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CN115425507A - Distributed gain high-power all-fiber laser resonant cavity - Google Patents

Distributed gain high-power all-fiber laser resonant cavity Download PDF

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CN115425507A
CN115425507A CN202211205667.6A CN202211205667A CN115425507A CN 115425507 A CN115425507 A CN 115425507A CN 202211205667 A CN202211205667 A CN 202211205667A CN 115425507 A CN115425507 A CN 115425507A
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CN115425507B (en
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赵保银
赵卫
吴银花
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Xian Technological University
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    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01SDEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/05Construction or shape of optical resonators; Accommodation of active medium therein; Shape of active medium
    • H01S3/06Construction or shape of active medium
    • H01S3/063Waveguide lasers, i.e. whereby the dimensions of the waveguide are of the order of the light wavelength
    • H01S3/067Fibre lasers
    • H01S3/0675Resonators including a grating structure, e.g. distributed Bragg reflectors [DBR] or distributed feedback [DFB] fibre lasers
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01SDEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/09Processes or apparatus for excitation, e.g. pumping
    • H01S3/091Processes or apparatus for excitation, e.g. pumping using optical pumping
    • H01S3/094Processes or apparatus for excitation, e.g. pumping using optical pumping by coherent light
    • H01S3/094042Processes or apparatus for excitation, e.g. pumping using optical pumping by coherent light of a fibre laser
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01SDEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/10Controlling the intensity, frequency, phase, polarisation or direction of the emitted radiation, e.g. switching, gating, modulating or demodulating
    • H01S3/13Stabilisation of laser output parameters, e.g. frequency or amplitude
    • H01S3/1305Feedback control systems

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  • Electromagnetism (AREA)
  • Engineering & Computer Science (AREA)
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Abstract

The invention relates to a distributed gain high-power all-fiber laser resonant cavity. The adopted technical scheme is as follows: the system comprises a high-power all-fiber laser resonant cavity array and a multi-core fiber beam combiner which are connected; the laser resonant cavity arrays are the same, and the output optical fibers of the shared multi-core optical fiber beam combiner are used as output end resonant cavity mirrors; the input end of the multi-core optical fiber combiner is separated into a plurality of input tail fibers corresponding to fiber cores of output optical fibers of the multi-core optical fiber combiner, and the input tail of the multi-core optical fiber combiner and the laser output optical fibers of the laser resonant cavity array have matched fiber core mode field parameters; and the output optical fiber of the multi-core beam combiner is provided with a laser feedback element. The invention can greatly improve the pumping light power bearing capacity of the high-power all-fiber laser resonant cavity and effectively reduce the heat management difficulty of the high-power all-fiber laser, thereby greatly improving the output power level of the high-power all-fiber laser under the condition of the development process level of the existing high-power laser fiber material and device.

Description

一种分布式增益的大功率全光纤激光谐振腔A high-power all-fiber laser resonator with distributed gain

技术领域technical field

本发明涉及激光技术领域,尤其是涉及一种分布式增益的大功率全光纤激光谐振腔。The invention relates to the field of laser technology, in particular to a high-power all-fiber laser resonator with distributed gain.

背景技术Background technique

大功率全光纤激光器同时具备光束质量好、电光效率高、免调试和维护、激光柔性输出、体积小、重量轻、使用寿命长等诸多优点,已逐步在工业加工、国防军事等应用领域替代原有化学、气体和普通固体激光器,实现广泛应用。近年来,大功率激光加工等应用技术的快速发展,如:激光切割、焊接等激光工业加工速率不断提升,对更高功率水平的大功率全光纤激光器提出了更加迫切的需求。High-power all-fiber lasers have many advantages, such as good beam quality, high electro-optic efficiency, free from debugging and maintenance, flexible laser output, small size, light weight, long service life, etc., and have gradually replaced original lasers in industrial processing, national defense and military applications. There are chemical, gas and general solid-state lasers for a wide range of applications. In recent years, the rapid development of high-power laser processing and other application technologies, such as: laser cutting, welding and other laser industrial processing speeds have been continuously improved, and there is a more urgent demand for high-power all-fiber lasers with higher power levels.

