[go: up one dir, main page]

WO1999040575A1 - Support d'enregistrement magnetique avec substrat a motifs - Google Patents

Support d'enregistrement magnetique avec substrat a motifs Download PDF

Info

Publication number
WO1999040575A1
WO1999040575A1 PCT/US1999/002670 US9902670W WO9940575A1 WO 1999040575 A1 WO1999040575 A1 WO 1999040575A1 US 9902670 W US9902670 W US 9902670W WO 9940575 A1 WO9940575 A1 WO 9940575A1
Authority
WO
WIPO (PCT)
Prior art keywords
magnetic
layer
alloy
recording medium
magnetic recording
Prior art date
Application number
PCT/US1999/002670
Other languages
English (en)
Inventor
Zhong Stella Wu
Rajiv Ranjan
Original Assignee
Seagate Technology Llc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Seagate Technology Llc filed Critical Seagate Technology Llc
Priority to JP2000530905A priority Critical patent/JP2002503009A/ja
Priority to GB0019477A priority patent/GB2350471B/en
Priority to DE19982817T priority patent/DE19982817T1/de
Priority to US09/242,226 priority patent/US6764738B1/en
Publication of WO1999040575A1 publication Critical patent/WO1999040575A1/fr

Links

Classifications

    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
    • G11B5/84—Processes or apparatus specially adapted for manufacturing record carriers
    • G11B5/855—Coating only part of a support with a magnetic layer
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
    • G11B5/62—Record carriers characterised by the selection of the material
    • G11B5/73—Base layers, i.e. all non-magnetic layers lying under a lowermost magnetic recording layer, e.g. including any non-magnetic layer in between a first magnetic recording layer and either an underlying substrate or a soft magnetic underlayer
    • G11B5/736—Non-magnetic layer under a soft magnetic layer, e.g. between a substrate and a soft magnetic underlayer [SUL] or a keeper layer
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
    • G11B5/62—Record carriers characterised by the selection of the material
    • G11B5/73—Base layers, i.e. all non-magnetic layers lying under a lowermost magnetic recording layer, e.g. including any non-magnetic layer in between a first magnetic recording layer and either an underlying substrate or a soft magnetic underlayer
    • G11B5/7368—Non-polymeric layer under the lowermost magnetic recording layer
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
    • G11B5/62—Record carriers characterised by the selection of the material
    • G11B5/73—Base layers, i.e. all non-magnetic layers lying under a lowermost magnetic recording layer, e.g. including any non-magnetic layer in between a first magnetic recording layer and either an underlying substrate or a soft magnetic underlayer
    • G11B5/7368—Non-polymeric layer under the lowermost magnetic recording layer
    • G11B5/7369—Two or more non-magnetic underlayers, e.g. seed layers or barrier layers
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
    • G11B5/62—Record carriers characterised by the selection of the material
    • G11B5/73—Base layers, i.e. all non-magnetic layers lying under a lowermost magnetic recording layer, e.g. including any non-magnetic layer in between a first magnetic recording layer and either an underlying substrate or a soft magnetic underlayer
    • G11B5/7368—Non-polymeric layer under the lowermost magnetic recording layer
    • G11B5/7379—Seed layer, e.g. at least one non-magnetic layer is specifically adapted as a seed or seeding layer
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
    • G11B5/62—Record carriers characterised by the selection of the material
    • G11B5/73—Base layers, i.e. all non-magnetic layers lying under a lowermost magnetic recording layer, e.g. including any non-magnetic layer in between a first magnetic recording layer and either an underlying substrate or a soft magnetic underlayer
    • G11B5/739—Magnetic recording media substrates
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
    • G11B5/62—Record carriers characterised by the selection of the material
    • G11B5/73—Base layers, i.e. all non-magnetic layers lying under a lowermost magnetic recording layer, e.g. including any non-magnetic layer in between a first magnetic recording layer and either an underlying substrate or a soft magnetic underlayer
    • G11B5/739—Magnetic recording media substrates
    • G11B5/73911—Inorganic substrates
    • G11B5/73913—Composites or coated substrates
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
    • G11B5/62—Record carriers characterised by the selection of the material
    • G11B5/73—Base layers, i.e. all non-magnetic layers lying under a lowermost magnetic recording layer, e.g. including any non-magnetic layer in between a first magnetic recording layer and either an underlying substrate or a soft magnetic underlayer
    • G11B5/739—Magnetic recording media substrates
    • G11B5/73911—Inorganic substrates
    • G11B5/73917—Metallic substrates, i.e. elemental metal or metal alloy substrates
    • G11B5/73919—Aluminium or titanium elemental or alloy substrates
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
    • G11B5/62—Record carriers characterised by the selection of the material
    • G11B5/73—Base layers, i.e. all non-magnetic layers lying under a lowermost magnetic recording layer, e.g. including any non-magnetic layer in between a first magnetic recording layer and either an underlying substrate or a soft magnetic underlayer
    • G11B5/739—Magnetic recording media substrates
    • G11B5/73911—Inorganic substrates
    • G11B5/73921—Glass or ceramic substrates
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
    • G11B5/84—Processes or apparatus specially adapted for manufacturing record carriers
    • G11B5/8404—Processes or apparatus specially adapted for manufacturing record carriers manufacturing base layers
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S428/00—Stock material or miscellaneous articles
    • Y10S428/90—Magnetic feature

