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CN110487425A - A kind of wavefront sensing methods and its device based on defocus type light-field camera - Google Patents

A kind of wavefront sensing methods and its device based on defocus type light-field camera Download PDF

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CN110487425A
CN110487425A CN201910789006.4A CN201910789006A CN110487425A CN 110487425 A CN110487425 A CN 110487425A CN 201910789006 A CN201910789006 A CN 201910789006A CN 110487425 A CN110487425 A CN 110487425A
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wavefront
measured
microlens
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姜宗福
何宇龙
宁禹
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National University of Defense Technology
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    • GPHYSICS
    • G01MEASURING; TESTING
    • G01JMEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J9/00Measuring optical phase difference; Determining degree of coherence; Measuring optical wavelength
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01JMEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J9/00Measuring optical phase difference; Determining degree of coherence; Measuring optical wavelength
    • G01J2009/002Wavefront phase distribution

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Abstract

本发明公开了一种离焦型光场相机的波前探测装置,包括:会聚透镜,用于会聚所述待测波前;微透镜阵列,用于对所述会聚透镜会聚所述待测波前所形成的光斑进行分割;CCD探测器,用于接受微透镜阵列对光斑分割后形成的光斑阵列信息,所述微透镜阵列与所述CCD探测器的距离等于所述微透镜单元焦距;所述微透镜阵列位于与所述会聚透镜的焦点距离为离焦量fdefcous处;所述离焦量为fdefcous=r·n·f,n为微透镜阵列中一个微透镜单元所对应的CCD探测器的像素数,f为微透镜单元的焦距,r表示等效子孔径的光斑占据的微透镜单元个数。本发明还公开了一种基于离焦型光场相机的波前探测方法。通过本发明可对波前探测的视场、动态范围、测量精度进行优化。

The invention discloses a wavefront detection device of a defocused light field camera, comprising: a converging lens for converging the wavefront to be measured; a microlens array for converging the wavefront to be measured on the converging lens The previously formed light spot is divided; CCD detector is used for accepting the light spot array information formed after microlens array divides light spot, and the distance between described microlens array and described CCD detector is equal to described microlens unit focal length; The microlens array is located at the focal distance of the converging lens at the defocus amount f defcous ; the defocus amount is f defcous =r·n·f, and n is the corresponding CCD of a microlens unit in the microlens array The number of pixels of the detector, f is the focal length of the microlens unit, and r is the number of microlens units occupied by the light spot of the equivalent sub-aperture. The invention also discloses a wavefront detection method based on a defocused light field camera. The invention can optimize the field of view, dynamic range and measurement accuracy of wavefront detection.

Description

一种基于离焦型光场相机的波前探测方法及其装置A wavefront detection method and device based on a defocused light field camera

技术领域technical field

本发明涉及波前探测领域,特别涉及一种波前探测方法及其装置。The invention relates to the field of wavefront detection, in particular to a wavefront detection method and a device thereof.

背景技术Background technique

自适应光学作为近几十年发展起来的新型光学技术,其利用光电子器件实时测量波前的动态误差,并通过高速的计算机系统进行计算和控制,使能动器件对波前进行实时矫正。自适应光学使光学系统具有自动适应外界条件变化,保持良好工作状态的能力,在高分辨率成像和激光传输领域有着重要应用。As a new optical technology developed in recent decades, adaptive optics uses optoelectronic devices to measure the dynamic error of the wavefront in real time, and calculates and controls it through a high-speed computer system, so that the active device can correct the wavefront in real time. Adaptive optics enables the optical system to automatically adapt to changes in external conditions and maintain a good working condition. It has important applications in the fields of high-resolution imaging and laser transmission.

波前传感器是自适应光学系统的重要组成部分,其中自适应光学技术主要通过测量波前畸变的一阶导数(斜率)或二阶导数(曲率)进行波前传感。夏克-哈特曼传感器是目前应用最广泛的波前传感器,它利用微透镜阵列分割入射波前,测量各子孔径内波面的平均斜率,进而复原出波前像差。夏克-哈特曼传感器具有结构紧凑、光能利用率高和能工作于连续或脉冲目标等多种优点,但同时上也存在动态范围较小,弱光探测能力不足及难以调整波前测量的空间分辨率等缺陷。在1996年Ragazzoni提出了一种四棱锥波前传感器,其基本原理是光束聚焦在四棱锥顶点后分光,通过探测面上四个子光瞳像之间的强度差异计算波前局部斜率。四棱锥波前传感器具有高于哈特曼传感器的空间分辨率,在闭环校正时的灵敏度和弱光探测能力也更为突出。The wavefront sensor is an important part of the adaptive optics system, and the adaptive optics technology mainly performs wavefront sensing by measuring the first derivative (slope) or second derivative (curvature) of the wavefront distortion. The Shack-Hartmann sensor is currently the most widely used wavefront sensor. It uses a microlens array to segment the incident wavefront, measures the average slope of the wavefront in each sub-aperture, and then restores the wavefront aberration. The Shack-Hartmann sensor has many advantages such as compact structure, high light energy utilization rate, and the ability to work on continuous or pulsed targets, but at the same time, it also has a small dynamic range, insufficient weak light detection capability, and difficulty in adjusting wavefront measurements. defects such as spatial resolution. In 1996, Ragazzoni proposed a quadrangular pyramid wavefront sensor. The basic principle is that the light beam is focused on the apex of the quadrangular pyramid and then split, and the local slope of the wavefront is calculated by the intensity difference between the four sub-pupil images on the detection surface. The quadrangular pyramidal wavefront sensor has a higher spatial resolution than the Hartmann sensor, and its sensitivity and weak light detection ability are more prominent during closed-loop correction.

另外在2003年新西兰的Clare和Lane提出了一种将微透镜阵列放置在物镜后焦面并结合CCD光电探测器进行波前探测的方法。然而现有技术中的波前探测方法存在因微透镜孔径具有一定尺寸(通常为衍射极限的数倍),及光场相机波前传感器的测量精度受到信号饱和现象的制约,而导致只能进行较为粗略的波前测量,并使离焦型波前传感器在自适应光学技术中的应用受到一定限制的问题。In addition, in 2003, Clare and Lane of New Zealand proposed a method of placing a microlens array on the rear focal plane of the objective lens and combining a CCD photodetector for wavefront detection. However, the wavefront detection method in the prior art has a certain size of the microlens aperture (usually several times the diffraction limit), and the measurement accuracy of the wavefront sensor of the light field camera is restricted by the signal saturation phenomenon, so it can only perform Relatively rough wavefront measurement, and the problem that the application of defocused wavefront sensors in adaptive optics technology is limited to a certain extent.