大功率全光纤激光器使用大模场增益光纤和光纤光栅、大功率光纤耦合半导体激光器和泵浦耦合器等核心光纤器件,一般采用大功率全光纤激光谐振腔产生千瓦级高光束质量光纤激光,再通过大功率全光纤激光谐振腔实现光纤激光功率的放大输出。为提升输出功率水平,需要增加泵浦功率,这使大功率全光纤激光器的核心光纤器件集中承载更高功率的泵浦光、激光和激光增益产生的热。因此,现有集成技术水平的提升直接依赖于大功率全光纤激光器的核心光纤器件性能。但因为核心光纤器件的研制工艺水平难以满足输出功率水平的大幅度提升的需求,导致集成技术瓶颈显现。近几年,大功率全光纤激光器的输出功率水平未见明显增长。High-power all-fiber lasers use core fiber devices such as large-mode field gain fibers and fiber gratings, high-power fiber-coupled semiconductor lasers, and pump couplers. Generally, high-power all-fiber laser resonators are used to generate kilowatt-level high-beam quality fiber lasers, and then The amplified output of fiber laser power is realized through a high-power all-fiber laser resonator. In order to increase the output power level, it is necessary to increase the pump power, which makes the core fiber device of the high-power all-fiber laser concentratedly bear the heat generated by the higher power pump light, laser and laser gain. Therefore, the improvement of the existing integration technology level directly depends on the performance of the core fiber device of the high-power all-fiber laser. However, because the development process level of the core optical fiber device is difficult to meet the demand for a substantial increase in the output power level, the bottleneck of the integration technology appears. In recent years, the output power level of high-power all-fiber lasers has not increased significantly.

发明内容Contents of the invention

本发明的目的在于提供一种分布式增益的大功率全光纤激光谐振腔,以解决现有大功率全光纤激光器的输出功率水平提升所面临的瓶颈问题。The purpose of the present invention is to provide a high-power all-fiber laser resonator with distributed gain, so as to solve the bottleneck problem faced by the existing high-power all-fiber laser in increasing the output power level.

为实现上述目的,本发明所采取的技术方案为:In order to achieve the above object, the technical scheme adopted in the present invention is:

一种分布式增益的大功率全光纤激光谐振腔,包括相接的大功率全光纤激光谐振腔阵列和多芯光纤合束器;A high-power all-fiber laser resonator with distributed gain, including a connected high-power all-fiber laser resonator array and a multi-core fiber combiner;

所述的大功率全光纤激光谐振腔阵列具有完全相同的器件、集成技术参数和工艺,其共用多芯光纤合束器的输出光纤作为输出端谐振腔镜;The high-power all-fiber laser resonator array has exactly the same device, integrated technical parameters and process, and it shares the output fiber of the multi-core fiber combiner as the output resonator mirror;

所述多芯光纤合束器的输入端分离为与其输出光纤的纤芯对应的多根输入尾纤,多芯光纤合束器的输入尾纤与大功率全光纤激光谐振腔阵列的激光输出光纤具有相匹配的纤芯模场参数;The input end of the multi-core fiber combiner is separated into a plurality of input pigtails corresponding to the core of the output fiber, the input pigtail of the multi-core fiber combiner and the laser output fiber of the high-power all-fiber laser resonator array With matching core mode field parameters;

所述的多芯光束合束器的输出光纤上设置有激光反馈元件。The output fiber of the multi-core beam combiner is provided with a laser feedback element.

进一步地,所述的激光反馈元件为在多芯光束合束器的输出光纤的输出端头安装激光准直镜和部分反射平面镜。Further, the laser feedback element is to install a laser collimator mirror and a partially reflective plane mirror at the output end of the output fiber of the multi-core beam combiner.

