KR102445611B1 - A heater, a heater module, and a substrate processing apparatus - Google Patents

Abstract

The present invention relates to a heater, a heater module, and a substrate processing apparatus, wherein a heating part is installed to be spaced apart from a base of a process tube to minimize heat transfer to the base to improve thermal efficiency and uniformly heat a substrate.

Description

A heater, a heater module, and a substrate treatment apparatus TECHNICAL FIELD

The present invention relates to a heater, a heater module, and a substrate processing apparatus, and more particularly, a heat generating unit is installed to be spaced apart from a base of a process tube to minimize heat transfer in the base direction to improve thermal efficiency and uniformly heat a substrate It relates to a heater that can do this, a heater module, and a substrate processing apparatus.

An annealing apparatus is an apparatus in charge of an essential heat treatment step for a process such as crystallization and phase change with respect to a predetermined thin film deposited on a substrate such as a silicon wafer or glass.

The existing process tube is fastened to the base on which the boat is installed, and a heater may be installed on the base to heat the substrate.

Here, such a heater is installed such that the heating wire is inserted in the form of a meandering heating wire inside the base or a heating wire is inserted into a plate-shaped plate installed on the surface. Since heat transfer is performed even with a large base, there are problems in that the rate of temperature increase is lowered and energy is greatly wasted.

In addition, since the base heat-conducted from the heater is difficult to cool easily, the cooling rate is lowered, and the temperature of the base cannot be easily controlled artificially. There were problems in that it was not possible to uniformly control the temperature of the part or the edge part, and the temperature in the diagonal direction of the substrate.

The idea of the present invention is to solve these problems, and the heat generating part is installed to be spaced apart from the base of the process tube to reduce the heat capacity, to minimize heat transfer to the base to improve thermal efficiency, and to improve the temperature rise rate and cooling rate A heater, a heater module, and a substrate processing apparatus that increase production by shortening the process time by reducing is to provide. However, these problems are exemplary, and the scope of the present invention is not limited thereto.

A heater according to an aspect of the present invention for solving the above problems is a heater capable of heat-treating a substrate loaded on a boat, the heater comprising: a first non-heating part extending from a first position of a base of a process tube; and a heating part having one end electrically connected to the first non-heating part so as to be spaced apart from the base by a first separation distance.

Also, according to the present invention, the heater may further include a second non-heating part extending from the second position of the base of the process tube and connected to the other end of the heating part.

Also, according to the present invention, the first non-heating portion and the second non-heating portion may be formed in a vertical direction with respect to the base, and the heating portion may be formed in a direction parallel to the substrate or the base.

Also, according to the present invention, the heating part may be a heating rod having a shape including a straight line or a curved line.

Also, according to the present invention, the heating unit may be in a coiled form.

Further, according to the present invention, the first non-heating part and the heating part may be made of different types of metal.

Further, according to the present invention, the first non-heating part may be made of a conductive material having relatively low heat generation and electrical resistance, and the heating part may be made of a heat transfer material having relatively high heat generation and electrical resistance.

On the other hand, the heater module according to the spirit of the present invention for solving the above problems is a heater module installed at the base of the process tube to heat-treat the substrate loaded on the boat, and the heater module is, at least as a whole, before and after the base at least one first heater elongated in a first length in the direction, at least one second heater elongated in a second length in the left-right direction of the base as a whole, and elongated in a third length in a diagonal direction of the base as a whole It is made by selecting at least one third heater that becomes a third heater, a fourth heater that is formed short with a fourth length in the front-rear direction or left-right direction of the base, and any one or more of combinations thereof, the first heater, the second Any one of the heater, the third heater, and the fourth heater may include: a first non-heating part extending from a first position of the base of the process tube toward the substrate; and a heating part having one end electrically connected to the first non-heating part so as to be spaced apart from the base by a first separation distance.

Also, according to the present invention, the heater may further include a second non-heating part extending from the second position of the base of the process tube and connected to the other end of the heating part.

Also, according to the present invention, the first non-heating portion and the second non-heating portion may be formed in a vertical direction with respect to the base, and the heating portion may be formed in a direction parallel to the substrate or the base.

Further, according to the present invention, the first non-heating part may be made of a conductive material having relatively low heat generation and electrical resistance, and the heating part may be made of a heat transfer material having relatively high heat generation and electrical resistance.