发明内容Contents of the invention

本发明旨在至少在一定程度上解决相关技术中的技术问题之一。本发明的一个目的是提供一种高测量精度、结构简单、契合自适应光学发展趋势的基于离焦型光场相机的波前探测装置。The present invention aims to solve one of the technical problems in the related art at least to a certain extent. An object of the present invention is to provide a wavefront detection device based on a defocused light field camera with high measurement accuracy, simple structure, and conforming to the development trend of adaptive optics.

为此,本发明的第二个目的是提供一种大视场、大动态范围、高测量精度、结构简单、契合自适应光学发展趋势的离焦型光场相机的波前探测方法。Therefore, the second object of the present invention is to provide a wavefront detection method for a defocused light field camera with a large field of view, a large dynamic range, high measurement accuracy, a simple structure, and in line with the development trend of adaptive optics.

本发明所采用的技术方案是:The technical scheme adopted in the present invention is:

第一方面,本发明提供一种基于离焦型光场相机的波前探测装置,包括:In a first aspect, the present invention provides a wavefront detection device based on a defocused light field camera, including:

会聚透镜,用于会聚所述待测波前;a converging lens for converging the wavefront to be measured;

微透镜阵列,用于对所述会聚透镜会聚所述待测波前所形成的光斑进行分割;A microlens array, configured to divide the spot formed by the converging lens converging the wavefront to be measured;

CCD探测器,用于接受微透镜阵列对光斑分割后形成的光斑阵列信息,所述微透镜阵列与所述CCD探测器的距离等于所述微透镜单元焦距;The CCD detector is used to receive the light spot array information formed after the microlens array divides the light spot, and the distance between the microlens array and the CCD detector is equal to the focal length of the microlens unit;

所述微透镜阵列位于与所述会聚透镜的焦点距离为离焦量fdefcous处;所述离焦量为fdefcous=r·n·f,n为微透镜阵列中一个微透镜单元所对应的CCD探测器的像素数,f为微透镜单元的焦距,r表示等效子孔径的光斑占据的微透镜单元个数。The microlens array is located at the defocus amount f defcous with the focal distance of the converging lens ; The number of pixels of the CCD detector, f is the focal length of the microlens unit, and r represents the number of microlens units occupied by the light spot of the equivalent sub-aperture.

进一步地,还包括光学匹配系统,所述光学匹配系设置于会聚透镜输入端,用于将待测波前匹配至会聚透镜。Further, it also includes an optical matching system, the optical matching system is arranged at the input end of the converging lens, and is used to match the wavefront to be measured to the converging lens.

进一步地,还包括处理模块,所述处理模块用于对所述光斑阵列重组以得到等效子孔径图像,通过等效子孔径图像计算出被测波前的质心偏移量后,利用重构矩阵计算待测波前的各阶Zernike像差系数,以得到待测波前的相位分布。Further, a processing module is also included, the processing module is used to reorganize the spot array to obtain an equivalent sub-aperture image, and after calculating the centroid offset of the measured wavefront through the equivalent sub-aperture image, use the reconstruction The matrix calculates the Zernike aberration coefficients of each order of the wavefront to be measured to obtain the phase distribution of the wavefront to be measured.

进一步地,还包括计算待测波前的各阶Zernike像差系数求解算法:Further, it also includes calculating the Zernike aberration coefficient solving algorithm of each order of the wavefront to be measured:

(1)将理想平面波输入波前探测装置,重组等效子孔径图像之后计算各子孔径内质心位置S0x,S0y(1) Input the ideal plane wave into the wavefront detection device, calculate the centroid position S 0x , S 0y in each sub-aperture after recombining the equivalent sub-aperture image;

(2)假设待测波前能够由前k阶Zernike像差完全表示,依次产生前k阶Zernike像差作为波前探测装置的输入,重组波前探测装置为等效子孔径图像,计算每个子孔径内的质心位置和相对于平面波入时的质心偏移量ΔSkx(n)=Skx(n)-S0x(n),ΔSky(n)=Sky(n)-S0y(n);(2) Assuming that the wavefront to be measured can be fully represented by the first k-order Zernike aberrations, the first k-order Zernike aberrations are sequentially generated as the input of the wavefront detection device, and the wavefront detection device is recombined into an equivalent sub-aperture image, and each sub-aperture image is calculated. The position of the center of mass in the aperture and the offset of the center of mass relative to the plane wave entry ΔS kx (n)=S kx (n)-S 0x (n), ΔS ky (n)=S ky (n)-S 0y (n );

(3)将步骤(2)中得到的各阶Zernike像差的质心偏移量按照式(1)的形式排列,得到复原矩阵D2n×k(3) Arrange the centroid offsets of Zernike aberrations of each order obtained in step (2) according to the form of formula (1), and obtain the restoration matrix D 2n×k .

(4)计算复原矩阵的广义逆矩阵,得到重构矩阵D+(4) calculate the generalized inverse matrix of restoration matrix, obtain reconstruction matrix D + ;

(5)当待测波前入射到光场相机波前传感器时,将CCD图像按照步骤2中描述的方式重组子孔径图像并计算质心偏移量,得到向量(5) When the wavefront to be measured is incident on the wavefront sensor of the light field camera, the CCD image is reorganized into the sub-aperture image in the manner described in step 2 and the centroid offset is calculated to obtain the vector

G=[ΔSx(1),ΔSy(1),ΔSx(2),ΔSy(2),…ΔSx(n),ΔSy(n)]T (2)G=[ΔS x (1), ΔS y (1), ΔS x (2), ΔS y (2),...ΔS x (n), ΔS y (n)] T (2)

(6)待测波前中包含的各阶Zernike像差系数可以通过A=D+·G求得。(6) The Zernike aberration coefficients of each order included in the wavefront to be measured can be obtained by A=D + ·G.

进一步地,所述微透镜元的F数为所述会聚透镜的F数的整数倍。Further, the F-number of the microlens element is an integer multiple of the F-number of the converging lens.

进一步地,所述CCD探测器像素尺寸与单个微透镜元的孔径相匹配。Further, the pixel size of the CCD detector matches the aperture of a single microlens element.

进一步地,所述微透镜单元的孔径为所述CCD探测器像素尺寸的整数倍。Further, the aperture of the microlens unit is an integer multiple of the pixel size of the CCD detector.

