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WO2000077813A1 - Procede de production d'une cathode d'emission par effet de champ, cathode d'emission par effet de champ et source lumineuse - Google Patents

Procede de production d'une cathode d'emission par effet de champ, cathode d'emission par effet de champ et source lumineuse Download PDF

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Publication number
WO2000077813A1
WO2000077813A1 PCT/SE2000/001226 SE0001226W WO0077813A1 WO 2000077813 A1 WO2000077813 A1 WO 2000077813A1 SE 0001226 W SE0001226 W SE 0001226W WO 0077813 A1 WO0077813 A1 WO 0077813A1
Authority
WO
WIPO (PCT)
Prior art keywords
field emission
laser
emission cathode
emitting
field
Prior art date
Application number
PCT/SE2000/001226
Other languages
English (en)
Inventor
Gunnar Forsberg
Carl-Håkan ANDERSSON
Original Assignee
Lightlab Ab
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from SE9902190A external-priority patent/SE9902190L/xx
Application filed by Lightlab Ab filed Critical Lightlab Ab
Priority to AU57209/00A priority Critical patent/AU5720900A/en
Priority to MXPA01012720A priority patent/MXPA01012720A/es
Priority to RU2002100205/09A priority patent/RU2002100205A/ru
Priority to HK03100758.9A priority patent/HK1048702A1/zh
Priority to JP2001503197A priority patent/JP2003502798A/ja
Priority to BR0011479-0A priority patent/BR0011479A/pt
Priority to EP00942609A priority patent/EP1192634A1/fr
Priority to CA002376824A priority patent/CA2376824A1/fr
Publication of WO2000077813A1 publication Critical patent/WO2000077813A1/fr

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y10/00—Nanotechnology for information processing, storage or transmission, e.g. quantum computing or single electron logic
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J61/00—Gas-discharge or vapour-discharge lamps
    • H01J61/02—Details
    • H01J61/04—Electrodes; Screens; Shields
    • H01J61/06—Main electrodes
    • H01J61/067—Main electrodes for low-pressure discharge lamps
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J63/00—Cathode-ray or electron-stream lamps
    • H01J63/02—Details, e.g. electrode, gas filling, shape of vessel
    • H01J63/04—Vessels provided with luminescent coatings; Selection of materials for the coatings
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J9/00—Apparatus or processes specially adapted for the manufacture, installation, removal, maintenance of electric discharge tubes, discharge lamps, or parts thereof; Recovery of material from discharge tubes or lamps
    • H01J9/02—Manufacture of electrodes or electrode systems
    • H01J9/022—Manufacture of electrodes or electrode systems of cold cathodes
    • H01J9/025—Manufacture of electrodes or electrode systems of cold cathodes of field emission cathodes
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2201/00—Electrodes common to discharge tubes
    • H01J2201/30—Cold cathodes
    • H01J2201/304—Field emission cathodes
    • H01J2201/30446—Field emission cathodes characterised by the emitter material
    • H01J2201/30453—Carbon types
    • H01J2201/30469—Carbon nanotubes (CNTs)