Definitions

  • the present invention relates to the recording, storage and reading of magnetic data, particularly rotatable magnetic recording media, such as thin film magnetic disks having textured surfaces for contact with cooperating magnetic transducing heads.
  • the invention has particular applicability to high density magnetic recording media exhibiting low noise, reduced flying heights and high coercivity.
  • Magnetic disks and disk drives are conventionally employed for storing data in magnetizable form.
  • one or more disks are rotated on a central axis in combination with data transducing heads positioned in close proximity to the recording surfaces of the disks and moved generally radially with respect thereto.
  • Magnetic disks are usually housed in a magnetic disk unit in a stationary state with a magnetic head having a specific load elastically in contact with and pressed against the surface of the disk.
  • a magnetic recording medium for ultra-high density recording having suitable magnetic properties, such as high coercivity, e.g., greater than 2500 Oersteads, and a high overwrite, e.g., about 40dB, while at the same time exhibiting suitable mechanical properties for read-write performance, such as a small glide height avalanche, e.g., about 0.75 to about 0.85 ⁇ inch.
  • the magnetic disk is normally driven by the contact start stop (CSS) method, wherein the head begins to slide against the surface of the disk as the disk begins to rotate. Upon reaching a predetermined high rotational speed, the head floats in air at a predetermined distance from the surface of the disk due to dynamic pressure effects caused by the air flow generated between the sliding surface of the head and the disk.
  • the transducing head is maintained at a controlled distance from the recording surface, supported on a bearing of air as the disk rotates.
  • the magnetic head unit is arranged such that the head can be freely moved in both the circumferential and radial directions of the disk in this floating state allowing data to be recorded on and retrieved from the surface of the disk at a desired position.
  • the rotational speed of the disk decreases and the head begins to slide against the surface of the disk again and eventually stops in contact with and pressing against the disk.
  • the transducing head contacts the recording surface whenever the disk is stationary, accelerated from a stop and during deceleration just prior to completely stopping.
  • the sliding surface of the head repeats the cyclic operation consisting of stopping, sliding against the surface of the disk, floating in the air, sliding against the surface of the disk and stopping. It is considered desirable during reading and recording operations to maintain each transducing head as close to its associated recording surface as possible, i.e., to minimize the flying height of the head. This objective becomes particularly significant as the areal recording density increases.
  • the areal density (Mbits/in 2 ) is the recording density per unit area and is equal to the track density (TPI) in terms of tracks per inch times (x) the linear density (BPI) in terms of bits per inch.
  • TPI track density
  • BPI linear density
  • head surface and recording surface are too flat, the precision match of these surfaces gives rise to excessive stiction and friction during the start up and stopping phases, thereby causing wear to the head and recording surfaces eventually leading to what is referred to as a "head crash.”
  • head crash there are competing goals of reduced head/disk friction and minimum transducer flying height .
  • the recording surfaces of magnetic disks are conventionally provided with a roughened surface to reduce the head/disk friction by techniques referred to as "texturing.”
  • texturing techniques involve polishing the surface of a disk substrate to provide a texture thereon prior to subsequent deposition of coatings, such as an underlayer, magnetic layer, carbon overcoat and lubricant topcoat, wherein the textured surface on the substrate is reproduced on the surface of the magnetic disk.