进一步地,所述微透镜阵列中的各微透镜单元的焦距相等,所述微透镜单元的填充因子大于99%,透过率大于99%,所述微透镜阵列与所述CCD探测器的距离等于微透镜单元焦距。Further, the focal lengths of each microlens unit in the microlens array are equal, the fill factor of the microlens unit is greater than 99%, the transmittance is greater than 99%, and the distance between the microlens array and the CCD detector is Equal to the focal length of the microlens unit.

进一步地,所述微透镜阵列为折射式微透镜阵列或反射式微透镜阵列或二元衍射元件。Further, the microlens array is a refractive microlens array or a reflective microlens array or a binary diffraction element.

第二方面,本发明提供一种离焦型光场相机的波前探测方法,包括:In a second aspect, the present invention provides a wavefront detection method for a defocused light field camera, including:

利用会聚透镜会聚待测波前;Use a converging lens to converge the wavefront to be measured;

利用微透镜阵列对所述会聚透镜会聚待测波前所形成的光斑进行分割并形成光斑阵列,所述微透镜阵列包括多个微透镜单元;Using a microlens array to divide the light spot formed by the converging lens to converge the wavefront to be measured to form a light spot array, the microlens array includes a plurality of microlens units;

利用CCD探测器,接收所述光斑阵列光信号;Using a CCD detector to receive the optical signal of the spot array;

所述会聚透镜与所述透镜阵列的离焦量为fdefcous=r·n·f,n为微透镜阵列中一个微透镜单元所对应的CCD探测器的像素数,f为微透镜单元的焦距,r表示等效子孔径的光斑占据的微透镜单元个数。The defocus of described converging lens and described lens array is f defcous =r n f, n is the pixel number of the corresponding CCD detector of a microlens unit in the microlens array, and f is the focal length of microlens unit , r represents the number of microlens units occupied by the light spot of the equivalent sub-aperture.

进一步地,还包括:Further, it also includes:

通过所述CCD探测器接收所述光斑阵列的光信号,并重组以得到等效子孔径图像,通过等效子孔径图像计算出待测波前的质心偏移量后,利用重构矩阵计算待测波前的各阶Zernike像差系数,以得到待测波前的相位分布。The optical signal of the spot array is received by the CCD detector, and recombined to obtain an equivalent sub-aperture image. After calculating the centroid offset of the wavefront to be measured through the equivalent sub-aperture image, the reconstruction matrix is used to calculate the The Zernike aberration coefficients of each order of the wavefront are measured to obtain the phase distribution of the wavefront to be measured.

进一步地,还包括:Further, it also includes:

所述利用重构矩阵计算待测波前的各阶Zernike像差系数,以得到待测波前的相位分布,具体包括子步骤:Said utilizing the reconstruction matrix to calculate each order Zernike aberration coefficient of the wavefront to be measured, to obtain the phase distribution of the wavefront to be measured, specifically includes sub-steps:

(1)将理想平面波输入光场相机波前传感器,重组等效子孔径图像之后计算各子孔径内质心位置S0x,S0y(1) Input the ideal plane wave into the wavefront sensor of the light field camera, calculate the centroid position S 0x , S 0y in each sub-aperture after recombining the equivalent sub-aperture image;

(2)假设待测波前能够由前k阶Zernike像差完全表示,依次产生前k阶Zernike像差作为光场相机波前传感器的输入,重组光场相机图像为等效子孔径图像,计算每个子孔径内的质心位置和相对于平面波入时的质心偏移量ΔSkx(n)=Skx(n)-S0x(n),ΔSky(n)=Sky(n)-S0y(n);(2) Assuming that the wavefront to be measured can be fully represented by the first k-order Zernike aberrations, the first k-order Zernike aberrations are sequentially generated as the input of the wavefront sensor of the light field camera, and the reconstructed light field camera image is an equivalent sub-aperture image, calculated The position of the center of mass in each sub-aperture and the offset of the center of mass relative to the plane wave entrance ΔS kx (n)=S kx (n)-S 0x (n), ΔS ky (n)=S ky (n)-S 0y (n);

(3)将步骤(2)中得到的各阶Zernike像差的质心偏移量按照式(1)的形式排列,得到复原矩阵D2n×k(3) arrange the centroid offsets of each order of Zernike aberrations obtained in step (2) according to the form of formula (1), and obtain the restoration matrix D 2n × k ;

(4)计算复原矩阵的广义逆矩阵,得到重构矩阵D+(4) calculate the generalized inverse matrix of restoration matrix, obtain reconstruction matrix D + ;

(5)当待测波前入射到光场相机波前传感器时,将CCD图像按照步骤2中描述的方式重组子孔径图像并计算质心偏移量,得到向量(5) When the wavefront to be measured is incident on the wavefront sensor of the light field camera, the CCD image is reorganized into the sub-aperture image in the manner described in step 2 and the centroid offset is calculated to obtain the vector

G=[ΔSx(1),ΔSy(1),ΔSx(2),ΔSy(2),…ΔSx(n),ΔSy(n)]T (2)G=[ΔS x (1), ΔS y (1), ΔS x (2), ΔS y (2),...ΔS x (n), ΔS y (n)] T (2)

(6)待测波前中包含的各阶Zernike像差系数可以通过A=D+·G求得。(6) The Zernike aberration coefficients of each order included in the wavefront to be measured can be obtained by A=D + ·G.

本发明的有益效果是:The beneficial effects of the present invention are:

本发明通过采用微透镜阵列离焦的方式技术手段,克服现有技术中存在因微透镜孔径具有一定尺寸(通常为衍射极限的数倍),及光场相机波前传感器的测量精度受到信号饱和现象的制约,而导致只能进行较为粗略的波前测量的技术问题,实现了以结构简单的光学系统对波前进行大视场、大动态范围、高测量精度的测量。The present invention overcomes the problems in the prior art that the aperture of the microlens has a certain size (usually several times the diffraction limit) and the measurement accuracy of the wavefront sensor of the light field camera is saturated by the signal by adopting the defocusing method of the microlens array. Due to the restriction of the phenomenon, the technical problem of only rough wavefront measurement is achieved, and the measurement of the wavefront with a large field of view, a large dynamic range, and high measurement accuracy is realized with a simple optical system.