Definitions

  • This invention concerns a method of producing a field emission cathode for a light source according to the preamble of claim 1. It also concerns a field emission cathode so produced and a light source including such a field emission cathode.
  • WO 96/25753 concerns field emission illuminating devices employing a cold cathode, and in particular a method according to the above.
  • Field emission illuminating devices have major advantages over other types of illuminating devices such as fluorescent tubes, since the latter require complicated external electrical devices for the function and since they typically contain materials having negative environmental effects.
  • fluorescent tubes gas discharges are employed for emitting radiation onto a fluorescent material that in turn emits visible light.
  • Field emission illuminating devices allow inclusion of environmental harmless materials and can function using simpler and more economic equipment .
  • a cold field emission cathode for use in a field emission light source is provided with a surface geometry that facilitates the obtaining of local high electric field strengths for electron field emission. It is further envisaged to form a field emission cathode with an emitting surface having a particular topography facilitating electron field emission. It is further foreseen that the irregularities are trained in such a way that high mechanical and electrical durability as well as long working life and high energy emission per surface area unit is obtained.
  • this is achieved by irradiating the emitting ends of a fibre with ions of a low work function material so as to lower the electron work function of the emitting ends.
  • This irradiation step causes sharp irregularities in the emitting ends.
  • a modifying step is then carried out in order to train the very high and sharp irregularities into a rounded-off shape which will result in emitting ends being effective and durable so as to result in a cathode having a long working life.
  • That material possesses microstructures of oriented, more or less ordered phase, such as crystallites of graphite, providing high strength, elastic modulus, conductivity and chemicals stability in a matrix and surface skin of amorphous carbon.
  • the invention envisages the modification of the material by laser treatment whereby the crystallites and the amorphous material responds in such a way to the laser treatment that the desired topography of irregularities is obtained.
  • the electrical properties of carbon fibre surface skin which is inferior to the ordered phase, can be improved by laser treatment.
  • the fact that the body is shaped at the same time as it is surface modified provides several further advantages. Cutting the emitting body with laser radiation so as to trim its dimensions, its length etc. and simultaneously modify the emitting surface with the laser radiation provides a rational and economic method. This way mechanical or like cutting may be avoided, whereby the drawbacks of mechanical cutting such as deforming body surface portions are avoided. Laser cutting gives the advantage over mechanical shaping, such as mechanical cutting, that dust formation can be reduced to a minimum. In light sources including emitters produced according to the prior art, it has been discovered that the efficiency and the working life is reduces due to presence of dust emanating from mechanical trimming and cutting of the emitters.
  • an illuminating device including a field emission cathode manufactured according to the inventive method, where the emitting body is laser shaped and simultaneously the emitting surface modified will be more effective.
  • the reason for this is that more current may be led through the cathode and thereby more light may be emitted from the light source than in a prior art light source in otherwise like conditions due to the surface being more even. A more lasting light source with extended working life therefore will result.
  • By the emitting surface being more even better electron emitting action will result. This in turn results in a greater current and subsequently more light.
  • fibres treated according to this invention have shown to be able to allow a current being five times as great as a current through a device according to the prior art. This could be used so as to construct light sources having a longer working life than before and/or more intensive light sources than before.
  • the provision of an even emitting surface also is an advantage because of the more even and pleasant light distribution in comparison with a prior art light source.
  • the invention could be applied for different kinds of field emitting bodies such as strand fibres of the kind being used according to WO 96/25753, so called carbon nano tubes (CNT) , so called diamond like carbon (DLC) , porous carbon foam material such as reticulated vitreous carbon (RVC) .
  • CNT carbon nano tubes
  • DLC diamond like carbon
  • RVC porous carbon foam material
  • Materials to be subjected to the method are generally substantially carbon materials, but other similarly functioning materials may be used as the emitting body material. Other similar materials and other body forms are thus not excluded from this invention.
  • the invention is a one step process, where simultaneously cleaning, cutting, shaping and surface modification is carried out.
  • the laser cut and somewhat modified surface may need further laser treatment in order to obtain a more effective emitting surface.
  • this may be achieved by contacting the pre-treated surface with further laser radiation, which may be of a different kind and/or intensity than the first laser radiation for cutting, so as to optimise the treatment.
  • the method is also applicable to integral porous bodies such as carbon foam material bodies.
  • a body is comprised by interconnected thin structures so as to be referred to as being an integral structure. It could for example be shaped with plane or cylindrical emitting surfaces by the laser cutting or shaping. The resulting surface is modified so as to gain a preferred electron emitting surfaces similar to what has been described above for fibres.
  • a field emission cathode, manufactured this way is comparatively easy and inexpensive to manufacture.
  • the invention also is also applicable to woven structures made from yarns containing carbon or a similar acting material.
  • DE-A1-196 53 820 describes production of field emission surfaces, in particular for flat screen application.
  • laser radiation is applied locally, for example through a masking technique, to a diamond or diamondlike carbon layer. This way, areas protruding above the neighbouring areas will be obtained something that is highly unwanted in respect of the present invention.
  • Fig 1 shows a field emission light source according to the invention
  • Fig 2 shows in an enlarged scale an emitting surface of an emitting body
  • Fig 3 shows a field emission light source according to a second embodiment
  • Fig 4 illustrates diagrammatically a first embodiment of the method according to the invention
  • Fig 5 illustrates diagrammatically a second embodiment of the method according to the invention. DESCRIPTION OF EMBODIMENTS
