KR101506850B1 - 판재의 반송 장치 및 판재의 반송 방법 - Google Patents
판재의 반송 장치 및 판재의 반송 방법 Download PDFInfo
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- KR101506850B1 KR101506850B1 KR1020147002716A KR20147002716A KR101506850B1 KR 101506850 B1 KR101506850 B1 KR 101506850B1 KR 1020147002716 A KR1020147002716 A KR 1020147002716A KR 20147002716 A KR20147002716 A KR 20147002716A KR 101506850 B1 KR101506850 B1 KR 101506850B1
- Authority
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- South Korea
- Prior art keywords
- belt
- fluid
- conveying
- plate glass
- sheet material
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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- 239000000463 material Substances 0.000 title claims abstract description 33
- 238000000034 method Methods 0.000 title description 3
- 239000012530 fluid Substances 0.000 claims abstract description 64
- 238000003825 pressing Methods 0.000 claims abstract description 19
- 239000002184 metal Substances 0.000 claims description 17
- 239000007788 liquid Substances 0.000 claims description 7
- 239000005357 flat glass Substances 0.000 description 84
- 238000012986 modification Methods 0.000 description 6
- 230000004048 modification Effects 0.000 description 6
- 238000012546 transfer Methods 0.000 description 4
- 230000003749 cleanliness Effects 0.000 description 3
- 238000009434 installation Methods 0.000 description 3
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 3
- 238000004140 cleaning Methods 0.000 description 2
- 239000010408 film Substances 0.000 description 2
- 239000004973 liquid crystal related substance Substances 0.000 description 2
- 238000003754 machining Methods 0.000 description 2
- 230000000452 restraining effect Effects 0.000 description 2
- 229920000742 Cotton Polymers 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 238000007599 discharging Methods 0.000 description 1
- 238000006073 displacement reaction Methods 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 238000002347 injection Methods 0.000 description 1
- 239000007924 injection Substances 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
- 238000011144 upstream manufacturing Methods 0.000 description 1
Images
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G15/00—Conveyors having endless load-conveying surfaces, i.e. belts and like continuous members, to which tractive effort is transmitted by means other than endless driving elements of similar configuration
- B65G15/30—Belts or like endless load-carriers
- B65G15/58—Belts or like endless load-carriers with means for holding or retaining the loads in fixed position, e.g. magnetic
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67092—Apparatus for mechanical treatment
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
- B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
- B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
- B65G49/063—Transporting devices for sheet glass
- B65G49/064—Transporting devices for sheet glass in a horizontal position
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
- B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
- B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
- B65G49/063—Transporting devices for sheet glass
- B65G49/064—Transporting devices for sheet glass in a horizontal position
- B65G49/065—Transporting devices for sheet glass in a horizontal position supported partially or completely on fluid cushions, e.g. a gas cushion
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
- H01L21/67706—Mechanical details, e.g. roller, belt
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G2249/00—Aspects relating to conveying systems for the manufacture of fragile sheets
- B65G2249/04—Arrangements of vacuum systems or suction cups
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G2249/00—Aspects relating to conveying systems for the manufacture of fragile sheets
- B65G2249/04—Arrangements of vacuum systems or suction cups
- B65G2249/045—Details of suction cups suction cups
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Mechanical Engineering (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
- Re-Forming, After-Treatment, Cutting And Transporting Of Glass Products (AREA)
Abstract
Description
도 2는 도 1의 Ⅱ-Ⅱ 방향의 단면도이다.
도 3은 도 1의 Ⅲ-Ⅲ 방향의 단면도이다.
도 4는 본 발명의 제 2 실시예에 따른 반송 장치의 평면도이다.
도 5는 도 4의 Ⅴ-Ⅴ 방향의 단면도이다.
도 6은 본 발명의 제 3 실시예에 따른 반송 장치의 종단면도이다.
도 7은 제 3 실시예의 변형예 1에 따른 반송 장치의 종단면도이다.
도 8은 제 3 실시예의 변형예 2에 따른 반송 장치의 종단면도이다.
도 9는 제 3 실시예의 변형예 3에 따른 반송 장치의 종단면도이다.
도 10은 제 3 실시예의 변형예 4에 따른 반송 장치의 종단면도이다.