附图说明Description of drawings

图1为本发明一种基于离焦型光场相机的波前探测方法的结构示意图;Fig. 1 is a structural schematic diagram of a wavefront detection method based on a defocused light field camera of the present invention;

图2为本发明一种基于离焦型光场相机的波前探测方法的剖视图;Fig. 2 is a cross-sectional view of a wavefront detection method based on a defocused light field camera of the present invention;

图3为本发明一种基于离焦型光场相机的波前探测方法的数据重组的结构示意图;Fig. 3 is a structural schematic diagram of data reorganization of a wavefront detection method based on a defocused light field camera according to the present invention;

图4为本发明一种基于离焦型光场相机的波前探测方法的微透镜阵列离焦量计算的结构示意图;Fig. 4 is a structural schematic diagram of calculating the defocus amount of the microlens array based on the wavefront detection method of the defocused light field camera of the present invention;

图5A为输入待测波前的检测图;Fig. 5A is the detection diagram of inputting the wavefront to be measured;

图5B为输入待测波前的Zernike多项式系数的分布示意图;Fig. 5B is a schematic diagram of the distribution of Zernike polynomial coefficients input to the wavefront to be measured;

图6A为现有光场相机重构待测波前的检测图;FIG. 6A is a detection diagram of reconstructing the wavefront to be measured by an existing light field camera;

图6B为现有光场相机波前重构Zernike多项式系数与待测波前的Zernike多项式系数的对比图分布示意图;Fig. 6B is a schematic distribution diagram of a comparison diagram of the Zernike polynomial coefficients of the wavefront reconstruction of the existing light field camera and the Zernike polynomial coefficients of the wavefront to be measured;

图7A为离焦型光场相机重构待测波前的检测图;FIG. 7A is a detection diagram of reconstructing the wavefront to be measured by a defocused light field camera;

图7B为离焦型光场相机波前重构Zernike多项式系数与待测波前的Zernike多项式系数的对比图的分布示意图。FIG. 7B is a schematic diagram showing the distribution of the Zernike polynomial coefficients of the wavefront reconstruction of the defocused light field camera and the Zernike polynomial coefficients of the wavefront to be measured.

具体实施方式Detailed ways

需要说明的是,在不冲突的情况下,本申请中的实施例及实施例中的特征可以相互组合。It should be noted that, in the case of no conflict, the embodiments in the present application and the features in the embodiments can be combined with each other.

F数:即相对孔径的倒数。F number: the reciprocal of the relative aperture.

请参阅图1,图1为本发明一种基于离焦型光场相机的波前探测装置的结构示意图。其具体包括光学匹配系统1,会聚透镜2,微透镜阵列3,CCD探测器4。Please refer to FIG. 1 . FIG. 1 is a schematic structural diagram of a wavefront detection device based on a defocused light field camera according to the present invention. It specifically includes an optical matching system 1 , a converging lens 2 , a microlens array 3 , and a CCD detector 4 .

在光学匹配系统1的输出端设置一会聚透镜2,且光学匹配系统1的输出面和会聚透镜2的前焦面相重合;在会聚透镜2的后焦面附近设置一微透镜阵列3,且存在一定的离焦量,在微透镜阵列3的输出端设至一CCD探测器4,用于接收光信号。其中微透镜阵列3包括按一定的周期排列在同一个平面的多个相同的微透镜单元。A converging lens 2 is set at the output end of the optical matching system 1, and the output surface of the optical matching system 1 coincides with the front focal plane of the converging lens 2; a microlens array 3 is set near the rear focal plane of the converging lens 2, and there is A certain amount of defocus is set at the output end of the microlens array 3 to a CCD detector 4 for receiving optical signals. The microlens array 3 includes a plurality of identical microlens units arranged on the same plane at a certain period.

光学匹配系统1用于对待测波前进行预调制,如将待测波前调制为平行光并入射至会聚透镜2。微透镜阵列3的F数(即相对孔径的倒数)与会聚透镜2的F数相匹配,以保证微透镜下像素的充分利用且不产生数据的混叠,CCD探测器4与微透镜阵列3之间的距离等于上述微透镜的焦距。待测波前畸变经过光学匹配系统1和会聚透镜2在微透镜阵列3上形成一定面积的光斑,微透镜阵列3对光斑进行分割并在CCD探测器4上成像为光斑阵列。通过对CCD探测器4接收到的图像进行重组可得到等效子孔径图像,计算出被测波前的质心偏移量后,利用重构矩阵计算The optical matching system 1 is used for pre-modulating the wavefront to be measured, such as modulating the wavefront to be measured into parallel light and entering it into the converging lens 2 . The F-number of the microlens array 3 (i.e. the reciprocal of the relative aperture) matches the F-number of the converging lens 2 to ensure that the pixels under the microlens are fully utilized and do not generate data aliasing. The CCD detector 4 and the microlens array 3 The distance between is equal to the focal length of the above-mentioned microlens. The wavefront distortion to be measured passes through the optical matching system 1 and the converging lens 2 to form a spot of a certain area on the microlens array 3 , and the microlens array 3 divides the spot and images it on the CCD detector 4 as a spot array. The equivalent sub-aperture image can be obtained by reorganizing the image received by the CCD detector 4. After calculating the centroid offset of the measured wavefront, use the reconstruction matrix to calculate

请参阅图2,图2为基于离焦型光场相机的波前探测装置的剖视图。通过会聚透镜2的前焦面点A的光线,依次经过会聚透镜2和微透镜阵列3,并在发生折射后照射至CCD探测器4上,且照亮CCD探测器4上的像素。其中无论光线的入射方向如何改变,通过A点的光线在微透镜发生折射后的传播方向相互平行。即在CCD探测器4上照亮的像素与对应微透镜阵列3的微透镜单元的相对位置是固定的。Please refer to FIG. 2 , which is a cross-sectional view of a wavefront detection device based on a defocused light field camera. The light passing through the front focal point A of the converging lens 2 passes through the converging lens 2 and the microlens array 3 in sequence, and irradiates the CCD detector 4 after being refracted, and illuminates the pixels on the CCD detector 4 . Wherein no matter how the incident direction of the light changes, the propagation directions of the light passing through the point A are parallel to each other after being refracted by the microlens. That is, the relative positions of the illuminated pixels on the CCD detector 4 and the corresponding microlens units of the microlens array 3 are fixed.

在其他变更实施例中,可根据应用场景的差异设计其他透镜的结构替换会聚透镜2,以获得较高的波前测量灵敏度或更大的波前传感视场。如在大视场自适应光学技术中可利用透镜组增大探测视场;或利用摄远镜头结构缩短系统尺寸。In other modified embodiments, other lens structures may be designed to replace the converging lens 2 according to differences in application scenarios, so as to obtain higher wavefront measurement sensitivity or a larger wavefront sensing field of view. For example, in the large field of view adaptive optics technology, the lens group can be used to increase the detection field of view; or the telephoto lens structure can be used to shorten the system size.

