CN103235337B - Electrochemical seismic detector based on mechanical seal and packaging method thereof - Google Patents

Abstract

The invention discloses an electrochemical geophone based on mechanical sealing and a packaging method thereof. The electrochemical geophone includes: a fixed ring, a shell, an elastic film and an electrode sensitive core; the electrode sensitive core is placed in two Between the shells, and between the electrode sensitive core and the shell is sealed by a flexible sealing gasket; the elastic film is placed between each of the shells and the fixing ring to realize the sealing between the fixing ring and the shell, The housing and the fixing ring are fixed mechanically. After the electrode sensitive core is manufactured by MEMS processing technology, it is sealed in a small seal, and then the small seal is sealed in a large shell, and finally the package of the entire geophone is completed with screws. A soft pad is placed between all hard contact surfaces. When the screws are reinforced, the soft pad is deformed to achieve a mechanical seal.

Description

Electrochemical geophone based on mechanical seal and packaging method thereof

technical field

The invention relates to the technical field of seismic detection and sensor packaging, in particular to an electrochemical seismic geophone based on a mechanical seal and a packaging method thereof.

Background technique

The geophone is a kind of vibration sensor, which converts the measured vibration parameters (such as displacement, velocity, acceleration, etc.) into different signal forms (such as mechanical, electrical, optical signals, etc.) during the measurement process.

The electrochemical geophone uses the electrolyte solution containing iodine and potassium iodide as the inertial body, and its sensitive element is an electrode sensitive core containing two pairs of electrodes. Each pair of electrodes in the sensitive core is composed of an anode and a cathode, and the two pairs of electrodes are distributed in the form of anode-cathode-cathode-anode. The sensitive core and electrolyte are encapsulated in a shell made of plexiglass and rubber film. Under the action of the ground motion signal, the electrolyte and the electrode sensitive core produce relative motion, which changes the concentration distribution of the reaction ions near the two pairs of electrodes, resulting in faster electrochemical reaction rate of one pair of electrodes, and faster electrochemical reaction rate of the other pair of electrodes. The electrochemical reaction rate becomes slow or almost constant, so that the output current of one pair of electrodes becomes larger, and the output current of the other pair of electrodes becomes smaller or almost constant, by measuring the change of the output current difference between the two pairs of electrodes to detect seismic waves. Therefore, the electrochemical detector has the advantages of low noise, not easily affected by thermal stress, strong resistance to electromagnetic interference, high sensitivity, and simple installation and use.

The electrode sensitive core of the traditional electrochemical detector is sintered in a ceramic disc, and the ceramic disc is sealed in the plexiglass shell with liquid silicone rubber. Due to the fluidity of the liquid glue, the electrode sensitive core may be blocked during the packaging process. In addition, the liquid silicone rubber will absorb a large amount of iodine in the reaction solution after curing, which will cause the device sensitivity to gradually decrease or even fail.

Contents of the invention

In order to solve the above problems, the present invention proposes a mechanical seal-based electrochemical geophone and its packaging method. The basic principle is that a layer of silicone rubber cushion is placed between all components of the geophone. The mechanical pressure compresses the silicone rubber cushion to realize the sealing between the components of the geophone.

The invention discloses an electrochemical geophone based on a mechanical seal, which comprises: a fixed ring, a shell, an elastic film and an electrode sensitive core; the electrode sensitive core is placed between two of the shells, and the electrode The flexible sealing gasket is used to seal between the sensitive core and the shell; the elastic film is placed between each of the shells and the fixed ring, so as to realize the sealing between the fixed ring and the shell, and between the shell and the fixed ring Secured mechanically.

According to another aspect of the present invention, the present invention also discloses a method for packaging an electrochemical geophone based on a mechanical seal, which includes:

Step 1. Put two sealing gaskets in the grooves at the center of the inner surfaces of the two casings to obtain two identical casings with sealing gaskets;

Step 2, placing the encapsulated electrode sensitive core in the groove at the center of the inner surfaces of the two shells;

Step 3, respectively placing elastic membranes and fixing rings on the outer surfaces of the two shells in sequence;

Step 4, fastening the two casings and the two fixing rings together to complete the packaging of the electrochemical geophone.

The beneficial effects of the present invention are: (i) all parts of the geophone are assembled by mechanical sealing, so the assembly process is simple and efficient, and the sealing effect of the device is good; (ii) compared with the traditional packaging method, The mechanical sealing method does not use liquid glue in all assembly links. On the one hand, it avoids the influence of liquid glue on the sensitive core of the electrode during the packaging process, thereby improving the consistency of the detector. On the other hand, it avoids iodine in the reaction solution. Absorbed by liquid glue, thus ensuring the long-term effectiveness of the detector.