  • coatings such as an underlayer, magnetic layer, carbon overcoat and lubricant topcoat
  • Fig. 1 and comprises a substrate 10, typically aluminum (Al) or an Al alloy, such as an aluminum-magnesium (Al-Mg) -alloy, plated with a layer of amorphous nickel -phosphorus (NiP) .
  • Alternative substrates include glass, ceramic, glass-ceramic materials and graphite.
  • Substrate 10 typically contains sequentially deposited on each side thereof a chromium (Cr) or Cr-alloy underlayer 11, U N a cobalt (Co) base alloy magnetic layer 12, 12', a protective overcoat 13, 13', typically containing carbon, and a lubricant topcoat 14, 14' .
  • Cr underlayer 11, 11' can be applied as a composite comprising a plurality of sub-underlayers 11A, 11A' .
  • Cr underlayer 11, 11', Co base magnetic alloy layer 12, 12' and protective overcoat 13, 13' are typically sputter deposited in an apparatus containing sequential deposition chambers.
  • a conventional Al-alloy substrate is provided with a ⁇ iP plating, primarily to increase the hardness of the Al substrate, serving as a suitable surface to provide a texture, which is substantially reproduced on the disk surface to serve as a landing zone.
  • Increasingly high density and large-capacity magnetic disks require smaller flying heights, i.e., the distance by which the head floats above the surface of the disk in the CSS drive.
  • the requirement to further reduce the flying height of the head imposed by increasingly higher recording density and capacity render it particularly difficult to accurately control texturing to avoid head crash.
  • Conventional techniques for providing a disk substrate with a textured surface comprise a mechanical operation, such as polishing. See, for example, Nakamura et al . , U.S. Patent No. 5,202,810.
  • Conventional mechanical texturing techniques are attendant with numerous disadvantages. For example, it is extremely difficult to provide a clean textured surface due to debris formed by mechanical abrasions.
  • a magnetic recording medium which has a textured surface formed by sputtering a metallic layer, such as titanium or a titanium alloy, on a non-magnetic substrate, inclusive of a glass, glass-ceramics materials and NiP chemically plated Al-Mg alloy substrates. It has, however, been found difficult to produce a magnetic recording medium having a suitably high coercivity greater than 2500 Oersteads, such as greater than 3000 Oersteads, particularly greater than 3300 Oersteads, with a sputter textured layer.
  • process parameters must be optimized for each different type of underlying material , thereby decreasing production throughput . Without such optimization of process parameters, consistently reproducible results are difficult to achieve.
  • the requirements for high areal recording density impose increasingly greater requirements on thin film magnetic recording media in terms of coercivity, remanent squareness, low medium noise and narrow track recording performance. It is extremely difficult to produce a magnetic recording medium satisfying such demanding requirements, particularly a high density magnetic rigid disk medium for longitudinal recording.
  • the linear recording density can be increased by increasing the coercivity of the magnetic recording medium.
  • Hr remanent coercivity
  • Mr magnetic remanence
  • S* coercive squareness
  • Conventional underlayers include Cr, molybdenum (Mo) , tungsten (W) , titanium (Ti) , chromium-vanadium (CrV) as well as Cr alloyed with various substitutional elements. It is recognized that underlayers having a fine grain structure are highly desirable, particularly for growing fine grains of hexagonal close packed (HCP) magnetic Co or Co alloy layers deposited thereon.
  • HCP hexagonal close packed