进一步地,所述的激光反馈元件为在多芯光束合束器的输出光纤纤芯刻写光纤光栅。Further, the laser feedback element is a fiber grating written on the output fiber core of the multi-core beam combiner.

进一步地,所述的多芯光纤合束器的输出光纤为非掺杂增益离子的多芯光纤,其纤芯直径表示为dcore,满足dcore≤30μm,纤芯间距表示为Dcore,相邻纤芯间存在的间隙(Dcore-dcore)≤20μm。Further, the output fiber of the multi-core fiber combiner is a multi-core fiber without doped gain ions, and its core diameter is expressed as dcore, which satisfies dcore≤30 μm, and the core spacing is expressed as Dcore, adjacent cores The gap between them (Dcore-dcore)≤20μm.

与现有技术相比,本发明的优点是:Compared with prior art, the advantage of the present invention is:

1)本发明使用多芯光纤合束器实现大功率全光纤激光谐振腔的阵列分布式增益,有效降低了大模场光纤光栅、大模场增益光纤、大功率光纤泵浦耦合器等核心光纤器件的激光损伤风险,使用大功率全光纤激光谐振腔即可获得高光束质量的大功率光纤激光。1) The present invention uses a multi-core fiber combiner to realize the array distributed gain of a high-power all-fiber laser resonator, effectively reducing the number of core fibers such as large-mode-field fiber gratings, large-mode-field gain fibers, and high-power fiber pump couplers. The risk of laser damage to the device can be obtained by using a high-power all-fiber laser resonator to obtain a high-power fiber laser with high beam quality.

2)本发明使用阵列分布式的大功率全光纤激光谐振腔,实现了大功率泵浦光的分散分布,大大提升了大功率全光纤激光谐振腔的泵浦光功率承载能力。2) The present invention uses an array-distributed high-power all-fiber laser resonator to realize the dispersed distribution of high-power pump light, and greatly improves the pump light power carrying capacity of the high-power all-fiber laser resonator.

3)基于本发明的大功率全光纤激光谐振腔在工作时,激光增益产生的热量分散分布于大功率全光纤激光谐振腔阵列,有效降低了大功率全光纤激光器的热管理难度。3) When the high-power all-fiber laser resonator based on the present invention is working, the heat generated by laser gain is dispersed and distributed in the high-power all-fiber laser resonator array, which effectively reduces the difficulty of thermal management of the high-power all-fiber laser.

4)通过优化多芯光束合束器和大功率全光纤激光谐振腔阵列的集成参数和工艺,有望在现有大功率激光光纤材料和器件的研制工艺水平条件下,基于本发明即可获得接近衍射极限的数万瓦光纤激光输出。4) By optimizing the integration parameters and process of the multi-core beam combiner and the high-power all-fiber laser resonator array, it is expected that under the conditions of the existing high-power laser fiber material and device development process level, based on the present invention, close Diffraction-limited tens of kilowatts of fiber laser output.

5)与现有大功率全光纤激光器普遍采用大功率全光纤激光谐振腔+大功率全光纤激光放大器的MOPA结构相比,基于本发明的大功率全光纤激光器仅包含一级大功率全光纤激光谐振腔,在与激光工业加工等激光应用系统集成时的控制难度降低,系统兼容性更高。5) Compared with the MOPA structure of high-power all-fiber laser resonator + high-power all-fiber laser amplifier commonly used in existing high-power all-fiber lasers, the high-power all-fiber laser based on the present invention only includes one level of high-power all-fiber laser Resonant cavity, when integrated with laser application systems such as laser industrial processing, the control difficulty is reduced, and the system compatibility is higher.