Description of drawings

Fig. 1 is the structural representation of electrochemical geophone among the present invention;

Fig. 2 is the fixed ring structural representation of electrochemical geophone among the present invention;

Fig. 3 is the shell structural representation of electrochemical geophone among the present invention;

Fig. 4 is the structure diagram of the sealing gasket between the electrode sensitive core and the shell after packaging in the present invention;

Fig. 5 is the elastic membrane structure schematic diagram of electrochemical geophone among the present invention;

Fig. 6 is a schematic diagram of the packaged electrode sensitive core structure of the electrochemical geophone in the present invention;

Fig. 7 is a structural schematic diagram of the sealing gasket used between the electrode sensitive core and the seal in the present invention;

Fig. 8 is a structural schematic diagram of the sealing member of the electrochemical geophone in the present invention;

Fig. 9 is a schematic diagram of the electrode sensitive core structure of the electrochemical geophone in the present invention.

Detailed ways

In order to make the object, technical solution and advantages of the present invention clearer, the present invention will be further described in detail below in conjunction with specific embodiments and with reference to the accompanying drawings.

The invention proposes a mechanical seal-based electrochemical geophone and a packaging method thereof.

Fig. 1 shows a schematic structural diagram of the electrochemical geophone based on mechanical seal in the present invention. As shown in Figure 1, the electrochemical geophone is symmetrical up and down, including: a fixed ring 1, a shell 2, an elastic film 3 and a packaged electrode sensitive core 4, wherein the fixed ring 1, the shell 2 and the elastic film 3 are all Divided into upper and lower parts with exactly the same structure.

Fig. 2 shows a schematic structural diagram of the above-mentioned fixed ring in the present invention. The fixed ring 1 is a hollow ring-shaped structure made of metal materials such as stainless steel or materials such as quartz or ceramics. There are recessed areas on its two symmetrical side walls to reserve space for adding external masses in the future; its upper surface ( Fig. 2 right) is a ring plane, the lower surface (Fig. 2 left) is made up of ring 5 and ring 6, and ring 5 is outer ring, is distributed with threaded hole 7, and ring 6 is inner ring, and its plane ratio The plane of the ring 5 is low, which reserves space for placing the elastic membrane 3 during assembly.

Fig. 3 shows a schematic structural diagram of the casing in the present invention. The shell 2 is made of chemically inert materials such as plexiglass or polytetrafluoroethylene, and in the middle of its upper surface (left in FIG. 3 ) is a disc 8 with a raised edge, which is used to accommodate the electrolyte; A circular ring 9 is used to place the elastic membrane 3; there is a fixed ring 10 outside the circular ring 9, and threaded holes 13 are distributed, and the screws pass through the threaded holes 7 of the upper and lower fixed rings 1, and the threaded holes 13 of the upper and lower shells 2 Finally, fix the retaining ring and the shell together. The protrusion between the disk 8 and the ring 9 and the protrusion between the ring 9 and the ring 10 limit the range of motion of the ring 16 of the elastic membrane 3 and provide positioning for placing the elastic membrane 3 . The lower surface of the housing 2 (right in FIG. 3 ) is in the shape of a disk, and has a plurality of recessed areas 14 on its side wall, with a through hole in the middle, and the screw passes through the threaded hole 7 of the fixing ring 1 and the recessed area. The through hole of 14 and the threaded hole of the external base fix the geophone on the external base; there is a groove 11 at the center of the lower surface, the groove is square, and there is a circular groove in the center for placing the sealing Gasket 15 , the sealing gasket 15 is used to ensure the sealing between the packaged electrode sensitive core 4 and the shell 2 . The groove 11 on the lower surface has a groove 12 extending to the outside, which is used to lead out the electrode leads.

Fig. 4 shows a schematic structural diagram of the sealing gasket used between the packaged electrode sensitive core and the shell in the present invention. The sealing gasket 15 is made of materials such as silicon rubber or nitrile rubber. 3 right) to match the depth, inner and outer diameters.