On the other hand, the substrate processing apparatus according to the spirit of the present invention for solving the above problems is a substrate processing apparatus capable of heat-treating a substrate loaded on a boat, and a process tube having an accommodating space therein to accommodate the boat. ; a base on which the boat is installed and coupled to the process tube; and a heater installed on the base, wherein the heater includes: a first non-heating part extending from a first position of the base of the process tube toward the substrate; and a heating part having one end electrically connected to the first non-heating part so as to be spaced apart from the base by a first separation distance.

Also, according to the present invention, the heater may further include a second non-heating part extending from the second position of the base of the process tube and connected to the other end of the heating part.

Also, according to the present invention, the first non-heating portion and the second non-heating portion may be formed in a vertical direction with respect to the base, and the heating portion may be formed in a direction parallel to the substrate or the base.

In addition, according to the present invention, the base, the first base on which the boat is installed; and a second base installed to be spaced apart from the first base by a second separation distance and provided with a sealing member to seal the process tube.

In addition, according to the present invention, the heater includes at least one first heater elongated at least as a whole in a first length in the front-rear direction of the base, and at least one elongated at least one first heater generally elongated by a second length in the left-right direction of the base. a second heater, at least one third heater generally elongated by a third length in a diagonal direction of the base, a fourth heater formed short in a fourth length in the front-rear direction or left-right direction of the base, and combinations thereof Any one or more may be selected.

In addition, in the substrate processing apparatus according to the present invention, at least one capable of applying an individual control signal to at least one of the first heater, the second heater, the third heater, the fourth heater, and combinations thereof. may further include an individual control unit of

Also, the substrate processing apparatus according to the present invention may further include an integrated control unit capable of applying an integrated control signal to the individual control unit.

According to some embodiments of the present invention made as described above, by reducing the heat capacity of the heat generating part, improving thermal efficiency by minimizing heat transfer in the base direction, and shortening the process time by improving the temperature rise rate and cooling rate, the production amount is increased It has the effect of uniformly heating the substrate by enabling local control by arranging individually controlled heating units in a multi-zone form at various locations. Of course, the scope of the present invention is not limited by these effects.

1 is a perspective view illustrating a heater, a heater module, and a substrate processing apparatus according to some embodiments of the present disclosure;
FIG. 2 is an enlarged perspective view illustrating the heater of FIG. 1 and a heater module;
3 is a plan view illustrating the heater of FIG. 1 and a heater module;
4 is a cross-sectional view illustrating the heater of FIG. 1 and a heater module.
5 is a conceptual diagram illustrating a heater, a heater module, and a substrate processing apparatus according to some embodiments of the present disclosure;

Hereinafter, various embodiments of the present invention will be described in detail with reference to the accompanying drawings.

Examples of the present invention are provided to more completely explain the present invention to those of ordinary skill in the art, and the following examples may be modified in various other forms, and the scope of the present invention is as follows It is not limited to an Example. Rather, these embodiments are provided so as to more fully and complete the present disclosure, and to fully convey the spirit of the present invention to those skilled in the art. In addition, in the drawings, the thickness or size of each layer is exaggerated for convenience and clarity of description.

The terminology used herein is used to describe specific embodiments, not to limit the present invention. As used herein, the singular form may include the plural form unless the context clearly dictates otherwise. Also, as used herein, “comprise” and/or “comprising” refers to the presence of the recited shapes, numbers, steps, actions, members, elements, and/or groups of those specified. and does not exclude the presence or addition of one or more other shapes, numbers, movements, members, elements and/or groups.

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS Hereinafter, embodiments of the present invention will be described with reference to the drawings schematically illustrating ideal embodiments of the present invention. In the drawings, variations of the illustrated shape can be envisaged, for example depending on manufacturing technology and/or tolerances. Accordingly, embodiments of the inventive concept should not be construed as limited to the specific shape of the region shown in the present specification, but should include, for example, changes in shape caused by manufacturing.

In this specification, the substrate may be understood to include all substrates such as substrates, semiconductor substrates, and solar cell substrates used in display devices such as LEDs and LCDs, and is preferably used in flexible display devices. It can be understood to mean a flexible substrate that becomes However, it is not necessarily limited thereto.

