[go: up one dir, main page]

WO2018168935A1 - Module optique - Google Patents

Module optique Download PDF

Info

Publication number
WO2018168935A1
WO2018168935A1 PCT/JP2018/009992 JP2018009992W WO2018168935A1 WO 2018168935 A1 WO2018168935 A1 WO 2018168935A1 JP 2018009992 W JP2018009992 W JP 2018009992W WO 2018168935 A1 WO2018168935 A1 WO 2018168935A1
Authority
WO
WIPO (PCT)
Prior art keywords
opening
region
mirror
layer
axis direction
Prior art date
Application number
PCT/JP2018/009992
Other languages
English (en)
Japanese (ja)
Inventor
智史 鈴木
達哉 杉本
恭輔 港谷
Original Assignee
浜松ホトニクス株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP2017048566A external-priority patent/JP6793066B2/ja
Priority claimed from JP2017074492A external-priority patent/JP6716491B2/ja
Application filed by 浜松ホトニクス株式会社 filed Critical 浜松ホトニクス株式会社
Priority to US16/492,691 priority Critical patent/US11513339B2/en
Priority to CN201880017386.3A priority patent/CN110418994B/zh
Priority to DE112018001349.9T priority patent/DE112018001349T5/de
Publication of WO2018168935A1 publication Critical patent/WO2018168935A1/fr

Links

Images

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
    • G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
    • G02B26/0841—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD the reflecting element being moved or deformed by electrostatic means
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
    • G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B3/00—Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/02—Details
    • G01J3/0202—Mechanical elements; Supports for optical elements
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/02—Details
    • G01J3/0205—Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/02—Details
    • G01J3/0205—Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows
    • G01J3/0218—Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows using optical fibers
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/02—Details
    • G01J3/0256—Compact construction
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/02—Details
    • G01J3/06—Scanning arrangements arrangements for order-selection
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/28—Investigating the spectrum
    • G01J3/45—Interferometric spectrometry
    • G01J3/453—Interferometric spectrometry by correlation of the amplitudes
    • G01J3/4532—Devices of compact or symmetric construction
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/28—Investigating the spectrum
    • G01J3/45—Interferometric spectrometry
    • G01J3/453—Interferometric spectrometry by correlation of the amplitudes
    • G01J3/4535—Devices with moving mirror
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/25—Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
    • G01N21/31—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry
    • G01N21/35—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using infrared light
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/06—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the phase of light
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
    • G02B27/10—Beam splitting or combining systems
    • G02B27/14—Beam splitting or combining systems operating by reflection only
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2201/00—Specific applications of microelectromechanical systems
    • B81B2201/04—Optical MEMS
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B3/00—Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes
    • B81B3/0035—Constitution or structural means for controlling the movement of the flexible or deformable elements
    • B81B3/004—Angular deflection
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/28—Investigating the spectrum
    • G01J3/45—Interferometric spectrometry