  • Co-pending application Serial No. 08/699,759 filed on August 20, 1996, discloses that Cr films deposited on surface oxidized NiP layers experience smaller grains than Cr films deposited on non-oxidized NiP layers.
  • Co-pending application Serial No. 08/586,529 filed on January 16, 1996, discloses a method of depositing Cr films on surface oxidized NiP films, wherein the deposited Cr films exhibit a (200) -dominant crystallographic orientation.
  • Co-pending Application Serial No. 08/945,084 filed on October 17, 1997 (Our Docket No.
  • a magnetic recording medium having high coercivity which magnetic recording medium comprises a seedlayer having an oxidized surface formed on a non-magnetic substrate, a chromium-containing sub-underlayer on the oxidized surface of the seedlayer, a nickel -aluminum or iron-aluminum underlayer, a chromium-containing intermediate layer on the underlayer and a magnetic layer on the intermediate layer.
  • U.S. Patent No. 5,470,636 issued to Wakui et al . on November 28, 1995, discloses the formation of a landing zone by anodizing an Al substrate or Al layer on a substrate, filing the resulting pores with a non-magnetic material extending above the anodized surface and treating the anodized layer with a fluorine reagent, acid or base.
  • magnetic recording media suitable for high areal recording density exhibiting high Hr, high SNR and high S* and improved flying characteristics.
  • cost effective, efficient methodology for manufacturing high areal density magnetic recording media exhibiting high Hr, SNR and S* and improved flying characteristics.
  • An advantage of the present invention is a magnetic recording medium suitable for high areal density longitudinal magnetic recording which exhibits low medium noise, high Hr, high S* and improved flying characteristics.
  • Another advantage of the present invention is a cost effective, efficient method of manufacturing a magnetic recording medium suitable for high areal density longitudinal magnetic recording which exhibits low medium noise, high Hr, high S* and improved flying characteristics.
  • a magnetic recording medium comprising: a non-magnetic substrate; a layer comprising Al or an Al alloy on the substrate, the Al or Al alloy having a substantially uniform pattern thereon; and a magnetic layer; wherein, the pattern is substantially replicated on the magnetic layer to form a data zone.
  • Another aspect of the present invention is a method of manufacturing a magnetic recording medium, the method comprising: forming a layer of Al or an Al alloy on a nonmagnetic substrate; forming a substantially uniform pattern on the Al or Al alloy layer; and forming a magnetic layer; wherein, the pattern is substantially replicated on the magnetic layer to form a data zone.
  • Embodiments of the present invention comprise anodizing the Al or Al alloy layer to form a substantially uniform honeycomb pattern comprising substantially hexagonal cells of Al oxide.
  • Embodiments of the present invention further comprise texturing the surface of the substrate to form a textured area which is substantially replicated on subsequently deposited layers, including the magnetic layer, to form a recording data zone.
  • FIG. 1 schematically depicts a conventional magnetic recording medium structure .
  • Fig. 2 schematically depicts a magnetic recording medium structure in accordance with the present invention.
  • Fig. 3 is an atomic force microscope (AFM) image of a NiP/Al substrate before and after anodizing in accordance with an embodiment of the present invention.
  • AFM atomic force microscope
  • Figs. 4A and 4B show the Hr and SNR, respectively, of an embodiment of the present invention vis-a-vis a conventional magnetic recording medium.
  • the present invention addresses the problem of increasing the data storage capacity of magnetic recording media by increasing the Hr and lowering media noise.
  • the increased Hr narrows the pulse width and enables a reduction of the bit length for increased recording density.