Fig. 5 shows a schematic structural view of the elastic membrane in the present invention. The elastic membrane 3 is made of a chemically inert material such as silicon rubber or nitrile rubber and has good elasticity. There is a circular ring 16 on the outermost side of its upper surface (left in FIG. 5 ), which is fixed to the circular ring 9 and the outer shell 2. The circular ring 6 of the ring 1 is in contact with each other, and the circular ring 16 is deformed by mechanical pressure during assembly, so as to realize the sealing between the fixed ring 1 and the housing 2 . There is an outwardly protruding curved surface ring 17 inside the ring 16 to accommodate the electrolyte; there is a disc 18 in the center, which is reserved for adding an external mass in the future. The thickness of the elastic film 3 is about 2 mm, and its lower surface (right in FIG. 5 ) is sunken inwards to accommodate the electrolyte, and the functions of its various parts are the same as those of the corresponding parts on the upper surface.

Fig. 6 shows a schematic structural diagram of the encapsulated electrode sensitive core in the present invention. The packaged electrode sensitive core 4 is composed of two sealing gaskets 19 , two sealing members 20 and one electrode sensitive core 21 . During assembly, the electrode sensitive core 21 ( FIG. 9 ) is placed between two sealing gaskets 19 ( FIG. 7 ), and then two seals 20 ( FIG. 8 ) are respectively sleeved on the outer peripheries of the two sealing gaskets 19 . ), tighten the screws in the threaded holes on both sides of the upper and lower seals 20, and the packaged electrode sensitive core 4 can be obtained. It can be seen from the assembly process that the tightness between the electrode sensitive core 21 and the upper and lower seals 20 can be ensured by compressing the sealing gasket 19 .

Fig. 7 shows a schematic structural view of the sealing gasket used between the electrode sensitive core and the sealing member in the present invention. The sealing gasket 19 is made of materials such as silicon rubber or nitrile rubber, and its shape is circular, and the size and thickness of its inner and outer diameters are respectively the same as those of the ring 24 and the ring 25 at the center of the lower surface of the seal 20. (Figure 8 right) match.

Fig. 8 shows a schematic structural view of the sealing member of the present invention. The seal 20 is made of chemically inert and elastic materials such as plexiglass or polytetrafluoroethylene. There are threaded holes 23 on both sides of its upper surface (left in FIG. 8 ), and there is a protrusion in the center of the upper surface. The circular ring 22 is used to match the annular groove (right in FIG. 3 ) in the center of the lower surface of the housing 2, and the hole in the center of the circular ring 22 is the flow path of the electrolyte. There are threaded holes 23 on both sides of the lower surface (FIG. 8 right) of the sealing member 20, and a ring 24 in the center, whose inner and outer diameters match the gasket 19, and the hole in the center is the flow path of the electrolyte. There is a protruding ring 25 on the outside of the ring 24 for fixing the sealing gasket 19 .

Fig. 9 shows a schematic structural view of the electrode sensitive core in the present invention. The electrode sensitive core 21 is made of silicon material through micro-electro-mechanical process (MEMS). The electrode sensitive core 21 is a laminated structure consisting of 5 insulating layers and 4 electrode layers stacked alternately. The surfaces of the insulating layer and the electrode layer are covered with circular or square through holes, and the through holes are channels for the electrolyte to flow. The electrode layer is the core component of the geophone. When the geophone detects an earthquake signal, the electrode layer will output a current signal.

When assembling, first place two sealing gaskets 15 (Fig. 4) in the grooves 11 in the center of the lower surfaces of the two casings 2 (Fig. 3 right), to obtain two identical casings 2 with sealing gaskets . Then the packaged electrode sensitive core 4 ( FIG. 6 ) is placed in the groove 11 at the center of the lower surface of the two shells 2 , and the packaged electrode sensitive core 4 is stuck between the two shells 2 . Then place an elastic film 3 ( FIG. 5 ) and a fixed ring 1 ( FIG. 2 ) sequentially on the upper surfaces of the two shells 2 to form a symmetrical structure as shown in FIG. 1 . Finally, the long screws are passed through the threaded holes 7 of the upper and lower fixing rings 1 and the threaded holes 13 of the upper and lower shells 2, and the screws are fastened to complete the packaging of the entire electrochemical geophone. The sealing between the fixed ring 1 and the shell 2 is realized by compressing the elastic membrane 3 , and there is also a sealing gasket 15 between the shell 2 and the packaged electrode sensitive core 4 to ensure its tightness.

In the electrochemical geophone, the fixed ring 1 can be made of metal materials such as stainless steel or materials such as quartz or ceramics.

In the electrochemical geophone, the casing 2 and the sealing member 20 can be made of chemically inert materials such as plexiglass or polytetrafluoroethylene.

In the electrochemical geophone, the elastic membrane 3 , sealing washer 15 and sealing washer 19 can be made of chemically inert and elastic materials such as silicon rubber or nitrile rubber.