Definitions

  • One aspect of the present disclosure relates to an optical module.
  • An optical module in which an interference optical system is formed on an SOI (Silicon On Insulator) substrate by MEMS (Micro Electro Mechanical Systems) technology is known (see, for example, Patent Document 1).
  • Such an optical module is attracting attention because it can provide an FTIR (Fourier transform infrared spectroscopic analyzer) in which a highly accurate optical arrangement is realized.
  • the optical module as described above has the following problems in that, for example, the size of the movable mirror depends on the achievement level of deep processing on the SOI substrate. That is, since the degree of achievement of deep processing for the SOI substrate is about 500 ⁇ m at the maximum, there is a limit to increase the sensitivity in FTIR by increasing the size of the movable mirror. Therefore, a technique for mounting a movable mirror formed separately on a device layer (for example, a layer in which a drive region is formed in an SOI substrate) can be considered.
  • An object of one aspect of the present disclosure is to provide an optical module in which a movable mirror is reliably mounted on a device layer.
  • An optical module includes a support layer, a device layer provided on the support layer, and a movable mirror mounted on the device layer, and the device layer includes a mounting region through which the movable mirror passes.
  • a drive region connected to the mounting region, and a space corresponding to at least the mounting region and the drive region is formed between the support layer and the device layer, and a part of the movable mirror is a space Is located.
  • the movable mirror passes through the mounting area of the device layer, and a part of the movable mirror is located in a space formed between the support layer and the device layer. Thereby, the movable mirror can be stably and firmly fixed to the mounting region of the device layer. Therefore, according to this optical module, reliable mounting of the movable mirror to the device layer is realized.
  • the optical module according to one aspect of the present disclosure further includes an intermediate layer provided between the support layer and the device layer.
  • the intermediate layer includes a first opening
  • the support layer includes a recess or a second layer. Two openings are formed, and the space includes a region in the first opening and a region in the recess, or a region in the first opening and a region in the second opening, and a part of the movable mirror is in the recess. Or a region within the second opening.
  • the support layer is a first silicon layer of an SOI substrate
  • the device layer is a second silicon layer of the SOI substrate
  • the intermediate layer is an insulating layer of the SOI substrate. Also good. According to this, the configuration for surely mounting the movable mirror on the device layer can be suitably realized by the SOI substrate.
  • the support layer includes a recess or an opening
  • the space includes a region in the recess or a region in the opening
  • a part of the movable mirror is a region in the recess. Or you may be located in the area
  • the device layer may include a recess
  • the space may include a region in the recess
  • a part of the movable mirror may be located in the region in the recess.
  • the device layer includes a first recess
  • the support layer includes a second recess or an opening
  • the space includes a region in the first recess and The region in the second recess, or the region in the first recess and the region in the opening may be included, and a part of the movable mirror may be located in the region in the second recess or the region in the opening.
  • the mirror surface of the movable mirror may be located on the side opposite to the support layer with respect to the device layer. According to this, the configuration of the optical module can be simplified.
  • An optical module includes a fixed mirror mounted on at least one of a support layer, a device layer, and an intermediate layer provided between the support layer and the device layer, a support layer, a device layer, and A beam splitter mounted on at least one of the intermediate layers, and the movable mirror, the fixed mirror, and the beam splitter may be arranged to constitute an interference optical system. According to this, FTIR with improved sensitivity can be obtained.
  • An optical module includes a light incident portion arranged to allow measurement light to be incident on the interference optical system from the outside, and a light emission portion arranged to emit the measurement light to the outside from the interference optical system And may be further provided. According to this, FTIR provided with a light incident part and a light emission part can be obtained.
  • an optical module in which the movable mirror is reliably mounted on the device layer.
  • FIG. 2 is a cross-sectional view taken along the line IIA-IIA shown in FIG.
  • FIG. 3 is a cross-sectional view taken along line IIIA-IIIA shown in FIG.
  • FIG. 4 is a cross-sectional view taken along the line IVA-IVA shown in FIG.
  • FIG. 2 is a cross-sectional view taken along the line VA-VA shown in FIG.
  • It is sectional drawing of the modification of the surrounding structure of a movable mirror. It is sectional drawing of the modification of the surrounding structure of a movable mirror. It is sectional drawing of the modification of the surrounding structure of a movable mirror. It is sectional drawing of the modification of the surrounding structure of a movable mirror. It is sectional drawing of the modification of the surrounding structure of a movable mirror.
  • FIG. 17 is a cross-sectional view taken along the line IIB-IIB shown in FIG.
  • FIG. 17 is a cross-sectional view taken along line IIIB-IIIB shown in FIG.
  • FIG. 17 is a cross-sectional view taken along the line VIIB-VIIB shown in FIG.
  • FIG. 18 is a cross-sectional view taken along line VIIIB-VIIIB shown in FIG. It is sectional drawing which shows the modification of 1st opening.
  • FIG. 26 is a cross-sectional view taken along line XIB-XIB shown in FIG. 25. It is a top view of the optical module of one Embodiment.
  • FIG. 28 is a cross-sectional view taken along the line IIC-IIC shown in FIG. 27.
  • FIG. 28 is a sectional view taken along line IIIC-IIIC shown in FIG. 27.
  • (A) is a perspective view of the peripheral structure of the movable mirror shown in FIG. 27, and
  • (b) is a cross-sectional view taken along the line IVbC-IVbC shown in (a) of FIG.
  • FIG. 28 is a cross-sectional view taken along the line VC-VC shown in FIG. 27.
  • FIG. 28 is a cross-sectional view taken along the line VIC-VIC shown in FIG. 27. It is sectional drawing of the modification of the surrounding structure of a movable mirror. It is sectional drawing of the modification of the surrounding structure of a movable mirror. It is sectional drawing of the modification of the surrounding structure of a movable mirror. It is sectional drawing of the modification of the surrounding structure of a movable mirror. It is sectional drawing of the modification of the surrounding structure of a movable mirror. It is sectional drawing of the modification of the surrounding structure of a movable mirror. It is a partial schematic plan view of the optical module which concerns on a modification. FIG. 40 is a cross-sectional view taken along line IXVC-IXVC shown in FIG. 39. FIG.
  • FIG. 40 is a cross-sectional view taken along line XVC-XVC shown in FIG. 39. It is a front view which shows the modification of a movable mirror. It is sectional drawing of the modification shown by FIG. It is a front view which shows the modification of a movable mirror. It is a front view which shows the modification of a movable mirror. It is a front view which shows the modification of a movable mirror. It is a front view which shows the modification of a movable mirror. It is a front view which shows the modification of a movable mirror. It is a front view which shows the modification of a movable mirror. It is a front view which shows the modification of a movable mirror. It is a top view which shows the modification of opening. It is a top view which shows the modification of opening. It is sectional drawing which shows a movable mirror modification. It is a top view which shows the modification of opening.
  • an optical module 1A includes a support layer 2A, a device layer 3A provided on the support layer 2A, an intermediate layer 4A provided between the support layer 2A and the device layer 3A, I have.
  • the support layer 2A, the device layer 3A, and the intermediate layer 4A are configured by an SOI substrate.
  • the support layer 2A is the first silicon layer of the SOI substrate.
  • the device layer 3A is a second silicon layer of the SOI substrate.
  • the intermediate layer 4A is an insulating layer of the SOI substrate.
  • the support layer 2A, the device layer 3A, and the intermediate layer 4A have, for example, a rectangular shape with a side of about 10 mm when viewed from the ZA axis direction (a direction parallel to the ZA axis) that is the stacking direction thereof.
  • Each thickness of the support layer 2A and the device layer 3A is, for example, about several hundred ⁇ m.
  • the thickness of the intermediate layer 4A is, for example, about several ⁇ m.
  • the device layer 3A and the intermediate layer 4A are shown with one corner of the device layer 3A and one corner of the intermediate layer 4A cut out.
  • the device layer 3A has a mounting area 31A and a driving area 32A connected to the mounting area 31A.
  • the drive region 32A includes a pair of actuator regions 33A and a pair of elastic support regions 34A.
  • the mounting region 31A and the drive region 32A are integrally formed on a part of the device layer 3A by MEMS technology (patterning and etching). Yes.
  • the pair of actuator regions 33A are arranged on both sides of the mounting region 31A in the XA axis direction (the direction parallel to the XA axis orthogonal to the ZA axis). That is, the mounting area 31A is sandwiched between the pair of actuator areas 33A in the XA axis direction.
  • Each actuator region 33A is fixed to the support layer 2A via the intermediate layer 4A.
  • a first comb tooth portion 33aA is provided on a side surface of each actuator region 33A on the mounting region 31A side.
  • Each first comb tooth portion 33aA is in a state of floating with respect to the support layer 2A by removing the intermediate layer 4A immediately below the first comb tooth portion 33aA.
  • Each actuator region 33A is provided with a first electrode 35A.
  • the pair of elastic support regions 34A are disposed on both sides of the mounting region 31A in the YA axis direction (a direction parallel to the YA axis orthogonal to the ZA axis and the XA axis). That is, the mounting region 31A is sandwiched between the pair of elastic support regions 34A in the YA axis direction. Both end portions 34aA of each elastic support region 34A are fixed to the support layer 2A via the intermediate layer 4A.
  • Each elastic support region 34A has an elastic deformation portion 34bA (a portion between both end portions 34aA) having a structure in which a plurality of leaf springs are connected.
  • each elastic support region 34A is in a state of floating with respect to the support layer 2A by removing the intermediate layer 4A immediately below the elastic deformation portion 34bA.
  • a second electrode 36A is provided at each of both end portions 34aA.
  • each elastic support area 34A is connected to the mounting area 31A.
  • the mounting region 31A is in a state of floating with respect to the support layer 2A by removing the intermediate layer 4A immediately below the mounting region 31A. That is, the mounting area 31A is supported by the pair of elastic support areas 34A.
  • a second comb tooth portion 31aA is provided on a side surface of each mounting region 31A on the side of each actuator region 33A.
  • Each second comb tooth portion 31aA is in a state of floating with respect to the support layer 2A by removing the intermediate layer 4A immediately below it.
  • the comb teeth of the first comb tooth portion 33aA are located between the comb teeth of the second comb tooth portion 31aA.
  • the pair of elastic support regions 34A sandwich the mounting region 31A from both sides when viewed from the direction AA parallel to the XA axis.
  • the mounting region 31A moves along the direction AA, the mounting region 31A returns to the initial position.
  • an elastic force is applied to the mounting region 31A.
  • a voltage is applied between the first electrode 35A and the second electrode 36A and an electrostatic attractive force acts between the first comb tooth portion 33aA and the second comb tooth portion 31aA facing each other, the electrostatic attractive force
  • the mounting region 31A is moved along the direction AA to a position where the elastic force of the pair of elastic support regions 34A is balanced.
  • the drive region 32A functions as an electrostatic actuator.
  • the optical module 1A further includes a movable mirror 5A, a fixed mirror 6A, a beam splitter 7A, a light incident part 8A, and a light emitting part 9A.
  • the movable mirror 5A, the fixed mirror 6A, and the beam splitter 7A are arranged on the device layer 3A so as to constitute an interference optical system 10A that is a Michelson interference optical system.
  • the movable mirror 5A is mounted on the mounting region 31A of the device layer 3A on one side of the beam splitter 7A in the XA axis direction.
  • the mirror surface 51aA of the mirror portion 51A included in the movable mirror 5A is located on the opposite side of the support layer 2A with respect to the device layer 3A.
  • the mirror surface 51aA is, for example, a surface perpendicular to the XA axis direction (that is, a surface perpendicular to the direction AA) and faces the beam splitter 7A side.
  • the fixed mirror 6A is mounted on the mounting region 37A of the device layer 3A on one side of the beam splitter 7A in the YA axis direction.
  • the mirror surface 61aA of the mirror portion 61A of the fixed mirror 6A is located on the opposite side of the support layer 2A with respect to the device layer 3A.
  • the mirror surface 61aA is, for example, a surface perpendicular to the YA axis direction and faces the beam splitter 7A side.
  • the light incident portion 8A is mounted on the device layer 3A on the other side of the beam splitter 7A in the YA axis direction.
  • the light incident part 8A is configured by, for example, an optical fiber and a collimating lens.
  • the light incident part 8A is arranged so that measurement light is incident on the interference optical system 10A from the outside.
  • the light emitting portion 9A is mounted on the device layer 3A on the other side of the beam splitter 7A in the XA axis direction.
  • the light emitting unit 9A is configured by, for example, an optical fiber and a collimating lens.
  • the light emitting portion 9A is arranged to emit measurement light (interference light) from the interference optical system 10A to the outside.
  • the beam splitter 7A is a cube type beam splitter having an optical functional surface 7aA.
  • the optical functional surface 7aA is located on the side opposite to the support layer 2A with respect to the device layer 3A.
  • the beam splitter 7A is positioned by bringing one corner on the bottom side of the beam splitter 7A into contact with one corner of the rectangular opening 3aA formed in the device layer 3A.
  • the beam splitter 7A is mounted on the support layer 2A by being fixed to the support layer 2A by adhesion or the like in a positioned state.
  • the optical module 1A configured as described above, when the measurement light L0A is incident on the interference optical system 10A from the outside via the light incident portion 8A, a part of the measurement light L0A is transmitted to the optical functional surface 7aA of the beam splitter 7A.
  • the reflected light travels toward the movable mirror 5A, and the remaining portion of the measurement light L0A passes through the optical function surface 7aA of the beam splitter 7A and travels toward the fixed mirror 6A.
  • a part of the measurement light L0A is reflected by the mirror surface 51aA of the movable mirror 5A, travels on the same optical path toward the beam splitter 7A, and passes through the optical functional surface 7aA of the beam splitter 7A.
  • the remaining part of the measurement light L0A is reflected by the mirror surface 61aA of the fixed mirror 6A, travels on the same optical path toward the beam splitter 7A, and is reflected by the optical function surface 7aA of the beam splitter 7A.
  • a part of the measurement light L0A transmitted through the optical functional surface 7aA of the beam splitter 7A and the remaining part of the measurement light L0A reflected by the optical functional surface 7aA of the beam splitter 7A become the measurement light L1A that is interference light, and the measurement light L1A is emitted to the outside from the interference optical system 10A via the light emitting portion 9A.
  • the movable mirror 5A can be reciprocated at high speed along the direction AA, so that a small and highly accurate FTIR can be provided.
  • the movable mirror 5A includes a mirror part 51A, an elastic part 52A, a connecting part 53A, a pair of leg parts 54A, and a pair of locking parts 55A.
  • the movable mirror 5A configured as follows is integrally formed by a MEMS technique (patterning and etching).
  • the mirror part 51A is formed in a plate shape (for example, a disk shape) having the mirror surface 51aA as a main surface.
  • the elastic part 52A is formed in an annular shape (for example, an annular shape) surrounding the mirror part 51A while being separated from the mirror part 51A when viewed from the XA axis direction (direction perpendicular to the mirror surface 51aA).
  • the connection portion 53A connects the mirror portion 51A and the elastic portion 52A to each other on one side in the YA axis direction with respect to the center of the mirror portion 51A when viewed from the XA axis direction.
  • the pair of leg portions 54A are connected to the outer surface of the elastic portion 52A on both sides in the YA axis direction with respect to the center of the mirror portion 51A when viewed from the XA axis direction. That is, the mirror part 51A and the elastic part 52A are sandwiched between the pair of leg parts 54A in the YA axis direction. Each leg 54A extends closer to the mounting region 31A than the mirror 51A and the elastic part 52A.
  • the pair of locking portions 55A are provided at the end portions on the mounting region 31A side in the respective leg portions 54A. Each locking portion 55A is formed so as to be bent in, for example, a V shape on the inner side (side closer to each other) when viewed from the XA axis direction.
  • the movable mirror 5A configured as described above is mounted in the mounting region 31A by arranging a pair of locking portions 55A in the opening 31bA formed in the mounting region 31A.
  • the openings 31bA are opened on both sides of the mounting region 31A in the ZA axis direction.
  • a part of each locking portion 55A protrudes from the surface on the intermediate layer 4A side in the mounting region 31A. That is, the movable mirror 5A penetrates the mounting area 31A.
  • a force acts on the outside (side away from each other) in the pair of locking portions 55A arranged in the opening 31bA of the mounting region 31A.
  • the movable mirror 5A is fixed to the mounting region 31A by the force.
  • the force is generated when the annular elastic portion 52A compressed when the movable mirror 5A is mounted on the mounting region 31A is restored to the initial state.
  • the opening 31bA is formed in a trapezoidal shape spreading toward the opposite side to the beam splitter 7A when viewed from the ZA axis direction.
  • the movable mirror 5A automatically moves in each of the XA axis direction, the YA axis direction, and the ZA axis direction by engaging the opening 31bA having such a shape with a pair of engaging portions 55A that are bent inward. Positioned (self-aligned).
  • an opening (first opening) 41A is formed in the intermediate layer 4A.
  • the openings 41A are opened on both sides of the intermediate layer 4A in the ZA axis direction.
  • An opening (second opening) 21A is formed in the support layer 2A.
  • the openings 21A are opened on both sides of the support layer 2A in the ZA axial direction.
  • a continuous space S1A is constituted by a region in the opening 41A of the intermediate layer 4A and a region in the opening 21A of the support layer 2A. That is, the space S1A includes a region in the opening 41A of the intermediate layer 4A and a region in the opening 21A of the support layer 2A.
  • the space S1A is formed between the support layer 2A and the device layer 3A, and corresponds to at least the mounting region 31A and the drive region 32A.
  • the region in the opening 41A of the intermediate layer 4A and the region in the opening 21A of the support layer 2A include a range in which the mounting region 31A moves when viewed from the ZA axis direction.
  • the region in the opening 41A of the intermediate layer 4A is a portion that should be separated from the support layer 2A in the mounting region 31A and the drive region 32A (that is, a portion that should be in a floating state with respect to the support layer 2A.
  • a gap for separating the entire mounting region 31A, the elastic deformation portion 34bA, the first comb tooth portion 33aA, and the second comb tooth portion 31aA) of each elastic support region 34A from the support layer 2A is formed. That is, the space S1A corresponding to at least the mounting region 31A and the drive region 32A is the support layer 2A and the device layer so that the entire mounting region 31A and at least a part of the drive region 32A are separated from the support layer 2A. It means the space formed between 3A.
  • each locking portion 55A of the movable mirror 5A is located in the space S1A. Specifically, a part of each locking portion 55A is located in a region in the opening 21A of the support layer 2A via a region in the opening 41A of the intermediate layer 4A. A part of each locking portion 55A protrudes from the surface on the intermediate layer 4A side in the device layer 3A into the space S1A, for example, by about 100 ⁇ m. As described above, the region in the opening 41A of the intermediate layer 4A and the region in the opening 21A of the support layer 2A include the range in which the mounting region 31A moves when viewed from the ZA axis direction. Is reciprocated along the direction AA, a part of each locking portion 55A of the movable mirror 5A located in the space S1A does not come into contact with the intermediate layer 4A and the support layer 2A. [Fixed mirror and its peripheral structure]
  • the fixed mirror 6A includes a mirror part 61A, an elastic part 62A, a connecting part 63A, a pair of leg parts 64A, and a pair of locking parts 65A.
  • the fixed mirror 6A configured as follows is integrally formed by a MEMS technique (patterning and etching).
  • the mirror part 61A is formed in a plate shape (for example, a disk shape) having the mirror surface 61aA as a main surface.
  • the elastic portion 62A is formed in an annular shape (for example, an annular shape) surrounding the mirror portion 61A while being separated from the mirror portion 61A when viewed from the YA axis direction (direction perpendicular to the mirror surface 61aA).
  • the connecting part 63A connects the mirror part 61A and the elastic part 62A to each other on one side in the XA axis direction with respect to the center of the mirror part 61A when viewed from the YA axis direction.
  • the pair of leg portions 64A are connected to the outer surface of the elastic portion 62A on both sides in the XA axis direction with respect to the center of the mirror portion 61A when viewed from the YA axis direction. That is, the mirror part 61A and the elastic part 62A are sandwiched between the pair of leg parts 64A in the XA axis direction. Each leg portion 64A extends to the mounting region 37A side with respect to the mirror portion 61A and the elastic portion 62A.
  • the pair of locking portions 65A are provided at the end portions on the mounting region 37A side in the respective leg portions 64A. Each locking portion 65A is formed so as to be bent in, for example, a V shape on the inner side (side closer to each other) when viewed from the YA axis direction.
  • the fixed mirror 6A configured as described above is mounted in the mounting region 37A by arranging the pair of locking portions 65A in the opening 37aA formed in the mounting region 37A.
  • the openings 37aA are opened on both sides of the mounting area 37A in the ZA axis direction.
  • a part of each locking portion 65A protrudes from the surface on the intermediate layer 4A side in the mounting region 37A. That is, the fixed mirror 6A penetrates the mounting area 37A.
  • a force acts on the outside (side away from each other) on the pair of locking portions 65A arranged in the opening 37aA of the mounting region 37A.
  • the fixed mirror 6A is fixed to the mounting region 37A by the force.
  • the force is generated when the annular elastic portion 62A compressed when the fixed mirror 6A is mounted on the mounting region 37A is restored to the initial state.
  • the opening 37aA is formed in a trapezoidal shape spreading toward the opposite side to the beam splitter 7A when viewed from the ZA axis direction.
  • the fixed mirror 6A is automatically operated in each of the XA axis direction, the YA axis direction, and the ZA axis direction by engaging the opening 37aA having such a shape with a pair of engaging portions 65A that are bent inward. Positioned (self-aligned).
  • an opening 42A is formed in the intermediate layer 4A.
  • the opening 42A includes the opening 37aA of the mounting region 37A when viewed from the ZA axis direction, and opens on both sides of the intermediate layer 4A in the ZA axis direction.
  • An opening 22A is formed in the support layer 2A.
  • the opening 22A includes the opening 37aA of the mounting region 37A when viewed from the ZA axis direction, and is open on both sides of the support layer 2A in the ZA axis direction.
  • a continuous space S2A is constituted by the region in the opening 42A of the intermediate layer 4A and the region in the opening 22A of the support layer 2A. That is, the space S2A includes a region in the opening 42A of the intermediate layer 4A and a region in the opening 22A of the support layer 2A.
  • each locking portion 65A of the fixed mirror 6A is located in the space S2A. Specifically, a part of each locking portion 65A is located in a region in the opening 22A of the support layer 2A via a region in the opening 42A of the intermediate layer 4A. A part of each locking portion 65A protrudes from the surface of the device layer 3A on the intermediate layer 4A side into the space S2A, for example, by about 100 ⁇ m.
  • the movable mirror 5A passes through the mounting region 31A of the device layer 3A, and a part of each locking portion 55A of the movable mirror 5A is formed between the support layer 2A and the device layer 3A. Located in S1A.
  • the size and the like of each locking portion 55A is not limited, so that the movable mirror 5A can be stably and firmly fixed to the mounting region 31A of the device layer 3A. Therefore, according to the optical module 1A, reliable mounting of the movable mirror 5A to the device layer 3A is realized.
  • each locking portion 55A of the movable mirror 5A is located in a region in the opening 21A of the support layer 2A via a region in the opening 41A of the intermediate layer 4A.
  • the support layer 2A is the first silicon layer of the SOI substrate
  • the device layer 3A is the second silicon layer of the SOI substrate
  • the intermediate layer 4A is the insulating layer of the SOI substrate.
  • the mirror surface 51aA of the movable mirror 5A is located on the opposite side of the support layer 2A with respect to the device layer 3A. Thereby, the configuration of the optical module 1A can be simplified.
  • the movable mirror 5A, the fixed mirror 6A, and the beam splitter 7A are arranged so as to constitute the interference optical system 10A. Thereby, FTIR with improved sensitivity can be obtained.
  • the light incident part 8A is arranged so that the measurement light is incident on the interference optical system 10A from the outside, and the light emitting part 9A emits the measurement light from the interference optical system 10A to the outside.
  • FTIR provided with 8 A of light-incidence parts and 9 A of light-projection parts can be obtained.
  • the materials and shapes of each component are not limited to the materials and shapes described above, and various materials and shapes can be employed.
  • the shapes of the mirror portion 51A and the mirror surface 51aA are not limited to a circular shape, and may be other shapes such as a rectangular shape.
  • space S1A is formed between the support layer 2A and the device layer 3A, and as long as it corresponds to at least the mounting region 31A and the drive region 32A, as shown in FIG. 6 and FIG. Aspects can be employed.
  • a recess 23A that opens to the device layer 3A side is formed in the support layer 2A, and the region in the opening 41A of the intermediate layer 4A and the recess 23A in the support layer 2A
  • a space S1A is configured by the regions.
  • the region in the recess 23A of the support layer 2A includes a range in which the mounting region 31A moves when viewed from the ZA axis direction.
  • a part of each locking portion 55A of the movable mirror 5A is located in a region in the recess 23A through a region in the opening 41A of the intermediate layer 4A. Also with this configuration, a configuration for reliably mounting the movable mirror 5A on the device layer 3A can be suitably realized.
  • the region in the opening 21A of the support layer 2A includes a range in which each locking portion 55A of the movable mirror 5A moves when viewed from the ZA axis direction.
  • the region in the recess 23A of the support layer 2A includes a range in which each locking portion 55A of the movable mirror 5A moves when viewed from the ZA axis direction.
  • the region in the opening 41A of the intermediate layer 4A includes a range in which the mounting region 31A moves when viewed from the ZA axis direction, and is separated from the support layer 2A in the mounting region 31A and the drive region 32A.
  • a gap for separating the power portion from the support layer 2A is formed.