In addition, in the present specification, the substrate processing process may be understood to include a deposition process, a heat treatment process, and the like, preferably forming a flexible substrate on a non-flexible substrate, forming a pattern on a flexible substrate , may be understood to mean a process such as separation of the flexible substrate. However, it is not necessarily limited thereto.

Hereinafter, the heater 30 , the heater module 40 , and the substrate processing apparatus 100 according to some embodiments of the present invention will be described in detail with reference to the drawings.

1 is an exploded perspective view illustrating a heater 30 , a heater module 40 , and a substrate processing apparatus 100 according to some embodiments of the present invention, and FIG. 2 is the heater 30 and the heater of FIG. 1 . It is an enlarged perspective view showing the module 40, FIG. 3 is a plan view showing the heater 30 and the heater module 40 of FIG. 1, and FIG. 4 is the heater 30 and the heater module 40 of FIG. It is a cross-sectional view showing

First, as shown in FIGS. 1 to 4, the heater 30 according to some embodiments of the present invention is a heater 30 capable of heat-treating the substrate 1 loaded on the boat 2, The heater 30 includes a first non-heating part 31 extending from a first position of the base 20 of the process tube 10 and a first separation distance D1 from the base 20 to minimize heat transfer. ), one end of which may include a heating part 33 electrically connected to the first non-heating part 31 so as to be spaced apart.

Alternatively, in the heater 30 according to some embodiments of the present invention, the heater 30 includes a first non-heating part 31 extending from a first position of the base 20 of the process tube 10 and, The heating part 33 and the process tube 10 having one end electrically connected to the first non-heating part 31 so as to be spaced apart from the base 20 by a first separation distance D1 to minimize heat transfer. ) extending from the second position of the base 20 and may include a second non-heating part 32 connected to the other end of the heating part 33 .

Here, the first separation distance D1 must be sufficiently secured to prevent heat energy generated from the heat generating part 33 from being transferred to the base 20 through heat transfer. That is, when the first separation distance D1 is too short, the heat energy generated from the heat generating part 33 may be too easily transferred to the base 20 by a method such as heat radiation or thermal convection, and conversely, the When the first separation distance D1 is too long, the substrate accommodating space capable of accommodating the substrate 1 is reduced, and thus productivity may decrease.

Therefore, it is preferable that the first separation distance D1 is 1 mm or more and 10 cm or more through repeated experiments and simulations. However, the first separation distance D1 is not necessarily limited thereto, and heat radiation, thermal convection, or heat conduction from the heat generating unit 33 to the base 20 in consideration of the standard of the substrate or the substrate processing environment, etc. Any separation distance of a numerical value that minimizes

For example, as shown in FIGS. 1 to 4 , the first non-heating part 31 and the second non-heating part 32 are formed in a long rod shape in a vertical direction with respect to the base 20, and the The heating part 33 may be formed in a long rod shape in a direction parallel to the substrate 1 or the base 20 .

Accordingly, as shown in FIG. 4 , the heater 30 may be formed in a “a” or “п” or “T” shape as a whole.

More specifically, for example, as shown in FIGS. 1 to 4 , the heating part 33 may be a straight heating rod. However, the present invention is not limited thereto, and the first non-heating part 31, the second non-heating part 32, and the heating part 33 may have an arc shape, a curved shape, a coil shape, or a combination of these three-dimensional and geometric shapes. Any shape and the like may be applied.

Also, for example, the first non-heating part 31 and the second non-heating part 32 may be made of the same material, and the heat generating part 33 may be made of a different type of metal.

More specifically, for example, the first non-heating part 31 and the second non-heating part 32 have relatively low heat generation and electric resistance, and nickel in consideration of the cushioning properties according to the expansion of the heat generating part 33 . It may be a conductive material such as (Ni), tungsten (W), or molybdenum (Mo), and the heating part 33 is a kanthal having relatively high heat generation and electrical resistance, and durability to high temperature; It may be a heat-conducting material such as super kanthal or nichrome.

In addition, for example, the first non-heating unit 31 , the second non-heating unit 32 , and the heat generating unit 33 may be provided with a protective layer 34 such as various oxides. However, it is not necessarily limited thereto.

