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WO1992003841A3 - Vorrichtung zur materialverdampfung mittels vakuumlichtbogenentladung und verfahren - Google Patents

Vorrichtung zur materialverdampfung mittels vakuumlichtbogenentladung und verfahren Download PDF

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Publication number
WO1992003841A3
WO1992003841A3 PCT/EP1991/001446 EP9101446W WO9203841A3 WO 1992003841 A3 WO1992003841 A3 WO 1992003841A3 EP 9101446 W EP9101446 W EP 9101446W WO 9203841 A3 WO9203841 A3 WO 9203841A3
Authority
WO
WIPO (PCT)
Prior art keywords
automatically consumed
arc discharge
vacuum arc
hot
anode
Prior art date
Application number
PCT/EP1991/001446
Other languages
English (en)
French (fr)
Other versions
WO1992003841A2 (de
Inventor
Horst Ehrich
Brunhilde Hasse
Michael Mausbach
Original Assignee
Ehrich Plasma Coating
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ehrich Plasma Coating filed Critical Ehrich Plasma Coating
Publication of WO1992003841A2 publication Critical patent/WO1992003841A2/de
Publication of WO1992003841A3 publication Critical patent/WO1992003841A3/de

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation
    • C23C14/32—Vacuum evaporation by explosion; by evaporation and subsequent ionisation of the vapours, e.g. ion-plating
    • C23C14/325—Electric arc evaporation
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
    • H01J37/32055—Arc discharge
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32431—Constructional details of the reactor
    • H01J37/32532—Electrodes
    • H01J37/32614—Consumable cathodes for arc discharge
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32431—Constructional details of the reactor
    • H01J37/32623—Mechanical discharge control means
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/32—Processing objects by plasma generation
    • H01J2237/33—Processing objects by plasma generation characterised by the type of processing
    • H01J2237/332—Coating

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Plasma & Fusion (AREA)
  • Analytical Chemistry (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)

Abstract

Die Erfindung beschreibt eine Vorrichtung zur Materialverdampfung mittels Vakuumlichtbogenentladung mit einer selbstverzehrenden Kathode und einer selbstverzehrenden heißen Anode in einer Unterdruckkammer sowie ein Verfahren zur Verlängerung der Standzeit von Elektroden bei der Materialverdampfung mittels Vakuumlichtbogenentladung mit heißer selbstverzehrender Anode und kalter selbstverzehrender Kathode, ein Verfahren zur Zündung einer Vakuumlichtbogenentladung mit kalter selbstverzehrender Kathode und heißer selbstverzehrender Anode sowie ein Verfahren zur Steuerung des Ionisationsgrades des auf ein zu beschichtendes Objekt auftreffenden Dampfes bei der Oberfächenbeschichtung mittels Vakuumlichtbogenentladung mit selbstverzehrender kalter Kathode und selbstverzehrender heißer Anode.
PCT/EP1991/001446 1990-08-22 1991-08-01 Vorrichtung zur materialverdampfung mittels vakuumlichtbogenentladung und verfahren WO1992003841A2 (de)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
DE4026494A DE4026494A1 (de) 1990-08-22 1990-08-22 Vorrichtung zur materialverdampfung mittels vakuumlichtbogenentladung und verfahren
DEP4026494.7 1990-08-22
DE4042337A DE4042337C1 (en) 1990-08-22 1990-08-22 Controlling degree of ionisation of vapour for surface coating - by preventing straight line current flow between hot anode target surface and cold cathode by using movable wall between them

Publications (2)

Publication Number Publication Date
WO1992003841A2 WO1992003841A2 (de) 1992-03-05
WO1992003841A3 true WO1992003841A3 (de) 1992-04-16

Family

ID=39523631

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/EP1991/001446 WO1992003841A2 (de) 1990-08-22 1991-08-01 Vorrichtung zur materialverdampfung mittels vakuumlichtbogenentladung und verfahren

Country Status (3)

Country Link
AU (1) AU8291191A (de)
DE (2) DE4026494A1 (de)
WO (1) WO1992003841A2 (de)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6982119B2 (en) 2002-04-15 2006-01-03 The Coca-Cola Company Coating composition containing an epoxide additive and structures coated therewith