  • the mounting region 31A reciprocates along the direction AA, a part of each locking portion 55A of the movable mirror 5A located in the space S1A comes into contact with the intermediate layer 4A and the support layer 2A. There is no.
  • the support layer 2A and the device layer 3A may be joined to each other without interposing the intermediate layer 4A.
  • the support layer 2A is formed of, for example, silicon, glass, ceramic, and the like
  • the device layer 3A is formed of, for example, silicon.
  • the support layer 2A and the device layer 3A are bonded to each other by, for example, direct bonding, surface activation bonding, plasma bonding, anodic bonding, metal bonding, resin bonding, or the like.
  • the space S1A is formed between the support layer 2A and the device layer 3A, and if it corresponds to at least the mounting region 31A and the drive region 32A, FIG. 8, FIG. 9, FIG. As shown in FIG. 11, various modes can be adopted. In any of the configurations, a configuration for surely mounting the movable mirror 5A on the device layer 3A can be suitably realized.
  • a space S1A is configured by the region in the opening 21A of the support layer 2A.
  • the region in the opening 21A of the support layer 2A includes a range in which the mounting region 31A moves when viewed from the ZA axis direction, and should be separated from the support layer 2A in the mounting region 31A and the drive region 32A.
  • a gap for separating the portion from the support layer 2A is formed.
  • a part of each locking portion 55A of the movable mirror 5A is located in a region within the opening 21A of the support layer 2A.
  • the space S1A is constituted by the region in the recess 23A of the support layer 2A.
  • the region in the recess 23A of the support layer 2A includes a range in which the mounting region 31A moves when viewed from the ZA axis direction, and should be separated from the support layer 2A in the mounting region 31A and the drive region 32A.
  • a gap for separating the portion from the support layer 2A is formed.
  • a part of each locking portion 55A of the movable mirror 5A is located in a region in the recess 23A of the support layer 2A.
  • a recess (first recess) 38A that opens to the support layer 2A side is formed in the device layer 3A, and the region in the recess 38A of the device layer 3A and the support layer 2A A space S1A is configured by the region in the opening 21A.
  • the region in the recess 38A of the device layer 3A and the region in the opening 21A of the support layer 2A include a range in which the mounting region 31A moves when viewed from the ZA axis direction.
  • the region in the recess 38A of the device layer 3A forms a gap for separating the portion to be separated from the support layer 2A in the mounting region 31A and the drive region 32A from the support layer 2A.
  • a part of each locking portion 55A of the movable mirror 5A is located in a region in the opening 21A of the support layer 2A via a region in the recess 38A of the device layer 3A.
  • the recess 38A is formed in the device layer 3A, and the space is defined by the region in the recess 38A of the device layer 3A and the region in the recess (second recess) 23A of the support layer 2A.
  • S1A is configured.
  • the region in the recess 38A of the device layer 3A and the region in the recess 23A of the support layer 2A include a range in which the mounting region 31A moves when viewed from the ZA axis direction.
  • the region in the recess 38A of the device layer 3A forms a gap for separating the portion to be separated from the support layer 2A in the mounting region 31A and the drive region 32A from the support layer 2A.
  • a part of each locking portion 55A of the movable mirror 5A is located in a region in the recess 23A of the support layer 2A via a region in the recess 38A of the device layer 3A.
  • the recess 38A is formed in the device layer 3A, and the space S1A is configured by the region in the recess 38A of the device layer 3A and the region in the opening 21A of the support layer 2A.
  • the region in the recess 38A of the device layer 3A includes a range in which the mounting region 31A moves when viewed from the ZA axis direction, and should be separated from the support layer 2A in the mounting region 31A and the drive region 32A.
  • a gap for separating the portion from the support layer 2A is formed.
  • the region in the opening 21A of the support layer 2A includes a range in which each locking portion 55A of the movable mirror 5A moves when viewed from the ZA axis direction.
  • a part of each locking portion 55A of the movable mirror 5A is located in a region in the opening 21A of the support layer 2A via a region in the recess 38A of the device layer 3A.
  • the recess 38A is formed in the device layer 3A, and the space is defined by the region in the recess 38A of the device layer 3A and the region in the recess (second recess) 23A of the support layer 2A.
  • S1A is configured.
  • the region in the recess 38A of the device layer 3A includes a range in which the mounting region 31A moves when viewed from the ZA axis direction, and should be separated from the support layer 2A in the mounting region 31A and the drive region 32A.
  • a gap for separating the portion from the support layer 2A is formed.
  • the region in the recess 23A of the support layer 2A includes a range in which each locking portion 55A of the movable mirror 5A moves when viewed from the ZA axis direction.
  • a part of each locking portion 55A of the movable mirror 5A is located in a region in the recess 23A of the support layer 2A via a region in the recess 38A of the device layer 3A.
  • the recess 38A is formed in the device layer 3A, and the space S1A is constituted by the region in the recess 38A of the device layer 3A.
  • the region in the recess 38A of the device layer 3A includes a range in which the mounting region 31A moves when viewed from the ZA axis direction, and should be separated from the support layer 2A in the mounting region 31A and the drive region 32A.
  • a gap for separating the portion from the support layer 2A is formed.
  • a part of each locking portion 55A of the movable mirror 5A is located in a region in the recess 38A of the device layer 3A.
  • each leg 54A and a part of each locking part 55A of the movable mirror 5A are located in the space S1A, and the movable mirror 5A.
  • the mirror surface 51aA may be located on the opposite side of the support layer 2A from the device layer 3A.
  • the mirror surface 61aA of the fixed mirror 6A and the optical functional surface 7aA of the beam splitter 7A are also located on the opposite side of the support layer 2A from the device layer 3A.
  • the device layer 3A is integrally provided with a spacer 39A protruding to the side opposite to the support layer 2A.
  • the spacer 39A protrudes from a portion of each locking portion 55A of the movable mirror 5A that protrudes from the device layer 3A to the side opposite to the support layer 2A, and protects the portion.
  • the movable mirror 5A may penetrate the mounting region 31A in a state where the mirror surface 51aA intersects the mounting region 31A.
  • the pair of leg portions 54A is not provided, and the pair of locking portions 55A is in the YA axis direction with respect to the center of the mirror portion 51A when viewed from the XA axis direction.
  • it is connected to the outer surface of the elastic portion 52A. That is, the mirror part 51A and the elastic part 52A are sandwiched between the pair of locking parts 55A in the YA axis direction.
  • a portion of the mounting region 31A that defines the opening 31bA that is opposed to the mirror surface 51aA is notched in order to allow the measurement light L0A to pass therethrough.
  • the mirror surface 51aA intersects the mounting area 31A.
  • the connecting portion 53A may be provided closer to the mounting region 31A than the center of the mirror surface 51aA. According to this configuration, for example, the position of the center of gravity of the movable mirror 5A can be closer to the mounting region 31A than when the connecting portion 53A is provided on the opposite side of the mounting region 31A from the center of the mirror surface 51aA. Therefore, the mounting area 31A on which the movable mirror 5A is mounted can be moved more stably. Further, as shown in FIG. 14, each locking portion 55 ⁇ / b> A may have a folded portion 55 a ⁇ / i> A arranged in an opening 31 c ⁇ / i> A provided separately from the opening 31 b ⁇ / i> A.
  • the movable mirror 5A can be more reliably fixed to the mounting region 31A.
  • the elastic portion 52A may be provided with a handle 56A for elastically deforming the elastic portion 52A so that the distance between the pair of locking portions 55A changes.
  • the pair of locking portions with the distance between the pair of locking portions 55A changed.
  • Each locking portion 55A can be brought into contact with the inner surface of the opening 31bA by inserting the portion 55A into the opening 31bA and then releasing the operation of the handle 56A.
  • the movable mirror 5A is supported on the mounting region 31A by the reaction force applied to each locking portion 55A from the inner surface of the opening 31bA.
  • the movable mirror 5A can be supported by the mounting region 31A by the reaction force applied to each locking portion 55A from the inner surface of the opening 31bA, but the movable mirror 5A is more securely fixed to the mounting region 31A.
  • an adhesive may be disposed between each locking portion 55A and the mounting region 31A.
  • the fixed mirror 6A is mounted on the device layer 3A.
  • the fixed mirror 6A may be mounted on at least one of the support layer 2A, the device layer 3A, and the intermediate layer 4A.
  • the beam splitter 7A is mounted on the support layer 2A.
  • the beam splitter 7A may be mounted on at least one of the support layer 2A, the device layer 3A, and the intermediate layer 4A.
  • the beam splitter 7A is not limited to a cube type beam splitter, and may be a plate type beam splitter.
  • the optical module 1A may include a light emitting element that generates measurement light to be incident on the light incident portion 8A in addition to the light incident portion 8A.
  • the optical module 1A may include a light emitting element that generates measurement light incident on the interference optical system 10A, instead of the light incident portion 8A.
  • the optical module 1A may include a light receiving element that detects measurement light (interference light) emitted from the light emitting unit 9A in addition to the light emitting unit 9A.
  • the optical module 1A may include a light receiving element that detects measurement light (interference light) emitted from the interference optical system 10A, instead of the light emitting unit 9A.
  • first through electrode electrically connected to each actuator region 33A and the second through electrode electrically connected to each of both end portions 34aA of each elastic support region 34A are the support layer 2A and the intermediate layer 4A. (Only the support layer 2A when the intermediate layer 4A does not exist) is provided, and a voltage may be applied between the first through electrode and the second through electrode.
  • the actuator that moves the mounting region 31A is not limited to an electrostatic actuator, and may be, for example, a piezoelectric actuator, an electromagnetic actuator, or the like.
  • the optical module 1A is not limited to the one constituting the FTIR, and may constitute another optical system.
  • an optical module including a base having a main surface in which a recess is formed, and an optical element mounted on the base in the recess (see, for example, US Patent Application Publication No. 2002/0186477). ).
  • an optical element is inserted into the recess, and the optical element is bonded to the base by reflow of a bond pad formed on the bottom surface of the recess.
  • the optical module as described above is required to be securely mounted on the basis of an optical element from the viewpoint of mounting on a portable device and securing resistance to impact applied during transfer.
  • the optical module as described above is not sufficiently resistant to impact, and when the impact is applied, the optical element may easily fall out of the recess.
  • another aspect of the present disclosure aims to provide an optical module capable of realizing reliable mounting of an optical element.
  • An optical module includes a base and an optical element mounted on the base.
  • the base has a first surface and a second surface that face each other.
  • a first opening that opens to the first surface and the second surface, and a second opening that opens to the second surface are provided
  • the optical element includes an optical unit having an optical surface, a support unit that supports the optical unit as a base,
  • the support portion has a protrusion protruding from the second surface through the first opening, a folded portion extending from the protrusion toward the second surface and entering the second opening from the second surface side, and including.
  • a first opening that opens to the first surface and the second surface and a second opening that opens to the second surface are provided in the base.
  • the support part that supports the optical part on the base protrudes from the second surface through the first opening, extends from the protruding part toward the second surface, and enters the second opening from the second surface side.
  • a folding part is provided.
  • a pair of second openings are provided so as to sandwich the first opening, a pair of protrusions are provided, and a folded part is provided in each of the pair of protrusions. It may enter into each of the second openings. According to this, dropping of the optical element can be more reliably suppressed.
  • the protruding portion may be in contact with at least the edge portion on the first surface side of the first opening. According to this, dropping of the optical element can be suppressed more reliably.
  • the folded portion may be in contact with an edge portion on the second surface side of the second opening. According to this, dropping of the optical element can be suppressed more reliably.
  • the optical element further includes an elastic part, the pair of protrusions is provided, and the pair of protrusions are given an elastic force according to elastic deformation of the elastic part.
  • the distance between each other is variable, and the elastic force is applied to the pair of protrusions from the inner surface of the first opening. It may be supported by the base by the reaction force.
  • the optical element can be mounted on the base using the elastic force of the elastic portion. In this case, the optical element is mounted on the base using elastic force, and the optical element is prevented from falling off by the folded portion, so that the amount of the adhesive used is reduced or the adhesive is unnecessary. It becomes possible. The following advantages are obtained by reducing the amount of adhesive used.
  • the optical module it is possible to suppress the occurrence of contamination or the like on the optical surface due to the protrusion of the adhesive material, or the destruction or malfunction of the optical module drive region. Further, the area for forming the adhesive (space between components) is reduced, so that the optical module can be reduced in size.
  • the pair of protrusions may be inserted into the first opening in a state where the elastic force of the elastic part is applied in a direction away from each other.
  • the optical element can be suitably mounted on the base using the elastic force.
  • the pair of inner surfaces of the first opening are inclined so that the distance from each other increases from one end to the other when viewed from a direction intersecting the first surface. And an opposing surface that faces the pair of inclined surfaces in a direction crossing a direction in which the pair of inclined surfaces face each other. According to this, when the protruding portion is inserted into the first opening and a part of the elastic deformation of the elastic portion is released, the protruding portion is slid on the inclined surface by the elastic force and hits the opposing surface.
  • the optical element can be positioned in a direction along the first surface.
  • the inclination angle may be 45 degrees or less. According to this, the reaction force of the elastic force applied to the projecting portion can be more dispersed in the direction intersecting the direction in which the pair of inclined surfaces oppose each other than in the direction in which the pair of inclined surfaces oppose each other. . For this reason, the tolerance with respect to the impact of the direction which cross
  • the base may include a support layer and a device layer provided on the support layer and including the first surface and the second surface. According to this, the structure for reliable mounting of the optical element can be suitably realized.
  • the base may include an intermediate layer provided between the support layer and the device layer. According to this, the structure for reliable mounting of the optical element can be realized more suitably.
  • the optical module according to another aspect of the present disclosure further includes a fixed mirror mounted on the support layer, the device layer, or the intermediate layer, and a beam splitter mounted on the support layer, the device layer, or the intermediate layer, and an optical element Is a movable mirror including an optical surface that is a mirror surface, and the device layer has a mounting region in which the optical element is mounted and a drive region connected to the mounting region, and the movable mirror, the fixed mirror, and the beam
  • the splitter may be arranged to constitute an interference optical system.
  • an FTIR Fastier Transform Infrared Spectrometer
  • SOI Silicon On Insulator
  • the size of the movable mirror is the achievement level of deep drilling on the SOI substrate.
  • the degree of achievement of deep processing for the SOI substrate is about 500 ⁇ m at the maximum, there is a limit to increase the sensitivity in FTIR by increasing the size of the movable mirror.
  • this optical module since the movable mirror formed separately is mounted on the device layer, FTIR with improved sensitivity can be obtained.
  • the support layer is a first silicon layer of an SOI substrate
  • the device layer is a second silicon layer of the SOI substrate
  • the intermediate layer is an insulating layer of the SOI substrate.
  • An optical module includes a light incident portion arranged to allow measurement light to be incident on the interference optical system from the outside, and light arranged to emit the measurement light from the interference optical system to the outside. And a light emitting part. According to this, FTIR provided with a light incident part and a light emission part can be obtained.
  • an optical module that can realize reliable mounting of an optical element.
  • the optical module 1B includes a base BB.
  • the base BB includes a support layer 2B, a device layer 3B provided on the support layer 2B, and an intermediate layer 4B provided between the support layer 2B and the device layer 3B.
  • the support layer 2B, the device layer 3B, and the intermediate layer 4B are configured by an SOI substrate.
  • the support layer 2B is the first silicon layer of the SOI substrate.
  • the device layer 3B is a second silicon layer of the SOI substrate.
  • the intermediate layer 4B is an insulating layer of the SOI substrate.
  • the support layer 2B, the device layer 3B, and the intermediate layer 4B have a rectangular shape with, for example, a side of about 10 mm when viewed from the ZB axis direction (a direction parallel to the ZB axis) that is the stacking direction thereof.
  • Each thickness of the support layer 2B and the device layer 3B is, for example, about several hundred ⁇ m.
  • the thickness of the intermediate layer 4B is, for example, about several ⁇ m.
  • the device layer 3B and the intermediate layer 4B are shown with one corner of the device layer 3B and one corner of the intermediate layer 4B cut out.
  • the device layer 3B has a mounting area 31B and a drive area 32B connected to the mounting area 31B.
  • the drive region 32B includes a pair of actuator regions 33B and a pair of elastic support regions 34B.
  • the mounting region 31B and the drive region 32B (that is, the mounting region 31B and the pair of actuator regions 33B and the pair of elastic support regions 34B) are integrally formed on a part of the device layer 3B by MEMS technology (patterning and etching). Yes.
  • the pair of actuator regions 33B are disposed on both sides of the mounting region 31B in the XB axis direction (a direction parallel to the XB axis perpendicular to the ZB axis). That is, the mounting region 31B is sandwiched between the pair of actuator regions 33B in the XB axis direction.
  • Each actuator region 33B is fixed to the support layer 2B via the intermediate layer 4B.
  • a first comb tooth portion 33aB is provided on the side surface of each actuator region 33B on the mounting region 31B side.
  • Each first comb tooth portion 33aB is in a state of floating with respect to the support layer 2B by removing the intermediate layer 4B immediately below the first comb tooth portion 33aB.
  • a first electrode 35B is provided in each actuator region 33B.
  • the pair of elastic support regions 34B are disposed on both sides of the mounting region 31B in the YB axis direction (a direction parallel to the YB axis perpendicular to the ZB axis and the XB axis). That is, the mounting region 31B is sandwiched between the pair of elastic support regions 34B in the YB axis direction. Both end portions 34aB of each elastic support region 34B are fixed to the support layer 2B via the intermediate layer 4B.
  • Each elastic support region 34B has an elastic deformation portion 34bB (a portion between both end portions 34aB) having a structure in which a plurality of leaf springs are connected.
  • each elastic support region 34B is in a state of floating with respect to the support layer 2B by removing the intermediate layer 4B immediately below it.
  • a second electrode 36B is provided at each of both end portions 34aB.
  • each elastic support region 34B is connected to the mounting region 31B.
  • the mounting region 31B is in a state of floating with respect to the support layer 2B by removing the intermediate layer 4B immediately below the mounting region 31B. That is, the mounting area 31B is supported by the pair of elastic support areas 34B.
  • a second comb tooth portion 31aB is provided on the side surface of each mounting region 31B on the side of each actuator region 33B.
  • Each second comb tooth portion 31aB is in a state of floating with respect to the support layer 2B by removing the intermediate layer 4B immediately below the second comb tooth portion 31aB.
  • the comb teeth of the first comb tooth portion 33aB are located between the comb teeth of the second comb tooth portion 31aB.
  • the pair of elastic support regions 34B sandwich the mounting region 31B from both sides with respect to the direction AB parallel to the XB axis so that when the mounting region 31B moves along the direction AB, the mounting region 31B returns to the initial position.
  • An elastic force is applied to the mounting region 31B. Therefore, when a voltage is applied between the first electrode 35B and the second electrode 36B and an electrostatic attractive force acts between the first comb tooth portion 33aB and the second comb tooth portion 31aB facing each other, the electrostatic attractive force
  • the mounting region 31B is moved along the direction AB to a position where the elastic force of the pair of elastic support regions 34B is balanced.
  • the drive region 32B functions as an electrostatic actuator.
  • the optical module 1B further includes a movable mirror 5B, a fixed mirror 6B, a beam splitter 7B, a light incident part 8B, and a light emitting part 9B.
  • the movable mirror 5B, the fixed mirror 6B, and the beam splitter 7B are arranged on the device layer 3B so as to constitute an interference optical system 10B that is a Michelson interference optical system.
  • the movable mirror 5B is mounted on the mounting region 31B of the device layer 3B on one side of the beam splitter 7B in the XB axis direction.
  • the mirror surface 51aB of the mirror part 51B of the movable mirror 5B is located on the opposite side of the support layer 2B with respect to the device layer 3B.
  • the mirror surface 51aB is, for example, a surface perpendicular to the XB axis direction (that is, a surface perpendicular to the direction AB) and faces the beam splitter 7B side.
  • the fixed mirror 6B is mounted on the mounting region 37B of the device layer 3B on one side of the beam splitter 7B in the YB axis direction.
  • the mirror surface 61aB of the mirror part 61B of the fixed mirror 6B is located on the opposite side of the support layer 2B with respect to the device layer 3B.
  • the mirror surface 61aB is, for example, a surface perpendicular to the YB axis direction and faces the beam splitter 7B side.
  • the light incident part 8B is mounted on the device layer 3B on the other side of the beam splitter 7B in the YB axis direction.
  • the light incident portion 8B is configured by, for example, an optical fiber and a collimator lens.
  • the light incident portion 8B is arranged so that the measurement light is incident on the interference optical system 10B from the outside.
  • the light emitting portion 9B is mounted on the device layer 3B on the other side of the beam splitter 7B in the XB axis direction.
  • the light emitting portion 9B is configured by, for example, an optical fiber and a collimating lens.
  • the light emitting unit 9B is arranged to emit measurement light (interference light) to the outside from the interference optical system 10B.
  • the beam splitter 7B is a cube type beam splitter having an optical functional surface 7aB.
  • the optical functional surface 7aB is located on the side opposite to the support layer 2B with respect to the device layer 3B.
  • the beam splitter 7B is positioned by bringing one corner on the bottom side of the beam splitter 7B into contact with one corner of the rectangular opening 3aB formed in the device layer 3B.
  • the beam splitter 7B is mounted on the support layer 2B by being fixed to the support layer 2B by bonding or the like in a positioned state.
  • the optical module 1B configured as described above, when the measurement light L0B is incident on the interference optical system 10B from the outside via the light incident portion 8B, a part of the measurement light L0B is transmitted to the optical function surface 7aB of the beam splitter 7B.
  • the reflected light travels toward the movable mirror 5B, and the remaining portion of the measurement light L0B passes through the optical function surface 7aB of the beam splitter 7B and travels toward the fixed mirror 6B.
  • Part of the measurement light L0B is reflected by the mirror surface 51aB of the movable mirror 5B, travels on the same optical path toward the beam splitter 7B, and passes through the optical function surface 7aB of the beam splitter 7B.
  • the remaining part of the measurement light L0B is reflected by the mirror surface 61aB of the fixed mirror 6B, travels on the same optical path toward the beam splitter 7B, and is reflected by the optical function surface 7aB of the beam splitter 7B.
  • a part of the measurement light L0B that has passed through the optical functional surface 7aB of the beam splitter 7B and the remaining part of the measurement light L0B reflected by the optical functional surface 7aB of the beam splitter 7B become the measurement light L1B that is interference light.
  • L1B is emitted to the outside from the interference optical system 10B via the light emitting portion 9B.
  • the movable mirror 5B can be reciprocated at high speed along the direction AB, so that a small and highly accurate FTIR can be provided.
  • the base BB includes a first surface BaB and a second surface BbB facing each other.
  • the first surface BaB is the surface of the device layer 3B opposite to the support layer 2B
  • the second surface BbB is the surface of the device layer 3B on the support layer 2B side.
  • the movable mirror 5B is mounted on the base BB in a state where the mirror surface 51aB is positioned on a plane intersecting (for example, orthogonal to) the first surface BaB and the mirror surface 51aB is positioned on the first surface BaB side of the base BB. Has been.
  • the movable mirror (optical element) 5B has a mirror part (optical part) 51B, an elastic part 52B, a support part 53B, and a connecting part 54B.
  • the movable mirror 5B is integrally formed by MEMS technology (patterning and etching). For this reason, the thickness of the movable mirror 5B (the dimension in the XB axis direction orthogonal to the mirror surface 51aB) is constant in each part, and is, for example, about 10 ⁇ m or more and 20 ⁇ m or less.
  • the mirror part 51B, the elastic part 52B, the support part 53B, and the connecting part 54B are located on the same plane when viewed from the YB axis direction (direction along both the mirror surface 51aB and the first surface BaB). It is provided as follows.
  • the mirror part 51B is formed in a plate shape (for example, a disk shape) having a mirror surface (optical surface) 51aB as a main surface.
  • the diameter of the mirror surface 51aB is, for example, about 1 mm.
  • the elastic part 52B is formed in an arc shape (for example, a semicircular arc shape) surrounding the mirror part 51B while being separated from the mirror part 51B when viewed from the XB axis direction.
  • the support portion 53B has a pair of leg portions 55AB, 55BB, a pair of locking portions (projecting portions) 56B, and a pair of folded portions 57B.
  • the pair of leg portions 55AB and 55BB is provided so as to sandwich the mirror portion 51B in the YB axis direction, and is connected to both ends of the elastic portion 52B.
  • Each of the leg part 55AB and the leg part 55BB has a first part 58aB having one end connected to the elastic part 52B and a second part 58bB connected to the other end of the first part 58aB.
  • the first portion 58aB of the leg portion 55AB extends along the ZB axis direction (a direction orthogonal to the first surface BaB).
  • the first portion 58aB of the leg portion 55BB extends in an arc shape along the outer edge of the mirror portion 51B when viewed from the XB axis direction.
  • the second portions 58bB of the leg portions 55AB and the leg portions 55BB extend so as to be closer to each other as they move away from the elastic portion 52B (toward the negative direction of the ZB axis).