The electrode sensitive core 21 can also be sintered in ceramics by low-temperature ceramic sintering technology to complete the sealing.

The specific embodiments described above have further described the purpose, technical solutions and beneficial effects of the present invention in detail. It should be understood that the above descriptions are only specific embodiments of the present invention, and are not intended to limit the present invention. Within the spirit and principles of the present invention, any modifications, equivalent replacements, improvements, etc., shall be included in the protection scope of the present invention.

Claims (9)

1. based on a galvanochemistry seismoreceiver for mechanical seal, it comprises: retainer plate, shell, elastic membrane and electrode sensitive core; Described electrode sensitive core is placed between two described shells, and is sealed by flexible sealing packing ring between described electrode sensitive core and shell; Described elastic membrane is placed between each described shell and retainer plate, to realize the sealing between retainer plate and shell, fixes mechanically between described shell and described retainer plate; Described electrode sensitive core is the electrode sensitive core after encapsulation, and it comprises: electrode sensitive core and seal; Described electrode sensitive core is placed between two described seals, and realizes sealing by described flexible sealing packing ring between electrode sensitive core and described seal.

2. galvanochemistry seismoreceiver as claimed in claim 1, is characterized in that, have mutually corresponding threaded hole between described retainer plate and shell, it is for interfixing described retainer plate, shell.

3. galvanochemistry seismoreceiver as claimed in claim 2, is characterized in that,

Described retainer plate is a circular ring, and its lower surface is made up of two annulus, and inside it, the plane of annulus is lower than outer annular;

Described shell is disc-shaped structure, has the disk of edge protuberance, have an annulus, have a set collar outside described annulus, have projection between described annulus and set collar outside described disk in the middle of its upper surface; Its lower surface center position has groove, for placing the electrode sensitive core after encapsulation;

Described elastic membrane outermost is an annulus, is the curved surface annulus of outwardly convex inside it, is a disk in the middle of this curved surface annulus;

Wherein, described electrode sensitive core is placed on the groove internal fixtion at the lower surface center of two described shells, and two described upper surface of outer cover are placed with described elastic membrane respectively, and the outermost annulus of described elastic membrane is placed on the annulus of described upper surface of outer cover; Two described retainer plates are individually fixed in the described upper surface of outer cover that placed described elastic membrane, and the outermost annulus of described elastic membrane is placed on the inner side annulus of described retainer plate, and its curved surface annulus is protruding from the hollow space of described retainer plate; Disk on curved surface annulus in described elastic membrane, disk and described shell forms the container holding electrolytic solution jointly.

4. galvanochemistry seismoreceiver as claimed in claim 3, it is characterized in that, in the central recess of described shell lower surface, there is a circle shape groove, this circle shape groove for placing described flexible sealing packing ring, with realize encapsulate after sensitive electrode core and shell between sealing.

5. galvanochemistry seismoreceiver as claimed in claim 3, it is characterized in that, the central recess of described shell lower surface has outward extending groove, goes between for extraction electrode.

6. galvanochemistry seismoreceiver as claimed in claim 1, is characterized in that, there is protruding annulus at described seal upper surface center, the groove match of itself and described shell lower surface corresponding position; The lower surface corresponding positions of described seal is equipped with toroidal cavity, for placing packing washer; Described electrode sensitive die package is between the seal that two have packing washer.

7. galvanochemistry seismoreceiver as claimed in claim 1, it is characterized in that, described retainer plate is made up of metal, quartz or pottery; Shell is made up of inert material; Elastic membrane and packing washer are made up of inert elastomeric materials.

8. galvanochemistry seismoreceiver as claimed in claim 1, it is characterized in that, described seal center has through hole; Described electrode sensitive core stackedly to form by multilayer dielectric layer is alternate with electrode layer, and its surface has multiple through hole; Wherein, the through hole at described seal center and the through hole of described electrode sensitive core surfaces are electrolyte flow channel.

9., based on a method for packing for the galvanochemistry seismoreceiver of mechanical seal, it comprises:

Step 1, two packing washers are placed on two shells the RC groove of inside surface in, obtain the shell of two identical band packing washers;

Step 2, by encapsulation after electrode sensitive core be placed in the RC groove of inside surface of described two shells;

Step 3, on the outside surface of two shells, place elastic membrane and retainer plate successively respectively;

Step 4, two shells and two retainer plates to be tightened together, complete the encapsulation of galvanochemistry seismoreceiver.