  • a field emission cathode is made from bundles of fibres which are commercially available as polyacrylnitril carbon fibres. Other suitable material containing carbon or similar material having a diameter in the range of few microns ( ⁇ m) may be used equivalently.
  • a light source is shown having a field emission cathode in the form of fibre bundles 1, said bundles being arranged in a matrix form and being arranged on a conductive substrate 17.
  • a modulator electrode 12 having an aperture centred around each bundle.
  • the substrate 17 and the modulator 12 rest on dielectric supports 18 inside an evacuated glass container with an upper boundary glass plate 15 and a lower boundary glass plate 16. Opposite the bundles 1 and the modulator, there is provided, on the inside of the upper boundary 15, an anode layer 13 and a luminescent layer 14.
  • the anode layer 13, the modulator 12 and the substrate 17 have electrical terminals A, B, C, respectively, for application of voltages leading electrons from the bundles 1 via the modulator apertures to the luminescent layer 14 in connection with the anode layer 13.
  • the light source may also be constructed as a diode, i. e. without a modulator.
  • the fibre bundle matrix arranged on the substrate 17 has an even surface and that the surface of each emitting body is provided with a number of irregularities shaped so as to easily reject electrons when the substrate is subjected to a potential. Further the surfaces should be provided with irregularities being shaped, rounded, such that no exaggerated deformation of said irregularities takes place during use. Such deformation could otherwise be essentially detrimental to the working life of the light source.
  • the unit consisting of the substrate 17 and the fibre bundles is shaped and treated with laser light whereby the fibres are accurately cut to form an overall even surface, said surface by the laser treatment being provided with the desired rounded irregularities. If necessary, for perfecting the surface, an additional laser treatment through for example sweeping the cut surface with laser radiation, could be desired.
  • Fig 2 shows a profile 10 of one fibre 9 after laser beam cutting and treatment.
  • the emitting end profile has high but slightly rounded irregularities 11.
  • Fig 3 shows a field emission light source 20 employing a field emission cathode 21 being made from carbon foam material.
  • a modulator grid is indicated as 22 and the anode layer as 23, whereas the phosphorus layer is indicated with 24.
  • the emission cathode 21, the modulator grid 22 and the anode layer as 23 are provided with terminals A, B and C respectively so as to subject these elements to appropriate potential.
  • the surface 25 is evenly cut so as provide an emitting surface located substantially in one plane, and to the desired dimensions with the aid of laser radiation. If necessary the surface 25 is further treated with subsequent laser radiation in order to perfect the emitting surface.
  • the method may be used for differently shaped and otherwise different field emission cathodes.
  • laser cutting and/or treatment of the emitting surfaces may be applied by for example rotating the cathode body and simultaneously sweeping with the laser beam.
  • a cylindrical body 30 having its peripheral surface provided with material to be shaped and modified is rotated around its axis.
  • a laser 31 sweeps the surface of the body, by being pivotable around an axis, with laser radiation, interrupted line, so that the laser ray essentially follows the tangent of the cylindrical body 30. This way the body is shaped, whereby material protruding above a certain level is removed by the effect of the laser radiation, and modified according to the above explanation.
  • Sweep of a laser ray may also be obtained by moving optical devices such as mirrors and lenses according to per se known methods.
  • the laser radiation is directed along the surface to be treated so as to be tangent to that surface in case of a curved surface or coincide with directions of the surface in case of it being plane.
  • An advantage of the invention is that the resulting material could be controlled so as to purity and/or to addition of some wanted characteristics such that different properties may be given to the emitting surfaces. This is referred to as etching. This depending of the composition of the atmosphere surrounding the treated body during the treatment and on the beam intensity and spot size as well as the flow characteristic of the atmosphere.
  • etching This depending of the composition of the atmosphere surrounding the treated body during the treatment and on the beam intensity and spot size as well as the flow characteristic of the atmosphere.
  • evaporation or sublimation of the amorphous carbon can be achieved.
  • oxygen or hydrogen there may be catalytic graphitization of the amorphous carbon.
  • an atmosphere including nitrogen or air surface groups with bonded oxygen and/or nitrogen may be formed in a moderate flow atmosphere. High temperature erosion may be carried out under high flow atmosphere conditions.
  • the invention may be included in methods involving other per se known steps such as the ones referred to in the previously mentioned PCT documents.
  • the carbon fibres are surface treated with for example a polymeric material, and if that surface treatment material needs to be removed, this could be obtained in some instances already during the laser treatment or otherwise in a heat treatment process of in any other suitable process.
  • any kind of laser may be used, having sufficient intensity and working in the visible light area or near that area.
  • the light beam may be of circular or elliptic section or any other suitable section.
  • the configuration of the laser beam may be adapted to the material to be modified.
  • feed in the range of about 0,01 - 0,1 m/s may be used with beam intensities of 0,1 - 10 kW/mm2.
  • Commercially available JAG and diode laser between about 100 - 1000 W may be employed.
  • the beam may be pulsed or not pulsed.
  • the shaping of the emitting body is achieved by the evaporation of unwanted material and local melting in the emitting surface of the material to be treated by the laser radiation. This way a cleaning effect will result. Small amounts of excess material as well as possible other non- stable material being present will be fixed by an etching effect or be evaporated. A surface thus cleaned, without loose particles, increases stability and working life of a resulting light source.
  • the shaping may be to any desired shape.
  • flat and cylindrical bodies may be formed.
  • Flat emitting surfaces (having the emitting portions along a plane) may be produced by a linear sweeping displacement sideways of a laser beam relative to a body (fig 5) or alternatively of a body to be shaped and modified relative to a stationary laser beam.
  • Methods of making cylindrical emitting surfaces (having the emitting portions along a cylinder surface) other than the method mentioned above (fig 4) are as examples: either rotating the body to be shaped and modified relative to a stationary laser beam or rendering a laser beam a circular sideways sweep path relative to the body.