  • the pair of locking portions 56B are provided at the ends of the second portions 58bB opposite to the elastic portions 52B, respectively.
  • Each of the pair of locking portions 56B is formed to be bent in, for example, a V shape on the inner side (side closer to each other) when viewed from the XB axis direction.
  • Each locking portion 56B includes an inclined surface 56aB and an inclined surface 56bB.
  • the inclined surface 56aB and the inclined surface 56bB are surfaces opposite to the surfaces facing each other in the pair of locking portions 56B (outer surfaces).
  • the inclined surfaces 56aB are inclined so as to approach each other in the negative direction of the ZB axis.
  • the inclined surfaces 56bB are inclined so as to be separated from each other in the negative direction of the ZB axis.
  • the inclination angle ⁇ B of the inclined surface 56aB with respect to the ZB axis is equal to or slightly larger than the inclination angle ⁇ B of the inclined surface 56bB with respect to the ZB axis direction.
  • the inclination angle ⁇ B is about 45 degrees
  • the inclination angle ⁇ B is about 35 degrees.
  • the pair of locking portions 56B are connected to the elastic portion 52B via a pair of leg portions 55AB and 55BB, respectively. Accordingly, for example, by applying force to the pair of leg portions 55AB and 55BB so as to be sandwiched from both sides in the YB axis direction, the elastic portion 52B is elastically deformed so as to be compressed in the YB axis direction, and between the pair of locking portions 56B. The distance can be reduced. That is, the distance between the pair of locking portions 56B in the YB axis direction is variable according to the elastic deformation of the elastic portion 52B. Further, the elastic force of the elastic portion 52B can be applied to the pair of locking portions 56B.
  • the pair of folded portions 57B are provided at the end portions of the respective engaging portions 56B opposite to the elastic portions 52B. Each of the pair of folded portions 57B extends outward (side away from each other) and toward the ZB-axis positive direction when viewed from the XB-axis direction. Each folded portion 57B includes an inclined surface 57aB. The inclined surface 57aB is a surface facing the locking portion 56B in the folded portion 57B. Between the pair of folded portions 57B, the inclined surfaces 57aB are inclined so as to be separated from each other in the positive direction of the ZB axis.
  • the inclination angle ⁇ B of the inclined surface 57aB with respect to the ZB axis direction is slightly larger than the inclination angle ⁇ B.
  • the inclination angle ⁇ B is about 60 degrees, for example.
  • the connecting part 54B connects the mirror part 51B and the leg part 55BB to each other.
  • the connection part 54B is connected to the mirror part 51B on the opposite side of the elastic part 52B with respect to the center of the mirror part 51B in a predetermined direction when viewed from the XB axis direction.
  • This predetermined direction is a direction that intersects both the YB-axis direction and the ZB-axis direction.
  • the connecting portion 54B is connected to the leg portion 55BB at the connecting portion between the first portion 58aB and the second portion 58bB.
  • the center of the mirror part 51B is located on one side (the leg part 55BB side) in the YB axis direction with respect to the center line CL1B.
  • the center line CL1B is a virtual straight line that passes through the center of the first opening 31bB described later and extends in the ZB axis direction.
  • a first opening 31bB and a pair of second openings 31cB are formed in the mounting region 31B of the base BB.
  • the first opening 31bB and each second opening 31cB penetrate the device layer 3B in the ZB axis direction, and are open to both the first surface BaB and the second surface BbB.
  • the pair of second openings 31cB is provided so as to sandwich the first opening 31bB in the YB axis direction. Details of the first opening 31bB and the second opening 31cB will be described later.
  • the pair of locking portions 56B are inserted into the first opening 31bB in a state where the elastic force of the elastic portion 52B is applied in a direction away from each other.
  • Each locking portion 56B protrudes from the second surface BbB via the first opening 31bB.
  • Each locking portion 56B is in contact with the edge portion 31dB on the first surface BaB side of the first opening 31bB on the inclined surface 56aB.
  • Each folded portion 57B extends from each locking portion 56B toward the second surface BbB, and enters the second opening 31cB from the second surface BbB side.
  • Each folded portion 57B is in contact with the edge 31eB on the second surface BbB side of the second opening 31cB on the inclined surface 57aB.
  • the locking portion 56B contacts the edge 31dB on the first surface BaB side of the first opening 31bB, and the folded portion 57B contacts the edge 31eB on the second surface BbB side of the second opening 31cB.
  • the movable mirror 5B is prevented from coming off in the ZB-axis direction.
  • an opening 41B is formed in the intermediate layer 4B.
  • the openings 41B are opened on both sides of the intermediate layer 4B in the ZB axis direction.
  • An opening 21B is formed in the support layer 2B.
  • the openings 21B are opened on both sides of the support layer 2B in the ZB axis direction.
  • a continuous space S1B is configured by the region in the opening 41B of the intermediate layer 4B and the region in the opening 21B of the support layer 2B. That is, the space S1B includes a region in the opening 41B of the intermediate layer 4B and a region in the opening 21B of the support layer 2B.
  • the space S1B is formed between the support layer 2B and the device layer 3B, and corresponds to at least the mounting region 31B and the drive region 32B.
  • the region in the opening 41B of the intermediate layer 4B and the region in the opening 21B of the support layer 2B include a range in which the mounting region 31B moves when viewed from the ZB axis direction.
  • the region in the opening 41B of the intermediate layer 4B is a portion that should be separated from the support layer 2B in the mounting region 31B and the drive region 32B (that is, a portion that should be in a floating state with respect to the support layer 2B.
  • a gap for separating the entire mounting region 31B, the elastic deformation portion 34bB, the first comb tooth portion 33aB, and the second comb tooth portion 31aB) of each elastic support region 34B from the support layer 2B is formed.
  • each locking portion 56B of the movable mirror 5B is located in the space S1B. Specifically, a part of each locking portion 56B is located in a region in the opening 21B of the support layer 2B via a region in the opening 41B of the intermediate layer 4B. A part of each locking portion 56B protrudes from the second surface BbB into the space S1B by about 100 ⁇ m, for example. As described above, the region in the opening 41B of the intermediate layer 4B and the region in the opening 21B of the support layer 2B include the range in which the mounting region 31B moves when viewed from the ZB axis direction. Is reciprocated along the direction AB, a part of each locking portion 56B of the movable mirror 5B located in the space S1B does not come into contact with the intermediate layer 4B and the support layer 2B.
  • the inner surface of the first opening 31bB has a pair of inclined surfaces SAB facing each other in the YB axis direction, a pair of inclined surfaces SBB facing each other in the YB axis direction, including.
  • Each inclined surface SAB includes one end SAaB and the other end SAbB
  • each inclined surface SBB includes one end SBaB and the other end SBbB.
  • the pair of inclined surfaces SAB are inclined so that the distance from each other increases from one end SAaB to the other end SAbB (for example, with respect to the XB axis direction).
  • the SBB is inclined to the opposite side of the pair of inclined surfaces SAB so that the mutual distance increases from one end SBaB to the other end SBbB (for example, with respect to the XB axial direction).
  • the inclined surface SAB and the inclined surface SBB are opposed to each other in the XB axis direction (a direction orthogonal to the YB axis direction where the pair of inclined surfaces SAB are opposed to each other).
  • connection surface SCB extending along the XB axis direction.
  • the inclined surface SAB, the inclined surface SBB, and the connecting surface SCB define one corner on each of both sides in the YB axis direction.
  • one end SAaB of the inclined surface SAB and one end SBaB of the inclined surface SBB are connected to each other via a connection surface SDB extending in the YB axis direction.
  • connection surface SDB When viewed from the ZB axis direction, the connection surface SDB has a shape that is widened in a V shape on the outer side (side away from each other) in the intermediate portion.
  • the first opening 31bB has a shape symmetrical with respect to a center line CL2B passing through the center of the first opening 31bB and parallel to the YB axis direction when viewed from the ZB axis direction.
  • the first opening 31bB here has a decagonal shape when viewed from the ZB-axis direction.
  • each second opening 31cB includes a pair of inclined surfaces SEB that face each other in the XB axis direction.
  • the pair of inclined surfaces SEB are inclined so as to be separated from each other as the distance from the first opening 31bB increases when viewed from the ZB axis direction.
  • one inclined surface SEB faces the inclined surface SAB
  • the other inclined surface SEB faces the inclined surface SBB.
  • the pair of inclined surfaces SEB have an axisymmetric shape with respect to the inclined surface SAB and the inclined surface SBB and the YB axis direction when viewed from the ZB axis direction.
  • Each second opening 31cB has a line-symmetric shape with respect to the center line CL2B when viewed from the ZB-axis direction.
  • the second opening 31cB here has a hexagonal shape when viewed from the ZB-axis direction.
  • the maximum value of the dimension of the first opening 31bB in the YB-axis direction (that is, the distance between the other ends SAbB of the pair of inclined surfaces SAB) is when the pair of locking portions 56B are disposed in the first opening 31bB. Only a part of the elastic deformation of the elastic part 52B can be released (that is, the elastic part 52B does not reach a natural length). Accordingly, when the pair of locking portions 56B are arranged in the first opening 31bB, the pair of locking portions 56B press the inner surface of the first opening 31bB by the elastic force of the elastic portion 52B, and the inner surface of the first opening 31bB A reaction force is applied to the pair of locking portions 56B.
  • the movable mirror 5B is supported on the base BB by the reaction force. More specifically, due to the elastic force of the elastic portion 52B, each locking portion 56B is inscribed in the corner defined by the inclined surface SAB and the inclined surface SBB of the first opening 31bB, and each folded portion 57B is inclined by the inclined surface SEB. It is in the state which contact
  • each locking portion 56B may first come into contact with one of the inclined surface SAB and the inclined surface SBB (hereinafter referred to as a contact surface). In this case, each locking portion 56B slides on the contact surface toward the outside in the YB axis direction (second opening 31cB side) by the elastic force of the elastic portion 52B, and is inclined while contacting the contact surface.
  • locking part 56B is inscribed in the corner
  • Each locking portion 56B slides on the edge 51dB toward the ZB-axis positive direction side by the elastic force of the elastic portion 52B.
  • returning part 57B enters into the 2nd opening 31cB from the 2nd surface BbB side.
  • Each folded portion 57B moves to a position (position in FIG. 19) where the inclined surface 57aB contacts the edge portion 51eB on the second surface BbB side of the second opening 31cB.
  • the pair of locking portions 56B are locked at the position, and the movable mirror 5B is positioned in the ZB axis direction (self-aligned by the elastic force). That is, in the movable mirror 5B, self-alignment is three-dimensionally performed using the elastic force of the elastic portion 52B.
  • the fixed mirror 6B and its peripheral structure are the same as the movable mirror 5B and its peripheral structure except that the mounting area does not move. That is, as shown in FIGS. 22 and 23, the fixed mirror (optical element) 6B has a mirror part (optical part) 61B, an elastic part 62B, a support part 63B, and a connecting part 64B. .
  • the fixed mirror 6B is mounted on the base BB in a state where the mirror surface 61aB is positioned on a plane intersecting (for example, orthogonal to) the first surface BaB and the mirror surface 61aB is positioned on the first surface BaB side of the base BB.
  • the fixed mirror 6B is integrally formed by MEMS technology (patterning and etching).
  • the thickness of the fixed mirror 6B (the dimension in the YB axis direction orthogonal to the mirror surface 61aB) is constant in each part, and is, for example, about 10 ⁇ m to 20 ⁇ m.
  • the mirror part 61B, the elastic part 62B, the support part 63B, and the connecting part 64B are located on the same plane when viewed from the XB axis direction (direction along both the mirror surface 61aB and the first surface BaB). It is provided as follows.
  • the mirror part 61B is formed in a plate shape (for example, a disk shape) having a mirror surface (optical surface) 61aB as a main surface.
  • the diameter of the mirror surface 61aB is, for example, about 1 mm.
  • the elastic portion 62B is formed in an arc shape (for example, a semicircular arc shape) surrounding the mirror portion 61B while being separated from the mirror portion 61B when viewed from the YB axis direction.
  • the support portion 63B has a pair of leg portions 65AB, 65BB, a pair of locking portions (projections) 66B, and a pair of folded portions 67B.
  • the pair of leg portions 65AB and 65BB are provided so as to sandwich the mirror portion 61B in the XB axis direction, and are respectively connected to both end portions of the elastic portion 62B.
  • Each of the leg portion 65AB and the leg portion 65BB has a first portion 68aB having one end connected to the elastic portion 62B and a second portion 68bB connected to the other end of the first portion 68aB.
  • the first portion 68aB of the leg portion 65AB extends along the ZB axis direction (a direction orthogonal to the first surface BaB).
  • the first portion 68aB of the leg portion 65BB extends in an arc shape along the outer edge of the mirror portion 61B when viewed from the YB axis direction.
  • the second portions 68bB of the leg portion 65AB and the leg portion 65BB extend so as to be closer to each other as they move away from the elastic portion 62B (toward the negative direction of the ZB axis).
  • the pair of locking portions 66B are provided at the ends of the second portions 68bB opposite to the elastic portions 62B, respectively.
  • Each of the pair of locking portions 66B is formed to be bent in, for example, a V shape on the inner side (side approaching each other) when viewed from the YB axis direction.
  • Each locking portion 66B includes an inclined surface 66aB and an inclined surface 66bB.
  • the inclined surface 66aB and the inclined surface 66bB are surfaces (outer surfaces) opposite to the surfaces facing each other in the pair of locking portions 66B.
  • the inclined surfaces 66aB are inclined so as to approach each other in the negative direction of the ZB axis.
  • the inclined surfaces 66bB are inclined so as to be separated from each other in the negative direction of the ZB axis.
  • the inclination angles of the inclined surfaces 66aB and 66bB with respect to the ZB axis direction are the same as those of the inclined surfaces 56aB and 56bB in the movable mirror 5B.
  • the pair of locking portions 66B are connected to the elastic portion 62B through a pair of leg portions 65AB and 65BB, respectively.
  • the elastic portion 62B is elastically deformed so as to be compressed in the XB axis direction, and between the pair of locking portions 66B.
  • the distance can be reduced. That is, the distance between the pair of locking portions 66B in the XB axis direction is variable according to the elastic deformation of the elastic portion 62B. Further, the elastic force of the elastic portion 62B can be applied to the pair of locking portions 66B.
  • the pair of folded portions 67B are provided at the ends of the respective locking portions 66B opposite to the elastic portions 62B. Each folded portion 67B extends outward (side away from each other) and toward the ZB-axis positive direction when viewed from the YB-axis direction. Each folded portion 67B includes an inclined surface 67aB. The inclined surface 67aB is a surface facing the locking portion 66B in the folded portion 67B. Between the pair of folded portions 67B, the inclined surfaces 67aB are inclined so as to be separated from each other in the positive direction of the ZB axis. When viewed from the YB axis direction, the inclination angle of the inclined surface 67aB with respect to the ZB axis direction is the same as that of the inclined surface 57aB of the movable mirror 5B.
  • the connecting part 64B connects the mirror part 61B and the leg part 65BB to each other.
  • the connection portion 64B is connected to the mirror portion 61B on the side opposite to the elastic portion 62B in the predetermined direction with respect to the center of the mirror portion 61B when viewed from the YB axis direction.
  • This predetermined direction is a direction that intersects both the XB axis direction and the ZB axis direction.
  • the connecting portion 64B is connected to the leg portion 65BB at the connecting portion between the first portion 68aB and the second portion 68bB.
  • the center of the mirror part 61B is located on one side (the leg part 65BB side) in the XB axis direction with respect to the center line CL3B.
  • the center line CL3B is a virtual straight line that passes through the center of a first opening 37aB described later and extends in the ZB axis direction.
  • a first opening 37aB and a pair of second openings 37bB are formed in the mounting region 37B of the base BB.
  • the first opening 37aB and each second opening 37bB penetrate the device layer 3B in the ZB axis direction, and are open to both the first surface BaB and the second surface BbB.
  • the pair of second openings 37bB are provided so as to sandwich the first opening 37aB in the XB axis direction.
  • the pair of locking portions 66B are inserted into the first opening 37aB in a state where the elastic force of the elastic portion 62B is applied in a direction away from each other.
  • Each locking portion 66B protrudes from the second surface BbB via the first opening 37aB.
  • Each locking portion 66B is in contact with the edge of the first opening 37aB on the first surface BaB side on the inclined surface 66aB.
  • the pair of folded portions 67B extends from the respective locking portions 66B toward the second surface BbB, and enters the second opening 37bB from the second surface BbB side.
  • Each folded portion 67B is in contact with the edge of the second opening 37bB on the second surface BbB side on the inclined surface 67aB.
  • the locking portion 66B is in contact with the edge of the first opening 37aB on the first surface BaB side, and the folded portion 67B is in contact with the edge of the second opening 37bB on the second surface BbB side.
  • the fixed mirror 6B is prevented from coming off in the ZB axis direction.
  • an opening 42B is formed in the intermediate layer 4B.
  • the opening 42B includes the first opening 37aB of the mounting region 37B when viewed from the ZB axis direction, and opens on both sides of the intermediate layer 4B in the ZB axis direction.
  • An opening 22B is formed in the support layer 2B.
  • the opening 22B includes the first opening 37aB of the mounting region 37B when viewed from the ZB axis direction, and opens on both sides of the support layer 2B in the ZB axis direction.
  • a continuous space S2B is constituted by a region in the opening 42B of the intermediate layer 4B and a region in the opening 22B of the support layer 2B. That is, the space S2B includes a region in the opening 42B of the intermediate layer 4B and a region in the opening 22B of the support layer 2B.
  • each locking portion 66B of the fixed mirror 6B is located in the space S2B. Specifically, a part of each locking portion 66B is located in a region in the opening 22B of the support layer 2B via a region in the opening 42B of the intermediate layer 4B. A part of each locking portion 66B protrudes from the surface on the intermediate layer 4B side in the device layer 3B into the space S2B, for example, about 100 ⁇ m.
  • the inner surfaces of the first opening 37aB and the second opening 37bB are configured similarly to the inner surfaces of the first opening 31bB and the second opening 31cB in the mounting region 31B, respectively. Therefore, when the pair of locking portions 66B are disposed in the first opening 37aB, the pair of locking portions 66B press the inner surface of the first opening 37aB by the elastic force of the elastic portion 62B, and the inner surface of the first opening 37aB A reaction force is applied to the pair of locking portions 66B.
  • the fixed mirror 6B is supported by the base BB by the reaction force. In the fixed mirror 6B, as in the case of the movable mirror 5B, three-dimensional self-alignment using the inner surface of the first opening 37aB and the elastic force is performed. [Action and effect]
  • a first opening 31bB opening in the first surface BaB and the second surface BbB, and a second opening 31cB opening in the second surface BbB are provided in the base BB.
  • a support portion 53B that supports the optical portion on the base BB extends to the locking portion 56B protruding from the second surface BbB via the first opening 31bB, and extends from the locking portion 56B toward the second surface BbB. 2 and a folded portion 57B that enters the second opening 31cB from the surface BbB side.
  • the movable mirror 5B can be reliably mounted.
  • a pair of second openings 31cB are provided so as to sandwich the first opening 31bB, and a folded portion 57B is provided in each of the pair of locking portions 56B and enters the pair of second openings 31cB. It is out. Thereby, dropping of the movable mirror 5B can be more reliably suppressed.
  • the locking portion 56B is in contact with the edge 31dB on the first surface BaB side of the first opening 31bB. Thereby, dropping of the movable mirror 5B can be more reliably suppressed.
  • the folded portion 57B is in contact with the edge 31eB on the second surface BbB side of the second opening 31cB.
  • dropping of the movable mirror 5B can be more reliably suppressed.
  • the locking portion 56B is in contact with the edge 31dB on the first surface BaB side of the first opening 31bB
  • the folded portion 57B is in contact with the edge 31eB on the second surface BbB side of the second opening 31cB.
  • the base BB is sandwiched and supported between the two adjacent points by the locking portion 56B and the folded portion 57B, the resistance to impacts in the XB axis direction and the ZB axis direction can be further improved.
  • the pair of locking portions 56B is provided with an elastic force according to the elastic deformation of the elastic portion 52B, the distance between them is variable, and the elastic force of the elastic portion 52B is applied.
  • the movable mirror 5B is supported on the base BB by the reaction force of the elastic force applied to the pair of locking portions 56B from the inner surface of the first opening 31bB. Thereby, the movable mirror 5B can be mounted on the base BB using the elastic force of the elastic portion 52B.
  • the amount of adhesive used can be reduced, or the adhesive can be used. It becomes possible to make it unnecessary.
  • the following advantages are obtained by reducing the amount of adhesive used. That is, it is possible to suppress the occurrence of contamination or the like on the mirror surface 51aB or the destruction or malfunction of the drive region 32B of the optical module 1B due to the protrusion of the adhesive. Further, the area for forming the adhesive (the space between the components) is reduced, so that the optical module 1B can be downsized.
  • the pair of locking portions 56B are inserted into the first opening 31bB in a state where the elastic force of the elastic portion 52B is applied in a direction away from each other.
  • the movable mirror 5B can be suitably mounted on the base BB using the elastic force.
  • the optical module 1B when the inner surface of the first opening 31bB is viewed from the ZB axis direction, a pair of inclined surfaces SAB that are inclined so that the distance from one end SAaB to the other end SAbB increases.
  • the movable mirror 5B can be positioned in a direction along the first surface BaB.
  • the base BB has a support layer 2B and a device layer 3B provided on the support layer 2B and including the first surface BaB and the second surface BbB.
  • the structure for reliable mounting of the movable mirror 5B can be suitably realized.
  • the base BB has an intermediate layer 4B provided between the support layer 2B and the device layer 3B. Thereby, the structure for reliable mounting of the movable mirror 5B can be realized more suitably.
  • the movable mirror 5B, the fixed mirror 6B, and the beam splitter 7B are arranged so as to constitute the interference optical system 10B. Thereby, FTIR with improved sensitivity can be obtained.
  • the support layer 2B is the first silicon layer of the SOI substrate
  • the device layer 3B is the second silicon layer of the SOI substrate
  • the intermediate layer 4B is the insulating layer of the SOI substrate.
  • the light incident part 8B is arranged so that the measurement light is incident on the interference optical system 10B from the outside, and the light emitting part 9B emits the measurement light to the outside from the interference optical system 10B.
  • the light emitting part 9B emits the measurement light to the outside from the interference optical system 10B.
  • the movable mirror 5B passes through the mounting region 31B of the device layer 3B, and a part of each locking portion 56B of the movable mirror 5B is formed between the support layer 2B and the device layer 3B. Located in the space S1B.
  • the movable mirror 5B can be stably and firmly fixed to the mounting region 31B of the device layer 3B. That is, in the optical module 1B, by adopting the configuration having the space S1B, it is possible to adopt a shape including the folded portion 57B as the shape of the movable mirror 5B.
  • the shape of the fragile movable mirror 5B As a result, the optical module 1 ⁇ / b> B that can withstand mounting on portable devices and the like is realized by increasing the resistance to external forces and environmental changes by adopting the shape including the folded portion 57 ⁇ / b> B.
  • the 1st opening 31bB may be comprised like the 1st modification shown by FIG.
  • the other end SAbB of the inclined surface SAB and the other end SBbB of the inclined surface SBB are directly connected to each other on both sides in the YB axis direction.
  • the inclination angle ⁇ B of the pair of inclined surfaces SAB with respect to a straight line (here, the center line CL2B) passing through the other end SAbB of one inclined surface SAB and the other end SAbB of the other inclined surface SAB. Is 45 degrees or less.
  • the inclination angle ⁇ B is, for example, about 35 degrees.
  • the first opening 31bB has a line-symmetric shape with respect to the center line CL2B when viewed from the ZB axis direction.
  • the movable mirror 5B can be reliably mounted as in the above embodiment.
  • the reaction force of the elastic force applied to the locking portion 56B can be distributed more in the XB axis direction than in the YB axis direction. As a result, resistance to impact in the XB axis direction, which is important for improving the reliability of FTIR, can be improved.
  • the first opening 31bB includes the pair of inclined surfaces SAB and the pair of inclined surfaces SBB.
  • the first opening 31bB includes the pair of inclined surfaces SAB and the pair of inclined surfaces SAB.
  • a reference plane extending along a reference line (center line CL2B in FIG. 19) connecting the ends SAbB to each other.
  • the mirror surface 51aB is positioned on the first surface BaB side of the base BB.
  • part or all of the mirror surface 51aB protrudes on the second surface BbB side of the base BB.
  • it may be mounted on the base BB.
  • a portion of the mounting region 31B that defines the first opening 31bB that is opposed to the mirror surface 51aB is notched in order to allow the measurement light L0B to pass therethrough.
  • the elastic portion 52B may be formed in an annular shape (for example, an annular shape) so as to surround the mirror portion 51B while being separated from the mirror portion 51B when viewed from the XB axis direction.
  • locking part 56B contact
  • locking part 56B is an inclined surface.
  • the edge of the first opening 31 bB on the second surface BbB side may be contacted.
  • each second opening 31cB may not be opened on the first surface BaB, and may be, for example, a recess opened on the second surface BbB.
  • the first opening 31bB and the second opening 31cB may communicate with each other.
  • a recess opening in the second surface BbB may be provided between the first opening 31bB and the second opening 31cB, and the first opening 31bB and the second opening 31cB may communicate with each other via the recess.
  • the folded portion 57B only needs to enter the second opening 31cB, and may be separated from the edge 31eB on the second surface BbB side of the second opening 31cB.
  • the movable mirror 5AB may be configured as in the modification shown in FIGS.
  • the leg portion 55AB and the leg portion 55BB of the support portion 53B extend in parallel with each other along the ZB axis direction.
  • Each of the pair of locking portions 56B is formed to be bent in a V shape outward (side away from each other) when viewed from the XB axis direction.
  • the inclined surface 56aB and the inclined surface 56bB of each locking portion 56B are surfaces facing each other (inner surfaces) in the pair of locking portions 56B. Between the pair of locking portions 56B, the inclined surfaces 56aB are inclined so as to be separated from each other in the negative direction of the ZB axis.
