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KR100517008B1 - 파릴렌 중합체 층의 형성 방법 및 파릴렌 중합체 층을 포함하는 다층 구조물 - Google Patents

파릴렌 중합체 층의 형성 방법 및 파릴렌 중합체 층을 포함하는 다층 구조물 Download PDF

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Publication number
KR100517008B1
KR100517008B1 KR10-1999-7003622A KR19997003622A KR100517008B1 KR 100517008 B1 KR100517008 B1 KR 100517008B1 KR 19997003622 A KR19997003622 A KR 19997003622A KR 100517008 B1 KR100517008 B1 KR 100517008B1
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KR
South Korea
Prior art keywords
delete delete
layer
parylene
parylene polymer
polymer layer
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Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
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KR10-1999-7003622A
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English (en)
Korean (ko)
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KR20000052803A (ko
Inventor
워리존
올슨로저에이.
비치윌리암에프.
Original Assignee
스페셜티 코팅 시스템즈, 인코포레이티드
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Publication of KR20000052803A publication Critical patent/KR20000052803A/ko
Application granted granted Critical
Publication of KR100517008B1 publication Critical patent/KR100517008B1/ko
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Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D—PROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D1/00—Processes for applying liquids or other fluent materials
    • B05D1/60—Deposition of organic layers from vapour phase
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D—PROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D7/00—Processes, other than flocking, specially adapted for applying liquids or other fluent materials to particular surfaces or for applying particular liquids or other fluent materials
    • B05D7/24—Processes, other than flocking, specially adapted for applying liquids or other fluent materials to particular surfaces or for applying particular liquids or other fluent materials for applying particular liquids or other fluent materials
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D—PROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D1/00—Processes for applying liquids or other fluent materials
    • B05D1/62—Plasma-deposition of organic layers
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D—PROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D3/00—Pretreatment of surfaces to which liquids or other fluent materials are to be applied; After-treatment of applied coatings, e.g. intermediate treating of an applied coating preparatory to subsequent applications of liquids or other fluent materials
    • B05D3/14—Pretreatment of surfaces to which liquids or other fluent materials are to be applied; After-treatment of applied coatings, e.g. intermediate treating of an applied coating preparatory to subsequent applications of liquids or other fluent materials by electrical means
    • B05D3/141—Plasma treatment
    • B05D3/145—After-treatment

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  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Plasma & Fusion (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Wood Science & Technology (AREA)
  • Physical Vapour Deposition (AREA)
  • Formation Of Insulating Films (AREA)
  • Polyoxymethylene Polymers And Polymers With Carbon-To-Carbon Bonds (AREA)
  • Chemical Vapour Deposition (AREA)
  • Treatments Of Macromolecular Shaped Articles (AREA)
  • Laminated Bodies (AREA)
KR10-1999-7003622A 1996-10-25 1997-10-24 파릴렌 중합체 층의 형성 방법 및 파릴렌 중합체 층을 포함하는 다층 구조물 Expired - Fee Related KR100517008B1 (ko)

Applications Claiming Priority (6)

Application Number Priority Date Filing Date Title
US73831996A 1996-10-25 1996-10-25
US8/738,319 1996-10-25
US92893197A 1997-09-12 1997-09-12
US08/738,319 1997-09-12
US8/928,931 1997-09-12
US08/928,931 1997-09-12

Publications (2)

Publication Number Publication Date
KR20000052803A KR20000052803A (ko) 2000-08-25
KR100517008B1 true KR100517008B1 (ko) 2005-09-27

Family

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Family Applications (1)

Application Number Title Priority Date Filing Date
KR10-1999-7003622A Expired - Fee Related KR100517008B1 (ko) 1996-10-25 1997-10-24 파릴렌 중합체 층의 형성 방법 및 파릴렌 중합체 층을 포함하는 다층 구조물

Country Status (7)

Country Link
EP (1) EP0934127B1 (fr)
JP (1) JP2002505803A (fr)
KR (1) KR100517008B1 (fr)
CN (1) CN1089281C (fr)
AU (1) AU5087198A (fr)
DE (1) DE69707005T2 (fr)
WO (1) WO1998018570A1 (fr)

