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WO2014088137A1 - Dispositif de serrage pour conduites sous vide - Google Patents

Dispositif de serrage pour conduites sous vide Download PDF

Info

Publication number
WO2014088137A1
WO2014088137A1 PCT/KR2012/010608 KR2012010608W WO2014088137A1 WO 2014088137 A1 WO2014088137 A1 WO 2014088137A1 KR 2012010608 W KR2012010608 W KR 2012010608W WO 2014088137 A1 WO2014088137 A1 WO 2014088137A1
Authority
WO
WIPO (PCT)
Prior art keywords
clamp
flange
vacuum
fixing
nut
Prior art date
Application number
PCT/KR2012/010608
Other languages
English (en)
Korean (ko)
Inventor
김기남
Original Assignee
주식회사 엠아이
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 주식회사 엠아이 filed Critical 주식회사 엠아이
Priority to PCT/KR2012/010608 priority Critical patent/WO2014088137A1/fr
Publication of WO2014088137A1 publication Critical patent/WO2014088137A1/fr

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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16L—PIPES; JOINTS OR FITTINGS FOR PIPES; SUPPORTS FOR PIPES, CABLES OR PROTECTIVE TUBING; MEANS FOR THERMAL INSULATION IN GENERAL
    • F16L23/00—Flanged joints
    • F16L23/003—Auxiliary devices
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16L—PIPES; JOINTS OR FITTINGS FOR PIPES; SUPPORTS FOR PIPES, CABLES OR PROTECTIVE TUBING; MEANS FOR THERMAL INSULATION IN GENERAL
    • F16L23/00—Flanged joints
    • F16L23/04—Flanged joints the flanges being connected by members tensioned in the radial plane
    • F16L23/08—Flanged joints the flanges being connected by members tensioned in the radial plane connection by tangentially arranged pin and nut