在本实施例中微透射镜阵列3为折射式微透镜阵列,在其他变更实施例中,可采取实现微透镜阵列功能的其他的元件阵列,如反射式微透镜阵列、利用二元衍射元件。In this embodiment, the micro-transmission mirror array 3 is a refracting micro-lens array. In other modified embodiments, other element arrays that realize the function of the micro-lens array can be used, such as reflective micro-lens arrays, and binary diffraction elements.

在其他变更实施例中,可微透镜阵列3和CCD探测器4之间加入物像共轭系统,以便灵活地调整波前传感的空间分辨率,并降低光场相机的装配难度。In other modified embodiments, an object-image conjugate system can be added between the microlens array 3 and the CCD detector 4, so as to flexibly adjust the spatial resolution of the wavefront sensing and reduce the difficulty of assembling the light field camera.

请参阅图3,图3为基于离焦型光场相机的波前探测装置的数据重组的结构示意图。结合微透镜阵列3的多个微透镜单元进行说明,将每一个微透镜单元的光瞳像中的1号像素按照微透镜阵列3中微透镜单元的排列顺序重组为一幅图像,重组图像表示入瞳处一定区域内的光波在焦面的光斑,等效于哈特曼探测器的子孔径图像。Please refer to FIG. 3 . FIG. 3 is a schematic structural diagram of data reorganization of a wavefront detection device based on a defocused light field camera. In combination with the multiple microlens units of the microlens array 3, the No. 1 pixel in the pupil image of each microlens unit is reorganized into an image according to the arrangement order of the microlens units in the microlens array 3, and the reorganized image represents The light spot on the focal plane of the light wave in a certain area at the entrance pupil is equivalent to the sub-aperture image of the Hartmann detector.

以下举例以对数据重组的过程作进一步说明,假设微透镜阵列3为一300行400列的透镜阵列,即微透镜阵列3包含有1.2w个微透镜单元,且每个微透镜单元与30*30个像素相对设置。可提取30×30张子孔径图像,每张子孔径图像为300×400像素,中心角度的子孔径图像我们就是按顺序提取每一个微透镜中心位置的像素值,按顺序重新拼成一幅新的300×400的图像,就是子孔径图像。The following example is used to further illustrate the process of data reorganization, assuming that the microlens array 3 is a lens array with 300 rows and 400 columns, that is, the microlens array 3 includes 1.2w microlens units, and each microlens unit is connected to 30* 30 pixels relative setting. 30×30 sub-aperture images can be extracted, and each sub-aperture image is 300×400 pixels. For the sub-aperture images at the central angle, we extract the pixel values at the center of each microlens in order, and reassemble them in order. A 300×400 image is a sub-aperture image.

进一步为,我们提取(0,0)位置的微透镜单元的1号像素的像素值,也就是子孔径图像(0,0)位置的像素值,(0,1)位置的微透镜单元的1号像素的像素值,就是子孔径图像(0,1)位置的像素值,以此顺序类推,直到提取完所有的微透镜单元的1号像素的像素值。以此类推,对剩余像素的在所有的微透镜单元进行像素值提取以生成剩余像素的子孔径图像。Further, we extract the pixel value of the No. 1 pixel of the microlens unit at position (0,0), that is, the pixel value of the sub-aperture image at position (0,0), and the pixel value of the microlens unit at position (0,1) The pixel value of the No. pixel is the pixel value at the position (0, 1) of the sub-aperture image, and so on in this order until the pixel values of No. 1 pixel of all the microlens units are extracted. By analogy, pixel values of the remaining pixels are extracted from all microlens units to generate sub-aperture images of the remaining pixels.

利用质心算法可以计算入射待测波前的质心偏移量,进而恢复出待测波前包含的相位信息。Using the centroid algorithm, the centroid offset of the incident wavefront to be measured can be calculated, and then the phase information contained in the wavefront to be measured can be recovered.

请参阅图4,图4为本发明一种基于离焦型光场相机的波前探测方法的微透镜阵列离焦量计算的结构示意图。光场相机的波前测量精度一般由微透镜阵列3中的微透镜单元的孔径决定,微透镜单元的孔径越小,则斜率测量精度越高。然而,微透镜单元的孔径通常为百微米量级,会聚透镜2后焦面上的光斑面积远小于微透镜元单元的尺寸,光场相机无法准确感知质心偏移量。因此通过将微透镜阵列3置于会聚透镜2的后焦面之后,以扩大光斑的面积。即通过引入一离焦量,以使会聚透镜2后焦面上的光斑面积与微透镜元单元的尺寸相匹配,优选的,微透镜单元的孔径为所述CCD探测器像素尺寸的整数倍,从而使光场相机可准确感知质心偏移量。Please refer to FIG. 4 . FIG. 4 is a structural schematic diagram of calculating the defocus amount of a microlens array based on a wavefront detection method of a defocused light field camera according to the present invention. The wavefront measurement accuracy of the light field camera is generally determined by the aperture of the microlens unit in the microlens array 3 , the smaller the aperture of the microlens unit, the higher the slope measurement accuracy. However, the aperture of the microlens unit is usually on the order of hundreds of microns, and the spot area on the rear focal plane of the converging lens 2 is much smaller than the size of the microlens unit, so the light field camera cannot accurately perceive the centroid offset. Therefore, the area of the light spot is enlarged by placing the microlens array 3 behind the back focal plane of the converging lens 2 . Namely by introducing a defocusing amount, so that the spot area on the back focal plane of the converging lens 2 matches the size of the microlens unit, preferably, the aperture of the microlens unit is an integer multiple of the pixel size of the CCD detector, So that the light field camera can accurately perceive the centroid offset.

而离焦量的设置原则是保证等效子孔径在微透镜阵列上的光斑面积大于微透镜单元的孔径,具体可以表述为fdefcous=r·n·f,其中n为单个微透镜下的CCD像素数,f为微透镜焦距,r表示等效子孔径的光斑占据的微透镜单元个数,通常的取值范围是2~4。The setting principle of the defocus amount is to ensure that the spot area of the equivalent sub-aperture on the microlens array is greater than the aperture of the microlens unit, specifically can be expressed as f defcous = r n f, where n is the CCD under a single microlens The number of pixels, f is the focal length of the microlens, and r is the number of microlens units occupied by the light spot of the equivalent sub-aperture, and the usual value range is 2-4.

在此实施例中,按照上述方法计算得到的离焦量可以保证等效子孔径内的光斑覆盖多个微透镜单元,提高波前探测器的测量精度。In this embodiment, the defocus amount calculated according to the above method can ensure that the light spots in the equivalent sub-aperture cover multiple microlens units, and improve the measurement accuracy of the wavefront detector.