Families Citing this family (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE4200429A1 (de) * 1992-01-10 1993-07-15 Ehrich Plasma Coating Verfahren zur ionisation thermisch erzeugter materialdaempfe und vorrichtung zur durchfuehrung des verfahrens
DE4203371C1 (de) * 1992-02-06 1993-02-25 Multi-Arc Oberflaechentechnik Gmbh, 5060 Bergisch Gladbach, De
DE4223091C1 (en) * 1992-07-14 1993-07-01 Vtd-Vakuumtechnik Dresden Gmbh, O-8017 Dresden, De Water cooled holder for inserted exchangeable target - comprises housing, cooling plate and axially freely movable metal bellows, vacuum arc discharge vapour deposition appts.
DE4409761B4 (de) * 1994-03-22 2007-12-27 Vtd Vakuumtechnik Dresden Gmbh Einrichtung zur plasmagestützten Verdampfung in einem Bogenentladungsplasma
DE4444763C2 (de) * 1994-12-19 1996-11-21 Apvv Angewandte Plasma Vakuum Elektrode zur Materialverdampfung für die Beschichtung von Substraten
DE19600993A1 (de) * 1995-01-13 1996-08-08 Technics Plasma Gmbh Vorrichtung und Verfahren zur anodischen Verdampfung eines Materials mittels einer Vakuumlichtbogenentladung
DE19521419C2 (de) * 1995-06-14 1997-11-27 Plasma Applikation Mbh Ges Verdampfereinheit zur Verdampfung von Materialien im elektrischen Vakuumbogen
US6223683B1 (en) 1997-03-14 2001-05-01 The Coca-Cola Company Hollow plastic containers with an external very thin coating of low permeability to gases and vapors through plasma-assisted deposition of inorganic substances and method and system for making the coating
US6251233B1 (en) 1998-08-03 2001-06-26 The Coca-Cola Company Plasma-enhanced vacuum vapor deposition system including systems for evaporation of a solid, producing an electric arc discharge and measuring ionization and evaporation
EP1103630B1 (de) * 1999-11-17 2003-12-17 Applied Films GmbH & Co. KG Elektrodenanordnung
US6740378B1 (en) 2000-08-24 2004-05-25 The Coca-Cola Company Multilayer polymeric/zero valent material structure for enhanced gas or vapor barrier and uv barrier and method for making same
US6720052B1 (en) 2000-08-24 2004-04-13 The Coca-Cola Company Multilayer polymeric/inorganic oxide structure with top coat for enhanced gas or vapor barrier and method for making same
US6599584B2 (en) 2001-04-27 2003-07-29 The Coca-Cola Company Barrier coated plastic containers and coating methods therefor
DE102020124270A1 (de) 2020-09-17 2022-03-17 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung eingetragener Verein Verfahren und Vorrichtung zur anodischen Bogenverdampfung
DE102024107070A1 (de) * 2024-03-12 2025-09-18 Oerlikon Surface Solutions AG, Pfäffikon, Zweigniederlassung Balzers ARC Quelle mit Confinementringsystem mit veränderbarer Höhe

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2106545A (en) * 1981-02-23 1983-04-13 Rimma Ivanovna Stupak Consumable cathode for electric-arc evaporator of metal
DE3239131A1 (de) * 1982-10-22 1984-04-26 Ulrich 8950 Kaufbeuren Goetz Verfahren zur thermischen verdampfung von metallen im vakuum
EP0158972A2 (de) * 1984-04-12 1985-10-23 Plasco Dr. Ehrich Plasma-Coating GmbH Verfahren und Vorrichtung zur Materialverdampfung in einer Unterdruckkammer durch Bogenentladung
EP0277341A2 (de) * 1987-02-03 1988-08-10 Balzers Aktiengesellschaft Anordnung zur Anwendung eines Lichtbogens
DE3829260A1 (de) * 1988-08-29 1990-03-01 Multi Arc Gmbh Plasmabeschichtungskammer mit entfernbarem schutzschirm
JPH06149358A (ja) * 1992-11-13 1994-05-27 Matsushita Electric Works Ltd 移動ロボット

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR1496697A (fr) * 1965-10-20 1967-09-29 Gen Precision Inc Appareil de revêtement de la surface d'un substrat
US3562141A (en) * 1968-02-23 1971-02-09 John R Morley Vacuum vapor deposition utilizing low voltage electron beam
US3625848A (en) * 1968-12-26 1971-12-07 Alvin A Snaper Arc deposition process and apparatus
US4197157A (en) * 1975-03-19 1980-04-08 Arthur D. Little, Inc. Method for forming refractory tubing
AT376460B (de) * 1982-09-17 1984-11-26 Kljuchko Gennady V Plasmalichtbogeneinrichtung zum auftragen von ueberzuegen

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2106545A (en) * 1981-02-23 1983-04-13 Rimma Ivanovna Stupak Consumable cathode for electric-arc evaporator of metal
DE3239131A1 (de) * 1982-10-22 1984-04-26 Ulrich 8950 Kaufbeuren Goetz Verfahren zur thermischen verdampfung von metallen im vakuum
EP0158972A2 (de) * 1984-04-12 1985-10-23 Plasco Dr. Ehrich Plasma-Coating GmbH Verfahren und Vorrichtung zur Materialverdampfung in einer Unterdruckkammer durch Bogenentladung
EP0277341A2 (de) * 1987-02-03 1988-08-10 Balzers Aktiengesellschaft Anordnung zur Anwendung eines Lichtbogens
DE3829260A1 (de) * 1988-08-29 1990-03-01 Multi Arc Gmbh Plasmabeschichtungskammer mit entfernbarem schutzschirm
JPH06149358A (ja) * 1992-11-13 1994-05-27 Matsushita Electric Works Ltd 移動ロボット

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
Patent Abstracts of Japan, Band 10, Nr. 209 (E-421)[2265], 22. Juli 1986; & JP, A, 6149358 (SEIKO EPSON CORP.) 11. März 1986, siehe das ganze Dokument *

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6982119B2 (en) 2002-04-15 2006-01-03 The Coca-Cola Company Coating composition containing an epoxide additive and structures coated therewith

Also Published As

Publication number Publication date
AU8291191A (en) 1992-03-17
WO1992003841A2 (de) 1992-03-05
DE4042337C1 (en) 1991-09-12
DE4026494A1 (de) 1992-02-27
DE4026494C2 (de) 1992-05-21

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