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  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Nanotechnology (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Theoretical Computer Science (AREA)
  • Mathematical Physics (AREA)
  • Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Cold Cathode And The Manufacture (AREA)
  • Discharge Lamps And Accessories Thereof (AREA)
  • Electroluminescent Light Sources (AREA)
  • Laser Beam Processing (AREA)
  • Treatment Of Fiber Materials (AREA)
  • Chemical Or Physical Treatment Of Fibers (AREA)

Abstract

L'invention concerne un procédé de production d'une cathode d'émission par effet de champ pour source lumineuse, laquelle cathode comprend au moins un corps d'émission par effet de champ pourvu d'une surface d'émission par effet de champ. Ledit procédé consiste à modifier ladite surface d'émission de manière à créer au moins un irrégularité électrique d'émission par effet de champ au niveau de chacune desdites surfaces. Le procédé est caractérisé en ce qu'on utilise un faisceau laser pour profiler ledit corps, lequel faisceau est simultanément amené au contact de la surface d'émission par effet de champ, ce qui permet de réaliser un traitement de modification à la surface du corps. L'invention concerne également une cathode d'émission par effet de champ produite conformément audit procédé et une source lumineuse comprenant une cathode d'émission par effet de champ de ce type.
PCT/SE2000/001226 1999-06-10 2000-06-13 Procede de production d'une cathode d'emission par effet de champ, cathode d'emission par effet de champ et source lumineuse WO2000077813A1 (fr)

Priority Applications (8)