20: 반송부
21: 무단 벨트(벨트)
22: 벨트 받침 부재
23: 하단 가이드 부재
24: 상단 가이드 부재
26: 고무 벨트부
27: 금속 벨트부
28: 유체 배출 홈
29: 벨트 받침면
31: 중앙 가이드 부재
35: 가이드 홈
40: 가압부
60: 유체 가이드 장치
100,200,300: 반송 장치
101: 판유리(판재)
102: 정밀면
103: 보통면
104: 가압 유체
Claims (7)
- 반송부와 가압부를 갖는 송출 장치를 구비하며,
상기 반송부는 세워진 판재의 한 쪽 면에 접촉하여 상기 판재를 반송 방향으로 송출하는 벨트를 갖고,
상기 가압부는 세워진 상기 판재의 다른쪽 면에 유체에 의한 수직 방향의 압력을 가하여 상기 판재를 상기 벨트를 향하여 가압할 수 있도록 구성되어 있으며,
세워진 상기 판재를 상기 반송부의 상기 벨트와 상기 가압부의 상기 유체 사이에 놓여진 형태로 유지하면서 반송할 수 있도록 구성되어 있는 것을 특징으로 하는 판재의 반송 장치. - 제 1 항에 있어서, 상기 유체는 액체이며, 상기 벨트의 외부 표면에는 상단에서 하단까지 상하 방향으로 연장되는 유체 배출 홈이 진행 방향으로 정해진 간격을 두고 복수 배치되어 있는 것을 특징으로 하는 판재의 반송 장치.
- 제 1 항에 있어서, 상기 반송부는 상기 판재의 반송로에 평행하게 배치된 벨트 받침 부재를 갖고, 상기 벨트 받침 부재는 상기 벨트의 내부 표면이 슬라이딩하는 평면 모양의 벨트 받침면을 갖는 것을 특징으로 하는 판재의 반송 장치.
- 제 1 항에 있어서, 상기 벨트는 외부 표면 측에 위치하는 고무 벨트부와 내부 표면 측에 위치하는 금속 벨트부를 갖고, 상기 금속 벨트부의 하단은 상기 고무 벨트부의 하단보다 아래쪽에 위치하며, 상기 반송부는 상기 금속 벨트부의 상기 하단을 지지하는 하단 가이드 부재를 갖는 것을 특징으로 하는 판재의 반송 장치.
- 제 1 항에 있어서, 상기 벨트의 내부 표면에는 전면에 걸쳐 가이드 홈이 형성되어 있고, 상기 반송부는 상기 가이드 홈에 삽입되는 중앙 가이드 부재를 더 갖는 것을 특징으로 하는 판재의 반송 장치.
- 제 1 항에 있어서, 상기 판재의 양면에 유체에 의한 압력을 가하여 좌우 흔들림을 억제하는 유체 가이드 장치를 더 구비하며, 상기 유체 가이드 장치는 상기 송출 장치와 다른 상하 방향 위치에 배치되어 있는 것을 특징으로 하는 판재의 반송 장치.
- 세워진 판재의 한 쪽 면에 상기 판재를 반송 방향으로 송출하는 벨트를 접촉시킴과 동시에 상기 판재의 다른쪽 면에 유체에 의한 압력을 가하여 상기 판재가 상기 벨트를 향하도록 누르고, 상기 판재는 상기 벨트와 상기 유체 사이에 놓여진 형태로 유지되며, 상기 판재를 띄운 상태로 반송하는 것을 특징으로 하는 판재의 이송 방법.