  • the inclined surfaces 56bB are inclined so as to approach each other in the negative direction of the ZB axis.
  • Each of the pair of folded portions 57B extends toward the inside (the side closer to each other) and toward the ZB-axis positive direction when viewed from the XB-axis direction. Between the pair of folded portions 57B, the inclined surfaces 57aB are inclined so as to approach each other in the positive direction of the ZB axis.
  • the connecting portion 54B is connected to the mirror portion 51B and the elastic portion 52B on the center line CL1B. The center of the mirror part 51B is located on the center line CL1B.
  • the movable mirror 5AB further has a handle 59B.
  • the handle 59B has a pair of displacement portions 59aB connected to both ends of the elastic portion 52B.
  • the pair of displacement portions 59aB are provided so as to face each other in the YB axis direction, and extend from the end of the elastic portion 52B toward the positive direction of the ZB axis.
  • An intermediate portion of each displacement portion 59aB is bent in a V shape inward when viewed from the XB axis direction.
  • the pair of displacement parts 59aB are located on the ZB axis positive direction side with respect to the mirror part 51B, the elastic part 52B, and the support part 53B in a state where the movable mirror 5AB is mounted in the mounting region 37B.
  • one second opening 31cB is formed in the mounting region 31B, and a pair of first openings 31bB are formed so as to sandwich the second opening 31cB in the YB axis direction.
  • the pair of locking portions 56B are respectively inserted into the pair of first openings 31bB in a state where the elastic force of the elastic portion 52B is applied in a direction approaching each other.
  • the pair of locking portions 56B is paired with the pair of locking portions 56B in a state where the distance between the pair of locking portions 56B is increased by applying a force to the pair of displacement portions 59aB.
  • Each is inserted into the first opening 31bB.
  • a force is applied to the pair of displacement portions 59aB, whereby In a state where the other locking portion 56B is displaced so as to move away from the locking portion 56B, the other locking portion 56B is inserted into the first opening 31bB.
  • the pair of locking portions 56B are brought into contact with the inner surface of the first opening 31bB, and the movable mirror 5AB is fixed to the base BB.
  • the point of contact with the edge on the BbB side is the same as in the above embodiment.
  • one second opening 31cB is formed, but a pair of second openings 31cB may be formed so as to be sandwiched between the pair of first openings 31bB.
  • the fixed mirror 6B is mounted on the device layer 3B.
  • the fixed mirror 6B may be mounted on the support layer 2B or the intermediate layer 4B.
  • the beam splitter 7B is mounted on the support layer 2B.
  • the beam splitter 7B may be mounted on the device layer 3B or the intermediate layer 4B.
  • the beam splitter 7B is not limited to a cube type beam splitter, and may be a plate type beam splitter.
  • the optical module 1B may include a light emitting element that generates measurement light incident on the light incident portion 8B in addition to the light incident portion 8B.
  • the optical module 1B may include a light emitting element that generates measurement light incident on the interference optical system 10B, instead of the light incident portion 8B.
  • the optical module 1B may include a light receiving element that detects measurement light (interference light) emitted from the light emitting unit 9B in addition to the light emitting unit 9B.
  • the optical module 1B may include a light receiving element that detects measurement light (interference light) emitted from the interference optical system 10B, instead of the light emitting unit 9B.
  • first through electrode electrically connected to each actuator region 33B and the second through electrode electrically connected to each of both end portions 34aB of each elastic support region 34B are the support layer 2B and the intermediate layer 4B. (Only the support layer 2B when the intermediate layer 4B is not present) is provided, and a voltage may be applied between the first through electrode and the second through electrode.
  • the actuator that moves the mounting region 31B is not limited to an electrostatic actuator, and may be, for example, a piezoelectric actuator, an electromagnetic actuator, or the like.
  • the optical module 1B is not limited to what constitutes FTIR, and may constitute another optical system.
  • the movable mirror and the fixed mirror were illustrated as an optical element mounted in base BB.
  • the optical surface is a mirror surface.
  • the optical element to be mounted is not limited to a mirror, and may be an arbitrary element such as a grating or an optical filter.
  • the above second embodiment will be additionally described below.
  • the optical element includes an optical unit having an optical surface, and a support unit that supports the optical unit on the base, The support portion protrudes from the second surface through the first opening, extends from the protrusion toward the second surface, and is turned back into the second opening from the second surface side. And an optical module.
  • a pair of the second openings are provided so as to sandwich the first opening, A pair of the protruding portions are provided, The optical module according to appendix 1, wherein the folded portion is provided in each of the pair of projecting portions and enters each of the pair of second openings.
  • Appendix 3 The optical module according to appendix 1 or 2, wherein the protrusion is in contact with at least an edge of the first opening on the first surface side.
  • the optical element further includes an elastic part, A pair of the protruding portions are provided, The pair of projecting portions are inserted into the first opening in a state where an elastic force is applied according to elastic deformation of the elastic portion and a distance between the pair of protruding portions is variable and the elastic force of the elastic portion is applied.
  • the device layer has a mounting area where the optical element is mounted, and a driving area connected to the mounting area,
  • the optical module according to appendix 10 wherein the movable mirror, the fixed mirror, and the beam splitter are arranged so as to constitute an interference optical system.
  • the support layer is a first silicon layer of an SOI substrate;
  • the device layer is a second silicon layer of the SOI substrate;
  • Appendix 13 A light incident portion arranged to allow measurement light to be incident on the interference optical system from the outside;
  • An optical module in which an interference optical system is formed on an SOI (Silicon On Insulator) substrate by MEMS (Micro Electro Mechanical Systems) technology is known (see, for example, JP 2012-524295 A).
  • MEMS Micro Electro Mechanical Systems
  • Such an optical module is attracting attention because it can provide an FTIR (Fourier transform infrared spectroscopic analyzer) in which a highly accurate optical arrangement is realized.
  • US Patent Application Publication No. 2002/0186477 describes an optical system manufacturing process.
  • a template substrate and an optical bench are prepared.
  • An alignment slot is formed on the template substrate by etching.
  • Bond pads are arranged on the main surface of the optical bench.
  • the template substrate is attached to the main surface of the optical bench so that the alignment slot is disposed on the bond pad.
  • the optical element is inserted into the alignment slot while being positioned using the side wall of the alignment slot, and is positioned on the bond pad. Then, the optical element is bonded to the optical bench by reflowing the bond pad.
  • the optical module as described above has the following problems in that, for example, the size of the movable mirror depends on the achievement level of deep processing on the SOI substrate. That is, since the degree of achievement of deep processing for the SOI substrate is about 500 ⁇ m at the maximum, there is a limit to increase the sensitivity in FTIR by increasing the size of the movable mirror. Therefore, a technique for mounting a movable mirror formed separately on a device layer (for example, a layer in which a drive region is formed in an SOI substrate) can be considered.
  • Another object of the present disclosure is to provide an optical module capable of ensuring mounting strength while improving mounting accuracy of an optical element.
  • An optical module is an optical module including an optical element and a base on which the optical element is mounted.
  • the optical element includes an optical unit having an optical surface and a periphery of the optical unit.
  • An elastic portion provided, and a pair of support portions to which an elastic force is applied according to elastic deformation of the elastic portion and the distance between them is variable, and the base includes a main surface and a main surface.
  • a mounting area provided with a communicating opening, and the support part is a locking part inserted into the opening in a state where the elastic force of the elastic part is applied, and the locking part is inserted into the opening.
  • the optical element is supported by the mounting region by the reaction force of the elastic force applied to the locking portion from the inner surface of the opening in a state where the optical surface intersects the main surface.
  • the contact portion is bonded to the mounting region.
  • the optical element has an elastic part and a pair of support parts whose distances can be changed according to the elastic deformation of the elastic part.
  • an opening communicating with the main surface is formed in the mounting region of the base on which the optical element is mounted. Therefore, as an example, the support portion is inserted into the opening in a state in which the elastic portion is elastically deformed so that the distance between the support portions is reduced, and a part of the elastic deformation of the elastic portion is released, so that the support portion is opened in the opening. The distance between each other increases, and the support portion can be brought into contact with the inner surface of the opening.
  • the position of the optical element with respect to the mounting region is accurately defined on the inner surface of the opening by the reaction force of the elastic force applied to the support portion from the inner surface of the opening. Further, the optical element is bonded to the mounting region at the bonding portion of the support portion in a state where the optical element is supported by the reaction force of the elastic force. As a result, according to this optical module, it is possible to ensure the mounting strength while improving the mounting accuracy of the optical element.
  • the support part may include a protrusion part that protrudes toward the base side while branching from the locking part, and the contact part may include a tip part of the protrusion part.
  • the optical element can be bonded in a state where the tip of the protruding portion as the contact portion is abutted against the main surface of the base.
  • the main surface can be used for bonding of the optical element, it is possible to facilitate the processing such as placement (patterning) of the adhesive and welding.
  • the contact portion may include a side surface facing the inner surface of the opening in the locking portion.
  • the optical element can be bonded in a state where the side surface of the locking portion as the contact portion is in contact with the inner surface of the opening.
  • the bonding area can be increased and the mounting strength can be reliably improved.
  • the base includes a support layer, and a device layer provided on the support layer and including a main surface and a mounting region, and the opening is formed on the main surface.
  • the device layer may pass through the device layer in the intersecting direction, and the support portion may include a locking portion that is bent so as to contact a pair of edges of the opening in the direction intersecting the main surface.
  • the locking portion is locked to the mounting region at a position where the locking portion contacts the pair of edges of the opening. For this reason, the optical element can be reliably mounted on the base, and the optical element can be positioned in the direction intersecting the main surface of the base.
  • the inner surface of the opening is a pair of inclined surfaces that are inclined so that the distance from each other increases from one end to the other when viewed from the direction intersecting the main surface. And a reference plane extending along a reference line connecting the other end of the one inclined surface and the other end of the other inclined surface.
  • An optical module includes a fixed mirror mounted on at least one of a support layer, a device layer, and an intermediate layer provided between the support layer and the device layer, a support layer, And a beam splitter mounted on at least one of the intermediate layers, wherein the optical element is a movable mirror including an optical surface that is a mirror surface, and the device layer is connected to the mounting region.
  • the movable mirror, the fixed mirror, and the beam splitter may be arranged so as to constitute an interference optical system. In this case, an FTIR with improved sensitivity can be obtained.
  • the base includes an intermediate layer provided between the support layer and the device layer, and the support layer is the first silicon layer of the SOI substrate.
  • the device layer may be a second silicon layer of the SOI substrate, and the intermediate layer may be an insulating layer of the SOI substrate.
  • a configuration for reliably mounting the movable mirror on the device layer can be suitably realized by the SOI substrate.
  • An optical module is disposed so that the measurement light is incident on the interference optical system from the outside and the measurement light is emitted from the interference optical system to the outside.
  • a light emitting part In this case, an FTIR including a light incident part and a light emission part can be obtained.
  • an optical module that can ensure mounting strength while improving mounting accuracy of an optical element.
  • the optical module 1C includes a base BC.
  • the base BC has a main surface BsC.
  • the base BC includes a support layer 2C, a device layer 3C provided on the support layer 2C, and an intermediate layer 4C provided between the support layer 2C and the device layer 3C.
  • the main surface BsC is a surface of the device layer 3C opposite to the support layer 2C.
  • the support layer 2C, the device layer 3C, and the intermediate layer 4C are configured by an SOI substrate.
  • the support layer 2C is the first silicon layer of the SOI substrate.
  • the device layer 3C is a second silicon layer of the SOI substrate.
  • the intermediate layer 4C is an insulating layer of the SOI substrate.
  • the support layer 2C, the device layer 3C, and the intermediate layer 4C have a rectangular shape with, for example, a side of about 10 mm when viewed from the ZC axis direction (a direction parallel to the ZC axis) that is the stacking direction thereof.
  • Each thickness of the support layer 2C and the device layer 3C is, for example, about several hundred ⁇ m.
  • the thickness of the intermediate layer 4C is, for example, about several ⁇ m.
  • the device layer 3C and the intermediate layer 4C are shown with one corner of the device layer 3C and one corner of the intermediate layer 4C cut away.
  • the device layer 3C has a mounting area 31C and a drive area 32C connected to the mounting area 31C.
  • the drive region 32C includes a pair of actuator regions 33C and a pair of elastic support regions 34C.
  • the mounting region 31C and the drive region 32C (that is, the mounting region 31C and the pair of actuator regions 33C and the pair of elastic support regions 34C) are integrally formed on a part of the device layer 3C by MEMS technology (patterning and etching). Yes.
  • the pair of actuator regions 33C are disposed on both sides of the mounting region 31C in the XC axis direction (direction parallel to the XC axis orthogonal to the ZC axis). That is, the mounting region 31C is sandwiched between the pair of actuator regions 33C in the XC axis direction.
  • Each actuator region 33C is fixed to the support layer 2C via the intermediate layer 4C.
  • a first comb tooth portion 33aC is provided on the side surface of each actuator region 33C on the mounting region 31C side.
  • Each first comb tooth portion 33aC is in a state of floating with respect to the support layer 2C by removing the intermediate layer 4C immediately below the first comb tooth portion 33aC.
  • Each actuator region 33C is provided with a first electrode 35C.
  • the pair of elastic support regions 34C are disposed on both sides of the mounting region 31C in the YC axis direction (a direction parallel to the YC axis perpendicular to the ZC axis and the XC axis). That is, the mounting region 31C is sandwiched between the pair of elastic support regions 34C in the YC axis direction. Both end portions 34aC of each elastic support region 34C are fixed to the support layer 2C via the intermediate layer 4C.
  • Each elastic support region 34C has an elastic deformation portion 34bC (a portion between both end portions 34aC) having a structure in which a plurality of leaf springs are connected.
  • each elastic support region 34C is in a state of floating with respect to the support layer 2C by removing the intermediate layer 4C immediately below the elastic deformation portion 34bC.
  • a second electrode 36C is provided at each of both end portions 34aC.
  • each elastic support region 34C is connected to the mounting region 31C.
  • the mounting region 31C is in a state of floating with respect to the support layer 2C by removing the intermediate layer 4C immediately below the mounting region 31C. That is, the mounting region 31C is supported by the pair of elastic support regions 34C.
  • a second comb tooth portion 31aC is provided on the side surface of each mounting region 31C on the side of each actuator region 33C.
  • Each second comb tooth portion 31aC is in a state of floating with respect to the support layer 2C by removing the intermediate layer 4C immediately below the second comb tooth portion 31aC.
  • each comb tooth of the first comb tooth portion 33aC is located between each comb tooth of the second comb tooth portion 31aC.
  • the pair of elastic support regions 34C sandwich the mounting region 31C from both sides when viewed in the direction AC parallel to the XC axis, and the mounting region 31C is mounted so that the mounting region 31C returns to the initial position when the mounting region 31C moves along the direction AC.
  • An elastic force is applied to the region 31C. Therefore, when a voltage is applied between the first electrode 35C and the second electrode 36C and an electrostatic attractive force acts between the first comb tooth portion 33aC and the second comb tooth portion 31aC facing each other, the electrostatic attractive force
  • the mounting region 31C is moved along the direction AC to a position where the elastic force generated by the pair of elastic support regions 34C is balanced.
  • the drive region 32C functions as an electrostatic actuator.
  • the optical module 1C further includes a movable mirror 5C, a fixed mirror 6C, a beam splitter 7C, a light incident part 8C, and a light emitting part 9C.
  • the movable mirror 5C, the fixed mirror 6C, and the beam splitter 7C are arranged on the device layer 3C so as to constitute an interference optical system 10C that is a Michelson interference optical system.
  • the movable mirror 5C is mounted on the mounting region 31C of the device layer 3C on one side of the beam splitter 7C in the XC axis direction.
  • the mirror surface 51aC of the mirror part 51C included in the movable mirror 5C is located on the opposite side of the support layer 2C with respect to the device layer 3C.
  • the mirror surface 51aC is, for example, a surface perpendicular to the XC axis direction (that is, a surface perpendicular to the direction AC) and faces the beam splitter 7C side.
  • the fixed mirror 6C is mounted on the mounting region 37C of the device layer 3C on one side of the beam splitter 7C in the YC axis direction.
  • the mirror surface 61aC of the mirror portion 61C of the fixed mirror 6C is located on the opposite side of the support layer 2C with respect to the device layer 3C.
  • the mirror surface 61aC is, for example, a surface perpendicular to the YC axis direction and faces the beam splitter 7C side.
  • the light incident portion 8C is mounted on the device layer 3C on the other side of the beam splitter 7C in the YC axis direction.
  • the light incident part 8C is configured by, for example, an optical fiber and a collimating lens.
  • the light incident part 8C is arranged so that the measurement light is incident on the interference optical system 10C from the outside.
  • the light emitting portion 9C is mounted on the device layer 3C on the other side of the beam splitter 7C in the XC axis direction.
  • the light emitting portion 9C is configured by, for example, an optical fiber and a collimating lens.
  • the light emitting unit 9C is arranged to emit measurement light (interference light) from the interference optical system 10C to the outside.
  • the beam splitter 7C is a cube type beam splitter having an optical functional surface 7aC.
  • the optical functional surface 7aC is located on the side opposite to the support layer 2C with respect to the device layer 3C.
  • the beam splitter 7C is positioned by bringing one corner on the bottom side of the beam splitter 7C into contact with one corner of the rectangular opening 3aC formed in the device layer 3C.
  • the beam splitter 7C is mounted on the support layer 2C by being fixed to the support layer 2C by bonding or the like in a positioned state.
  • the optical module 1C configured as described above, when the measurement light L0C is incident on the interference optical system 10C from the outside via the light incident portion 8C, a part of the measurement light L0C is transmitted to the optical functional surface 7aC of the beam splitter 7C.
  • the reflected light travels toward the movable mirror 5C, and the remaining portion of the measurement light L0C passes through the optical function surface 7aC of the beam splitter 7C and travels toward the fixed mirror 6C.
  • a part of the measurement light L0C is reflected by the mirror surface 51aC of the movable mirror 5C, travels toward the beam splitter 7C on the same optical path, and passes through the optical function surface 7aC of the beam splitter 7C.
  • the remaining part of the measurement light L0C is reflected by the mirror surface 61aC of the fixed mirror 6C, travels on the same optical path toward the beam splitter 7C, and is reflected by the optical function surface 7aC of the beam splitter 7C.
  • a part of the measurement light L0C transmitted through the optical functional surface 7aC of the beam splitter 7C and the remaining part of the measurement light L0C reflected by the optical functional surface 7aC of the beam splitter 7C become the measurement light L1C that is interference light, and the measurement light L1C is emitted to the outside from the interference optical system 10C via the light emitting portion 9C.
  • the optical module 1C since the movable mirror 5C can be reciprocated at high speed along the direction AC, a small and highly accurate FTIR can be provided. [Movable mirror and surrounding structure]
  • the movable mirror (optical element) 5C includes a mirror part (optical part) 51C having a mirror surface (optical surface) 51aC, an annular elastic part 52C, and a mirror. It has the connection part 53C which mutually connects the part 51C and the elastic part 52C, a pair of support part 56C, and a pair of connection part 57C which mutually connects the support part 56C and the elastic part 52C.
  • the mirror part 51C is formed in a disk shape.
  • the mirror surface 51aC is a circular plate surface of the mirror part 51C.
  • the movable mirror 5C is mounted on the base BC in a state where the mirror surface 51aC intersects (for example, is orthogonal to) the main surface BsC.
  • the elastic part 52C is formed in an annular shape so as to surround the mirror part 51C while being separated from the mirror part 51C when viewed from the direction intersecting the mirror surface 51aC (XC axis direction).
  • the elastic part 52C is provided around the mirror part 51C and forms an annular region CAC.
  • the connecting portion 53C connects the mirror portion 51C and the elastic portion 52C to each other at the center of the mirror portion 51C in the direction along the main surface BsC (YC axis direction).
  • a single connecting portion 53C is provided.
  • the connecting portion 53C is provided on the center line DLC passing through the center of the mirror portion 51C in the YC-axis direction and at a position opposite to the main surface BsC of the base BC with respect to the center of the mirror portion 51C in the ZC-axis direction. It has been.
  • the center line DLC is an imaginary straight line extending along the ZC axis direction.
  • the elastic portion 52C is formed in an annular plate shape by a semicircular leaf spring 52aC and a semicircular leaf spring 52bC continuous to the leaf spring 52aC.
  • the leaf spring 52aC and the leaf spring 52bC are configured symmetrically with respect to the center line DLC.
  • the spring constant of the leaf spring 52aC and the spring constant of the leaf spring 52bC are equal to each other.
  • the elastic part 52C as a whole is line-symmetric with respect to the center line DLC and has the same spring constant.
  • the support portion 56C is a rod having a rectangular cross section, and is provided so as to sandwich the mirror portion 51C and the elastic portion 52C in the YC axis direction.
  • the support portion 56C is connected to the elastic portion 52C by a connecting portion 57C.
  • the connecting portion 57C is disposed on a center line CLC passing through the center of the mirror portion 51C in the ZC axis direction.
  • the center line CLC is a virtual straight line that intersects (orthogonally intersects) the center line DLC at the center of the mirror portion 51C and extends along the YC axis direction.
  • the elastic portion 52C is elastically deformed so as to be compressed in the YC axis direction. be able to. That is, the mutual distance between the support portions 56C along the YC axis direction is variable according to the elastic deformation of the elastic portion 52C. Further, the elastic force of the elastic portion 52C can be applied to the support portion 56C.
  • the support portion 56C includes a leg portion 54C.
  • the leg portion 54C extends linearly from the connecting portion 57C to the one side (here, the main surface BsC side) of the mirror surface 51aC along the ZC axis direction, beyond the mirror surface 51aC.
  • the tip of the leg portion 54C is a contact portion 58C that comes into contact with the main surface BsC (that is, the mounting region 31C).
  • the end surface of the contact portion 58C may be flat, for example, but is curved (hemispherical) here.
  • the support portion 56C further includes a locking portion 55C.
  • the locking portion 55C extends from a midway portion on the distal end side of the leg portion 54C. Therefore, the support part 56C includes a protrusion part (leg part 54C) that branches off from the locking part 55C and protrudes toward the base BC, and the contact part 58C includes a tip part of the protrusion part. Between the pair of support portions 56C, the locking portion 55C is bent in a V shape so as to protrude toward each other.
  • the locking portion 55C includes an inclined surface 55aC and an inclined surface 55bC.
  • the inclined surface 55aC and the inclined surface 55bC are surfaces on the opposite side of the surfaces facing each other in the pair of locking portions 55C (outer surfaces).
  • the inclined surfaces 55aC are inclined so as to approach each other in the direction away from the connecting portion 57C (ZC axis negative direction) between the pair of locking portions 55C.
  • the inclined surfaces 55bC are inclined so as to be separated from each other in the negative direction of the ZC axis.
  • the absolute value of the inclination angle ⁇ C of the inclined surface 55aC with respect to the ZC axis is less than 90 °.
  • the absolute value of the inclination angle ⁇ C of the inclined surface 55bC is less than 90 °.
  • the absolute value of the inclination angle ⁇ C and the absolute value of the inclination angle ⁇ C are equal to each other.
  • an opening 31bC is formed in the mounting region 31C.
  • the opening 31bC extends in the ZC axis direction and penetrates the device layer 3C. Therefore, the opening 31bC communicates with (is led to) the main surface BsC and the surface of the device layer 3C opposite to the main surface BsC.
  • the opening 31bC has a columnar shape that is trapezoidal when viewed from the ZC axis direction (see FIG. 30). Details of the opening 31bC will be described later.
  • the support portion 56C is inserted into the opening 31bC in a state where the elastic force of the elastic portion 52C is applied.
  • the support portion 56C that is, the movable mirror 5C
  • a part of the locking portion 55C of the support portion 56C is located in the opening 31bC.
  • the locking portion 55C is in contact with a pair of edges (the edge on the main surface BsC side and the edge on the opposite side of the main surface BsC) of the opening 31bC in the ZC axis direction.
  • the inclined surface 55aC is in contact with the edge of the opening 31bC on the main surface BsC side, and the inclined surface 55bC is in contact with the edge of the opening 31bC on the opposite side of the main surface BsC. Accordingly, the locking portion 55C is locked to the mounting region 31C so as to sandwich the mounting region 31C in the ZC axial direction. As a result, the movable mirror 5C is prevented from coming off the base BC in the ZC axis direction.
  • the contact portion 58C contacts the main surface BsC (that is, the mounting region 31C). That is, the contact portion 58C contacts the mounting region 31C (here, the main surface BsC) in a state where the locking portion 55C is locked so as to sandwich the mounting region 31C.
