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USD1098057S1 - Susceptor cover - Google Patents

Susceptor cover

Info

Publication number
USD1098057S1
USD1098057S1 US29/888,138 US202329888138F USD1098057S US D1098057 S1 USD1098057 S1 US D1098057S1 US 202329888138 F US202329888138 F US 202329888138F US D1098057 S USD1098057 S US D1098057S
Authority
US
United States
Prior art keywords
susceptor cover
susceptor
cover
view
elevational view
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
US29/888,138
Inventor
Kunihiko Suzuki
Takuto UMETSU
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nuflare Technology Inc
Original Assignee
Nuflare Technology Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nuflare Technology Inc filed Critical Nuflare Technology Inc
Assigned to NUFLARE TECHNOLOGY, INC. reassignment NUFLARE TECHNOLOGY, INC. ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). Assignors: SUZUKI, KUNIHIKO, UMETSU, TAKUTO
Application granted granted Critical
Publication of USD1098057S1 publication Critical patent/USD1098057S1/en
Active legal-status Critical Current
Anticipated expiration legal-status Critical

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Description

FIG. 1 is a perspective view of a susceptor cover showing our new design
FIG. 2 is a front elevational view thereof,
FIG. 3 is a rear elevational view thereof,
FIG. 4 is a left side elevational view thereof,
FIG. 5 is a right side elevational view thereof,
FIG. 6 is a top plan view thereof,
FIG. 7 is a bottom plan view thereof; and,
FIG. 8 is an enlarged partial cross-sectional view taken along line 8-8 in FIG. 2 .

Claims (1)

    CLAIM
  1. The ornamental design for a susceptor cover as shown and described.
US29/888,138 2022-10-20 2023-03-28 Susceptor cover Active USD1098057S1 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2022-022681D 2022-10-20

Publications (1)

Publication Number Publication Date
USD1098057S1 true USD1098057S1 (en) 2025-10-14

Family

ID=

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US20160133504A1 (en) * 2014-11-12 2016-05-12 Applied Materials, Inc. Susceptor design to reduce edge thermal peak
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US20160240398A1 (en) * 2015-02-12 2016-08-18 Hermes-Epitek Corporation Wafer Holder
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USD783922S1 (en) * 2014-12-08 2017-04-11 Entegris, Inc. Wafer support ring
US20170117228A1 (en) * 2015-10-27 2017-04-27 Siltronic Ag Susceptor for holding a semiconductor wafer having an orientation notch, a method for depositing a layer on a semiconductor wafer, and semiconductor wafer
USD796012S1 (en) * 2015-02-26 2017-08-29 Toyoda Gosei Co., Ltd. Gasket
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US20180155838A1 (en) * 2016-12-03 2018-06-07 Applied Materials, Inc. Process kit design for in-chamber heater and wafer rotating mechanism
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USD861757S1 (en) * 2015-12-28 2019-10-01 Ntn Corporation Inner ring for tapered roller bearing
USD870314S1 (en) * 2017-08-31 2019-12-17 Hitachi High-Technologies Corporation Electrode cover for a plasma processing apparatus
USD871609S1 (en) * 2017-08-31 2019-12-31 Hitachi High-Technologies Corporation Electrode plate peripheral ring for a plasma processing apparatus
USD876504S1 (en) * 2017-04-03 2020-02-25 Asm Ip Holding B.V. Exhaust flow control ring for semiconductor deposition apparatus
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US20210202294A1 (en) * 2019-12-26 2021-07-01 Showa Denko K.K. Susceptor
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USD933725S1 (en) * 2019-02-08 2021-10-19 Applied Materials, Inc. Deposition ring for a substrate processing chamber
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US20210375663A1 (en) * 2018-10-04 2021-12-02 Toyo Tanso Co., Ltd. Susceptor
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JP1711120S (en) 2021-10-22 2022-03-29 Suceptor cover
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US20240258154A1 (en) * 2023-02-01 2024-08-01 Asm Ip Holding B.V. Method, assembly and system for film deposition and control
USD1038049S1 (en) * 2020-11-18 2024-08-06 Applied Materials, Inc. Cover ring for use in semiconductor processing chamber
US20240282618A1 (en) * 2023-02-20 2024-08-22 Kioxia Corporation Jig, semiconductor manufacturing apparatus, and method of operating semiconductor manufacturing apparatus
USD1040304S1 (en) * 2018-12-17 2024-08-27 Applied Materials, Inc. Deposition ring for physical vapor deposition chamber
USD1049067S1 (en) * 2022-04-04 2024-10-29 Applied Materials, Inc. Ring for an anti-rotation process kit for a substrate processing chamber
USD1053230S1 (en) * 2022-05-19 2024-12-03 Applied Materials, Inc. Sputter target for a physical vapor deposition chamber
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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4978567A (en) * 1988-03-31 1990-12-18 Materials Technology Corporation, Subsidiary Of The Carbon/Graphite Group, Inc. Wafer holding fixture for chemical reaction processes in rapid thermal processing equipment and method for making same
US5304248A (en) * 1990-12-05 1994-04-19 Applied Materials, Inc. Passive shield for CVD wafer processing which provides frontside edge exclusion and prevents backside depositions
US5584936A (en) * 1995-12-14 1996-12-17 Cvd, Incorporated Susceptor for semiconductor wafer processing
US6214122B1 (en) * 1997-03-17 2001-04-10 Motorola, Inc. Rapid thermal processing susceptor
US5840124A (en) * 1997-06-30 1998-11-24 Emcore Corporation Wafer carrier with flexible wafer flat holder
USD404370S (en) * 1997-08-20 1999-01-19 Tokyo Electron Limited Cap for use in a semiconductor wafer heat processing apparatus
US7459057B2 (en) * 1998-05-15 2008-12-02 Applied Materials, Inc. Substrate retainer
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US20030085223A1 (en) * 2001-09-28 2003-05-08 Neilson Zeng Patterned microwave susceptor element and microwave container incorporating same
US20040011293A1 (en) * 2002-07-16 2004-01-22 International Business Machines Corporation Susceptor pocket with beveled projection sidewall
US20060057826A1 (en) * 2002-12-09 2006-03-16 Koninklijke Philips Electronics N.V. System and method for suppression of wafer temperature drift in cold-wall cvd systems
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USD559994S1 (en) * 2005-03-30 2008-01-15 Tokyo Electron Limited Cover ring
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US20070144442A1 (en) * 2005-12-22 2007-06-28 Kyocera Corporation Susceptor
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Vet china susceptor,Date Apr. 12, 2020 [online], [retrieved May 16, 2025], https://www.youtube.com/watch?v=iAVM00Q3zKc (Year: 2020). *

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