target surface of the photoelectric sensor 4, and the transmissive phase modulator is placed before the optical matching system, which can add light waves Specific aberrations, wherein the transmissive phase modulator 3 adopts an electrically addressable phase-modulated liquid crystal spatial light modulator, and the wavefront division sampling array 2 adopts a binary Fresnel microlens array, or a continuous surface microlens array, or a gradient The refractive index microlens array, the photoelectric sensor adopts CCD detector or CMOS detector; the transmissive phase modulator 3 adds a specific phase difference to the light wave in each sub-aperture of the wavefront division sampling array 2, and the additional method can be synchronous compensation, that is, each Adding a specific phase difference to the light waves in several sub-apertures can also be asynchronous compensation. Only add a specific phase difference to the light waves in one or several sub-apertures. When the sub-apertures of the pre-segmented sampling array 2 and the light spots can correspond one-to-one, the light wave tilt aberration in each sub-aperture can be obtained according to the offset of the light spot centroid of the photoelectric sensor 4 during measurement, and the transmissive phase modulator 3 is used for synchronous compensation, and finally the photoelectric sensor Each light spot on 4 is reset to the initial position determined when the Hartmann wavefront sensor is calibrated, that is, the transmissive phase modulator 3 compensates the wavefront aberration to be measured, and the amount of wavefront aberration to be measured is used for compensation The conjugate value of the aberration amount, when the wavefront aberration to be measured is large, the center of mass of the light spot on the photoelectric sensor 4 is shifted too much, and when the sub-apertures of the wavefront segmentation sampling array 2 cannot correspond to the light spot one by one, by controlling the transmissive The phase modulator 3 asynchronously compensates the light-wave aberration in different sub-apertures, and observes the change of the centroid of the spot. The spot generated by the centroid corresponds to the sub-aperture with additional aberration. After locking the spot corresponding to each sub-aperture, the centroid deviation of the spot can be measured. Calculate the size of the tilt aberration of the light wave in each sub-aperture, and use the transmission phase modulator 3 to compensate synchronously, and finally reset each light spot on the photoelectric sensor 4 to the initial position determined when the Hartmann wavefront sensor is calibrated, so that It can realize the adjustable dynamic range and the compensation and measurement of the wavefront aberration without being limited by the dynamic range, because the light spots after aberration compensation are all at or near the initial calibration position, and enter the optical wavefront image of the wavefront split sampling array 2 The difference is very small, and the measurement of the Hartmann wavefront sensor is reliable in the case of small aberration, that is, the residual error of phase compensation is very small, so even if the wavefront aberration to be measured is large, the final measurement accuracy can also be Guaranteed to be consistent with the case of small aberrations. the

实施例二通过以下步骤实现波前探测和动态范围可调:  Embodiment 2 realizes wavefront detection and dynamic range adjustment through the following steps:

(1)在相位调制器3上为每个波前分割取样阵列2子孔径划分对应的子区域,相位调制器3子区域排布与波前分割取样阵列2子孔径排布相同,每个子区域与对应子孔径的口径之比等于光学匹配系统1的缩束比,每个相位调制器3子区域给其对应的子孔径内的光波附加一定的倾斜像差;  (1) On the phase modulator 3, the sub-apertures of each wavefront division sampling array are divided into corresponding sub-regions, and the arrangement of the sub-regions of the phase modulator 3 is the same as that of the wavefront division sampling array 2 sub-apertures. Each sub-region The ratio of the aperture to the corresponding sub-aperture is equal to the beam reduction ratio of the optical matching system 1, and each sub-region of the phase modulator 3 adds a certain oblique aberration to the light wave in its corresponding sub-aperture;

(2)用无像差平面波入射标定,透射式相位调制器3不附加任何像差,记录探测器上每个波前分割取样阵列2子孔径对应光斑的初始标定位置;  (2) Use aberration-free plane wave incident calibration, the transmission phase modulator 3 does not add any aberration, and record the initial calibration position of the light spot corresponding to the sub-aperture of each wavefront segmentation sampling array 2 on the detector;