Also, for example, the heating unit 33 may be in a coiled form for cushioning against thermal expansion. However, it is not necessarily limited thereto.

Therefore, the heating part 33 is installed to be spaced apart from the base 20 of the process tube 10 to minimize heat transfer in the direction of the base 20 so that heat transfer is completely achieved only in the direction of the substrate 1 . Because it can be induced, the heat efficiency of the equipment is improved, and the heating part 33, which is individually controlled so that heat transfer is sufficiently achieved even in the central part, the edge direction, and the corner direction of the substrate 1, is placed in a multi-zone form at various locations By disposing, the substrate 1 can be uniformly heated.

That is, by minimizing the heat capacity of the heating unit 33 to be heated to improve the temperature increase rate and cooling rate, thereby shortening the process time, it is possible to increase production, and by disposing the individually controlled heating unit 33 in various positions By enabling local control, it is possible to uniformly heat the substrate 1 .

On the other hand, as shown in FIGS. 1 to 4 , the heater module 40 according to some embodiments of the present invention is a process tube 10 to heat-treat the substrate 1 loaded on the boat 2 . As a heater module 40 installed on the base 20 of (30-1), at least one second heater 30-2 elongated by a second length L2 in the left and right direction of the base 20 as a whole, a third in the diagonal direction of the base 20 as a whole At least one third heater 30-3 formed to be long with a length L3, and a fourth heater 30-4 formed to be short with a fourth length L4 in the front-rear direction or left-right direction of the base 20. And it may be made by selecting any one or more of combinations thereof.

Therefore, the heater module 40 controls the temperature of each heater, for example, in the longitudinal direction and the width direction of the substrate 1, as well as the edge portion, the center portion, the heat uniformity of the diagonal direction can be improved. have.

More specifically, for example, as shown in FIGS. 1 to 4 , the first heater 30-1, the second heater 30-2, the third heater 30-3, and the second heater 30-1 The heater 30 of any one of the 4 heaters 30 - 4 includes a first non-heating part 31 extending from a first position of the base 20 of the process tube 10 in the direction of the substrate; The base 20 of the heat generating part 33 and the process tube 10, one end of which is electrically connected to the first non-heating part 31 so as to be spaced apart from the base 20 by the first separation distance D1. It may include a second non-heating part 32 extending from the second position of the heating part 33 and connected to the other end of the heating part 33 .

Here, for example, the first non-heating part 31 and the second non-heating part 32 are formed in a vertical direction with respect to the base 20 , and the heating part 33 is formed on the substrate or the base 20 . ) may be formed in a direction parallel to

In addition, as described above, the first non-heating part 31 may be made of a conductive material having relatively low heat generation and electric resistance, and the heat generating part 33 may be made of an electrothermal material having relatively high heat generation and electrical resistance. .

Therefore, it is possible to minimize heat transfer in the direction of the base 20 by using the heater module 40, and by arranging heaters in various positions, the length and width directions of the substrate 1, as well as the edge portion It is possible to improve the thermal uniformity of the central part and the diagonal direction.

On the other hand, as shown in FIGS. 1 to 4 , the substrate processing apparatus 100 according to some embodiments of the present invention heat-treats the substrate 1 loaded on the boat 2 to perform the substrate processing process. A substrate processing apparatus 100 capable of accommodating a process tube 10 having an accommodating space therein to accommodate the boat 2 , the boat 2 is installed, and the process tube 10 and It may include a base 20 to be fastened and a heater 30 installed on the base 20 .

Here, the base 20 may be provided with a sealing member (S) for sealing when fastened to the process tube (10).

In addition, for example, the heater 30 of the substrate processing apparatus 100 according to some embodiments of the present invention also extends from the first position of the base 20 of the process tube 10 in the direction of the substrate. The first non-heating part 31, the heating part 33 having one end electrically connected to the first non-heating part 31 so as to be spaced apart from the base 20 by the first separation distance D1, and the process The tube 10 may include a second non-heating part 32 extending from the second position of the base 20 and connected to the other end of the heating part.

In addition, the first non-heating part 31 and the second non-heating part 32 are formed in a vertical direction with respect to the base 20, and the heat generating part 33 is formed on the substrate 1 or the base ( 20) and may be formed in a parallel direction.