Application Number Priority Date Filing Date Title
AU57209/00A AU5720900A (en) 1999-06-10 2000-06-13 Method of producing a field emission cathode, a field emission cathode and a light source
MXPA01012720A MXPA01012720A (es) 1999-06-10 2000-06-13 Catodo de emision de campo, metodo para producirlo y fuente de luz.
RU2002100205/09A RU2002100205A (ru) 1999-06-10 2000-06-13 Способ изготовления холодного катода, холодный катод и источник света
HK03100758.9A HK1048702A1 (zh) 1999-06-10 2000-06-13 生產場致發射陰極的方法、場致發射陰極及光源
JP2001503197A JP2003502798A (ja) 1999-06-10 2000-06-13 電界放射陰極及びこれを含む光源の製造方法
BR0011479-0A BR0011479A (pt) 1999-06-10 2000-06-13 Método de produção de um catodo emissor de campo para uma fonte de luz, catodo emissor de campo, e, fonte de luz
EP00942609A EP1192634A1 (fr) 1999-06-10 2000-06-13 Procede de production d'une cathode d'emission par effet de champ, cathode d'emission par effet de champ et source lumineuse
CA002376824A CA2376824A1 (fr) 1999-06-10 2000-06-13 Procede de production d'une cathode d'emission par effet de champ, cathode d'emission par effet de champ et source lumineuse

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
SE9902190A SE9902190L (sv) 1999-06-10 1999-06-10 Förfarande för framställning av en fältemissionskatod, en fältemissionskatod och en ljuskälla
SE9902190-9 1999-06-10
US13979599P 1999-06-21 1999-06-21
US60/139,795 1999-06-21

Publications (1)

Publication Number Publication Date
WO2000077813A1 true WO2000077813A1 (fr) 2000-12-21

Family

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Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/SE2000/001226 WO2000077813A1 (fr) 1999-06-10 2000-06-13 Procede de production d'une cathode d'emission par effet de champ, cathode d'emission par effet de champ et source lumineuse

Country Status (10)

Country Link
EP (1) EP1192634A1 (fr)
JP (1) JP2003502798A (fr)
CN (1) CN1361918A (fr)
AU (1) AU5720900A (fr)
BR (1) BR0011479A (fr)
CA (1) CA2376824A1 (fr)
HK (1) HK1048702A1 (fr)
MX (1) MXPA01012720A (fr)
RU (1) RU2002100205A (fr)
WO (1) WO2000077813A1 (fr)

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
RU2253167C2 (ru) * 2003-07-02 2005-05-27 Федеральное Государственное Унитарное Предприятие Научно-Исследовательский Институт "Волга" Катодолюминесцентный матричный экран
RU2258974C1 (ru) * 2003-12-16 2005-08-20 Федеральное Государственное Унитарное Предприятие Научно-Исследовательский Институт "Волга" Низковольтный катодолюминесцентный матричный экран
US7932477B2 (en) 2007-11-23 2011-04-26 Tsinghua University Electron beam heating system having carbon nanotubes
US7988515B2 (en) 2007-11-02 2011-08-02 Tsinghua University Method for manufacturing field emission electron source having carbon nanotubes
US7997950B2 (en) 2007-11-02 2011-08-16 Hon Hai Precision Industry Co., Ltd. Field emission electron source having carbon nanotubes and method for manufacturing the same
US8029328B2 (en) 2007-11-02 2011-10-04 Tsinghua University Method for manufacturing field emission electron source having carbon nanotubes
RU2468462C2 (ru) * 2010-06-07 2012-11-27 Российская Федерация, от имени которой выступает Министерство образования и науки Способ обработки электронно-полевых катодов