  • Lower media noise generates a higher SNR.
  • Embodiments of the present invention achieve the foregoing objectives by a physically segregating the magnetic grains of the magnetic layer. Such physical segregation of magnetic grains is achieved by forming a pattern on the substrate which initiates magnetic film growth in patterns. Such patterns minimize the irregularity of grain growth and narrow the magnetic grain unit's distribution, thereby reducing the origins of zigzag transitions, consequently suppressing magnetic grain interactions and improving SNR. 10
  • Embodiments of the present invention comprise forming a continuous film on any of various conventional non-magnetic substrates.
  • the continuous film is patterned to provide a substantially uniform matrix for thin film growth, which matrix is substantially replicated in subsequently deposited layers, including the magnetic layer, to form a data zone.
  • the uniform pattern formed on the substrate in accordance with embodiments of the present invention serves as a template for films subsequently deposited thereon, e.g. the underlayer and magnetic layer.
  • magnetic unit clusters are replicated in accordance with the substrate pattern and, hence, magnetic grain clusters are separated by the pattern boundaries. In this way, grain interactions are minimized and SNR increased.
  • an Al or Al alloy is sputter deposited on a nonmagnetic substrate, such as a NiP plated Al or Al alloy substrate, or a glass, ceramic, or glass-ceramic substrate.
  • the Al or Al alloy film can be sputter deposited to a thickness of about 50A to about 5000A, e.g., about 500A to about 1500A.
  • a substantially uniform pattern is formed on the sputter deposited Al or Al alloy film to serve as a template such that the magnetic grain clusters of the subsequently deposited magnetic layer are separated by the pattern boundaries.
  • the sputter deposited Al or Al alloy film is anodized to form a pattern comprising aluminum oxide, such as a substantially honeycomb pattern.
  • Anodization can be effected in any conventional manner, as by treatment with a solution of hydrogen phosphate (H 3 P0 4 ) of about 1% to about
  • the resulting substantially honeycomb pattern comprises substantially hexagonal cells of aluminum oxide.
  • Such substantially hexagonal cells serve as a suitable template for the subsequently deposited magnetic layer such that epitaxial growth is effective to produce a desired 11 hexagonal close packed (HCP) crystal structure.
  • the boundaries of the substantially hexagonal cells due to substantial replication in the magnetic layer, serve to separate the magnetic grain clusters thereby minimizing grain interactions and improving SNR.
  • the magnetic recording medium is completed by depositing an underlayer and magnetic layer on the anodized surface, replicating the patterns on the substrate.
  • a seedlayer such as nickel aluminum (NiAl) is deposited on the anodized Al or Al alloy layer. It is believed that the cells are not completely filled.
  • An underlayer, such as CrV, is sputter deposited on the NiAl seedlayer, and a magnetic layer, such as a cobalt-chromium- platinum-tantalum (CoCrPtTa) alloy layer is sputter deposited on the underlayer.
  • CoCrPtTa cobalt-chromium- platinum-tantalum
  • a protective overcoat such as a carbon- containing protective overcoat, is sputter deposited on the magnetic layer and a lubricant topcoat is formed on the protective overcoat.
  • the layers can be sputter deposited in order to optimize magnetic properties, as by employing a base pressure of 2 x 10 "7 Torr with a substrate temperature of about 200°C to 300°C and a substrate bias at about -250 volts, employing a sputtering power density of between 2W/cm 2 to
  • FIG. 2 An embodiment of the present invention is schematically illustrated in Fig. 2 and comprises a non-magnetic substrate