Meanwhile, as shown in FIGS. 1 to 4 , the base 20 of the substrate processing apparatus 100 according to some embodiments of the present invention includes a first base 20 - 1 on which the boat 2 is installed. ) and the second base 20- which is installed to be spaced apart from the first base 20-1 by a second separation distance D2, and a sealing member S is installed to seal the process tube 10. 2) may be included. Referring to FIG. 4 , the second separation between the first base 20-1 and the second base 20-2 is greater than the first separation distance D1 between the heating part 33 and the first base 20-1. The distance D2 may have a larger value. Since the second separation distance D2 is greater than the first separation distance D1, the heat transferred from the heat generating unit 33 to the first base 20-1 is higher than the heat transferred from the first base 20-1 to the second base. There may be less heat transferred to (20-2).

Here, as shown in FIGS. 1 to 4 , the leg portion 21 is formed between the first base 20-1 and the second base 20-2 to minimize the heat transfer area to the outside. can

In addition, the heater 30 of the substrate processing apparatus 100 according to some embodiments of the present invention, at least as a whole, is formed to be elongated with a first length L1 in the front-rear direction of the base 20 . 1 heater 30-1, at least one second heater 30-2 elongated with a second length L2 in the left and right direction of the base 20 as a whole, in a diagonal direction of the base 20 as a whole At least one third heater 30-3 formed to be long with a third length L3, and a fourth heater 30- formed to be short with a fourth length L4 in the front-rear direction or left-right direction of the base 20 4) and combinations thereof may be selected by selecting any one or more.

5 is a conceptual diagram illustrating a heater 30 , a heater module 40 , and a substrate processing apparatus 100 according to some embodiments of the present disclosure.

5 , in the substrate processing apparatus 100 according to some embodiments of the present invention, at least the first heater 30 - 1 , the second heater 30 - 2 , and the third heater (30-3), at least one individual control unit 50 capable of applying an individual control signal to any one of the fourth heater 30-4 and combinations thereof, and integrated control to the individual control unit 50 It may further include an integrated control unit 60 capable of applying a signal.

Here, the individual control signals of the individual controller 50 are the first heaters 30-1, the second heaters 30-2, the third heaters 30-3, and the fourth It is an individual control signal capable of controlling the heating temperature of any one of the heaters 30 - 4 , and the integrated control signal of the integrated control unit 60 is insufficient to uniformly heat the substrate 1 . It may be an integrated control signal that can increase the temperature of the heater and lower the temperature of the high part heater.

The integrated control unit 60 receives a temperature signal from a temperature sensor installed on the substrate 1 or the process tube 10 or the base 20, calculates control results by various calculation operations, and feeds them back to the final A control signal can be applied.

Therefore, as described above, it is possible to uniformly heat the substrate 1 using various types of heaters and control units that can individually or collectively control them, thereby improving the uniformity and precision of the product. can

Although the present invention has been described with reference to the embodiment shown in the drawings, which is only exemplary, those skilled in the art will understand that various modifications and equivalent other embodiments are possible therefrom. Therefore, the true technical protection scope of the present invention should be determined by the technical spirit of the appended claims.

1: substrate
2: Boat
10: process tube
20: base
20-1: first base
20-2: second base
D1: first separation distance
D2: second separation distance
21: leg
30: heater
31: first non-heating part
32: second non-heating unit
33: heating part
34: protective layer
30-1: first heater
30-2: second heater
30-3: third heater
30-4: fourth heater
40: heater module
50: individual control
60: integrated control
100: substrate processing device

Claims (18)