Definitions

  • At least one contact buffer groove is formed on both inner walls of the first insertion groove and the second insertion groove.
  • One end of the bolt portion is preferably formed in a hexagonal shape.
  • One end is rotatably hinged to the free end of the first clamp, the other end is preferably provided with a protective bracket that is detachably coupled to the second clamp to prevent the first spring and the washer from being exposed to the outside.
  • the protective bracket is preferably made of a transparent plastic material so that the coupling and loosening of the first spring and the washer can be confirmed from the outside.
  • the anti-loosening member may include a reverse rotation prevention tool configured to hinge in the operating chamber so that the locking protrusion protrudes to one side so as to sequentially contact the first gear part of the nut part, and one end of which is rotatable up and down in the vertical guide hole; And a second spring provided in the operating chamber to always push the reverse rotation prevention tool to the hinged portion of the reverse rotation prevention tool so as to contact the first gear part of the nut part. It is preferable to include.
  • the second clamp is provided with a ball plunger which is operated forward and backward in the direction of the operating chamber.
  • the second clamp is spaced apart from the anti-rotation stop, and the nut part is rotated in the counterclockwise direction. It is preferable that the reverse rotation prevention device is pressed so as not to move.
  • the ball plunger is horizontal with respect to the connection link, screwed to the second clamp so as to be able to move forward and backward, the plunger body having a thread formed therein;
  • a third spring fitted into the plunger body;
  • a fixing ball to fix the anti-rotation prevention device by pressing the reverse rotation prevention means by the elastic force of the third spring. It is preferable to include.
  • one of the first clamp and the second clamp is laser marked.
  • connection link 130 is preferably provided in plurality.
  • the first flange of the first pipe and the second flange of the second pipe are in contact with each other.
  • the first and second flanges are pressed by the first clamp and the second clamp to be fixed by the locking member.
  • the locking member when the locking member is screwed to the bolt part with the nut part, the locking member may be elastically supported primarily by the spring, and secondly, the release of the nut part may be prevented by the anti-flame member, and the protective bracket may be thirdly applied to the protection bracket. It encloses the locking member so as to maintain an improved engagement state.
  • by pressing the centering by the auxiliary fixing member has an effect to maintain a more solid coupling state.
  • FIG. 3 is a photograph of a state in which the first clamp and the second clamp in FIG. 1 are unfolded with respect to each other;
  • FIG. 4 is a photograph of a state in which the first pipe, the second pipe, and the locking member are disassembled in FIG. 3;
  • FIG. 5 is a perspective view of a clamp for vacuum piping according to the present invention.
  • FIG. 6 is a front view of FIG. 5;
  • FIG. 8 is a right side view of FIG. 5;
  • FIG. 14 and 15 are views showing a clamp for a vacuum pipe to which the auxiliary fixing member is applied according to the present invention.
  • FIG. 14 is before the auxiliary fixing member is fitted, and
  • FIG. 15 is after the auxiliary fixing member is inserted.
  • the clamp 100 for the vacuum pipe includes a first clamp 110 and a second clamp 120.
  • the first clamp 110 has an inner diameter in which the first insertion groove 112 of the first flange P12 and the second flange P22 is formed.
  • the first clamp 110 is preferably formed in a semicircular shape.
  • the second clamp 120 is formed with a second insertion groove 122 of the first flange P12 and the second flange P22. Like the first clamp 110, the second clamp 120 is preferably formed in a semicircular shape.
  • the fixed step 124 is provided at the free end of the second clamp 120.
  • At least one contact buffer groove 114 may be formed at both inner walls of the first insertion groove 112 and the second insertion groove 122. In the contact buffer groove 114, the contact area of the first and second flanges P12 and P22 may be reduced to the maximum in the first and second insertion grooves 112 and 122 to improve the tightening force.
  • the release preventing groove 128 is preferably provided to the second clamp 120 successively from the fixed step 124.
  • the separation prevention groove 128 may prevent the nut part 144 screwed into the bolt part 142 from being pulled out by itself. That is, the nut part 144 is not easily retracted from the departure prevention groove 128 to some extent, so that the rotation of the first clamp 110 becomes difficult.
  • the connecting link 130 is hinged at both ends so as to be rotatable to the free ends of the first clamp 110 and the second clamp 120.
  • One end of the locking member is hinged to the first clamp 110, and the other end is detachably coupled to the second clamp 120.
  • One end of the locking member is hinged to the first clamp 110 so as to be rotatable, and a thread is provided on the outer circumferential surface to detach the bolt portion 142 detachably coupled to the fixing step 124 of the second clamp 120.
  • the nut part 144 penetrates the screw hole in the longitudinal direction of the inner diameter to be screwed to the outer circumferential surface of the bolt part 142, and is detachably coupled to the fixing groove 126 of the second clamp 120.
  • first spring 148 having washers at both sides is coupled to the bolt 142 so that the nut 144 can be elastically supported in the fixing groove 126 of the second clamp 120.
  • One end of the bolt portion 142 is preferably formed in a hexagonal shape.
  • At least one or more entrance holes H penetrate through one side of the outer circumferential surfaces of the first clamp 110 and the second clamp 120, and are provided to be accessible through the entrance holes H.
  • Auxiliary fixing member SF is provided.
  • the female thread is formed in the entrance hole H of the first clamp 110 and the second clamp 120, and the auxiliary fixing member SF is formed of a male screw to be screwed into the entrance hole H, and the auxiliary fixing member At the tip of the (SF), a rubber cushion cap (BC) is provided.