(3)测量带像差波前时,各子孔径对应光斑在光电传感器4靶面上会发生偏移,根据当前测得的光斑质心偏移计算各子孔径内光波的倾斜像差量,透射式相位调制器3将每个子孔径内光波算得的倾斜像差补偿,各光斑随之向标定位置移动,因为光斑质心偏移测量值存在误差,所以仅一次相位补偿不能使光斑回到标定位置上或者其附近,需要经过多次测量和补偿,最终使光电传感器4靶面上各光斑均复位至标定位置附近,其中相位补偿可以针对特定的子孔径,通过异步补偿的方式,子孔径能快速地锁定对应的光斑,因此探测波前像差时不受动态范围的限制,能够实现动态范围可调;  (3) When measuring the wavefront with aberration, the light spot corresponding to each sub-aperture will be offset on the target surface of the photoelectric sensor 4, and the oblique aberration of the light wave in each sub-aperture is calculated according to the currently measured light spot centroid offset, and the transmission The phase modulator 3 compensates the oblique aberration calculated by the light waves in each sub-aperture, and each spot moves to the calibration position accordingly. Because there is an error in the measurement value of the centroid offset of the spot, only one phase compensation cannot make the spot return to the calibration position. Or in its vicinity, after multiple measurements and compensations, each light spot on the target surface of the photoelectric sensor 4 is finally reset to the vicinity of the calibration position, wherein the phase compensation can be aimed at a specific sub-aperture, and through asynchronous compensation, the sub-aperture can quickly Lock the corresponding spot, so the detection of wavefront aberration is not limited by the dynamic range, and the dynamic range can be adjusted;

(4)当光电传感器4上各光斑均复位至标定位置附近时,可以认为波前分割取样阵列2的光波波前像差很小,与标定时所用的无像差平行光近似,也即相位调制器基本补偿了待测波前像差,最终待测波前像差就是相位调制器上总补偿像差的共轭值。  (4) When each light spot on the photoelectric sensor 4 is reset to the vicinity of the calibration position, it can be considered that the light wave front aberration of the wavefront division sampling array 2 is very small, which is similar to the aberration-free parallel light used in calibration, that is, the phase The modulator basically compensates the wavefront aberration to be measured, and finally the wavefront aberration to be measured is the conjugate value of the total compensation aberration on the phase modulator. the

Claims (3)