采用本发明复原被测波前的过程为:The process of adopting the present invention to recover the measured wavefront is:

(1)将理想平面波输入波前探测器,重组等效子孔径图像之后计算各子孔径内质心位置;(1) Input the ideal plane wave into the wavefront detector, and calculate the centroid position in each sub-aperture after recombining the equivalent sub-aperture image;

(2)假设待测波前能够由前k阶Zernike像差完全表示,依次产生前k阶Zernike像差作为波前探测器的输入,将波前探测器接收的光斑阵列信息重组为等效子孔径图像,计算每个子孔径内的质心位置和相对于平面波入时的质心偏移量ΔSkx(n)=Skx(n)-S0x(n),ΔSky(n)=Sky(n)-S0y(n);(2) Assuming that the wavefront to be measured can be fully represented by the first k-order Zernike aberrations, the first k-order Zernike aberrations are sequentially generated as the input of the wavefront detector, and the information of the spot array received by the wavefront detector is reorganized into an equivalent Aperture image, calculate the position of the centroid in each sub-aperture and the offset of the centroid relative to the plane wave entrance ΔS kx (n)=S kx (n)-S 0x (n), ΔS ky (n)=S ky (n )-S 0y (n);

(3)将步骤(2)中得到的各阶Zernike像差的质心偏移量按照式(1)的形式排列,得到复原矩阵D。(3) Arrange the centroid offsets of Zernike aberrations of each order obtained in step (2) according to the form of formula (1) to obtain the restoration matrix D.

(4)计算复原矩阵D的广义逆矩阵,得到重构矩阵;(4) Calculate the generalized inverse matrix of the restoration matrix D to obtain the reconstruction matrix;

(5)当含有畸变的待测波前入射到光场相机波前传感器时,将CCD图像按照步骤(2)中的方式重组子孔径图像并计算质心偏移量,得到向量(5) When the wavefront to be measured with distortion is incident on the wavefront sensor of the light field camera, reorganize the CCD image according to the method in step (2) and calculate the centroid offset to obtain the vector

G=[ΔSx(1),ΔSy(1),ΔSx(2),ΔSy(2),…ΔSx(n),ΔSy(n)]T (2)G=[ΔS x (1), ΔS y (1), ΔS x (2), ΔS y (2),...ΔS x (n), ΔS y (n)] T (2)

(6)待测波前中包含的各阶Zernike像差系数可以通过A=D+·G求得。(6) The Zernike aberration coefficients of each order included in the wavefront to be measured can be obtained by A=D + ·G.

本发明利用会聚透镜、微透镜阵列和CCD探测器的组合,通过优化设计光学结构,解决了现有的光场相机波前传感器线性度差、波前测量精度低的缺陷,构建了一种视场大,动态范围大,测量精度高,结构简单的波前传感器。The present invention utilizes the combination of a converging lens, a microlens array and a CCD detector to solve the defects of poor linearity and low wavefront measurement accuracy of the existing light field camera wavefront sensor by optimizing the design of the optical structure, and constructs a visual It is a wavefront sensor with large field, large dynamic range, high measurement accuracy and simple structure.

在此对下述各图的横坐标及纵坐标做解析说明。其中图5A、图6A、图7A中的左侧纵坐标及底部横坐标用于表示波前的空间坐标,即坐标(0,0)表示为波前的中心位置。其右侧纵坐标则表示Zernike多项式系数。而5B、图6B、图7B中所示,纵坐标表示Zernike多项式系数,其横坐标表示Zernike多项式阶数。Here, the abscissa and ordinate of the following figures are analyzed and explained. The left ordinate and bottom abscissa in FIG. 5A , FIG. 6A , and FIG. 7A are used to represent the spatial coordinates of the wavefront, that is, the coordinate (0, 0) represents the center position of the wavefront. The ordinate on the right represents the Zernike polynomial coefficients. As shown in 5B, FIG. 6B and FIG. 7B, the ordinate represents the Zernike polynomial coefficients, and the abscissa represents the Zernike polynomial order.

请一并参阅图5A-5B,其中图5A为输入待测波前的示意图,图5B为图5A对应的输入波前待测波前的Zernike多项式系数。Please refer to FIGS. 5A-5B together, wherein FIG. 5A is a schematic diagram of the input wavefront to be measured, and FIG. 5B is a Zernike polynomial coefficient of the input wavefront to be measured corresponding to FIG. 5A .

请一并参阅图6A-6B,其中图6A为现有光场相机波前重构结果的示意图,图6B为图6A对应的波前重构结果的Zernike多项式系数与待测波前的Zernike多项式系数的对比图。圆形标志为待测波前的Zernike多项式系数,棱形标志为波前重构结果的Zernike多项式系数。以现有光场相机对波前进行检测并重构,重构结果如图6A所示。如图6B所示,以现有光场相机进行波前重构所得的Zernike多项式系数与输入待测波前Zernike多项式系数存在较大差距,残差约为0.4λ,其测量精度较低。Please refer to Figures 6A-6B together, where Figure 6A is a schematic diagram of the wavefront reconstruction result of an existing light field camera, and Figure 6B is the Zernike polynomial coefficient of the wavefront reconstruction result corresponding to Figure 6A and the Zernike polynomial of the wavefront to be measured Coefficient comparison chart. The circular marks are the Zernike polynomial coefficients of the wavefront to be measured, and the rhombic marks are the Zernike polynomial coefficients of the wavefront reconstruction results. The existing light field camera is used to detect and reconstruct the wavefront, and the reconstruction result is shown in Figure 6A. As shown in Figure 6B, there is a large gap between the Zernike polynomial coefficients obtained by wavefront reconstruction with the existing light field camera and the input Zernike polynomial coefficients of the wavefront to be measured, the residual error is about 0.4λ, and its measurement accuracy is low.

请一并参阅图7A-7B,其中图7A为基于离焦型光场相机的波前探测装置的波前重构结果的示意图,图7B为图7A对应的波前重构结果的Zernike多项式系数与待测波前的Zernike多项式系数的对比图。圆形标志为待测波前的Zernike多项式系数,方形标志为波前重构结果的Zernike多项式系数。如图7B所示,离焦行光场相机进行波前重构所得的Zernike多项式系数与输入待测波前Zernike多项式系数基本吻合,其残差均小于0.005λ,其测量精度较高。即本发明所提供的基于离焦型光场相机的波前探测方法与现有的波前探测方法相比较在测量精度上存在明显的优化效果。Please refer to Figures 7A-7B together, where Figure 7A is a schematic diagram of the wavefront reconstruction result of a wavefront detection device based on a defocused light field camera, and Figure 7B is the Zernike polynomial coefficient of the wavefront reconstruction result corresponding to Figure 7A Comparison plot with the Zernike polynomial coefficients of the wavefront to be measured. The circle marks are the Zernike polynomial coefficients of the wavefront to be measured, and the square marks are the Zernike polynomial coefficients of the wavefront reconstruction results. As shown in Figure 7B, the Zernike polynomial coefficients obtained from the wavefront reconstruction of the out-of-focus line light-field camera are basically consistent with the input Zernike polynomial coefficients of the wavefront to be measured, and the residuals are all less than 0.005λ, indicating high measurement accuracy. That is, compared with the existing wavefront detection method, the wavefront detection method based on the defocused light field camera provided by the present invention has an obvious optimization effect in measurement accuracy.