  • the first gear portion 145 is formed on the outer circumferential surface of the nut portion 144.
  • the operating chamber 129 is provided in the second clamp 120 at a position corresponding to the first gear portion 145.
  • the anti-loosening member is provided in the operating chamber 129 of the second clamp 120.
  • the vertical guide hole 129a is provided to the side wall of the second clamp 120 to communicate with the operation chamber 129.
  • the anti-loosening member includes a reverse rotation prevention device 150 and a second spring 164.
  • the reverse rotation prevention tool 150 has a locking protrusion 162 protruding to one side so as to sequentially contact the first gear part 145 of the nut part 144, and one end thereof rotates up and down in the vertical guide hole 129a. It is hinged in the operating chamber 129 to enable it.
  • the second spring 164 always pushes the reverse rotation prevention tool 150 to the hinged portion of the reverse rotation prevention tool 150 so as to contact the first gear part 145 of the nut part 144. 129 is provided.
  • the ball plunger 170 is provided to the second clamp 120 to be operated forward and backward in the direction of the operating chamber 129.
  • the nut part 144 is rotated in a clockwise direction, the nut part 144 is spaced apart from the anti-rotation preventing part 150, and when the nut part 144 is rotated in the counterclockwise direction, the nut is not pressed by the reverse rotation preventing part 150. do.
  • the ball plunger 170 includes a third spring 174 and a fixed ball 176 in the plunger body 172.
  • the plunger body 172 is horizontal with respect to the connection link 130, is screwed to the second clamp 120 so as to be able to move forward, backward, and a thread is formed therein.
  • the third spring 174 is fitted inside the plunger body 172.
  • the fixing ball 176 is fixed by pressing the reverse rotation prevention device 150 by the elastic force of the third spring 174 so as not to move.
  • One of the first clamp 110 and the second clamp 120 may be laser marked. This can prevent problems such as being removed by friction after attaching a trademark or the like on the outer surface.
  • connection link 130 may be provided in plurality. By doing so, the first clamp 110 and the second clamp 120 can be prevented from being twisted about the plurality of connection links 130.
  • the first flange P12 of the first pipe P10 and the second flange P22 of the second pipe P20 may be in close contact with each other with the center ring CR therebetween.
  • the first flange P12 and the second flange P22 which are in close contact with each other are fitted into the second insertion groove 122 of the second clamp 120 to be coupled.
  • the second clamp 120 is rotated around the hinged portion of the first clamp 110 so that the first flange P12 and the second flange P22 coupled to each other are connected to the first insertion groove 112.
  • the first clamp 110 is rotated to fit.
  • the bolt portion 142 is rotated around the hinged portion of the first clamp 110. At this time, the bolt portion 142 is fixed to the fixing groove 126 formed in the fixing step 124 of the second clamp 120.
  • the first spring 148 and the washer 146 are located between the fixed step 124 and the free end of the first clamp 110. At the same time, the bolt portion 142 is fitted into the separation prevention groove 128 formed in the second clamp 120.
  • the worker uses a tool such as a wrench to fasten the nut part 144 to the bolt part 142 to advance into the departure preventing groove 128.
  • the first clamp 110 and the second clamp 120 are pulled against each other.
  • the first spring 148 is in a compressed state due to tightening of the nut part 144.
  • the worker continues to work until the nut portion 144 is no longer tightened.
  • the first flange P12 of the first pipe P10 and the second flange P22 of the second pipe P20 are fixedly adhered to each other so that a firmly coupled state is maintained even from external shock such as vibration.
  • the locking protrusion 162 of the reverse rotation prevention tool 150 is in contact with the first gear portion 145 of the nut portion 144 sequentially.
  • the reverse rotation prevention device 150 is rotated around the hinge-coupled portion in the operating chamber 129 is one end is rotated up and down in the vertical guide hole (129a).
  • the second spring 164 provided in the operating chamber 129 always pushes the reverse rotation prevention tool 150 to the hinged portion of the reverse rotation prevention tool 150, and thus the first gear part of the nut part 144. 145 is contacted.
  • the ball plunger 170 provided in the second clamp 120 is operated forward and backward in the direction of the operating chamber 129.
  • the nut part 144 is rotated in a clockwise direction, the nut part 144 is spaced apart from the anti-rotation preventing part 150.
  • the nut part 144 is rotated in a counterclockwise direction, the nut part 144 is pressed by the reverse rotation preventing part 150. It won't be.
  • the protection bracket 150 is rotated around the hinged portion of the first clamp 110 to be coupled to the second clamp 120 by the interference fit method.
  • the first spring 148, the washer 146, and the nut part 144 are wrapped and protected from the outside by the protection bracket 150. That is, the nut 144 may be prevented from being easily removed from the bolt 142 by the elastic force of the first spring 148, and may be secondarily prevented by the protection bracket 150. .
  • the auxiliary fixing member SF is fitted into the access hole H of the first clamp 110 and the second clamp 120.
  • the centering (CR) portion which is a coupling portion between the first flange P12 of the first pipe P10 and the second flange P22 of the second pipe P20, which are joined to each other, is pressed so as not to move.
  • the female thread is formed in the access hole (H) of the first clamp 110 and the second clamp 120
  • the auxiliary fixing member (SF) is formed with the male thread of the access hole (H).
  • the auxiliary fixing member (SF) is screwed to the access hole (H).
  • the front end of the auxiliary fixing member (SF) is provided with a buffer cap (BC) made of a rubber material to prevent damage during contact with the center ring (CR).