  • anodized sputter deposited Al layer 21, 21' comprising a substantially uniform honeycomb pattern of substantially hexagonal cells of aluminum oxide.
  • Seedlayer 22, 22' such as NiAl
  • An underlayer 23, 23' such as CrV
  • a magnetic layer 24, 24' such as CoCrPtTa
  • an HCP pattern is formed substantially following the template of the patterned layer
  • a conventional protective overcoat 25, 25' such as a carbon-containing protective overcoat, is sputter deposited on the magnetic layer 24, 24' and a conventional lubricant topcoat 26, 26' formed thereon.
  • a magnetic recording medium in accordance with the present invention was made by sputter depositing an Al layer on an NiP/Al substrate and anodizing the Al layer to form a substantially honeycomb Al oxide pattern comprising substantially hexagonal cells having a depth of about 500A and a diameter of about 500A, suitable for magnetic recording bit size scales.
  • a NiAl seedlayer was deposited on the anodized Al layer
  • a CrV underlayer was deposited on the NiAl seedlayer
  • a CoCrPtTa magnetic layer was deposited on the CrV underlayer.
  • a carbon-containing protective overcoat was deposited on the CoCrPtTa layer.
  • the Al layer was anodized in a 4% H 3 P0 4 solution and the results of anodization are shown in Fig. 3, the left hand portion of Fig. 3 illustrating the Al layer before anodization and right hand portion comprising the honeycomb structure subsequent to anodization.
  • a comparison (regular) magnetic recording medium was made employing substantially the same layers and substantially the same deposition conditions as in forming the magnetic recording medium representative of the present invention, except that an Al layer was not sputter deposited on the substrate and anodized.
  • the magnetic properties of both media were tested employing a non-destructive rotating disk magnetometer. Recording characteristics and media noise was measured at a linear density of 240kfci (kiloflux changes per inch) employing a Guzik 1601 tester with a magnetorestive (MR) head having a 0.35 ⁇ in gap length and flying at a nominal height of 2.1 ⁇ in.
  • MR magnetorestive
  • Fig. 4A shows the magnetic properties of the comparison (regular) medium and the medium in accordance with the present invention
  • Fig. 4B illustrates that the magnetic recording medium in accordance with the present invention exhibits an improvement in SNR of about 0.5 to about ldB vis-a-vis the comparison (regular) magnetic recording medium.
  • a patterned anodized Al oxide layer is formed on a non-magnetic substrate for increased areal recording density.
  • the anodized pattern can be formed on any non-magnetic substrate, and typically exhibits a substantially hexagonal honeycomb structure comprising a single hexagonal unit cell ranging from about 50A to about 5000A in diameter and about 50A to about 10,OOOA in depth.
  • Conventional magnetron sputtering techniques can be employed to produce magnetic recording media in accordance with the present invention. Accordingly, the present invention can be easily integrated into existing production facilities.
  • the present invention enables the formation of magnetic recording media suitable for high areal density recording having improved Hr, improved SNR and S*.
  • the present invention also achieves a significant increase in SNR by effecting separation of magnetic grain cells by the pattern boundaries, thereby suppressing magnetic interaction.
  • the present invention enables production of any of various types of magnetic recording media, particularly magnetic recording media, such as thin film disks having improved flying heights. Only certain embodiments of the present invention and but a few examples of its versatility are shown and described in the present disclosure. It is to be understood that the present invention is capable of use in various other combinations and environments and is capable of changes and modifications within the scope of the inventive concept as expressed herein.