本发明还提供与上述波前探测装置对应的一种基于离焦型光场相机的波前探测方法,用于探测待测波前。所述方法通过所述CCD探测器接收所述光斑阵列的光信号,并重组以得到等效子孔径图像,通过等效子孔径图像计算出待测波前的质心偏移量后,利用重构矩阵计算待测波前的各阶Zernike像差系数,以得到待测波前的相位分布。The present invention also provides a wavefront detection method based on a defocused light field camera corresponding to the above wavefront detection device, for detecting the wavefront to be measured. In the method, the optical signal of the spot array is received by the CCD detector, and recombined to obtain an equivalent sub-aperture image, and after the centroid offset of the wavefront to be measured is calculated through the equivalent sub-aperture image, the reconstructed The matrix calculates the Zernike aberration coefficients of each order of the wavefront to be measured to obtain the phase distribution of the wavefront to be measured.

以上是对本发明的较佳实施进行了具体说明,但本发明创造并不限于所述实施例,熟悉本领域的技术人员在不违背本发明精神的前提下还可做出种种的等同变形或替换,这些等同的变形或替换均包含在本申请权利要求所限定的范围内。The above is a specific description of the preferred implementation of the present invention, but the invention is not limited to the described embodiments, those skilled in the art can also make various equivalent deformations or replacements without violating the spirit of the present invention , these equivalent modifications or replacements are all within the scope defined by the claims of the present application.

Claims (10)