6)激光反馈元件选用的两种结构,均可用于本发明的输出端谐振腔镜,获得比现有大功率全光纤激光谐振腔的输出腔镜更高的输出激光功率承载能力。其中,由激光准直镜和部分反射平面镜所组成的激光反馈元件与多芯光束合束器的输出光纤是分离的,使制作、安装、维护和更换升级简单易操作;直接在多芯光束合束器的输出光纤上刻写光纤光栅形成的激光反馈元件,与大功率全光纤激光谐振腔阵列和多芯光纤合束器共同形成一体化的大功率全光纤激光谐振腔,获得柔性输出的大功率光纤激光,易与激光加工等设备集成。6) The two structures selected for the laser feedback element can be used in the resonant cavity mirror at the output end of the present invention to obtain a higher output laser power carrying capacity than the output cavity mirror of the existing high-power all-fiber laser resonant cavity. Among them, the laser feedback element composed of a laser collimator and a partially reflective plane mirror is separated from the output fiber of the multi-core beam combiner, which makes the production, installation, maintenance, replacement and upgrade simple and easy to operate; directly in the multi-core beam combiner The laser feedback element formed by writing fiber gratings on the output fiber of the beamer, forms an integrated high-power all-fiber laser resonator together with the high-power all-fiber laser resonator array and the multi-core fiber combiner, and obtains high-power flexible output Fiber laser, easy to integrate with laser processing and other equipment.

附图说明Description of drawings

图1为本发明的结构原理图。Fig. 1 is the structure schematic diagram of the present invention.

附图标记:1-大功率全光纤激光谐振腔阵列,2-多芯光纤合束器,3-大功率全光纤激光谐振腔阵列的激光输出光纤,4-多芯光纤合束器的输入尾纤,5-多芯光束合束器的输出光纤。Reference signs: 1-high-power all-fiber laser resonator array, 2-multi-core fiber combiner, 3-laser output fiber of high-power all-fiber laser resonator array, 4-input tail of multi-core fiber combiner Fiber, the output fiber of the 5-multicore beam combiner.

具体实施方式detailed description

下面将结合实施例和附图,对本实施例中的技术方案进行清楚、完整地描述。The technical solutions in this embodiment will be clearly and completely described below in conjunction with the embodiments and accompanying drawings.

实施例:参见图1,本发明提供的一种分布式增益的大功率全光纤激光谐振腔,包括大功率全光纤激光谐振腔阵列1和多芯光纤合束器2。所述的多芯光纤合束器2的输出光纤为非掺杂增益离子的多芯光纤,其纤芯直径dcore≤30μm,纤芯间距表示为Dcore,则相邻纤芯间存在的间隙(Dcore-dcore)≤20μm。所述的多芯光束合束器输出光纤5安装有对激光波长反射率为R的激光反馈元件,所述的激光反馈元件可以是在输出光纤5端头安装激光准直镜和部分反射平面镜,或直接在多芯光束合束器输出光纤5纤芯刻写的光纤光栅,两种结构中的激光反馈元件的反射率R≤90%,两种结构均可以使输出光纤同时具备激光输出和反馈功能。所述多芯光纤合束器2的输入端分离为与多芯光束合束器输出光纤5的纤芯对应的多根输入尾纤4,输入尾纤4与所述的大功率全光纤激光谐振腔阵列的激光输出光纤3具有相同的纤芯模场参数。所述全光纤激光谐振腔阵列1完全相同,具有完全相同的光纤器件、集成技术参数和工艺,高反端谐振腔镜与多芯光纤合束器输出光纤5的激光反馈元件具有相同的激光反射谱中心,通过共用多芯光纤合束器输出光纤5作为输出端谐振腔镜,阵列单元FL1-N的输出功率可通过调整泵浦光功率进行独立调节。Embodiment: Referring to FIG. 1 , a high-power all-fiber laser resonator with distributed gain provided by the present invention includes a high-power all-fiber laser resonator array 1 and a multi-core fiber combiner 2 . The output fiber of the described multi-core fiber combiner 2 is a multi-core fiber of non-doped gain ions, its core diameter dcore≤30 μm, and the core spacing is expressed as Dcore, and the gap between adjacent cores (Dcore -dcore)≤20μm. The output fiber 5 of the multi-core beam combiner is equipped with a laser feedback element with a reflectivity of R to the laser wavelength, and the laser feedback element can be a laser collimator and a partially reflective plane mirror installed at the end of the output fiber 5, Or directly write the fiber grating on the 5th core of the output fiber of the multi-core beam combiner. The reflectivity of the laser feedback element in the two structures is R≤90%. Both structures can make the output fiber have both laser output and feedback functions. . The input end of the multi-core optical fiber combiner 2 is separated into a plurality of input pigtails 4 corresponding to the cores of the output optical fibers 5 of the multi-core optical fiber combiner, and the input pigtails 4 resonate with the high-power all-fiber laser The laser output fibers 3 of the cavity array have the same core mode field parameters. The all-fiber laser resonator array 1 is identical, has the same optical fiber devices, integrated technical parameters and processes, and the high-inverse resonator mirror and the laser feedback element of the output fiber 5 of the multi-core fiber combiner have the same laser reflection In the center of the spectrum, the output power of the array unit FL1-N can be independently adjusted by adjusting the pump light power by sharing the output fiber 5 of the multi-core fiber combiner as the output resonant cavity mirror.