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Inorganic Chemistry (AREA)
  • Metallurgy (AREA)
  • Ceramic Engineering (AREA)
  • Manufacturing & Machinery (AREA)
  • Magnetic Record Carriers (AREA)
  • Manufacturing Of Magnetic Record Carriers (AREA)

Abstract

Des supports d'enregistrement magnétiques à Hr, SNR et S* améliorés, convenant pour de hautes densités d'enregistrement, sont obtenus en formant une couche sensiblement uniforme, à motifs, d'Al ou d'alliage d'Al (21, 21') sur un substrat non-magnétique (20) qui est sensiblement répliquée dans les couches appliquées ultérieurement (22, 22', 23, 23', 24, 24', 25, 25', 26, 26') en vue de former une zone de données. Les formes d'exécution sont réalisées par dépôt par pulvérisation d'une couche d'Al ou d'alliage d'Al (21, 21') sur le substrat (20), et anodisation de la couche pulvérisée (21, 21') en vue de former une pluralité de cellules hexagonales sensiblement uniformes renfermant de l'oxyde d'aluminium. Les motifs hexagonaux sont répliqués dans une couche magnétique déposée subséquemment et à croissance épitaxiale (24, 24'), telle que les grains magnétiques soient séparés, réduisant ainsi les interactions magnétostatiques entre eux.
PCT/US1999/002670 1998-02-10 1999-02-10 Support d'enregistrement magnetique avec substrat a motifs WO1999040575A1 (fr)

Priority Applications (4)

Application Number Priority Date Filing Date Title
JP2000530905A JP2002503009A (ja) 1998-02-10 1999-02-10 パターン基板を有する磁気記録媒体
GB0019477A GB2350471B (en) 1998-02-10 1999-02-10 Magnetic recording medium with patterned substrate
DE19982817T DE19982817T1 (de) 1998-02-10 1999-02-10 Magnetaufzeichnungsmedium mit gemustertem Substrat
US09/242,226 US6764738B1 (en) 1998-02-10 1999-02-10 Magnetic recording medium with patterned substrate

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US7425398P 1998-02-10 1998-02-10
US60/074,253 1998-02-10

Publications (1)

Publication Number Publication Date
WO1999040575A1 true WO1999040575A1 (fr) 1999-08-12

Family

ID=22118583

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/US1999/002670 WO1999040575A1 (fr) 1998-02-10 1999-02-10 Support d'enregistrement magnetique avec substrat a motifs

Country Status (5)

Country Link
JP (1) JP2002503009A (fr)
KR (1) KR100629034B1 (fr)
DE (1) DE19982817T1 (fr)
GB (1) GB2350471B (fr)
WO (1) WO1999040575A1 (fr)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2000068941A1 (fr) * 1999-05-11 2000-11-16 Hitachi Maxell, Ltd. Support d'enregistrement magnetique et son procede de fabrication; enregistreur magnetique
US6999279B2 (en) 2002-10-29 2006-02-14 Imation Corp. Perpendicular patterned magnetic media
US7050251B2 (en) 2003-06-25 2006-05-23 Imation Corp. Encoding techniques for patterned magnetic media

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5062021A (en) * 1990-03-12 1991-10-29 Magnetic Peripherals Inc. Selectively textured magnetic recording media
US5718811A (en) * 1996-02-28 1998-02-17 Seagate Technology, Inc. Sputter textured magnetic recording medium

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5470636A (en) * 1991-03-15 1995-11-28 Yamaha Corporation Magnetic recording medium and method of producing it
JPH056539A (ja) * 1991-06-28 1993-01-14 Mitsubishi Plastics Ind Ltd 情報記録媒体用スタンパの製造方法
US5693426A (en) * 1994-09-29 1997-12-02 Carnegie Mellon University Magnetic recording medium with B2 structured underlayer and a cobalt-based magnetic layer
GB2334134B (en) * 1996-10-17 2000-10-25 Seagate Technology Magnetic recording medium comprising a nickel aluminum or iron aluminum underlayer

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5062021A (en) * 1990-03-12 1991-10-29 Magnetic Peripherals Inc. Selectively textured magnetic recording media
US5718811A (en) * 1996-02-28 1998-02-17 Seagate Technology, Inc. Sputter textured magnetic recording medium

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2000068941A1 (fr) * 1999-05-11 2000-11-16 Hitachi Maxell, Ltd. Support d'enregistrement magnetique et son procede de fabrication; enregistreur magnetique
US6730421B1 (en) 1999-05-11 2004-05-04 Hitachi, Maxell, Ltd. Magnetic recording medium and its production method, and magnetic recorder
US6999279B2 (en) 2002-10-29 2006-02-14 Imation Corp. Perpendicular patterned magnetic media
US7050251B2 (en) 2003-06-25 2006-05-23 Imation Corp. Encoding techniques for patterned magnetic media