1.一种离焦型光场相机的波前探测装置,其特征在于,包括:1. A wavefront detection device of a defocused light field camera, characterized in that it comprises: 会聚透镜,用于会聚待测波前;A converging lens for converging the wavefront to be measured; 微透镜阵列,用于对所述会聚透镜会聚所述待测波前所形成的光斑进行分割,所述微透镜阵列包括多个微透镜单元;A microlens array, configured to divide the light spot formed by converging the wavefront to be measured by the converging lens, and the microlens array includes a plurality of microlens units; CCD探测器,用于接收所述微透镜阵列对光斑分割后形成的光斑阵列信息,所述微透镜阵列与所述CCD探测器的距离等于所述微透镜单元焦距;The CCD detector is used to receive the light spot array information formed after the microlens array divides the light spot, and the distance between the microlens array and the CCD detector is equal to the focal length of the microlens unit; 所述微透镜阵列位于与所述会聚透镜的焦点距离为离焦量fdefcous处;所述离焦量为fdefcous=r·n·f,n为微透镜阵列中一个微透镜单元所对应的CCD探测器的像素数,f为微透镜单元的焦距,r表示等效子孔径的光斑占据的微透镜单元个数。The microlens array is located at the defocus amount f defcous with the focal distance of the converging lens ; The number of pixels of the CCD detector, f is the focal length of the microlens unit, and r represents the number of microlens units occupied by the light spot of the equivalent sub-aperture. 2.根据权利要求1所述的波前探测装置,其特征在于,还包括光学匹配系统,所述光学匹配系设置于会聚透镜输入端,用于将待测波前匹配至所述会聚透镜。2 . The wavefront detection device according to claim 1 , further comprising an optical matching system, the optical matching system is arranged at the input end of the converging lens, and is used to match the wavefront to be measured to the converging lens. 3 . 3.根据权利要求1所述的波前探测装置,其特征在于,还包括处理模块,所述处理模块用于将所述光斑阵列信息重组以得到等效子孔径图像,通过等效子孔径图像计算出被测波前的质心偏移量后,利用重构矩阵计算待测波前的各阶Zernike像差系数,以得到待测波前的相位分布。3. The wavefront detection device according to claim 1, further comprising a processing module configured to reorganize the spot array information to obtain an equivalent sub-aperture image, through the equivalent sub-aperture image After calculating the centroid offset of the measured wavefront, the reconstruction matrix is used to calculate the Zernike aberration coefficients of each order of the measured wavefront to obtain the phase distribution of the measured wavefront. 4.根据权利要求3所述的波前探测装置,其特征在于,4. The wavefront detecting device according to claim 3, characterized in that, 所述处理模块通过下列算法计算待测波前的各阶Zernike像差系数:Described processing module calculates each order Zernike aberration coefficient of wavefront to be measured by following algorithm: P1:将理想平面波输入波前探测装置,重组等效子孔径图像之后计算各子孔径内质心位置S0x,S0yP1: Input the ideal plane wave into the wavefront detection device, calculate the centroid position S 0x , S 0y in each sub-aperture after recombining the equivalent sub-aperture image; P2:假设待测波前能够由前k阶Zernike像差完全表示,依次产生前k阶Zernike像差作为波前探测装置的输入,将波前探测装置接收的光斑阵列信息重组为等效子孔径图像,计算每个子孔径内的质心位置和相对于平面波入时的质心偏移量ΔSkx(n)=Skx(n)-S0x(n),ΔSky(n)=Sky(n)-S0y(n);P2: Assuming that the wavefront to be measured can be fully represented by the first k-order Zernike aberrations, the first k-order Zernike aberrations are sequentially generated as the input of the wavefront detection device, and the information of the spot array received by the wavefront detection device is reorganized into an equivalent sub-aperture Image, calculate the position of the centroid in each sub-aperture and the offset of the centroid relative to the plane wave entrance ΔS kx (n)=S kx (n)-S 0x (n), ΔS ky (n)=S ky (n) -S 0y (n); P3:将步骤P2中得到的各阶Zernike像差的质心偏移量按照式(1)的形式排列,得到复原矩阵D2n×kP3: arrange the centroid offsets of Zernike aberrations of each order obtained in step P2 according to the form of formula (1), and obtain the restoration matrix D 2n×k ; P4:计算复原矩阵D2n×k的广义逆矩阵,得到重构矩阵D+P4: Calculate the generalized inverse matrix of the restoration matrix D 2n×k to obtain the reconstruction matrix D + ; P5:当待测波前入射到波前探测装置时,将光斑阵列信息重组子孔径图像并计算质心偏移量,得到向量P5: When the wavefront to be measured is incident on the wavefront detection device, reorganize the spot array information into the sub-aperture image and calculate the centroid offset to obtain the vector G=[ΔSx(1),ΔSy(1),ΔSx(2),ΔSy(2),…ΔSx(n),ΔSy(n)]T (2)G=[ΔS x (1), ΔS y (1), ΔS x (2), ΔS y (2),...ΔS x (n), ΔS y (n)] T (2) P6:待测波前中包含的各阶Zernike像差系数可以通过A=D+·G求得。P6: The Zernike aberration coefficients of each order included in the wavefront to be measured can be obtained by A=D + ·G. 5.根据权利要求1所述的波前探测装置,其特征在于,所述微透镜单元的F数小于所述会聚透镜的F数。5. The wavefront detecting device according to claim 1, characterized in that, the F-number of the microlens unit is smaller than the F-number of the converging lens. 6.根据权利要求1所述的波前探测装置,其特征在于,所述微透镜单元的孔径为所述CCD探测器像素尺寸的整数倍。6. The wavefront detection device according to claim 1, wherein the aperture of the microlens unit is an integer multiple of the pixel size of the CCD detector. 7.根据权利要求1所述的波前探测装置,其特征在于,所述微透镜阵列中的各微透镜单元的焦距相等,所述微透镜单元的填充因子大于99%,透过率大于99%。7. The wavefront detection device according to claim 1, wherein the focal lengths of each microlens unit in the microlens array are equal, the fill factor of the microlens unit is greater than 99%, and the transmittance is greater than 99%. %. 8.一种基于离焦型光场相机的波前探测方法,包括:8. A wavefront detection method based on a defocused light field camera, comprising: 利用会聚透镜会聚待测波前;Use a converging lens to converge the wavefront to be measured; 利用微透镜阵列对所述会聚透镜会聚待测波前所形成的光斑进行分割并形成光斑阵列,所述微透镜阵列包括多个微透镜单元;Using a microlens array to divide the light spot formed by the converging lens to converge the wavefront to be measured to form a light spot array, the microlens array includes a plurality of microlens units; 利用CCD探测器,将所述CCD探测器的所述微透镜阵列放置于所述微透镜阵列的焦平面处,以接收所述光斑阵列光信号;Using a CCD detector, placing the microlens array of the CCD detector at the focal plane of the microlens array to receive the spot array light signal; 所述会聚透镜与所述透镜阵列的离焦量为fdefcous=r·n·f,n为微透镜阵列中一个微透镜单元所对应的CCD探测器的像素数,f为微透镜单元的焦距,r表示等效子孔径的光斑占据的微透镜单元个数。The defocus of described converging lens and described lens array is f defcous =r n f, n is the pixel number of the corresponding CCD detector of a microlens unit in the microlens array, and f is the focal length of microlens unit , r represents the number of microlens units occupied by the light spot of the equivalent sub-aperture. 9.根据权利要求8所述的波前探测方法,其特征在于,还包括:9. The wavefront detection method according to claim 8, further comprising: 通过所述CCD探测器接收所述光斑阵列的光信号,并重组以得到等效子孔径图像,通过等效子孔径图像计算出待测波前的质心偏移量后,利用重构矩阵计算待测波前的各阶Zernike像差系数,以得到待测波前的相位分布。The optical signal of the spot array is received by the CCD detector, and recombined to obtain an equivalent sub-aperture image. After calculating the centroid offset of the wavefront to be measured through the equivalent sub-aperture image, the reconstruction matrix is used to calculate the The Zernike aberration coefficients of each order of the wavefront are measured to obtain the phase distribution of the wavefront to be measured. 10.根据权利要求9所述的波前探测方法,其特征在于,还包括:10. The wavefront detection method according to claim 9, further comprising: 利用重构矩阵计算待测波前的各阶Zernike像差系数,以得到待测波前的相位分布,具体包括子步骤:Use the reconstruction matrix to calculate the Zernike aberration coefficients of each order of the wavefront to be measured to obtain the phase distribution of the wavefront to be measured, which specifically includes sub-steps: P1:将理想平面波输入离焦型光场相机,并重组以得到等效子孔径图像,计算各子孔径内质心位置S0x,S0yP1: Input the ideal plane wave into the defocused light field camera, and recombine to obtain the equivalent sub-aperture image, and calculate the centroid position S 0x , S 0y in each sub-aperture; P2:假设待测波前能够由前k阶Zernike像差完全表示,依次产生前k阶Zernike像差作为离焦型光场相机的输入,将CCD探测器接收图像重组为等效子孔径图像,计算每个子孔径内的质心位置和相对于平面波入时的质心偏移量ΔSkx(n)=Skx(n)-S0x(n),ΔSky(n)=Sky(n)-S0y(n);P2: Assuming that the wavefront to be measured can be fully represented by the first k-order Zernike aberration, the first k-order Zernike aberration is sequentially generated as the input of the defocused light field camera, and the image received by the CCD detector is reorganized into an equivalent sub-aperture image, Calculate the centroid position in each sub-aperture and the centroid offset relative to the plane wave entry ΔS kx (n)=S kx (n)-S 0x (n), ΔS ky (n)=S ky (n)-S 0y (n); P3:将步骤(2)中得到的各阶Zernike像差的质心偏移量按照式(1)的形式排列,得到复原矩阵D2n×kP3: Arrange the centroid offsets of Zernike aberrations of each order obtained in step (2) according to the form of formula (1), and obtain the restoration matrix D 2n×k : P4:计算复原矩阵D的广义逆矩阵,得到重构矩阵D+P4: Calculate the generalized inverse matrix of the restoration matrix D to obtain the reconstruction matrix D + ; P5:当待测波前入射到离焦型光场相机时,将CCD探测器接收的图像重组子孔径图像并计算质心偏移量,得到向量P5: When the wavefront to be measured is incident on the defocused light field camera, the image received by the CCD detector is reorganized into the sub-aperture image and the centroid offset is calculated to obtain the vector G=[ΔSx(1),ΔSy(1),ΔSx(2),ΔSy(2),…ΔSx(n),ΔSy(n)]T (2);G=[ΔS x (1), ΔS y (1), ΔS x (2), ΔS y (2),...ΔS x (n), ΔS y (n)] T (2); P6:待测波前中包含的各阶Zernike像差系数可以通过A=D+·G求得。P6: The Zernike aberration coefficients of each order included in the wavefront to be measured can be obtained by A=D + ·G.
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