1.一种动态范围可调的哈特曼波前传感器的调节方法,该哈特曼波前传感器由光学匹配系统(1)、波前分割取样阵列(2)、透射式相位调制器(3)和光电传感器(4)组成,光学匹配系统(1)用于将入射光波缩束,使入射光波束尺寸不超过波前分割取样阵列(2)的尺寸以及透射式相位调制器(3)的尺寸,其特征在于:透射式相位调制器(3)置于光学匹配系统(1)与波前分割取样阵列(2)之间,其口径大于光学匹配系统(1)的通光口径,透射式相位调制器(3)对经过缩束的入射波附加像差,在其通光口径内形成诸多子区域,该子区域与波前分割取样阵列(2)的子孔径口径及排布一一对应,并将所产生的像差附加给通过对应子孔径的光波,波前分割取样阵列(2)将经过透射式相位调制器(3)的光波分割成多束子光束,并分别聚焦到位于其焦面的光电传感器(4)靶面上;1. An adjustment method of a Hartmann wavefront sensor with adjustable dynamic range, the Hartmann wavefront sensor consists of an optical matching system (1), a wavefront split sampling array (2), a transmissive phase modulator (3 ) and a photoelectric sensor (4), the optical matching system (1) is used to shrink the incident light beam so that the size of the incident light beam does not exceed the size of the wavefront split sampling array (2) and the transmissive phase modulator (3) Size, characterized in that: the transmissive phase modulator (3) is placed between the optical matching system (1) and the wavefront split sampling array (2), and its aperture is larger than the optical aperture of the optical matching system (1). The phase modulator (3) adds aberrations to the beam-contracted incident wave, and forms many sub-regions in its light aperture, which correspond to the sub-aperture aperture and arrangement of the wavefront split sampling array (2) one by one , and add the generated aberrations to the light waves passing through the corresponding sub-apertures, the wavefront split sampling array (2) splits the light waves passing through the transmission phase modulator (3) into multiple sub-beams, and focus them on the focal points respectively on the target surface of the photoelectric sensor (4) on the surface; 具体通过以下实现波前探测和动态范围可调:Specifically, the wavefront detection and dynamic range can be adjusted through the following: (1)在透射式相位调制器(3)上为每个波前分割取样阵列(2)子孔径划分对应的子区域,透射式相位调制器(3)子区域的尺寸和排布与波前分割取样阵列(2)子孔径的尺寸和排布相同,每个透射式相位调制器(3)子区域给其对应的子孔径内的光波附加一定的倾斜像差;(1) On the transmissive phase modulator (3), divide the corresponding sub-areas for each wavefront segmentation sampling array (2) sub-aperture, and the size and arrangement of the sub-areas of the transmissive phase modulator (3) are consistent with the wavefront The sub-apertures of the split sampling array (2) have the same size and arrangement, and each sub-region of the transmissive phase modulator (3) adds a certain oblique aberration to the light waves in its corresponding sub-aperture; (2)用无像差平面波入射标定,透射式相位调制器(3)不附加任何像差,记录探测器上每个波前分割取样阵列(2)子孔径对应光斑的初始标定位置;(2) Use aberration-free plane wave incident calibration, transmission phase modulator (3) without any aberration, record the initial calibration position of each wavefront segmentation sampling array (2) sub-aperture corresponding to the spot on the detector; (3)测量带像差波前时,各子孔径对应光斑在光电传感器(4)靶面上会发生偏移,根据当前测得的光斑质心偏移计算各子孔径内光波的倾斜像差量,透射式相位调制器(3)将每个子孔径内光波算得的倾斜像差补偿,各光斑随之向标定位置移动,因为光斑质心偏移测量值存在误差,所以仅一次相位补偿不能使光斑回到标定位置上或者其附近,需要经过多次测量和补偿,最终使光电传感器(4)靶面上各光斑均复位至标定位置附近,其中相位补偿可以针对特定的子孔径,通过异步补偿的方式,子孔径能快速地锁定对应的光斑,因此探测波前像差时不受动态范围的限制,能够实现动态范围可调;(3) When measuring the wavefront with aberration, the light spot corresponding to each sub-aperture will be offset on the target surface of the photoelectric sensor (4), and the oblique aberration of the light wave in each sub-aperture will be calculated according to the currently measured center of mass shift of the light spot , the transmissive phase modulator (3) compensates the oblique aberration calculated by the light waves in each sub-aperture, and each spot moves to the calibration position accordingly. Because there is an error in the measurement value of the centroid offset of the spot, only one phase compensation cannot make the spot return to To reach the calibration position or its vicinity, multiple measurements and compensations are required, and finally all the light spots on the target surface of the photoelectric sensor (4) are reset to the vicinity of the calibration position, and the phase compensation can be aimed at a specific sub-aperture through asynchronous compensation , the sub-aperture can quickly lock the corresponding spot, so the detection of wavefront aberration is not limited by the dynamic range, and the dynamic range can be adjusted; (4)当光电传感器(4)上各光斑均复位至标定位置附近时,认为波前分割取样阵列(2)的光波波前像差很小,与标定时所用的无像差平行光近似,也即透射式相位调制器基本补偿了待测波前像差,最终待测波前像差就是透射式相位调制器上总补偿像差的共轭值。(4) When all the light spots on the photoelectric sensor (4) are reset to the vicinity of the calibration position, it is considered that the light wave front aberration of the wavefront segmentation sampling array (2) is very small, which is similar to the aberration-free parallel light used in calibration, That is to say, the transmission type phase modulator basically compensates the wavefront aberration to be measured, and finally the wavefront aberration to be measured is the conjugate value of the total compensation aberration on the transmission type phase modulator. 2.根据权利要求1所述的动态范围可调的哈特曼波前传感器的调节方法,其特征是:波前分割取样阵列(2)采用二元菲涅尔微透镜阵列,或连续表面微透镜阵列,或梯度折射率微透镜阵列。2. The adjustment method of the Hartmann wavefront sensor with adjustable dynamic range according to claim 1, characterized in that: the wavefront segmentation sampling array (2) adopts a binary Fresnel microlens array, or a continuous surface microlens array lens array, or gradient index microlens array. 3.根据权利要求1所述的动态范围可调的哈特曼波前传感器的调节方法,其特征是:光电传感器(4)采用CCD探测器,或CMOS探测器,或四象限传感器阵列。3. The adjustment method of the Hartmann wavefront sensor with adjustable dynamic range according to claim 1, characterized in that: the photoelectric sensor (4) adopts a CCD detector, or a CMOS detector, or a four-quadrant sensor array.
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