As a heater device installed in the process tube to heat-treat the substrate loaded on the boat,
The heater device includes a base and a heater installed on the base,
The base is
a first base provided to install a boat; and
a second base installed to be spaced apart from the first base by a second separation distance and provided with a sealing member to seal the process tube;
including,
The heater is
a first non-heating part extending from a first position of the first base; and
a heating part having one end electrically connected to the first non-heating part so as to be spaced apart from the first base by a first separation distance;
Including, a heater device. The method of claim 1,
The heater is
a second non-heating part extending from a second position of the first base of the process tube and connected to the other end of the heat generating part;
Further comprising, a heater device. 3. The method of claim 2,
The heater device, wherein the first non-heating part and the second non-heating part are formed in a vertical direction with respect to the first base, and the heat generating part is formed in a direction parallel to the substrate or the first base. The method of claim 1,
The heating unit is a heating bar of a shape including a straight line or a curved line, the heater device. The method of claim 1,
The heating unit is of a coiled (coiled) form, the heater device. The method of claim 1,
The first non-heating part and the heating part are made of different types of metal,
The first non-heating part is made of a conductive material having relatively low heat generation and electrical resistance,
The heating part is made of a heat transfer material having relatively high heat generation and electrical resistance, the heater device. The method of claim 1,
The value of the second separation distance is formed larger than the first separation distance, so that less heat is transferred from the first base to the second base than the heat transferred from the heat generating part to the first base, the heater device . As a heater module installed at the base of the process tube to heat-treat the substrate loaded on the boat,
The heater module is
at least one first heater generally formed with a first length in a front-rear direction of the base adjacent to a first side of the base and a second side opposite to the first side;
at least one second heater generally formed with a second length in a left-right direction of the base adjacent to a third side of the base and a fourth side opposite to the third side;
at least one third heater generally formed adjacent to the four corners of the base in a third length in a diagonal direction of the base; and
a fourth heater formed to have a fourth length shorter than the first length or the second length in a front-rear direction or a left-right direction of the base;
including,
Any one of the first heater, the second heater, the third heater, and the fourth heater,
a first non-heating part extending from a first position of the base of the process tube toward the substrate; and
a heating part having one end electrically connected to the first non-heating part so as to be spaced apart from the base by a first separation distance;
Including, a heater module. 9. The method of claim 8,
The heater is
a second non-heating part extending from a second position of the base of the process tube and connected to the other end of the heat generating part;
Further comprising, a heater module. 10. The method of claim 9,
The first non-heating part and the second non-heating part are formed in a vertical direction with respect to the base, and the heating part is formed in a direction parallel to the substrate or the base. 9. The method of claim 8,
The first non-heating part is made of a conductive material having relatively low heat generation and electrical resistance,
The heating part is made of a heat transfer material having relatively high heat generation and electrical resistance, a heater module. A substrate processing apparatus capable of heat-treating a substrate loaded on a boat, comprising:
a process tube having an accommodating space therein to accommodate the boat;
a base on which the boat is installed and coupled to the process tube; and
a heater installed on the base;
including,
The base is
a first base on which the boat is installed; and
a second base installed to be spaced apart from the first base by a second separation distance and provided with a sealing member to seal the process tube;
includes,
The heater is
a first non-heating part extending from a first position of the first base of the process tube toward the substrate; and
a heating part having one end electrically connected to the first non-heating part so as to be spaced apart from the first base by a first separation distance;
A substrate processing apparatus comprising a. 13. The method of claim 12,
The heater is
a second non-heating part extending from a second position of the first base of the process tube and connected to the other end of the heat generating part;
Further comprising a substrate processing apparatus. 14. The method of claim 13,
The substrate processing apparatus, wherein the first non-heating portion and the second non-heating portion are formed in a vertical direction with respect to the first base, and the heat generating portion is formed in a direction parallel to the substrate or the first base. 13. The method of claim 12,
The value of the second separation distance is greater than the first separation distance, so that less heat is transferred from the first base to the second base than the heat transferred from the heat generating unit to the first base. Device. 13. The method of claim 12,
The heater is
at least one first heater generally formed with a first length in a front-rear direction of the base adjacent to a first side of the base and a second side opposite to the first side;
at least one second heater generally formed with a second length in a left-right direction of the base adjacent to a third side of the base and a fourth side opposite to the third side;
at least one third heater elongated by a third length in a diagonal direction of the base adjacent to the four corners of the base as a whole; and
A fourth heater formed shorter than the first length or a fourth length shorter than the second length in the front-rear direction or left-right direction of the base
A substrate processing apparatus comprising a. 17. The method of claim 16,
at least one individual control unit capable of applying an individual control signal to at least one of the first heater, the second heater, the third heater, the fourth heater, and combinations thereof;
Further comprising a substrate processing apparatus. 18. The method of claim 17,
an integrated control unit capable of applying an integrated control signal to the individual control unit;
Further comprising a substrate processing apparatus.

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