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7015496B2 (en) * 2002-12-27 2006-03-21 Semiconductor Energy Laboratory Co., Ltd. Field emission device and manufacturing method thereof
RU2288890C2 (ru) * 2003-09-11 2006-12-10 Федеральное государственное учреждение "Технологический институт сверхтвердых и новых углеродных материалов (ФГУ "ТИСНУМ") Способ получения нановолоконного материала для холодных катодов
ATE453924T1 (de) * 2005-07-14 2010-01-15 Lightlab Sweden Ab Kohlenstoffbasierte feldemissionskathode und deren herstellungsverfahren
RU2331573C1 (ru) * 2006-10-26 2008-08-20 Федеральное государственное учреждение "Технологический институт сверхтвердых и новых углеродных материалов" (ФГУ ТИСНУМ) Способ изготовления холодного катода с эмиссионным слоем из нановолоконного материала на основе углерода
JP5342127B2 (ja) * 2007-02-28 2013-11-13 富士重工業株式会社 発光装置
JP4913791B2 (ja) * 2007-11-02 2012-04-11 ツィンファ ユニバーシティ 電界放出型電子源及びその製造方法
KR101986413B1 (ko) * 2017-03-20 2019-09-30 경희대학교 산학협력단 전자방출 소스유닛 및 이를 구비하는 디지털 엑스레이 소스

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1996000974A1 (fr) * 1994-06-29 1996-01-11 Silicon Video Corporation Structure et fabrication de dispositifs a emission d'electrons
WO1996025753A1 (fr) * 1995-02-15 1996-08-22 Lightlab Ab Cathode a emission de champ et procedes pour la realiser
WO1997007522A1 (fr) * 1995-08-14 1997-02-27 Sandia Corporation Procede de creation de sites d'emission par effet de champ controles
DE19653820A1 (de) * 1996-12-21 1998-06-25 Guenter Prof Dr Rer Nat Reise Verfahren zur Herstellung von in einer Oberfläche verteilt angeordneten Feldemissionsemittern

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1996000974A1 (fr) * 1994-06-29 1996-01-11 Silicon Video Corporation Structure et fabrication de dispositifs a emission d'electrons
WO1996025753A1 (fr) * 1995-02-15 1996-08-22 Lightlab Ab Cathode a emission de champ et procedes pour la realiser
WO1997007522A1 (fr) * 1995-08-14 1997-02-27 Sandia Corporation Procede de creation de sites d'emission par effet de champ controles
DE19653820A1 (de) * 1996-12-21 1998-06-25 Guenter Prof Dr Rer Nat Reise Verfahren zur Herstellung von in einer Oberfläche verteilt angeordneten Feldemissionsemittern

Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
RU2253167C2 (ru) * 2003-07-02 2005-05-27 Федеральное Государственное Унитарное Предприятие Научно-Исследовательский Институт "Волга" Катодолюминесцентный матричный экран
RU2258974C1 (ru) * 2003-12-16 2005-08-20 Федеральное Государственное Унитарное Предприятие Научно-Исследовательский Институт "Волга" Низковольтный катодолюминесцентный матричный экран
US7988515B2 (en) 2007-11-02 2011-08-02 Tsinghua University Method for manufacturing field emission electron source having carbon nanotubes
US7997950B2 (en) 2007-11-02 2011-08-16 Hon Hai Precision Industry Co., Ltd. Field emission electron source having carbon nanotubes and method for manufacturing the same
US8029328B2 (en) 2007-11-02 2011-10-04 Tsinghua University Method for manufacturing field emission electron source having carbon nanotubes
US8339022B2 (en) 2007-11-02 2012-12-25 Tsinghua University Field emission electron source having carbon nanotubes
US7932477B2 (en) 2007-11-23 2011-04-26 Tsinghua University Electron beam heating system having carbon nanotubes
RU2468462C2 (ru) * 2010-06-07 2012-11-27 Российская Федерация, от имени которой выступает Министерство образования и науки Способ обработки электронно-полевых катодов

Also Published As

Publication number Publication date
BR0011479A (pt) 2002-03-19
HK1048702A1 (zh) 2003-04-11
RU2002100205A (ru) 2003-08-10
CA2376824A1 (fr) 2000-12-21
MXPA01012720A (es) 2002-11-04
AU5720900A (en) 2001-01-02
CN1361918A (zh) 2002-07-31
JP2003502798A (ja) 2003-01-21
EP1192634A1 (fr) 2002-04-03

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