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| PCT/JP2011/004569 WO2013024502A1 (ja) | 2011-08-12 | 2011-08-12 | 板材の搬送装置及び板材の搬送方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| KR20140031390A KR20140031390A (ko) | 2014-03-12 |
| KR101506850B1 true KR101506850B1 (ko) | 2015-03-27 |
Family
ID=47714848
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| KR1020147002716A Active KR101506850B1 (ko) | 2011-08-12 | 2011-08-12 | 판재의 반송 장치 및 판재의 반송 방법 |
Country Status (5)
| Country | Link |
|---|---|
| US (1) | US9114935B2 (ko) |
| JP (1) | JP5745631B2 (ko) |
| KR (1) | KR101506850B1 (ko) |
| CN (1) | CN103648934B (ko) |
| WO (1) | WO2013024502A1 (ko) |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| ES2729526T3 (es) * | 2016-01-07 | 2019-11-04 | Fagor Arrasate S Coop | Dispositivo de transporte de piezas y método para transportar piezas |
| CN107698136B (zh) * | 2017-10-18 | 2019-11-26 | 台玻安徽玻璃有限公司 | 一种浮法玻璃成型后处理机构 |
| CN107759069B (zh) * | 2017-10-18 | 2019-11-26 | 台玻安徽玻璃有限公司 | 一种安全性能高的浮法玻璃运输装置 |
| CN115402793A (zh) * | 2022-08-22 | 2022-11-29 | 潍坊兴明光电科技有限公司 | 玻璃传送装置和玻璃传送系统 |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2008117889A (ja) | 2006-11-02 | 2008-05-22 | Dainippon Screen Mfg Co Ltd | 基板処理装置 |
Family Cites Families (17)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4790921A (en) * | 1984-10-12 | 1988-12-13 | Hewlett-Packard Company | Planetary substrate carrier method and apparatus |
| JPH04242954A (ja) * | 1991-01-08 | 1992-08-31 | Fujitsu Ltd | ウェーハチャック |
| JPH0536658A (ja) * | 1991-07-30 | 1993-02-12 | Tokyo Electron Ltd | 基板洗浄・乾燥装置 |
| DE19649488A1 (de) * | 1996-11-29 | 1997-11-06 | Schott Glaswerke | Vorrichtung zur Handhabung von dünnen Glasscheiben |
| DE19942498B4 (de) * | 1999-09-06 | 2008-02-07 | Nsm Magnettechnik Gmbh & Co. Kg | Bandfördereinrichtung für den insbesondere hängenden Transport von Transportgütern mittels Unterdruck |
| JP2001085496A (ja) * | 1999-09-10 | 2001-03-30 | Daiichi Shisetsu Kogyo Kk | 板状部材の搬送装置 |
| JP2001213517A (ja) * | 1999-11-24 | 2001-08-07 | Daiichi Shisetsu Kogyo Kk | 板状部材の搬送装置 |
| JP4394797B2 (ja) * | 2000-02-23 | 2010-01-06 | 大日本印刷株式会社 | 基板搬送装置 |
| US7222727B2 (en) * | 2001-02-15 | 2007-05-29 | Integral Technologies, Inc. | Low cost food processing belts and other conveyances manufactured from conductive loaded resin-based materials |
| JP2002308423A (ja) | 2001-04-18 | 2002-10-23 | Corning Japan Kk | 板材搬送方法および板材搬送装置 |
| KR20040105325A (ko) * | 2003-06-05 | 2004-12-16 | 이동헌 | 판상부재의 반송장치 |
| KR101049926B1 (ko) * | 2004-02-18 | 2011-07-15 | 코닝 제팬 가부시끼 가이샤 | 판재의 종형 가공 라인 |
| JP4613800B2 (ja) * | 2004-12-01 | 2011-01-19 | 株式会社Ihi | 浮上装置および搬送装置 |
| JP4876640B2 (ja) * | 2006-03-09 | 2012-02-15 | セイコーエプソン株式会社 | ワーク搬送装置およびワーク搬送方法 |
| JP4896148B2 (ja) * | 2006-10-10 | 2012-03-14 | 株式会社日本設計工業 | 薄板状材料搬送装置 |
| JP4842370B2 (ja) * | 2007-03-07 | 2011-12-21 | 株式会社アルバック | 真空装置、基板搬送方法 |
| RU2527623C2 (ru) * | 2010-05-03 | 2014-09-10 | Инова Лисец Технологицентрум Гмбх | Устройство для перемещения плоских элементов |
-
2011
- 2011-08-12 US US14/238,269 patent/US9114935B2/en active Active
- 2011-08-12 JP JP2013528839A patent/JP5745631B2/ja active Active
- 2011-08-12 CN CN201180072306.2A patent/CN103648934B/zh not_active Expired - Fee Related
- 2011-08-12 WO PCT/JP2011/004569 patent/WO2013024502A1/ja active Application Filing
- 2011-08-12 KR KR1020147002716A patent/KR101506850B1/ko active Active
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2008117889A (ja) | 2006-11-02 | 2008-05-22 | Dainippon Screen Mfg Co Ltd | 基板処理装置 |
Also Published As
| Publication number | Publication date |
|---|---|
| KR20140031390A (ko) | 2014-03-12 |
| JP5745631B2 (ja) | 2015-07-08 |
| US9114935B2 (en) | 2015-08-25 |
| US20140216898A1 (en) | 2014-08-07 |
| CN103648934B (zh) | 2015-08-12 |
| WO2013024502A1 (ja) | 2013-02-21 |
| JPWO2013024502A1 (ja) | 2015-03-05 |
| CN103648934A (zh) | 2014-03-19 |
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