本发明的工作原理:参见图1,大功率全光纤激光谐振腔阵列1产生的多路光纤激光通过与其输出光纤3对应的多芯光纤合束器的输入尾纤4耦合进入输出光纤5中,因输出光纤5的多个纤芯光场存在强耦合而重组并形成一束稳定传输的光纤激光。输出光纤5安装的激光反馈元件将其中传输的光纤激光的一部分输出,另一部分反射后反向传输并经多芯光纤合束器2分束后注入对应的大功率全光纤激光谐振腔阵列1,形成光纤激光谐振。Working principle of the present invention: referring to Fig. 1, the multi-channel fiber laser produced by the high-power all-fiber laser resonator array 1 is coupled into the output fiber 5 through the input pigtail 4 of the multi-core fiber combiner corresponding to the output fiber 3, Due to the strong coupling of multiple core optical fields of the output fiber 5, they are recombined and form a stable transmission fiber laser. The laser feedback element installed in the output fiber 5 outputs a part of the fiber laser transmitted therein, and the other part is reflected and then transmitted in reverse and injected into the corresponding high-power all-fiber laser resonator array 1 after beam splitting by the multi-core fiber combiner 2, Fiber laser resonance is formed.

制备时,将输出光纤的一端捆束、熔融拉锥并切割后,与多芯光纤的多个纤芯对应熔接形成多芯光纤合束器;或在拉制多芯光纤时将多芯光纤预制棒的一端按照纤芯分布分离,进行光纤拉制即可一体化地拉制出一端尾纤分离的多芯光纤合束器。During preparation, one end of the output fiber is bundled, fused and tapered and cut, and then fused with multiple cores of the multi-core fiber to form a multi-core fiber combiner; or the multi-core fiber is prefabricated when drawing the multi-core fiber One end of the rod is separated according to the distribution of the fiber cores, and the multi-core fiber combiner with one end of the tail fiber separated can be integrally drawn by drawing the optical fiber.

本实施例中,全光纤激光谐振腔阵列1具有较好的相干性;多芯光纤具有接近衍射极限的同相位超模。因此,大功率全光纤激光谐振腔阵列1可通过多芯光纤的输出光纤5获得一束大功率、高光束质量的全光纤激光束。例如,多芯光纤5具有37个纤芯,全光纤激光谐振腔阵列单元FL1-N均可产生功率为1000瓦的光纤激光,则大功率全光纤激光谐振腔阵列1经多芯光纤合束器2可获得约3.7万瓦的高光束质量光纤激光。In this embodiment, the all-fiber laser resonator array 1 has better coherence; the multi-core optical fiber has the same-phase supermode close to the diffraction limit. Therefore, the high-power all-fiber laser cavity array 1 can obtain a high-power, high-beam-quality all-fiber laser beam through the output fiber 5 of the multi-core fiber. For example, the multi-core optical fiber 5 has 37 cores, and the all-fiber laser resonator array unit FL1-N can generate a fiber laser with a power of 1000 watts, then the high-power all-fiber laser resonator array 1 passes through the multi-core fiber combiner 2 A fiber laser with high beam quality of about 37,000 watts can be obtained.