  • the contact portion 58C is bonded to the mounting region 31C.
  • the contact portion 58C is in contact with and bonded to the main surface BsC via, for example, a resin adhesive layer.
  • the adhesion of the contact portion 58C may be, for example, adhesion of a metal layer, glass adhesive, laser light irradiation, or the like.
  • an opening 41C is formed in the intermediate layer 4C.
  • the openings 41C are opened on both sides of the intermediate layer 4C in the ZC axis direction.
  • An opening 21C is formed in the support layer 2C.
  • the openings 21C are opened on both sides of the support layer 2C in the ZC axis direction.
  • a continuous space S1C is formed by the region in the opening 41C of the intermediate layer 4C and the region in the opening 21C of the support layer 2C. That is, the space S1C includes a region in the opening 41C of the intermediate layer 4C and a region in the opening 21C of the support layer 2C.
  • the space S1C is formed between the support layer 2C and the device layer 3C, and corresponds to at least the mounting region 31C and the drive region 32C.
  • the region in the opening 41C of the intermediate layer 4C and the region in the opening 21C of the support layer 2C include a range in which the mounting region 31C moves when viewed from the ZC axis direction.
  • the region in the opening 41C of the intermediate layer 4C is a portion that should be separated from the support layer 2C in the mounting region 31C and the drive region 32C (that is, a portion that should be in a floating state with respect to the support layer 2C.
  • a gap for separating the entire mounting region 31C, the elastic deformation portion 34bC, the first comb tooth portion 33aC, and the second comb tooth portion 31aC) of each elastic support region 34C from the support layer 2C is formed.
  • each locking portion 55C of the movable mirror 5C is located in the space S1C. Specifically, a part of each locking portion 55C is located in a region in the opening 21C of the support layer 2C via a region in the opening 41C of the intermediate layer 4C. A part of each locking portion 55C protrudes from the surface of the device layer 3C on the intermediate layer 4C side into the space S1C, for example, by about 100 ⁇ m. As described above, the region in the opening 41C of the intermediate layer 4C and the region in the opening 21C of the support layer 2C include a range in which the mounting region 31C moves when viewed from the ZC axis direction. Is reciprocated along the direction AC, a part of each locking portion 55C of the movable mirror 5C located in the space S1C does not come into contact with the intermediate layer 4C and the support layer 2C.
  • the inner surface of the opening 31bC includes a pair of inclined surfaces SLC and a reference surface SRC.
  • the inclined surface SLC includes one end SLaC and the other end SLbC.
  • One end SLaC and the other end SLbC are both ends of the inclined surface SLC when viewed from the ZC axis direction.
  • the pair of inclined surfaces SLC are inclined (for example, with respect to the XC axis) such that the distance from one end SLaC to the other end SLbC increases.
  • the reference surface SRC extends along a reference line BLC that connects the other end SLbC of one inclined surface SLC and the other end SLbC of the other inclined surface SLC, as viewed from the ZC axis direction.
  • the reference surface SRC simply connects the other ends SLbC to each other.
  • the shape of the opening 31bC when viewed from the ZC axis direction is a trapezoid. Therefore, here, the inclined surface SLC corresponds to a trapezoidal leg, and the reference surface SRC corresponds to the lower base of the trapezoid.
  • the opening 31bC is a single space.
  • the minimum value of the dimension of the opening 31bC in the YC axis direction (that is, the distance between the one ends SLaC of the inclined surface SLC) is a pair of locking when the elastic portion 52C is elastically deformed along the YC axis direction. The value is such that the portion 55C can be placed in the opening 31bC in a lump.
  • the maximum value of the dimension of the opening 31bC in the YC-axis direction (that is, the interval between the other ends SLbC of the inclined surface SLC) is the elasticity of the elastic part 52C when the pair of locking parts 55C is disposed in the opening 31bC. Only a part of the deformation can be released (that is, the elastic portion 52C does not reach the natural length).
  • the locking portion 55C presses the inner surface of the opening 31bC by the elastic force of the elastic portion 52C, and the reaction force from the inner surface of the opening 31bC is increased by the locking portion 55C (
  • the support portion 56C) is provided. Accordingly, the movable mirror 5C is supported by the mounting region 31C by the reaction force of the elastic force applied from the inner surface of the opening 31bC to the support portion 56C in a state where the mirror surface 51aC intersects (for example, orthogonally) the main surface BsC. . In this state, as described above, the contact portion 58C is in contact with and bonded to the main surface BsC (mounting region 31C).
  • the movable mirror 5C is supported by the mounting region 31C by the reaction force of the elastic force applied to the locking portion 55C from the inner surface of the opening 31bC in a state where the mirror surface 51aC intersects the main surface BsC, and the contact portion At 58C, it is bonded to the mounting region 31C.
  • the locking portion 55C is brought into contact with the inclined surface SLC of the opening 31bC. For this reason, the locking portion 55C slides on the inclined surface SLC toward the reference surface SRC by the component in the XC axis direction of the reaction force from the inclined surface SLC, and pushes against the reference surface SRC while contacting the inclined surface SLC. Hit. Accordingly, the locking portion 55C is inscribed in the corner defined by the inclined surface SLC and the reference surface SRC, and is positioned in both the XC axis direction and the YC axis direction (self-aligned by elastic force).
  • the cross-sectional shape of the locking portion 55C is a quadrangle, when viewed from the ZC axial direction, the inclined surface SLC contacts the locking portion 55C at a point, and the reference surface SRC is in contact with the locking portion 55C. Touch with a line. That is, here, the inner surface of the opening 31bC contacts the pair of locking portions 55C at two points and two lines when viewed from the ZC axial direction.
  • the locking portion 55C is locked at the position, and the movable mirror 5C is positioned in the ZC axial direction (self-aligned by the elastic force). That is, in the movable mirror 5C, self-alignment is three-dimensionally performed using the elastic force of the elastic portion 52C.
  • the inclined surface 55bC and the contact portion 58C are opposed to each other along the ZC axis direction. Therefore, the inclined surface 55aC may be configured not to contact the edge of the opening 31bC but to perform self-alignment so that the edge of the opening 31bC is sandwiched between the contact portion 58C and the inclined surface 55bC.
  • the movable mirror 5C as described above is integrally formed by, for example, MEMS technology (patterning and etching). Accordingly, the thickness of the movable mirror 5C (the dimension in the direction intersecting the mirror surface 51aC) is constant in each part, and is, for example, about 320 ⁇ m.
  • the diameter of the mirror surface 51aC is, for example, about 1 mm.
  • the distance between the surface (inner surface) of the elastic part 52C on the mirror part 51C side and the surface (outer surface) of the mirror part 51C on the elastic part 52C side is, for example, about 200 ⁇ m.
  • the thickness of the elastic portion 52C is, for example, about 10 ⁇ m to 20 ⁇ m.
  • the fixed mirror 6C and its peripheral structure are the same as the movable mirror 5C and its peripheral structure except that the mounting area does not move. That is, as shown in FIGS. 31 and 32, the fixed mirror (optical element) 6C includes a mirror portion (optical portion) 61C having a mirror surface (optical surface) 61aC, an annular elastic portion 62C, and a mirror portion 61C. And the elastic portion 62C, a pair of support portions 66C, and a pair of connection portions 67C that connect the support portion 66C and the elastic portion 62C to each other.
  • the mirror part 61C is formed in a disk shape.
  • the mirror surface 61aC is a circular plate surface of the mirror portion 61C.
  • the fixed mirror 6C is mounted on the base BC in a state where the mirror surface 61aC intersects (for example, is orthogonal to) the main surface BsC of the base BC.
  • the elastic part 62C is formed in an annular shape so as to surround the mirror part 61C while being separated from the mirror part 61C when viewed from the direction intersecting the mirror surface 61aC (YC axis direction). Therefore, the elastic portion 62C is provided around the mirror portion 61C, and forms an annular region CAC.
  • the connecting portion 63C connects the mirror portion 61C and the elastic portion 62C to each other at the center of the mirror portion 61C in the direction along the main surface BsC (XC axis direction). Here, a single connecting portion 63C is provided.
  • the connecting portion 63C is provided on the center line DLC passing through the center of the mirror portion 61C in the XC axis direction and at a position opposite to the main surface BsC of the base BC with respect to the center of the mirror portion 61C in the ZC axis direction. It has been.
  • the center line DLC is an imaginary straight line extending along the ZC axis direction.
  • the elastic portion 62C is formed in an annular plate shape by a semicircular leaf spring 62aC and a semicircular leaf spring 62bC continuous to the leaf spring 62aC.
  • the leaf spring 62aC and the leaf spring 62bC are configured symmetrically with respect to the center line DLC.
  • the spring constant of the leaf spring 62aC and the spring constant of the leaf spring 62bC are equal to each other.
  • the elastic part 62C as a whole is line-symmetric with respect to the center line DLC and has the same spring constant.
  • the support portion 66C has a bar shape with a rectangular cross section, and is provided so as to sandwich the mirror portion 61C and the elastic portion 62C in the XC axis direction.
  • the support portion 66C is connected to the elastic portion 62C by a connecting portion 67C.
  • the connecting portion 67C is disposed on a center line CLC passing through the center of the mirror portion 61C in the ZC axis direction.
  • the center line CLC is a virtual straight line that intersects (orthogonally) the center line DLC at the center of the mirror portion 61C and extends along the XC axis direction.
  • the elastic portion 62C is elastically deformed so as to be compressed in the XC axis direction. be able to. That is, the distance between the support portions 66C along the XC axis direction is variable according to the elastic deformation of the elastic portion 62C. Further, the elastic force of the elastic portion 62C can be applied to the support portion 66C.
  • the support portion 66C includes a leg portion 64C.
  • the leg portion 64C extends linearly along the ZC axis direction from the connecting portion 67C beyond the mirror surface 61aC to one side of the mirror surface 61aC (here, the main surface BsC side).
  • the front end of the leg portion 64C is a contact portion 68C that comes into contact with the main surface BsC (that is, the mounting region 37C).
  • the end surface of the contact portion 68C may be flat, for example, but here is a curved surface (semispherical surface).
  • the support portion 66C further includes a locking portion 65C.
  • the locking part 65C extends from the middle part on the tip side of the leg part 64C. Therefore, the support portion 66C includes a protruding portion (leg portion 64C) that branches off from the locking portion 65C and protrudes toward the base BC, and the contact portion 68C includes a tip portion of the protruding portion. Between the pair of support portions 66C, the locking portion 65C is bent in a V shape so as to protrude toward each other.
  • the locking portion 65C includes an inclined surface 65aC and an inclined surface 65bC. It includes an inclined surface 65aC and an inclined surface 65bC.
  • the inclined surface 65aC and the inclined surface 65bC are surfaces opposite to the surfaces facing each other in the pair of locking portions 65C (outer surfaces).
  • the inclined surfaces 65aC are inclined so as to approach each other in the direction away from the connecting portion 67C (ZC axis negative direction) between the pair of locking portions 65C.
  • the inclined surfaces 65bC are inclined so as to be separated from each other in the ZC axis negative direction.
  • the inclination angles of the inclined surfaces 65aC and 65bC with respect to the ZC axis are the same as those of the inclined surfaces 55aC and 55bC in the movable mirror 5C.
  • an opening 37aC is formed in the mounting region 37C.
  • the opening 37aC penetrates the device layer 3C in the ZC axis direction. Therefore, the opening 37aC communicates with (is led to) the main surface BsC and the surface of the device layer 3C opposite to the main surface BsC. Similar to the opening 31bC in the mounting region 31C, the opening 37aC has a columnar shape with a trapezoidal shape when viewed from the ZC axis direction.
  • the support portion 66C is inserted into the opening 37aC in a state where the elastic force of the elastic portion 62C is applied.
  • the support portion 66C that is, the fixed mirror 6C
  • a part of the locking portion 65C of the support portion 66C is located in the opening 37aC.
  • the locking portion 65C is in contact with a pair of edges of the opening 37aC in the ZC axial direction (an edge on the main surface BsC side and an edge on the opposite side of the main surface BsC).
  • the inclined surface 65aC is in contact with the edge of the opening 37aC on the main surface BsC side, and the inclined surface 65bC is in contact with the edge of the opening 37aC on the opposite side of the main surface BsC. Accordingly, the locking portion 65C is locked to the mounting region 37C so as to sandwich the mounting region 37C in the ZC axial direction. As a result, the fixed mirror 6C is prevented from coming off the base BC in the ZC axis direction.
  • the contact portion 68C contacts the main surface BsC (that is, the mounting region 37C). That is, the contact portion 68C contacts the mounting region 37C (here, the main surface BsC) in a state where the locking portion 65C is locked so as to sandwich the mounting region 37C.
  • the contact portion 68C is bonded to the mounting region 37C.
  • the contact portion 68C is in contact with and bonded to the main surface BsC via a resin adhesive layer, for example.
  • the bonding of the contact portion 68C may be, for example, melting of a metal layer, glass adhesive, bonding by laser light irradiation, or the like.
  • an opening 42C is formed in the intermediate layer 4C.
  • the opening 42C includes the opening 37aC of the mounting region 37C when viewed from the ZC axis direction, and opens on both sides of the intermediate layer 4C in the ZC axis direction.
  • An opening 22C is formed in the support layer 2C.
  • the opening 22C includes the opening 37aC of the mounting region 37C when viewed from the ZC axis direction, and opens on both sides of the support layer 2C in the ZC axis direction.
  • a continuous space S2C is formed by the region in the opening 42C of the intermediate layer 4C and the region in the opening 22C of the support layer 2C. That is, the space S2C includes a region in the opening 42C of the intermediate layer 4C and a region in the opening 22C of the support layer 2C.
  • each locking portion 65C of the fixed mirror 6C is located in the space S2C. Specifically, a part of each locking portion 65C is located in a region in the opening 22C of the support layer 2C via a region in the opening 42C of the intermediate layer 4C. A part of each locking portion 65C protrudes from the surface of the device layer 3C on the intermediate layer 4C side into the space S2C, for example, by about 100 ⁇ m.
  • the inner surface of the opening 37aC is configured in the same manner as the inner surface of the opening 31bC in the mounting region 31C. Therefore, when the pair of locking portions 65C is disposed in the opening 37aC, the locking portion 65C presses the inner surface of the opening 37aC by the elastic force of the elastic portion 62C, and the reaction force from the inner surface of the opening 37aC is increased by the locking portion 65C ( The support portion 66C) is applied. Accordingly, the fixed mirror 6C is supported by the mounting region 37C by the reaction force of the elastic force applied to the support portion 66C from the inner surface of the opening 37aC in a state where the mirror surface 61aC intersects (for example, orthogonally) the main surface BsC. .
  • the contact portion 68C is in contact with and adhered to the main surface BsC (mounting region 37C). Therefore, the fixed mirror 6C is supported by the mounting region 37C by the reaction force of the elastic force applied to the locking portion 65C from the inner surface of the opening 37aC in a state where the mirror surface 61aC intersects the main surface BsC, and the contact portion At 68C, it is bonded to the mounting region 37C.
  • the fixed mirror 6C as in the case of the movable mirror 5C, three-dimensional self-alignment using the inner surface of the opening 37aC and the elastic force is performed.
  • the fixed mirror 6C as described above is also integrally formed by, for example, the MEMS technique (patterning and etching) similarly to the movable mirror 5C.
  • the dimension of each part of the fixed mirror 6C is the same as the above-described dimension of each part of the movable mirror 5C, for example.
  • the movable mirror 5C includes an elastic portion 52C and a pair of support portions 56C whose distances can be changed according to the elastic deformation of the elastic portion 52C.
  • an opening 31bC communicating with the main surface BsC is formed in the mounting region 31C of the base BC on which the movable mirror 5C is mounted.
  • the support portion 56C by inserting the support portion 56C into the opening 31bC in a state where the elastic portion 52C is elastically deformed so that the distance between the support portions 56C is reduced, and releasing a part of the elastic deformation of the elastic portion 52C, The mutual distance between the support portions 56C increases in the opening 31bC, and the support portion 56C can be brought into contact with the inner surface of the opening 31bC.
  • the position of the movable mirror 5C relative to the mounting region 31C is accurately defined on the inner surface of the opening 31bC by the reaction force of the elastic force applied to the support portion 56C from the inner surface of the opening 31bC. Further, the movable mirror 5C is bonded to the mounting region 31C at the contact portion 58C of the support portion 56C in a state where the movable mirror 5C is supported by the reaction force of the elastic force.
  • the optical module 1C it is possible to ensure the mounting strength while improving the mounting accuracy of the movable mirror 5C.
  • the action and effect have been described by taking the movable mirror 5C as an example, but the same action and effect are also obtained with respect to the fixed mirror 6C (the same applies hereinafter).
  • the support portion 56C includes a protruding portion (leg portion 54C) that branches off from the locking portion 55C and protrudes toward the base BC, and the contact portion 58C has a tip portion of the protruding portion. Contains. For this reason, the movable mirror 5C can be bonded in a state where the tip of the protruding portion as the contact portion 58C is abutted against the main surface BsC of the base BC. In particular, since the main surface BsC can be used for bonding the movable mirror 5C, it is possible to facilitate processing such as adhesive placement (patterning) and welding.
  • the elastic portion 52C is provided so as to form the annular region CAC.
  • the strength of the elastic portion 52C is improved as compared with a case where the elastic portion 52C is in a cantilever state (in this case, a closed region such as an annular shape is not formed by the elastic portion 52C). Therefore, for example, it is possible to suppress the breakage of the elastic portion 52C at the time of manufacturing or handling the movable mirror 5C.
  • the base BC has a support layer 2C and a device layer 3C provided on the support layer 2C and including the main surface BsC and the mounting region 31C.
  • the opening 31bC penetrates the device layer 3C in a direction intersecting the main surface BsC (ZC axis direction).
  • the support part 56C contains the latching
  • the inner surface of the opening 31bC has a pair of inclined surfaces SLC that are inclined so that the distance from one end SLaC to the other end SLbC increases as viewed from the ZC axis direction, and one inclined surface.
  • a reference plane SRC extending along a reference line BLC connecting the other end SLbC of the SLC and the other end SLbC of the other inclined surface SLC.
  • the elastic portion 52C is formed in an annular shape so as to surround the mirror portion 51C when viewed from the XC axis direction, thereby forming an annular region CAC. For this reason, since an edge part does not arise in 52 C of elastic parts, the intensity
  • the elastic part 52C has a symmetrical shape with respect to the center line DLC of the mirror surface 51aC, and the spring constant of the elastic part 52C is equal to each other on both sides of the center line DLC. For this reason, for example, when the elastic portion 52C is elastically deformed along the YC axis direction, the posture of the movable mirror 5C is unlikely to become unstable (for example, torsion is unlikely to occur). Further, when a part of the elastic deformation of the elastic portion 52C is released, the reaction force is prevented from being input non-uniformly from the inner surface of the opening 31bC to the pair of support portions 56C.
  • the movable mirror 5C penetrates the mounting region 31C of the device layer 3C, and a part of each locking portion 55C of the movable mirror 5C is formed between the support layer 2C and the device layer 3C. Is located in the space S1C.
  • the movable mirror 5C can be stably and firmly fixed to the mounting region 31C of the device layer 3C. Therefore, according to the optical module 1C, the mounting of the movable mirror 5C on the device layer 3C is realized.
  • each locking portion 55C of the movable mirror 5C is located in a region in the opening 21C of the support layer 2C via a region in the opening 41C of the intermediate layer 4C.
  • the support layer 2C is the first silicon layer of the SOI substrate
  • the device layer 3C is the second silicon layer of the SOI substrate
  • the intermediate layer 4C is the insulating layer of the SOI substrate.
  • the mirror surface 51aC of the movable mirror 5C is located on the opposite side of the support layer 2C with respect to the device layer 3C. Thereby, the configuration of the optical module 1C can be simplified.
  • the movable mirror 5C, the fixed mirror 6C, and the beam splitter 7C are arranged so as to constitute the interference optical system 10C. Thereby, FTIR with improved sensitivity can be obtained.
  • the light incident part 8C is arranged so that the measurement light is incident on the interference optical system 10C from the outside, and the light emitting part 9C emits the measurement light from the interference optical system 10C to the outside.
  • the light emitting part 9C emits the measurement light from the interference optical system 10C to the outside.
  • space S1C is formed between the support layer 2C and the device layer 3C, and as long as it corresponds to at least the mounting region 31C and the drive region 32C, various spaces can be obtained as shown in FIGS. Aspects can be employed.
  • a recess 23C that opens to the device layer 3C side is formed in the support layer 2C, and the region in the opening 41C of the intermediate layer 4C and the recess 23C in the support layer 2C
  • the space S1C is configured by the regions.
  • the region in the recess 23C of the support layer 2C includes a range in which the mounting region 31C moves when viewed from the ZC axis direction.
  • a part of each locking portion 55C of the movable mirror 5C is located in a region in the recess 23C through a region in the opening 41C of the intermediate layer 4C. Also with this configuration, a configuration for reliably mounting the movable mirror 5C on the device layer 3C can be suitably realized.
  • the region in the opening 21C of the support layer 2C includes a range in which each locking portion 55C of the movable mirror 5C moves when viewed from the ZC axis direction.
  • the region in the recess 23C of the support layer 2C includes a range in which each locking portion 55C of the movable mirror 5C moves when viewed from the ZC axis direction.
  • the region in the opening 41C of the intermediate layer 4C includes a range in which the mounting region 31C moves when viewed from the ZC axis direction, and is separated from the support layer 2C in the mounting region 31C and the drive region 32C.
  • a gap for separating the power portion from the support layer 2C is formed.
  • the mounting region 31C reciprocates along the direction AC, a part of each locking portion 55C of the movable mirror 5C located in the space S1C comes into contact with the intermediate layer 4C and the support layer 2C. There is no.
  • the support layer 2C and the device layer 3C may be joined to each other without the intermediate layer 4C.
  • the support layer 2C is formed of, for example, silicon, borosilicate glass, quartz glass, or ceramic
  • the device layer 3C is formed of, for example, silicon.
  • the support layer 2C and the device layer 3C are bonded to each other by, for example, normal temperature bonding by surface activation, low temperature plasma bonding, direct bonding for performing high temperature treatment, insulating resin bonding, metal bonding, bonding by glass frit, or the like.
  • the space S1C is formed between the support layer 2C and the device layer 3C, and as long as it corresponds to at least the mounting region 31C and the drive region 32C, FIG. 35, FIG. 36, FIG. As shown at 38, various aspects can be employed. In any configuration, it is possible to suitably realize a configuration for surely mounting the movable mirror 5C on the device layer 3C.
  • a space S1C is configured by the region in the opening 21C of the support layer 2C.
  • the region in the opening 21C of the support layer 2C includes a range in which the mounting region 31C moves when viewed from the ZC axis direction, and should be separated from the support layer 2C out of the mounting region 31C and the drive region 32C.
  • a gap for separating the portion from the support layer 2C is formed.
  • a part of each locking portion 55C of the movable mirror 5C is located in a region within the opening 21C of the support layer 2C.
  • a space S1C is configured by the region in the recess 23C of the support layer 2C.
  • the region in the recess 23C of the support layer 2C includes a range in which the mounting region 31C moves when viewed from the ZC axis direction, and should be separated from the support layer 2C out of the mounting region 31C and the drive region 32C.
  • a gap for separating the portion from the support layer 2C is formed.
  • a part of each locking portion 55C of the movable mirror 5C is located in a region in the concave portion 23C of the support layer 2C.
  • a recess (first recess) 38C that opens to the support layer 2C side is formed in the device layer 3C, and the region in the recess 38C of the device layer 3C and the support layer 2C A space S1C is formed by the region in the opening 21C.
  • the region in the recess 38C of the device layer 3C and the region in the opening 21C of the support layer 2C include a range in which the mounting region 31C moves when viewed from the ZC axis direction.
  • a region in the recess 38C of the device layer 3C forms a gap for separating a portion to be separated from the support layer 2C from the support layer 2C in the mounting region 31C and the drive region 32C.
  • a part of each locking portion 55C of the movable mirror 5C is located in a region in the opening 21C of the support layer 2C via a region in the recess 38C of the device layer 3C.
  • the recess 38C is formed in the device layer 3C, and the space is defined by the region in the recess 38C of the device layer 3C and the region in the recess (second recess) 23C of the support layer 2C.
  • S1C is configured.
  • the region in the recess 38C of the device layer 3C and the region in the recess 23C of the support layer 2C include a range in which the mounting region 31C moves when viewed from the ZC axis direction.
  • a region in the recess 38C of the device layer 3C forms a gap for separating a portion to be separated from the support layer 2C from the support layer 2C in the mounting region 31C and the drive region 32C.
  • a part of each locking portion 55C of the movable mirror 5C is located in a region in the recess 23C of the support layer 2C via a region in the recess 38C of the device layer 3C.
  • a recess 38C is formed in the device layer 3C, and a space S1C is formed by a region in the recess 38C of the device layer 3C and a region in the opening 21C of the support layer 2C.
  • the region in the recess 38C of the device layer 3C includes a range in which the mounting region 31C moves when viewed from the ZC axis direction, and should be separated from the support layer 2C in the mounting region 31C and the drive region 32C.
  • a gap for separating the portion from the support layer 2C is formed.
  • the region in the opening 21C of the support layer 2C includes a range in which each locking portion 55C of the movable mirror 5C moves when viewed from the ZC axis direction. A part of each locking portion 55C of the movable mirror 5C is located in a region in the opening 21C of the support layer 2C via a region in the recess 38C of the device layer 3C.
  • the recess 38C is formed in the device layer 3C, and the space is defined by the region in the recess 38C of the device layer 3C and the region in the recess (second recess) 23C of the support layer 2C.
  • S1C is configured.