Also Published As

Publication number Publication date
JP2002503009A (ja) 2002-01-29
DE19982817T1 (de) 2001-03-22
KR20010040843A (ko) 2001-05-15
KR100629034B1 (ko) 2006-09-26
GB2350471B (en) 2002-04-17
GB2350471A (en) 2000-11-29
GB0019477D0 (en) 2000-09-27

Similar Documents

Publication Publication Date Title
US6673474B2 (en) Medium substrate, production method thereof and magnetic disk device
US7169487B2 (en) Magnetic recording medium
US6057021A (en) Magnetic recording media and magnetic recording system using the same
KR970005351B1 (ko) 박막 금속합금 자기기록 디스크 및 그의 제조방법
US6607842B2 (en) Containing an AITa or AITi pre-seed layer, a CoCr onset layer and a CoCrPtB magnetic layer
CN114446327A (zh) 具有用于记录层的多层底层的热辅助磁记录(hamr)介质
US6509083B2 (en) High coercivity magnetic recording medium comprising a sputter textured layer
US6572989B2 (en) Thin film magnetic recording disk with a chromium-nickel pre-seed layer
US6403241B1 (en) CoCrPtB medium with a 1010 crystallographic orientation
US5989674A (en) Thin film disk with acicular magnetic grains
EP0703573A1 (fr) Milieu d'enregistrement magnétique avec une couche texturée
US6238780B1 (en) Magnetic recording medium comprising multilayered carbon-containing protective overcoats
WO1997032055A1 (fr) Support d'enregistrement magnetique texture par vaporisation
US6740397B1 (en) Subseedlayers for magnetic recording media
US6764738B1 (en) Magnetic recording medium with patterned substrate
KR100629034B1 (ko) 패턴화된 기판을 가진 자기 기록 매체
JP2005078796A (ja) ＣｒＴｉ／ＮｉＰから成る二層構造を有する薄膜磁気媒体
US6517956B1 (en) Magneto-resistance recording media comprising aluminum nitride corrosion barrier layer and a c-overcoat
US6497925B1 (en) Surface treatment on solgel coated substrate to improve glide height performance
JP3657196B2 (ja) 磁気記録媒体及び磁気ディスク装置
EP0897576B1 (fr) Texturation au laser de supports d'enregistrement magnetique a l'aide d'une focalisation a lentilles multiples
JP2005092970A (ja) 磁気記録媒体及び磁気記憶装置
US5945197A (en) Laser texturing of magnetic recording medium using multiple lens focusing
JP2003109213A (ja) 磁気記録媒体
JP2006155863A (ja) 垂直磁気記録媒体およびその製造方法並びに磁気記録再生装置

Legal Events

Date Code Title Description
WWE Wipo information: entry into national phase

Ref document number: 09242226

Country of ref document: US

AK Designated states

Kind code of ref document: A1

Designated state(s): DE GB JP KR SG US

DFPE Request for preliminary examination filed prior to expiration of 19th month from priority date (pct application filed before 20040101)
ENP Entry into the national phase

Ref document number: 200019477

Country of ref document: GB

Kind code of ref document: A

ENP Entry into the national phase

Ref document number: 2000 530905

Country of ref document: JP

Kind code of ref document: A

WWE Wipo information: entry into national phase

Ref document number: 1020007008738

Country of ref document: KR

RET De translation (de og part 6b)

Ref document number: 19982817

Country of ref document: DE

Date of ref document: 20010322

WWE Wipo information: entry into national phase

Ref document number: 19982817

Country of ref document: DE

WWP Wipo information: published in national office

Ref document number: 1020007008738

Country of ref document: KR

WWG Wipo information: grant in national office

Ref document number: 1020007008738

Country of ref document: KR