以上所述仅是本发明的优选实施方式,应当指出,对于本技术领域的普通技术人员来说,在不脱离本发明技术原理的前提下,还可以做出若干改进和替换,这些改进和替换也应视为本发明的保护范围。The above is only a preferred embodiment of the present invention, it should be pointed out that for those of ordinary skill in the art, without departing from the technical principle of the present invention, some improvements and replacements can also be made, these improvements and replacements It should also be regarded as the protection scope of the present invention.

Claims (4)

1.一种分布式增益的大功率全光纤激光谐振腔,其特征在于:包括相接的大功率全光纤激光谐振腔阵列(1)和多芯光纤合束器(2);1. A high-power all-fiber laser resonator of distributed gain, characterized in that: comprise a connected high-power all-fiber laser resonator array (1) and a multi-core fiber combiner (2); 所述的大功率全光纤激光谐振腔阵列(1)完全相同,所共用多芯光纤合束器的输出光纤(5)作为输出端谐振腔镜;The high-power all-fiber laser resonator array (1) is identical, and the output fiber (5) of the shared multi-core fiber combiner is used as the output resonator mirror; 所述多芯光纤合束器(2)的输入端分离为与其输出光纤的纤芯对应的多根输入尾纤(4),多芯光纤合束器的输入尾纤(4)与大功率全光纤激光谐振腔阵列的激光输出光纤(3)具有相匹配的纤芯模场参数;The input end of the multi-core fiber combiner (2) is separated into a plurality of input pigtails (4) corresponding to the cores of the output optical fibers, and the input pigtails (4) of the multi-core fiber combiner are connected to the high-power full The laser output fiber (3) of the fiber laser resonator array has matched core mode field parameters; 所述多芯光束合束器的输出光纤(5)上设置有激光反馈元件。A laser feedback element is arranged on the output optical fiber (5) of the multi-core beam combiner. 2.如权利要求1所述的分布式增益的大功率全光纤激光谐振腔,其特征在于:所述的激光反馈元件为在多芯光束合束器的输出光纤(5)的输出端头安装的激光准直镜和部分反射平面镜,反射率R≤90%。2. the high-power all-fiber laser resonator of distributed gain as claimed in claim 1 is characterized in that: described laser feedback element is installed at the output end of the output optical fiber (5) of multi-core beam combiner Advanced laser collimator and partially reflective plane mirror, reflectivity R≤90%. 3.如权利要求1所述的分布式增益的大功率全光纤激光谐振腔,其特征在于:所述的激光反馈元件为在多芯光束合束器的输出光纤(5)纤芯刻写的光纤光栅,反射率R≤90%。3. the high-power all-fiber laser resonator of distributed gain as claimed in claim 1 is characterized in that: described laser feedback element is the optical fiber written in the output optical fiber (5) fiber core of multi-core beam combiner Grating, reflectivity R≤90%. 4.如权利要求2或3所述的分布式增益的大功率全光纤激光谐振腔,其特征在于:所述的多芯光纤合束器的输出光纤(4)为非掺杂增益离子的多芯光纤,其纤芯直径表示为dcore,满足dcore≤30μm,纤芯间距表示为Dcore,相邻纤芯间存在的间隙(Dcore-dcore)≤20μm。4. the high-power all-fiber laser resonator of distributed gain as claimed in claim 2 or 3, is characterized in that: the output optical fiber (4) of described multi-core optical fiber beam combiner is the multiple of non-doped gain ion Core fiber, the core diameter is expressed as dcore, satisfying dcore≤30μm, the distance between cores is expressed as Dcore, and the gap between adjacent cores (Dcore-dcore)≤20μm.
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