  • the region in the recess 38C of the device layer 3C includes a range in which the mounting region 31C moves when viewed from the ZC axis direction, and should be separated from the support layer 2C in the mounting region 31C and the drive region 32C. A gap for separating the portion from the support layer 2C is formed.
  • the region in the recess 23C of the support layer 2C includes a range in which each locking portion 55C of the movable mirror 5C moves when viewed from the ZC axis direction.
  • a part of each locking portion 55C of the movable mirror 5C is located in a region in the recess 23C of the support layer 2C via a region in the recess 38C of the device layer 3C.
  • the concave portion 38C is formed in the device layer 3C, and the space S1C is configured by the region in the concave portion 38C of the device layer 3C.
  • the region in the recess 38C of the device layer 3C includes a range in which the mounting region 31C moves when viewed from the ZC axis direction, and should be separated from the support layer 2C in the mounting region 31C and the drive region 32C.
  • a gap for separating the portion from the support layer 2C is formed.
  • a part of each locking portion 55C of the movable mirror 5C is located in a region in the recess 38C of the device layer 3C.
  • the movable mirror 5C has been described with respect to the case where the entire mirror surface 51aC protrudes from the main surface BsC or the surface of the base BC opposite to the main surface BsC.
  • the mode of the movable mirror 5C is not limited to this case.
  • a part of the mirror surface 51aC of the movable mirror 5C may be disposed inside the base BC. This example will be described below.
  • the movable mirror 5AC is movable in that it has a support portion 56AC instead of the support portion 56C as compared to the movable mirror 5C shown in FIG. This is different from the mirror 5C.
  • the support portion 56AC has an intermediate portion 59C disposed between the elastic portion 52C and the locking portion 55C.
  • the intermediate part 59C extends linearly in the ZC axis direction in parallel to each other so as to sandwich the mirror part 51C along the YC axis direction.
  • the connecting portion 57C is included in the central portion of the intermediate portion 59C.
  • the locking portion 55C is provided at the center of the intermediate portion 59C. Accordingly, the locking portion 55C is disposed so as to sandwich the mirror portion 51C along the YC axis direction.
  • the relationship between the shape of the locking portion 55C and the mounting region 31C is the same as that of the movable mirror 5C.
  • the support portion 56AC supports the movable mirror 5AC in a state where the entire movable mirror 5AC penetrates the mounting region 31C through the opening 31bC.
  • the mirror surface 51aC intersects the mounting area 31C.
  • the movable mirror 5AC is locked to the device layer 3C at the locking portion 55C and supported by the mounting region 31C. Therefore, compared with the case where the movable mirror 5C is supported by the support portion 56C (leg portion 54C) extending relatively long on one side of the center line CLC, the deviation between the support point and the center of gravity is small, and stable mounting is achieved. It is feasible.
  • the support portion 56AC supports the movable mirror 5AC so that the center line CLC of the mirror surface 51aC in the ZC axis direction coincides with the center in the thickness direction of the device layer 3C. For this reason, the support point and the center of gravity substantially coincide with each other in the ZC axis direction, and more stable mounting is realized.
  • a part (here, half or more) of the mirror surface 51aC is located closer to the support layer 2C than the main surface BsC.
  • the opening 31bC is extended and opened so as to reach the end of the mounting region 31C on the side facing the mirror surface 51aC. Therefore, even in this case, by controlling the optical path of the measurement light L0C toward the mirror surface 51aC, the measurement light L0C can be prevented from interfering with the mounting region 31C, and the entire mirror surface 51aC can be used effectively. .
  • the support portion 56AC has a contact portion 58C extending along the direction away from the mirror portion 51C (YC axis direction) from the tip of the portion including the inclined surface 55aC in the locking portion 55C.
  • the contact portion 58C has an L shape in which the front end portion 58aC is bent toward the base side. Then, the contact portion 58C comes into contact with and adheres to the main surface BsC (mounting region 31C) at the distal end portion 58aC.
  • the support portion 56AC includes the contact portion 58C that contacts the mounting region 31C in a state where the locking portion 55C is inserted into the opening 31bC.
  • the movable mirror 5AC also has the mounting region 31C due to the reaction force of the elastic force applied to the locking portion 55C from the inner surface of the opening 31bC in a state where the mirror surface 51aC intersects the main surface BsC, similarly to the movable mirror 5C. And is bonded to the mounting region 31C at the contact portion 58C.
  • the fixed mirror 6C is mounted on the device layer 3C.
  • the fixed mirror 6C may be mounted on the support layer 2C or the intermediate layer 4C.
  • the beam splitter 7C is mounted on the support layer 2C.
  • the beam splitter 7C may be mounted on the device layer 3C or the intermediate layer 4C. That is, the fixed mirror 6C and the beam splitter 7C may be mounted on any one of the support layer 2C, the device layer 3C, and the intermediate layer 4C.
  • the beam splitter 7C is not limited to a cube type beam splitter, and may be a plate type beam splitter.
  • the optical module 1C may include a light emitting element that generates measurement light to be incident on the light incident portion 8C in addition to the light incident portion 8C.
  • the optical module 1C may include a light emitting element that generates measurement light incident on the interference optical system 10C, instead of the light incident portion 8C.
  • the optical module 1C may include a light receiving element that detects measurement light (interference light) emitted from the light emitting unit 9C in addition to the light emitting unit 9C.
  • the optical module 1C may include a light receiving element that detects measurement light (interference light) emitted from the interference optical system 10C instead of the light emitting unit 9C.
  • first through electrode electrically connected to each actuator region 33C and the second through electrode electrically connected to each of the both end portions 34aC of each elastic support region 34C are the support layer 2C and the intermediate layer 4C. (If the intermediate layer 4C does not exist, only the support layer 2C is provided), and a voltage may be applied between the first through electrode and the second through electrode.
  • the actuator that moves the mounting region 31C is not limited to an electrostatic actuator, and may be, for example, a piezoelectric actuator, an electromagnetic actuator, or the like.
  • the optical module 1C is not limited to the one constituting the FTIR, and may constitute another optical system.
  • the locking portion 55C is connected to the tip of the leg portion 54C opposite to the connecting portion 57C. Therefore, the tip of the leg portion 54C is not provided with a protruding portion and is not a contact portion.
  • the locking portion 55C includes the contact portion 58C. This will be described more specifically.
  • the locking portion 55C when the locking portion 55C is inserted into the opening 31bC, the locking portion 55C slides on the inclined surface SLC toward the reference surface SRC by the component in the XC axis direction of the reaction force from the inclined surface SLC. It abuts against the reference surface SRC while contacting the SLC. That is, the locking portion 55C includes a side surface that faces the inner surface (reference surface SRC) of the opening 31bC. The side surface is bonded to the reference surface SRC. This bonding can also be performed in the same manner as the bonding on the main surface BsC described above.
  • the contact portion 58C that contacts the mounting region 31C in a state where the locking portion 55C is inserted into the opening 31bC includes a side surface that faces the reference surface SRC of the opening 31bC in the locking portion 55C (side surface). Is).
  • the movable mirror 5C can be bonded in a state where the side surface of the locking portion 55C as the contact portion 58C is in contact with the inner surface of the opening 31bC.
  • the bonding area can be increased and the mounting strength can be reliably improved.
  • the locking portion 55C is connected to the tip of the leg portion 54C.
  • the support portion 56C includes a protruding portion that protrudes toward the base BC while branching from the connecting portion between the leg portion 54C and the locking portion 55C to the locking portion 55C.
  • the protruding portions protrude in opposite directions (outside) between the pair of support portions 56C.
  • the contact portion 58C is the protruding portion. That is, here, the contact portion 58C extends from the connection portion between the leg portion 54C and the locking portion 55C so that the angle with respect to the main surface BsC decreases.
  • the front end 58aC of the contact portion 58C is substantially parallel to the main surface BsC (for example, elastically deformed so as to be substantially parallel) in the state where the locking portion 55C is inserted into the opening 31bC.
  • the region 31C) is contacted and adhered.
  • the movable mirror 5C has a pair of connecting portions 53C.
  • the pair of connecting portions 53C are arranged at positions different from the pair of connecting portions 57C.
  • the pair of connecting portions 53C are distributed and arranged on both sides of the center line CLC.
  • the pair of connecting portions 53C are disposed at positions symmetrical with respect to the center line CLC. Therefore, here, the entire elastic portion 52C and the movable mirror 5C are configured symmetrically with respect to a straight line connecting the pair of connecting portions 53C.
  • the movable mirror 5C has three connecting portions 53C.
  • the three connecting portions 53C are arranged at positions different from the pair of connecting portions 57C.
  • one connection part 53C and two connection parts 53C of the three connection parts 53C are distributed and arranged on both sides of the center line CLC.
  • the movable mirror 5C has four connecting portions 53C.
  • the four connecting portions 53C are arranged at positions different from the pair of connecting portions 57C.
  • the four connecting portions 53C are distributed and arranged on both sides of the center line CLC.
  • the movable mirror 5C can have a plurality of elastic portions 52C.
  • the movable mirror 5C has a pair of elastic portions 52C.
  • the pair of elastic portions 52C are each formed in an annular plate shape and are arranged concentrically with each other.
  • one elastic part 52C is provided so as to surround the mirror part 51C
  • another elastic part 52C is provided so as to surround the one elastic part 52C and the mirror part 51C.
  • Each of the elastic portions 52C forms an annular region CAC.
  • the elastic portion 52C is not limited to an annular plate shape, and may be an elliptical ring plate shape as shown in FIG. That is, the elastic portion 52C may be elliptical when viewed from the direction intersecting the mirror surface 51aC (XC axis direction).
  • the pair of connecting portions 53C is disposed at a position corresponding to the major axis of the ellipse of the elastic portion 52C.
  • the pair of connecting portions 57C is disposed at a position corresponding to the short axis of the ellipse of the elastic portion 52C.
  • the movable mirror 5C includes a pair of rectangular plate-like elastic portions 52C and a pair of plate-like connection portions 52sC that connect the elastic portions 52C to each other.
  • the elastic portions 52C are arranged on both sides of the mirror portion 51C so as to sandwich the mirror portion 51C in the YC axis direction.
  • the elastic portion 52C extends along the ZC axis direction substantially parallel to the support portion 56C.
  • the connection parts 52sC are provided at both ends of the elastic part 52C in the longitudinal direction, and connect the elastic parts 52C.
  • a rectangular annular region CAC is formed by the elastic portion 52C and the connecting portion 52sC.
  • a single connecting portion 53C connects the elastic portion 52C and the mirror portion 51C to each other via the connecting portion 52sC.
  • the movable mirror 5C has a pair of elastic portions 52C.
  • the elastic portions 52C are arranged on both sides of the mirror portion 51C so as to sandwich the mirror portion 51C in the ZC axis direction.
  • Each of the elastic portions 52C is formed in a corrugated plate shape. That is, when viewed from the XC axis direction, the elastic portion 52C has a wave shape (in this case, a rectangular wave shape).
  • Each of the elastic parts 52C is connected to the support part 56C at both ends thereof. Thereby, here, a substantially rectangular annular region CAC is formed by the elastic portion 52C and the support portion 56C.
  • the connecting portion 53C connects the support portion 56C and the mirror portion 51C to each other.
  • the mirror part 51C may be connected to the support part 56C.
  • the movable mirror 5C has a pair of elastic portions 52C.
  • the elastic portions 52C are arranged on both sides of the mirror portion 51C so as to sandwich the mirror portion 51C in the ZC axis direction.
  • Each of the elastic portions 52C is formed in a V-shaped plate shape. That is, the elastic part 52C is V-shaped when viewed from the XC axis direction.
  • Each of the elastic parts 52C is connected to the support part 56C at both ends thereof. Thereby, here, a substantially rectangular annular region CAC is formed by the elastic portion 52C and the support portion 56C.
  • the connecting portion 53C connects the support portion 56C and the mirror portion 51C to each other.
  • the elastic portion 52C includes a pair of semicircular portions disposed in opposite directions as viewed from the XC axis direction, and a pair of linear portions connecting the semicircular portions. And may be formed in an annular shape.
  • the elastic portion 52C includes a pair of semicircular portions arranged in the same direction as seen from the XC axis direction and a pair of linear portions connecting the semicircular portions. And may be formed in an annular shape.
  • the elastic portion 52C may be formed in a shape in which a part of the ring is notched as seen from the XC axis direction.
  • the elastic portion 52C has a shape in which a pair of cutout portions 52cC are provided on both sides of the center line CLC with respect to the ring. That is, here, the elastic portion 52C is composed of a pair of arcuate portions 52dC that are separated from each other in the cutout portion 52cC.
  • the connecting portion 53C connects the elastic portion 52C and the mirror portion 51C to each other at each end of the arc-shaped portion 52dC.
  • one circular region CAC is formed by one arcuate portion 52dC, a pair of connecting portions 53C connected to the one arcuate portion 52dC, and the mirror portion 51C.
  • the elastic portion 52C is configured as a single arc-shaped portion 52dC by a single notch portion 52cC.
  • the connecting portion 53C connects the elastic portion 52C and the mirror portion 51C to each other at the end of the elastic portion 52C.
  • the annular region CAC is formed by the elastic portion 52C, the pair of connecting portions 53C, and the mirror portion 51C.
  • the connecting portion 53C connects the support portion 56C and the mirror portion 51C via the notch portion 52cC. That is, the mirror part 51C may be directly connected to the support part 56C.
  • the shape of the opening 31bC when viewed from the ZC axis direction may be a triangle.
  • the inner surface of the opening 31bC includes a pair of inclined surfaces SLC and a reference surface SRC.
  • the one ends SLaC of the inclined surfaces SLC are connected to each other.
  • the movable mirror 5C can be positioned in both the XC-axis direction and the YC-axis direction by inscribed the locking portion 55C at the corner defined by the inclined surface SLC and the reference surface SRC.
  • the shape of the opening 31bC when viewed from the ZC axis direction is a hexagon.
  • the inner surface of the opening 31bC includes a pair of inclined surfaces SLC and a pair of inclined surfaces SKC inclined to the opposite side of the inclined surface SLC.
  • the pair of inclined surfaces SKC are inclined so that the distance from one end SkaC to the other end SKbC increases.
  • the other end SLbC of the inclined surface SLC and the other end SKbC of the inclined surface SKC are connected to each other to form one corner.
  • the movable mirror 5C can be positioned in both the XC-axis direction and the YC-axis direction by the engagement portion 55C being inscribed at the corner defined by the inclined surface SLC and the inclined surface SKC.
  • one locking portion 55C contacts the inner surface of the opening 31bC at two points.
  • the inclined surface SLC may be a curved surface.
  • the pair of inclined surfaces SLC are inclined and curved so that the distance increases from one end SLaC to the other end SLbC.
  • the inclined surface SLC is curved such that the inclination of the tangent to the inclined surface SLC with respect to the XC axis gradually increases from one end SLaC to the other end SLbC.
  • the inclined surface SLC is curved so as to be convex toward the inside of the opening 31bC. Even in this case, the movable mirror 5C can be positioned in both the XC-axis direction and the YC-axis direction by inscribed in the corners defined by the inclined surface SLC and the reference surface SRC. is there.
  • both the inclined surface SLC and the inclined surface SKC are curved surfaces that are convex toward the inside of the opening 31bC.
  • the other end SLbC of the inclined surface SLC and the other end SKbC of the inclined surface SKC are connected to each other via a connection surface extending along the XC axis direction.
  • the movable mirror 5C can be positioned in both the XC-axis direction and the YC-axis direction by the engagement portion 55C being inscribed at the corner defined by the inclined surface SLC and the inclined surface SKC.
  • the opening 31bC is divided into two portions 31pC as viewed from the ZC axis direction.
  • Each of the two portions 31pC has an inclined surface SLC and a reference surface SRC. That is, here, the reference plane SRC is also divided into two parts.
  • the reference surface SRC as a whole is connected to the other end SLbC of the inclined surface SLC of the one portion 31pC and the other end SLbC of the inclined surface SLC of the other portion 31pC. It extends along.
  • one locking portion 55C is inserted into one portion 31pC of the opening 31bC.
  • the engaging portion 55C is inscribed in the corner defined by the inclined surface SLC and the reference surface SRC, so that the movable mirror 5C can be positioned in both the XC axis direction and the YC axis direction.
  • the opening 31bC is divided into two portions 31pC as viewed from the ZC axis direction.
  • Each of the two portions 31pC has an inclined surface SLC and an inclined surface SKC.
  • the movable mirror 5C can be positioned in both the XC-axis direction and the YC-axis direction by the engagement portion 55C being inscribed at the corner defined by the inclined surface SLC and the inclined surface SKC.
  • the shape of the opening 31bC when viewed from the ZC axis direction is a rhombus.
  • the inner surface of the opening 31bC may be constituted by the inclined surface SLC and the inclined surface SKC. That is, here, in addition to the inclined surface SLC and the inclined surface SKC being connected to each other, the one ends SLaC of the inclined surfaces SLC are connected to each other, and the one ends SkaC of the inclined surfaces SKC are connected to each other.
  • the movable mirror 5C can be positioned in both the XC-axis direction and the YC-axis direction by the engagement portion 55C being inscribed at the corner defined by the inclined surface SLC and the inclined surface SKC.
  • the other end SLbC of the inclined surface SLC and the other end SKbC of the inclined surface SKC are connected to each other via a connecting surface extending along the XC axis direction.
  • the one ends SLaC of the inclined surfaces SLC are connected to each other, and the one ends SkaC of the inclined surfaces SKC are connected to each other.
  • the movable mirror 5C can be positioned in both the XC-axis direction and the YC-axis direction by the engagement portion 55C being inscribed at the corner defined by the inclined surface SLC and the inclined surface SKC.
  • the side surface of the locking portion 55C contacts the inner surface of the opening 31bC, such as the contact between the side surface of the locking portion 55C and the reference surface SRC of the opening 31bC, the side surface of the locking portion 55C. Can be used for bonding as the contact portion 58C.
  • the elastic part 52C is elastically deformed so as to compress it along the direction in which the support part 56C opposes, thereby reducing the interval between the support parts 56C, and then the locking part 55C into the opening 31bC.
  • the case of inserting was illustrated.
  • the support portion 56C includes a leg portion 54C, a locking portion 55C, and a contact portion 58C, but the bending direction of the locking portion 55C is different from the example of FIG.
  • the locking portion 55C is bent so as to protrude toward the opposite side in the opposing direction between the pair of support portions 56C.
  • the locking portion 55C includes an inclined surface 55aC and an inclined surface 55bC as surfaces (inner surfaces) facing each other between the pair of support portions 56C.
  • the inclined surfaces 55aC are inclined so as to be separated from each other in a direction away from the connecting portion 57C (ZC axis negative direction). Further, the inclined surfaces 55bC are inclined so as to approach each other in the negative direction of the ZC axis.
  • the absolute value of the tilt angle with respect to each ZC axis is the same as in the above example.
  • a handle portion 56hC is provided for each of the support portions 56C.
  • the handle portion 56hC is disposed so as to sandwich the mirror portion 51C and the elastic portion 52C in the YC axis direction.
  • the handle portion 56hC and the connecting portion 57C are arranged in a line on the center line CLC.
  • the handle portion 56hC is U-shaped, and a hole 56sC is formed between the handle portion 56C and the support portion 56C. Therefore, for example, by inserting an arm into the hole 56sC, a force can be applied to the handle portion 56hC so as to increase the interval between the support portions 56C.
  • the handle portion 56hC is formed in a straight line. Therefore, by picking the handle portion 56hC, it is possible to apply a force to the handle portion 56hC so as to increase the interval between the support portions 56C.
  • the elastic portion 52C is elastically deformed so as to be extended in the YC axis direction.
  • the opening 31bC can be deformed as shown in FIG.
  • the opening 31bC is divided into two triangular portions 31pC.
  • the movable mirror 5C shown in FIG. 53 when a part of the elastic deformation of the elastic portion 52C is released in a state where the locking portion 55C is inserted into the opening 31bC, the locking portions 55C are displaced so as to approach each other.
  • an inclined surface SLC is formed as a surface on the center side of the mounting region 31C in the YC axis direction.
  • the inclined surface SLC includes one end SLaC and the other end SLbC.
  • One end SLaC and the other end SLbC are both ends of the inclined surface SLC when viewed from the ZC axis direction.
  • the pair of inclined surfaces SLC are inclined (for example, with respect to the XC axis) such that the distance from one end SLaC to the other end SLbC decreases.
  • the reference surface SRC of each portion 31pC extends along a reference line BLC that connects the other end SLbC of one inclined surface SLC and the other end SLbC of the other inclined surface SLC, as viewed from the ZC axis direction. Yes.
  • the locking portions 55C slide on the inclined surface SLC toward the reference surface SRC by the XC-axis direction component of the reaction force from the inclined surface SLC.
  • the locking portion 55C is inscribed in the corner defined by the inclined surface SLC and the reference surface SRC, and is positioned in both the XC axis direction and the YC axis direction (self-aligned by elastic force).
  • the opening 31bC is divided into two rhombus portions 31pC.
  • an inclined surface SLC and an inclined surface SKC are formed as a pair of surfaces on the center side of the mounting region 31C in the YC axis direction.
  • the inclined surface SLC and the inclined surface SKC are inclined to the opposite side.
  • the inclined surfaces SKC are inclined so that the mutual distance decreases from one end SkaC to the other end SKbC.
  • the other end SLbC of the inclined surface SLC and the other end SKbC of the inclined surface SKC are connected to each other to form one corner.
  • the engaging portion 55C is inscribed in the corner portion defined by the inclined surface SLC and the inclined surface SKC, so that it is positioned in both the XC axis direction and the YC axis direction (self-alignment is performed by elastic force). )
  • the contact portion 58C may include both a protruding portion branched from the locking portion 55C and a side surface facing the inner surface of the opening 31bC in the locking portion 55C.
  • the movable mirror 5C can be bonded to the mounting region 31C on both the protruding portion and the side surface of the locking portion 55C.
  • the movable mirrors 5C and 5AC and the opening 31bC may be another modified example configured by exchanging arbitrary portions of the above-described modified examples. The same applies to the fixed mirror 6C and the opening 37aC.
  • the movable mirror and the fixed mirror were illustrated as an optical element mounted in base BC.
  • the optical surface is a mirror surface.
  • the optical element to be mounted is not limited to a mirror, and may be an arbitrary element such as a grating or an optical filter.
  • the shapes of the mirror portions 51C and 61C and the mirror surfaces 51aC and 61aC are not limited to a circle, and may be a rectangle or other shapes. Further, the elastic portion 52C may not form the annular region CAC.
  • the above third embodiment will be additionally described below.
  • An optical module comprising an optical element and a base on which the optical element is mounted, The optical element has an optical part having an optical surface, an elastic part provided around the optical part, an elastic force is applied according to elastic deformation of the elastic part, and a mutual distance is variable.
  • the base has a main surface and a mounting region provided with an opening communicating with the main surface;
  • the support portion includes a locking portion that is inserted into the opening when the elastic force of the elastic portion is applied, and a contact portion that contacts the mounting region when the locking portion is inserted into the opening.
  • the optical element is supported by the mounting region by a reaction force of the elastic force applied from the inner surface of the opening to the locking portion in a state where the optical surface intersects the main surface, and the contact portion In the mounting area, Optical module.
  • the support portion includes a protruding portion that protrudes toward the base side while branching from the locking portion, The contact portion includes a tip portion of the protruding portion, The optical module according to appendix 14.
  • the contact portion includes a side surface facing the inner surface of the opening in the locking portion.
  • the base includes a support layer, and a device layer provided on the support layer and including the main surface and the mounting region, The opening passes through the device layer in a direction intersecting the main surface, The locking portion is bent so as to contact a pair of edges of the opening in a direction intersecting the main surface.
  • the optical module according to any one of appendices 14 to 16.
  • the inner surface of the opening has a pair of inclined surfaces inclined so that the distance from one end to the other end increases as viewed from the direction intersecting the main surface, and the other end and the other of the one inclined surface A reference surface extending along a reference line connecting the other end of the inclined surface, and The contact portion includes a side surface facing the reference surface in the locking portion, 18.
  • the optical module according to any one of appendices 14 to 17.
  • a fixed mirror mounted on at least one of the support layer, the device layer, and an intermediate layer provided between the support layer and the device layer;
  • a beam splitter mounted on at least one of the support layer, the device layer, and the intermediate layer, and
  • the optical element is a movable mirror including the optical surface which is a mirror surface;
  • the device layer has a drive region connected to the mounting region,
  • the movable mirror, the fixed mirror, and the beam splitter are arranged to constitute an interference optical system,
  • the optical module according to appendix 17.
  • the base has the intermediate layer provided between the support layer and the device layer,
  • the support layer is a first silicon layer of an SOI substrate;
  • the device layer is a second silicon layer of the SOI substrate;
  • the intermediate layer is an insulating layer of the SOI substrate.
  • a light incident portion arranged to allow measurement light to be incident on the interference optical system from the outside;
  • a light emitting portion arranged to emit the measurement light to the outside from the interference optical system; Comprising The optical module according to appendix 19 or 20.
  • optical module according to the first embodiment, the optical module according to the second embodiment, and the optical module according to the third embodiment described above are configured to add and / or replace each arbitrary element. Can be changed.
  • An optical module in which a movable mirror is reliably mounted on the device layer can be provided.