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  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Clamps And Clips (AREA)

Abstract

La présente invention concerne un dispositif de serrage amélioré pour une conduite de transport sous vide, dans lequel de multiples conduites de transport sous vide sont agencées pour maintenir un état sous vide dans l'équipement principal durant un procédé de fabrication de semi-conducteur, et les conduites de transport sous vide sont agencées de sorte que des vibrations continues puissent être produites et l'état raccordé des conduites sous vide puisse être fermement maintenu tout en maintenant un état étanche à l'air sans le desserrage des conduites sous vide par les vibrations. Le dispositif de serrage pour les conduites sous vide est conçu de sorte qu'une première bride d'une première conduite et une seconde bride d'une seconde conduite entrent en contact l'une avec l'autre et soient fixées pour être séparables l'une de l'autre, une bague centrale étant interposée entre la première bride et la seconde bride. Le dispositif de serrage comprend un premier dispositif de serrage semi-circulaire qui comporte, le long de sa surface circonférentielle intérieure, une première rainure d'insertion pour la première bride et la seconde bride. Un second dispositif de serrage semi-circulaire comporte, le long de sa surface circonférentielle intérieure, une seconde rainure d'insertion pour la première bride et la seconde bride. Une liaison de raccordement comporte deux extrémités qui sont accouplées de façon rotative et articulée à des extrémités libres du premier dispositif de serrage et du second dispositif de serrage. Un élément de verrouillage comporte une extrémité qui est accouplée de façon articulée au premier dispositif de serrage et l'autre extrémité qui est accouplée de façon séparable au second dispositif de serrage. Le second dispositif de serrage comprend une extrémité libre qui comporte une protubérance de fixation, ladite protubérance de fixation comprenant une rainure de fixation. Les surfaces extérieures du premier dispositif de serrage et du second dispositif de serrage sont pénétrées par des trous d'entrée/de sortie, et au moins un élément de fixation auxiliaire peut entrer dans les trous d'entrée/de sortie ou sortir desdits trous d'entrée/de sortie.
PCT/KR2012/010608 2012-12-07 2012-12-07 Dispositif de serrage pour conduites sous vide WO2014088137A1 (fr)

Priority Applications (1)

Application Number Priority Date Filing Date Title
PCT/KR2012/010608 WO2014088137A1 (fr) 2012-12-07 2012-12-07 Dispositif de serrage pour conduites sous vide

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/KR2012/010608 WO2014088137A1 (fr) 2012-12-07 2012-12-07 Dispositif de serrage pour conduites sous vide

Publications (1)

Publication Number Publication Date
WO2014088137A1 true WO2014088137A1 (fr) 2014-06-12

Family

ID=50883544

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/KR2012/010608 WO2014088137A1 (fr) 2012-12-07 2012-12-07 Dispositif de serrage pour conduites sous vide

Country Status (1)

Country Link
WO (1) WO2014088137A1 (fr)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20240052959A1 (en) * 2021-02-03 2024-02-15 Norma Germany Gmbh Profile Clamp, Flange Connection, and Turbocharger Comprising Same

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2001004080A (ja) * 1999-06-21 2001-01-09 Mirapuro:Kk 真空配管のフランジ用クランプ
KR20030050647A (ko) * 2001-12-19 2003-06-25 삼성전자주식회사 배관 클램프
KR20090020126A (ko) * 2007-08-22 2009-02-26 주식회사 에스엠아이 진공배관용 클램프
KR101017961B1 (ko) * 2010-07-27 2011-03-02 주식회사 엠아이 진공 배관용 클램프
US20120242083A1 (en) * 2011-03-22 2012-09-27 Airvac Inc Pipe coupling

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2001004080A (ja) * 1999-06-21 2001-01-09 Mirapuro:Kk 真空配管のフランジ用クランプ
KR20030050647A (ko) * 2001-12-19 2003-06-25 삼성전자주식회사 배관 클램프
KR20090020126A (ko) * 2007-08-22 2009-02-26 주식회사 에스엠아이 진공배관용 클램프
KR101017961B1 (ko) * 2010-07-27 2011-03-02 주식회사 엠아이 진공 배관용 클램프
US20120242083A1 (en) * 2011-03-22 2012-09-27 Airvac Inc Pipe coupling

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20240052959A1 (en) * 2021-02-03 2024-02-15 Norma Germany Gmbh Profile Clamp, Flange Connection, and Turbocharger Comprising Same

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