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US6558315B1 (en) 2000-03-15 2003-05-06 Ams Research Corporation Parylene-coated components for inflatable penile prosthesis
US6729527B2 (en) 2001-01-30 2004-05-04 Kulicke & Soffa Investments, Inc. Bonding tool with polymer coating
RU2218364C2 (ru) * 2001-07-27 2003-12-10 Федеральное государственное унитарное предприятие "Научно-исследовательский физико-химический институт им. Л.Я. Карпова" ПЛЕНКА ИЗ ПОЛИ ( α,α,α′,α′- ТЕТРАФТОРПАРАКСИЛИЛЕНА), СПОСОБ ЕЕ ПОЛУЧЕНИЯ И ПОЛУПРОВОДНИКОВЫЙ ПРИБОР С ЕЕ ИСПОЛЬЗОВАНИЕМ
RU2218365C2 (ru) * 2001-07-27 2003-12-10 Федеральное государственное унитарное предприятие "Научно-исследовательский физико-химический институт им. Л.Я.Карпова" Пористая пленка из полипараксилилена и его замещенных, способ ее получения и полупроводниковый прибор с её использованием
KR100422570B1 (ko) * 2001-10-20 2004-03-11 최재영 방열시트용 수지 조성물 및 이를 이용한 방열시트의제조방법
KR100468319B1 (ko) * 2002-03-12 2005-01-27 (주)누리셀 파릴렌 고분자막 코팅 장치
KR20040051097A (ko) * 2002-12-11 2004-06-18 패럴린코리아(주) 패럴린(parylene) 고분자 코팅의 접착력을 증진시키는전처리 방법 및 이를 응용한 장치
RU2268900C2 (ru) * 2003-11-13 2006-01-27 Федеральное государственное унитарное предприятие "Научно-исследовательский физико-химический институт им. Л.Я. Карпова" СПОСОБ ПОЛУЧЕНИЯ ПОРИСТОЙ ПЛЕНКИ ИЗ ПОЛИ (α, α, α', α'-ТЕТРАФТОРПАРАКСИЛИЛЕНА) И ПОРИСТАЯ ПЛЕНКА
WO2006063081A2 (fr) * 2004-12-07 2006-06-15 M-Flex Multi-Fineline Electronix, Inc. Circuit miniature et composants d'inducteurs, et procédés de fabrication associés
ATE360224T1 (de) * 2004-12-16 2007-05-15 Ecole D Ingenieurs Arc Verfahren zur herstellung einer vorrichtung mit einer kunststoffmembran und so erhaltene vorrichtung
JP4831561B2 (ja) * 2005-05-16 2011-12-07 独立行政法人産業技術総合研究所 有機無機ハイブリッド薄膜及びその製造方法
US20090142227A1 (en) * 2005-07-01 2009-06-04 Manfred Fuchs Parylene Coating and Method for the Production Thereof
DE102005040648A1 (de) 2005-08-27 2007-03-01 Leybold Vacuum Gmbh Beschichtete Gegenstände
US20070148390A1 (en) * 2005-12-27 2007-06-28 Specialty Coating Systems, Inc. Fluorinated coatings
RU2539694C2 (ru) * 2008-04-16 2015-01-27 ЭйчЗедОу, ИНК. Процесс нанесения покрытия на металл и электронное устройство для применения в морских условиях и других окружающих средах
GB2479154A (en) * 2010-03-30 2011-10-05 Camvac Ltd Electron flux coated substrate
CN102140666A (zh) * 2011-01-14 2011-08-03 成都图南电子有限公司 一种粘接钕铁硼磁体涂覆方法及其制备得到的多层结构
NL2015934B1 (en) * 2015-12-10 2017-07-03 Veco B V Filter for brewing beverages.
US20190184686A1 (en) * 2016-08-22 2019-06-20 Corning Incorporated Articles of controllably bonded sheets and methods for making same
KR102095363B1 (ko) * 2017-11-20 2020-04-02 주식회사 아이오에프 자가 세척이 가능한 파릴렌 증착 장비
DE102019200208A1 (de) 2019-01-10 2020-07-16 Carl Zeiss Smt Gmbh Verfahren zum in situ dynamischen Schutz einer Oberfläche und optische Anordnung
KR102643650B1 (ko) * 2021-10-14 2024-03-05 연세대학교 산학협력단 단열 특성이 향상된 실리카 에어로젤 기반 단열 재료, 이의 제조방법 및 이를 구비하는 구조물과 기계장치
CN114204133B (zh) * 2021-12-09 2024-07-12 惠州亿纬锂能股份有限公司 一种解决卷绕式电芯膨胀的方法
CN116445882A (zh) * 2023-03-03 2023-07-18 深圳市信维通信股份有限公司 挠性覆铜板及其制备方法

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US3901994A (en) * 1974-02-04 1975-08-26 Rca Corp Metallized video disc having a dielectric coating thereon
US4500562A (en) * 1983-03-02 1985-02-19 The United States Of America As Represented By The United States Department Of Energy Di-p-xylylene polymer and method for making the same
JPS6391925A (ja) * 1986-10-03 1988-04-22 Canon Inc 電子放出素子
US5154978A (en) * 1989-03-22 1992-10-13 Tdk Corporation Highly corrosion-resistant rare-earth-iron magnets
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RU2002519C1 (ru) * 1991-04-01 1993-11-15 Анатолий Михайлович Красовский Способ получени покрытий из поли-N-ксилилена
JP2797905B2 (ja) * 1993-06-25 1998-09-17 凸版印刷株式会社 有機薄膜ｅｌ素子
JPH0971672A (ja) * 1995-09-08 1997-03-18 Fuji Electric Co Ltd ポリパラキシリレン薄膜の改質方法
US5538758A (en) * 1995-10-27 1996-07-23 Specialty Coating Systems, Inc. Method and apparatus for the deposition of parylene AF4 onto semiconductor wafers

Also Published As

Publication number Publication date
DE69707005D1 (de) 2001-10-31
AU5087198A (en) 1998-05-22
KR20000052803A (ko) 2000-08-25
CN1244143A (zh) 2000-02-09
CN1089281C (zh) 2002-08-21
WO1998018570A1 (fr) 1998-05-07
EP0934127A1 (fr) 1999-08-11
JP2002505803A (ja) 2002-02-19
DE69707005T2 (de) 2002-07-04
EP0934127B1 (fr) 2001-09-26

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