Landscapes

  • Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Biochemistry (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Health & Medical Sciences (AREA)
  • General Health & Medical Sciences (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Engineering & Computer Science (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Mechanical Light Control Or Optical Switches (AREA)
  • Micromachines (AREA)

Abstract

Ce module optique est pourvu d'une couche de support (2A), d'une couche de dispositif (3A) disposée sur la couche de support (2A), et d'un miroir mobile (5A) monté dans la couche de dispositif (3A). La couche de dispositif (3A) présente une zone de montage (31A) à travers laquelle passe le miroir mobile (5A), et une zone d'entraînement (32A) qui est reliée à la zone de montage (31A). Entre la couche de support (2A) et la couche de dispositif (3A), un espace (S1A) est formé qui correspond à au moins la région de montage (31A) et la région de dispositif (32A), et une partie du miroir mobile (5A) est positionnée dans l'espace (S1A).
PCT/JP2018/009992 2017-03-14 2018-03-14 Module optique WO2018168935A1 (fr)

Priority Applications (3)

Application Number Priority Date Filing Date Title
US16/492,691 US11513339B2 (en) 2017-03-14 2018-03-14 Optical module
CN201880017386.3A CN110418994B (zh) 2017-03-14 2018-03-14 光模块
DE112018001349.9T DE112018001349T5 (de) 2017-03-14 2018-03-14 Optisches Modul

Applications Claiming Priority (6)

Application Number Priority Date Filing Date Title
JP2017048561 2017-03-14
JP2017-048561 2017-03-14
JP2017-048566 2017-03-14
JP2017048566A JP6793066B2 (ja) 2017-03-14 2017-03-14 光モジュール
JP2017-074492 2017-04-04
JP2017074492A JP6716491B2 (ja) 2017-03-14 2017-04-04 光モジュール

Publications (1)

Publication Number Publication Date
WO2018168935A1 true WO2018168935A1 (fr) 2018-09-20

Family

ID=63522318

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/JP2018/009992 WO2018168935A1 (fr) 2017-03-14 2018-03-14 Module optique

Country Status (2)

Country Link
CN (1) CN110418994B (fr)
WO (1) WO2018168935A1 (fr)

Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2004082288A (ja) * 2002-08-27 2004-03-18 Matsushita Electric Works Ltd 静電型アクチュエータ及びそれを用いた光スイッチ
JP2006102934A (ja) * 2004-09-29 2006-04-20 Lucent Technol Inc 適応光学装置で使用するための傾斜またはピストン運動を有するｍｅｍｓミラー
JP2010184334A (ja) * 2009-02-13 2010-08-26 Fujitsu Ltd マイクロ可動素子および光干渉計
JP2010286609A (ja) * 2009-06-10 2010-12-24 Sony Corp ミラー構造体
JP2012524295A (ja) * 2009-04-17 2012-10-11 シーウェア システムズ 光ｍｅｍｓ用途のためのオプトメカニカル光路遅延乗算器
JP2012240129A (ja) * 2011-05-16 2012-12-10 Hamamatsu Photonics Kk 光モジュール及びその製造方法
JP2012242450A (ja) * 2011-05-16 2012-12-10 Hamamatsu Photonics Kk 光学部品の製造方法及び光学部品
US20140192365A1 (en) * 2013-01-07 2014-07-10 Si-Ware Systems Spatial splitting-based optical mems interferometers

Family Cites Families (25)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6330102B1 (en) * 2000-03-24 2001-12-11 Onix Microsystems Apparatus and method for 2-dimensional steered-beam NxM optical switch using single-axis mirror arrays and relay optics
JP3952902B2 (ja) * 2002-08-09 2007-08-01 住友電気工業株式会社 光スイッチ、光分岐挿入装置、光伝送システム及び光スイッチの製造方法
JP4416117B2 (ja) * 2004-04-19 2010-02-17 株式会社リコー 偏向ミラー、光走査装置及び画像形成装置
EP1835324A4 (fr) * 2005-01-05 2010-02-17 Nippon Telegraph & Telephone Dispositif de miroir, reseau de miroirs, commutateur optique, procede de fabrication de dispositif de miroir et de substrat de miroir
KR100699858B1 (ko) * 2005-08-03 2007-03-27 삼성전자주식회사 극자외선 리소그래피용 반사 디바이스 및 그 제조 방법 및이를 적용한 극자외선 리소그래피용 마스크, 프로젝션광학계 및 리소그래피 장치
WO2008084520A1 (fr) * 2006-12-28 2008-07-17 Nikon Corporation Dispositif optique, appareil de génération de motif, procédé de génération de motif, appareil d'exposition, procédé d'exposition et procédé de fabrication de dispositif
JP2010107628A (ja) * 2008-10-29 2010-05-13 Topcon Corp Ｍｅｍｓ走査型ミラー及びその製造方法
JP5302020B2 (ja) * 2009-01-26 2013-10-02 浜松ホトニクス株式会社 光モジュール
JP5577742B2 (ja) * 2010-02-23 2014-08-27 セイコーエプソン株式会社 光スキャナーおよび画像形成装置
WO2012002101A1 (fr) * 2010-06-29 2012-01-05 コニカミノルタホールディングス株式会社 Interféromètre et spectrophotomètre à transformée de fourier
US9036231B2 (en) * 2010-10-20 2015-05-19 Tiansheng ZHOU Micro-electro-mechanical systems micromirrors and micromirror arrays
KR101912093B1 (ko) * 2010-10-29 2018-10-26 삼성전자 주식회사 광학 장치
JP2012215691A (ja) * 2011-03-31 2012-11-08 Furukawa Electric Co Ltd:The Ｍｅｍｓ素子、光スイッチ装置およびディスプレイ装置、ならびにｍｅｍｓ素子の製造方法
JP2013003560A (ja) * 2011-06-22 2013-01-07 Hitachi Media Electoronics Co Ltd ミラーデバイス
JP2013105516A (ja) * 2011-11-16 2013-05-30 Sanyo Electric Co Ltd 光学素子用のホルダ、光学素子ユニットおよび光ピックアップ装置
JP5926610B2 (ja) * 2012-05-18 2016-05-25 浜松ホトニクス株式会社 分光センサ
JP2014055871A (ja) * 2012-09-13 2014-03-27 Seiko Epson Corp 検出素子、検出モジュール、撮像デバイス、検出撮像モジュール、電子機器、テラヘルツカメラ
JP2014192365A (ja) * 2013-03-27 2014-10-06 Jm Energy Corp 蓄電デバイス
DE102013104410A1 (de) * 2013-04-30 2014-10-30 Scansonic Mi Gmbh Scannervorrichtung
CN104216107B (zh) * 2013-05-31 2017-02-08 中芯国际集成电路制造(上海)有限公司 单像素结构，包括其的数字微镜器件以及它们的制备方法
DE102013223933B4 (de) * 2013-11-22 2021-12-02 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Resonanz-Mikrospiegelanordnung
JP6356427B2 (ja) * 2014-02-13 2018-07-11 浜松ホトニクス株式会社 ファブリペロー干渉フィルタ
CN105552125A (zh) * 2014-10-31 2016-05-04 财团法人工业技术研究院 半导体结构及其制造方法
JP6565455B2 (ja) * 2015-08-05 2019-08-28 セイコーエプソン株式会社 光スキャナー、光スキャナーの製造方法、画像表示装置およびヘッドマウントディスプレイ
JP2017040700A (ja) * 2015-08-18 2017-02-23 セイコーエプソン株式会社 光スキャナー、画像表示装置およびヘッドマウントディスプレイ

Patent Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2004082288A (ja) * 2002-08-27 2004-03-18 Matsushita Electric Works Ltd 静電型アクチュエータ及びそれを用いた光スイッチ
JP2006102934A (ja) * 2004-09-29 2006-04-20 Lucent Technol Inc 適応光学装置で使用するための傾斜またはピストン運動を有するｍｅｍｓミラー
JP2010184334A (ja) * 2009-02-13 2010-08-26 Fujitsu Ltd マイクロ可動素子および光干渉計
JP2012524295A (ja) * 2009-04-17 2012-10-11 シーウェア システムズ 光ｍｅｍｓ用途のためのオプトメカニカル光路遅延乗算器
JP2010286609A (ja) * 2009-06-10 2010-12-24 Sony Corp ミラー構造体
JP2012240129A (ja) * 2011-05-16 2012-12-10 Hamamatsu Photonics Kk 光モジュール及びその製造方法
JP2012242450A (ja) * 2011-05-16 2012-12-10 Hamamatsu Photonics Kk 光学部品の製造方法及び光学部品
US20140192365A1 (en) * 2013-01-07 2014-07-10 Si-Ware Systems Spatial splitting-based optical mems interferometers

Also Published As

Publication number Publication date
CN110418994B (zh) 2022-04-19
CN110418994A (zh) 2019-11-05

Similar Documents

Publication Publication Date Title
US11187579B2 (en) Optical device
JP4073886B2 (ja) 可変波長光源
JP6716491B2 (ja) 光モジュール
WO2018168935A1 (fr) Module optique
EP3650911B1 (fr) Dispositif optique
CN110392858B (zh) 光模块
US11513339B2 (en) Optical module
WO2018168927A1 (fr) Module de lumière
JP2012026935A (ja) センサ装置
JP6793066B2 (ja) 光モジュール
JP2018151551A (ja) 光モジュール
WO2018168929A1 (fr) Module optique
JP6814076B2 (ja) 光モジュール
JP2009139546A (ja) 可変波長光源
EP3650917A1 (fr) Dispositif optique
JP4763667B2 (ja) 光伝送媒体固定用の溝及び光デバイス
JP2006251710A (ja) 光スイッチ
WO2018180786A1 (fr) Composant optique et connecteur optique et module optique les comprenant
JP2010219315A (ja) 波長掃引光源
JPH03260613A (ja) 光スイッチ

Legal Events

Date Code Title Description
121 Ep: the epo has been informed by wipo that ep was designated in this application

Ref document number: 18768648

Country of ref document: EP

Kind code of ref document: A1

122 Ep: pct application non-entry in european phase

Ref document number: 18768648

Country of ref document: EP

Kind code of ref document: A1